Multi-imaging mode compound detector and imaging method thereof

Abstract

The application provides a multi-imaging mode composite detector and belongs to the technical field of imaging devices. The application comprises a detector main body mounting beam, a vacuum feed-through sealing flange, a detector support arm, an R-axis reciprocating rotary drive mechanism, an X2-axis drive mechanism, a detector A, a signal amplifier A and a shielding shell, a detector B, a signal amplifier B and a shielding shell, a multi-channel signal processor, a detector sealing mounting flange and a compressible and torsional metal bellows. The application synchronously captures BSE signals / X-ray signals / cathode fluorescent signals and STEM signals by fusing multiple detectors in a single accessory. The application significantly improves experimental efficiency and effectively reduces the equipment purchase and maintenance costs of users without frequent switching between multiple devices. Different detectors are integrated in one accessory, which only occupies one interface, simplifies the structure of the equipment and leaves space for other accessories, thereby maximizing the function of the electron microscope.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of imaging devices, in particular to a multi-imaging mode composite detector and an imaging method thereof. BACKGROUND

[0002] Scanning Electron Microscope, abbreviated as SEM, uses a focused very narrow, short wavelength high-energy electron beam as the illumination source, through the interaction between the electron beam and the substance, to excite various physical information, and uses a detector to collect, process and image the information. It is an electron optical instrument with high resolution and high magnification.

[0003] As shown in Figure 1 , the backscattered electron detector (BSE) is used to detect the high-energy electrons generated by the elastic scattering or inelastic scattering of the incident electron beam 6 focused by the objective lens 2 and the atomic nucleus of the sample 5. It is an important part of the scanning electron microscope, which can provide important information about the composition and structure of the sample. The BSE detector is usually a semiconductor detector composed of doped semiconductor materials (such as silicon) and is directly placed above the sample.

[0004] As shown in Figure 1 , the energy dispersive spectrometer (EDS) collects the characteristic X-rays generated by the interaction between the electron beam 6 and the sample 5, and analyzes the element types and contents of the micro area on the sample surface according to the energy and wavelength of the characteristic X-rays. Various elements have their own characteristic X-ray wavelengths, and the characteristic wavelength depends on the characteristic energy released in the energy level transition process. The EDS detector usually uses a silicon drift detector and is placed above the sample.

[0005] As shown in Figure 1 , the working principle of the cathodoluminescence detector (CL) is based on the photoelectric effect. In the scanning electron microscope, when the high-energy incident electron beam 6 bombards the surface of the sample 5, it will excite the electrons in the sample to jump to a higher energy level. These electrons will release energy during de-excitation, some of which will be emitted in the form of visible or ultraviolet light, generating a cathodoluminescence signal. These signals are received by the cathodoluminescence detector and converted into electrical signals, which are then analyzed and displayed. By detecting the intensity and wavelength distribution of the cathodoluminescence signal, information about the energy band structure, defect state, impurity distribution, etc. of the sample can be obtained. The cathodoluminescence detector is usually located above the sample.

[0006] As shown in Figure 1As shown, scanning transmission electron microscopy, abbreviated as STEM, is a working mode of scanning electron microscope. In STEM mode, the incident electron beam 6 is scanned on the sample 5, and the intensity will change when it passes through the sample due to the structure and composition of the sample. The STEM detector is placed below the sample to collect and process these transmitted or scattered electron signals to form different images such as bright field image (BF), annular dark field (ADF) image, and high-angle annular dark field (HAADF) image, etc. These signals reflect different information of the sample, such as surface morphology, crystal structure, and element distribution, etc.

[0007] Generally, due to the different positions and roles of the BSE detector, energy dispersive spectrometer (EDS), cathodoluminescence detector (CL), and STEM detector in the SEM system, different interfaces are often needed to install these accessories at the same time. In addition to the above-mentioned several accessories, there are secondary electron detectors (SE), wave spectrometers (WDS), etc. The various accessories also bring some inconvenience, such as different accessories needing space to install and run, which increases the manufacturing and maintenance costs of the equipment; as the number of accessories increases, the user needs to switch between different equipment when obtaining different signals, which increases the difficulty of operating the SEM system; when the number of side interfaces is limited by the installation position, some accessories cannot be compatible, resulting in the inability to maximize the function of the scanning electron microscope.

