Straight pipe magnetic filtering radial electric arc source

Abstract

The invention relates to the technical field of arc sources, in particular to a straight tube magnetic filtering radial arc source which comprises a cathode assembly and an anode sleeve, the cathode assembly comprises a target seat, the target seat comprises a bottom plate and a target column, the target column is sleeved with a target material and internally provided with a cathode magnetic steel group, and the cathode magnetic steel group is a pair of annular magnetic steel. The magnetic field directions of the two pieces of annular magnetic steel are opposite and are radial; the anode sleeve is a straight pipe and sleeved with anode magnetic steel, the anode magnetic steel is a cylinder, the magnetic field direction of the anode magnetic steel is the axial direction, the anode sleeve is arranged on the bottom plate, and an insulating plate is arranged between the anode sleeve and the bottom plate. Therefore, plasmas and liquid drops are emitted on the target surface in the radial direction, the plasmas are transmitted in the axial direction under the constraint of the anode magnetic field, the liquid drops are captured by the inner wall of the anode sleeve, the liquid drops are filtered and the plasmas are purified, and compared with a bent pipe and a straight pipe, the structure is simple, the occupied space is small, machining and maintenance are convenient, and the cost is low. Moreover, the transmission path is short, and the transmission efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of arc sources, in particular to a straight tube magnetic filtering radial arc source. Background Art

[0002] Arc ion plating is a commonly used physical vapor deposition (PVD) coating technology. Due to its high ionization rate, arc ion plating has significant advantages in film-base adhesion, film density, and compound film formation. However, the cathode arc plasma formation process of arc ion plating is accompanied by "droplet" spraying, which produces "large particle" defects in the coating.

[0003] In order to reduce the inclusion of "large particles" in the coating, in the 1980s, Soviet scientist Aksenov invented the "elbow magnetic filtration" technology, which uses the bend magnetic field to constrain and guide the charged plasma, and the uncharged neutral droplets will be transmitted in a straight line and captured by the bend wall, thereby achieving droplet filtration and plasma purification. With the deepening of research, the bend magnetic filtration technology has developed from the traditional 90-degree bend to S double bend, T-shaped bend, dual-source Y-shaped bend and other magnetic filtration methods, and has been widely used in scientific research, military and aerospace fields, but it is less used in the civilian industrial field (such as tool plating). The reason is that the bend magnetic filtration structure is complex and occupies a lot of space, resulting in high processing and maintenance costs, and the plasma transmission path of the bend magnetic filtration is long, so the transmission efficiency is low and the deposition coating speed is slow. Therefore, the industry urgently needs a magnetic filtration arc source with a simple structure and high efficiency in filtering droplets and transmitting plasma. Summary of the invention

[0004] The purpose of the present invention is to provide a straight tube magnetic filtration radial arc source, which adopts a straight tube structure and realizes magnetic filtration through the coordination of radial magnetic field and axial magnetic field. Therefore, compared with the bent tube, the structure of the present invention is simpler and occupies less space, so it is convenient for processing and maintenance, and the transmission path is shorter and the transmission efficiency is higher, thus solving the problems of complex bent tube structure, large space occupation, long transmission path and low transmission efficiency.

[0005] The object of the present invention is achieved in that: A straight tube magnetic filtering radial arc source, comprising a cathode assembly and an anode assembly, wherein the cathode assembly comprises a target seat, and the target seat comprises a base plate and a target column arranged at the center of the base plate, wherein a target material is sleeved on the outside of the target column, and a chamber for water cooling and placing a cathode magnetic steel group is provided inside the target column, wherein the cathode magnetic steel group is a pair of coaxial and parallel annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are radial, and the magnetic field directions of the two annular magnetic steels are opposite; The anode assembly includes an anode sleeve and an anode magnet, and the anode sleeve is a straight tube with a built-in channel for water cooling, and the anode magnet is sleeved on the outside of the anode sleeve, the anode magnet is a cylinder, and the magnetic field direction of the anode magnet is axial, and the anode sleeve is arranged on a base plate and an insulating plate is arranged between the base plate, and the target column is located at the axis center of the anode sleeve.

