Thin-wall part supporting tool and using method thereof

Abstract

The invention relates to the technical field of semiconductor part machining, and particularly discloses a thin-wall part supporting tool and a using method thereof.The thin-wall part supporting tool comprises a flexible adsorption part and a rigid supporting part, the flexible adsorption part has plasticity, and a concave part on the inner wall face of a thin-wall part is filled with the flexible adsorption part when the thin-wall part supporting tool is used. The rigid supporting part abuts against the inner wall face of the thin-wall part, and the rigid supporting part abuts against the flexible adsorption part. Therefore, the inner wall face of the thin-wall part can be supported through the flexible adsorption part and the rigid supporting part, when the clamping tool clamps the thin-wall part, the thin-wall part is not prone to deformation, the size precision of the thin-wall part is high, a special clamping tool does not need to be used for carrying, and cost is reduced. The invention further provides a using method of the thin-wall part supporting tool. The thin-wall part supporting tool is used for supporting the inner wall face of the thin-wall part.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor parts processing, and in particular to a thin-walled part supporting tool and a use method thereof. Background Art

[0002] In the semiconductor field, there are often some thin-walled parts. These thin-walled parts have weak rigidity and high requirements for clamping tooling during the processing process. If special clamping tooling is not used, the thin-walled parts are prone to deformation during transportation, which affects their dimensional accuracy and causes unqualified products.

[0003] Special clamping tools are generally flexible tools that clamp thin-walled parts by vacuum adsorption. However, for some heavy thin-walled parts, the adsorption stability of such clamping tools is poor, and there is a risk of thin-walled parts falling. In addition, the cost of such clamping tools is relatively high and the applicability is poor. Summary of the invention

[0004] The purpose of the present invention is to provide a thin-walled part supporting tool and a method of using the same, which supports the inner wall surface of the thin-walled part to resist deformation caused by the clamping tool when the thin-walled part is clamped. The thin-walled part has high dimensional accuracy and does not need to be transported using special clamping tool, thereby reducing costs.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] In one aspect, the present invention provides a thin-walled component support tool, which is arranged in an inner cavity of a thin-walled component, wherein at least one side of the thin-walled component is provided with an opening communicating with the inner cavity, and the thin-walled component support tool comprises:

[0007] A flexible adsorption portion, wherein the flexible adsorption portion has plasticity and is used to fill a concave portion on the inner wall surface of the thin-walled part;

[0008] A rigid support portion is connected to the flexible adsorption portion, the rigid support portion is placed in the inner cavity, and the rigid support portion is used to abut against the inner wall surface of the thin-walled part.

[0009] Optionally, the flexible adsorption part is explosion-proof mud, which has plasticity and adsorption properties, fills and fits the recess, and the outer wall surface of the rigid support part is connected to the explosion-proof mud.

[0010] Optionally, a gripping portion is provided on one end surface of the rigid support portion, and the gripping portion is exposed at the opening.

[0011] Optionally, the grasping portion is a handle, and the handle and the rigid supporting portion are an integral structure.

[0012] Optionally, the grabbing portion is a hand holding groove arranged on an end surface of the rigid supporting portion.

[0013] Optionally, the rigid support portion is made of aluminum.

[0014] On the other hand, the present invention provides a method for using a thin-walled component support tool. Using the thin-walled component support tool in any of the above solutions, the specific operation steps are as follows:

[0015] Putting the flexible adsorption part into the inner cavity of the thin-walled part through the opening on one side of the thin-walled part, and making the flexible adsorption part fill the concave part on the inner wall surface of the thin-walled part;

[0016] Installing the rigid support part into the inner cavity of the thin-walled part through the opening on one side of the thin-walled part, and making the rigid support part in close contact with the flexible adsorption part, so that the flexible adsorption part and the rigid support part fill the inner cavity of the thin-walled part;

[0017] Using a clamping tool to clamp the outer wall surface of the thin-walled part to move the thin-walled part to a target position;

[0018] After the clamping tool carries the thin-walled component to the target position, the rigid supporting portion and the flexible adsorption portion are taken out from the inner cavity of the thin-walled component.

[0019] Optionally, the flexible adsorption part covers the inner wall surface of the thin-walled part, and then the rigid support part is installed into the inner cavity of the thin-walled part, and the rigid support part is made to be in close contact with the flexible adsorption part, so that the flexible adsorption part and the rigid support part fill the inner cavity of the thin-walled part.

