Tail gas emission system and boron diffusion equipment

Abstract

The invention discloses a tail gas emission system and boron diffusion equipment, and belongs to the field of tail gas treatment. The tail gas emission system is provided with a gas inlet and a gas outlet, the gas inlet is suitable for being connected with a gas outlet of a vacuum furnace of equipment, and the tail gas emission system comprises a first filter, a chemical adsorber and a dryer. An inlet of the first filter is connected with the air inlet and used for filtering at least part of solid particles; an inlet of the chemical adsorber is connected with an outlet of the first filter, and a chemical adsorbent in the chemical adsorber is used for chemically reacting with to-be-filtered substances in the tail gas; an inlet of the dryer is connected with an outlet of the chemical adsorber and used for drying tail gas, and an outlet of the dryer is connected with the exhaust port. The filtering effect of boron oxide and residual boron trichloride generated in the technological process of boron diffusion equipment can be improved, the maintenance period is shortened, the maintenance cost is reduced, and the environmental protection property and safety of tail gas emission are improved.

Description

Technical Field

[0001] The present application belongs to the technical field of tail gas treatment, and in particular relates to a tail gas emission system and a boron diffusion device. Background Art

[0002] During the operation of the boron expansion equipment, the tail gas generated by the vacuum furnace usually contains solid particles, harmful gases and other substances that need to be treated. In order to protect the environment and reduce tail gas pollution, these tail gases need to be effectively treated. Traditional tail gas treatment methods have the problems of poor treatment effect, high energy consumption and complex operation, and need to be improved. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a tail gas emission system and a boron expansion device, which can improve the filtering effect of boron oxide and residual boron trichloride generated in the process of the boron expansion device, reduce the maintenance cycle and maintenance cost, and improve the environmental protection and safety of tail gas emissions.

[0004] In a first aspect, the present application provides an exhaust gas emission system, the exhaust gas emission system having an air inlet and an exhaust port, the air inlet being suitable for being connected to an air outlet of a vacuum furnace of the device, and the exhaust gas emission system comprising:

[0005] a first filter, wherein an inlet of the first filter is connected to the air inlet and is used to filter at least part of the solid particles;

[0006] A chemical absorber, wherein the inlet of the chemical absorber is connected to the outlet of the first filter, and the chemical absorbent in the chemical absorber is used to chemically react with the substance to be filtered in the exhaust gas;

[0007] A dryer, the inlet of which is connected to the outlet of the chemical adsorber, is used for drying the tail gas, and the outlet of which is connected to the exhaust port.

[0008] According to the exhaust gas emission system of the present application, by setting a first filter, a chemical adsorber and a dryer in series, the exhaust gas discharged from the outlet of the vacuum furnace of the equipment passes through the first filter, the chemical adsorber and the dryer in sequence, and the exhaust gas can be filtered through multiple layers such as combined filtration, chemical adsorption and drying, which greatly improves the filtering effect of boron oxide and residual boron trichloride generated in the process of the boron expansion equipment, so that they cannot reach the diaphragm pump and the rear-end tail pipe, thereby reducing the problem of boron oxide deposition on the diaphragm and the tail pipe, reducing the maintenance cycle and maintenance cost, and improving the environmental protection and safety of exhaust gas emissions.

[0009] According to one embodiment of the present application, the chemical adsorber comprises:

[0010] Chemical adsorption vessels;

[0011] A sprayer is installed on the chemical adsorption container and is used for spraying the chemical adsorbent. The outlet of the air inlet pipe of the chemical adsorbent is located below the sprayer.

[0012] In this embodiment, a sprayer is provided in the chemical adsorber, and the spray design increases the contact area between the tail gas and the chemical adsorbent, thereby improving the adsorption efficiency.

[0013] According to one embodiment of the present application, the chemical adsorber further comprises:

[0014] A first water vapor separation device is installed on the chemical adsorption container and is located above the sprayer. The inlet of the gas outlet pipe of the chemical adsorber is located above the first water vapor separation device.

