Circulating liquid supply device, liquid level regulation and control method thereof, temperature control system and integrated circuit technology processing system

Abstract

The invention provides a circulating liquid supply device, a liquid level regulation and control method thereof, a temperature control system and an integrated circuit technology processing system. The circulating liquid supply device comprises a liquid tank, a liquid supplementing adjusting valve, a main path electromagnetic valve, a control device and at least two liquid level detectors. The liquid box is provided with a first liquid inlet and a liquid outlet. The liquid box is used for containing circulating liquid. And the liquid outlet is connected with an external system so as to discharge the circulating liquid from the liquid tank to the external system. The liquid level detectors are sequentially arranged in the liquid tank according to different preset heights, detect the liquid level of circulating liquid in the liquid tank and output liquid level signals. And one end of the liquid supplementing regulating valve is communicated with the first liquid inlet. The main path electromagnetic valve is arranged outside the liquid tank, one end of the main path electromagnetic valve is communicated with the other end of the liquid supplementing adjusting valve, and the other end of the main path electromagnetic valve is communicated with an external liquid supply system so as to receive circulating liquid conveyed by the external liquid supply system. The control device controls the opening and closing states of the liquid supplementing adjusting valve and the main path electromagnetic valve according to the liquid level signal so as to adjust the liquid level of the liquid tank.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a circulating liquid supply device and a liquid level control method thereof, a temperature control system, and an integrated circuit process system. Background Art

[0002] The temperature control system dedicated to the semiconductor process is a system used to provide a circulating liquid with a constant temperature and constant flow rate. This temperature control system can be applied to the integrated circuit manufacturing process to use the circulating liquid to take away the heat generated in the process, thereby meeting the temperature control requirements of the semiconductor main process equipment.

[0003] In order to provide a stable and continuous circulating liquid, a circulating liquid supply device is usually set in the temperature control system. The circulating liquid supply device includes a liquid tank, which contains circulating liquid to provide circulating liquid for subsequent devices. As the circulating liquid in the liquid tank is continuously transported to the subsequent devices, the circulating liquid in the liquid tank will continue to decrease, so the circulating liquid supply device will replenish new circulating liquid into the liquid tank in real time.

[0004] In the prior art, a float valve is provided in the liquid tank. The float valve includes a float and a connecting rod, and the float is connected to one end of the connecting rod. The float floats on the liquid surface of the circulating liquid. When the liquid level of the circulating liquid in the liquid tank rises, the float will also rise, thereby driving the connecting rod to rise. When the connecting rod rises to a certain position, the connecting rod will support the rubber piston pad to close the valve to seal the liquid source. That is, new circulating liquid will not be able to be transported to the liquid tank. When the liquid level drops, the float will also drop, and the connecting rod will drive the piston pad to open. The liquid tank is automatically replenished by setting a float valve.

[0005] However, the inventors have discovered that in the prior art method of automatically replenishing the liquid tank with a float valve, since the force acting to close the float valve comes from buoyancy, which is relatively small, the float valve may not seal tightly when the liquid level is high, causing the circulating liquid to overflow. Summary of the invention

[0006] The present application aims to provide a circulating liquid supply device and a liquid level control method thereof, a temperature control system, and an integrated circuit process system.

[0007] According to one aspect of the present application, a circulating liquid supply device for use in a temperature control system is provided. The circulating liquid supply device includes a liquid tank, a liquid replenishment regulating valve, a main electromagnetic valve, a control device, and at least two liquid level detectors. The liquid tank is provided with a first liquid inlet and a liquid outlet. The liquid tank is used to contain circulating liquid. The liquid outlet is connected to an external system to discharge the circulating liquid from the liquid tank to the external system. At least two liquid level detectors are sequentially arranged in the liquid tank according to different preset heights, detect the liquid level of the circulating liquid in the liquid tank, and output a liquid level signal. The liquid replenishment regulating valve is arranged outside the liquid tank, and one end of the liquid replenishment regulating valve is connected to the first liquid inlet. The main electromagnetic valve is arranged outside the liquid tank, and one end of the main electromagnetic valve is connected to the other end of the liquid replenishment regulating valve, and the other end of the main electromagnetic valve is connected to the external liquid supply system to receive the circulating liquid transported by the external liquid supply system. The control device is electrically connected to the at least two liquid level detectors, the liquid replenishment regulating valve, and the main electromagnetic valve, and controls the opening and closing states of the liquid replenishment regulating valve and the main electromagnetic valve according to the liquid level signal to adjust the liquid level of the liquid tank.

[0008] According to another aspect of the present application, a temperature control system is provided. The temperature control system specifically includes the circulating liquid supply device described in the above aspect, and an external system. The external system specifically includes a temperature control device. The temperature control device is connected to the liquid outlet of the temperature control system to receive and adjust the temperature of the circulating liquid.

[0009] According to another aspect of the present application, an integrated circuit process system is provided. The integrated circuit process system includes the temperature control system described in the above another aspect and a semiconductor process device. The semiconductor process device is connected to the temperature control device of the temperature control system and receives the circulating fluid after temperature adjustment to perform semiconductor process manufacturing.

[0010] According to another aspect of the present application, a liquid level control method for a circulating liquid supply device is provided. The liquid level control method can be specifically applied to the circulating liquid supply device described in the above aspect. The liquid level control method can specifically include controlling the opening and closing devices of the liquid replenishment regulating valve and the main circuit solenoid valve according to the liquid level signal to adjust the liquid level height in the liquid tank.

[0011] Beneficial Effects

[0012] The circulating liquid supply device of the present application is provided with a control device, a liquid replenishment regulating valve, a main electromagnetic valve and at least two liquid level detectors, and the control device adjusts the opening and closing states of the liquid replenishment regulating valve and the main electromagnetic valve according to the liquid level signal output by the liquid level detector. In this way, the replenishment can be accelerated when the liquid level of the circulating liquid in the liquid tank is low, and the replenishment can be stopped in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0014] Figure 1 This is a schematic diagram of the structure of the temperature control system of the embodiment of the present application;

[0015] Figure 2 This is a schematic diagram of the structure of the circulating liquid supply device according to an embodiment of the present application.

[0016] Description of reference numerals:

[0017] 1. Circulating liquid supply device; 11. Liquid tank; 12. At least two liquid level detectors; 121. First liquid level detector; 122. Second liquid level detector; 123. Third liquid level detector; 124. Fourth liquid level detector; 125. Fifth liquid level detector; 13. Liquid replenishment regulating valve; 14. Main solenoid valve; 15. Backup solenoid valve; 2. External system; 21. Temperature control device; 211. Refrigerator; 212. Heater; 22. Liquid pump; 23. Pressure regulating device; 24. Pressure detection device. DETAILED DESCRIPTION

[0018] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be comprehensive and complete and will fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar parts, and thus their repeated description will be omitted.

[0019] The described features, structures or characteristics may be combined in one or more embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of these specific details, or other modes, components, materials, devices, etc. may be adopted. In these cases, known structures, methods, devices, implementations, materials or operations will not be shown or described in detail.

[0020] In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or devices.

[0021] The terms "first", "second" and the like in the specification and claims of this application and the above drawings are used to distinguish different objects rather than to describe a specific order.

[0022] The following is a clear and complete description of the technical solution of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0023] According to one aspect of the present application, an embodiment of the present application provides a circulating liquid supply device 1 used in a temperature control system. The temperature control system is specifically used to provide circulating liquid for temperature adjustment for semiconductor process manufacturing equipment. The temperature control system can be specifically an open system, in which the temperature control system delivers circulating liquid to the semiconductor process manufacturing equipment, and the circulating liquid used by the semiconductor process manufacturing equipment will no longer be recycled.