[0008] In summary, the various accessories in the scanning electron microscope bring some inconvenience, such as different accessories needing space to install and run, which increases the manufacturing and maintenance costs of the equipment; as the number of accessories increases, the user needs to switch between different equipment when obtaining different signals, which increases the difficulty of operating the SEM system; when the number of side interfaces is limited by the installation position, some accessories cannot be compatible, resulting in the inability to maximize the function of the scanning electron microscope. SUMMARY

[0009] Therefore, in order to solve the technical problem that the user needs to switch between different equipment when obtaining different signals, which increases the difficulty of operating the SEM system, on the one hand, the present application provides a composite detector with multiple imaging modes, which synchronously captures BSE signals / X-ray signals / cathodoluminescence signals and STEM signals by integrating multiple detectors in a single accessory, and also gives the user the ability to flexibly select the detector and accurately position it to different areas of the sample according to experimental needs. Without frequent switching between multiple devices, the experimental efficiency is significantly improved, and the user's equipment purchase and maintenance costs are effectively reduced. Different detectors are integrated in one accessory, which only needs to occupy one interface, which simplifies the structure of the equipment and also leaves space for other accessories, maximizing the function of the electron microscope.

[0010] To achieve the above object, the present application provides the following technical solutions:

[0011] A composite detector of multiple imaging modes, comprising:

[0012] A detector main body mounting beam, on which a YZ two-dimensional motion table capable of performing X-axis displacement motion along the detector main body mounting beam is mounted;

[0013] A vacuum feed-through sealing flange fixed on the YZ two-dimensional motion table and capable of performing displacement motion in Y-axis and Z-axis directions under the driving of the YZ two-dimensional motion table;

[0014] A detector support arm, one end of which is fixed on the vacuum feed-through sealing flange;

[0015] An R-axis reciprocating rotation driving mechanism and an X2-axis driving mechanism, respectively fixed on the other end of the detector support arm;

[0016] A detector A, a signal amplifier A and a shielding shell as a whole structure, fixed on the R-axis reciprocating rotation driving mechanism, to realize 0-360° reciprocating rotation in R-axis;

[0017] A detector B, a signal amplifier B and a shielding shell as a whole structure, fixed on the X2-axis driving mechanism, to realize reciprocating motion in X-axis direction, and the signal detection surface of the detector B always faces the (Z+) direction;

[0018] A multi-channel signal processor, fixed on the end of the YZ two-dimensional motion table, and performing circuit and signal communication through the vacuum feed-through sealing flange;

[0019] A detector sealing mounting flange, sleeved on the detector support arm, for being fixed to a working chamber;

[0020] A compressible and torsional metal bellows, connected between the vacuum feed-through sealing flange and the detector sealing mounting flange, for providing deformation allowance of compression, stretching and torsion.

[0021] Preferably, the detector main body mounting beam is provided with a driving device for driving the YZ two-dimensional motion table to perform X-axis displacement motion.

[0022] Preferably, the driving device comprises:

[0023] A driving motor, fixed on the detector main body mounting beam;

[0024] A lead screw, connected to the output end of the driving motor and screwed with the YZ two-dimensional motion table, to drive the YZ two-dimensional motion table to perform X-axis displacement motion.

[0025] Preferably, the driving device further comprises:

[0026] The guide rail is arranged on the detector body mounting beam and is slidably connected to the YZ two-dimensional motion stage.

[0027] Preferably, the detector A and the detector B are particle detectors.

[0028] On the other hand, the present invention also provides an imaging method of the composite detector with multiple imaging modes, which can realize one of the following four imaging modes:

[0029] Scanning transmission electron beam bright field and dark field imaging modes;

[0030] Scanning transmission electron beam bright field, dark field and backscattered electron imaging modes;

[0031] Scanning transmission electron beam bright field, dark field imaging and elemental energy spectrum imaging modes;

[0032] Scanning transmission electron beam bright field, dark field and cathodoluminescence imaging modes.

[0033] Preferably, the scanning transmission electron beam bright field and dark field imaging modes are as follows:

[0034] The YZ two-dimensional motion table moves as a whole in the (X-) direction;

[0035] The X2-axis driving mechanism realizes the overall movement of the detector B, signal amplifier B and shielding shell in the (X2-) direction;

[0036] The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions so that detectors A and B are concentrically aligned with the Z axis;

[0037] Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z+) direction; place the sample on detector A;

[0038] The incident electron beam with a certain energy is concentric with the Z axis and incident on the sample. The bright field signal electrons with a small angle to the Z axis pass through the central hole of detector A and are incident on the detection surface of detector B, realizing the collection of bright field signal electrons;

[0039] Dark field signal electrons that form a large angle with the Z axis are incident on the annular detection surfaces of different diameters of detector A, thereby collecting dark field signal electrons at different angles.