[0015] In this embodiment, after the tail gas is adsorbed by the sprayer, the tail gas flows upward to the first water vapor separation device, which separates the water in the tail gas from the gas to avoid the influence of the water on the subsequent processing equipment. The dried tail gas is discharged through the outlet pipe of the chemical adsorber.

[0016] According to one embodiment of the present application, the exhaust gas emission system further includes:

[0017] A liquid reservoir, wherein the liquid inlet of the liquid reservoir is connected to the liquid outlet of the chemical adsorption container, and the liquid outlet of the liquid reservoir is connected to the liquid inlet of the sprayer.

[0018] In this embodiment, the chemical adsorbent can be recycled by setting up a liquid storage device. At the same time, the cooling effect of the circulating chemical adsorbent can be used to further condense the boron oxide gas and take it away with the waste liquid and filter it, thereby improving the filtration of tail gases such as boron oxide, chlorine and boron chloride by the boron expansion tail exhaust, reducing the pollution of the rear-end diaphragm pump and the tail exhaust pipe, thereby extending the maintenance period of the entire system and reducing the maintenance cost.

[0019] According to one embodiment of the present application, the liquid reservoir is provided with a filtering device, and the liquid inlet of the liquid reservoir and the liquid outlet of the liquid reservoir are respectively located on both sides of the filtering device.

[0020] In this embodiment, by setting up a circulating water filtration system formed by a liquid reservoir, a filtering device and a sprayer, the circulating water filtration system can operate in a vacuum environment, and the circulating filtration system can filter sediments such as boron oxide crystals under the spray, thereby extending the long-term stable operation of the circulating water filtration system.

[0021] According to one embodiment of the present application, the chemical adsorbent in the chemical adsorber is an alkaline solution.

[0022] In this embodiment, the alkaline solution can better react with the boron oxide or boron trichloride produced in the boron expansion equipment process to undergo an acid-base neutralization reaction, greatly improving the filtering effect of boron oxide and residual boron trichloride, preventing them from reaching the diaphragm pump and the rear-end tail pipe, and further reducing the problem of boron oxide deposition on the diaphragm and the tail pipe.

[0023] According to one embodiment of the present application, the dryer comprises:

[0024] Drying containers;

[0025] a second water vapor separation device, the second water vapor separation device being installed in the drying container, and the inlet of the air inlet pipe of the dryer being located below the second water vapor separation device;

[0026] A drying layer, the drying layer is located above the second water vapor separation device, and the outlet of the air outlet pipe of the dryer is located above the drying layer.

[0027] According to one embodiment of the present application, the exhaust gas emission system further includes:

[0028] A bypass pipeline, both ends of which are respectively connected to the inlet of the first filter and the outlet of the dryer, and is provided with a first control valve.

[0029] According to one embodiment of the present application, the exhaust gas emission system further includes:

[0030] a cooler, the cooler being adapted to be arranged between the gas outlet of the vacuum furnace of the device and the inlet of the first filter;

[0031] And / or, a pump body and a second control valve, the inlet of the pump body is connected to the outlet of the dryer, the outlet of the pump body is connected to the inlet of the second control valve, and the outlet of the second control valve is connected to the exhaust port.

[0032] In a second aspect, the present application provides a boron expansion device, comprising:

[0033] Vacuum furnace;

[0034] In any of the above exhaust gas emission systems, the air inlet of the exhaust gas emission system is connected to the air outlet of the vacuum furnace.

[0035] According to the boron expansion equipment of the present application, through the exhaust gas emission system set up, the exhaust gas emission system is provided with a first filter, a chemical adsorber and a dryer connected in series, and the exhaust gas discharged from the outlet of the vacuum furnace of the equipment passes through the first filter, the chemical adsorber and the dryer in sequence. The exhaust gas can be filtered through multiple layers such as combined filtration, chemical adsorption and drying, which greatly improves the filtering effect of boron oxide and residual boron trichloride generated in the process of the boron expansion equipment, so that they cannot reach the diaphragm pump and the rear-end tail pipe, thereby reducing the problem of boron oxide deposition on the diaphragm and the tail pipe, reducing the maintenance cycle and maintenance cost, and improving the environmental protection and safety of exhaust gas emissions.

