Composite material huge micropore type grinding and polishing air floating main shaft

Abstract

The invention discloses a composite material huge micropore type grinding and polishing air floating spindle which comprises a water cooling motor, an air floating bearing and a water-air switch, when liquid flows into a water inlet pipe, a first microswitch is allowed to be triggered, and the first microswitch controls a pneumatic diaphragm valve of the air inlet pipe to be opened. The working sequence of the water inlet pipe and the air inlet pipe can be adjusted through the water-air switch, so that the motor rotor of the water-cooled motor is prevented from rotating when water does not enter the water inlet pipe, the thrust bearing pad made of the graphene bronze composite huge microporous material is ensured to form an air film inevitably during working, and the service life of the thrust bearing pad is prolonged. And thus, the working life and the wafer thinning process quality are ensured.

Description

Technical Field

[0001] The invention relates to the field of integrated circuit manufacturing, in particular to a composite material massive micro-hole type grinding and polishing air-floating spindle for wafer thinning and grinding equipment in semiconductor processing. Background Art

[0002] The grinding and polishing air-floating spindle is an advanced technology in the field of high-speed precision machining. It is mainly composed of motors, air-floating bearings, grinding wheel connectors and other parts. The motor rotor and the air-floating bearing are connected by screws, and the integrated design increases the stability of both. Due to the low kinematic viscosity of the gas, when the spindle rotates at high speed, the compressed gas forms a certain thickness of air film between the upper and lower thrust bearings and the graphite material, and the friction coefficient is low, which makes it have the advantages of high precision, low heat generation, no wear, and no pollution.

[0003] A wafer thinner is a device commonly used for grinding / thinning ultra-high precision semiconductor materials. Before integrated circuit wafer packaging, the wafer thinner is responsible for removing excess substrate material behind the wafer to achieve the required thickness under working conditions. This step helps to reduce the difficulty of subsequent packaging, improve chip heat dissipation efficiency, reduce internal stress, and improve electrical performance. As the core component of the wafer thinner, the air-floating spindle consists of a water-cooled motor and an air-floating bearing. The air-floating bearing is driven by the motor to rotate, which plays a vital role in the wafer thinning process.

[0004] Assuming that the air bearing uses a gasket made of a graphene bronze composite material with a large number of micropores, although it can be thinner, stronger, and more breathable, if it starts to rotate without ventilation, it will undoubtedly cause irreversible damage to the gasket.

[0005] In the above-mentioned air-floating spindle, a water circuit is usually required to cool the water-cooled motor and an air circuit is required to form an air film on the air-floating bearing. However, in actual operation, workers often make mistakes and fail to open the water circuit first and then the air circuit, or do not open the water circuit at all but only open the air circuit to start wafer grinding / thinning, which will also cause great damage to the life of the thinning machine spindle and the wafer processing quality.

[0006] Therefore, there is an urgent need for a graphene bronze composite material that can optimize the grinding and polishing air-floating spindle to prepare a large number of microporous grinding and polishing air-floating spindles. Summary of the invention

[0007] In view of the above problems, the present invention provides a composite material massive microporous polishing air flotation spindle. In order to achieve the above purpose, the present invention provides the following technical solutions: A composite material massive microporous grinding and polishing air flotation spindle, comprising A water-cooled motor, wherein one end of a water tank formed by a motor cooling jacket and a stator outer shaft sleeve is connected to a water inlet pipe, and the other end is connected to a water outlet pipe; An air bearing, comprising a thrust bearing seat and a thrust bearing pad, wherein an air path is formed between the thrust bearing seat and the thrust bearing pad and the support shaft of the water-cooled motor, one end of the air path is connected to the air inlet pipe, and the other end of the air path is connected to the air outlet pipe; A water-gas switch, which allows a first microswitch to be touched when liquid flows into the water inlet pipe, and the first microswitch controls the opening of the pneumatic diaphragm valve of the air inlet pipe; and, when liquid does not flow into the water inlet pipe, the water-gas switch is not allowed to touch the first microswitch and touches the second microswitch, and the second microswitch controls the closing of the pneumatic diaphragm valve of the air inlet pipe and the motor rotor of the water-cooled motor.

