Manufacturing equipment control system and manufacturing equipment control method

Abstract

The invention discloses a manufacturing equipment control system and a manufacturing equipment control method, and relates to the technical field of control, the manufacturing equipment control system comprises a plurality of equipment driving services and a process service cluster, and the process service cluster comprises a plurality of automatic process services; the equipment driving service is used for generating an event according to data in the manufacturing equipment and reporting the event to the process service cluster; the first service and the second service are used for performing asynchronous data interaction with an upper system for an event; the first service sends a transaction message to the upper system according to the event, and the second service performs response processing on a feedback message; the first service and the second service are two different automatic process services or the same automatic process service in the process service cluster, and the second service is an automatic process service which has message response processing capability and competes for feedback messages in the process service cluster. The manufacturing equipment control system with high availability and expansibility is realized, and the manufacturing and production stability of the equipment is improved.

Description

Technical Field

[0001] The present application relates to the field of control technology, and in particular to a manufacturing equipment control system and a manufacturing equipment control method. Background Art

[0002] In traditional semiconductor or pan-semiconductor manufacturing equipment control systems, an Equipment Automation Program (EAP) is used to control manufacturing equipment. Usually, many functions are integrated into one equipment control program. For example, equipment communication connection, equipment command control, upper system integrated control (such as cooperating with the upper system to achieve automatic entry and exit, automatic material comparison, automatic formula verification and issuance, automatic data collection, etc.), automatic stock retention for equipment abnormalities, etc. are integrated into one equipment control program.

[0003] Currently, semiconductor or pan-semiconductor equipment automation programs (EAPs) are limited by communication protocols. Usually, one equipment automation program (EAP) corresponds to one manufacturing device. Failure of any equipment automation program (EAP) will cause the connected manufacturing device to be unable to automate production.

[0004] Therefore, the current control systems for semiconductor or pan-semiconductor manufacturing equipment have problems with poor availability and scalability, resulting in poor equipment manufacturing production stability. Summary of the invention

[0005] The embodiment of the present application provides a solution that can realize a semiconductor or pan-semiconductor equipment control system with high availability and scalability, thereby improving the stability of equipment manufacturing production.

[0006] The embodiments of the present application provide the following technical solutions:

[0007] According to one embodiment of the present application, a manufacturing equipment control system includes: the manufacturing equipment control system includes multiple device driver services and process service clusters, the process service cluster includes multiple automated process services, each of the automated process services is connected to a host system, each of the device driver services is connected to the process service cluster, and each of the device driver services is connected to a manufacturing device respectively; each of the device driver services is used to: generate events according to data in the connected manufacturing equipment, and report the events to the process service cluster; a first service and a second service are used to: perform asynchronous data interaction with the host system for the events; the asynchronous data interaction refers to the first service sending a transaction message to the host system according to the event and the second service responding to the feedback message of the transaction message; wherein the first service and the second service are two different automated process services in the process service cluster or the same automated process service, and the second service is an automated process service in the process service cluster that has message response processing capability and competes for the feedback message.

[0008] In some embodiments of the present application, when the first service sends a transaction message to the upper system according to the event, the first service stores the business status data corresponding to the transaction message in a shared cache; after competing for the feedback message, the second service obtains the business status data from the shared cache, and responds to the corresponding business logic based on the feedback message and the business status data.

[0009] In some embodiments of the present application, when the first service sends a transaction message to the upper system according to the event, a reply duration is set in a timer; if no feedback message returned by the upper system is detected when the reply duration is reached, the timer publishes an exception message corresponding to the transaction message in the process service cluster; the third service executes abnormal business processing logic according to the abnormal message, and the third service is an automated process service in the process service cluster that has message response processing capabilities and competes for the abnormal message.

[0010] In some embodiments of the present application, each of the automated process services in the process service cluster interacts with the host system through a first message middleware.

[0011] In some embodiments of the present application, the first service is an automated process service in the process service cluster that has message response processing capability and competes for the transaction message.

[0012] In some embodiments of the present application, each of the automated process services and each of the device driver services in the process service cluster perform message interaction through the second message middleware.

[0013] In some embodiments of the present application, the multiple automated process services are distributedly deployed on multiple process servers.

[0014] In some embodiments of the present application, the multiple device driver services are distributedly deployed on multiple driver servers.