[0036] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0038] Figure 1 It is one of the structural schematic diagrams of the exhaust emission system provided in the embodiment of the present application;

[0039] Figure 2 This is the second structural schematic diagram of the exhaust emission system provided in the embodiment of the present application.

[0040] Reference numerals:

[0041] The first filter 1, the chemical adsorber 2, the chemical adsorption container 21, the sprayer 22, the first water vapor separation device 23, the dryer 3, the drying container 31, the second water vapor separation device 32, the drying layer 33, the liquid storage device 4, the filtering device 41, the first one-way valve 42, the first acid discharge pump 43, the second one-way valve 44, the second acid discharge pump 45, the bypass pipe 5, the first control valve 61, the second control valve 62, the pump body 63, the cooler 7, the vacuum furnace 8, and the tail exhaust pipe 9. DETAILED DESCRIPTION

[0042] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0043] Reference below Figure 1 and Figure 2 The exhaust gas emission system and the boron diffusion device according to the embodiments of the present application are described.

[0044] like Figure 1As shown, the exhaust gas emission system of the embodiment of the present application has an air inlet and an exhaust port, the air inlet is suitable for being connected to the air outlet of the vacuum furnace 8 of the equipment, and the exhaust gas emission system includes: a first filter 1, a chemical absorber 2 and a dryer 3. The inlet of the first filter 1 is connected to the air inlet of the exhaust gas emission system, and the first filter 1 is used to filter at least part of the solid particles; the inlet of the chemical absorber 2 is connected to the outlet of the first filter 1, and the chemical absorbent in the chemical absorber 2 is used to chemically react with the substance to be filtered in the exhaust gas; the inlet of the dryer 3 is connected to the outlet of the chemical absorber 2, and the dryer 3 is used to dry the exhaust gas, and the outlet of the dryer 3 is connected to the exhaust port of the exhaust gas emission system.

[0045] Among them, the exhaust gas emission system can be used to treat the exhaust gas for the boron expansion equipment, and the equipment can be a boron expansion equipment.

[0046] In this embodiment, the first filter 1, the chemical adsorber 2 and the dryer 3 are connected in series, and the exhaust gas discharged from the outlet of the vacuum furnace 8 of the boron expansion equipment passes through the first filter 1, the chemical adsorber 2 and the dryer 3 in sequence, so that the discharged exhaust gas meets environmental protection standards.

[0047] The first filter 1 plays a role of physical adsorption, and can filter solid particles in the tail gas, such as large particles of boron oxide powder, dust or smoke, etc. The tail gas enters the first filter 1 through the pipeline, and the first filter 1 filters out the large particles of boron oxide powder carried with the tail gas, and then the fine particles such as fine boron oxide powder, boron oxide gas and boron trichloride gas after filtration enter the lower part of the chemical adsorber 2 through the pipeline.

[0048] Exemplarily, the first filter 1 may be a coarse-effect filter or a medium-effect filter, and the medium-effect filter may be a foam plastic filter or a glass fiber filter.

[0049] The chemical adsorber 2 performs chemical adsorption, and the chemical adsorber 2 uses a chemical adsorbent to react chemically with the substance to be filtered in the tail gas, thereby removing harmful substances in the tail gas. Suitable chemical adsorbents can be selected according to the types of pollutants in the tail gas, such as activated carbon, metal oxides or acid-base solutions.

[0050] The dryer 3 can remove moisture from the tail gas to prevent the moisture from damaging the subsequent processing equipment. The dryer 3 can use a desiccant for physical adsorption, or use a heat exchanger and other equipment for heating and drying. The desiccant can be silica gel or molecular sieve.

[0051] It should be noted that the first filter 1 can be arranged before the chemical adsorber 2, or after the dryer 3, or the first filter 1 can be arranged at both positions, and the filtering effect can be achieved. The number of the first filter 1, the chemical adsorber 2 and the dryer 3 can be one or more, which can be set according to the actual application scenario.