[0008] According to one embodiment of the present invention, the water and gas switch comprises a first guide rail, a first swing arm, a second swing arm, a first slider, a first contact, a first micro switch, a second micro switch, a second slider, and a one-way valve; the first guide rail is fixed to the water inlet pipe, the first guide rail is hinged with the first swing arm, the first swing arm is hingedly connected to the second swing arm, the second swing arm is provided with a waist-shaped hole, a bayonet pin moving along the waist-shaped hole is provided in the waist-shaped hole, the bayonet pin is fixed to the first slider, the first slider moves along the first swing arm, the first slider is fixed to the first contact, and the first contact can overlap with the first micro switch or the second micro switch; The first swing rod and the first slider can both overlap with the second slider in a limited position, and when the second slider overlaps with the first swing rod in a limited position, the first swing rod cannot swing; when the second slider overlaps with the first slider in a limited position, the first contact of the first slider only overlaps with the second micro switch in a limited position; The sealing ball of the one-way valve of the water inlet pipe is made of a magnet, and the second slider is made of iron. The sealing ball can attract the second slider to a position where it is not overlapped with the first swing rod and the first slider when there is water flow; the sealing ball can attract the second slider to a position where it is overlapped with the first swing rod and the first slider when there is no water flow; Among them, the first microswitch is communicatively connected with the pneumatic diaphragm valve of the intake pipe, and when the first contact is overlapped with the first microswitch, the pneumatic diaphragm valve is opened; the second microswitch is communicatively connected with the pneumatic diaphragm valve of the intake pipe and the control module of the water-cooled motor, and when the first contact is overlapped with the second microswitch, the pneumatic diaphragm valve is closed, and the motor rotor of the water-cooled motor is closed.

[0009] According to one embodiment of the present invention, the water vapor switch further comprises a third micro switch, a fourth micro switch, a fixing rod, a limit seat, a limit hole, and a limit block; the first guide rail is fixed to one end of the fixing rod, the third micro switch is fixed to one end of the fixing rod, the fourth micro switch is fixed to the other end of the fixing rod, and the third micro switch and the fourth micro switch can both overlap with the first swing rod; the first guide rail is fixed to the limit seat, the limit seat is provided with a limit hole, and the limit hole is provided with a first slider moving along the limit hole; A limiting block is fixed to the first swing rod, and the limiting block can overlap with a side of the second swing rod close to the second sliding block; The third micro switch is in communication connection with the control module of the water-cooled motor, and when the first swing arm is connected with the third micro switch, the control module of the water-cooled motor controls the motor rotor to rotate; The fourth micro switch is in communication connection with the control module of the water-cooled motor. When the first swing arm is connected with the fourth micro switch, the control module of the water-cooled motor controls the motor rotor not to rotate.

[0010] According to one embodiment of the present invention, the fourth micro switch is provided with a magnet, and the second rocker can be attracted by the fourth micro switch with the magnet.

[0011] According to one embodiment of the present invention, the one-way valve includes a conical cylinder, a sealing ball, a spring, and a support block; the outer edge of the conical cylinder is sealed and fixed to the inner circumferential surface of the water inlet pipe, the sealing ball can be sealed and fitted with the inner surface of the conical cylinder, the sealing ball is fixed to one end of the spring, the other end of the spring is fixedly connected to the support block, and the support block is fixed to the inner circumferential surface of the water inlet pipe.

[0012] According to one embodiment of the present invention, the sealing ball is eccentrically provided with a ball hole, a guide rod moving along the ball hole is provided in the ball hole, and the guide rod is fixed to the support block.

[0013] According to one embodiment of the present invention, the composite material massive microporous grinding and polishing air flotation spindle is made of graphene and bronze composite material, which can be a grinding and polishing air flotation spindle with better stability.

[0014] According to one embodiment of the present invention, the water inlet pipe is made of plastic or PVC pipe.

[0015] According to one embodiment of the present invention, the first rocker arm is provided with a second guide rail, the second guide rail is a dovetail guide rail, and the second guide rail is provided with a first sliding block with a dovetail-shaped cross section that moves along the second guide rail.

[0016] According to one embodiment of the present invention, a dovetail groove is provided below the first guide rail, and the second sliding block is dovetail-shaped with a cross section matching the dovetail groove.

[0017] According to one embodiment of the present invention, the thrust bearing seat and the support shaft of the motor rotor are made of a graphene bronze composite material.

