Demolding device, hard mold demolding method and soft mold demolding method

Abstract

The invention relates to a demolding device, a hard mold demolding method and a soft mold demolding method. The demolding device comprises a downloading platform which comprises a downloading panel, a lower vacuum adsorption panel used for adsorbing a hard mold and at least one pair of pressing blocks used for pressing a soft mold; the upper loading platform comprises an upper loading panel and an upper vacuum adsorption panel used for adsorbing the base material, and the upper loading panel is rotatably connected to the lower loading panel; the jacking assembly is used for jacking the loading panel to open the loading table; the blade assembly comprises a double-shaft translation assembly installed on the uploading panel and a blade arranged on the double-shaft translation assembly, the demolding device can be suitable for demolding of a soft mold and a hard mold at the same time, and the problem of fracture deformation existing in a traditional soft mold demolding method can be avoided; and the adhesive force between the mold and the base material can be eliminated, the problem that the mold or the base material is damaged in a traditional hard mold demolding method is solved, and the demolding quality is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of nanoimprinting, and in particular to a demoulding device, a hard mold demoulding method and a soft mold demoulding method. Background Art

[0002] Nanoimprint technology is a technology that applies the traditional mold replication principle to the field of micro-manufacturing. Demolding is an important step in nanoimprint technology. Demolding is the process of separating the mold from the waveguide material or other imprinted materials. The current nanoimprint technology can be classified according to the hardness of the mold, including soft mold nanoimprint and hard mold nanoimprint.

[0003] The demolding of soft mold nanoimprinting usually uses a roller to roll up the soft mold to separate the soft mold and the substrate. During the rolling process, the pattern on the soft mold may be stretched or compressed, resulting in deformation or distortion of the pattern. Different soft mold materials have different adaptability to roller demolding, and some materials may crack or deform during the rolling process.

[0004] Hard mold nanoimprinting generally uses molds made of hard materials such as silicon or quartz. Currently, the demolding of hard mold nanoimprinting usually uses tools or equipment to apply external force to the mold and the substrate to separate them. During the separation process, the demolding speed needs to be controlled. Too fast a demolding speed may cause damage to the mold or substrate due to excessive adhesion between the mold and the substrate, and even destroy the formed nanostructure. Summary of the invention

[0005] Based on this, it is necessary to provide a demolding device, a hard mold demolding method and a soft mold demolding method to address the problem that the current demolding methods for soft and hard molds of nanoimprinting are prone to damage the mold and the substrate.

[0006] A demoulding device, comprising:

[0007] The unloading platform comprises a unloading panel, a lower vacuum adsorption panel fixedly arranged on the unloading panel and used for adsorbing the hard mold, and at least one pair of pressing blocks detachably arranged on both sides of the lower vacuum adsorption panel and used for pressing the soft mold;

[0008] An upper loading platform, the upper loading platform comprising an upper loading panel and an upper vacuum adsorption panel fixed to the upper loading panel and used for adsorbing the substrate, one side of the upper loading panel being rotatably connected to the unloading panel;

[0009] A lifting component, the lifting component is fixed to the unloading platform, and the lifting component abuts against the upload panel to lift the upload panel; and

[0010] The adhesion eliminating component is fixedly arranged on the upper loading panel and is used for generating a gap between the hard mold and the substrate to eliminate the adhesion between the hard mold and the substrate.

[0011] In one embodiment, the adhesion elimination component is a blade component, which includes a dual-axis translation component installed on the upload panel and a blade arranged on the dual-axis translation component and located between the upload panel and the download panel.

[0012] In one embodiment, the downloading platform includes a pair of electromagnets fixed to the downloading panel and arranged on both sides of the lower vacuum adsorption panel, and the pressing block is a long strip of metal block, and the metal block is adsorbed on the electromagnets.

[0013] In one of the embodiments, the loading panel is provided with a pair of avoidance grooves, the positions of the avoidance grooves correspond to the positions of the metal blocks, and when the loading platform is closed, the metal blocks are respectively located in the avoidance grooves.