[0024] Figure 1 The system structure of the temperature control system is shown. Figure 1 The temperature control system may specifically include a circulating liquid supply device 1 and a temperature control device 21. The circulating liquid supply device 1 is connected to an external liquid supply system and is also connected to the temperature control device 21. The circulating liquid supply device 1 receives the circulating liquid delivered by the external liquid supply system for storage, and continuously delivers the circulating liquid stored inside to the temperature control device 21.

[0025] Figure 2 Schematic diagram of the structure of the circulating liquid supply device 1 is shown. Figure 2 The circulating liquid supply device 1 may specifically include a liquid tank 11 , a liquid replenishment regulating valve 13 , a main line solenoid valve 14 , a control device and at least two liquid level detectors 12 .

[0026] According to an exemplary embodiment, the liquid tank 11 is used to contain the circulating liquid. The liquid tank 11 is provided with a first liquid inlet and a liquid outlet. The liquid outlet is connected to the external system 2 to discharge the circulating liquid from the liquid tank 11 to the external system 2.

[0027] At least two liquid level detectors 12 are respectively arranged at different preset heights in the liquid tank 11. The at least two liquid level detectors 12 can be arranged on the inner wall of the liquid tank 11, or can be arranged in the liquid tank 11 by hanging with ropes.

[0028] Exemplarily, the circulating liquid supply device 1 may include five liquid level detectors 12, which are arranged in sequence from top to bottom.

[0029] It is worth noting that, when the circulating liquid supply device 1 includes at least three liquid level detectors 12, the height difference between every two liquid level detectors 12 can be the same or different, that is, the liquid level detectors 12 can be arranged at equal intervals or at unequal intervals, which is not limited here.

[0030] According to some embodiments, the at least two liquid level detectors 12 may be arranged on the same vertical line or on different vertical lines, which is not limited herein.

[0031] According to the exemplary embodiment, the liquid replenishment regulating valve 13 and the main electromagnetic valve 14 are arranged outside the liquid tank 11. One end of the liquid replenishment regulating valve 13 is communicated with the first liquid inlet. The other end of the liquid replenishment regulating valve 13 is communicated with one end of the main electromagnetic valve 14. The other end of the main electromagnetic valve 14 is used to connect to an external liquid supply system to receive the circulating liquid delivered from the external liquid supply system.

[0032] According to the exemplary embodiment, the liquid replenishment regulating valve 13 may be an electric regulating valve, and its opening degree is adjustable. When the opening degree of the liquid replenishment regulating valve 13 is larger, the liquid flow rate of the circulating liquid flowing through the liquid replenishment regulating valve 13 is larger in the same time, and more circulating liquid flows into the liquid tank 11.

[0033] The main electromagnetic valve 14 is an electromagnetic valve, which is in a first state when powered, and in a second state when not powered. For example, when the main electromagnetic valve 14 is powered, the main electromagnetic valve 14 is open, and the circulating fluid delivered by the external fluid supply system can flow through the main electromagnetic valve 14. When the main electromagnetic valve 14 is not powered, the main electromagnetic valve 14 is closed, and the circulating fluid delivered by the external fluid supply system cannot pass through the main electromagnetic valve 14.

[0034] The at least two liquid level detectors 12 are used to detect the liquid level of the circulating liquid in the liquid tank 11 and output a liquid level signal. Optionally, the liquid level detector 12 may be a float switch.

[0035] The control device is electrically connected to the at least two liquid level detectors 12 respectively, and the control device is also electrically connected to the main circuit solenoid valve 14 and the liquid replenishment regulating valve 13 respectively.

[0036] The control device controls the opening and closing states of the liquid replenishment regulating valve 13 and the main circuit electromagnetic valve 14 according to the liquid level signals output by the at least two liquid level detectors 12 to adjust the liquid level of the liquid tank 11 .

[0037] According to the exemplary embodiment, the opening and closing state of the liquid replenishment regulating valve 13 can be specifically used to describe the opening of the liquid replenishment regulating valve 13. For example, the opening and closing state of the liquid replenishment regulating valve 13 is an opening state of 0%, indicating that the liquid replenishment regulating valve 13 is closed and the circulating fluid cannot flow through the liquid replenishment regulating valve 13. When the opening and closing state of the liquid replenishment regulating valve 13 is an opening state of 100%, it indicates that the liquid replenishment regulating valve 13 is in a state of full opening. When the opening and closing state of the liquid replenishment regulating valve 13 is an opening state of 50%, the liquid replenishment regulating valve 13 is open and the opening is 50%.

[0038] The opening and closing states of the main electromagnetic valve 14 may specifically include an open state of the main electromagnetic valve 14 and a closed state of the main electromagnetic valve 14 .

[0039] According to the exemplary embodiment, the control device can specifically determine the liquid level interval to which the liquid level of the liquid tank 11 belongs according to the liquid level signals output by the at least two liquid level detectors 12. Then, the control device can adjust the opening of the liquid replenishment regulating valve 13 and the switch of the main electromagnetic valve 14 according to the liquid level interval to which the liquid level of the liquid tank 11 belongs, so as to adjust the liquid level of the liquid tank 11.

[0040] Exemplarily, two liquid level detectors 12 are used as an example for explanation. The control device can receive the liquid level signals output by the two liquid level detectors 12, and determine whether the liquid level of the liquid tank 11 is between the two liquid level detectors 12. When the liquid level of the liquid tank 11 is higher than the position of the upper liquid level detector 12, the control device can control the main circuit solenoid valve 14 to close, and control the liquid replenishment regulating valve 13 to close. In this way, the circulating liquid transported by the external liquid supply system will not be able to flow into the liquid tank 11, thereby preventing the liquid level from being too high and overflowing.

[0041] When the liquid level of the liquid tank 11 is between the two liquid level detectors 12, the control device can control the main electromagnetic valve 14 to open, control the liquid replenishment regulating valve 13 to open, and control the opening of the liquid replenishment regulating valve 13 to a preset opening. In this way, the circulating liquid delivered by the external liquid supply system can flow into the liquid tank 11 through the main electromagnetic valve 14 and the liquid replenishment regulating valve 13, so that the liquid level of the liquid tank 11 is within a normal range.

[0042] When the liquid level of the liquid tank 11 is lower than the lower liquid level detector 12, the control device can control the main electromagnetic valve 14 to open and the liquid replenishment regulating valve 13 to open, and control the opening of the liquid replenishment regulating valve 13 to the maximum opening that can be achieved. In this way, the circulating liquid transported by the external liquid supply system can flow at the maximum flow rate when passing through the main electromagnetic valve 14 and the liquid replenishment regulating valve 13, thereby speeding up the liquid replenishment.

[0043] Through the above embodiments, the circulating liquid supply device 1 of the present application is provided with a control device, a liquid replenishment regulating valve 13, a main electromagnetic valve 14 and at least two liquid level detectors 12, and the control device adjusts the opening and closing states of the liquid replenishment regulating valve 13 and the main electromagnetic valve 14 according to the liquid level signal output by the liquid level detector 12. In this way, the replenishment can be accelerated when the liquid level of the circulating liquid in the liquid tank 11 is low, and the liquid replenishment can be stopped in time when the liquid level of the circulating liquid in the liquid tank 11 is high, so that the liquid level of the circulating liquid in the liquid tank 11 can always be kept within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0044] According to some embodiments, the liquid tank 11 is further provided with a second liquid inlet. The circulating liquid supply device 1 further comprises a backup solenoid valve 15 .