[0006] Preferably, an arc-starting needle is further included, and the arc-starting needle is arranged on the bottom plate and located on one side of the target material, and an insulating member is arranged between the arc-starting needle and the bottom plate.

[0007] Preferably, the arc-starting needle is arranged on the base plate through a connecting rod, and a connecting sleeve is provided on the top of the connecting rod, and an arc-starting needle is provided on one side of the connecting sleeve, an insulating part is provided on the bottom of the connecting rod, and the insulating part and the base plate are connected by fasteners.

[0008] Preferably, the target column includes a mounting portion and a connecting portion, and the connecting portion is used to connect the mounting portion and the base plate, the target material is sleeved on the outside of the mounting portion, and the outer diameter of the portion where the mounting portion and the target material are connected is smaller than the outer diameter of the connecting portion, and a nut is connected to the top of the mounting portion and is used to limit the movement of the target material, and a target cover is arranged above the nut.

[0009] Preferably, arc limiting rings are provided on the outer sides of both ends of the target material; Or / and, a target pressure ring is arranged between the nut and the target material, and the target pressure ring is sleeved on the outside of the mounting portion and connected to the bottom of the target cover, and the nut is located between the target pressure ring and the target cover.

[0010] Preferably, the bottom of the chamber is open and provided with a cover plate, and the cover plate has holes for water to enter and exit, and a partition is built into the chamber to divide the chamber into a water inlet area and a water outlet area and a connecting area for connecting the water inlet area and the water outlet area; One of the annular magnetic steels is located in the communication area and abuts against the bottom of the partition, and the other is sleeved on the outside of the partition, and the partition is provided with a mounting groove corresponding to the annular magnetic steel.

[0011] Preferably, the anode sleeve comprises an upper flange and a lower flange and an inner tube and an outer tube located between the upper flange and the lower flange, and the inner tube and the outer tube are coaxially arranged, and a channel is formed between the inner tube and the outer tube, and both the upper flange and the lower flange are provided with openings communicating with the channel; The lower flange is arranged on the bottom plate and an insulating plate is arranged between the lower flange and the bottom plate, and the opening of the lower flange is used for water inlet.

[0012] Preferably, the mounting portion is detachably mounted on the connecting portion, and a connecting plate is disposed at the bottom of the mounting portion, and at least one slider 1 is disposed at the bottom of the connecting plate, and a limiting block is disposed on one side of the slider 1 and is L-shaped; At least one slide groove 1 is provided on the top of the connecting part, and a limiting groove is provided at one end of the slide groove 1 corresponding to the limiting block, and the connecting part is provided with placement grooves 3 for placing the sealing ring on both the inner and outer sides of the slide groove 1. The sliding block 1 moves in the slide groove 1, and the limiting block is adapted to the limiting groove to connect the mounting part and the connecting part.

[0013] Preferably, the mounting portion is detachably mounted on the connecting portion, and a shell is disposed at the bottom of the mounting portion, and the shell is sleeved on the outside of the connecting portion; A second slide groove is provided on the outside of the connection portion, and one end of the second slide groove is open, and a third slide groove connected to the second slide groove is provided on one side of the other end of the second slide groove. A slider second is provided on the inner wall of the shell, and the slider second moves in the second slide groove and the third slide groove.

[0014] Preferably, the mounting portion is detachably arranged on the connecting portion, and the connecting rod comprises an inner rod and an outer rod, and the bottom of the inner rod is located inside the outer rod and moves inside the outer rod, the top of the inner rod is sleeved with a connecting sleeve, and the bottom of the outer rod is sleeved with an insulating member.

[0015] Compared with the prior art, the present invention has the following outstanding and beneficial technical effects: The anode sleeve of the present invention is sleeved with an anode magnet on the outside and is a straight tube, and the anode magnet is a cylinder, so the direction of the magnetic field it generates is axial, and at the same time, a target material is sleeved on the outside of the target column and a cathode magnet group is built in, and the target column is located at the axis of the anode sleeve, and the cathode magnet group is a pair of coaxial and parallel annular magnets, so the direction of the magnetic field it generates is radial, and because the magnetic fields of the two annular magnets are in opposite directions to form a closed loop, so that plasma and droplets are emitted radially on the target surface (target surface), and under the constraint of the anode magnetic field, the plasma is transmitted axially, and the droplets are captured by the inner wall of the anode sleeve, thereby realizing the filtration of droplets and the purification of plasma, compared with the curved tube, the straight tube has a simpler structure and occupies less space, so it is convenient to process and maintain, and the transmission path is shorter and the transmission efficiency is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is one of the structural schematic diagrams of the present invention.