[0052] In the related art, conventional cooling liquid bottles and fiber filters are used for the operation of boron expansion equipment. The operating status of the boron expansion equipment depends entirely on whether the tail exhaust of the equipment is blocked. If the tail exhaust is blocked, the pressure in the furnace tube will rise, and the vacuum required by the process cannot be guaranteed. In addition, the filter elements of conventional cooling liquid bottles and fiber filters are relatively expensive and consumed quickly. They can only filter larger boron oxide particles, which can easily cause the filtering effect of the original boron expansion tail exhaust to be unsatisfactory, resulting in blockage of the tail exhaust pipe, which requires regular replacement and cleaning (about 10 to 15 days). In addition, the boron expansion equipment is blocked by boron oxide, which affects the uptime of the boron expansion equipment, causing the process pressure of the boron expansion equipment to be unstable, the film formation uniformity is poor, and it cannot be used normally. In addition, the diaphragm of the diaphragm pump will reduce its service life due to residual boron oxide deposition. At the same time, the leakage of chlorine and boron oxide in the tail gas will release trace boric acid and hydrogen chloride gas in the air. The above gases are corrosive and polluting, causing the metal parts of the tail exhaust system equipment to rust and corrode, and the electrical aging speed is accelerated. In addition, the leaked gas is seriously harmful to the human body.

[0053] According to the exhaust gas emission system provided in the embodiment of the present application, by setting a first filter 1, a chemical adsorber 2 and a dryer 3 connected in series, the exhaust gas discharged from the exhaust port of the vacuum furnace 8 of the equipment passes through the first filter 1, the chemical adsorber 2 and the dryer 3 in sequence, and the exhaust gas needs to undergo multi-layer filtration treatments such as filtration, chemical adsorption and drying, which greatly improves the filtration effect of boron oxide and residual boron trichloride generated in the process of the boron expansion equipment, so that they cannot reach the diaphragm pump and the rear-end tail pipe 9, thereby reducing the problem of boron oxide deposition on the diaphragm and the tail pipe 9, reducing the maintenance cycle and maintenance cost, and improving the environmental protection and safety of the exhaust gas emissions of the boron expansion equipment.

[0054] like Figure 1 and Figure 2 As shown, in some embodiments, the chemical adsorber 2 includes: a chemical adsorption container 21 and a sprayer 22; the sprayer 22 is installed in the chemical adsorption container 21, the sprayer 22 is used to spray the chemical adsorbent, and the outlet of the air inlet pipe of the chemical adsorber 2 is located below the sprayer 22.

[0055] A sprayer 22 is provided in the chemical adsorber 2, and the sprayer 22 is installed in the chemical adsorption container 21. The outlet of the air inlet pipe of the chemical adsorber 2 is located below the sprayer 22, so that the tail gas can fully contact with the sprayed chemical adsorbent.

[0056] The tail gas enters the chemical adsorption container 21 through the air inlet pipe. The tail gas is fully adsorbed and reacted with the sprayed chemical adsorbent below the sprayer 22. After adsorption and reaction, the tail gas continues to flow upward and flows out from the outlet pipe of the chemical adsorber 2.

[0057] In this embodiment, by arranging the sprayer 22 in the chemical adsorber 2, the spray design increases the contact area between the tail gas and the chemical adsorbent, thereby improving the adsorption efficiency.

[0058] Exemplarily, the sprayer 22 can be a spray plate or a spray pipe. The sprayer 22 can also break up the liquid water into fine water droplets or mist water droplets by means of an atomizing nozzle or high-frequency vibration, so as to further increase the cooling and dissolution effect of the exhaust gas, increase the contact area, and enhance the acid-base neutralization effect.

[0059] In some embodiments, the chemical adsorbent in the chemical adsorber 2 is an alkaline solution, which can better undergo an acid-base neutralization reaction with the boron oxide or boron trichloride produced during the boron expansion equipment process, greatly improving the filtration effect of boron oxide and residual boron trichloride, preventing them from reaching the diaphragm pump and the rear-end tail pipe 9, and further reducing the problem of boron oxide deposition on the diaphragm and the tail pipe 9.

[0060] For example, the alkaline solution may be a solution to which an appropriate proportion of NaOH is added, or a weak base such as Na2CO3, NaHCO3 or other alkaline substances may be used.