[0045] The backup solenoid valve 15 is arranged outside the liquid tank 11, and one end of the backup solenoid valve 15 is connected to the second liquid inlet of the liquid tank 11, and the other end of the backup solenoid valve 15 is connected to one end of the main solenoid valve 14, that is, the other end of the backup solenoid valve 15 is connected to one end of the main solenoid valve 14 connected to the liquid replenishment regulating valve 13.

[0046] According to the exemplary embodiment, the circulating liquid delivered by the external liquid supply system first flows through the main solenoid valve 14. After the circulating liquid flows through the main solenoid valve 14, it is divided into two paths, one of which flows into the liquid tank 11 through the liquid replenishment regulating valve 13 and the first liquid inlet, and the other flows into the liquid tank 11 through the standby solenoid valve 15 and the second liquid inlet.

[0047] According to the exemplary embodiment, the standby solenoid valve 15 is also a solenoid valve. The switch state of the standby solenoid valve 15 includes an open state of the standby solenoid valve 15 and a closed state of the standby solenoid valve 15. When the standby solenoid valve 15 is in the open state, the standby solenoid valve 15 is in the open state, and the circulating fluid can flow. When the standby solenoid valve 15 is in the closed state, the standby solenoid valve 15 is in the closed state, and the circulating fluid cannot flow.

[0048] According to the exemplary embodiment, when the backup solenoid valve 15 is powered on, the switch state of the backup solenoid valve 15 is switched to the backup solenoid valve 15 open state, and the circulating fluid can flow through the backup solenoid valve 15. When the backup solenoid valve 15 is not powered on, the switch state of the backup solenoid valve 15 is switched to the backup solenoid valve 15 closed state, that is, the circulating fluid cannot flow through the backup solenoid valve 15.

[0049] According to an exemplary embodiment, the control device is also electrically connected to the backup solenoid valve 15 .

[0050] The control device can control the opening and closing state of the standby solenoid valve 15 while controlling the opening and closing state of the liquid replenishment regulating valve 13 and the main solenoid valve 14 according to the liquid level signals output by the at least two liquid level detectors 12. In this way, by controlling the opening and closing of the liquid replenishment regulating valve 13, the main solenoid valve 14 and the standby solenoid valve 15, the flow rate of the circulating liquid flowing into the liquid tank 11 can be adjusted, and then the liquid level of the circulating liquid in the liquid tank 11 can be adjusted.

[0051] Illustratively, when the liquid level is low, the control device can control the backup solenoid valve 15 to open while controlling the liquid replenishment regulating valve 13 to be fully opened and the main solenoid valve 14 to be opened, so as to further speed up the flow of the circulating liquid flowing into the liquid tank 11, thereby making it easier to adjust the liquid level of the circulating liquid in the liquid tank 11.

[0052] According to some embodiments, the at least two liquid level detectors 12 may specifically include a first liquid level detector 121 , a second liquid level detector 122 , and a third liquid level detector 123 .

[0053] The first liquid level detector 121 is located at a first preset height of the liquid tank 11 , the second liquid level detector 122 is located at a second preset height of the liquid tank 11 , and the third liquid level detector 123 is located at a third preset height of the liquid tank 11 .

[0054] The first preset height is lower than the second preset height, and the second preset height is lower than the third preset height. That is, the first liquid level detector 121, the second liquid level detector 122 and the third liquid level detector 123 are arranged in sequence from bottom to top.

[0055] For any liquid level detector, when the liquid level submerges the liquid level detector, the liquid level detector will output a high liquid level signal, such as a high level, and when the liquid level does not submerge the liquid level detector, the liquid level detector will output a low liquid level signal, such as a low level.

[0056] That is, when the liquid level of the circulating liquid is higher than the first preset height, the first liquid level detector 121 is submerged by the circulating liquid, so the first liquid level detector 121 generates a first high liquid level signal. When the liquid level of the circulating liquid is lower than the first preset height, the first liquid level detector 121 is not submerged by the circulating liquid, so the first liquid level detector 121 generates a first low liquid level signal.

[0057] Similarly, when the liquid level of the circulating fluid is higher than the second preset height, the second liquid level detector 122 generates a second high liquid level signal. When the liquid level of the circulating fluid is lower than the second preset height, the second liquid level detector 122 generates a second low liquid level signal.

[0058] Similarly, when the liquid level of the circulating fluid is higher than the third preset height, the third liquid level detector 123 generates a third high liquid level signal. When the liquid level of the circulating fluid is lower than the third preset height, the third liquid level detector 123 generates a third low liquid level signal.

[0059] According to the exemplary embodiment, the control device controls the opening and closing states of the liquid replenishment regulating valve 13, the main solenoid valve 14 and the backup solenoid valve 15 according to the liquid level signals generated by the received first liquid level detector 121, the second liquid level detector 122 and the third liquid level detector 123 to adjust the liquid level of the circulating fluid in the liquid tank 11.

[0060] Exemplarily, the control device can determine the liquid level height interval of the circulating liquid based on the liquid level signals generated by the received liquid level detectors.

[0061] Exemplarily, when the liquid level is below a first preset height, the control device will receive a first low liquid level signal, a second low liquid level signal, and a third low liquid level signal.

[0062] When the liquid level is between the first preset height and the second preset height, the control device will receive a first high liquid level signal, a second low liquid level signal and a third low liquid level signal.

[0063] When the liquid level is between the second preset height and the third preset height, the control device will receive a first high liquid level signal, a second high liquid level signal and a third low liquid level signal.

[0064] When the liquid level is above the third preset height, the control device will receive a first high liquid level signal, a second high liquid level signal and a third high liquid level signal.

[0065] Therefore, the control device can determine the liquid level height range of the circulating fluid according to the received liquid level signals, and can regulate the main solenoid valve 14, the backup solenoid valve 15 and the liquid replenishment regulating valve 13 according to the liquid level height range of the circulating fluid to adjust the water level.

[0066] For example, when the control device determines that the liquid level is below the first preset height, the control device can control the main solenoid valve 14 to open, control the liquid replenishment regulating valve 13 to open at full opening, and control the standby solenoid valve 15 to open, so as to replenish liquid at the maximum liquid replenishment flow rate.

[0067] For example, when the control device determines that the liquid level is between the first preset height and the second preset height, the control device can control the main solenoid valve 14 to open, control the liquid replenishment regulating valve 13 to open with a first preset opening, and control the standby solenoid valve 15 to close, so as to replenish the circulating fluid in the liquid tank 11.

[0068] For example, when the control device determines that the liquid level is between the second preset height and the third preset height, the control device can control the main solenoid valve 14 to open, control the liquid replenishment regulating valve 13 to open with the second preset opening, and control the standby solenoid valve 15 to close, so as to replenish the circulating fluid in the liquid tank 11.

[0069] For example, when the control device determines that the liquid level is above the third preset height, the control device can control the main solenoid valve 14, the backup solenoid valve 15 and the liquid replenishment regulating valve 13 to close, so as to stop the liquid replenishment in time and reduce the probability of overflow of the circulating liquid in the liquid tank 11.

[0070] According to some embodiments, the at least two liquid level detectors 12 may include not only a first liquid level detector 121 , a second liquid level detector 122 , and a third liquid level detector 123 , but may also include a fourth liquid level detector 124 and a fifth liquid level detector 125 .