[0015] According to one embodiment of the present application, a manufacturing equipment control method is applicable to the manufacturing equipment control system described in the embodiment of the present application, and the method includes: generating an event according to the data in the connected manufacturing equipment through each of the device driver services, and reporting the event to the process service cluster; sending a transaction message to the upper system according to the event through the first service; and responding to the feedback message corresponding to the transaction message returned by the upper system through the second service.

[0016] In some embodiments of the present application, after sending the transaction message to the upper system according to the event through the first service, the method also includes: storing the business status data corresponding to the transaction message in a shared cache through the first service; correspondingly, responding to the feedback message corresponding to the transaction message returned by the upper system through the second service, including: obtaining the business status data from the shared cache after competing for the feedback message through the second service, and responding to the corresponding business logic according to the feedback message and the business status data.

[0017] In an embodiment of the present application, a manufacturing equipment control system includes multiple device driver services and process service clusters, and the process service cluster includes multiple automated process services, each of the automated process services is connected to a host system, each of the device driver services is connected to the process service cluster, and each of the device driver services is connected to a manufacturing device respectively; each of the device driver services is used to: generate events based on data in the connected manufacturing equipment, and report the events to the process service cluster; the first service and the second service are used to: perform asynchronous data interaction with the host system for the events; the asynchronous data interaction refers to the first service sending a transaction message to the host system according to the event and the second service responding to the feedback message of the transaction message; wherein the first service and the second service are two different automated process services in the process service cluster or the same automated process service, and the second service is an automated process service in the process service cluster that has message response processing capabilities and competes for the feedback message.

[0018] In this manner of the embodiments of the present application, a decoupled service cluster is formed by combining multiple device driver services and process service clusters, which are set between the host system and the manufacturing equipment to control the production of the manufacturing equipment. In any case, an automated process service in the process service cluster that has message response processing capabilities and competes for feedback messages will serve as the second service to process the feedback messages of the host system accordingly. As a result, a failure of an automated process service will not affect the automated production of the manufacturing equipment, thereby realizing a highly available and scalable manufacturing equipment control system and improving the stability of equipment manufacturing production. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 The figure shows an architecture diagram of a manufacturing equipment control system according to an embodiment of the present application.

[0021] Figure 2 A manufacturing equipment control flow chart according to an embodiment of the present application is shown.

[0022] Figure 3 A service deployment diagram according to an embodiment of the present application is shown.

[0023] Figure 4 A flowchart of a manufacturing equipment control method according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0024] The present disclosure is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the embodiments provided herein are only used to explain the present disclosure and are not intended to limit the present disclosure. In addition, the embodiments provided below are partial embodiments for implementing the present disclosure, rather than providing all embodiments for implementing the present disclosure. In the absence of conflict, the technical solutions recorded in the embodiments of the present disclosure can be implemented in any combination.

[0025] It should be noted that, in the embodiments of the present disclosure, the terms "include", "comprises" or any other variants thereof are intended to cover non-exclusive inclusion, so that a method or apparatus including a series of elements includes not only the elements explicitly recorded, but also includes other elements not explicitly listed, or also includes elements inherent to the implementation of the method or apparatus. In the absence of further restrictions, an element defined by the sentence "includes a ..." does not exclude the presence of other related elements in the method or apparatus including the element (such as a step in the method or a unit in the apparatus, for example, a unit may be a part of a circuit, a part of a processor, a part of a program or software, etc.).

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present disclosure belongs. The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present disclosure.

[0027] Figure 1 The following schematically shows the architecture of a manufacturing equipment control system according to an embodiment of the present application. Figure 1 As shown, the manufacturing equipment control system 10 may include a driver service cluster 110 and a process service cluster 120. The driver service cluster 110 includes a plurality of device driver services 111, and the process service cluster 120 includes a plurality of automated process services 121. Each automated process service is connected to the host system 20, each device driver service is connected to the process service cluster, and each device driver service 111 is respectively connected to a manufacturing device 30. Among them, the host system is, for example, a manufacturing management system such as an MES (Manufacturing Execution System) system. Manufacturing equipment (EQP) is a mechanical equipment with manual or automatic control capabilities that can be used to manufacture materials. The manufacturing equipment can specifically be semiconductor or pan-semiconductor manufacturing equipment.

