A lithium tantalate infrared sensing network system

Abstract

The application relates to the technical field of infrared induction, and discloses a lithium tantalate infrared induction network system, which comprises a substrate composed of a support substrate and an ultralow-thermal-conductivity thermal insulation layer, the support substrate is a silicon-based or sapphire-based material, the ultralow-thermal-conductivity thermal insulation layer is composed of a modified silica aerogel composite layer and is integrated with the support substrate through a low-temperature plasma bonding process; a lithium tantalate sensing module containing a first electrode layer, a lithium tantalate wafer and a second electrode layer; a signal transmission link for ensuring good electrical conductivity; an infrared absorption film for balancing the absorption efficiency and the mechanical stability of the film layer; a distributed module with a built-in adaptive noise suppression algorithm; through the ultralow-thermal-conductivity thermal insulation layer, heat loss to the environment is significantly reduced, and the thermal response performance of the detector is improved; through doping of zirconium oxide nanoparticles, a shielding layer is formed, infrared radiation is effectively shielded, and heat loss is further reduced.

Description

TECHNICAL FIELD

[0001] The application relates to the field of infrared induction technology, and particularly relates to a lithium tantalate infrared induction network system. BACKGROUND

[0002] Infrared induction technology plays an important role in many fields, such as environmental monitoring, medical diagnosis, security monitoring, smart home, etc. By detecting the infrared radiation emitted by an object, the temperature, movement and other information of the object can be perceived. Lithium tantalate (LiTaO3) is an important ferroelectric material with excellent piezoelectric, electro-optic and nonlinear optical properties, and is widely used in the field of infrared detection. It can realize the collection, transmission and processing of multi-point infrared signals, and provide more comprehensive and accurate monitoring means for various application scenarios.

[0003] The patent with the publication number CN118215382A discloses a lithium tantalate pyroelectric infrared detector and a manufacturing method thereof. The detector comprises, from bottom to top, a support substrate, a heat insulation layer, a first bonding layer, a second bonding layer, a first electrode layer, a lithium tantalate wafer, a second electrode layer and an infrared absorption layer. The support substrate and the heat insulation layer together form a composite support structure, which realizes overall support of the lithium tantalate wafer and avoids the problem of local suspension of the lithium tantalate wafer in the existing lithium tantalate pyroelectric infrared detector. The ability of the lithium tantalate pyroelectric infrared detector to resist external mechanical vibration is improved, and the microphone effect of the lithium tantalate pyroelectric infrared detector is greatly reduced. At the same time, the heat conductivity of the heat insulation layer is less than or equal to 0.05 W / (m·K), which can ensure the heat insulation performance and maintain the high detection rate of the lithium tantalate pyroelectric infrared detector.

[0004] In the above-mentioned patent, the heat conduction efficiency and heat insulation effect are improved by the design of the support substrate boss and the heat insulation layer. However, the heat conductivity of the heat insulation layer is still relatively high (≤0.1 W / (m·K)), which may cause some heat to still dissipate to the environment, affecting the thermal response performance of the detector. In addition, the material selection of the heat insulation layer, such as inorganic aerogel and organic aerogel, may have stability problems in actual application. In addition, the pyroelectric charge generated by the lithium tantalate wafer needs to be transmitted to the external circuit through multiple layers, including the first electrode layer, the second bonding layer and the first bonding layer, which increases the complexity of signal transmission and potential signal loss. Based on this, the present application designs a lithium tantalate infrared induction network system to solve the above problems. SUMMARY

[0005] The purpose of the present application is to provide a lithium tantalate infrared induction network system that solves the problem of heat dissipation and difficult signal transmission in the background art.

[0006] In order to solve the above technical problems, the present application provides the following technical solutions:​

[0007] A lithium tantalate infrared sensing network system, comprising:

[0008] A substrate, composed of a supporting substrate and an ultra-low thermal conductivity insulation layer, the supporting substrate is a silicon-based or sapphire-based material, with a thickness of 200-500 μm, and a surface formed with a periodic array of protrusions by a photolithography process, the protrusions having a height of 10-50 μm and a pitch of 50-200 μm, the ultra-low thermal conductivity insulation layer composed of a modified silica aerogel composite layer, with a thermal conductivity of ≤0.03 W / (m·K), a density of 0.1-0.3 g / cm3, a porosity of ≥95%, and a thickness of 50-200 μm, integrated with the supporting substrate by a low-temperature plasma bonding process;

