Copper column pickup detection apparatus and detection method

Abstract

The application discloses a copper column pickup detection device and a detection method, which comprise a flexible feeding unit, a rotary pickup unit and a first detection unit arranged on the top of the flexible feeding unit, the flexible feeding unit is used for placing the copper column, and the first detection unit is used for taking a photo of the copper column for detection; the rotary pickup unit is arranged between the flexible feeding unit and the first detection unit and can move along the z-axis direction to pick up the copper column on the flexible feeding unit; a second detection unit is arranged on the rotary pickup unit and is used for taking a photo of the copper column picked up by the rotary pickup unit for detection; the application reduces the damage to the copper column through flexible feeding of the copper column; the first detection unit is used for detecting the first end surface of the copper column and determining the position of the copper column so as to pick up the copper column by the rotary pickup unit, and the second detection unit can take a photo of the second end surface of the copper column picked up by the rotary pickup unit for detection during the process of picking up the copper column, so that double-side detection of the copper column is realized and the defective rate of subsequent packaging products is reduced.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of semiconductor mounting, in particular to a copper column pickup detection device and a detection method. BACKGROUND

[0002] The copper column packaging mainly establishes a copper column-based connection between a chip and a packaging substrate, so as to realize electrical connection, physical support and good heat dissipation channels between the chip and an external circuit. Such a packaging technology plays a key role in the manufacturing of modern high-performance electronic devices, especially in the fields of integrated circuits and power devices.

[0003] The copper column is generally a cylindrical body with a hole in the middle, and the height and diameter thereof are determined according to specific packaging requirements; during the packaging process, there may be defective products in the copper column, and if the copper column with defects is used for packaging, the defects may cause unstable connection between the copper column and the chip or the substrate, increase the risk of poor contact, thereby affecting the overall reliability of the packaging, affecting the transmission efficiency and quality of signals, reducing the reliability and service life of electronic products, and the defects may cause an increase in the defective rate during the packaging process, affecting production efficiency and cost control. SUMMARY

[0004] In view of the above defects, the application provides a copper column pickup detection device, which detects the two surfaces of the copper column before packaging to ensure the integrity of the copper column and reduce the defective rate of packaging by adopting the following technical solutions.

[0005] The copper column pickup detection device comprises a flexible feeding unit and a first detection unit arranged at the top of the flexible feeding unit, and the flexible feeding unit is used for placing the copper column.

[0006] The first detection unit is used for photographing and detecting the first end surface of the copper column and determining the position of the copper column on the flexible feeding unit.

[0007] A rotating pickup unit is arranged between the flexible feeding unit and the first detection unit, can move in a horizontal plane, and can move the copper column on the flexible feeding unit along the z-axis direction.

[0008] A second detection unit is arranged, and the second detection unit is used for photographing and detecting the second end surface of the copper column picked up by the rotating pickup unit.

[0009] Preferably, the rotating pickup unit comprises a z-axis reciprocating mechanism and a pickup mechanism, an installation rack for installing the pickup mechanism is arranged on the z-axis reciprocating mechanism, and the z-axis reciprocating mechanism is used for driving the pickup mechanism to move.

[0010] Preferably, the picking mechanism comprises a rotating disc and a power component, the rotating disc is provided with a plurality of picking assemblies on the side wall in a circumferential direction, the power component is used for driving the rotating disc to rotate, and the picking assembly picks the copper column through vacuum adsorption.

[0011] Preferably, a rotary joint is further included, which is installed on the rotating picking unit and used for connecting the rotating picking unit with a vacuum generating device.

[0012] Preferably, the second detection unit is connected with the mounting frame, and the second detection unit is located at the top of the picking mechanism.

[0013] Preferably, the picking assembly comprises a suction nozzle and a guide component arranged at the extending end of the suction nozzle, and the suction nozzle is provided with a plurality of adsorption holes used for adsorbing the copper column.

[0014] Preferably, the suction nozzle is provided with an elastic member, and the suction nozzle can move along the axis in an extension and retraction mode.

[0015] The application further discloses a copper column detection method, comprising the copper column picking detection device and the following steps.

[0016] Feeding: adding the copper column into the flexible feeding unit;

[0017] Arranging: the flexible feeding unit arranges the copper column, so that the rotating picking unit picks the copper column;

[0018] First photographing detection: the first detection unit performs photographing detection on the first end surface of the copper column arranged by the flexible feeding unit, and determines the position of the copper column to be picked;

[0019] Copper column picking: the rotating picking unit sequentially picks the copper column determined by the first detection unit through rotation and movement;

[0020] Second photographing detection: the rotating picking unit flips the picked copper column, and the second detection unit sequentially performs photographing detection on the second end surface of the copper column picked by the rotating picking unit when the copper column passes below the second detection unit.