[0071] The fourth liquid level detector 124 is located at a fourth preset height of the liquid tank 11 , and the fifth liquid level detector 125 is located at a fifth preset height of the liquid tank 11 .

[0072] The fourth preset height is lower than the first preset height. The fifth preset height is higher than the third preset height. That is, the fourth preset height is lower than the first preset height, lower than the second preset height, lower than the third preset height, and lower than the fifth preset height.

[0073] That is, the preset heights from bottom to top are respectively the fourth preset height, the first preset height, the second preset height, the third preset height and the fifth preset height.

[0074] Exemplarily, the liquid level detectors are, from bottom to top, the fourth liquid level detector 124 , the first liquid level detector 121 , the second liquid level detector 122 , the third liquid level detector 123 , and the fifth liquid level detector 125 .

[0075] According to an exemplary embodiment, when the liquid level of the circulating fluid is higher than a fourth preset height, the fourth liquid level detector 124 generates a fourth high liquid level signal. When the liquid level of the circulating fluid is lower than the fourth preset height, the fourth liquid level detector 124 generates a fourth low liquid level signal.

[0076] According to an exemplary embodiment, when the liquid level of the circulating fluid is higher than a fifth preset height, the fifth liquid level detector 125 generates a fifth high liquid level signal. When the liquid level of the circulating fluid is lower than the fifth preset height, the fifth liquid level detector 125 generates a fifth low liquid level signal.

[0077] According to the exemplary embodiment, the control device can determine the height interval of the current circulating liquid level according to the liquid level signals generated by the first liquid level detector 121, the second liquid level detector 122, the third liquid level detector 123, the fourth liquid level detector 124 and the fifth liquid level detector 125. And the control device can adjust the opening and closing states of the liquid replenishment regulating valve 13, the main electromagnetic valve 14 and the standby electromagnetic valve 15 according to the height interval of the liquid level, so as to adjust the liquid level of the circulating liquid in the liquid tank 11.

[0078] According to some embodiments, when the received liquid level signal meets the first preset condition, the control device can control the main solenoid valve 14, the backup solenoid valve 15 and the liquid replenishment regulating valve 13 to close, and the control device also outputs a shutdown alarm instruction.

[0079] The first preset condition includes the control device receiving a first low liquid level signal, a second low liquid level signal, a third low liquid level signal, a fourth low liquid level signal, and a fifth low liquid level signal.

[0080] According to the exemplary embodiment, when the liquid level of the circulating liquid in the liquid tank 11 is below the fourth liquid level detector 124, the first liquid level detector 121 outputs a first low liquid level signal, the second low liquid level detector outputs a second low liquid level signal, the third liquid level detector 123 outputs a third low liquid level signal, the fourth liquid level detector 124 outputs a fourth low liquid level signal, and the fifth liquid level detector 125 outputs a fifth low liquid level signal.

[0081] That is, when the received liquid level signal satisfies the first preset condition, it indicates that the liquid level of the circulating liquid in the liquid tank 11 is lower than the height of the fourth liquid level detector 124, that is, lower than the fourth preset height.

[0082] Since the circulating liquid supply device 1 is used to provide circulating liquid to the external system 2, the external system 2 usually uses a liquid pump 22 to extract circulating liquid from the circulating liquid supply device 1. Therefore, when the liquid level of the circulating liquid is too low, it is necessary to shut down each device (such as the liquid pump 22) in time. Otherwise, the liquid pump 22 will extract a large amount of air when extracting the circulating liquid, and there is a possibility of causing failure of the liquid pump 22 and other subsequent equipment.

[0083] Furthermore, when the circulating fluid level is lower than the fourth preset height, it indicates that there is component damage (such as damage to the main circuit solenoid valve 14 or damage to the pipeline, etc.) or abnormality in the external fluid supply system. Therefore, each device needs to be shut down for maintenance.

[0084] Therefore, in the embodiment of the present application, when the liquid level of the circulating fluid in the liquid tank 11 is lower than the fourth preset height, that is, when the liquid level signal received by the control device meets the first preset condition, the control device controls the main solenoid valve 14, the backup solenoid valve 15 and the liquid replenishment regulating valve 13 to all be closed, and outputs a shutdown alarm instruction so that the user can shut down each device for maintenance, thereby reducing the probability of causing failures in other equipment.

[0085] According to some embodiments, the fourth preset height can be specifically set by the user according to the minimum safe liquid level. When the liquid level is lower than the minimum safe liquid level, it indicates that the user needs to stop the machine for maintenance.

[0086] According to some embodiments, when the received liquid level signal meets the second preset condition, the control device controls the main solenoid valve 14 and the backup solenoid valve 15 to open, and controls the opening of the liquid replenishment regulating valve 13 to be a preset maximum opening, that is, controls the opening of the liquid replenishment regulating valve 13 to be 100%.

[0087] According to an example embodiment, the second preset condition includes the control device receiving a fourth high liquid level signal, a first low liquid level signal, a second low liquid level signal, a third low liquid level signal, and a fifth low liquid level signal.

[0088] According to the exemplary embodiment, when the liquid level of the circulating liquid in the liquid tank 11 is between the fourth liquid level detector 124 and the first liquid level detector 121, the fourth liquid level detector 124 outputs a fourth high liquid level signal, the first liquid level detector 121 outputs a first low liquid level signal, the second liquid level detector 122 outputs a second low liquid level signal, the third liquid level detector 123 outputs a third low liquid level signal, and the fifth liquid level detector 125 outputs a fifth low liquid level signal.

[0089] That is, when the received liquid level signal satisfies the second preset condition, it indicates that the liquid level of the circulating liquid in the liquid tank 11 is higher than the height of the fourth liquid level detector 124 and lower than the height of the first liquid level detector 121. That is, the liquid level of the circulating liquid is between the fourth preset height and the first preset height.

[0090] According to the exemplary embodiment, when the liquid level of the circulating liquid in the liquid tank 11 is between the fourth preset height and the first preset height, it indicates that the liquid level of the circulating liquid in the liquid tank 11 is low and the liquid replenishment needs to be accelerated. In addition, it is difficult to achieve a good liquid replenishment effect if the liquid replenishment is performed only by the main electromagnetic valve 14 and the liquid replenishment regulating valve 13 in the current state.

[0091] Therefore, when the liquid level signal meets the second preset condition, the control device not only controls the main electromagnetic valve 14 to open, but also controls the opening of the liquid replenishment regulating valve 13 to 100%, and also controls the standby electromagnetic valve 15 to open.

[0092] In addition, when the liquid level is lower than the first preset height, it may be caused by damage to the liquid replenishment regulating valve 13. Because under normal conditions, the circulating liquid in the liquid tank 11 will not only flow out from the liquid outlet, but also replenish the liquid in the liquid tank 11 through the liquid replenishment regulating valve 13. The circulating liquid in the liquid tank 11 is in a state of dynamic equilibrium, and the liquid level of the circulating liquid in the liquid tank 11 will continue to be in a normal range. If the liquid replenishment regulating valve 13 is damaged, the replenishment liquid will be less than the outlet liquid, and the liquid level will be lower than the first preset height.

[0093] Therefore, in the embodiment of the present application, when the liquid level of the circulating fluid is between the fourth preset height and the first preset height, the control device not only controls the opening of the liquid replenishment regulating valve 13 to 100%, but also controls the standby solenoid valve 15 to open, so as to reduce the probability of affecting the liquid replenishment due to damage to the liquid replenishment regulating valve 13, thereby effectively increasing the liquid level of the circulating fluid to achieve timely liquid replenishment.