[0017] Figure 2 This is the second structural schematic diagram of the present invention.

[0018] Figure 3 It is a schematic structural diagram of the cross-section of the present invention.

[0019] Figure 4 Schematic diagram of the magnetic field.

[0020] Figure 5 It is a schematic diagram of the structure of the splitting of the present invention.

[0021] Figure 6Schematic diagram of the structure of the cathode assembly.

[0022] Figure 7 This is a schematic diagram of the structure related to the arc starting needle.

[0023] Figure 8 This is one of the structural schematic diagrams of the installation part and the connection part.

[0024] Fig. 9 This is the second structural diagram of the installation part and the connection part.

[0025] Fig.10 This is a cross-sectional view related to the arc starting needle.

[0026] Reference numerals: 1-anode sleeve; 11-channel; 12-upper flange; 13-lower flange; 14-inner tube; 15-outer tube; 16-mouth; 2-target seat; 21-bottom plate; 22-target column; 23-chamber; 24-mounting part; 241-connecting plate; 242-slider 1; 243-limiting block; 244-housing; 245-slider 2; 25-connecting part; 251-slideway 1; 252-limiting groove; 253-slideway 2; 254-slideway 3; 3-target material; 4- cathode magnetic steel group; 5- anode magnetic steel; 6- insulation plate; 71- arc-starting needle; 72- insulation piece; 73- connecting rod; 74-connecting sleeve; 75-inner rod; 76-outer rod; 8-cover plate; 9-partition plate; 91-mounting groove; 10-nut; 20-target cover; 30-limiting ring; 40-target pressing ring. DETAILED DESCRIPTION

[0027] The specific implementation modes of the present invention are further described in detail below with reference to the accompanying drawings.

[0028] like Figure 1-Figure 10 As shown, a straight tube magnetic filtering radial arc source comprises a cathode assembly and an anode assembly, and the cathode assembly comprises a target seat 2, and the target seat 2 comprises a base plate 21 and a target column 22 arranged at the center of the base plate 21, and a target material 3 is sleeved on the outer side of the target column 22, and a chamber 23 for water cooling and placing a cathode magnetic steel group 4 is opened inside the target column 22, and the cathode magnetic steel group 4 is a pair of coaxially parallel annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are radial, and the magnetic field directions of the two annular magnetic steels are opposite.

[0029] At the same time, the component includes an anode sleeve 1 and an anode magnet 5, and the anode sleeve 1 is a straight tube and has a built-in channel 11 for water cooling, and the anode magnet 5 is sleeved on the outside of the anode sleeve 1, and the anode magnet 5 is a cylinder, and the magnetic field direction of the anode magnet 5 is axial, and the anode sleeve 1 is arranged on the bottom plate 21 and an insulating plate 6 is arranged between the bottom plate 21, and the target column 22 is located at the axis center of the anode sleeve 1.

[0030] Therefore, in actual use, since the anode sleeve 1 is sleeved with an anode magnet 5 which is a straight tube, and the anode magnet 5 is a cylinder, the direction of the magnetic field it generates is axial, and at the same time, the target column 22 is sleeved with a target material 3 and a cathode magnet group 4 is built in the target column 22, and the target column 22 is located at the axis of the anode sleeve 1, and the cathode magnet group 4 is a pair of coaxial and parallel annular magnets, so the direction of the magnetic field it generates is radial, and since the magnetic fields of the two annular magnets are in opposite directions, a closed loop is formed, so that plasma and droplets are emitted radially on the target surface (target material surface), and under the constraint of the anode magnetic field, the plasma is transmitted axially, and the droplets are captured by the inner wall of the anode sleeve, thereby realizing the filtration of droplets and the purification of plasma. Compared with the curved tube, the straight tube has a simpler structure and occupies less space, so it is convenient for processing and maintenance, and the transmission path is shorter and the transmission efficiency is higher.