[0040] Preferably, the scanning transmission electron beam bright field, dark field and backscattered electron imaging modes are as follows:

[0041] The YZ two-dimensional motion table moves as a whole in the (X-) direction;

[0042] The X2-axis driving mechanism drives the whole movement of the detector B, signal amplifier B and shielding shell in the (X2-) direction;

[0043] The YZ two-dimensional motion stage realizes displacement adjustment movement in the (Y+) and (Y-) directions, so that the detector A and the detector B are concentrically aligned with the Z-axis;

[0044] The R-axis reciprocating rotation driving mechanism rotates the detection surface of the detector A towards the (Z-) direction;

[0045] The sample is placed between the detector A and the detector B;

[0046] The incident electron beam with a certain energy is concentric with the Z-axis, passes through the center hole of the detector A, and is incident on the sample. The electrons transmitted through the sample are incident on the detection surface of the detector B, realizing the collection of bright field signal electrons and dark field signal electrons;

[0047] The backscattered electron signal emitted from the surface of the sample is incident on the different diameter annular detection surface of the detector A towards the (Z+) direction, realizing the signal collection of backscattered electrons at different angles.

[0048] Preferably, the scanning transmission electron beam bright field, dark field imaging and element energy spectrum component image mode is as follows:

[0049] The YZ two-dimensional motion stage moves in the whole (X-) direction;

[0050] The X2-axis driving mechanism drives the whole movement of the detector B, signal amplifier B and shielding shell in the (X2-) direction;

[0051] The YZ two-dimensional motion stage realizes displacement adjustment movement in the (Y+) and (Y-) directions, so that the detector A and the detector B are concentrically aligned with the Z-axis;

[0052] The R-axis reciprocating rotation driving mechanism rotates the detection surface of the detector A towards the (Z-) direction;

[0053] The sample is placed between the detector A and the detector B;

[0054] The incident electron beam with a certain energy is concentric with the Z-axis, passes through the center hole of the detector A, and is incident on the sample. The electrons transmitted through the sample are incident on the detection surface of the detector B, realizing the collection of bright field signal electrons and dark field signal electrons;

[0055] The X-ray signal emitted from the surface of the sample is incident on the detection surface of the detector A towards the (Z+) direction, realizing the signal collection of X-rays at different angles.

[0056] Preferably, the scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging mode is as follows:

[0057] YZ two-dimensional motion platform moves as a whole in the (X-) direction;

[0058] The X2 axis driving mechanism realizes the overall movement of the detector B and the signal amplifier B and the shielding shell in the (X2-) direction;

[0059] YZ two-dimensional motion platform realizes displacement adjustment movement in the (Y+) and (Y-) directions, so that the detector A and the detector B are concentrically aligned with the Z axis;

[0060] The rotating R axis reciprocating rotation driving mechanism rotates the detection surface of the detector A towards the (Z-) direction;

[0061] The sample is placed between the detector A and the detector B;

[0062] The incident electron beam with a certain energy is concentric with the Z axis, passes through the center hole of the detector A, and is incident on the sample, and the electrons transmitted through the sample are incident on the detection surface of the detector B, so that the collection of bright field signal electrons and dark field signal electrons is realized;

[0063] The cathode fluorescent signal emitted from the surface of the sample is incident on the detection surface of the detector A towards the (Z+) direction, so that the collection of cathode fluorescent signals at different angles is realized.

[0064] Compared with the prior art, the present application has the following beneficial effects:

[0065] The multi-imaging mode composite detector provided by the present application synchronously captures BSE signals / X-ray signals / cathode fluorescent signals and STEM signals by fusing multiple detectors in a single accessory, and also gives users the ability to flexibly select detectors and accurately position them to different areas of the sample according to experimental requirements. Without frequent switching between multiple devices, the experimental efficiency is significantly improved, and the user's equipment purchase and maintenance costs are effectively reduced. Different detectors are integrated in one accessory, which only occupies one interface, simplifying the structure of the equipment and leaving space for other accessories, maximizing the function of the electron microscope.

