Temperature control system and temperature control method

Abstract

The embodiment of the invention provides a temperature control system and a temperature control method, and relates to the technical field of semiconductor temperature control. The temperature control system comprises a refrigerating system and a circulating system, the refrigerating system comprises a refrigerating main path, a first branch path and a second branch path, the circulating system comprises a first circulating loop and a second circulating loop, the refrigerating main path comprises a compressor, a first condenser and a liquid storage separator which are sequentially connected, and the liquid storage separator comprises a gas outlet and a first liquid outlet; the first branch is connected to an inlet and a gas outlet of the compressor, the second branch is connected to the inlet and a first liquid outlet of the compressor, the first branch exchanges heat with the first circulation loop through the second evaporator, and the second branch exchanges heat with the second circulation loop through the first evaporator; the liquid storage separator further comprises a second liquid outlet, and a refrigerant flowing out of the second liquid outlet selectively exchanges heat with the first branch through the first heat exchanger or exchanges heat with the first circulation loop through the second evaporator. And circulating liquid with lower temperature and multiple adjustable temperature zones can be provided for a load end.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor temperature control technology, and in particular to a temperature control system and a temperature control method. Background Art

[0002] In the field of semiconductor temperature control, especially in the chip manufacturing process, the requirements for temperature stability are extremely strict. In order to meet the different temperature requirements of different process stages, it is usually necessary to transport a circulating fluid with a specific temperature to the load end for effective temperature control.

[0003] First, it is very difficult for the temperature control system to provide a lower liquid supply temperature (such as -60°C), and most existing equipment can only achieve a liquid supply temperature above -30°C; second, most temperature control systems can only work at a specific temperature point and cannot provide circulating fluids of multiple temperatures at the same time; finally, when equipped with only one compressor, it is difficult to achieve free switching of the system working mode. Summary of the invention

[0004] The purpose of the present invention includes providing a temperature control system and a temperature control method, which can provide a circulating fluid with a lower temperature for the load end, and can provide circulating fluids with multiple temperatures in a refrigeration system, allowing the system to switch freely between different working modes.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a temperature control system, comprising a refrigeration system and a circulation system, the refrigeration system comprising a refrigeration main circuit, a first branch and a second branch, the circulation system comprising a first circulation loop and a second circulation loop, the refrigeration main circuit comprising a compressor, a first condenser and a liquid storage separator connected in sequence, the liquid storage separator comprising a gas outlet and a first liquid outlet, the two ends of the first branch are respectively connected to the inlet of the compressor and the gas outlet, the two ends of the second branch are respectively connected to the inlet of the compressor and the first liquid outlet, the first branch exchanges heat with the first circulation loop through the second evaporator, and the second branch exchanges heat with the second circulation loop through the first evaporator; the liquid storage separator also includes a second liquid outlet, and the refrigerant flowing out of the second liquid outlet can selectively exchange heat with the first branch through the first heat exchanger, or with the first circulation loop through the second evaporator.

[0007] In other optional embodiments, the refrigeration system further includes a first expansion valve, a three-way valve, and a second expansion valve;

[0008] On the refrigeration main circuit, the outlet of the compressor is communicated with the first side inlet of the first condenser, the liquid storage separator further includes a liquid storage inlet, and the first side outlet of the first condenser is communicated with the liquid storage inlet;

[0009] On the first branch, the gas outlet is communicated with the first side inlet of the first heat exchanger, the first side outlet of the first heat exchanger is communicated with the inlet of the second expansion valve, the outlet of the second expansion valve is communicated with the first side inlet of the second evaporator, and the first side outlet of the second evaporator is communicated with the inlet of the compressor;

[0010] On the second branch, the first liquid outlet is communicated with the inlet of the first expansion valve, the outlet of the first expansion valve is communicated with the first side inlet of the first evaporator, and the first side outlet of the first evaporator is communicated with the inlet of the compressor;

[0011] The three-way valve includes a first inlet, a first outlet, and a second outlet. The second liquid outlet is connected to the first inlet, the first outlet is connected to the first side inlet of the second evaporator, and the first side outlet of the second evaporator is connected to the inlet of the compressor; the second outlet is connected to the second side inlet of the first heat exchanger, and the second side outlet of the first heat exchanger is connected to the inlet of the compressor.

[0012] In other optional embodiments, the first circulation loop includes a first expansion tank, a first circulation pump, a first heater and a first load, the outlet of the first expansion tank is communicated with the inlet of the first circulation pump, the outlet of the first circulation pump is communicated with the inlet of the first heater, the outlet of the first heater is communicated with the inlet of the first load, the outlet of the first load is communicated with the second side inlet of the second evaporator, and the second side outlet of the second evaporator is communicated with the inlet of the first expansion tank;

[0013] The second circulation loop includes a second expansion tank, a second circulation pump, a second heater, and a second load, wherein the outlet of the second expansion tank is connected to the inlet of the second circulation pump, the outlet of the second circulation pump is connected to the inlet of the second heater, the outlet of the second heater is connected to the inlet of the second load, the outlet of the second load is connected to the second side inlet of the first evaporator, and the second side outlet of the first evaporator is connected to the inlet of the second expansion tank.