[0061] It should be noted that, by utilizing the property that boric acid, chlorine and boric chloride can be generated when dissolved in water, boric acid, chloric acid, hypochlorous acid and boric acid can be generated. Through a series of chemical reactions such as acid-base neutralization: B2O3+H20→H3BO3, Cl2+H2O→HCl+HClO, BCL3+H20→H3BO3+HCl and B2O3+2NaOH→Na2B4O7 (borax)+7H2O, an alkaline solution (with an appropriate amount of NaOH added therein) is used as an absorption medium, and the boron-expanded tail exhaust gas is fully contacted and reacted with the alkaline solution through the sprayer 22, the filtering effect of the tail gas emission system on tail gases such as boric oxide, chlorine and boric chloride can be improved, and the pollution to the rear-end diaphragm pump and the tail exhaust pipe 9 can be reduced, thereby extending the maintenance period of the entire system and reducing the maintenance cost.

[0062] like Figure 1 and Figure 2 As shown, in some embodiments, the chemical adsorber 2 further includes: a first water vapor separation device 23, which is installed in the chemical adsorption container 21 and located above the sprayer 22, and the inlet of the air outlet pipe of the chemical adsorber 2 is located above the first water vapor separation device 23.

[0063] In this embodiment, after the tail gas is adsorbed by the sprayer 22, the tail gas flows upward to the first water vapor separation device 23. The first water vapor separation device 23 separates the water in the tail gas from the gas to prevent the water from affecting the subsequent processing equipment. The dried tail gas is discharged through the outlet pipe of the chemical adsorber 2.

[0064] The first water vapor separation device 23 may be a physical condensation separation or adsorption separation. Exemplarily, the first water vapor separation device 23 may be a baffle-shaped, metal mesh adsorption-shaped or centrifugal-shaped.

[0065] In this embodiment, the first water vapor separation device 23 effectively removes moisture from the tail gas, improves the dryness of the tail gas, prolongs the service life of subsequent processing equipment, and improves the overall performance of the system.

[0066] like Figure 1 As shown, in some embodiments, the exhaust gas emission system further includes: a liquid reservoir 4 , the liquid inlet of the liquid reservoir 4 is connected to the liquid outlet of the chemical adsorption container 21 , and the liquid outlet of the liquid reservoir 4 is connected to the liquid inlet of the sprayer 22 .

[0067] Among them, the chemical adsorbent in the chemical adsorption container 21 will gradually become saturated after adsorbing harmful substances to form waste liquid. The waste liquid enters the liquid reservoir 4 through the liquid outlet of the chemical adsorption container 21 for cooling, filtering and storage. When the chemical adsorbent needs to be replenished, the chemical adsorbent in the liquid reservoir 4 is transported to the sprayer 22 through a pump or other conveying equipment to realize the recycling of the chemical adsorbent.

[0068] In this embodiment, the recycling of chemical adsorbent can be achieved by setting up a liquid reservoir 4. At the same time, the cooling effect of the circulating chemical adsorbent is utilized to further condense the boron oxide gas and take it away with the waste liquid and filter it, thereby improving the filtration of tail gases such as boron oxide, chlorine and boron chloride by the boron expansion tail exhaust, reducing the pollution of the rear-end diaphragm pump and the tail exhaust pipe 9, thereby extending the maintenance period of the entire system and reducing the maintenance cost.

[0069] like Figure 1 As shown, in some embodiments, the liquid reservoir 4 is provided with a filtering device 41 , and a liquid inlet of the liquid reservoir 4 and a liquid outlet of the liquid reservoir 4 are respectively located on both sides of the filtering device 41 .

[0070] Among them, the filtering device 41 is arranged between the liquid inlet and the liquid outlet of the liquid reservoir 4. The chemical adsorbent waste liquid flowing out from the liquid outlet of the chemical adsorption container 21 is filtered by the filter and then flows out from the liquid outlet of the liquid reservoir 4 and into the chemical adsorption container 21. That is, the chemical adsorbent can be discharged from the liquid reservoir 4 only after filtering, thereby realizing the recycling of the chemical adsorbent and improving the adsorption effect.