[0066] The multi-imaging mode composite detector and method of the present application are unique in that an advanced module front end is provided, which has the installation capacity of two detectors and can stably install BSE detectors / energy dispersive spectrometers / cathode fluorescent detectors and STEM detector chips. Through the precisely designed up-down and front-back translation mechanism, users can easily switch the use surface and position of different detectors. In addition, the module front end is built-in with high-precision positioning mechanisms to ensure accurate position adjustment when switching detectors, thereby ensuring accurate signal reception.

[0067] The multi-imaging mode composite detector provided by this invention is highly integrated and flexibly configured. Users can integrate different detectors according to actual needs and automatically adjust the module front end position, greatly improving the functional diversity and operational convenience of the scanning electron microscope (SEM).

[0068] The multi-imaging mode composite detector provided by this invention offers space optimization and multifunctional expansion. This multi-imaging mode design significantly saves internal SEM space and enables the incorporation of additional detector types or functional modules into the SEM system, significantly enhancing the system's versatility and expansion potential, while achieving excellent cost-effectiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] Figure 1 Schematic diagram of different working modes of different detectors located above and below the sample;

[0070] Figure 2 Schematic diagram of the layout and vacuum sealing method of the device of the present invention in an electron microscope;

[0071] Figure 3 Schematic diagram of the main structure, functional parts and working mode of the device of the present invention;

[0072] Figure 4 Schematic diagram of achieving bright-field and dark-field imaging modes of a scanning transmission electron beam according to an embodiment of the present invention;

[0073] Figure 5 Schematic diagram of achieving scanning transmission electron beam bright field, dark field and backscattered electron imaging modes according to an embodiment of the present invention;

[0074] Figure 6 A schematic diagram of realizing bright field, dark field imaging and elemental energy spectrum composition imaging modes of a scanning transmission electron beam according to an embodiment of the present invention;

[0075] Figure 7 Schematic diagram of achieving scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging modes according to an embodiment of the present invention;

[0076] In the figure, 1. working chamber; 2. objective lens; 3. vacuum environment; 4. composite detector; 5. sample; 6. incident electron beam; 7. dark-field signal electron; 8. bright-field signal electron; 9. backscattered electron; 10. seal; 11. compressible and torsional metal bellows; 12. vacuum feedthrough sealing flange; 13. detector A; 14. detector B; 15. signal amplifier A and shielding shell; 16. signal amplifier B and shielding shell; 17. R-axis reciprocating rotation drive mechanism; 18. X2-axis drive mechanism; 19. detector support arm; 20. detector sealing mounting flange; 21. detector body mounting beam; 22. lead screw; 23. YZ two-dimensional motion stage; 24. guide rail; 25. drive motor; 26. multi-channel signal processor. DETAILED DESCRIPTION

[0077] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0078] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", "top / bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0079] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "mounted / connected," and "connected" should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0080] like Figure 2 As shown, the present invention provides a composite detector 4 with multiple imaging modes, which realizes the sealed isolation of the vacuum environment 3 in the working chamber 1 from the external environment through a seal 10, a compressible and torsion metal bellows 11, and a vacuum feedthrough sealing flange 12, thereby realizing the transmission of power supply and communication signals.

[0081] like Figure 3 As shown, the multi-imaging mode composite detector 4 provided by the present invention includes:

[0082] A detector body mounting beam 21 on which a YZ two-dimensional motion stage 23 capable of performing X-axis displacement motion along the detector body mounting beam 21 is mounted;

[0083] The vacuum feedthrough sealing flange 12 is fixed to the YZ two-dimensional motion stage 23 and is driven by the YZ two-dimensional motion stage 23 to achieve displacement in the Y and Z axes, specifically in the (Y+), (Y-), (Z+), and (Z-) directions. The range of motion is determined by actual needs. Displacement can be achieved by, but is not limited to, a manual micrometer knob, a precision screw, or a piezoelectric motor.

[0084] One end of the detector support arm 19 is fixed to the vacuum feedthrough sealing flange 12 .