[0014] A third temperature sensor is arranged between the first circulation pump and the first heater; and a fourth temperature sensor is arranged between the second circulation pump and the second heater.

[0015] In a second aspect, the present invention provides a temperature control method, which is applied to the temperature control system described in the above embodiment, wherein a third temperature sensor is provided on the first circulation loop, and a fourth temperature sensor is provided on the second circulation loop, and the method comprises:

[0016] Acquire a third temperature setting value of the third temperature sensor as SV0;

[0017] Acquire a third temperature measurement value PV0 of the third temperature sensor in real time;

[0018] Calculate the difference X between the third temperature setting value SV0 and the third temperature measurement value PV0, X=SV0-PV0;

[0019] If a≤X<a+A, the opening of the second expansion valve increases by M%;

[0020] If a+A≤X<a+B, the opening of the second expansion valve increases by N%;

[0021] If a+B≤X≤bB, the opening of the second expansion valve remains unchanged;

[0022] If bB<X≤bA, the opening of the second expansion valve is reduced by N%;

[0023] If bA<X≤b, the opening of the second expansion valve is reduced by M%;

[0024] If X<a, the opening of the second expansion valve increases by L%;

[0025] If X>b, the opening of the second expansion valve is reduced by L%; wherein a<0<A<B<b;

[0026] The method further comprises:

[0027] Acquire the fourth temperature setting value of the fourth temperature sensor as SV2;

[0028] Acquire a fourth temperature measurement value PV4 of the fourth temperature sensor in real time;

[0029] Calculate the difference R between the fourth temperature setting value SV2 and the fourth temperature measurement value PV4, R=SV2-PV4;

[0030] If e≤R<e+E, the opening of the first expansion valve increases by P%;

[0031] If e+E≤R<e+F, the opening of the first expansion valve increases by Q%;

[0032] If e+F≤R≤fF, the opening of the first expansion valve remains unchanged;

[0033] If fF<R≤fE, the opening of the first expansion valve is reduced by Q%;

[0034] If fE<R≤f, the opening of the first expansion valve is reduced by P%;

[0035] If R<e, the opening of the first expansion valve increases by W%;

[0036] If R>f, the opening of the first expansion valve is reduced by W%; wherein, e<0<E<F<f.

[0037] The beneficial effects of the temperature control system and method provided by the embodiments of the present invention include:

[0038] The temperature control system of the present invention exchanges heat with the first circulation loop and the second circulation loop respectively by setting the first branch and the second branch in the refrigeration system. By setting the liquid storage separator, the refrigerants with different temperatures flow through the first branch and the second branch respectively. The liquid storage separator is also provided with a second liquid outlet, and the refrigerant flowing out of the second liquid outlet selectively exchanges heat with the first branch to further reduce the temperature of the refrigerant in the first branch; or exchanges heat with the first circulation loop. The temperature control system of the present invention can provide a circulating liquid with a lower temperature for the load end, and can provide circulating liquids of various temperatures in the case of a set of refrigeration systems, allowing the system to switch freely between different working modes. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 This is a schematic diagram of the structure of the temperature control system provided in this embodiment from a first perspective.

[0041] Icons: 100-temperature control system; 10-refrigeration system; 11-compressor; 111-first temperature sensor; 112-first pressure sensor; 113-seventh temperature sensor; 114-second pressure sensor; 12-first condenser; 13-liquid storage separator; 131-liquid storage inlet; 132-gas outlet; 133-first liquid outlet; 134-second liquid outlet; 135-eighth temperature sensor; 14-first expansion valve; 15-first evaporator; 16-three-way valve; 161-first inlet; 162-first outlet; 163-second Second outlet; 17-second expansion valve; 18-second evaporator; 19-first heat exchanger; 20-circulation system; 21-first circulation loop; 211-first expansion tank; 212-first circulation pump; 213-first heater; 214-third temperature sensor; 215-fifth temperature sensor; 216-first load; 22-second circulation loop; 221-second expansion tank; 222-second circulation pump; 223-second heater; 224-fourth temperature sensor; 225-sixth temperature sensor; 226-second load; 30-cooling water system. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0043] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0045] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0046] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0047] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0048] Please refer to Figure 1 , the temperature control system 100 provided in the embodiment of the present invention includes a refrigeration system 10 and a circulation system 20. The refrigeration system 10 includes a refrigeration main circuit, a first branch circuit and a second branch circuit. The circulation system 20 includes a first circulation loop 21 and a second circulation loop 22. The refrigeration main circuit includes a compressor 11, a first condenser 12 and a liquid storage separator 13 connected in sequence. The liquid storage separator 13 includes a gas outlet 132 and a first liquid outlet 133. The two ends of the first branch circuit are respectively connected to the inlet of the compressor 11 and the gas outlet 132. The two ends of the second branch circuit are respectively connected to the inlet of the compressor 11 and the first liquid outlet 133. The first branch circuit exchanges heat with the first circulation loop 21 through the second evaporator 18. The second branch circuit exchanges heat with the second circulation loop 22 through the first evaporator 15. The liquid storage separator 13 also includes a second liquid outlet 134. The refrigerant flowing out of the second liquid outlet 134 can selectively exchange heat with the first branch circuit through the first heat exchanger 19, or exchange heat with the first circulation loop 21 through the second evaporator 18.