[0018] Beneficial effects of the present invention: The present invention provides a composite material mass microporous polishing air flotation spindle, which can adjust the working order of the water inlet pipe and the air inlet pipe through a water-gas switch, thereby avoiding the motor rotor of the water-cooled motor from rotating when the water inlet pipe is not filled with water, or the air inlet pipe continuously intakes air and wastes gas. In addition, the air inlet pipe is opened to intake air and the motor rotor of the water-cooled motor is allowed to rotate only when the water inlet pipe is filled with water, thereby ensuring that the thrust bearing pad made of the graphene bronze composite material will inevitably form an air film when working, thereby ensuring its working life and the quality of wafer thinning. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a front cross-sectional view of the composite material massive microporous polishing air flotation spindle of the present invention; Figure 2 yes Figure 1 A partial enlarged view of the first posture; Figure 3 yes Figure 1 A partial enlarged view of the second posture; Figure 4 yes Figure 1 A partial enlarged view of the third posture; Figure 5 yes Figure 2 Schematic diagram of deformation; Figure 6 yes Figure 3 Schematic diagram of deformation; Figure 7 yes Figure 4 Schematic diagram of the deformation. DETAILED DESCRIPTION

[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings. It should be understood that the following embodiments are only exemplary descriptions and explanations of the present invention and should not be construed as limiting the scope of protection of the present invention. All technologies implemented based on the above content of the present invention are included in the scope that the present invention is intended to protect.

[0021] like Figures 1 to 7As shown, the composite material mass microporous polishing air-floating spindle includes a water-cooled motor, an air-floating bearing and a water-gas switch 500. One end of the water tank 121 formed by the motor cooling jacket 120 and the stator outer sleeve 130 of the water-cooled motor is connected to the water inlet pipe 310, and the other end is connected to the water outlet pipe 320. An air path 141 is formed between the thrust bearing seat 140 and the thrust bearing pad 150 of the air-floating bearing and the support shaft 230 of the water-cooled motor. One end of the air path 141 is connected to the air inlet pipe 410, and the other end of the air path 141 is connected to the air outlet pipe 420.

[0022] The water vapor switch 500 allows the first micro switch 513 to be touched when liquid flows into the water inlet pipe 310, and the first micro switch 513 controls the opening of the pneumatic diaphragm valve 311 of the air inlet pipe 410; and, when liquid does not flow into the water inlet pipe 310, the water vapor switch 500 does not allow the first micro switch 513 to be touched, and touches the second micro switch 514, and the second micro switch 514 controls the closing of the pneumatic diaphragm valve 311 of the air inlet pipe 410 and the motor rotor 210 of the water-cooled motor.

[0023] See Figure 1 and Figure 2 The present invention can adjust the working order of the water inlet pipe 310 and the air inlet pipe 410 through the water-gas switch 500, thereby preventing the motor rotor 210 of the water-cooled motor from rotating when the water inlet pipe 310 is not filled with water, or the air inlet pipe 410 from continuously taking in air and wasting gas. In addition, the air inlet pipe 410 is opened to take in air and the motor rotor 210 of the water-cooled motor is rotated only when water is taken in by the water inlet pipe 310, thereby ensuring that the thrust bearing pad 150 made of the graphene bronze composite material will inevitably form an air film when working, thereby ensuring its working life and the quality of wafer thinning.

[0024] Specifically, the present invention also includes a non-rotating cover plate 110, a motor cooling sleeve 120, a stator outer sleeve 130, a thrust bearing seat 140, a thrust bearing pad 150, a water inlet pipe 310, a water outlet pipe 320, an air inlet pipe 410, an air outlet pipe 420, a water-gas switch 500, a pneumatic diaphragm valve 311, and a motor stator 111. The above structure forms the stator of the main shaft.

[0025] Specifically, the present invention also includes a rotatable motor rotor 210, an upper thrust plate 220, a support shaft 230, a lower thrust plate 240, a grinding wheel connecting plate 250, a front end cover 260, and a front end plug 270, and the above structure forms the rotor of the main shaft.

[0026] As a simple connection method, the stators are fixed to each other and the rotors are fixed to each other.

[0027] The connection relationship and position relationship between the above stator and rotor are as follows: like Figure 1 and Figure 2 As shown, the cover plate 110 is fixed to the frame, the outer edge of the cover plate 110 is coaxially sealed and fixed with the motor cooling jacket 120, the motor cooling jacket 120 is coaxially sleeved with a stator outer shaft sleeve 130 with a gap therebetween, the cover plate 110 is sealed and fixed with the upper edge of the stator outer shaft sleeve 130, and the lower part of the stator outer shaft sleeve 130 is sealed and fixed with the lower end of the motor cooling jacket 120. The motor cooling jacket 120 is provided with a water inlet hole connected to the water inlet pipe 310, and the motor cooling jacket 120 is also provided with a water outlet hole connected to the water outlet pipe 320, and a water tank 121 is formed between the water inlet hole and the water outlet hole.