[0014] In one of the embodiments, the upper vacuum adsorption panel and / or the lower vacuum adsorption panel are both provided with a plurality of concentrically arranged adsorption grooves, and the adsorption grooves include a plurality of vacuum areas that are not connected to each other.

[0015] In one embodiment, a pair of waist-shaped holes are arranged at intervals on the side of the download panel, and the waist-shaped holes extend in the up and down directions. The upper loading platform includes a rotating shaft arranged on one side of the upper loading panel, and the rotating shaft is rotatably arranged on the waist-shaped holes.

[0016] In one embodiment, the loading platform further includes a handle, and the handle is fixedly disposed on a side of the loading panel away from the download panel.

[0017] In one of the embodiments, the demoulding device further includes an operation panel arranged on the unloading platform, and the operation panel is electrically connected to the upper vacuum adsorption panel, the lower vacuum adsorption panel, the lifting component and the adhesion elimination component respectively.

[0018] In one embodiment, the demoulding device further includes a support arm, which is fixed to the unloading platform and extends from a side where the unloading panel and the loading panel are connected to the outside of the unloading platform.

[0019] In one of the embodiments, a shock absorbing seat is provided at one end of the support arm away from the downloading platform.

[0020] A hard mold demoulding method comprises the steps of:

[0021] Placing the hard mold with the substrate on the lower vacuum adsorption panel of the unloading platform;

[0022] The upper stage is closed so that the lower vacuum adsorption panel adsorbs the hard mold and the upper vacuum adsorption panel adsorbs the substrate;

[0023] Eliminate adhesion between the hard mold and the substrate through adhesion elimination components;

[0024] The upper stage is lifted up by the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the hard mold.

[0025] A soft mold demoulding method comprises the following steps:

[0026] Placing the soft mold with the substrate on the lower vacuum adsorption panel of the unloading platform;

[0027] Press the soft mold onto the download panel of the download platform through the pressing block;

[0028] Closing the upper stage so that the upper vacuum adsorption panel adsorbs the substrate;

[0029] The upper stage is lifted up by the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the soft mold.

[0030] The demoulding device of the present application can be applied to the demoulding of both soft molds and hard molds. In the process of demoulding the soft mold, the soft mold can be pressed by the pressing block to prevent the pattern on the soft mold from being stretched or compressed, thereby effectively reducing the problem of pattern distortion caused by the cracking and deformation of the soft mold, and ensuring the quality of demoulding the soft mold. In the process of demoulding the hard mold, the adhesion between the hard mold and the substrate is eliminated by the blade, and the damage to the hard mold or the substrate caused by excessive adhesion during demoulding can be avoided, so as to protect the formed nanostructure and ensure the quality of demoulding the hard mold. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A three-dimensional schematic diagram of a demoulding device provided in one embodiment of the present application;

[0032] Figure 2 A schematic diagram of the demoulding and closing of a hard mold of the demoulding device according to the above embodiment of the present application is shown;

[0033] Figure 3 A schematic diagram of hard mold demoulding of a demoulding device according to the above embodiment of the present application is shown;

[0034] Figure 4 A schematic diagram of the soft mold demoulding and closing of the demoulding device according to the above embodiment of the present application is shown;

[0035] Figure 5 A schematic diagram of soft mold demoulding of the demoulding device according to the above embodiment of the present application is shown;

[0036] Figure 6 A schematic diagram of the steps of the hard mold demoulding method provided in this application;

[0037] Figure 7 A schematic diagram of the steps of the soft mold demolding method provided in this application.

