Ceramic and glass welding technical method and tool clamp

Abstract

According to the ceramic and glass welding technical method and the tool clamp, a ceramic substrate cover plate can be pressed through a graphite pressing block, the graphite pressing block and a graphite positioning block can be fixed through stainless steel screws, and after overturning, a glass wafer to be welded is arranged in a round hole of the ceramic substrate cover plate corresponding to a round hole of the graphite positioning block; and finally, the glass wafer can be limited through the graphite plug, one-time welding is completed through a tool clamp, temperature, time and rapid heating, bubbles can be reduced, the welding quality can be improved, the welding cost is low, and the efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of integrated circuit package shells, in particular to a ceramic and glass welding technical method and a tooling fixture. Background Art

[0002] The semiconductor packaging shell with ceramic light window cover has the advantages of good heat dissipation performance, strong radiation resistance, moisture resistance, internal high temperature, internal thermal shock resistance, and high strength, especially the electronic packaging shell with high light transmittance and sealing;

[0003] Ceramic and glass welding is to embed the designed round hole, square hole or other shaped window in the middle of the ceramic shell cover of the electronic package into the glass disc of the corresponding structure. The traditional process is to weld in a high-temperature furnace or laser, which has the following disadvantages:

[0004] 1. The yield and bubbles cannot be effectively improved, because traditional high-temperature welding usually performs long-term welding at high temperature in order to improve the sealing of welding. Although the welding has good sealing, the bubbles cannot be effectively controlled;

[0005] 2. The cost of laser welding is relatively high, and laser welding cannot be performed in batches, so the efficiency is extremely low. Summary of the invention

[0006] 1. Technical issues to be solved

[0007] In view of the deficiencies in the prior art, the present invention provides a ceramic and glass welding method and a fixture.

[0008] (II) Technical solution

[0009] To achieve the above object, the present invention provides the following technical solution: a ceramic and glass welding method, comprising the following steps:

[0010] Step 1:

[0011] Step 1: Fix the ceramic cover substrate on the graphite fixture;

[0012] Step 2: Place the glass disc into the pre-designed through hole of the fixture, and then embed it into the circular hole of the ceramic cover substrate;

[0013] Step 3: Put the graphite plug of the pre-designed fixture through the through hole of the fixture to press the glass wafer;

[0014] Step 4: Place in a high temperature push boat furnace for welding;

[0015] Step 5: Nitrogen needs to be passed through the high temperature furnace;

[0016] Step 6: Directly enter the high temperature zone and then use the stainless steel nut of the graphite plug of the fixture;

[0017] Step 2: Clean the black ceramic window cover welded in step 1;

[0018] Step 3: Place the cleaned black ceramic window cover plate on the fixture with the inner cavity facing downward and perform high-temperature sintering again.

[0019] Furthermore, the present invention is improved in that the flow rate of nitrogen in the high temperature furnace is greater than 50 LPM.

[0020] Furthermore, the present invention is improved in that the temperature of the high temperature zone is 730-760°C.

[0021] Furthermore, the present invention is improved in that in step 2, a dry ice machine is used for spray cleaning.

[0022] Furthermore, the present invention is improved in that the sintering temperature in step three is greater than 800° C. and the sintering time is greater than 20 minutes.

[0023] A fixture used in a ceramic and glass welding method as claimed in claims 1 to 5, comprising a graphite pressing block, a ceramic cover substrate, a graphite positioning block, a glass disc, a graphite plug and a stainless steel nut;

[0024] The graphite pressing block is located below the graphite positioning block, the ceramic cover substrate is located between the graphite pressing block and the graphite positioning block, and the stainless steel nut is located above the graphite positioning block;

[0025] The graphite positioning block is provided with a plurality of grooves inside, the ceramic cover substrate is placed inside the grooves, and the graphite pressing block can limit the ceramic cover substrate in the grooves, the graphite pressing block and the graphite positioning block are fixed by stainless steel screws, the graphite positioning block is provided with a plurality of circular holes connected with the grooves, and the glass disc can be placed inside the circular holes, the graphite plug can be inserted into the circular hole to limit the glass disc, and the stainless steel nut is penetrated by the top end of the graphite plug.