[0009] A lithium tantalate sensing module, containing a first electrode layer, a lithium tantalate wafer, and a second electrode layer, the lithium tantalate wafer having a thickness of 10-50 μm, and the first and second electrode layers being platinum materials with a thickness of 50-200 nm to balance mechanical strength and pyroelectric properties;

[0010] A signal transmission link, containing a conductive via through the supporting substrate, filled with gold and copper materials, with an electrical resistivity of ≤2 μΩ·cm, directly connecting the first electrode layer to an external readout circuit to ensure good electrical conductivity;

[0011] An infrared absorption film, composed of vanadium oxide (V2O5) nanostructures, with a thickness of 0.5-2 μm to balance absorption efficiency and mechanical stability of the film layer; A distributed module, with an adaptive noise suppression algorithm built-in, supporting multi-node signal synchronous acquisition.

[0012] Preferably, the ultra-low thermal conductivity insulation layer includes a reinforcing skeleton, the reinforcing skeleton being formed by blending silicon carbide nanowires with the aerogel matrix to form a three-dimensional network structure, with a compressive strength of ≥5 MPa; the reinforcing skeleton further includes a shielding layer, the shielding layer being doped with zirconium oxide nanoparticles in the aerogel with a particle size of 10-50 nm, with an infrared reflectivity of ≥90% to perform radiation shielding.

[0013] Preferably, the polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° to make the lithium tantalate wafer have the best pyroelectric coefficient after polarization.

[0014] Preferably, the polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° to make the lithium tantalate wafer have the best pyroelectric coefficient after polarization.

[0015] Preferably, the polarization treatment of the lithium tantalate wafer uses an electric field polarization method, with a polarization electric field strength of 10-30 kV / cm, a polarization temperature of 80-120°C, and a polarization time of 10-30 minutes, to ensure that the internal domains of the wafer are fully oriented and arranged, thereby obtaining good pyroelectric properties.

[0016] The weak electrical signal generated by the lithium tantalate sensing module is transmitted quickly and with low loss to the external readout circuit through the conductive via in the signal transmission link. The conductive via penetrates the support substrate and is filled with gold and copper materials with a resistivity of ≤2 μΩ·cm, ensuring good electrical conductivity. In addition, the parasitic capacitance of the conductive via is ≤0.1 pF, effectively reducing noise interference during signal transmission and ensuring signal integrity. During signal transmission, the distributed module plays a key role, with its built-in adaptive noise suppression algorithm using a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40 dB in the frequency range 0.1-100 Hz, with a sampling rate ≥3 MHz and a signal-to-noise ratio ≥90 dB. This algorithm can monitor the noise situation in real time during signal transmission and automatically adjust the filter parameters to adapt to different noise environments.

[0017] Preferably, the gold and copper materials filled in the conductive via are filled using a chemical plating method, ensuring good electrical conductivity and mechanical strength; the parasitic capacitance of the conductive via is ≤0.1 pF to reduce noise interference during signal transmission.

[0018] Preferably, the nanostructure is one or more of a nanowire, nanotube, or nanoparticle to achieve effective absorption of infrared light; the infrared absorption rate of the infrared absorption film is ≥95%, with excellent absorption performance in the infrared waveband of 3-14 μm.

[0019] Preferably, the distributed module uses a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40 dB in the frequency range 0.1-100 Hz, with a sampling rate ≥3 MHz and a signal-to-noise ratio ≥90 dB; the distributed module also integrates a temperature compensation unit, a dynamic bias circuit, and a digital filter module to further improve the stability and detection accuracy of the system.

[0020] The distributed module also integrates a temperature compensation unit, a dynamic bias circuit, and a digital filter module to further improve the stability and detection accuracy of the system. The temperature compensation unit can monitor environmental temperature changes in real time and compensate the signal accordingly, eliminating the influence of temperature drift on the detection results. The dynamic bias circuit automatically adjusts the bias voltage according to the signal strength, ensuring that the signal is transmitted in the best state. The digital filter module further filters the signal to remove high-frequency noise and interference signals.