[0020] Optionally, a force in a direction away from the thin-walled part is applied to a grabbing portion on one end surface of the rigid support portion, so as to remove the rigid support portion from the inner cavity of the thin-walled part.

[0021] Optionally, the flexible adsorption portion is peeled off from the concave portion of the thin-walled member by a scraper.

[0022] The beneficial effects of the present invention are:

[0023] The present invention provides a thin-walled component support tool, comprising a flexible adsorption portion and a rigid support portion, wherein the flexible adsorption portion has plasticity and is filled into a concave portion on the inner wall surface of the thin-walled component when in use. The rigid support portion is placed in the inner cavity of the thin-walled component through the opening of the thin-walled component, the rigid support portion abuts against the inner wall surface of the thin-walled component, and the rigid support portion abuts against the flexible adsorption portion. Thus, the inner wall surface of the thin-walled component can be supported by the flexible adsorption portion and the rigid support portion, so that when the clamping tool clamps the thin-walled component, the thin-walled component is not easily deformed, the dimensional accuracy of the thin-walled component is high, and there is no need to use a special clamping tool for handling, thereby reducing costs.

[0024] The present invention also provides a method for using a thin-walled part supporting tooling, which uses the thin-walled part supporting tooling to support the inner wall surface of the thin-walled part, and can resist deformation caused by the clamping tooling clamping the thin-walled part, and the dimensional accuracy of the thin-walled part is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure after the flexible adsorption portion and the thin-walled member are assembled according to an embodiment of the present invention;

[0026] Figure 2 It is a schematic diagram of the structure after the thin-walled component support tooling and the thin-walled component are assembled according to an embodiment of the present invention;

[0027] Figure 3 It is a structural schematic diagram of a thin-walled component supporting tooling provided in an embodiment of the present invention and a thin-walled component being clamped by a clamping tooling after being assembled.

[0028] In the figure:

[0029] 10. Thin-walled part; 11. Inner wall surface; 12. Concave portion; 13. Outer wall surface; 20. Clamping tool;

[0030] 100, flexible adsorption part; 200, rigid support part; 300, grasping part. DETAILED DESCRIPTION

[0031] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0035] like Figure 1-Figure 3 As shown, this embodiment provides a thin-walled component support tooling, which is arranged in the inner cavity of the thin-walled component 10, and at least one side of the thin-walled component 10 is provided with an opening connected to the inner cavity. The recessed portion 12 on the inner wall surface 11 of the thin-walled component 10 can be an annular groove, which is the position where the wall thickness of the thin-walled component 10 is the thinnest.

[0036] The thin-walled component support tooling includes a flexible adsorption portion 100 and a rigid support portion 200, wherein the flexible adsorption portion 100 is plastic and can change its shape at will. When in use, the flexible adsorption portion 100 is filled into the concave portion 12 on the inner wall surface 11 of the thin-walled component 10. The rigid support portion 200 is placed in the inner cavity of the thin-walled component 10 through the opening of the thin-walled component 10, and the rigid support portion 200 abuts against the inner wall surface 11 of the thin-walled component 10, and the rigid support portion 200 abuts against the flexible adsorption portion 100. Thus, the inner wall surface 11 of the thin-walled component 10 can be supported by the flexible adsorption portion 100 and the rigid support portion 200, so that when the clamping tooling 20 clamps the thin-walled component 10, the thin-walled component 10 is not easily deformed, the dimensional accuracy of the thin-walled component 10 is high, and there is no need to use a special clamping tooling 20 for handling, which reduces the cost.

[0037] Optionally, after using the thin-walled part supporting tooling in this embodiment to support the inner wall surface 11 of the thin-walled part 10, the thin-walled part 10 is clamped using the clamping tooling 20. The deformation of the thin-walled part 10 can be controlled to less than 0.1 mm, meeting product requirements. The deformation of the thin-walled part 10 is controllable and the dimensional accuracy is high.

[0038] The flexible adsorption part 100 in this embodiment can be made of explosion-proof mud, which fills and fits the concave part 12 of the thin-walled part 10, and the outer wall surface 13 of the rigid support part 200 is tightly fitted with the explosion-proof mud. Among them, the explosion-proof mud is a high molecular polymer with good plasticity and adsorption, so it can be bonded to the inner wall surface 11 of the thin-walled part 10, not easy to fall off, and convenient for the subsequent installation of the rigid support part 200. And the explosion-proof mud can resist a certain impact force, so when the clamping tool 20 clamps the thin-walled part 10, the explosion-proof mud can offset the force applied by the clamping tool 20 to the thin-walled part 10, so as to improve the ability of the thin-walled part 10 to resist deformation, so that the deformation of the thin-walled part 10 is relatively small.