[0094] According to some embodiments, the first preset height can be set by the user according to actual conditions, for example, according to the minimum liquid level of the circulating liquid in the liquid tank 11 when the temperature control system is operating normally. For example, during operation, the minimum liquid level of the circulating liquid must not be less than 5, and the first preset height can be set to 5.

[0095] According to some embodiments, when the liquid level signal received by the control device meets the third preset condition, the control device can control the main circuit solenoid valve 14 to open.

[0096] Furthermore, when the third preset condition is met, the control device can also determine the current opening interval according to the outlet flow value of the circulating liquid supply device 1. Furthermore, the control device determines the current opening value according to the maximum opening value of the current opening interval, and controls the opening of the liquid replenishment regulating valve 13 to be the current opening value.

[0097] And when the third preset condition is met, the control device can also determine whether the duration reaches the preset duration, and when the duration reaches the preset duration, control the standby solenoid valve 15 to close; when the duration does not reach the preset duration, control the standby solenoid valve 15 to open.

[0098] According to an example embodiment, the third preset condition includes the control device receiving a fourth high liquid level signal, a first high liquid level signal, a second low liquid level signal, a third low liquid level signal, and a fifth low liquid level signal.

[0099] According to the exemplary embodiment, when the liquid level of the circulating liquid in the liquid tank 11 is between the first liquid level detector 121 and the second liquid level detector 122, the fourth liquid level detector 124 outputs a fourth high liquid level signal, the first liquid level detector 121 outputs a first high liquid level signal, the second liquid level detector 122 outputs a second low liquid level signal, the third liquid level detector 123 outputs a third low liquid level signal, and the fifth liquid level detector 125 outputs a fifth low liquid level signal.

[0100] That is, when the received liquid level signal satisfies the third preset condition, it indicates that the liquid level of the circulating liquid in the liquid tank 11 is higher than the height of the first liquid level detector 121 and lower than the height of the second liquid level detector 122. That is, the liquid level of the circulating liquid is between the first preset height and the second preset height.

[0101] According to the exemplary embodiment, when the liquid level of the circulating fluid is between the first preset height and the second preset height, the control device controls the main line electromagnetic valve 14 to open, and controls the liquid replenishment regulating valve 13 to open for liquid replenishment.

[0102] For the standby solenoid valve 15, after the liquid level of the circulating fluid is higher than the first preset height, the standby solenoid valve 15 may not be directly controlled to be closed. Instead, when the liquid level of the circulating fluid is higher than the first preset height and the state higher than the first preset height continues for a preset time, the control device controls the standby solenoid valve 15 to be closed.

[0103] Therefore, when the received liquid level signal meets the third preset condition, the control device also determines whether the duration reaches the preset duration.

[0104] According to an exemplary embodiment, the duration is the duration during which the control device receives the first high liquid level signal, which is equivalent to the duration during which the liquid level of the circulating fluid is higher than the first preset height.

[0105] And when the duration does not reach the preset duration, the control device controls the standby solenoid valve 15 to remain open. When the duration reaches the preset duration (for example, the duration is greater than or equal to the preset duration), the control device controls the standby solenoid valve 15 to close.

[0106] Exemplarily, when the main electromagnetic valve 14, the liquid replenishment regulating valve 13, and the standby electromagnetic valve 15 are all opened, the liquid level of the circulating liquid in the liquid tank 11 continues to rise. When the liquid level of the circulating liquid rises to a first preset height, the timing starts. The timing duration is the duration. When the timing duration is equal to or greater than the preset duration, the control device controls the standby electromagnetic valve 15 to close, so that the main electromagnetic valve 14 and the liquid replenishment regulating valve 13 can adjust the liquid level of the circulating liquid.

[0107] According to the example embodiment, when the liquid level signal satisfies the third preset condition, the control device can adjust the opening of the liquid replenishment regulating valve 13 to adjust the liquid replenishment speed. According to the example embodiment, when the liquid level signal satisfies the third preset condition, the control device determines the current opening range according to the outlet flow value of the circulating liquid supply device 1.

[0108] The outlet flow rate value of the circulating liquid supply device 1 may specifically be the flow rate value of the circulating liquid delivered to the external liquid system. For example, the outlet of the circulating liquid supply device 1 is connected to a water pump, and the water pump is also connected to a temperature control device 21. The temperature control device 21 is connected to the external liquid system. The water pump extracts the circulating liquid from the circulating liquid supply device 1 and delivers the circulating liquid to the temperature control device 21. The temperature control device 21 controls the temperature of the circulating liquid and delivers it to the external liquid system. The outlet flow rate value may be the flow rate value delivered by the temperature control device 21 to the external liquid system.

[0109] The higher the flow value of the external liquid system, the greater the outlet flow value of the circulating liquid supply device 1. If the circulating liquid inlet flow value in the liquid tank 11 of the circulating liquid supply device 1 is higher, the liquid level of the circulating liquid in the liquid tank 11 will at least not move downward. If the circulating liquid inlet flow value in the liquid tank 11 of the circulating liquid supply device 1 is lower, the liquid level of the circulating liquid in the liquid tank 11 will at least not move upward.

[0110] The circulating liquid inlet flow rate is limited by the opening of the liquid replenishment regulating valve 13 and the supply flow of the external liquid supply system.

[0111] Therefore, different opening ranges can be preset for different outlet flow values.

[0112] In the embodiment of the present application, the outlet flow value is divided into intervals, for example, every 4 L / min is divided into an interval, for example, 0-4 L / min is an interval, 4-8 L / min is an interval...

[0113] For each outlet flow interval, a corresponding opening interval is set. When each opening interval is set, the maximum value of the opening interval needs to meet the first preset opening condition. The minimum value of the opening interval needs to meet the second preset opening condition.

[0114] The first preset opening condition includes that when the opening of the liquid replenishment regulating valve 13 is the maximum value of the opening range and the supply flow of the external liquid supply system is the minimum, the circulating liquid inlet flow value is equal to the maximum value of the outlet flow range, so as to ensure that the liquid level at least does not move downward when the supply is minimum and the demand is maximum.

[0115] The second preset opening condition includes that when the opening of the liquid replenishment regulating valve 13 is the minimum value of the opening range and the supply flow of the external liquid supply system is the maximum, the circulating liquid inlet flow value is equal to the minimum value of the outlet flow range, so as to ensure that the liquid level at least does not rise when the supply is maximum and the demand is minimum.

[0116] For example, the corresponding relationship between different outlet flow values ​​and opening ranges can be as follows:

[0117] As shown in Table 1.

[0118]

[0119] Table 1

[0120] According to the example embodiment, when the control device detects that the third preset condition is met, the control device determines the current opening range according to the outlet flow value, and then the control device can determine the maximum opening value in the current opening range as the current opening value, and control the opening of the fluid replenishment regulating valve 13 to be the current opening value, so that the fluid replenishment regulating valve 13 replenishes fluid at the current opening value.

[0121] According to the exemplary embodiment, the maximum opening value in the current opening interval is equivalent to the upper limit value Hest of the opening interval. When the liquid level in the liquid tank 11 is between the first preset height and the second preset height, the opening of the liquid replenishment regulating valve 13 is the maximum opening value in the current opening interval. In this way, at the current outlet flow value, no matter what the liquid supply flow value of the external liquid supply system is, the liquid level of the circulating liquid in the liquid tank 11 can not move down, or even move up.