[0071] The filter device 41 filters out fine impurities or particles in the liquid. For example, the filter device 41 may be a medium efficiency filter or a high efficiency filter.

[0072] Exemplarily, a plurality of filter devices 41 may be provided, and the plurality of filter devices 41 may be arranged between the liquid inlet of the liquid reservoir 4 and the liquid outlet of the liquid reservoir 4 to improve the filtering effect. The filter device 41 may be arranged vertically, horizontally, or by wrapping the outlet of the liquid reservoir 4 with a filter screen.

[0073] In this embodiment, by setting up a circulating water filtration system formed by a liquid reservoir 4, a filter device 41 and a sprayer 22, the circulating water filtration system can operate in a vacuum environment, and the circulating filtration system can filter sediments such as boron oxide crystals under the spray, thereby extending the long-term stable operation of the circulating water filtration system.

[0074] In some embodiments, a first one-way valve 42 and a first acid discharge pump 43 are provided between the liquid inlet of the liquid reservoir 4 and the liquid outlet of the chemical adsorption container 21, so that the chemical adsorbent can flow unidirectionally from the liquid outlet of the chemical adsorption container 21 to the liquid inlet of the liquid reservoir 4; a second one-way valve 44 and a second acid discharge pump 45 are provided between the liquid outlet of the liquid reservoir 4 and the liquid inlet of the sprayer 22, so that the chemical adsorbent can flow unidirectionally from the liquid outlet of the liquid reservoir 4 to the liquid inlet of the sprayer 22, thereby realizing the unidirectional flow of the chemical adsorbent in the liquid reservoir 4 and the chemical adsorption container 21, achieving better cooling and filtering effects, and at the same time, better controlling the flow and concentration of the chemical adsorbent to improve the treatment effect.

[0075] like Figure 1 As shown, in some embodiments, the dryer 3 includes: a drying container 31, a second water vapor separation device 32 and a drying layer 33, the second water vapor separation device 32 is installed on the drying container 31, and the inlet of the air inlet pipe of the dryer 3 is located below the second water vapor separation device 32; the drying layer 33 is located above the second water vapor separation device 32, and the outlet of the air outlet pipe of the dryer 3 is located above the drying layer 33.

[0076] Among them, the inlet of the dryer 3 and the outlet of the dryer 3 are located on both sides of the second water vapor separation device 32 and the drying layer 33. The gas needs to pass through both sides of the second water vapor separation device 32 and the drying layer 33 before discharging the dryer 3, so that the gas can fully contact the second water vapor separation device 32 and the drying layer 33 and release water vapor.

[0077] The second water vapor separation device 32 can be a physical condensation separation or adsorption separation. For example, the second water vapor separation device 32 can be a baffle-shaped, metal mesh adsorption-shaped or centrifugal-shaped. Compared with the first water vapor separation device 23, the second water vapor separation device 32 can separate finer water vapor in the gas.

[0078] The drying layer 33 is located above the second water vapor separation device 32 and is used to further absorb or remove residual water vapor in the gas. The drying layer 33 may contain a desiccant, such as silica gel or molecular sieve.

[0079] The second water vapor separation device 32 and the drying layer 33 can be arranged closely or spaced apart; a plurality of second water vapor separation devices 32 and a plurality of drying layers 33 can be provided, and a plurality of second water vapor separation devices 32 and a plurality of drying layers 33 can be arranged in sequence.

[0080] like Figure 1 As shown, in some embodiments, the exhaust gas emission system further includes: a bypass pipe 5, both ends of which are respectively connected to the inlet of the first filter 1 and the outlet of the dryer 3, and a first control valve 61 is provided.

[0081] The two ends of the bypass pipe 5 are connected to the inlet of the first filter 1 and the outlet of the dryer 3 to form an optional flow path. The first control valve 61 is installed on the bypass pipe 5. The first control valve 61 is used to control the connection and disconnection of the bypass pipe 5. When the system detects that the exhaust gas does not contain toxic gases such as boron oxide, the first control valve 61 is opened, and the exhaust gas enters the bypass pipe 5 and is quickly discharged to the tail exhaust pipe 9, reducing the exhaust resistance, extending the service life of the diaphragm, and quickly exhausting the gas to complete the entire exhaust treatment work; when the system detects that the exhaust gas contains toxic gases such as boron oxide, the first control valve 61 is closed, and the exhaust gas is discharged to the tail exhaust pipe 9 after being filtered and purified by the first filter 1, the chemical absorber 2 and the dryer 3 in turn.