[0028] Equipment Driver Service (ED) can be connected with manufacturing equipment and automated process service. For example, the equipment driver service can be responsible for establishing communication connections with various types of manufacturing equipment and performing various interactions with manufacturing equipment. Automation Flow Service (AF) can be connected with equipment driver service and upper system. Automation Flow Service can be responsible for organizing the implementation of various business logics in the automated control of manufacturing equipment. For example, it can cooperate with the upper system to achieve functions such as automatic entry and exit, automatic material comparison, automatic formula verification and issuance, automatic data collection, and automatic stock holding (holding goods) in case of equipment abnormalities.

[0029] Specifically, each device driver service 111 can be used to generate an event based on the data in the device to which it is connected, and report the event to the process service cluster. For example, when a device driver service A generates an event based on the data in the device to which it (ie, A) is connected, the device driver service A reports the event to the process service cluster 120.

[0030] For this event, the first service and the second service in the process service cluster 120 will perform asynchronous data interaction with the upper system 20 for this event. The asynchronous data interaction specifically refers to the first service sending a transaction message to the upper system according to the event, but the second service responds to the feedback message of the transaction message returned by the upper system. The first service and the second service can be two different automated process services in the process service cluster 120 or the same automated process service. The second service is an automated process service in the process service cluster 120 that has message response processing capability and competes for the feedback message.

[0031] Specifically, the upper system can send the feedback message of the transaction message to the process service cluster 120, and then the automated process services with message response processing capabilities in the process service cluster 120 will compete to obtain the feedback message, and the automated process service that competes for the feedback message will become the second service to respond to the feedback message. That is, among the automated process services with message response processing capabilities in the process service cluster 120, whoever obtains the feedback message first will become the second service to respond to the feedback message. Therefore, the first service and the second service can be two different automated process services in the process service cluster 120 or the same automated process service.

[0032] For example, see Figure 2 After a device driver service (ED) 111 generates an event, it reports the event to the process service cluster 120 through step (1). An automated process service in the process service cluster 120 generates a transaction message according to the event as the first service. The first service reports the transaction message to the upper system 20 through step (2). After receiving the transaction message, the upper system 20 generates a corresponding feedback message and sends the feedback message to the process service cluster 120 through step (3). The automated process services in the process service cluster 120 that have the message response processing capability can compete to obtain the feedback message. An automated process service that has the message response processing capability and competes for the processing right of the feedback message can respond to and process the feedback message as the second service. Thus, the first service and the second service realize asynchronous data interaction with the upper system 20 for the event.

[0033] In this manner of the embodiments of the present application, a decoupled service cluster is formed by combining multiple device driver services and process service clusters, which are set between the host system and the manufacturing equipment to control the production of the manufacturing equipment. In any case, an automated process service in the process service cluster that has message response processing capabilities and competes for feedback messages will serve as the second service to process the feedback messages of the host system accordingly. Therefore, a failure of an automated process service will not affect the automated production of the manufacturing equipment, and it has high availability. At the same time, the process service cluster can flexibly expand and introduce automated process services according to demand, and it has high scalability, thereby realizing a highly available and scalable manufacturing equipment control system and improving the stability of equipment manufacturing production.

[0034] In one embodiment, the multiple automated process services are deployed on the same process server.

[0035] Deployment of multiple automated process services on the same process server can achieve high-availability deployment and dynamic expansion deployment of services. High-availability deployment of services, for example, when an automated process service fails, other automated process services on the process server can still continue to serve. Dynamic expansion deployment of services, for example, you can dynamically add or delete automated process services on the process server according to demand.

[0036] Furthermore, in one embodiment, the multiple automated process services are distributedly deployed on multiple process servers.

[0037] See also Figure 3 , multiple process servers such as process server 310 and process server 320 are set, and several automated process services can be deployed in each process server, so that multiple automated process services are distributedly deployed on multiple process servers.

[0038] Multiple automated process services are distributedly deployed on multiple process servers, which can achieve further high-availability deployment of services, dynamic expansion deployment of services, service migration, and painless replacement of servers. High-availability deployment of services, for example, when an automated process service fails, other automated process services on the process server can still continue to provide services; when a process server fails, automated process services on other process servers can still continue to provide services. Dynamic expansion deployment of services, for example, you can dynamically add or delete automated process services on process servers according to demand; you can add new process servers to increase automated process service deployment. Service migration and painless replacement of servers, for example, add new process servers and make new automated process service deployments; you can shut down a process server according to demand.