[0122] According to some embodiments, when the liquid level signal received by the control device meets the fourth preset condition, the control device controls the main solenoid valve 14 to open, controls the standby solenoid valve 15 to close, and controls the opening of the liquid replenishment regulating valve 13 to remain unchanged.

[0123] According to an exemplary embodiment, the fourth preset condition includes the control device receiving a fourth high liquid level signal, a first high liquid level signal, a second high liquid level signal, a third low liquid level signal, and a fifth low liquid level signal, that is, the liquid level of the circulating liquid in the liquid tank 11 is between the second preset height and the third preset height.

[0124] In this case, the liquid level of the circulating fluid is in a reasonable range, which can meet the demand of the external liquid system for the amount of circulating fluid. Therefore, in this case, the control device can keep the main electromagnetic valve 14 open and the standby electromagnetic valve 15 closed. And the control device can control the opening of the liquid replenishment regulating valve 13 to remain unchanged, that is, the opening of the liquid replenishment regulating valve 13 at the current moment is the same as the opening of the liquid replenishment regulating valve 13 at the previous moment.

[0125] In this way, when the liquid level of the circulating fluid is between the second preset height and the third preset height, liquid can be replenished into the liquid tank 11 through the main solenoid valve 14 and the liquid replenishment regulating valve 13, and the opening of the liquid replenishment regulating valve 13 remains unchanged, so that the replenishment speed of the circulating fluid remains unchanged, so that the liquid level of the circulating fluid is maintained between the second preset height and the third preset height.

[0126] According to some embodiments, when the received liquid level signal meets the fifth preset condition, the control device controls the main solenoid valve 14 to open and controls the standby solenoid valve 15 to close.

[0127] The fifth preset condition includes the control device receiving the fourth high liquid level signal, the first high liquid level signal, the second high liquid level signal, the third high liquid level signal and the fifth low liquid level signal. That is, the liquid level of the circulating liquid in the liquid tank 11 is between the third preset height and the fifth preset height.

[0128] When the liquid level is between the third preset height and the fifth preset height, the liquid level of the circulating liquid in the liquid tank 11 is at a relatively high level, and the liquid replenishment speed needs to be reduced to prevent the circulating liquid in the liquid tank 11 from overflowing.

[0129] Therefore, when the liquid level is between the third preset height and the fifth preset height, the control device can control the main solenoid valve 14 to open and the backup solenoid valve 15 to close, while adjusting the opening of the liquid replenishment regulating valve 13 to reduce the liquid replenishment speed so that the liquid level of the circulating fluid will at least not rise any further.

[0130] According to the example embodiment, when the liquid level signal satisfies the fifth preset condition, the control device can specifically determine the current opening interval according to the current outlet flow value of the circulating liquid supply device 1, and determine the minimum opening value in the current opening interval as the current opening value. And the control device also adjusts the opening of the liquid replenishment regulating valve 13 to the current opening value.

[0131] Exemplarily, the control device can determine the outlet flow interval corresponding to the current outlet flow value according to the current outlet flow value. Then the control device determines the opening interval corresponding to the outlet flow interval according to the outlet flow interval. Then the control device can determine the lower limit value Lest of the current opening interval as the current opening value. And the control device also adjusts the opening of the liquid replenishment regulating valve 13 to the lower limit value Lest of the current opening interval.

[0132] Since when the opening of the liquid replenishment regulating valve 13 is the lower limit value Lest of the opening range, it can be satisfied that when the liquid supply flow rate of the external liquid supply system is the maximum and the current outlet flow rate value is the maximum value of the outlet flow rate range, the liquid level of the circulating liquid can be kept from moving up. Therefore, the control device sets the opening of the liquid replenishment regulating valve 13 to the lower limit value Lest of the opening range, so that no matter how the liquid supply flow rate of the external liquid supply system changes within the liquid supply flow rate range, and how the outlet flow rate changes within the outlet flow rate range, it can be ensured that the liquid level of the circulating liquid in the liquid tank 11 does not move up, and can even make the liquid level of the circulating liquid move down.

[0133] In the embodiment of the present application, when the control device receives a liquid level signal that meets the fifth preset condition, it can control the main solenoid valve 14 to open and the standby solenoid valve 15 to close. At the same time, according to the outlet flow value, the opening of the liquid replenishment regulating valve 13 is determined to adjust the opening of the liquid replenishment regulating valve 13 so that the liquid level of the circulating fluid in the liquid tank 11 at least does not move up, thereby reducing the probability of overflow due to excessive liquid level.

[0134] According to some embodiments, when the received liquid level signal meets the sixth preset condition, the control device controls the main solenoid valve 14 to close, controls the backup solenoid valve 15 to close, and controls the liquid replenishment regulating valve 13 to close, and the control device also outputs a high liquid level alarm signal.

[0135] According to an exemplary embodiment, the sixth preset condition includes the control device receiving the first high liquid level signal, the second high liquid level signal, the third high liquid level signal, the fourth high liquid level signal and the fifth high liquid level signal, that is, the liquid level of the circulating liquid in the liquid tank 11 is higher than the fifth preset height.

[0136] When the liquid level in the liquid tank 11 is higher than the fifth preset height, the circulating liquid in the liquid tank 11 is about to overflow, so the control device can control the main electromagnetic valve 14, the standby electromagnetic valve 15 and the liquid replenishment regulating valve 13 to close to stop replenishing the liquid into the liquid tank 11. The control device also outputs a high liquid level alarm signal to perform a high liquid level alarm to reduce the risk of circulating liquid overflow.

[0137] It should be clearly understood that the present application describes how to form and use specific examples, but the present application is not limited to any details of these examples. On the contrary, based on the teaching of the content disclosed in the present application, these principles can be applied to many other embodiments.

[0138] According to another aspect of the present application, an embodiment of the present application provides a temperature control system. Figure 1 and Figure 2 The temperature control system may specifically include the circulating liquid supply device 1 and the external system 2 described in the above embodiment.

[0139] The external system 2 includes a temperature regulating device 21, which is connected to the liquid outlet of the temperature control system to receive and regulate the temperature of the circulating liquid.

[0140] In the embodiment of the present application, the circulating liquid supply device 1 of the temperature control system automatically controls the flow rate of the circulating liquid flowing into the liquid tank 11 to replenish the liquid tank 11. In addition, the temperature regulating device 21 regulates the temperature of the circulating liquid drawn from the liquid tank 11, and the temperature-regulated circulating liquid can be output to the external liquid-using device, so that the external liquid-using device can use the temperature-regulated circulating liquid for temperature regulation.

[0141] The temperature control system of the present application can speed up the replenishment of the circulating liquid in the liquid tank 11 when the liquid level is low, and stop replenishing the liquid in time when the liquid level of the circulating liquid in the liquid tank 11 is high, so that the liquid level of the circulating liquid in the liquid tank 11 can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0142] According to some embodiments, the external system 2 may further include a liquid pump 22 , a pressure regulating device 23 , and a pressure detecting device 24 .

[0143] The liquid pump 22 includes an input end and an output end. The temperature control device 21 includes a temperature control input end and a temperature control output end. The input end of the liquid pump 22 is connected to the liquid outlet of the liquid tank 11 of the circulating liquid supply device 1, and the output end of the liquid pump 22 is connected to the temperature control input end of the temperature control device 21. The temperature control output end of the temperature control device 21 is used to connect to an external liquid device.