[0049] It can be understood that by setting the first branch and the second branch in the refrigeration system 10, heat exchange is performed with the first circulation loop 21 and the second circulation loop 22 respectively. By setting the liquid storage separator 13, refrigerants with different temperatures flow through the first branch and the second branch respectively. Among them, the liquid storage separator 13 is also provided with a second liquid outlet 134, and the refrigerant flowing out of the second liquid outlet 134 selectively exchanges heat with the first branch to further reduce the temperature of the refrigerant in the first branch; or exchanges heat with the first circulation loop 21.

[0050] Specifically, the refrigeration system 10 further includes a first expansion valve 14 , a first evaporator 15 , a three-way valve 16 and a second expansion valve 17 .

[0051] In the refrigeration main circuit, the outlet of the compressor 11 is communicated with the first side inlet of the first condenser 12. The liquid storage separator 13 further includes a liquid storage inlet 131. The first side outlet of the first condenser 12 is communicated with the liquid storage inlet 131.

[0052] On the first branch, the gas outlet 132 is communicated with the first side inlet of the first heat exchanger 19. The first side outlet of the first heat exchanger 19 is communicated with the inlet of the second expansion valve 17. The outlet of the second expansion valve 17 is communicated with the first side inlet of the second evaporator 18. The first side outlet of the second evaporator 18 is communicated with the inlet of the compressor 11.

[0053] On the second branch, the first liquid outlet 133 is communicated with the inlet of the first expansion valve 14 . The outlet of the first expansion valve 14 is communicated with the first side inlet of the first evaporator 15 . The first side outlet of the first evaporator 15 is communicated with the inlet of the compressor 11 .

[0054] It is understood that refrigerant circulates in the refrigeration system 10. After the refrigerant is pressurized by the compressor 11, the high-temperature and high-pressure gas refrigerant enters the first condenser 12 for condensation. In this embodiment, a liquid storage separator 13 is provided, which can store liquid and separate gas and liquid. The refrigerant in this embodiment is a high-low boiling point mixed refrigerant. When passing through the first condenser 12, the high-boiling point refrigerant is condensed from gas to liquid. The low-boiling point refrigerant is not condensed and remains in gas. The high and low boiling point refrigerants are separated in the liquid storage separator 13, wherein the high-boiling point refrigerant liquid passes through the first liquid outlet 133 and then passes through the first expansion valve 14 into the first evaporator 15 to evaporate and absorb heat, and the high-boiling point refrigerant becomes gas and returns to the inlet of the compressor 11. The low-boiling point refrigerant gas enters the first side of the first heat exchanger 19 for heat exchange, and then passes through the second expansion valve 17 to enter the second evaporator 18 to absorb heat in the evaporator, and then returns to the inlet of the compressor 11.

[0055] Further, in this embodiment, the three-way valve 16 includes a first inlet 161, a first outlet 162 and a second outlet 163. The second liquid outlet 134 of the liquid storage separator 13 is connected to the first inlet 161. The first outlet 162 is connected to the first side inlet of the second evaporator 18. The first side outlet of the second evaporator 18 is connected to the inlet of the compressor 11.

[0056] It is understandable that the three-way valve 16 can selectively connect the first inlet 161 and the first outlet 162 or the first inlet 161 and the second outlet 163. When the first inlet 161 and the first outlet 162 are connected, the high-boiling-point refrigerant liquid in the liquid storage separator 13 is discharged from the second liquid outlet 134, enters the second evaporator 18 through the first inlet 161 and the first outlet 162 of the three-way valve 16, evaporates and absorbs heat, and then becomes refrigerant gas and returns to the inlet of the compressor 11.

[0057] Furthermore, the second outlet 163 is communicated with the second side inlet of the first heat exchanger 19. The second side outlet of the first heat exchanger 19 is communicated with the inlet of the compressor 11.

[0058] It can be understood that when the first inlet 161 and the second outlet 163 are connected, the high boiling point refrigerant in the liquid storage separator 13 is discharged from the second liquid outlet 134, and is discharged from the second outlet 163 after throttling and reducing the pressure by the three-way valve 16, forming a low-temperature and low-pressure refrigerant liquid and entering the second side of the first heat exchanger 19. At the same time, the low boiling point refrigerant gas enters the first side of the first heat exchanger 19. After the low boiling point refrigerant gas exchanges heat with the low-temperature and low-pressure refrigerant liquid, the low boiling point refrigerant gas temperature is reduced and enters the second evaporator 18 for heat exchange, and then returns to the inlet of the compressor 11. In this embodiment, the low boiling point refrigerant is cooled by the first condenser 12 and the first heat exchanger 19 in turn, and then throttled and reduced in pressure by the second expansion valve 17, so that the evaporation temperature of the second evaporator 18 can be as low as -70°C, which can provide a circulating liquid with a lower temperature for the load end.