[0021] Preferably, the system is deployed as an MxN array (M, N >= 8) with a cell spacing of 1-5 mm, the array is interconnected through a CAN bus with a transmission delay <= 1 ms, and supports real-time data fusion under the OSI model protocol stack.

[0022] Preferably, the system is also configured with a self-checking module, including a blackbody radiation reference source and a fault diagnosis circuit, which can monitor the running state of the system in real time and ensure the reliability and stability of the system.

[0023] The self-checking module configured in the system is the key subsystem to ensure the long-term stable operation of the entire lithium tantalate infrared sensing network system, and its core components include a blackbody radiation reference source and a fault diagnosis circuit, which work together to realize real-time monitoring and fault warning of the system running state.

[0024] Preferably, the system is packaged with an airtight ceramic tube shell, the thermal expansion coefficient of the ceramic tube shell is 6.5-7.5ppm / ℃, the inside is filled with argon with a purity of >= 99.999%, and the performance indicators of the system include a detection rate , a thermal response time constant tau <= 20ms, and an equivalent noise power .

[0025] The system is packaged with an airtight ceramic tube shell, the thermal expansion coefficient of the ceramic tube shell is accurately controlled at 6.5-7.5ppm / ℃, this feature enables the system to maintain the stability of the internal structure when facing temperature changes, avoiding mechanical stress damage caused by uneven thermal expansion, the high-purity argon (purity >= 99.999%) filled inside provides an inert gas environment for the system, effectively reducing the absorption and scattering of infrared radiation by gas molecules, improving the sensitivity of infrared detection, and the high-purity argon can also prevent the internal components of the system from being chemically corroded by oxidation, prolonging the service life of the system.

[0026] Compared with the prior art, the present application has the following beneficial effects:

[0027] 1、The present application uses modified silica aerogel composite layer as an ultra-low thermal conductivity insulation layer, which significantly reduces heat loss to the environment compared to traditional insulation layers, improving the thermal response performance of the detector; the design of the reinforced skeleton in the insulation layer not only improves the compressive strength of the material, but also forms a shielding layer by doping zirconia nanoparticles, effectively shielding infrared radiation and further reducing heat loss.

[0028] 2、The signal transmission link of the application adopts the conductive via hole penetrating through the supporting substrate, directly connects the first electrode layer to the external readout circuit, reduces the number of layers and complexity of signal transmission, and reduces potential signal loss; the conductive via hole is filled with gold and copper materials, good conductivity and mechanical strength are ensured through the chemical plating method, and the parasitic capacitance is as low as below 0.1 pF, effectively reducing noise interference in the signal transmission process.

[0029] 3、The lithium tantalate wafer of the application is subjected to accurate cutting angle selection and electric field polarization treatment, so that the internal domain is fully oriented and arranged, thereby being capable of generating significant pyroelectric effect when the temperature changes; the infrared absorption film adopts vanadium oxide (V2O5) nanostructure, has an absorption rate of up to above 95% for light in the 3-14 μm infrared waveband, and can efficiently convert infrared light energy into heat energy, further improving the performance of the detector. BRIEF DESCRIPTION OF DRAWINGS

[0030] Fig. 1 The figure is a system structure diagram of the application;

[0031] Fig. 2 The figure is a flowchart of system manufacturing and parameter configuration of the application;

[0032] Fig. 3 The figure is an application scenario flowchart of the application. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the application.

[0034] Please refer to Figs. 1-3 In the embodiments of the application, a lithium tantalate infrared sensing network system comprises:

[0035] The substrate is composed of a supporting substrate and an ultralow thermal conductivity insulation layer, the supporting substrate is a silicon-based or sapphire-based material, the thickness is 200-500 μm, the surface is formed with a periodic boss array through a photolithography process, the boss height is 10-50 μm, the pitch is 50-200 μm, the ultralow thermal conductivity insulation layer is composed of a modified silica aerogel composite layer, the thermal conductivity is ≤0.03 W / (m·K), the density , the porosity is ≥95%, the thickness is 50-200 μm, and the supporting substrate is integrated through a low-temperature plasma bonding process;

[0036] ​The lithium tantalate sensing module includes a first electrode layer, a lithium tantalate wafer, and a second electrode layer. The lithium tantalate wafer has a thickness of 10-50 μm, and the first and second electrode layers are made of platinum material with a thickness of 50-200 nm to balance mechanical strength and pyroelectric performance.