[0039] In one embodiment, the multiple device driver services are deployed on the same driver server.

[0040] Furthermore, in one embodiment, the plurality of device driver services are distributedly deployed on a plurality of driver servers. In this way, further service high availability, scalability and portability are achieved in the manufacturing equipment control system.

[0041] The process server and the drive server may be the same server or different servers.

[0042] In one embodiment, when the first service sends a transaction message to the upper system according to the event, the first service stores the business status data corresponding to the transaction message in a shared cache; after competing for the feedback message, the second service obtains the business status data from the shared cache, and responds to the corresponding business logic based on the feedback message and the business status data.

[0043] See also Figure 2 The first service reports the transaction message to the upper system 20 through step (2), and the first service stores the business status data corresponding to the transaction message in the shared cache 50 through step (a). After the second service competes to obtain the feedback message returned by the upper system through step (3), the second service can obtain the business status data from the shared cache 50 through step (b).

[0044] The business status data is data related to business processing, and specifically can be data related to the business when the business is executed to the node corresponding to the current event. The second service can continue to process the business from the node according to the business status data, that is, the second service can further respond to the corresponding business logic according to the information in the feedback message and the business status data. In this way, the first service and the second service "on the basis of realizing asynchronous data interaction with the upper system" further realize the synchronous business processing process.

[0045] Among them, the first service can store the business status data and the transaction message identifier of the transaction message (such as the transaction message ID) in the shared cache 50 through step (a). When the upper system returns the feedback message, the feedback message also carries the transaction message identifier, so that the second service can obtain the business status data from the shared cache according to the transaction message identifier.

[0046] In some embodiments, when the first service sends a transaction message to the upper system according to the event, a reply duration is set in a timer; if no feedback message returned by the upper system is detected when the reply duration is reached, the timer publishes an exception message corresponding to the transaction message in the process service cluster; the third service executes exception business processing logic according to the exception message, and the third service is an automated process service in the process service cluster that has message response processing capabilities and competes for the exception message.

[0047] When the first service sends a transaction message to the upper system according to the event, a response time is set in the timer. If the upper system has not replied to the feedback message when the response time is reached, the timer publishes an exception message corresponding to the transaction message in the process service cluster.

[0048] An automated process service in the process service cluster that has the message response processing capability can compete to obtain the exception message. An automated process service that competes for the exception message serves as the third service. It can be understood that the third service and the second service can be two different automated process services in the process service cluster 120 or the same automated process service.

[0049] The third service executes the abnormal business processing logic according to the abnormal message, wherein, when the first service sends a transaction message to the upper system according to the event, the first service stores the business status data corresponding to the transaction message in the shared cache, and after obtaining the abnormal message, the third service can obtain the business status data from the shared cache, and can execute specific abnormal business processing logic according to the abnormal message and the business status data. In this abnormal processing method, it can further ensure that abnormal situations can be reliably handled, and further improve the reliability of manufacturing equipment control.

[0050] In some embodiments of the present application, each of the automated process services in the process service cluster interacts with the host system through a first message middleware.

[0051] Specifically, see Figure 1 A first message middleware 40 may be set between the upper system 20 in the process service cluster 120, and the upper system 20 may send a feedback message of the transaction message to the upper system 20. Figure 1The first message middleware 40 shown, then, the automated process service with message response processing capability will compete to obtain the feedback message from the first message middleware, and the automated process service that competes for the feedback message will become the second service to respond to the feedback message, so that the first service and the second service can be two different automated process services or the same automated process service in the process service cluster 120. The first message middleware can be a message middleware such as TIBCO RV / RD, RabbitMQ, Pulsar, etc. By setting the first message middleware, the automated process service with message response processing capability can reliably compete to obtain the feedback message.

[0052] In some embodiments of the present application, the first service is an automated process service in the process service cluster that has message response processing capability and competes for the transaction message.

[0053] The device driver service reports the event to the process service cluster 120. The automated process services with message response processing capabilities in the process service cluster 120 compete to obtain the event, and the automated process service that competes for the event becomes the first service. Therefore, if an automated process service in the process service cluster 120 fails, it will not affect the automated production of the manufacturing equipment, further improving high availability.

[0054] In some embodiments of the present application, each automated process service and each device driver service in the process service cluster perform message interaction through the second message middleware.