[0026] (III) Beneficial effects

[0027] Compared with the prior art, the present invention provides a ceramic and glass welding technology method and fixture, which has the following beneficial effects:

[0028] The ceramic substrate cover plate can be pressed by a graphite pressing block, and the graphite pressing block and the graphite positioning block can be fixed by stainless steel screws. After turning over, the glass disc to be welded is loaded into the circular hole of the graphite positioning block corresponding to the circular hole of the ceramic substrate cover plate. Finally, the glass disc can be limited by a graphite plug. A welding is completed by using tooling fixtures, temperature, time and rapid heating, which can reduce bubbles to improve welding quality, and the welding cost is low and the efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a front cross-sectional view of a sintering fixture according to the present invention;

[0030] Figure 2 This is a three-dimensional exploded view of a sintering fixture according to the present invention;

[0031] Figure 3 is a three-dimensional diagram of an embodiment of the ceramic cover substrate of the present invention;

[0032] Figure 4 It is a three-dimensional diagram of the assembly of the ceramic cover plate and the graphite positioning block of the present invention;

[0033] In the figure: 1. Stainless steel screw; 2. Graphite pressing block; 3. Ceramic cover substrate; 4. Graphite positioning block; 5. Glass disc; 6. Graphite plug; 7. Stainless steel nut. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] See also Figure 1-4 A ceramic and glass welding method of the present invention comprises the following steps:

[0036] Step 1:

[0037] The first step: fix the ceramic cover substrate 3 on the graphite fixture;

[0038] Step 2: Place the glass disc 5 into the pre-designed through hole of the fixture, and then embed it into the circular hole of the ceramic cover substrate 3;

[0039] Step 3: Put the graphite plug 6 of the pre-designed fixture through the through hole of the fixture to press the glass disc 5;

[0040] Step 4: Place in a high temperature push boat furnace for welding;

[0041] Step 5: Nitrogen needs to be passed through the high temperature furnace with a flow rate greater than 50LPM;

[0042] Step 6: directly enter the high temperature zone (with glass disc 5, temperature at 730-760℃, time about 17 minutes), this temperature cannot be too high, it should be slightly above the glass transition temperature, then quickly heat up, and then use the stainless steel nut 7 of the fixture graphite plug 6 to slightly open the glass disc 5, so that the uneven position of the glass edge and the ceramic edge pits are completely in contact with each other. This is the first step of welding, which mainly uses the fixture, temperature, time and rapid heating to complete a welding, and is also a method to reduce bubbles to improve welding quality.

[0043] Step 2: Clean the black ceramic window cover plate welded in step 1 (using a dry ice machine to spray clean), mainly the graphite ash adhered to the glass disc 5, clean it;

[0044] Step 3: Place the cleaned black ceramic window cover plate on the fixture with the inner cavity facing down and sinter it again at high temperature. The temperature should be greater than 800℃ and the time should be greater than 20 minutes. This is the second step of welding, which mainly plays the role of making the glass transparent and removing the traces of pressure.

[0045] A fixture used in a ceramic and glass welding method as claimed in claims 1 to 5, comprising a graphite pressing block 2, a ceramic cover substrate 3, a graphite positioning block 4, a glass disc 5, a graphite plug 6 and a stainless steel nut 7;

[0046] The graphite pressing block 2 is located below the graphite positioning block 4, the ceramic cover substrate 3 is located between the graphite pressing block 2 and the graphite positioning block 4, and the stainless steel nut 7 is located above the graphite positioning block 4;