[0144] The liquid pump 22 draws the circulating liquid from the liquid tank 11 and outputs it to the temperature control device 21. The temperature control device 21 adjusts the temperature of the circulating liquid, and the temperature-controlled circulating liquid can be output to the external liquid device. The external liquid device can use the temperature-controlled circulating liquid to adjust the temperature and perform corresponding work.

[0145] According to some embodiments, the temperature adjustment device 21 may include a refrigerator 211 and a heater 212. The refrigerator 211 is used to reduce the temperature of the circulating fluid, and the heater 212 is used to increase the temperature of the circulating fluid.

[0146] Exemplarily, the circulating liquid may be water, and the liquid pump 22 may be a water pump. The circulating liquid may also be other cooling liquids such as oil, which will not be described in detail here.

[0147] According to the exemplary embodiment, one end of the pressure regulating device 23 is also connected to the temperature regulating output end of the temperature regulating device 21 , and the other end of the pressure regulating device 23 is connected to the liquid tank 11 of the circulating liquid supply device 1 .

[0148] Illustratively, a portion of the circulating liquid after temperature control by the temperature control device 21 flows into the external liquid device to be used by the external liquid device. The temperature-controlled circulating liquid that is not used by the external liquid device can be circulated through the pressure regulating device 23 and flow into the liquid tank 11 of the circulating liquid supply device 1, so that the circulating liquid that is not used by the external liquid system can continue to be used, thereby reducing waste.

[0149] For example, the pressure regulating device 23 may be a pressure regulating valve, and the flow rate of the circulating liquid flowing through the pressure regulating device 23 per unit time can be adjusted by adjusting the opening of the pressure regulating valve. The larger the opening, the greater the flow rate.

[0150] According to an exemplary embodiment, the pressure detection device 24 is disposed at the temperature control output end of the temperature control device 21 , and is used to detect the pressure of the circulating fluid at the temperature control output end to output system pressure data.

[0151] Exemplarily, the pressure detection device 24 may specifically include a pressure sensor.

[0152] According to some embodiments, the pressure detection device 24 may further include a temperature sensor to measure the temperature of the circulating fluid at the temperature adjustment output end to output circulating fluid temperature data, which is not limited here.

[0153] According to some embodiments, the pressure detection device 24 may further include a flow sensor to measure the flow rate of the circulating fluid output from the temperature adjustment output end to the external fluid-using device.

[0154] According to the exemplary embodiment, the control device is also electrically connected to the pressure detection device 24, the pressure regulating device 23 and the liquid pump 22, respectively, so as to regulate the opening of the pressure regulating device 23 and the operating frequency of the liquid pump 22 according to the system pressure data measured by the pressure detection device 24, thereby adjusting the pressure of the circulating fluid in the temperature control system.

[0155] Exemplarily, when the pressure of the circulating fluid in the current temperature control system is greater than a first preset pressure upper limit value and lower than a second preset pressure upper limit value (where the second preset pressure upper limit value is greater than the first preset pressure upper limit value), the control device may increase the opening of the pressure regulating valve to speed up the circulation of the circulating fluid, thereby alleviating the pressure of the circulating fluid in the temperature control system.

[0156] When the pressure of the circulating fluid in the current temperature control system is greater than the second preset pressure upper limit value, the control device controls the opening of the pressure regulating valve to become larger, and at the same time, controls the frequency of the liquid pump 22 to reduce the operating frequency of the liquid pump 22 by reducing the first preset frequency value per second, so as to increase the relief of the pressure of the circulating fluid in the temperature control system by controlling the opening of the pressure regulating valve and the frequency of the liquid pump 22 at the same time.

[0157] When the pressure of the circulating fluid in the current temperature control system is less than the first preset pressure lower limit value and greater than the second preset pressure lower limit value (the second preset pressure lower limit value is less than the first preset pressure lower limit value is less than the first preset pressure upper limit value is less than the second preset pressure upper limit value), the control device can reduce the opening of the pressure regulating valve to reduce the circulation speed of the circulating fluid, and then appropriately increase the pressure of the circulating fluid in the temperature control system.

[0158] When the pressure of the circulating fluid in the current temperature control system is less than the second preset pressure lower limit, the control device controls the opening of the pressure regulating valve to become smaller, and at the same time, controls the operating frequency of the liquid pump 22 to increase the operating frequency of the liquid pump 22 by increasing the second preset frequency value per second, so as to appropriately increase the pressure of the circulating fluid in the temperature control system by simultaneously controlling the opening of the pressure regulating valve and the frequency of the liquid pump 22.

[0159] When the pressure of the circulating fluid in the current temperature control system is between the second preset pressure upper limit and the second preset pressure lower limit, the control device controls the working frequency of the liquid pump 22 to adjust the working frequency of the liquid pump 22 by changing the third preset frequency value per second until the working frequency of the liquid pump 22 changes to the preset working frequency, so that the liquid pump 22 can work normally when the pressure of the circulating fluid is normal.

[0160] Furthermore, the first preset frequency value is greater than the third preset frequency value. The second preset frequency value is greater than the third preset frequency value. In the case of abnormal pressure, the frequency of the liquid pump 22 is adjusted quickly to quickly relieve the system pressure. In the case of normal pressure, the frequency of the liquid pump 22 is adjusted slowly to prevent the pressure of the circulating fluid of the system from becoming abnormal again due to a sudden change in the frequency of the liquid pump 22.

[0161] According to another aspect of the present application, an embodiment of the present application provides an integrated circuit process system. The integrated circuit process system may specifically include the temperature control system described in the above embodiment, and also include semiconductor process equipment.

[0162] The semiconductor process equipment is communicated with the temperature regulating device of the temperature control system to receive the temperature-regulated circulating fluid to carry out semiconductor process manufacturing.

[0163] The temperature control system of the semiconductor process equipment of the present application can speed up the replenishment of the circulating liquid in the liquid tank when the liquid level is low, and stop replenishing the liquid in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0164] According to another aspect of the present application, an embodiment of the present application provides a liquid level control method for a circulating liquid supply device, and the liquid level control method is applied to the circulating liquid supply device described in the above embodiment. The liquid level control method can be specifically executed by the control device in the above circulating liquid supply device, and the liquid level control method can specifically include controlling the opening and closing states of the liquid replenishment regulating valve and the main circuit solenoid valve according to the liquid level signal to adjust the liquid level height in the liquid tank.

[0165] The specific implementation details of the liquid level control method can be referred to the above embodiment and will not be elaborated here.

[0166] Finally, it should be noted that the above are only preferred embodiments of the present application and are not intended to limit the present application. Although the present application is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions of the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A circulating liquid supply device used in a temperature control system, characterized in that: The circulating liquid supply device comprises: A liquid tank is provided with a first liquid inlet and a liquid outlet for containing circulating liquid, wherein the liquid outlet is connected to an external system to discharge the circulating liquid from the liquid tank to the external system; At least two liquid level detectors are sequentially arranged in the liquid tank according to different preset heights, detect the liquid level of the circulating liquid in the liquid tank, and output a liquid level signal; a liquid replenishment regulating valve, arranged outside the liquid tank, one end of which is in communication with the first liquid inlet; A main solenoid valve is arranged outside the liquid tank, one end of the main solenoid valve is communicated with the other end of the liquid replenishment regulating valve, and the other end of the main solenoid valve is communicated with an external liquid supply system to receive the circulating liquid transported by the external liquid supply system; The control device is electrically connected to the at least two liquid level detectors, the liquid replenishment regulating valve and the main electromagnetic valve, and controls the opening and closing states of the liquid replenishment regulating valve and the main electromagnetic valve according to the liquid level signal to adjust the liquid level of the liquid tank.