[0028] Specifically, the cover plate 110 or the stator outer sleeve 130 is fixed to the motor stator 111. The stator outer sleeve 130 is coaxially fixed to the thrust bearing seat 140. A thrust bearing pad 150 is provided between the stator outer sleeve 130 and the thrust bearing seat 140, and the thrust bearing seat 140 is provided with a plurality of air paths 141, and the air paths 141 can pass into the fiber holes of the thrust bearing pad 150.

[0029] The cover plate 110 is connected to the motor rotor 210 by a bearing, the motor rotor 210 is coaxially fixed to the upper thrust plate 220 by bolts, the upper thrust plate 220 is coaxially fixed to the support shaft 230 by bolts, and the air film of the air path 141 between the support shaft 230 and the thrust bearing seat 140 achieves the effect of reducing friction and blowing away particles. The support shaft 230 is coaxially fixed to the lower thrust plate 240 by bolts, the lower thrust plate 240 is coaxially fixed to the grinding wheel connecting plate 250, the grinding wheel connecting plate 250 is coaxially fixed to the front end cover 260 by bolts, and the front end cover 260 is fixed to the front end plug 270. The thrust bearing seat 140 can also be fixed to the frame. The water-cooled motor of the present invention reduces friction by the above-mentioned air bearing.

[0030] like Figure 2-4 As shown, in some embodiments, the water vapor switch 500 includes a first guide rail 510, a first swing arm 520, a second swing arm 521, a first slider 511, a first contact 512, a first micro switch 513, a second micro switch 514, a second slider 530 and a one-way valve 600; the first guide rail 510 is fixed to the water inlet pipe 310, the first guide rail 510 is hinged with the first swing arm 520, the first swing arm 520 is hingedly connected to the second swing arm 521, a waist-shaped hole 522 is opened on the second swing arm 521, a pin 523 moving along the waist-shaped hole 522 is provided in the waist-shaped hole 522, the pin 523 is fixed to the first slider 511, the first slider 511 moves along the first swing arm 520, the first slider 511 is fixed to the first contact 512, and the first contact 512 can overlap with the first micro switch 513 or the second micro switch 514.

[0031] Specifically, the first swing rod 520 and the first slider 511 can both overlap with the second slider 530. When the second slider 530 overlaps with the first swing rod 520, the first swing rod 520 cannot swing. When the second slider 530 overlaps with the first slider 511, the first contact 512 of the first slider 511 only overlaps with the second micro switch 514. Figure 2 , 3 The travel can be longer, that is, Figure 2 , 3 The sealing ball 620 can always be attracted to the rightmost side of the second sliding block 530, and the relative position thereof remains unchanged.

[0032] The sealing ball 620 of the one-way valve 600 of the water inlet pipe 310 is made of a magnet, and the designated position of the second slider 530 is made of iron or all of it is made of iron. The sealing ball 620 can attract the second slider 530 to a position where it is not overlapped with the first swing rod 520 and the first slider 511 when there is water flow; the sealing ball 620 can attract the second slider 530 to a position where it is overlapped with the first swing rod 520 and the first slider 511 when there is no water flow.

[0033] Specifically, the first microswitch 513 is communicatively connected with the pneumatic diaphragm valve 311 of the intake pipe 410, and when the first contact 512 is overlapped with the first microswitch 513, the pneumatic diaphragm valve 311 is opened; the second microswitch 514 is communicatively connected with the pneumatic diaphragm valve 311 of the intake pipe 410 and the control module of the water-cooled motor, and when the first contact 512 is overlapped with the second microswitch 514, the pneumatic diaphragm valve is closed, and the motor rotor 210 of the water-cooled motor is closed.