[0038] Attached figures: 10, download platform; 11, download panel; 111, waist-shaped hole; 12, lower vacuum adsorption panel; 13, pressing block; 20, upper loading platform; 21, upper loading panel; 211, avoidance groove; 22, upper vacuum adsorption panel; 23, rotating shaft; 24, handle; 30, lifting assembly; 40, blade assembly; 41, dual-axis translation assembly; 42, blade; 51, support arm; 52, shock-absorbing seat; 60, operation panel; 70, substrate; 80, hard mold; 90, soft mold. DETAILED DESCRIPTION

[0039] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0040] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0041] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0042] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0044] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0045] Based on the problem that the current demoulding methods for soft and hard molds of nanoimprinting are prone to damage to the mold and substrate, the present application provides a demoulding device. The demoulding device can be used for demoulding of both soft and hard molds, and can avoid the cracking and deformation problems existing in the traditional demoulding methods for soft molds; it can also eliminate the adhesion between the mold and the substrate, avoid the problem of damage to the mold or substrate existing in the traditional demoulding methods for hard molds, and ensure the demoulding quality.

[0046] For details, please refer to Figure 1In some embodiments, the demoulding device of the present application may include a download platform 10, an upper platform 20, a lifting assembly 30, and an adhesion elimination assembly. The download platform 10 includes a download panel 11, a lower vacuum adsorption panel 12, and at least one pair of pressing blocks 13. The lower vacuum adsorption panel 12 is fixed to the download panel 11 for adsorbing the hard mold 80. The pressing blocks 13 are detachably arranged on both sides of the lower vacuum adsorption panel 12 for pressing the soft mold 90. The upper platform 20 includes an upper loading panel 21 and an upper vacuum adsorption panel 22. The upper vacuum adsorption panel 22 is fixed to the upper loading panel 21 for adsorbing the substrate 70. One side of the upper loading panel 21 is rotatably connected to the download panel 11, so that the upper loading platform 20 can be opened or closed. The lifting component 30 is fixed on the unloading platform 10, and the lifting component 30 is abutted against the upload panel 21. The lifting component 30 can lift up the upload panel 21 to open the upload platform 20; the adhesion elimination component is fixed on the upload panel 21, and is used to create a gap between the hard mold 80 and the substrate 70 to eliminate the adhesion between the hard mold 80 and the substrate 70.

[0047] It is understandable that the demoulding device of the present application can be applied to demoulding of both soft molds and hard molds. Figure 2 and Figure 3 As shown, when the hard mold needs to be demolded, the hard mold 80 with the substrate 70 can be placed on the lower vacuum adsorption panel 12, and the upper loading panel 21 is rotated to close the upper loading platform 20. The hard mold 80 is then adsorbed by the lower vacuum adsorption panel 12, and the substrate 70 is adsorbed by the upper vacuum adsorption panel 22. The adhesion between the hard mold 80 and the substrate 70 is then eliminated by the adhesion elimination component. Finally, the upper loading panel 21 is lifted up by the lifting component 30 to separate the substrate 70 from the hard mold 80, thereby achieving demolding of the hard mold. In the process of demolding the hard mold, the adhesion between the hard mold 80 and the substrate 70 is eliminated by the adhesion elimination component, so as to avoid damage to the hard mold 80 or the substrate 70 caused by excessive adhesion during demolding, thereby protecting the formed nanostructure and ensuring the quality of demolding of the hard mold. Figure 4 and Figure 5 As shown, when the soft mold needs to be demolded, the soft mold 90 with the substrate 70 can be placed on the lower vacuum adsorption panel 12, and then the soft mold 90 can be pressed by the pressing block 13, and then the upper loading panel 21 is rotated and the upper loading platform 20 is closed, so that the upper vacuum adsorption panel 22 adsorbs the substrate 70; finally, the upper loading panel 21 is lifted up by the lifting assembly 30, and the soft mold 90 is pressed by the pressing block 13, so that the substrate 70 is separated from the soft mold 90, and the soft mold is demolded. In the process of soft mold demolding, the soft mold 90 is pressed by the pressing block 13, which can prevent the pattern on the soft mold 90 from being stretched or compressed, thereby effectively reducing the problem of pattern distortion caused by the rupture and deformation of the soft mold 90, and ensuring the quality of soft mold demolding.