[0031] The annular magnetic steel can be a permanent magnet or an electromagnet, preferably an electromagnet, which is convenient for adjusting the magnetic strength by current. For example, by periodically adjusting the magnetic field strength of the two annular magnetic steels, the arc spot can be controlled to scan up and down on the target surface, which is conducive to improving the utilization rate of the target material 3.

[0032] Meanwhile, the anode magnet 5 is a permanent magnet or an electromagnet, preferably a permanent magnet, because the permanent magnet has a higher magnetic field strength under the same volume.

[0033] The principle of arc ion plating is to generate a magnetic field after power is applied, and directly evaporate metal on the target material 3 through arc discharge, and the evaporated material exists in the form of plasma, and the metal ions are deposited on the surface of the substrate in a vacuum or inert gas environment to form a thin film. Therefore, in order to ensure vacuum or sealing, the insulating plate 6 is provided with a placement groove 1 for placing a sealing ring on both the upper and lower sides, and a better sealing is achieved through the sealing ring.

[0034] Secondly, the present invention further comprises an arc-starting needle 71 , and the arc-starting needle 71 is disposed on the bottom plate 21 and located on one side of the target material 3 , and an insulating member 72 is disposed between the arc-starting needle 71 and the bottom plate 21 .

[0035] Therefore, in actual use, the arc-starting needle 71 can effectively guide the current, making it easier to form an arc, thereby reducing the arc-starting time and improving production efficiency. Specifically, the arc-starting needle 71 strikes the target surface (target material surface) under the action of the rotating cylinder, thereby generating a spark discharge, which is quickly converted into an arc discharge, thereby ionizing the surrounding gas molecules and igniting the arc source. At this time, a large number of cathode arc spots appear on the target surface, and these arc spots move rapidly and irregularly on the target surface, causing the target material to burn, causing the target surface to evaporate and ionize, thereby generating a large number of metal positive ions.

[0036] At the same time, the related structure of the arc-starting needle 71 is as follows: first, the arc-starting needle 71 is arranged on the base plate 21 through a connecting rod 73, and a connecting sleeve 74 is sleeved on the top of the connecting rod 73, and the arc-starting needle 71 is arranged on one side of the connecting sleeve 74, and an insulating part 72 is sleeved on the bottom of the connecting rod 73, and the insulating part 72 and the base plate 21 are connected by fasteners.

[0037] The fastener connection is a screw or bolt connection. The insulating member 72 includes a mounting plate and two columns with different diameters located on the upper and lower sides of the mounting plate, and the mounting plate is connected to the bottom plate 21 by fasteners, and the columns located on the mounting plate are located in the holes opened in the bottom plate 21.

[0038] like Figure 3 , Figure 5 and Figure 6 As shown, the structure between the target column 22 and the target material 3 is as follows: first, the target column 22 includes a mounting portion 24 and a connecting portion 25, and the connecting portion 25 is used to connect the mounting portion 24 and the base plate 21, and the target material 3 is sleeved on the outside of the mounting portion 24, and the outer diameter of the portion where the mounting portion 24 is connected to the target material 3 is smaller than the outer diameter of the connecting portion 25, and a nut 10 is connected to the top of the mounting portion 24 and is used to limit the movement of the target material 3, and a target cover 20 is arranged above the nut 10.

[0039] Therefore, in actual use, since the outer diameter of the portion where the mounting portion 24 is connected to the target material 3 is smaller than the outer diameter of the connecting portion 25, the target material 3 will not move downward when it is sleeved on the outside of the mounting portion 24. At the same time, the top of the target material 3 is limited by the nut 10 and the target cover 20, and the target cover 20 can play a role of covering and separating, thereby preventing the coating from being deposited on the nut 10 during use, thereby reducing the impact on subsequent maintenance and care.

[0040] Meanwhile, a target pressing ring 40 is arranged between the nut 10 and the target material 3 , and the target pressing ring 40 is sleeved on the outside of the mounting portion 24 and connected to the bottom of the target cover 20 , and the nut 10 is located between the target pressing ring 40 and the target cover 20 .