[0055] See also Figure 1 A second message middleware 130 may be set between the process service cluster 120 and the driver service cluster 110. Each device driver service in the driver service cluster 110 may report an event to the second message middleware 130. Thus, the automated process service with message response processing capability in the process service cluster 120 may compete to obtain the event from the second message middleware.

[0056] In order to facilitate better implementation of the manufacturing equipment control system provided in the embodiment of the present application, the embodiment of the present application also provides a manufacturing equipment control method based on the above manufacturing equipment control system. The meanings of the terms are the same as those in the above equipment control method, and the specific implementation details can refer to the description in the above system embodiment. Figure 4 A flowchart of a manufacturing equipment control method according to an embodiment of the present application is shown.

[0057] like Figure 4As shown, the manufacturing equipment control method may include: step S410, generating an event according to the data in the connected manufacturing equipment through each of the device driver services, and reporting the event to the process service cluster; step S420, sending a transaction message to the upper system according to the event through the first service; step S430, responding to the feedback message corresponding to the transaction message returned by the upper system through the second service.

[0058] In this way, a decoupled service cluster is formed by combining multiple device driver services and process service clusters, which is set between the host system and the manufacturing equipment to control the production of the manufacturing equipment. In any case, an automated process service in the process service cluster that has message response processing capabilities and competes for feedback messages will serve as the second service to process the feedback messages of the host system accordingly. Therefore, a failure of an automated process service will not affect the automated production of the manufacturing equipment, effectively improving the stability of equipment manufacturing production.

[0059] Further, in some embodiments, after sending the transaction message to the upper system according to the event through the first service, the method also includes: storing the business status data corresponding to the transaction message in a shared cache through the first service; correspondingly, responding to the feedback message corresponding to the transaction message returned by the upper system through the second service, including: obtaining the business status data from the shared cache after competing for the feedback message through the second service, and responding to the corresponding business logic according to the feedback message and the business status data.

[0060] See also Figure 2 , the first service reports the transaction message to the upper system 20 through step (2), and the first service stores the business status data corresponding to the transaction message in the shared cache 50 through step (a). After the second service competes to obtain the feedback message returned by the upper system through step (3), the second service can obtain the business status data from the shared cache 50 through step (b). Business status data is data related to business processing, and can specifically be data related to the business when the business is executed to the node corresponding to the current event. The second service can continue to process the business from the node based on the business status data, that is, the second service can further respond to the corresponding business logic based on the information in the feedback message and the business status data. In this way, the first service and the second service further realize the synchronous business processing process "on the basis of realizing asynchronous data interaction with the upper system".

[0061] Furthermore, in some embodiments, after sending the transaction message to the upper system according to the event through the first service, the method also includes: setting a reply duration in a timer through the first service, so that when the reply duration is reached, if no feedback message returned by the upper system is detected, the timer publishes an exception message corresponding to the transaction message in the process service cluster; and executing abnormal business processing logic according to the exception message through a third service.

[0062] The timer publishes an exception message corresponding to the transaction message in the process service cluster. The process service cluster has the message response processing capability and can compete to obtain the exception message. An automated process service that competes for the exception message serves as the third service, and the third service executes the exception business processing logic according to the exception message. Among them, when the first service sends a transaction message to the upper system according to the event, the first service stores the business status data corresponding to the transaction message in the shared cache. After obtaining the exception message, the third service can obtain the business status data from the shared cache, and can execute specific exception business processing logic according to the exception message and the business status data. In this exception handling method, it can further ensure that abnormal situations can be handled reliably, and further improve the control reliability of manufacturing equipment.

[0063] Furthermore, in some embodiments, the upper system returns the feedback message to the first message middleware; before sending the transaction message to the upper system through the first service according to the event, it may also include: through the automated process service with message response processing capability in the process service cluster, competing to obtain the event from the second message middleware, so that the automated process service that competes for the event serves as the first service.

[0064] Specifically, see Figure 1 A first message middleware 40 may be set between the upper system 20 in the process service cluster 120, and the upper system 20 may send a feedback message of the transaction message to the upper system 20. Figure 1 The first message middleware 40 shown, then, the automated process service with message response processing capability will compete to obtain the feedback message from the first message middleware, and the automated process service that competes for the feedback message will become the second service to respond to the feedback message, so that the first service and the second service can be two different automated process services or the same automated process service in the process service cluster 120. The first message middleware can be a message middleware such as TIBCO RV / RD, RabbitMQ, Pulsar, etc. By setting the first message middleware, the automated process service with message response processing capability can reliably compete to obtain the feedback message.