[0047] The graphite positioning block 4 is provided with a plurality of grooves inside, the ceramic cover substrate 3 is placed inside the grooves, and the graphite pressing block 2 can limit the ceramic cover substrate 3 in the grooves, the graphite pressing block 2 and the graphite positioning block 4 are fixed by stainless steel screws 1, the graphite positioning block 4 is provided with a plurality of circular holes connected with the grooves, and the glass disc 5 can be placed inside the circular holes, the graphite plug 6 can be inserted into the circular holes to limit the glass disc 5, and the stainless steel nut 7 is penetrated by the top end of the graphite plug 6;

[0048] When the structure is used, first place the ceramic substrate cover plate ( Figure 3 ), with the inner cavity facing downwards, install it into the groove of the graphite positioning block 4 ( Figure 4), then press the graphite pressing block 2 against the ceramic substrate cover plate, fix the graphite pressing block 2 and the graphite positioning block 4 with the stainless steel screw 1, turn it over, and install the glass disc 5 to be welded into the circular hole of the graphite positioning block 4 corresponding to the circular hole of the ceramic substrate cover plate, and finally install the graphite plug 6 into the circular hole of the graphite positioning block 4 to press the glass disc 5, see the front view and section view ( Figure 1 ), a stainless steel nut 7 is assembled on the top of the graphite plug 6 to act as a counterweight, and the glass disc 5 adopts a DM308 glass disc 5.

[0049] In the description of this article, it should be noted that relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0050] While the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that many changes, modifications, substitutions and variations can be made to the embodiments without departing from the principles and spirit of the invention.

Claims

1. A ceramic and glass welding method, characterized in that: The following steps are involved: Step 1: The first step is to fix the ceramic cover substrate (3) on a graphite fixture; Step 2: Place the glass disc (5) into the pre-designed through hole of the fixture, and then embed it into the circular hole of the ceramic cover substrate (3); Step 3: Place the graphite plug (6) of the pre-designed fixture through the through hole of the fixture to press the glass disc (5); Step 4: Place in a high temperature push boat furnace for welding; Step 5: Nitrogen needs to be passed through the high temperature furnace; Step 6: directly enter the high temperature zone and then use the stainless steel nut (7) of the tooling fixture graphite plug (6); Step 2: Clean the black ceramic window cover welded in step 1; Step 3: Place the cleaned black ceramic window cover plate on the fixture with the inner cavity facing downward and perform high-temperature sintering again.

2. A ceramic and glass welding method according to claim 1, characterized in that: The flow rate of nitrogen in the high temperature furnace is greater than 50 LPM.

3. A ceramic and glass welding method according to claim 2, characterized in that: The temperature in the high temperature zone is 730-760℃.

4. A ceramic and glass welding method according to claim 3, characterized in that: In step 2, dry ice machine is used for blast cleaning.

5. The ceramic and glass welding method and fixture according to claim 4, characterized in that: In step 3, the sintering temperature must be greater than 800° C. and the sintering time must be greater than 20 minutes.

6. A fixture used in a ceramic and glass welding method as claimed in claims 1 to 5, characterized in that: It comprises a graphite pressing block (2), a ceramic cover substrate (3), a graphite positioning block (4), a glass disc (5), a graphite plug (6) and a stainless steel nut (7); The graphite pressing block (2) is located below the graphite positioning block (4), the ceramic cover substrate (3) is located between the graphite pressing block (2) and the graphite positioning block (4), and the stainless steel nut (7) is located above the graphite positioning block (4); The graphite positioning block (4) is provided with a plurality of grooves inside, the ceramic cover substrate (3) is placed inside the grooves, and the graphite pressing block (2) can limit the ceramic cover substrate (3) in the grooves, the graphite pressing block (2) and the graphite positioning block (4) are fixed by stainless steel screws (1), the graphite positioning block (4) is provided with a plurality of circular holes connected to the grooves, and the glass disc (5) can be placed inside the circular holes, the graphite plug (6) can be inserted into the circular holes to limit the glass disc (5), and the stainless steel nut (7) is penetrated by the top end of the graphite plug (6).

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