[0059] Specifically, the conduction condition of the three-way valve 16 can be selected according to the temperature of the circulating fluid. When the required temperature of the circulating fluid is low, the first inlet 161 and the second outlet 163 are selected to be connected. When the required temperature of the circulating fluid is high, the first inlet 161 and the first outlet 162 are selected to be connected. This embodiment can freely switch the refrigeration mode between different working conditions by adjusting the three-way valve 16.

[0060] By providing the first evaporator 15 and the second evaporator 18 and the corresponding refrigerant pipelines, the temperature of loads in different working states can be controlled simultaneously, so that the temperatures of the circulating fluids reaching different loads are different, the temperature control accuracy is improved, and the response speed is faster.

[0061] In addition, a first temperature sensor 111 and a first pressure sensor 112 are provided at the inlet of the compressor 11. The first temperature sensor 111 is convenient for detecting the temperature of the refrigerant circulating in the compressor 11. The first pressure sensor 112 can detect the pressure of the refrigerant entering the compressor 11. According to the physical properties of the refrigerant, the temperature value corresponding to the saturated state under the pressure can be checked, and the temperature value corresponding to the saturated state can be compared with the actual measured value of the first temperature sensor 111, so as to ensure that the compressor 11 can still work normally, thereby ensuring the accuracy of temperature control.

[0062] In this embodiment, the first condenser 12 is a plate condenser, and the first evaporator 15 and the second evaporator 18 are both plate evaporators. Of course, they can also be replaced with other types of condensers and evaporators, such as vertical or horizontal shell and tube condensers or evaporators, according to actual use requirements and cost issues, etc., which are not limited here.

[0063] In this embodiment, the temperature control system 100 further includes a cooling water system 30 . The cooling water system 30 is in communication with the second side of the first condenser 12 .

[0064] The circulation system 20 includes a first circulation loop 21 and a second circulation loop 22 .

[0065] Specifically, the first circulation loop 21 includes a first expansion tank 211, a first circulation pump 212, a first heater 213 and a first load 216. The outlet of the first expansion tank 211 is communicated with the inlet of the first circulation pump 212. The outlet of the first circulation pump 212 is communicated with the inlet of the first heater 213. The outlet of the first heater 213 is communicated with the inlet of the first load 216. The outlet of the first load 216 is communicated with the second side inlet of the second evaporator 18. The second side outlet of the second evaporator 18 is communicated with the inlet of the first expansion tank 211.

[0066] Further, the second circulation loop 22 includes a second expansion tank 221, a second circulation pump 222, a second heater 223 and a second load 226. The outlet of the second expansion tank 221 is communicated with the inlet of the second circulation pump 222. The outlet of the second circulation pump 222 is communicated with the inlet of the second heater 223. The outlet of the second heater 223 is communicated with the inlet of the second load 226. The outlet of the second load 226 is communicated with the second side inlet of the first evaporator 15. The second side outlet of the first evaporator 15 is communicated with the inlet of the second expansion tank 221.

[0067] Furthermore, a third temperature sensor 214 is provided between the first circulation pump 212 and the first heater 213. A fourth temperature sensor 224 is provided between the second circulation pump 222 and the second heater 223.

[0068] It is understandable that circulating fluid flows in the circulation system 20. In the first circulation loop 21, the circulating fluid passes through the second evaporator 18 for heat exchange and cooling, enters the first expansion tank 211 for storage, and then enters the first circulation pump 212 for pressurization. The pressurized circulating fluid passes through the first heater 213 in turn and is heated to the target temperature of the first load 216, then enters the first load 216, exchanges heat with the first load 216, and the first load 216 cools down. The heated circulating fluid flows back to the second evaporator 18 for cooling again.

[0069] It can be understood that in the second circulation loop 22, the circulating liquid passes through the first evaporator 15 for heat exchange and cooling, then enters the second expansion tank 221 for storage, and then enters the second circulation pump 222 for pressurization. The pressurized circulating liquid passes through the second heater 223 in turn and is heated to the target temperature of the second load 226, then enters the second load 226, exchanges heat with the second load 226, and the second load 226 is cooled. The heated circulating liquid flows back to the first evaporator 15 for cooling again.

[0070] By setting up the circulation system 20, the target temperature required by the load end can be controlled and maintained. The third temperature sensor 214 and the fourth temperature sensor 224 are set to facilitate the detection of the temperature of the circulating liquid passing through the first evaporator 15 and the second evaporator 18, so as to facilitate the refrigerant temperature of the refrigeration system 10, thereby adjusting the temperature of the circulating liquid to meet the load demand.