[0048] Optionally, in some embodiments, the adhesion elimination component can be implemented as a blade component 40, the blade component 40 includes a dual-axis translation component 41 and a blade 42, the dual-axis translation component 41 is fixed to the upload panel 21, the blade 42 is arranged in the dual-axis translation component 41, and the blade 42 is movably arranged between the upload panel 21 and the download panel 11, when the upload panel 21 is closed, the blade 42 can be driven by the dual-axis translation component 41 to translate in the up-down direction and the in-outward direction. When the hard mold is demolded, the dual-axis translation component 41 can drive the blade 42 to insert between the hard mold 80 and the substrate 70, so that a gap is generated between the hard mold 80 and the substrate 70, thereby eliminating the adhesion between the hard mold 80 and the substrate 70 applied by the vacuum effect.

[0049] Optionally, in some embodiments, the adhesion elimination component can be implemented as a blowing component, which is disposed between the upper loading panel 21 and the lower loading panel 11. When the hard mold is demolded, the upper loading panel 21 can be lifted up by the lifting component 30 to partially lift the substrate 70, and then the blowing component is used to blow air between the hard mold 80 and the substrate 70, thereby eliminating the adhesion between the hard mold 80 and the substrate 70.

[0050] Alternatively, if Figure 4 and Figure 5 As shown, in some embodiments, the clamping block 13 of the present application can be implemented as a long strip of metal block, which can be used to clamp one side of the soft mold 90 respectively. The downloading platform 10 includes a pair of electromagnets, which are fixed to the downloading panel 11 and arranged on both sides of the positive air adsorption panel. The metal block has ferromagnetism and can be adsorbed by the electromagnet. In this way, when the soft mold is demolded, the metal block can be adsorbed by the electromagnet to fix the soft mold 90 to the downloading panel 11. The characteristics of the electromagnet generating magnetic force when it is powered on and eliminating the magnetic force when it is powered off can realize free control of the adsorption of the metal block to improve the efficiency of loading or removing the soft mold 90.

[0051] Preferably, if Figure 4 and Figure 5 As shown, in some embodiments, the upload panel 21 of the present application is provided with a pair of avoidance grooves 211, the positions of the avoidance grooves 211 correspond to the positions of the metal blocks, and when the upper loading platform 20 is closed, the metal blocks are respectively located in the avoidance grooves 211. In this way, the metal blocks are accommodated by the avoidance grooves 211, so that when the upper loading platform 20 is closed, the upload panel 21 and the download panel 11 can be kept in close contact.

[0052] Optionally, in some embodiments, the lifting assembly 30 may be implemented as a lifting motor or a lifting cylinder.

[0053] Optionally, in some embodiments, the dual-axis translation assembly 41 may be implemented as an XZ-axis electric translation stage, wherein the Z-axis is along the up-down direction and the X-axis is along the inside-out direction.

[0054] Alternatively, if Figure 1 As shown, in some embodiments, the upper vacuum adsorption panel 22 and / or the lower vacuum adsorption panel 12 are provided with a plurality of concentrically arranged adsorption grooves, and the adsorption grooves include a plurality of vacuum areas that are not connected to each other, and each vacuum area can achieve vacuum adsorption through a separate vacuum air path. The diameter of the adsorption grooves can be 8 inches, 6 inches, 4 inches, etc., respectively, and corresponding adsorption grooves can be selected for adaptation to molds or substrates 70 of different sizes.

[0055] Alternatively, if Figure 2 and Figure 3 As shown, in some embodiments, the side of the download panel 11 is provided with a pair of waist-shaped holes 111 arranged at intervals, and the waist-shaped holes 111 extend in the up-down direction, and the upper loading platform 20 includes a rotating shaft 23 disposed on one side of the upper loading panel 21, and the rotating shaft 23 is rotatably disposed on the waist-shaped hole 111. In this way, when the jacking assembly 30 lifts the upper loading panel 21, through the cooperation of the waist-shaped holes 111 and the rotating shaft 23, the upper loading panel 21 can move upward while rotating, so as to facilitate the separation of the mold and the substrate 70 on the side of the rotating shaft 23.

[0056] Alternatively, if Figure 1 As shown, in some embodiments, the upper loading platform 20 further includes a handle 24, which can be fixed to the side of the upper loading panel 21 away from the connection with the downloading panel 11 by bolts, welding, etc. In this way, by operating the handle 24, the upper loading panel 21 can be driven to rotate, so that the upper loading platform 20 is closed or opened.