[0039] Further, see Figure 2 In this embodiment, a gripping portion 300 is provided on one end surface of the rigid support portion 200, and the gripping portion 300 is exposed in the opening. The provision of the gripping portion 300 facilitates the operator to take the rigid support portion 200 out of the inner cavity of the thin-walled member 10, and the taking is easy.

[0040] As an optional solution, the gripping portion 300 can be configured as a handle, the handle is C-shaped, both ends of the handle are connected to one end surface of the rigid support portion 200, and the handle and the rigid support portion 200 are an integral structure.

[0041] Of course, in other embodiments, the gripping portion 300 may also be a hand-held groove provided on one end surface of the rigid support portion 200. The hand-held groove can also facilitate the operator to take the rigid support portion 200 out of the inner cavity of the thin-walled member 10, making it easy to take. Moreover, the hand-held groove is embedded in the rigid support portion 200, will not interfere with the clamping tool 20, and has a more beautiful appearance without protruding parts.

[0042] Furthermore, the rigid support part 200 in this embodiment is made of aluminum. Aluminum is light in weight, so the thin-walled component support tooling is relatively lightweight, which can reduce the pressure of the clamping tooling 20. The clamping tooling 20 can lift the thin-walled component support tooling and the thin-walled component 10 with a relatively small clamping force, further alleviating the deformation problem of the thin-walled component 10. Otherwise, if the weight of the thin-walled component support tooling is large, the clamping tooling 20 can lift the thin-walled component support tooling and the thin-walled component 10 with a relatively large clamping force, which will aggravate the deformation problem of the thin-walled component 10.

[0043] This embodiment also provides a method for using a thin-walled component support tool. Using the thin-walled component support tool, the specific operation steps are as follows:

[0044] The flexible adsorption part 100 is placed into the inner cavity of the thin-walled part 10 through the opening on one side of the thin-walled part 10, and the flexible adsorption part 100 fills the concave part 12 on the inner wall surface 11 of the thin-walled part 10 (see Figure 1 );

[0045] The rigid support part 200 is installed into the inner cavity of the thin-walled part 10 through the opening on one side of the thin-walled part 10, and the rigid support part 200 is in close contact with the flexible adsorption part 100, and the flexible adsorption part 100 and the rigid support part 200 fill the inner cavity of the thin-walled part 10 (see Figure 2 );

[0046] Then, the outer wall surface 13 of the thin-walled part 10 is clamped by the clamping tool 20 (see Figure 3 ) to transport the thin-walled part 10 to a target position;

[0047] After the clamping tool 20 carries the thin-walled workpiece 10 to the target position, the rigid support portion 200 and the flexible adsorption portion 100 are taken out from the inner cavity of the thin-walled workpiece 10;

[0048] The process of transporting the thin-walled part 10 is completed.

[0049] By using the thin-walled part supporting tooling in this embodiment to support the inner wall surface 11 of the thin-walled part 10, it is possible to resist deformation caused when the thin-walled part 10 is clamped by the clamping tooling 20. The dimensional accuracy of the thin-walled part 10 is high, and there is no need to use a special clamping tooling 20 for transportation, thereby reducing costs.

[0050] Of course, in some other embodiments, the flexible adsorption part 100 can also completely cover the inner wall surface 11 of the thin-walled part 10, and then the rigid support part 200 can be installed in the inner cavity of the thin-walled part 10, and the rigid support part 200 can be closely contacted with the flexible adsorption part 100, and the flexible adsorption part 100 and the rigid support part 200 can fill the inner cavity of the thin-walled part 10. At this time, the entire inner wall surface 11 of the thin-walled part 10 is covered with the flexible adsorption part 100, and the flexible adsorption part 100 can play a certain shock-absorbing role, thereby protecting the thin-walled part 10, avoiding direct contact between the rigid support part 200 and the two rigid parts of the thin-walled part 10, and the effect of alleviating the deformation problem of the thin-walled part 10 is better.

[0051] Furthermore, the operator can hold the grabbing portion 300 on one end surface of the rigid support portion 200 and apply a force on the grabbing portion 300 on one end surface of the rigid support portion 200 in a direction away from the thin-walled part 10 to remove the rigid support portion 200 from the inner cavity of the thin-walled part 10.