[0034] The present invention uses the one-way valve 600 made of the magnet as a trigger to determine whether there is water flow in the water inlet pipe 310, and transmits its movement position to the second slider 530 outside the water inlet pipe 310 in the form of magnetic attraction, thereby ensuring that the sealing of the water inlet pipe 310 is not damaged and keeping the particles in the water inlet pipe low and the cleanliness high. Figure 3 The horizontal movement of the position can maintain a good clamping posture when it is limitedly clamped or not clamped, so that the pneumatic diaphragm valve of the air inlet pipe 410 can be opened only when water is flowing through the water inlet pipe 310, and the motor rotor 210 can be opened when there is no water or ventilation, so as to avoid irreversible damage to the radial bearing 231 and the thrust bearing pad 150 made of the graphene bronze composite material, and to avoid opening the air inlet pipe 410 too early and wasting relatively clean gas.

[0035] Preferably, the water inlet pipe 310 is made of plastic or PVC pipe.

[0036] Specifically, a second guide rail is disposed on the first swing rod 520 , and the second guide rail is a dovetail-shaped guide rail. A first sliding block 511 with a dovetail-shaped cross section moving along the second guide rail is disposed on the second guide rail.

[0037] See also Figure 3 As shown, the lower surface of the first guide rail 510 is used for lateral guidance, and the first guide rail can serve as a base for other parts.

[0038] According to the present invention, a handle is fixed to the second swing arm 521 , and the user can operate the air inlet pipe 410 , the water inlet pipe 310 and the motor rotor 210 by only swinging the second swing arm 521 .

[0039] In one embodiment of the present invention, see Figure 2-4 As shown, the water and gas switch 500 further includes a third micro switch 541, a fourth micro switch 542, a fixing rod 543, a limiting seat 544, a limiting hole 545, and a limiting block 546; the first guide rail 510 is fixed to one end of the fixing rod 543, the third micro switch 541 is fixed to one end of the fixing rod 543, and the fourth micro switch 542 is fixed to the other end of the fixing rod 543, and the third micro switch 541 and the fourth micro switch 542 can both overlap with the first swing rod 520. The first guide rail 510 is fixed to the limiting seat 544, and the limiting seat 544 is provided with a limiting hole 545, and the limiting hole 545 is provided with a first slider 511 moving along the limiting hole.

[0040] Specifically, a limiting block 546 is fixed to the first swing rod 520 , and the limiting block 546 can overlap with a side of the second swing rod 521 close to the second sliding block 530 .

[0041] The third micro switch 541 is in communication connection with the control module of the water-cooled motor. When the first swing arm 520 is connected with the third micro switch 541 , the control module of the water-cooled motor controls the motor rotor 210 to rotate.

[0042] The fourth micro switch 542 is in communication connection with the control module of the water-cooled motor. When the first swing arm 520 is connected with the fourth micro switch 542, the control module of the water-cooled motor controls the motor rotor 210 not to rotate.

[0043] The present invention controls the rotation of the motor rotor 210 by the third micro switch 541 and the fourth micro switch 542, and can limit its rotation to whether the air inlet pipe 410 and the water inlet pipe 310 are opened in a relatively mechanical form, thereby avoiding that the motor rotor 210 works first when the air inlet pipe 410 and the water inlet pipe 310 are not working, and the radial bearing 231 and the thrust bearing pad 150 made of the graphene bronze composite material are irreversibly damaged when the air film is not formed. In addition, since the first slider 511 is inserted into the limit seat 544 and the limit hole 545, the first swing rod 520 cannot be rotated to the third micro switch 541 by further rotating the second swing rod 521, so that it can be better verified that when the water inlet pipe 310 and the air inlet pipe 410 are not ventilated, the rotation of the motor rotor 210 cannot be opened by the limit overlap of the second slider 530 on the first swing rod 520 and the second swing rod 521.

[0044] It should be noted that when the first slider 511 is inserted into the limiting hole 545 of the limiting seat 544, the first swing arm 520 can only overlap with the fourth micro switch 542, thereby preventing the motor rotor 210 from rotating. In addition, one practicable manner is that the fourth micro switch 542 can be connected to the brake 160 for communication, and when the first swing arm 520 overlaps with the fourth micro switch 542, the brake 160 brakes the motor rotor 210, or in other words, the brake 160 brakes the lower thrust plate 240.

[0045] When the first swing arm 520 and the third micro switch 541 are overlapped in a limiting manner, the maximum rotation angle of the first swing arm 520 is also limited by the fixing rod 543 and the third micro switch 541, and the maximum rotation angle of the second swing arm 521 is limited by the limiting block 546, so that the user can achieve better operability when swinging the second swing arm 521 through the handle.