[0037] The signal transmission link includes conductive vias that penetrate the support substrate and are filled with gold and copper materials with a resistivity of ≤2μΩ·cm. It directly connects the first electrode layer to the external readout circuit to ensure good conductivity.

[0038] Infrared absorption film, made of vanadium oxide ( It is composed of nanostructures with a thickness of 0.5-2 μm to balance absorption efficiency and mechanical stability of the film;

[0039] The distributed module features a built-in adaptive noise suppression algorithm and supports synchronous acquisition of signals from multiple nodes.

[0040] The ultra-low thermal conductivity insulation layer includes a reinforcing skeleton, which is a three-dimensional network structure formed by blending silicon carbide nanowires with an aerogel matrix and has a compressive strength ≥5 MPa. The reinforcing skeleton also includes a shielding layer, which is doped with zirconia nanoparticles with a particle size of 10-50 nm and an infrared reflectivity ≥90% to perform radiation shielding.

[0041] The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° to make the lithium tantalate wafer have the best pyroelectric coefficient after polarization.

[0042] The polarization treatment of lithium tantalate wafers adopts the electric field polarization method, with a polarization electric field strength of 10-30 kV / cm, a polarization temperature of 80-120℃, and a polarization time of 10-30 minutes, to ensure that the electric domains inside the wafer are fully oriented and aligned, thereby obtaining good pyroelectric performance.

[0043] The gold and copper materials filling the conductive vias are chemically plated to ensure good conductivity and mechanical strength; the parasitic capacitance of the conductive vias is ≤0.1pF to reduce noise interference during signal transmission.

[0044] The nanostructure consists of one or more of nanowires, nanotubes, or nanoparticles to achieve effective absorption of infrared light; the infrared absorption film has an infrared absorption rate of ≥95% and exhibits excellent absorption performance in the infrared band of 3-14μm.

[0045] The distributed module employs a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB, sampling rate ≥3MHz, and signal-to-noise ratio ≥90dB in the frequency domain range of 0.1-100Hz. The distributed module also integrates a temperature compensation unit, dynamic bias circuit, and digital filtering module to further improve the system's stability and detection accuracy.

[0046] The working principle of this invention is as follows: when external infrared radiation is incident on the system, it is first absorbed by the infrared absorption film. This film is made of vanadium oxide ( The lithium tantalate sensor module, composed of nanostructures such as nanowires, nanotubes, or nanoparticles, achieves an absorption rate of ≥95% in the 3-14μm infrared band. These nanostructures, through their unique physical properties, efficiently convert absorbed infrared light energy into heat energy, causing temperature changes in the lithium tantalate sensor module that is tightly bonded to the infrared absorption film. The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane, and it undergoes precise cutting angle (θ = 36°±2°) and electric field polarization treatment (polarization electric field strength 10-30 kV / cm, polarization temperature 80-120℃, polarization time 10-30 minutes) to ensure the fully oriented arrangement of its internal electric domains. This results in a significant pyroelectric effect when the temperature changes, achieving efficient conversion of heat energy into electrical energy. In this process, the first and second electrode layers (platinum material, thickness 50-200nm) not only provide the necessary electrode structure for the pyroelectric effect but also ensure the stability of the sensor module through their excellent mechanical strength.

[0047] The weak electrical signal generated by the lithium tantalate sensing module is transmitted quickly and with low loss to the external readout circuit through conductive vias in the signal transmission link. The conductive vias penetrate the supporting substrate and are filled with gold and copper materials with a resistivity ≤2μΩ·cm, ensuring good conductivity. Simultaneously, the conductive vias are filled using a chemical plating method, giving them excellent mechanical strength and enabling them to withstand complex operating environments. Furthermore, the parasitic capacitance of the conductive vias is ≤0.1pF, effectively reducing noise interference during signal transmission and ensuring signal integrity. During signal transmission, the distributed module plays a crucial role. Its built-in adaptive noise suppression algorithm, employing a wavelet transform-Kalman filter hybrid algorithm, achieves noise suppression ≥40dB, a sampling rate ≥3MHz, and a signal-to-noise ratio ≥90dB in the frequency domain range of 0.1-100Hz. This algorithm can monitor noise during signal transmission in real time and automatically adjust filtering parameters to adapt to different noise environments.