[0052] Alternatively, in some embodiments, the thin-walled part supporting tooling further includes a manipulator, which pulls the grasping portion 300 on one end surface of the rigid support portion 200 to apply a force on the grasping portion 300 on one end surface of the rigid support portion 200 in a direction away from the thin-walled part 10, thereby removing the rigid support portion 200 from the inner cavity of the thin-walled part 10, thereby improving the degree of automation of the thin-walled part supporting tooling and reducing the labor intensity of the operator.

[0053] Furthermore, the operator can manually remove the flexible adsorption portion 100 from the concave portion 12 of the thin-walled part 10 by holding a scraper, so as to avoid the flexible adsorption portion 100 remaining on the inner wall surface 11 of the thin-walled part 10 and ensure the cleanliness of the thin-walled part 10.

[0054] Alternatively, in some embodiments, the scraper can also be connected to the robot, and the robot can be controlled to use the scraper to peel off the flexible adsorption portion 100 from the recess 12 of the thin-walled part 10, thereby improving the automation level of the thin-walled part support tooling and reducing the labor intensity of the operator.

[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A thin-walled component support tool, arranged in an inner cavity of a thin-walled component (10), wherein at least one side of the thin-walled component (10) is provided with an opening communicating with the inner cavity, characterized in that: The thin-walled component supporting tooling comprises: A flexible adsorption portion (100), the flexible adsorption portion (100) having plasticity, and the flexible adsorption portion (100) being used to fill a recess (12) on an inner wall surface (11) of the thin-walled member (10); A rigid support portion (200) is connected to the flexible adsorption portion (100), the rigid support portion (200) is placed in the inner cavity, and the rigid support portion (200) is used to abut against the inner wall surface (11) of the thin-walled member (10).

2. The thin-walled component support tooling according to claim 1, characterized in that: The flexible adsorption part (100) is explosion-proof mud, which has plasticity and adsorption properties. The explosion-proof mud fills and fits the recess (12), and the outer wall surface (13) of the rigid support part (200) is connected to the explosion-proof mud.

3. The thin-walled component support tooling according to claim 1, characterized in that: A gripping portion (300) is provided on one end surface of the rigid support portion (200), and the gripping portion (300) is exposed at the opening.

4. The thin-walled component support tooling according to claim 3, characterized in that: The grasping portion (300) is a handle, and the handle and the rigid support portion (200) are an integral structure.

5. The thin-walled component supporting tooling according to claim 3, characterized in that: The grabbing portion (300) is a hand-holding groove arranged on an end surface of the rigid supporting portion (200).

6. The thin-walled component support tooling according to claim 1, characterized in that: The rigid support part (200) is made of aluminum.

7. A method for using a thin-walled component support tool, characterized in that: Using the thin-walled part support tooling described in any one of claims 1 to 6, the specific operation steps are as follows: The flexible adsorption portion (100) is placed into the inner cavity of the thin-walled member (10) through an opening on one side of the thin-walled member (10), and the flexible adsorption portion (100) fills the concave portion (12) on the inner wall surface (11) of the thin-walled member (10); Installing the rigid support part (200) into the inner cavity of the thin-walled part (10) through the opening on one side of the thin-walled part (10), and making the rigid support part (200) in close contact with the flexible adsorption part (100), so that the flexible adsorption part (100) and the rigid support part (200) fill the inner cavity of the thin-walled part (10); Using a clamping tool (20) to clamp the outer wall surface (13) of the thin-walled part (10) to move the thin-walled part (10) to a target position; After the clamping tool (20) moves the thin-walled component (10) to a target position, the rigid support portion (200) and the flexible adsorption portion (100) are removed from the inner cavity of the thin-walled component (10).

8. The method for using the thin-walled component support tooling according to claim 7, characterized in that: The flexible adsorption part (100) covers the inner wall surface (11) of the thin-walled part (10), and then the rigid support part (200) is installed in the inner cavity of the thin-walled part (10), and the rigid support part (200) is made to be in close contact with the flexible adsorption part (100), so that the flexible adsorption part (100) and the rigid support part (200) fill the inner cavity of the thin-walled part (10).

9. The method for using the thin-walled component support tooling according to claim 7, characterized in that: A force in a direction away from the thin-walled component (10) is applied to a grabbing portion (300) on one end surface of the rigid support portion (200) to remove the rigid support portion (200) from the inner cavity of the thin-walled component (10).

10. The method for using the thin-walled component supporting tooling according to claim 7, characterized in that: The flexible adsorption portion (100) is peeled off from the concave portion (12) of the thin-walled member (10) by a scraper.

Images