[0046] When the first slider 511 is located in the limiting hole 545, the small swing and vibration of the second swing rod 521 will not affect the normal operation of the entire system. In addition, in order to ensure that there is a certain time interval between the working sequence of first letting the water inlet pipe 310 inlet water, letting the air inlet pipe 410 inlet air, and the rotation of the electronic rotor 210, so as to give time for the gas and water to fill the chamber, the time of the entire swing process of the second swing rod 521 can be used as the time for the gas and water to fill the chamber.

[0047] Only when water enters the water inlet pipe 310 is the air inlet pipe 410 opened to allow air to enter and the motor rotor 210 of the water-cooled motor to rotate, thereby ensuring that the thrust bearing pad 150 made of the graphene bronze composite material will form an air film during operation to ensure its service life and the quality of wafer thinning.

[0048] In some embodiments, see Figure 2-4 The fourth micro switch 542 is provided with a magnet, and the second swing rod 521 can be attracted by the fourth micro switch 542 with a magnet. The present invention uses the fourth micro switch with a magnetic attraction function to limit the initial positions of the first swing rod 520 and the second swing rod 521 when the user does not operate the second swing rod 521.

[0049] See also Figure 2-4 As shown, the one-way valve 600 includes a conical cylinder 610, a sealing ball 620, a spring 630, and a support block 640; the outer edge of the conical cylinder 610 is sealed and fixed to the inner circumference of the water inlet pipe 310, and the sealing ball 620 can be sealed and fitted with the inner surface of the conical cylinder 610, and the sealing ball 620 is fixed to one end of the spring 630, and the other end of the spring 630 is fixedly connected to the support block 640, and the support block 640 is fixed to the inner circumference of the water inlet pipe 310.

[0050] The present invention uses a sealing ball 620 made of a magnet as the moving point of the one-way valve 600. When there is water flow, the movement of the sealing ball 620 attracts the second slider 530 to not overlap with the first swing arm 520 and the second swing arm 521, so that the air inlet pipe 410 and the motor rotor 210 can be gradually opened only when the water inlet pipe 310 is opened.

[0051] It should be noted that the above Figure 2-4 Just to show the relative relationship between the one-way valve 600 and the second slider 530, the one-way valve 600 is arranged above and below the second slider 530. In this case, the one-way valve 600 is also staggered with the first swing rod 520 and the second swing rod 521 to avoid mutual interference of the movement of the parts. Figure 5-7 Similarly, the direct front-to-back direction arrangement can compress the overall structure of the parts of the present invention, and there will be no mutual interference in the movement of the parts.

[0052] See also Figure 2-4 As shown, the sealing ball 620 is eccentrically provided with a ball hole 650 , and a guide rod 660 is provided in the ball hole 650 to move along the ball hole, and the guide rod 660 is fixed to the support block 640 .

[0053] The present invention can ensure that the sealing ball 620 does not rotate at all times through the guide rod 660 and the ball hole 650, and no repulsive force is generated between the second slider 530 and the sealing ball 620 after magnetization.

[0054] See also Figure 2-4 As shown, the water inlet pipe 310 is made of plastic or PVC pipe. The water inlet pipe 310 made of the above material can prevent the magnetism of the one-way valve 600 from being shielded.

[0055] In some embodiments, see Figure 2-4 The first swing rod 520 is provided with a second guide rail, the second guide rail is a dovetail guide rail, and the second guide rail is provided with a first slider 511 with a dovetail cross section moving along the second guide rail. The present invention can avoid failure of the connection between the first slider 511 and the first swing rod 520 by the above method.

[0056] In some embodiments, see Figure 2 , 3 4. A dovetail groove is provided below the first guide rail 510, and the second slider 530 is a dovetail shape with a cross section matching the dovetail groove. The present invention can avoid failure of the connection between the second slider 530 and the first guide rail 510 and increase the limiting force of the limiting clamping connection.

[0057] In some embodiments, see Figure 2 , 3 4. The thrust bearing seat 140 and the support shaft 230 of the motor rotor 210 are made of graphene bronze composite materials.

[0058] A radial bearing 231 is further provided between the thrust bearing seat 140 and the support shaft 230, and the radial bearing 231 is fixed to the thrust bearing seat 140. The thrust bearing seat 140 may be a single-layer annular or cylindrical structure. The radial bearing 231 and the thrust bearing pad 150 are made of a graphene bronze composite material, and of course, may also be made of rubber, plastic, resin or graphite.