[0048] The distributed module also integrates a temperature compensation unit, a dynamic bias circuit, and a digital filtering module to further improve the system's stability and detection accuracy. The temperature compensation unit can monitor changes in ambient temperature in real time and compensate the signal accordingly, eliminating the impact of temperature drift on the detection results; the dynamic bias circuit automatically adjusts the bias voltage according to the signal strength to ensure that the signal is transmitted under optimal conditions; and the digital filtering module further filters the signal to remove high-frequency noise and interference signals.

[0049] Please see Figs. 1-3 In this embodiment of the invention, the system is deployed as an M×N array (M, N≥8), with a unit spacing of 1-5mm. The arrays are interconnected via a CAN bus, with a transmission delay of ≤1ms, and support real-time data fusion under the OSI model protocol stack.

[0050] The system is also equipped with a self-test module, which includes a blackbody radiation reference source and a fault diagnosis circuit, enabling real-time monitoring of the system's operating status and ensuring its reliability and stability.

[0051] The system is encapsulated in a hermetically sealed ceramic shell with a thermal expansion coefficient of 6.5-7.5 ppm / ℃, and is filled with argon gas with a purity ≥99.999%. The system's performance indicators include detectivity. Thermal response time constant τ≤20ms, equivalent noise power .

[0052] The working principle of this invention embodiment is as follows: In practical application scenarios, the system is deployed as an M×N array (M, N≥8), with a unit spacing of 1-5mm, interconnected via a CAN bus, and a transmission delay ≤1ms, supporting real-time data fusion under the OSI model protocol stack. When the system is installed at the end of a robotic arm, at a distance of 0.5-2m from the monitored target, the infrared radiation (temperature range 80-300℃) of the target area is transmitted through... After absorption by nanowires, it causes Temperature changes in the wafer (ΔT≈0.05-0.5℃) generate pyroelectric charges. These charges are rapidly transferred to the FPGA circuit through platinum electrodes and copper vias, with a transmission loss of ≤2%. During the data processing stage, the temperature compensation unit uses a Pt100 sensor to correct ambient temperature drift in real time (±0.1℃ accuracy), and the dynamic bias circuit applies a 50V bias voltage (0.8mV ripple) to improve the signal-to-noise ratio to 92dB.

[0053] The blackbody radiation reference source, as a high-precision radiation standard, can simulate infrared radiation signals of known intensity. By periodically activating the blackbody radiation reference source, stable infrared radiation is generated inside the system. This radiation is received by the infrared absorption film and converted into heat energy, which in turn triggers the lithium tantalate sensing module to produce a corresponding pyroelectric signal. This process is equivalent to an internal calibration of the system, effectively eliminating detection errors caused by environmental changes or system aging.

[0054] The system is equipped with a self-checking module that activates the blackbody reference source (emissivity 0.96, temperature 50℃±0.3℃) every 24 hours for calibration. The impedance spectrum analysis detects abnormal units (positioning error ≤80μm), ensuring the reliability and stability of the system. During the entire working process, the ultra-low thermal conductivity insulation layer effectively reduces heat loss through its unique reinforced skeleton and shielding layer design, ensuring the high-performance operation of the system in high-temperature difference environments.

[0055] The fault diagnosis circuit is responsible for real-time monitoring of the electrical performance of each key node in the system. It collects voltage and current signals in the signal transmission link and the operating parameters of the distributed modules to conduct a comprehensive health check on the system. Once an abnormal signal is detected, the fault diagnosis circuit can quickly locate the fault position and accurately determine the fault type through impedance spectrum analysis and other technical means. For example, when the impedance of a certain unit in the system changes abnormally, the fault diagnosis circuit can determine whether it is electrode fracture or interlayer debonding through impedance spectrum analysis, and feedback the fault information to the system control center for timely maintenance measures to prevent the fault from further expanding and affecting the normal operation of the system.

[0056] During system operation, the gas-tight ceramic tube shell and the internal argon gas work together to ensure the long-term stability of the system performance. For example, in harsh environments such as high temperature and high humidity, the gas-tight ceramic tube shell effectively blocks the intrusion of external moisture and impurities, while the internal high-purity argon gas maintains the dryness and cleanliness of the system interior, ensuring that the lithium tantalate sensing module, infrared absorption film, and other key components are always in optimal working condition, thereby guaranteeing the stable output of the system's high-performance indicators such as detection rate , thermal response time constant τ ≤ 20ms, equivalent noise power .