[0021] The application has the following beneficial effects:

[0022] The application can flexibly feed the copper column and reduce damage to the copper column; the first detection unit performs photographing detection on the first end surface of the copper column and determines the position of the copper column for the rotating picking unit to pick the copper column, and the second detection unit can perform photographing detection on the second end surface of the copper column picked by the rotating picking unit during the picking process, so that double-side detection of the copper column is realized, and the defective rate of subsequent packaging products is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a structural schematic diagram of the present application;

[0024] Figure 2 is a pickup unit structural schematic diagram of the present application;

[0025] Figure 3 is a left view of the present application; Figure 2

[0026] Figure 4 is a rear view of the present application; Figure 2

[0027] Figure 5 is an enlarged view of B in the present application; Figure 4 in the figure:

[0028]

[0029] 1, flexible feeding unit, 11, hopper, 12, tray, 13, vibration device;

[0030] 2, rotating pickup unit, 3, first detection unit, 4, second detection unit, 5, z-axis reciprocating mechanism

[0031] 6, pickup mechanism, 61, mounting frame, 62, rotating disc, 63, power component;

[0032] 7, rotating joint;

[0033] 8, pickup assembly, 81, suction nozzle, 82, guide component, 83, elastic member. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings of the present application. Obviously, the embodiments described in the present application are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] For further detailed description of the present application, see Figures 1 to 5

[0036] ​​​​The copper column pickup detection device comprises a flexible feeding unit 1, a rotating pickup unit 2, and a first detection unit 3 arranged at the top of the flexible feeding unit 1, wherein the first detection unit is used for taking pictures of the first end face of the copper column to determine the position of the copper column on the flexible feeding unit; the flexible feeding device comprises a hopper 11 and a copper column placing mechanism, the first detection unit 3 can adjust its position to be opposite to the copper column placing mechanism, the hopper 11 is used to provide copper columns to the copper column placing mechanism, the copper column placing mechanism is used to place the copper columns, and the first detection unit 3 is used to take pictures of the copper columns to detect the integrity of the first end face (upper surface) of the copper columns; the rotating pickup unit 2 is arranged between the flexible feeding unit 1 and the first detection unit 3, can move in the horizontal plane (x-axis and y-axis directions), and can move along the z-axis direction to pick up the copper columns on the flexible feeding unit 1; for example, the rotating pickup unit 2 can be realized by an x-axis and y-axis moving module; the rotating pickup unit 2 is used to drive the rotating pickup unit 2 to move to pick up the copper columns at the determined position or to mount the picked-up copper columns; a second detection unit 4 is arranged on the rotating pickup unit 2, the second detection unit 4 is used to take pictures of the copper columns picked up by the rotating pickup unit 2 to detect the second end face (lower surface) of the copper columns and determine the position of the picked-up copper columns on the rotating pickup unit 2, so as to avoid the deviation of the position of the picked-up copper columns and compensate for the deviation when the rotating pickup unit 2 mounts the copper columns; by taking pictures of the two end faces of the copper columns respectively, the integrity of the whole copper column is ensured, and the defective rate is reduced.

[0037] In the embodiment, the rotating pickup unit 2 comprises a z-axis reciprocating mechanism 5 and a pickup mechanism 6; the z-axis reciprocating mechanism 5 can be a lead screw mechanism or an air cylinder; an installation frame 61 for installing the pickup mechanism 6 is arranged on the z-axis reciprocating mechanism 5, the z-axis reciprocating mechanism 5 drives the installation frame 61 to move, and then drives the pickup mechanism 6 to move along the z-axis direction, so that the pickup mechanism 6 picks up the copper columns placed by the copper column placing mechanism.

[0038] It can be understood that, when picking up the copper column, the pickup mechanism 6 picks up the copper column by contacting the first end face (upper surface) of the copper column, which can be in the form of suction or grasping.

[0039] In combination Figure 3 , the pickup mechanism 6 comprises a rotating disc 62, a power component 63, and a plurality of pickup assemblies 8 uniformly distributed along the circumferential direction of the rotating disc 62 and used for picking up the copper columns; the power component can be a motor; in the embodiment, the pickup assemblies 8 are uniformly distributed on the outer sidewall of the rotating disc 62 and extend outward, and the pickup assemblies 8 pick up the copper columns in the form of vacuum adsorption; the number of the pickup assemblies 8 can be adjusted as required; for example, Figure 4, the embodiment described pickup assembly 8 for 12, the angle between adjacent pickup assembly 8 is A; by the power component 63 drive rotating disc 62 each corresponding rotation A, so that the corresponding pickup assembly 8 rotation to pick up position (perpendicular to the flexible upper material unit) to copper column adsorption pickup.

[0040] In combination Figure 5 , the pickup assembly 8 includes a suction nozzle 81 and a guide component 82, the guide component 82 can be a guide needle, the guide component 82 is provided on the outer end of the suction nozzle 81, for cooperation with the hole in the middle of the copper column; the suction nozzle 81 is provided with a plurality of suction holes for adsorbing the copper column, the suction hole can be distributed around the guide component 82; wherein, the guide component 82 is provided with a guide part for guiding itself to insert into the hole in the middle of the copper column, which plays a guiding role; the suction nozzle 81 is provided with an elastic element 83, the suction nozzle 81 can move in the axial direction of itself, in this embodiment, the elastic element 83 can be a spring, to protect the pickup assembly 8; the elastic element 83 can be sleeved on the outside of the suction nozzle 81, but not limited to this.