[0059] Specifically, the radial bearing 231 and the thrust bearing pad 150 are made of graphene / bronze composite materials, which are prepared by a two-step chemical vapor deposition method of low-temperature 200°C and high-temperature cracking of high-purity 5-8μm bronze powder and C2H2 (acetylene gas). The resulting metal-based massive microporous material can be thinner, stronger and more breathable than graphite.

[0060] The advantages of composite material massive microporous polishing air-floating spindle are: using massive microporous metal-based thrust bearing pad, the air-floating bearing has a wider air permeability area, avoiding the spindle locking caused by small hole blockage; compared with small hole throttling graphite, massive microporous material eliminates the surface grooving process, avoiding compressed air cyclone in the groove and self-excited vibration caused by poor exhaust. Massive microporous metal-based material is stronger than graphite, preventing the particles on the surface of the bearing pad from falling off, causing scratches on the upper and lower thrust surfaces or even locking.

[0061] The grinding and polishing air flotation spindle uses a large amount of microporous graphene / bronze composite material. The sintering process of the large amount of microporous graphene / bronze composite material is to first evenly fill the bronze powder (high purity, particle size 5-8μm) in a cylindrical mold, and then cold isostatically press it at 150MPa for 10 minutes to obtain a three-dimensional large amount of microporous bronze blank with a certain air permeability. Then, a certain flow of C2H2 (acetylene gas) is introduced into a high-temperature tubular furnace as a carbon source, and a three-dimensional continuous graphene is obtained on the skeleton surface of the large amount of microporous bronze by a two-step chemical vapor deposition method (chemical vapor deposition at a low temperature of 200℃ for a certain period of time, and then the hydrogenated graphite is converted into graphene through high-temperature pyrolysis). While the hydrogenated graphite is pyrolyzed at high temperature, the bronze powder undergoes sintering to form a continuous skeleton, thereby obtaining a graphene / bronze-based large amount of microporous composite material with a certain strength.

[0062] The embodiments described above are merely descriptions of preferred implementation modes of the present invention and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A composite material massive microporous polishing air flotation spindle, characterized in that: include A water-cooled motor, wherein a water tank (121) formed by a motor cooling jacket (120) and a stator outer shaft sleeve (130) has one end in communication with a water inlet pipe (310) and the other end in communication with a water outlet pipe (320); An air bearing, comprising a thrust bearing seat (140) and a thrust bearing pad (150), wherein an air path (141) is formed between the thrust bearing seat (140) and the thrust bearing pad (150) and a support shaft (230) of a water-cooled motor, one end of the air path is in communication with an air inlet pipe (410), and the other end of the air path (141) is in communication with an air outlet pipe (420); The water-gas switch (500) allows a first micro switch (513) to be touched when liquid flows into the water inlet pipe (310), and the first micro switch (513) controls the opening of the pneumatic diaphragm valve (311) of the air inlet pipe (410); and when liquid does not flow into the water inlet pipe (310), the water-gas switch (500) does not allow the first micro switch (513) to be touched, and touches the second micro switch (514), and the second micro switch (514) controls the closing of the pneumatic diaphragm valve (311) of the air inlet pipe (410) and the motor rotor (210) of the water-cooled motor.

2. The composite material massive microporous polishing air-floating spindle according to claim 1 is characterized in that: The water and gas switch (500) comprises a first guide rail (510), a first swing arm (520), a second swing arm (521), a first slider (511), a first contact (512), a first micro switch (513), a second micro switch (514), a second slider (530), and a one-way valve (600); the first guide rail (510) is fixed to the water inlet pipe (310); the first guide rail (510) is hingedly connected to the first swing arm (520); the first swing arm (520) and the second slider (530) are hingedly connected to the first contact (512); The two swing rods (521) are hingedly connected, the second swing rod (521) is provided with a waist-shaped hole (522), a latch (523) moving along the waist-shaped hole (522) is provided inside the waist-shaped hole (522), the latch (523) is fixed to the first slider (511), the first slider (511) moves along the first swing rod (520), the first slider (511) is fixed to the first contact (512), and the first contact can overlap with the first micro switch (513) or the second micro switch (514); The first swing rod (520) and the first slider (511) are both capable of overlapping with the second slider (530) in a limited position; when the second slider (530) overlaps with the first swing rod (520), the first swing rod (520) cannot swing; when the second slider (530) overlaps with the first slider (511), the first contact (512) of the first slider (511) only overlaps with the second micro switch (514); The sealing ball (620) of the one-way valve (600) of the water inlet pipe (310) is made of a magnet, and the second slider (530) is made of iron; the sealing ball (620) can attract the second slider (530) to a position where it is not overlapped with the first swing rod (520) and the first slider (511) when there is water flow; and the sealing ball (620) can attract the second slider (530) to a position where it is overlapped with the first swing rod (520) and the first slider (511) when there is no water flow; The first micro switch (513) is communicatively connected with the pneumatic diaphragm valve (311) of the air intake pipe (410); when the first contact (512) is connected to the first micro switch (513), the pneumatic diaphragm valve (311) is opened; the second micro switch (514) is communicatively connected with the pneumatic diaphragm valve (311) of the air intake pipe (410) and the control module of the water-cooled motor; when the first contact (512) is connected to the second micro switch (514), the pneumatic diaphragm valve is closed, and the motor rotor (210) of the water-cooled motor is closed.