[0057] Please refer to Figs. 1-3 In the embodiment of the present application, the application of the lithium tantalate infrared sensing network system in intelligent factory temperature monitoring is verified, including the following steps:

[0058] Step S1, system manufacturing and parameter configuration:

[0059] Step a, substrate preparation:

[0060] Supporting substrate: 4-inch sapphire wafer (thickness 300 pm) was selected to form the array of protrusions (height 30 pm, pitch 100 pm) by deep reactive ion etching (DRIE), and the surface roughness was ≤10 nm (AFM measurement);

[0061] Ultra-low thermal conductivity insulation layer: modified silica aerogel was prepared by sol-gel method, doped with 15 wt% zirconia nanoparticles (particle size 20 nm), and the thermal conductivity was reduced to 0.025 W / (m·K) after supercritical drying, the porosity was 97%, and the compressive strength was 6.2 MPa; integrated with the supporting substrate by plasma activated bonding (temperature 200°C, pressure 10 kN), the interface thermal resistance .

[0062] Step b, lithium tantalate sensor module integration:

[0063] Lithium tantalate wafer: 36° Y-cut type monocrystalline wafer (thickness 20 pm) was selected to form a gradient doped layer by ion implantation (energy 50 keV, dose ), and the pyroelectric coefficient was increased to ; ;

[0064] Electrode layer: platinum electrode (thickness 150 nm, square resistance 8 Ω / sq) was deposited by magnetron sputtering, and the electrode patterning accuracy was ±1 pm.

[0065] Step c, signal transmission link construction:

[0066] Conductive via: TSV process (pore diameter 15 pm, aspect ratio 10:1) was used, and titanium nitride barrier layer (100 nm) + electroplated copper filling (resistivity 1.8 pΩ·cm) was deposited on the pore wall, the via resistance was 42 mΩ, and the parasitic capacitance was 0.08 pF;

[0067] Interconnection structure: gold wire ball bonding (diameter 25 pm) was used to connect the via and the external FPGA circuit.

[0068] Step d, preparation of infrared absorption film:

[0069] Vanadium oxide nanowire array: VO2 nanowire (diameter 80 nm, length 2 pm) was grown by CVD method, with a period of 1.2 pm and a duty cycle of 0.5, and after FDTD simulation optimization, the absorption rate was 97.3% in the 8-14 pm wave band.

[0070] Step e, deployment of distributed modules:

[0071] Algorithm configuration: wavelet transform + Kalman filter, noise suppression 43 dB (0.1-100 Hz frequency band);

[0072] Array scale: Deploy 8x8 cell array (pitch 3 mm), CAN bus transmission rate 1 Mbps, delay 0.8 ms.

[0073] Step S2, application scenario and running process:

[0074] Scenario: Real-time temperature monitoring of high-temperature components (welding points, motor coils) in automobile battery production line, requiring detection accuracy ±1℃, response time ≤50 ms.

[0075] Step a, system installation, package the array in airtight ceramic tube (CTE=7.0 ppm / ℃, internal argon purity 99.999%), install it at the end of the mechanical arm, 0.5-2 m away from the monitoring target.

[0076] Step b, signal acquisition, after the infrared radiation (temperature range 80-300℃) of the target area is absorbed by the VO2 nanowire, it causes Wafer temperature change (ΔT≈0.05-0.5℃), generates pyroelectric charge .

[0077] Step c, signal transmission, charge through platinum electrode→copper via→FPGA circuit, transmission loss ≤2% (compared with 15% loss of existing technology multilayer bonding structure);

[0078] Step d, data processing:

[0079] Temperature compensation: Pt100 sensor real-time correction of environmental temperature drift (±0.1℃ accuracy);

[0080] Dynamic bias: Apply a 50 V bias voltage (ripple 0.8 mV) to improve the signal-to-noise ratio to 92 dB;

[0081] Data fusion: upload to central server through Ethernet, generate 2D temperature distribution map (resolution 3 mm / pixel).

[0082] Step e, self-check and maintenance, start blackbody reference source (emissivity 0.96, temperature 50℃±0.3℃) calibration every 24 hours, impedance spectrum analysis detects 2 abnormal units (positioning error ≤80μm).