[0065] Furthermore, in some embodiments, the device driver service sends the event to the second message middleware; before the second service responds to the feedback message corresponding to the transaction message returned by the upper system, it may also include: through the automated process service with message response processing capability in the process service cluster, competing to obtain the feedback message from the first message middleware, so that the automated process service that competes for the feedback message serves as the second service.

[0066] See also Figure 1 A second message middleware 130 may be set between the process service cluster 120 and the driver service cluster 110. Each device driver service in the driver service cluster 110 may report an event to the second message middleware 130. Thus, the automated process service with message response processing capability in the process service cluster 120 may compete to obtain the event from the second message middleware.

[0067] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the embodiments disclosed herein. The present application is intended to cover any variations, uses or adaptations of the present application, which follow the general principles of the present application and include common knowledge or customary technical means in the art that are not disclosed in the present application.

[0068] It should be understood that the present application is not limited to the embodiments that have been described above and shown in the accompanying drawings, but various modifications and changes may be made without departing from the scope thereof.

Claims

1. A manufacturing equipment control system, characterized in that: The manufacturing equipment control system includes a plurality of device driver services and a process service cluster, the process service cluster includes a plurality of automated process services, each of the automated process services is connected to a host system, each of the device driver services is connected to the process service cluster, and each of the device driver services is connected to a manufacturing equipment respectively; Each of the device driver services is used to: generate events according to data in the connected manufacturing equipment, and report the events to the process service cluster; The first service and the second service are used to: perform asynchronous data interaction with the host system for the event; the asynchronous data interaction means that the first service sends a transaction message to the host system according to the event and the second service responds to the feedback message of the transaction message; The first service and the second service are two different automated process services or the same automated process service in the process service cluster, and the second service is an automated process service in the process service cluster that has message response processing capability and competes for the feedback message.

2. The manufacturing equipment control system according to claim 1, characterized in that: When the first service sends a transaction message to the upper system according to the event, the first service stores the business status data corresponding to the transaction message in a shared cache; The second service obtains the business status data from the shared cache after competing for the feedback message, and responds to and processes the corresponding business logic according to the feedback message and the business status data.

3. The manufacturing equipment control system according to claim 1, characterized in that: When the first service sends a transaction message to the upper system according to the event, a response time is set in a timer; if no feedback message returned by the upper system is detected when the response time is reached, the timer publishes an exception message corresponding to the transaction message in the process service cluster; The third service executes the abnormal business processing logic according to the abnormal message. The third service is an automated process service in the process service cluster that has message response processing capability and competes for the abnormal message.

4. The manufacturing equipment control system according to any one of claims 1 to 3, characterized in that: Each of the automated process services in the process service cluster interacts with the host system through a first message middleware.

5. The manufacturing equipment control system according to claim 1, characterized in that: The first service is an automated process service in the process service cluster that has message response processing capability and competes for the transaction message.

6. The manufacturing equipment control system according to claim 5, characterized in that: The automated process services in the process service cluster interact with the device driver services through the second message middleware.

7. The manufacturing equipment control system according to claim 1, characterized in that: The multiple automated process services are distributed and deployed on multiple process servers.

8. The manufacturing equipment control system according to claim 7, characterized in that: The multiple device driver services are distributed and deployed on multiple driver servers.

9. A manufacturing equipment control method, characterized in that: Applicable to the manufacturing equipment control system according to any one of claims 1 to 8, the method comprising: Generate events according to data in the connected manufacturing equipment through each of the device driver services, and report the events to the process service cluster; Sending a transaction message to the upper system according to the event through the first service; The second service responds to and processes a feedback message corresponding to the transaction message returned by the upper system.

10. The manufacturing equipment control method according to claim 9, characterized in that: After sending the transaction message to the upper system according to the event through the first service, the method further includes: storing the business status data corresponding to the transaction message in a shared cache through the first service; Correspondingly, the processing of responding to the feedback message corresponding to the transaction message returned by the upper system through the second service includes: The second service obtains the business status data from the shared cache after competing for the feedback message, and responds to and processes corresponding business logic according to the feedback message and the business status data.

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