[0082] like Figure 1 As shown, in some embodiments, the exhaust gas emission system further includes: a cooler 7, which is suitable for being arranged between the gas outlet of the vacuum furnace 8 of the equipment and the inlet of the first filter 1.

[0083] The tail gas first enters the cooler 7, where it is initially cooled and condensed from bottom to top. Under the influence of its own gravity, the tail gas deposits the large-particle boron oxide crystals to the bottom of the cooler 7 to achieve preliminary treatment.

[0084] Exemplarily, the cooler 7 may be a bottle container.

[0085] like Figure 1 As shown, in some embodiments, the exhaust gas emission system also includes: a pump body 63 and a second control valve 62, the inlet of the pump body 63 is connected to the outlet of the dryer 3, the outlet of the pump body 63 is connected to the inlet of the valve body, and the outlet of the second control valve 62 is connected to the exhaust port.

[0086] The second control valve 62 may be a vacuum valve, and the pump body 63 may be a diaphragm pump to accelerate the exhaust gas flow rate of the exhaust gas emission system and improve the filtering efficiency. The gas discharged from the dryer 3 passes through the pump body 63 and the second control valve 62 and enters the exhaust pipe 9.

[0087] The complete working process of the exhaust emission system provided in this embodiment is described below:

[0088] The tail gas of the boron expansion equipment is firstly cooled and condensed from bottom to top in the cooler 7. Under the influence of its own gravity, the super-large particles of boron oxide crystals are deposited at the bottom of the cooler 7 to achieve preliminary treatment, and then enter the first filter 1 through the pipeline and filter the large particles of boron oxide powder carried by the tail gas through the rough filter element in the first filter 1. The tail gas containing fine boron oxide powder and fine particles such as boron oxide gas and boron trichloride gas after filtration enters the lower part of the chemical adsorption container 21 through the pipeline. Due to the suction force of the tail pump body 63 of the system, the tail gas moves from bottom to top in the opposite direction to the alkaline solution sprayed by the sprayer 22. During the movement, the tail gas of each part reacts with the alkaline solution to form waste liquid, and at the same time, the residual boron oxide in the tail gas is suddenly pre-condensed and sublimated and enters the waste liquid together with the spray water. The waste liquid is then pumped out by the first acid discharge pump 43 and enters the liquid storage. 4, the boron oxide deposits are retained in the liquid reservoir 4 through the filter device 41, and the circulating chemical adsorbent in the liquid reservoir 4 needs to be replaced at a certain period (about 3 months) because the alkaline concentration will gradually weaken as the number of cycles increases; at the same time, the water content of the exhaust gas increases after the spraying treatment, and most of the liquid water droplets are blocked by the first water vapor separation device 23, and then the water-containing exhaust gas enters the drying container 31 and passes through the second water vapor separation device 32 to separate the water vapor in the gas again, and then the exhaust gas is further dried by the drying layer 33 and enters the tail exhaust pipe 9 through the second control valve 62 and the pump body 63; when the system detects that the exhaust gas does not contain toxic gases such as boron oxide, the first control valve 61 is opened to enter the fast channel, reduce the exhaust resistance, and extend the service life of the diaphragm as much as possible, while completing the fast exhaust to complete the entire exhaust treatment work.

[0089] An embodiment of the present application also provides a boron expansion device, including a vacuum furnace 8 and an exhaust gas emission system of any of the above embodiments, wherein an air inlet of the exhaust gas emission system is connected to an air outlet of the vacuum furnace 8 .