[0041] The target pressing ring 40 is made of oxygen-free copper with good thermal conductivity, and in actual use, the target pressing ring 40 is used to fix the target material, thereby facilitating the installation of the target cover 20 and conducting the heat generated by the combustion of the target material 3. In addition, convex rings can be provided at both ends of the target material 3, and the target pressing ring 40 and the connecting portion 25 are correspondingly grooved.

[0042] Secondly, in order to limit the area where the arc spot moves, arc limiting rings 30 are provided on the outer sides of both ends of the target material 3, and the arc limiting ring 30 is made of boron nitride ceramic. Due to its low electron emission coefficient, the arc spot can be limited to the target surface (target surface), thereby preventing the arc spot from escaping and burning the cathode assembly.

[0043] like Figure 3 and Figure 5 As shown, the relevant structure of the chamber 23 is: first, the bottom of the chamber 23 is open and is provided with a cover plate 8, and the cover plate 8 has holes for water to flow in and out, and the cover plate 8 is connected to the bottom plate 21 by screws or bolts, and a sealing ring is provided between the cover plate 8 and the bottom plate 21, and the cover plate 8 has a placement groove 2 for placing the sealing ring.

[0044] At the same time, the chamber 23 is built with a partition 9 to divide the chamber 23 into a water inlet area and a water outlet area and a communication area for connecting the water inlet area and the water outlet area. Therefore, water enters from the water inlet area and flows to the water outlet area through the communication area, thereby going out.

[0045] Next, the installation structure of the cathode magnetic steel group 4 is as follows: first, one of the annular magnetic steels is located in the communication area and abuts against the bottom of the partition 9, and the other is sleeved on the outside of the partition 9, and the partition 9 is provided with an installation groove 91 corresponding to the annular magnetic steel.

[0046] Therefore, in actual use, the cathode magnetic steel group 4 is installed and limited by the partition 9, so as to achieve multiple uses, and at the same time, the processing of the chamber 23 can be reduced, thereby simplifying the structure.

[0047] like Figure 3 As shown, the anode sleeve 1 has the following structure: first, the anode sleeve 1 includes an upper flange 12 and a lower flange 13, and an inner tube 14 and an outer tube 15 located between the upper flange 12 and the lower flange 13, and the inner tube 14 and the outer tube 15 are coaxially arranged, and a channel 11 is formed between the inner tube 14 and the outer tube 15, and both the upper flange 12 and the lower flange 13 are provided with openings connected to the channel 11. Moreover, the opening 16 of the lower flange 13 is used for water inlet, so that water enters from the opening 16 of the lower flange 13 and flows through the channel 11 to the opening 16 of the upper flange 12, and then goes out.

[0048] Meanwhile, the lower flange 13 is arranged on the bottom plate 21 and an insulating plate 6 is arranged between the bottom plate 21. Moreover, the upper flange 12 and the lower flange 13 are connected to the inner tube 14 and the outer tube 15 by welding, that is, the two ends of the inner tube 14 are welded to the upper flange 12 and the lower flange 13 respectively, and the two ends of the outer tube 15 are welded to the upper flange 12 and the lower flange 13 respectively.

[0049] like Figure 8 and Fig. 9 As shown, since the target material 3 may be of different types, the mounting portion 24 can be detachably arranged on the connecting portion 25 , so that the mounting portion 24 of different types can be replaced to adapt to the target material 3 of different types.

[0050] Moreover, the structure between the mounting portion 24 and the connecting portion 25 can be varied. For example, a connecting plate 241 is provided at the bottom of the mounting portion 24, and at least one slider 242 is provided at the bottom of the connecting plate 241, and a limiting block 243 is provided on one side of the slider 242 and is L-shaped.

[0051] At the same time, at least one slide groove 251 is provided on the top of the connecting portion 25, and a limiting groove 252 is provided at one end of the slide groove 251 corresponding to the limiting block 243. Therefore, in actual use, the slider 242 moves in the slide groove 251 and is adapted to the limiting groove 252 through the limiting block 243 to connect the mounting portion 24 and the connecting portion 25.

[0052] In order to achieve better sealing, the connection part 25 is provided with placement grooves 3 for placing the sealing ring on both the inner and outer sides of the slide groove 251. In order to achieve better positioning, a protrusion and a groove are also provided between the positioning block 243 and the positioning groove 252, thereby further limiting the positioning.