[0083] The working principle of the embodiment of the application is as follows: as shown in Table 1, the performance test and comparison data are shown (the heat loss rate test condition is 25℃ environment, the target temperature difference is 50℃ for 30 minutes), in thermal management, the ultra-low thermal conductivity insulation layer (0.025 W / (m·K)) combined with the radiation shielding design, the heat loss rate is reduced to 4.5%, supporting the detector to maintain The TSV direct-connect architecture reduces the number of transmission layers and lowers parasitic capacitance to 0.08 pF, enabling the system signal-to-noise ratio to exceed 90 dB, compared to ≤75 dB for similar products.

[0084] Table 1.

[0085] Leveraging the advantages of large-scale deployment, the 8x8 array, combined with adaptive algorithms, can achieve speeds per second. The simultaneous acquisition of data points increases the temperature imaging frame rate to 50 fps, while existing technologies generally have a frame rate of ≤15 fps. Furthermore, the combination of the aerogel-reinforced skeleton (with a compressive strength of 6.2 MPa) and the self-test module enables the MTBF (Mean Time Between Failures) to reach 50,000 hours, while the industry average is 30,000 hours.

[0086] Working principle: When external infrared radiation is incident, it is first absorbed by the infrared absorption film, which contains vanadium oxide. The nanostructure exhibits an absorption rate exceeding 95% in the 3-14μm wavelength range, efficiently converting infrared light energy into heat energy, thus influencing the temperature of the lithium tantalate sensing module it is attached to. The lithium tantalate wafer undergoes precise cutting and electric field polarization treatment, resulting in fully oriented internal domains that generate a significant pyroelectric effect, achieving the conversion of heat energy into electrical energy. The generated weak electrical signal is transmitted quickly and with low loss to the external readout circuit through conductive vias in the signal transmission link. The low resistivity and low parasitic capacitance characteristics of the conductive vias ensure the integrity and stability of the signal transmission.

[0087] During signal transmission, the distributed module plays a crucial role. Its built-in wavelet transform-Kalman filter hybrid algorithm achieves noise suppression of over 40dB in the 0.1-100Hz frequency domain, with a sampling rate and signal-to-noise ratio exceeding 3MHz and 90dB, respectively. Simultaneously, the integrated temperature compensation unit, dynamic bias circuit, and digital filtering module further enhance system stability and detection accuracy. The temperature compensation unit monitors and compensates for changes in ambient temperature in real time, the dynamic bias circuit automatically adjusts the bias voltage based on signal strength, and the digital filtering module further filters out high-frequency noise.

[0088] The system is also equipped with a self-test module, which includes a blackbody radiation reference source and a fault diagnosis circuit. The blackbody radiation reference source is periodically activated to provide a stable infrared radiation signal for the system, enabling internal calibration and eliminating detection errors caused by environmental changes or system aging. The fault diagnosis circuit monitors the electrical performance of each key node of the system in real time. By collecting voltage, current signals and operating parameters, it performs a comprehensive health check. Once an abnormal signal is detected, it can quickly locate the fault and accurately determine the fault type, feeding the fault information back to the system control center for timely repair.

[0089] While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely exemplary of the principles and application of the present application. Numerous modifications and adaptations will occur to those skilled in the art without departing from the spirit and scope of the present application as defined in the appended claims and their equivalents.