[0071] Further, a fifth temperature sensor 215 is provided between the first heater 213 and the first load 216. A sixth temperature sensor 225 is provided between the second heater 223 and the second load 226. It is understood that the fifth temperature sensor 215 detects the actual temperature of the circulating fluid reaching the first load 216, and by comparing it with the preset temperature value of the first load 216, it is convenient to adjust the power of the first heater 213 so that the temperature of the circulating fluid reaching the first load 216 approaches the preset temperature value of the first load 216. The sixth temperature sensor 225 detects the actual temperature of the circulating fluid reaching the second load 226, and by comparing it with the preset temperature value of the second load 226, it is convenient to adjust the power of the second heater 223 so that the temperature of the circulating fluid reaching the second load 226 approaches the preset temperature value of the second load 226.

[0072] In this embodiment, the outlet of the compressor 11 is further provided with a seventh temperature sensor 113 and a second pressure sensor 114. It is understandable that the seventh temperature sensor 113 is used to detect the temperature of the refrigerant discharged from the compressor 11. The second pressure sensor 114 is used to detect the pressure of the refrigerant discharged from the compressor 11, thereby detecting the working state of the compressor 11.

[0073] Furthermore, an eighth temperature sensor 135 is provided at the gas outlet 132. It is understandable that the eighth temperature sensor 135 is used to detect the temperature of the low boiling point refrigerant gas, so as to adjust the opening of the second expansion valve 17 and the three-way valve 16, thereby adjusting the temperature of the refrigerant.

[0074] It is understandable that in this embodiment, temperature monitoring is performed at multiple locations in the temperature control system 100 to adjust the temperature and improve the temperature control accuracy. In addition to the above-mentioned temperature sensor setting positions, one or more temperature sensors or pressure sensors can also be set at other locations, depending on actual needs, and are not limited here.

[0075] In order to adjust quickly and stably, the expansion valves in this embodiment are all electronic expansion valves. The electronic expansion valves have a large adjustment range, quick and sensitive action, accurate adjustment, stable and reliable performance, and high temperature control accuracy. In addition, the electronic expansion valves also have the advantages of energy saving and consumption reduction.

[0076] Below Figure 1Taking the temperature control system 100 shown as an example, the temperature control method provided by the embodiment of the present invention is exemplarily introduced. Specifically, the temperature control method includes:

[0077] Acquire the third temperature setting value of the third temperature sensor 214 as SV0;

[0078] The value range of SV0 is -80°C to +200°C. The specific value of SV0 is determined according to actual processing requirements and is not limited here.

[0079] Acquire the third temperature measurement value PV0 of the third temperature sensor 214 in real time;

[0080] PV0 is a dynamically changing value that changes with time and the first load 216 .

[0081] Calculate the difference X between the third temperature setting value SV0 and the third temperature measurement value PV0, that is, X=SV0-PV0;

[0082] If a≤X<a+A, the opening of the second expansion valve 17 increases by M%;

[0083] If a+A≤X<a+B, the opening of the second expansion valve 17 increases by N%;

[0084] If a+B≤X≤bB, the opening degree of the second expansion valve 17 remains unchanged;

[0085] If bB<X≤bA, the opening degree of the second expansion valve 17 is reduced by N%;

[0086] If bA<X≤b, the opening degree of the second expansion valve 17 is reduced by M%;

[0087] If X<a, the opening of the second expansion valve 17 increases by L%;

[0088] If X>b, the opening degree of the second expansion valve 17 is reduced by L%; wherein, a<0<A<B<b.

[0089] Specifically, in this embodiment, a=-1, b=1, A=0.5, B=0.9, M=2, N=1, L=5, namely:

[0090] If -1≤X<-0.5, the opening of the second expansion valve 17 increases by 2%;

[0091] If -0.5≤X<-0.1, the opening of the second expansion valve 17 increases by 1%;

[0092] If -0.1≤X≤0.1, the opening degree of the second expansion valve 17 remains unchanged;

[0093] If 0.1<X<0.5, the opening degree of the second expansion valve 17 is reduced by 1%;

[0094] If 0.5<X≤1, the opening of the second expansion valve 17 is reduced by 2%;

[0095] If X<-1, the opening of the second expansion valve 17 increases by 5%;

[0096] If X>1, the opening degree of the second expansion valve 17 is reduced by 5%.

[0097] Through step-by-step adjustment, we can save energy and reduce consumption, and also improve the accuracy of temperature control.

[0098] It can be understood that X is the difference between the set temperature value and the measured temperature value. When X is greater than the preset range, for example, when X is greater than 0.1, it means that the actual temperature value is low. At this time, by adjusting the opening of the second expansion valve 17, the opening of the second expansion valve 17 is reduced, the cooling capacity is reduced, and the measured temperature value is increased, so that the value of X is reduced; when X is less than 0.1, it means that the actual temperature value is high. At this time, by adjusting the opening of the second expansion valve 17, the opening of the second expansion valve 17 is increased, so that the measured temperature value is reduced, so that the value of X is increased, and finally the value of X is stabilized between ±0.1.

[0099] Furthermore, the present invention controls the opening of the second expansion valve 17 to be different by setting different ranges. When X deviates more from the preset range, ie ±0.1, the opening adjustment value of the second expansion valve 17 is larger.