[0057] Optionally, in some embodiments, the demoulding device further includes an operation panel 60 disposed on the unloading platform 10, and the operation panel 60 is electrically connected to the upper vacuum adsorption panel 22, the lower vacuum adsorption panel 12, the lifting assembly 30 and the adhesion elimination assembly. By operating the operation panel 60, the upper vacuum adsorption panel 22, the lower vacuum adsorption panel 12, the lifting assembly 30 and the adhesion elimination assembly can be controlled to work respectively, so that the demoulding device can be centrally controlled.

[0058] Alternatively, if Figure 1As shown, in some embodiments, the demoulding device further includes a support arm 51, which is fixed to the unloading platform 10, and the support arm 51 extends from the side where the unloading panel 11 is connected to the loading panel 21 to the outside of the unloading platform 10. In other words, the support arm 51 is located in the rotation path when the loading platform 20 is opened. In this way, when the loading platform 20 is opened, the loading platform 20 can be supported by the support arm 51, so that the substrate 70 on the loading platform 20 and the mold on the unloading platform 10 can be removed.

[0059] Preferably, if Figure 1 As shown, in some embodiments, a shock absorbing seat 52 is provided at one end of the support arm 51 away from the unloading platform 10. The shock absorbing seat 52 can be used to absorb the impact generated when the upper loading platform 20 is opened and rotated to the support arm 51, so as to avoid collision between the upper loading platform 20 and the support arm 51.

[0060] Furthermore, in combination with the demolding device provided in the above-mentioned embodiments of the present application, the present application also provides a hard mold demolding method and a soft mold demolding method.

[0061] like Figure 6 As shown, the hard mold demoulding method may include the following steps:

[0062] S100, placing the hard mold with the substrate on the lower vacuum adsorption panel of the unloading platform;

[0063] S200, closing the upper stage so that the lower vacuum adsorption panel adsorbs the hard mold and the upper vacuum adsorption panel adsorbs the substrate;

[0064] S300, eliminating adhesion between the hard mold and the substrate through an adhesion elimination component;

[0065] S400, lifting the upper stage through the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the hard mold.

[0066] According to the above-mentioned hard mold demolding method, when using the demolding device of the present application to demold the hard mold, first according to step S100, the hard mold 80 with the substrate 70 can be placed on the vacuum adsorption panel of the unloading platform 10, and then according to step S200, the upper loading platform 20 is closed, so that the lower vacuum adsorption panel 12 adsorbs the hard mold 80, and the upper vacuum panel adsorbs the substrate 70, and then according to step S300, the adhesion elimination component is operated to generate a gap between the hard mold 80 and the substrate 70, and the adhesion generated by the vacuum between the hard mold 80 and the substrate 70 is eliminated. Finally, according to step S400, the lifting component 30 is operated to lift the upper loading platform 20, so that the upper vacuum adsorption panel 22 drives the substrate 70 to separate from the hard mold 80, thereby realizing the demolding of the hard mold.

[0067] like Figure 7 As shown, the soft mold demoulding method may include the following steps:

[0068] S500, placing the soft mold with the substrate on the lower vacuum adsorption panel of the unloading platform;

[0069] S600, pressing the soft mold onto the download panel of the download platform by means of a pressing block;

[0070] S700, closing the upper stage so that the upper vacuum adsorption panel adsorbs the substrate;

[0071] S800, lift up the upper stage through the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the soft mold.

[0072] According to the above-mentioned soft mold demolding method, when using the demolding device of the present application to demold the soft mold, the soft mold 90 with the substrate 70 can be placed on the vacuum adsorption panel of the unloading platform 10 according to step S500, and then according to step S600, the soft mold 90 is pressed by the clamping block 13, and then according to step S700, the upper loading platform 20 is closed to make the upper vacuum panel adsorb the substrate 70, and finally according to step S800, the lifting component 30 is operated to lift the upper loading platform 20, so that the upper vacuum adsorption panel 22 drives the substrate 70 to separate from the soft mold 90, thereby realizing the demolding of the soft mold.