[0085] The R-axis reciprocating drive mechanism 17 and the X2-axis drive mechanism 18 are each fixed to the other end of the detector support arm 19. Power and communication cables are routed through a pre-reserved wiring trough in the detector support arm 19. The R-axis reciprocating drive mechanism 17 may, but is not limited to, comprise a motor-driven gear and bearing structure. The X2-axis drive mechanism 18 may, but is not limited to, a linear bearing structure driven by an electric motor or piezoelectric motor. The choice of these two options can be tailored to your needs.

[0086] The detector A13, signal amplifier A and shielding shell 15 are fixed on the R-axis reciprocating rotation drive mechanism 17 as an integral structure to achieve reciprocating rotation of the R-axis 0-360°;

[0087] The detector B14, signal amplifier B and shielding shell 16 are fixed on the X2-axis driving mechanism 18 as an integral structure to realize reciprocating motion along the X-axis direction. The motion stroke is determined by actual needs, and the signal detection surface of the detector B14 is always facing the (Z+) direction.

[0088] The multi-channel signal processor 26 is fixed to the end of the YZ two-dimensional motion stage 23 and performs circuit and signal communication through the vacuum feedthrough sealing flange 12.

[0089] The detector sealing mounting flange 20 is mounted on the detector support arm 19 and is used to be fixed to the working chamber 1 (such as Figure 2 shown).

[0090] The compressible and torsionable metal bellows 11 is connected between the vacuum feedthrough sealing flange 12 and the detector sealing mounting flange 20 to provide deformation margins for compression, tension, and torsion. Specifically:

[0091] The YZ two-dimensional motion table 23 and its attached mounting structure are provided with a compressible and torsional metal bellows 11 to provide compression, stretching and torsion deformation allowance during motion in the (X-), (X+), (Y+), (Y-), (Z+), (Z-) directions.

[0092] In the present application, the detector body mounting beam 21 is provided with a driving device for driving the YZ two-dimensional motion table 23 to perform X-axis displacement motion.

[0093] In the present application, the driving device comprises:

[0094] A driving motor 25 is fixed to the detector body mounting beam 21;

[0095] A lead screw 22 is connected to the output end of the driving motor 25 and connected to the YZ two-dimensional motion table 23 to drive the YZ two-dimensional motion table 23 to perform X-axis displacement motion.

[0096] In the present application, the driving device further comprises:

[0097] A guide rail 24 is provided on the detector body mounting beam 21 and is slidably connected to the YZ two-dimensional motion table 23.

[0098] In the above driving device, the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance to realize the overall motion of the YZ two-dimensional motion table 23 and its attached mounting structure in the (X-) and (X+) directions.

[0099] As shown in Figures 4-7 On the other hand, the present application also provides an imaging method of the above-mentioned multi-imaging mode composite detector 4, which can realize one of the following four imaging modes:

[0100] As shown in Figure 4 The scanning transmission electron beam bright field and dark field imaging mode;

[0101] As shown in Figure 5 The scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging mode;

[0102] As shown in Figure 6 The scanning transmission electron beam bright field, dark field imaging and elemental energy spectrum component image mode;

[0103] As shown in Figure 7 The scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging mode.

[0104] Working mode 1: scanning transmission electron beam bright field and dark field imaging mode, the present application realizes the scanning transmission electron beam bright field and dark field imaging mode, dark field imaging is realized by the detector A 13, and bright field imaging is realized by the detector B 14, which is as follows:

[0105] The driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance to achieve the overall movement of the YZ two-dimensional motion table 23 and its auxiliary mounting structure in the (X-) direction;

[0106] The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction;

[0107] The YZ two-dimensional motion stage 23 realizes displacement adjustment movement in the (Y+) and (Y-) directions so that the detector A13 and the detector B14 are concentrically aligned with the Z axis;

[0108] Rotate the R-axis reciprocating drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z+) direction; place the sample 5 above the detector A13 at a certain distance, and the actual distance is adjusted according to the signal strength;

[0109] The incident electron beam 6 with a certain energy is concentric with the Z axis and incident on the sample 5. The electrons can penetrate the thickness of the sample 5. The bright field signal electrons 8 with a small angle to the Z axis pass through the central hole of the detector A13 and are incident on the detection surface of the detector B14, realizing the collection of the bright field signal electrons 8.

[0110] The dark field signal electrons 7 that form a large angle with the Z axis are incident on the annular detection surfaces of different diameters of the detector A13, thereby realizing the collection of dark field signal electrons 7 at different angles.