[0100] It should be noted that the opening adjustment value of the second expansion valve 17 refers to the value of each adjustment of the second expansion valve 17. In this embodiment, the opening of the second expansion valve 17 is gradually adjusted, for example, once after a certain period of time, specifically once every 1 second.

[0101] Of course, the above values ​​may also be set to other values, which can be determined according to needs and system circuits and are not limited here.

[0102] It can be understood that by comparing the actual temperature of the circulating fluid with the preset temperature, the opening of the second expansion valve 17 is adjusted so that the temperature of the circulating fluid is maintained within a certain range of the preset temperature, thereby achieving precise temperature control.

[0103] The temperature control method in this embodiment also includes:

[0104] Acquire the fourth temperature setting value of the fourth temperature sensor 224 as SV2;

[0105] Acquire a fourth temperature measurement value PV4 of the fourth temperature sensor 224 in real time;

[0106] Calculate the difference R between the fourth temperature setting value SV2 and the fourth temperature measurement value PV4, that is, R=SV2-PV4;

[0107] If e≤R<e+E, the opening of the first expansion valve 14 increases by P%;

[0108] If e+E≤R<e+F, the opening of the first expansion valve 14 increases by Q%;

[0109] If e+F≤R≤fF, the opening of the first expansion valve 14 remains unchanged;

[0110] If fF<R≤fE, the opening degree of the first expansion valve 14 is reduced by Q%;

[0111] If fE<R≤f, the opening of the first expansion valve 14 is reduced by P%;

[0112] If R<e, the opening degree of the first expansion valve 14 is reduced by W%;

[0113] If R>f, the opening degree of the first expansion valve 14 increases by W%, wherein e<0<E<F<f.

[0114] Specifically, in this embodiment, e=-1, f=1, E=0.5, F=0.9, P=2, Q=1, W=5, that is:

[0115] If -1≤R<-0.5, the opening of the first expansion valve 14 increases by 2%;

[0116] If -0.5≤R<-0.1, the opening of the first expansion valve 14 increases by 1%;

[0117] If -0.1≤R≤0.1, the opening degree of the first expansion valve 14 remains unchanged;

[0118] If 0.1<R<0.5, the opening degree of the first expansion valve 14 is reduced by 1%;

[0119] If 0.5<R≤1, the opening of the first expansion valve 14 is reduced by 2%;

[0120] If X<-1, the opening of the first expansion valve 14 increases by 5%;

[0121] If X>1, the opening degree of the first expansion valve 14 is reduced by 5%.

[0122] It can be understood that R is the difference between the set temperature value and the measured temperature value. When R is greater than the preset range, for example, when R is greater than 0.1, it means that the actual temperature value is low. At this time, by adjusting the opening of the first expansion valve 14, the opening of the first expansion valve 14 is reduced, the cooling capacity is reduced, and the measured temperature value is increased, so that the value of R is reduced; when R is less than 0.1, it means that the actual temperature value is high. At this time, by adjusting the opening of the first expansion valve 14, the opening of the first expansion valve 14 is increased, so that the measured temperature value is reduced, so that the value of R is increased, and finally the value of R is stabilized between ±0.1.

[0123] The temperature control method of this embodiment also includes:

[0124] Acquire in real time a first temperature measurement value PV1 of the first temperature sensor 111 and a first pressure measurement value PV2 of the first pressure sensor 112;

[0125] Converting the first pressure measurement value PV2 into a saturation temperature value PV2' according to the pressure-enthalpy diagram;

[0126] Calculate the difference Y between the saturated temperature value PV2' and the first temperature measurement value PV1, that is, Y=PV2'-PV1;

[0127] When a≤X≤b, the temperature control method further includes:

[0128] If c≤Y≤d, the opening degree of the second expansion valve 17 remains unchanged;

[0129] If g≤Y<c, the opening of the second expansion valve 17 increases by G%;

[0130] If d<Y≤h, the opening degree of the second expansion valve 17 is reduced by H%;

[0131] Specifically, in this embodiment, c=-9, d=-5, g=-15, h=0, G=1, H=5, that is:

[0132] If -9≤Y≤-5, the opening degree of the second expansion valve 17 remains unchanged;

[0133] If -15≤Y<-9, the opening of the second expansion valve 17 increases by 1%;

[0134] If -5<Y≤0, the opening degree of the second expansion valve 17 is reduced by 5%;

[0135] When e≤R≤f, the temperature control method also includes:

[0136] If c≤Y≤d, the opening degree of the first expansion valve 14 remains unchanged;

[0137] If g≤Y<c, the opening of the first expansion valve 14 increases by G%;

[0138] If d<Y≤h, the opening degree of the first expansion valve 14 is reduced by H%.

[0139] Specifically, in this embodiment:

[0140] If -9≤Y≤-5, the opening degree of the first expansion valve 14 remains unchanged;

[0141] If -15≤Y<-9, the opening of the first expansion valve 14 increases by 1%;

[0142] If -5<Y≤0, the opening degree of the first expansion valve 14 is reduced by 5%.