[0073] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0074] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A demoulding device, characterized in that: include: The unloading platform comprises a unloading panel, a lower vacuum adsorption panel fixedly arranged on the unloading panel and used for adsorbing the hard mold, and at least one pair of pressing blocks detachably arranged on both sides of the lower vacuum adsorption panel and used for pressing the soft mold; An upper loading platform, the upper loading platform comprising an upper loading panel and an upper vacuum adsorption panel fixed to the upper loading panel and used for adsorbing the substrate, one side of the upper loading panel being rotatably connected to the unloading panel; A lifting component, the lifting component is fixedly mounted on the unloading platform and abuts against the uploading panel to lift up the uploading panel; as well as The adhesion eliminating component is fixedly arranged on the upper loading panel and is used for generating a gap between the hard mold and the substrate to eliminate the adhesion between the hard mold and the substrate.

2. The demoulding device according to claim 1, characterized in that: The adhesion elimination component is a blade component, which includes a dual-axis translation component installed on the upload panel and a blade arranged on the dual-axis translation component and located between the upload panel and the download panel.

3. The demoulding device according to claim 1, characterized in that: The downloading platform comprises a pair of electromagnets fixedly mounted on the downloading panel and arranged on both sides of the lower vacuum adsorption panel. The pressing block is a long strip of metal block adsorbed on the electromagnets.

4. The demoulding device according to claim 3, characterized in that: The loading panel is provided with a pair of avoidance grooves, the positions of the avoidance grooves correspond to the positions of the metal blocks, and when the loading platform is closed, the metal blocks are respectively located in the avoidance grooves.

5. The demoulding device according to any one of claims 1 to 4, characterized in that: The upper vacuum adsorption panel and / or the lower vacuum adsorption panel are both provided with a plurality of concentrically arranged adsorption grooves, and the adsorption grooves include a plurality of vacuum areas which are not connected to each other.

6. The demoulding device according to any one of claims 1 to 4, characterized in that: A pair of waist-shaped holes are arranged at intervals on the side of the download panel, and the waist-shaped holes extend in the up-down direction. The upper loading platform includes a rotating shaft arranged on one side of the upper loading panel, and the rotating shaft is rotatably arranged on the waist-shaped holes.

7. The demoulding device according to any one of claims 1 to 4, characterized in that: The loading platform further comprises a handle, and the handle is fixedly arranged on a side of the loading panel away from the loading panel.

8. The demoulding device according to claim 1, characterized in that: The demoulding device further includes an operation panel arranged on the unloading platform, and the operation panel is electrically connected to the upper vacuum adsorption panel, the lower vacuum adsorption panel, the lifting component and the adhesion elimination component respectively.

9. The demoulding device according to any one of claims 1 to 4, characterized in that: The demoulding device further comprises a supporting arm, which is fixed to the unloading platform and extends from a side where the unloading panel is connected to the loading panel to the outside of the unloading platform.

10. The demoulding device according to claim 9, characterized in that: A shock absorbing seat is provided at one end of the support arm away from the downloading platform.

11. A hard mold demoulding method, characterized in that: Includes steps: Placing the hard mold with the substrate on the lower vacuum adsorption panel of the unloading platform; The upper stage is closed so that the lower vacuum adsorption panel adsorbs the hard mold and the upper vacuum adsorption panel adsorbs the substrate; Eliminate adhesion between the hard mold and the substrate through adhesion elimination components; The upper stage is lifted up by the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the hard mold.

12. A soft mold demoulding method, characterized in that: Includes steps: Placing the soft mold with the substrate on the lower vacuum adsorption panel of the unloading platform; Press the soft mold onto the download panel of the download platform through the pressing block; Closing the upper stage so that the upper vacuum adsorption panel adsorbs the substrate; The upper stage is lifted up by the lifting assembly, so that the upper vacuum adsorption panel drives the substrate to separate from the soft mold.

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