[0111] Working mode 2: Scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging modes

[0112] The device of the invention can realize the scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging modes, with the backscattered electron 9 imaging realized by the detector A13 and the scanning transmission electron beam bright field and dark field imaging realized by the detector B14;

[0113] The process is as follows: the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance, so as to realize the overall movement of the (d14) YZ two-dimensional motion table 23 and its auxiliary mounting structure in the (X-) direction;

[0114] The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction;

[0115] The YZ two-dimensional motion stage 23 realizes displacement adjustment movement in the (Y+) and (Y-) directions so that the detector A13 and the detector B14 are concentrically aligned with the z axis;

[0116] Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction;

[0117] Place sample 5 between detector A13 and detector B14, and the actual distance is adjusted according to the signal strength;

[0118] An incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the center hole of detector A13, and is incident on sample 5, which is thick enough for electrons to penetrate. The electrons that pass through sample 5 are incident on the detection surface of detector B14, realizing the collection of bright field signal electrons 8 and dark field signal electrons 7;

[0119] The backscattered electron 9 signal emitted from the surface of the sample 5 is incident on the annular detection surface of different diameters of the detector A13 in the (Z+) direction, thereby collecting the signals of backscattered electrons 9 at different angles.

[0120] Working mode 3: Scanning transmission electron beam bright field, dark field imaging and element spectrum imaging mode

[0121] The device of the invention can realize scanning transmission electron beam bright field, dark field imaging and element energy spectrum imaging mode. The detector A13 is replaced with an X-ray detector to receive the X-ray signal generated by the sample 5; the detector B14 realizes scanning transmission electron beam bright field and dark field imaging;

[0122] The process is as follows: the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance to achieve the overall movement of the YZ two-dimensional motion table 23 and its auxiliary mounting structure in the (X-) direction;

[0123] The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction;

[0124] The YZ two-dimensional motion stage 23 realizes displacement adjustment movement in the (Y+) and (Y-) directions so that the detector A13 and the detector B14 are concentrically aligned with the Z axis;

[0125] Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction;

[0126] Place sample 5 between detector A13 and detector B14, and the actual distance is adjusted according to the signal strength;

[0127] An incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the central hole of detector A13, and is incident on sample 5, which is thick enough for electrons to penetrate. The electrons that pass through sample 5 are incident on the detection surface of detector B14, realizing the collection of bright field signal electrons 8 and dark field signal electrons 7;

[0128] The X-ray signal emitted from the surface of sample 5 is incident on the detection surface of detector A13 in the direction, realizing the signal collection of X-rays at different angles.

[0129] Working mode 4: Scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging mode

[0130] The device of the invention can realize scanning transmission electron beam bright field, dark field imaging and cathode fluorescence imaging mode. The detector A13 is replaced with a cathode fluorescence detector to receive the cathode fluorescence signal generated by the sample 5; the detector B14 realizes scanning transmission electron beam bright field and dark field imaging;

[0131] The process is as follows: the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance to achieve the overall movement of the YZ two-dimensional motion table 23 and its auxiliary mounting structure in the (X-) direction;

[0132] The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the direction;

[0133] The YZ two-dimensional motion stage 23 realizes displacement adjustment movement in the (Y+) and (Y-) directions so that the detector A13 and the detector B14 are concentrically aligned with the (Z)Z axis;

[0134] Rotate the R-axis reciprocating drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction; place the sample 5 between the detector A13 and the detector B14, and adjust the actual distance according to the signal strength;

[0135] The incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the center hole of the detector A13, and is incident on the sample 5. The electrons of the sample 5 can penetrate the thickness of the sample 5 and are incident on the detection surface of the detector B14, realizing the collection of the bright field signal electrons 8 and the dark field signal electrons 7;

[0136] The cathode fluorescence signal emitted from the surface of sample 5 is incident on the detection surface of detector A13 in the (Z+) direction, thereby collecting cathode fluorescence signals at different angles.