Claims

1. A lithium tantalate infrared sensing network system, characterized by, The application relates to a lithium tantalate sensor module, which comprises a substrate, a lithium tantalate sensing module and a signal transmission link. The substrate is composed of a supporting substrate and an ultralow-thermal-conductivity thermal insulation layer, the supporting substrate is a silicon-based or sapphire-based material with a thickness of 200-500 mu m, the surface of the supporting substrate is provided with a periodic convex array formed through a photoetching process, the height of the convex array is 10-50 mu m, the interval of the convex array is 50-200 mu m, the ultralow-thermal-conductivity thermal insulation layer is composed of a modified silica aerogel composite layer, the thermal conductivity of the ultralow-thermal-conductivity thermal insulation layer is less than or equal to 0.03 W / (m*K), the density of the ultralow-thermal-conductivity thermal insulation layer is 0.1-0.3 g / cm3, the porosity of the ultralow-thermal-conductivity thermal insulation layer is greater than or equal to 95%, and the thickness of the ultralow-thermal-conductivity thermal insulation layer is 50-200 mu m; the supporting substrate and the ultralow-thermal-conductivity thermal insulation layer are integrated through a low-temperature plasma bonding process. The lithium tantalate sensing module comprises a first electrode layer, a lithium tantalate wafer and a second electrode layer, the thickness of the lithium tantalate wafer is 10-50 mu m, the first electrode layer and the second electrode layer are made of platinum material and have a thickness of 50-200 nm, and the first electrode layer and the second electrode layer balance the mechanical strength and the pyroelectric property. The signal transmission link comprises a conductive via hole penetrating through the supporting substrate, the conductive via hole is filled with gold and copper material with an electrical resistivity of less than or equal to 2 mu omega*cm, and the conductive via hole directly connects the first electrode layer to an external readout circuit to ensure good conductivity. Infrared absorption film, consisting of nanostructured vanadium oxide (V2O5) ) with thickness 0.5-2 μm to balance absorption efficiency and mechanical stability of the film layer; The distributed module is provided with an adaptive noise suppression algorithm and supports multi-node signal synchronous acquisition. The ultralow-thermal-conductivity thermal insulation layer comprises a reinforcing framework, the reinforcing framework is formed by blending silicon carbide nanowires with an aerogel matrix to form a three-dimensional network structure, and the compressive strength of the reinforcing framework is greater than or equal to 5 MPa; the reinforcing framework further comprises a shielding layer, the shielding layer is doped with zirconium oxide nanoparticles with a particle size of 10-50 nm in the aerogel, and the infrared reflectivity of the shielding layer is greater than or equal to 90% to shield radiation. The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect and improve the sensitivity of infrared detection; the cutting angle theta of the lithium tantalate wafer is 36 DEG + 2 DEG so that the lithium tantalate wafer has the optimal pyroelectric coefficient after polarization. The distributed module adopts a wavelet transform-Kalman filter hybrid algorithm to realize noise suppression of greater than or equal to 40 dB in a frequency range of 0.1-100 Hz, a sampling rate of greater than or equal to 3 MHz and a signal-to-noise ratio of greater than or equal to 90 dB; the distributed module further integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection precision of the system.

2. The lithium tantalate infrared sensing network system of claim 1, wherein: The polarization treatment of the lithium tantalate wafer adopts an electric field polarization method, the polarization electric field intensity is 10-30 kV / cm, the polarization temperature is 80-120 DEG C, and the polarization time is 10-30 minutes to ensure that the domains inside the wafer are fully oriented and arranged, thereby obtaining good pyroelectric property.

3. The lithium tantalate infrared sensing network system of claim 1, wherein: The gold and copper material filled in the conductive via hole is filled by using a chemical plating method to ensure good conductivity and mechanical strength; the parasitic capacitance of the conductive via hole is less than or equal to 0.1 pF to reduce noise interference in the signal transmission process.

4. The lithium tantalate infrared sensing network system of claim 1, wherein: The nanostructure is one or more of nanowires, nanotubes or nanoparticles to effectively absorb infrared light; the infrared absorption rate of the infrared absorption film is greater than or equal to 95%, and the infrared absorption film has excellent absorption performance in an infrared wave band of 3-14 mu m.

5. The lithium tantalate infrared sensing network system of claim 1, wherein: The system is deployed as an M×N array (M, N≥8) with a cell spacing of 1-5 mm, the array is interconnected through a CAN bus, the transmission delay is ≤1 ms, and real-time data fusion under the OSI model protocol stack is supported.

6. The lithium tantalate infrared sensing network system of claim 1, wherein: The system is also configured with a self-checking module containing a blackbody radiation reference source and a fault diagnosis circuit, which can monitor the operating state of the system in real time and ensure the reliability and stability of the system.

7. The lithium tantalate infrared sensing network system of claim 1, wherein: The system package adopts airtight ceramic tube shell, the thermal expansion coefficient of the ceramic tube shell is 6.5-7.5ppm / ℃, the inside is filled with argon with purity ≥99.999%; the performance index of the system includes detection rate , thermal response time constant τ≤20ms, equivalent noise power .

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