3. The composite material massive microporous polishing air flotation spindle according to claim 2, characterized in that: The water and gas switch (500) further comprises a third micro switch (541), a fourth micro switch (542), a fixing rod (543), a limiting seat (544), a limiting hole (545), and a limiting block (546); the first guide rail (510) is fixed to one end of the fixing rod (543); the third micro switch (541) is fixed to one end of the fixing rod (543); the fourth micro switch (542) is fixed to the other end of the fixing rod (543); and both the third micro switch (541) and the fourth micro switch (542) can overlap with the first swing rod (520); The first guide rail (510) is fixed to the limiting seat (544); the limiting seat (544) is provided with a limiting hole (545); and a first sliding block (511) is provided in the limiting hole (545) for movement along the limiting hole; The first swing rod (520) is fixed with a limiting block (546), and the limiting block (546) can overlap with a side of the second swing rod (521) close to the second sliding block (530). The third micro switch (541) is in communication connection with a control module of the water-cooled motor, and when the first swing rod (520) is connected to the third micro switch (541), the control module of the water-cooled motor controls the motor rotor (210) to rotate; The fourth micro switch (542) is communicatively connected to a control module of the water-cooled motor, and when the first swing arm (520) is connected to the fourth micro switch (542), the control module of the water-cooled motor controls the motor rotor (210) to not rotate.

4. The composite material massive microporous polishing air-floating spindle according to claim 3, characterized in that: The fourth micro switch (542) is provided with a magnet, and the second rocker (521) can be attracted by the fourth micro switch (542) with the magnet.

5. The composite material massive microporous polishing air-floating spindle according to claim 4, characterized in that: The one-way valve (600) comprises a conical cylinder (610), a sealing ball (620), a spring (630), and a support block (640); the outer edge of the conical cylinder (610) is sealed and fixed to the inner circumferential surface of the water inlet pipe (310); the sealing ball (620) can be sealed and fitted to the inner surface of the conical cylinder (610); the sealing ball (620) is fixed to one end of the spring (630); the other end of the spring (630) is fixedly connected to the support block (640); and the support block (640) is fixed to the inner circumferential surface of the water inlet pipe (310).

6. The composite material massive microporous polishing air-floating spindle according to claim 5, characterized in that: The sealing ball (620) is eccentrically provided with a ball hole (650), and a guide rod (660) is provided in the ball hole (650) to move along the ball hole, and the guide rod (660) is fixed to the support block (640).

7. The composite material massive microporous polishing air-floating spindle according to claim 2, characterized in that: The first swing rod (520) is provided with a second guide rail, the second guide rail is a dovetail-shaped guide rail, and the second guide rail is provided with a first sliding block (511) with a dovetail-shaped cross section that moves along the second guide rail.

8. The composite material massive microporous polishing air-floating spindle according to claim 2, characterized in that: A dovetail-shaped groove is provided below the first guide rail (510), and the second sliding block (530) is dovetail-shaped with a cross section matching the dovetail-shaped groove.

9. The composite material massive microporous polishing air-floating spindle according to claim 1, characterized in that: The thrust bearing seat (140) and the support shaft (230) of the motor rotor (210) are made of a graphene bronze composite material.

10. The composite material massive microporous polishing air-floating spindle according to claim 2, characterized in that: The water inlet pipe (310) is made of plastic or PVC pipe.

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