[0090] According to the boron expansion equipment provided in the embodiment of the present application, an exhaust gas emission system is set up, and the exhaust gas emission system is provided with a first filter 1, a chemical adsorber 2 and a dryer 3 connected in series. The exhaust gas discharged from the outlet of the vacuum furnace 8 of the equipment passes through the first filter 1, the chemical adsorber 2 and the dryer 3 in sequence. The exhaust gas can be filtered by combining multiple layers such as filtration, chemical adsorption and drying, which greatly improves the filtering effect of boron oxide and residual boron trichloride generated in the process of the boron expansion equipment, so that they cannot reach the diaphragm pump and the rear-end tail pipe 9, thereby reducing the problem of boron oxide deposition on the diaphragm and the tail pipe 9, reducing the maintenance cycle and maintenance cost, and improving the environmental protection and safety of exhaust gas emissions.

[0091] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0092] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0093] In the description of this application, "first feature" or "second feature" may include one or more of the features.

[0094] In the description of the present application, “plurality” means two or more.

[0095] In the description of the present application, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.

[0096] In the description of the present application, “above”, “over” and “above” a first feature to a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0097] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0098] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. An exhaust gas emission system, characterized in that: The tail gas emission system has an air inlet and an air outlet, wherein the air inlet is suitable for being connected to the air outlet of the vacuum furnace of the equipment, and the tail gas emission system comprises: a first filter, wherein an inlet of the first filter is connected to the air inlet and is used to filter at least part of the solid particles; A chemical absorber, wherein the inlet of the chemical absorber is connected to the outlet of the first filter, and the chemical absorbent in the chemical absorber is used to chemically react with the substance to be filtered in the exhaust gas; A dryer, the inlet of which is connected to the outlet of the chemical adsorber, is used for drying the tail gas, and the outlet of which is connected to the exhaust port.

2. The exhaust gas emission system according to claim 1, characterized in that: The chemical adsorber comprises: Chemical adsorption vessels; A sprayer is installed on the chemical adsorption container and is used for spraying the chemical adsorbent. The outlet of the air inlet pipe of the chemical adsorbent is located below the sprayer.

3. The exhaust gas emission system according to claim 2, characterized in that: The chemical adsorber also includes: A first water vapor separation device is installed on the chemical adsorption container and is located above the sprayer. The inlet of the gas outlet pipe of the chemical adsorber is located above the first water vapor separation device.

4. The exhaust gas emission system according to claim 2, characterized in that: Also includes: A liquid reservoir, wherein the liquid inlet of the liquid reservoir is connected to the liquid outlet of the chemical adsorption container, and the liquid outlet of the liquid reservoir is connected to the liquid inlet of the sprayer.

5. The exhaust gas emission system according to claim 4, characterized in that: The liquid reservoir is provided with a filtering device, and the liquid inlet of the liquid reservoir and the liquid outlet of the liquid reservoir are respectively located on two sides of the filtering device.

6. The exhaust gas emission system according to claim 1, characterized in that: The chemical adsorbent in the chemical adsorber is an alkaline solution.

7. The exhaust gas emission system according to claim 1, characterized in that: The dryer comprises: Drying containers; a second water vapor separation device, the second water vapor separation device being installed in the drying container, and the inlet of the air inlet pipe of the dryer being located below the second water vapor separation device; A drying layer, the drying layer is located above the second water vapor separation device, and the outlet of the air outlet pipe of the dryer is located above the drying layer.

8. The exhaust gas emission system according to claim 1, characterized in that: Also includes: A bypass pipeline, both ends of which are respectively connected to the inlet of the first filter and the outlet of the dryer, and is provided with a first control valve.

9. The exhaust gas emission system according to any one of claims 1 to 8, characterized in that: Also includes: a cooler, the cooler being adapted to be arranged between the gas outlet of the vacuum furnace of the device and the inlet of the first filter; And / or, a pump body and a second control valve, the inlet of the pump body is connected to the outlet of the dryer, the outlet of the pump body is connected to the inlet of the second control valve, and the outlet of the second control valve is connected to the exhaust port.

10. A boron expansion device, characterized in that: include: Vacuum furnace; The exhaust gas emission system according to any one of claims 1 to 9, wherein the air inlet of the exhaust gas emission system is connected to the air outlet of the vacuum furnace.

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