[0053] For another example, a housing 244 is provided at the bottom of the mounting portion 24, and the housing 244 is sleeved on the outside of the connecting portion 25. A second slide groove 253 is provided on the outside of the connecting portion 25, and one end of the second slide groove 253 is open, and a third slide groove 254 connected to the second slide groove 253 is provided on one side of the other end of the second slide groove 253, and a second slider 245 is provided on the inner wall of the housing 244, and the second slider 245 moves in the second slide groove 253 and the third slide groove 254.

[0054] Therefore, in actual use, when the second slide block 245 enters the third slide block 254 along the second slide block 253, the second slide block 245 and the third slide block 254 are adapted to each other, thereby connecting the mounting portion 24 and the connecting portion 25.

[0055] In order to achieve better sealing, a placement groove 4 for placing a sealing ring is provided at the bottom of the mounting portion 24 inside the second slide groove 253, and a placement groove 5 for placing a sealing ring is provided on the inner wall of the housing 244 below the third slide groove 254. In order to achieve better positioning, a protrusion and a groove are provided between the second slider 245 and the third slide groove 254 to further limit the position.

[0056] At the same time, since different types of mounting parts 24 can be replaced, in order to make the arc needle 71 better cooperate with the target material 3, the connecting rod 73 is designed to include an inner rod 75 and an outer rod 76, and the bottom of the inner rod 75 is located in the outer rod 76 and moves in the outer rod 76, and a connecting sleeve 74 is sleeved on the top of the inner rod 75, and an insulating part 72 is sleeved on the bottom of the outer rod 76.

[0057] Therefore, in actual use, the bottom of the inner rod 75 is connected to the piston tube of the cylinder or other driving source that can be used to drive the movement, so the inner rod 75 can move up and down under the action of the cylinder. In order to adapt to the rotating cylinder, a rotating cylinder can be provided on the pen-shaped cylinder, and then the rotating cylinder is connected to the inner rod 75, so that the pen-shaped cylinder drives the rotating cylinder to move and then drives the inner rod 75 to move, and the rotating cylinder drives the inner rod 75 to rotate so that the arc-starting needle 71 strikes the target surface (target material surface), or other structures are also possible.

[0058] The above shows and describes the basic principle and main features of the present invention and the advantages of the present invention. At the same time, the present invention is not limited by the above embodiments, so without departing from the principle and scope of the present invention, the present invention will also have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. Straight tube magnetic filtration radial arc source, characterized in that: The invention comprises a cathode assembly and an anode assembly, wherein the cathode assembly comprises a target seat (2), and the target seat (2) comprises a bottom plate (21) and a target column (22) arranged at the center of the bottom plate (21), a target material (3) is sleeved on the outside of the target column (22), and a chamber (23) for water cooling and placing a cathode magnetic steel group (4) is provided inside the target column (22), wherein the cathode magnetic steel group (4) is a pair of coaxial and parallel annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are radial, and the magnetic field directions of the two annular magnetic steels are opposite; The anode assembly comprises an anode sleeve (1) and an anode magnet (5), wherein the anode sleeve (1) is a straight tube and has a channel (11) for water cooling built therein, and the anode magnet (5) is sleeved on the outside of the anode sleeve (1), the anode magnet (5) is a cylinder, and the magnetic field direction of the anode magnet (5) is axial, and the anode sleeve (1) is arranged on a bottom plate (21) and an insulating plate (6) is arranged between the anode sleeve and the bottom plate (21), and the target column (22) is located at the axis of the anode sleeve (1).

2. The straight tube magnetic filtration radial arc source according to claim 1, characterized in that: It also comprises an arc-starting needle (71), which is arranged on the bottom plate (21) and located on one side of the target material (3), and an insulating member (72) is arranged between the arc-starting needle (71) and the bottom plate (21).

3. The straight tube magnetic filtering radial arc source according to claim 2, characterized in that: The arc-starting needle (71) is arranged on the bottom plate (21) via a connecting rod (73), a connecting sleeve (74) is sleeved on the top of the connecting rod (73), and the arc-starting needle (71) is arranged on one side of the connecting sleeve (74), an insulating member (72) is sleeved on the bottom of the connecting rod (73), and the insulating member (72) and the bottom plate (21) are connected by fasteners.