2. The circulating liquid supply device according to claim 1, characterized in that: The liquid tank is also provided with a second liquid inlet, and the circulating liquid supply device further comprises: A standby solenoid valve is arranged outside the liquid tank, one end of the standby solenoid valve is communicated with the second liquid inlet, and the other end of the standby solenoid valve is communicated with one end of the main solenoid valve; The control device is also electrically connected to the backup solenoid valve, and controls the opening and closing states of the liquid replenishment regulating valve, the main solenoid valve and the backup solenoid valve according to the liquid level signals output by the at least two liquid level detectors to adjust the liquid level of the liquid tank.

3. The circulating liquid supply device according to claim 2, characterized in that: The at least two liquid level detectors include: a first liquid level detector, located at a first preset height of the liquid tank, wherein when the liquid level of the circulating liquid is higher than the first preset height, the first liquid level detector generates a first high liquid level signal, and when the liquid level of the circulating liquid is lower than the first preset height, the first liquid level detector generates a first low liquid level signal; a second liquid level detector, located at a second preset height of the liquid tank, wherein when the liquid level of the circulating liquid is higher than the second preset height, the second liquid level detector generates a second high liquid level signal, and when the liquid level of the circulating liquid is lower than the second preset height, the second liquid level detector generates a second low liquid level signal; a third liquid level detector, located at a third preset height of the liquid tank, wherein when the liquid level of the circulating liquid is higher than the third preset height, the third liquid level detector generates a third high liquid level signal, and when the liquid level of the circulating liquid is lower than the third preset height, the third detector generates a third low liquid level signal; The control device controls the opening and closing states of the liquid replenishment regulating valve, the main circuit solenoid valve and the standby solenoid valve according to the liquid level signals generated by the first liquid level detector, the second liquid level detector and the third liquid level detector, so as to adjust the liquid level of the circulating liquid in the liquid tank; Wherein, the first preset height is lower than the second preset height and lower than the third preset height.

4. The circulating liquid supply device according to claim 3, characterized in that: The at least two liquid level detectors also include: a fourth liquid level detector, located at a fourth preset height of the liquid tank, wherein when the liquid level of the circulating liquid is higher than the fourth preset height, the fourth liquid level detector generates a fourth high liquid level signal, and when the liquid level of the circulating liquid is lower than the fourth preset height, the fourth liquid level detector generates a fourth low liquid level signal; a fifth liquid level detector located at a fifth preset height of the liquid tank, wherein when the liquid level of the circulating liquid is higher than the fifth preset height, the fifth liquid level detector generates a fifth high liquid level signal, and when the liquid level of the circulating liquid is lower than the fifth preset height, the fifth liquid level detector generates a fifth low liquid level signal; The control device controls the opening and closing states of the liquid replenishment regulating valve, the main circuit solenoid valve and the standby solenoid valve according to the received liquid level signals generated by the first liquid level detector, the second liquid level detector, the third liquid level detector, the fourth liquid level detector and the fifth liquid level detector, so as to adjust the liquid level of the circulating liquid in the liquid tank; Among them, the fourth preset height is lower than the first preset height, lower than the second preset height, lower than the third preset height, and lower than the fifth preset height.

5. The circulating liquid supply device according to claim 4, characterized in that: When the received liquid level signal meets the first preset condition, the control device controls the main solenoid valve, the standby solenoid valve and the liquid replenishment regulating valve to close, and the control device outputs a shutdown alarm instruction; Wherein, the first preset condition includes: The control device receives the first low liquid level signal, the second low liquid level signal, the third low liquid level signal, the fourth low liquid level signal, and the fifth low liquid level signal.

6. The circulating liquid supply device according to claim 4, characterized in that: When the received liquid level signal meets the second preset condition, the control device controls the main solenoid valve and the standby solenoid valve to open, and controls the opening of the liquid replenishment regulating valve to be a preset maximum opening; Wherein, the second preset condition includes: The control device receives the fourth high liquid level signal, the first low liquid level signal, the second low liquid level signal, the third low liquid level signal, and the fifth low liquid level signal.

7. The circulating liquid supply device according to claim 4, characterized in that: When the received liquid level signal meets the third preset condition, the control device controls the main circuit solenoid valve to open; The control device determines the current opening range according to the outlet flow value of the circulating liquid supply device; The control device determines the maximum opening value in the current opening interval as the current opening value; The control device controls the opening of the liquid replenishment regulating valve to be the current opening value; When the received liquid level signal meets the third preset condition, the control device determines whether the duration reaches a preset duration, wherein the duration is the duration for which the control device receives the first high liquid level signal; When the duration reaches a preset duration, the control device controls the standby solenoid valve to close; The control device controls the standby solenoid valve to open when the duration does not reach the preset duration; Wherein, the third preset condition includes: The control device receives the fourth high liquid level signal, the first high liquid level signal, the second low liquid level signal, the third low liquid level signal, and the fifth low liquid level signal.

8. The circulating liquid supply device according to claim 2, characterized in that: When the received liquid level signal meets the fourth preset condition, the control device controls the main regulating valve to open, controls the standby solenoid valve to close, and controls the opening of the liquid replenishing regulating valve to remain unchanged; Wherein, the fourth preset condition includes: The control device receives the fourth high liquid level signal, the first high liquid level signal, the second high liquid level signal, the third low liquid level signal, and the fifth low liquid level signal.

9. The circulating liquid supply device according to claim 4, characterized in that: When the received liquid level signal meets the fifth preset condition, the control device controls the main solenoid valve to open and controls the standby solenoid valve to close; The control device determines a current opening range according to a current outlet flow value of the circulating liquid supply device; The control device determines the minimum opening value in the current opening interval as the current opening value; The control device adjusts the opening of the liquid replenishment regulating valve to the current opening value; Wherein, the fifth preset condition includes: The control device receives the fourth high liquid level signal, the first high liquid level signal, the second high liquid level signal, the third high liquid level signal, and the fifth low liquid level signal.

10. The circulating liquid supply device according to claim 4, characterized in that: When the received liquid level signal meets the sixth preset condition, the control device controls the main solenoid valve to close, controls the standby solenoid valve to close, and controls the liquid replenishment regulating valve to close, and the control device outputs a high liquid level alarm signal; Wherein, the sixth preset condition includes: The control device receives the first high liquid level signal, the second high liquid level signal, the third high liquid level signal, the fourth high liquid level signal, and the fifth high liquid level signal.

11. A temperature control system, characterized in that: The temperature control system comprises a circulating liquid supply device as claimed in any one of claims 1 to 10 and an external system, wherein the external system comprises: The temperature regulating device is connected to the liquid outlet of the temperature control system and receives and regulates the temperature of the circulating liquid.

12. An integrated circuit process system, characterized in that: The integrated circuit process system comprises: The temperature control system and semiconductor process equipment according to claim 11; The semiconductor process equipment is communicated with the temperature control device of the temperature control system to receive the temperature-controlled circulating fluid to perform semiconductor process manufacturing.

13. A method for controlling the liquid level of a circulating liquid supply device, characterized in that: The liquid level control method is applied to the circulating liquid supply device as described in any one of claims 1 to 10, The liquid level control method comprises: According to the liquid level signal, the opening and closing states of the liquid replenishment regulating valve and the main solenoid valve are controlled to adjust the liquid level height in the liquid tank.

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