[0143] Furthermore, the temperature control method also includes:

[0144] Acquire the fifth temperature setting value SV1 of the fifth temperature sensor 215 and the fifth temperature measurement value PV3 of the fifth temperature sensor 215;

[0145] Calculate the difference between the fifth temperature setting value SV1 and the fifth temperature measurement PV3 as Z, that is, Z = SV1 - PV3;

[0146] According to the difference Z, the output percentage of the power of the first heater 213 is controlled; the larger the absolute value of the difference Z is, the larger the output percentage of the power of the first heater 213 is.

[0147] The method also includes:

[0148] Acquire the sixth temperature setting value SV2 of the sixth temperature sensor 225 and the sixth temperature measurement value PV4 of the sixth temperature sensor 225;

[0149] Calculate the difference between the sixth temperature setting value SV2 and the sixth temperature measurement PV4 as S, that is, S=SV2-PV4;

[0150] According to the difference S, the output percentage of the power of the second heater 223 is controlled; the larger the absolute value of the difference S is, the larger the output percentage of the power of the second heater 223 is.

[0151] Furthermore, the temperature control method also includes:

[0152] When X<a, the speed of the compressor 11 is reduced according to PID control;

[0153] When X>b, the rotation speed of the compressor 11 increases according to the PID control.

[0154] Specifically, in this embodiment, a=-0.5, b=0.5, that is:

[0155] When X<-0.5, the speed of the compressor 11 is reduced according to PID control;

[0156] When X>0.5, the rotation speed of the compressor 11 is increased according to PID control.

[0157] By controlling the rotation speed of the compressor 11 , the temperature adjustment time can be shortened, the control accuracy can be improved, and the stability of the operation of the compressor 11 can be ensured.

[0158] This temperature control method can reduce the fluctuation of the equipment operating temperature by adjusting the opening of different valves according to the real-time temperature, and also improve the response speed and the accuracy of temperature control.

[0159] The temperature control system 100 and the temperature control method provided by the embodiments of the present invention have the following beneficial effects:

[0160] The temperature control system 100 of the present invention is provided with a liquid storage separator 13, and the refrigerant is set to be a mixed high and low boiling point refrigerant. After passing through the first condenser 12, the high boiling point refrigerant is condensed, but the low boiling point refrigerant is not condensed and enters the liquid storage separator 13 for separation. The high boiling point refrigerant is stored in the liquid storage separator 13, and the low boiling point refrigerant enters the first heat exchanger 19 in the form of gas. The high boiling point refrigerant enters the first heat exchanger 19 through the second outlet 163 of the three-way valve 16 to condense the gas refrigerant into liquid. Double condensation of low boiling point refrigerant can be achieved, and circulating liquid with a lower temperature can be provided for the load end. Circulating liquids of different temperatures can be provided for the first circulation loop 21 and the second circulation loop 22. The three-way valve 16 is provided to make the temperature of the circulating liquid adjustable, allowing the system to switch freely between different working modes. The temperature control system 100 of the present invention can provide a circulating liquid with a lower temperature for the load end, and can provide circulating liquids of multiple temperatures in the case of a set of refrigeration system 10, allowing the system to switch freely between different working modes.

[0161] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A temperature control system (100), characterized in that: The invention comprises a refrigeration system (10) and a circulation system (20), wherein the refrigeration system (10) comprises a refrigeration main circuit, a first branch circuit and a second branch circuit, and the circulation system (20) comprises a first circulation loop (21) and a second circulation loop (22). The refrigeration main circuit comprises a compressor (11), a first condenser (12) and a liquid storage separator (13) connected in sequence, and the liquid storage separator (13) comprises a gas outlet (132) and a first liquid outlet (133). Two ends of the first branch circuit are respectively connected to an inlet of the compressor (11) and the gas outlet (132). The second branch circuit is connected to a first condenser (12) and a liquid storage separator (13). The two ends of the liquid storage separator (13) are respectively connected to the inlet of the compressor (11) and the first liquid outlet (133); the first branch exchanges heat with the first circulation loop (21) through the second evaporator (18), and the second branch exchanges heat with the second circulation loop (22) through the first evaporator (15); the liquid storage separator (13) also includes a second liquid outlet (134); the refrigerant flowing out of the second liquid outlet (134) can selectively exchange heat with the first branch through the first heat exchanger (19), or with the first circulation loop (21) through the second evaporator (18).