4. The straight tube magnetic filtration radial arc source according to any one of claims 1 to 3, characterized in that: The target column (22) comprises a mounting portion (24) and a connecting portion (25), wherein the connecting portion (25) is used to connect the mounting portion (24) and the base plate (21), the target material (3) is sleeved on the outside of the mounting portion (24), and the outer diameter of the portion where the mounting portion (24) and the target material (3) are connected is smaller than the outer diameter of the connecting portion (25), a nut (10) is connected to the top of the mounting portion (24) and is used to limit the movement of the target material (3), and a target cover (20) is arranged above the nut (10).

5. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: Arc limiting rings (30) are provided on the outer sides of both ends of the target material (3); Or / and, a target pressing ring (40) is provided between the nut (10) and the target material (3), the target pressing ring (40) is sleeved on the outside of the mounting portion (24) and connected to the bottom of the target cover (20), and the nut (10) is located between the target pressing ring (40) and the target cover (20).

6. The straight tube magnetic filtering radial arc source according to any one of claims 1 to 3, characterized in that: The chamber (23) has an opening at the bottom and is provided with a cover plate (8), and the cover plate (8) has holes for water to flow in and out, and a partition plate (9) is built into the chamber (23) to divide the chamber (23) into a water inlet area and a water outlet area, and a connecting area for connecting the water inlet area and the water outlet area; One of the annular magnetic steels is located in the connection area and abuts against the bottom of the partition (9), and the other is sleeved on the outside of the partition (9), and the partition (9) is provided with a mounting groove (91) corresponding to the annular magnetic steel.

7. The straight tube magnetic filtration radial arc source according to any one of claims 1 to 3, characterized in that: The anode sleeve (1) comprises an upper flange (12) and a lower flange (13), and an inner tube (14) and an outer tube (15) located between the upper flange (12) and the lower flange (13), wherein the inner tube (14) and the outer tube (15) are coaxially arranged, a channel (11) is provided between the inner tube (14) and the outer tube (15), and both the upper flange (12) and the lower flange (13) are provided with openings communicating with the channel (11); The lower flange (13) is arranged on the bottom plate (21) and an insulating plate (6) is arranged between the lower flange and the bottom plate (21), and the opening (16) of the lower flange (13) is used for water inlet.

8. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: The mounting portion (24) is detachably mounted on the connecting portion (25), and a connecting plate (241) is disposed at the bottom of the mounting portion (24), and at least one sliding block (242) is disposed at the bottom of the connecting plate (241), and a limiting block (243) is disposed on one side of the sliding block (242) and is L-shaped; At least one slide groove (251) is provided on the top of the connecting portion (25), and a limiting groove (252) is provided at one end of the slide groove (251) corresponding to the limiting block (243), and a placement groove (3) for placing a sealing ring is provided on both the inner and outer sides of the slide groove (251) of the connecting portion (25), and the sliding block (242) moves in the slide groove (251) and is adapted to the limiting groove (252) through the limiting block (243) to connect the mounting portion (24) and the connecting portion (25).

9. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: The mounting portion (24) is detachably mounted on the connecting portion (25), and a shell (244) is disposed at the bottom of the mounting portion (24), and the shell (244) is sleeved on the outside of the connecting portion (25); A second slide groove (253) is provided on the outer side of the connecting portion (25), and one end of the second slide groove (253) is open, and a third slide groove (254) connected to the second slide groove (253) is provided on one side of the other end of the second slide groove (253), and a second slider (245) is provided on the inner wall of the shell (244), and the second slider (245) moves in the second slide groove (253) and the third slide groove (254).

10. The straight tube magnetic filtration radial arc source according to claim 3, characterized in that: The mounting portion (24) is detachably mounted on the connecting portion (25), and the connecting rod (73) comprises an inner rod (75) and an outer rod (76), wherein the bottom of the inner rod (75) is located inside the outer rod (76) and moves inside the outer rod (76), a connecting sleeve (74) is sleeved on the top of the inner rod (75), and an insulating member (72) is sleeved on the bottom of the outer rod (76).

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