[0137] The above are only preferred embodiments of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed by the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A composite detector with multiple imaging modes, characterized in that: include: A detector body mounting beam, on which a YZ two-dimensional motion stage capable of performing X-axis displacement motion along the detector body mounting beam is mounted; A vacuum feedthrough sealing flange is fixed to the YZ two-dimensional motion stage and realizes displacement motion in the Y-axis and Z-axis directions under the drive of the YZ two-dimensional motion stage; a detector support arm, one end of which is fixed to the vacuum feedthrough sealing flange; The R-axis reciprocating rotation drive mechanism and the X2-axis drive mechanism are respectively fixed to the other end of the detector support arm; The detector A, signal amplifier A and shielding shell are fixed on the R-axis reciprocating rotation drive mechanism as an integral structure to achieve 0-360° reciprocating rotation of the R-axis; The detector B, signal amplifier B and shielding shell are fixed on the X2-axis drive mechanism as an integral structure to achieve reciprocating motion along the X-axis, and the signal detection surface of the detector B is always facing the Z+ direction; A multi-channel signal processor is fixed to the end of the YZ two-dimensional motion stage and performs circuit and signal communication through the vacuum feedthrough sealing flange; A detector sealing mounting flange is sleeved on the detector support arm and is used to be fixed to the working chamber; The compressible and torsionable metal bellows is connected between the vacuum feedthrough sealing flange and the detector sealing mounting flange and is used to provide deformation margins for compression, tension and torsion.

2. The multi-imaging mode composite detector according to claim 1, characterized in that: The detector body mounting beam is provided with a driving device for driving the YZ two-dimensional motion stage to perform X-axis displacement motion.

3. The multi-imaging mode composite detector according to claim 2, characterized in that: The driving device comprises: A driving motor is fixed on the detector body mounting beam; The lead screw is connected to the output end of the drive motor and is connected to the YZ two-dimensional motion table to drive the YZ two-dimensional motion table to perform X-axis displacement motion.

4. The multi-imaging mode composite detector according to claim 3, characterized in that: The driving device further comprises: The guide rail is arranged on the detector body mounting beam and is slidably connected to the YZ two-dimensional motion stage.

5. A multi-imaging mode composite detector according to any one of claims 1 to 4, characterized in that: The detectors A and B are particle detectors.

6. An imaging method using a composite detector with multiple imaging modes according to any one of claims 1 to 5, characterized in that: Capable of achieving one of the following four imaging modes: Scanning transmission electron beam bright field and dark field imaging modes; Scanning transmission electron beam bright field, dark field and backscattered electron imaging modes; Scanning transmission electron beam bright field, dark field imaging and elemental energy spectrum imaging modes; Scanning transmission electron beam bright field, dark field and cathodoluminescence imaging modes.

7. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field and dark field imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the X-direction; The X2-axis driving mechanism realizes the overall movement of the detector B, signal amplifier B and shielding shell in the X2-direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the Y+ and Y- directions, so that detectors A and B are concentrically aligned with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the Z+ direction; Place the sample on detector A; The incident electron beam with a certain energy is concentric with the Z axis and incident on the sample. The bright field signal electrons with a small angle to the Z axis pass through the central hole of detector A and are incident on the detection surface of detector B, realizing the collection of bright field signal electrons; Dark field signal electrons that form a large angle with the Z axis are incident on the annular detection surfaces of different diameters of detector A, thereby collecting dark field signal electrons at different angles.

8. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field and backscattered electron imaging modes are as follows: The YZ two-dimensional motion table moves as a whole in the X-direction; The X2-axis driving mechanism realizes the overall movement of the detector B, signal amplifier B and shielding shell in the X2-direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the Y+ and Y- directions, so that detectors A and B are concentrically aligned with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the Z-direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The backscattered electron signal emitted from the sample surface is incident on the annular detection surface of different diameters of detector A in the Z+ direction, realizing the signal collection of backscattered electrons at different angles.

9. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field imaging and element spectrum imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the X-direction; The X2-axis driving mechanism realizes the overall movement of the detector B, signal amplifier B and shielding shell in the X2-direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the Y+ and Y- directions, so that detectors A and B are concentrically aligned with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the Z-direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons that pass through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The X-ray signal emitted from the sample surface is incident on the detection surface of detector A in the Z+ direction, realizing the signal collection of X-rays at different angles.

10. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the X-direction; The X2-axis driving mechanism realizes the overall movement of the detector B, signal amplifier B and shielding shell in the X2-direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the Y+ and Y- directions, so that detectors A and B are concentrically aligned with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the Z-direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The cathode fluorescence signal emitted from the sample surface is incident on the detection surface of detector A in the Z+ direction, realizing the collection of cathode fluorescence signals at different angles.

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