2. The temperature control system (100) according to claim 1, characterized in that: The refrigeration system (10) further comprises a first expansion valve (14), a three-way valve (16) and a second expansion valve (17); On the refrigeration main circuit, the outlet of the compressor (11) is in communication with the first side inlet of the first condenser (12), the liquid storage separator (13) further comprises a liquid storage inlet (131), and the first side outlet of the first condenser (12) is in communication with the liquid storage inlet (131); On the first branch, the gas outlet (132) is in communication with a first side inlet of the first heat exchanger (19), the first side outlet of the first heat exchanger (19) is in communication with an inlet of the second expansion valve (17), the outlet of the second expansion valve (17) is in communication with a first side inlet of the second evaporator (18), and the first side outlet of the second evaporator (18) is in communication with an inlet of the compressor (11); On the second branch, the first liquid outlet (133) is in communication with the inlet of the first expansion valve (14), the outlet of the first expansion valve (14) is in communication with the first side inlet of the first evaporator (15), and the first side outlet of the first evaporator (15) is in communication with the inlet of the compressor (11); The three-way valve (16) comprises a first inlet (161), a first outlet (162) and a second outlet (163); the second liquid outlet (134) is connected to the first inlet (161); the first outlet (162) is connected to the first side inlet of the second evaporator (18); the second outlet (163) is connected to the second side inlet of the first heat exchanger (19); the second side outlet of the first heat exchanger (19) is connected to the inlet of the compressor (11).

3. The temperature control system (100) according to claim 2, characterized in that: A first temperature sensor (111) and a first pressure sensor (112) are provided at the inlet of the compressor (11).

4. The temperature control system (100) according to claim 2, characterized in that: The outlet of the compressor (11) is provided with a seventh temperature sensor (113) and a second pressure sensor (114).

5. The temperature control system (100) according to claim 2, characterized in that: An eighth temperature sensor (135) is provided at the gas outlet (132).

6. The temperature control system (100) according to claim 2, characterized in that: The first circulation loop (21) comprises a first expansion tank (211), a first circulation pump (212), a first heater (213) and a first load (216); the outlet of the first expansion tank (211) is connected to the inlet of the first circulation pump (212); the outlet of the first circulation pump (212) is connected to the inlet of the first heater (213); the outlet of the first heater (213) is connected to the inlet of the first load (216); the outlet of the first load (216) is connected to the second side inlet of the second evaporator (18); and the second side outlet of the second evaporator (18) is connected to the inlet of the first expansion tank (211); The second circulation loop (22) comprises a second expansion tank (221), a second circulation pump (222), a second heater (223) and a second load (226); the outlet of the second expansion tank (221) is connected to the inlet of the second circulation pump (222); the outlet of the second circulation pump (222) is connected to the inlet of the second heater (223); the outlet of the second heater (223) is connected to the inlet of the second load (226); the outlet of the second load (226) is connected to the second side inlet of the first evaporator (15); and the second side outlet of the first evaporator (15) is connected to the inlet of the second expansion tank (221).

7. The temperature control system (100) according to claim 6, characterized in that: A third temperature sensor (214) is provided between the first circulation pump (212) and the first heater (213); and a fourth temperature sensor (224) is provided between the second circulation pump (222) and the second heater (223).

8. The temperature control system (100) according to claim 6, characterized in that: A fifth temperature sensor (215) is provided between the first heater (213) and the first load (216); and a sixth temperature sensor (225) is provided between the second heater (223) and the second load (226).

9. The temperature control system (100) according to claim 1, characterized in that: The temperature control system (100) further comprises a cooling water system (30), wherein the cooling water system (30) exchanges heat with the main refrigeration circuit via the first condenser (12).

10. A temperature control method, applied to the temperature control system (100) according to claim 7, characterized in that: The method comprises: Acquiring a third temperature setting value SV0 of the third temperature sensor (214); Acquiring in real time a third temperature measurement value PV0 of the third temperature sensor (214); Calculate the difference X between the third temperature setting value SV0 and the third temperature measurement value PV0, X=SV0-PV0; If a≤X<a+A, the opening of the second expansion valve (17) increases by M%; If a+A≤X<a+B, the opening of the second expansion valve (17) increases by N%; If a+B≤X≤bB, the opening degree of the second expansion valve (17) remains unchanged; If bB<X≤bA, the opening degree of the second expansion valve (17) is reduced by N%; If bA<X≤b, the opening degree of the second expansion valve (17) is reduced by M%; If X<a, the opening degree of the second expansion valve (17) increases by L%; If X>b, the opening of the second expansion valve (17) is reduced by L%; wherein a<0<A<B<b; The method further comprises: Acquiring a fourth temperature setting value SV2 of the fourth temperature sensor (224); Acquiring in real time a fourth temperature measurement value PV4 of the fourth temperature sensor (224); Calculate the difference R between the fourth temperature setting value SV2 and the fourth temperature measurement value PV4, R=SV2-PV4; If e≤R<e+E, the opening of the first expansion valve (14) increases by P%; If e+E≤R<e+F, the opening of the first expansion valve (14) increases by Q%; If e+F≤R≤fF, the opening degree of the first expansion valve (14) remains unchanged; If fF<R≤fE, the opening degree of the first expansion valve (14) is reduced by Q%; If fE<R≤f, the opening degree of the first expansion valve (14) is reduced by P%; If R<e, the opening of the first expansion valve (14) increases by W%; If R>f, the opening degree of the first expansion valve (14) is reduced by W%; wherein, e<0<E<F<f.

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