[0041] In this embodiment, the second detection unit 4 is connected with the mounting frame 61, and the second detection unit 4 is located at the top of the pickup mechanism 6. The rotating pickup unit 2 drives the picked copper column to rotate, and the second detection unit 4 can take a photo of each pickup assembly 8 passing below it to detect the second end surface (lower surface) of the copper column picked by the pickup assembly 8.

[0042] The copper column placing mechanism includes a tray 12 and a vibrating device 13 supporting the tray 12, the tray 12 is located on one side of the discharge end of the hopper 11, and the tray 12 is detachably connected to the top of the vibrating device 13. Among them, the tray 12 is distributed with a placing hole for placing the copper column, and the copper column is placed into the placing hole by driving the tray 12 to vibrate through the vibrating device 13.

[0043] The first detection unit 3 includes a bracket and a fixed plate, the fixed plate is provided with a first camera assembly and a first light source; the fixed plate can adjust the position on the bracket to ensure correspondence with the flexible upper material unit; the second detection unit includes a connecting plate, and a second camera assembly and a second light source provided on the connecting plate.

[0044] In some embodiments, a rotary joint 7 is further included, the rotary joint 7 is installed on the rotating pickup unit 2; the rotary joint 7 is used to connect the pickup assembly 8 with the vacuum generating device, while the power component 63 drives the rotating disc 62 to rotate and pick up the copper column, the rotary joint 7 can ensure that the vacuum generating device continuously provides negative pressure vacuum for each pickup assembly 8; the rotary joint 7 can be a gas slip ring.

[0045] The application also provides a copper column detection method, which adopts the copper column picking detection device and further includes the following steps.

[0046] Feeding: copper columns are added to the flexible feeding unit 1, and the copper columns are provided to the copper column placing mechanism through the hopper 11.

[0047] Placing: the flexible feeding unit 1 places the copper columns for the rotating picking unit 2 to pick up the copper columns; the copper column placing mechanism can place the copper columns in the placing holes on the tray 12 for the rotating picking unit 2 to pick up the copper columns in the placing holes.

[0048] First photographing detection: the first detection unit 3 photographs and detects the first end surface (upper surface) of the copper column placed by the flexible feeding unit 1, and determines the position of the copper column to be picked up; the first detection unit 3 photographs the copper columns in the tray 12, thereby completing the completeness detection of the first end surface (upper surface) of the copper column, and determining the positions of the 12 copper columns on the tray 12, so that the picking assemblies 8 pick up the copper columns in turn.

[0049] Copper column picking: the rotating picking unit 2 picks up the copper columns in the determined positions in the flexible feeding unit 1 by rotating and moving to adsorb the first end surface (upper surface) of the copper column; when picking up the copper column, the z-axis reciprocating mechanism 5 drives the picking mechanism 6 to move close to the tray 12, the guide component 82 is inserted into the hole in the middle of the copper column to adsorb and pick up the corresponding copper column, the picking mechanism 6 is driven to move away from the tray 12 again, the power component 63 drives the rotating disc 62 to rotate by an angle A to replace the next picking assembly 8 to pick up the copper column again.

[0050] Second photographing detection: the second detection unit 4 photographs and detects the second end surface of the copper column picked up by the rotating picking unit 2 in turn. During the rotating picking of the copper column, the second detection unit 4 can photograph the second end surface (lower surface) of the copper column picked up by each picking assembly 8 below it, detect the completeness of the second end surface of the copper column, and thus realize the double-side detection of the copper column.

Claims

1. A copper pillar picking and detection device, characterized in that: The device includes a flexible feeding unit and a first detection unit located on top of the flexible feeding unit. The flexible feeding unit is used to place copper pillars. The flexible feeding unit includes a tray with placement holes for placing copper pillars distributed inside the tray. A vibration device drives the tray to vibrate, placing the copper pillars into the placement holes. The first detection unit is used to take pictures of the first end face of the copper pillar placed by the flexible feeding unit to detect the integrity of the first end face and to determine the position of the copper pillar on the flexible feeding unit. A rotating pickup unit is disposed between the flexible feeding unit and the first detection unit. It can move in the horizontal plane and move along the z-axis to pick up the copper pillar on the flexible feeding unit. The second detection unit is used to photograph and detect the integrity of the second end face of the copper column picked up by the rotating pickup unit, and to determine the position of the picked-up copper column on the rotating pickup unit; the rotating pickup unit is equipped with the second detection unit. The rotary pickup unit includes a z-axis reciprocating mechanism and a pickup mechanism. The z-axis reciprocating mechanism is provided with a mounting bracket for mounting the pickup mechanism. The z-axis reciprocating mechanism drives the mounting bracket, thereby driving the pickup mechanism to move as a whole to pick up the copper column. The second detection unit is connected to the mounting bracket and is located at the top of the pickup mechanism; the rotating pickup unit rotates in a vertical plane; the pickup mechanism includes a rotating disk, and a plurality of pickup components are distributed circumferentially on the side wall of the rotating disk.

2. The copper pillar picking and detection device according to claim 1, characterized in that: The picking mechanism also includes a power component for driving the rotating disk to rotate, and the picking assembly picks up the copper column by vacuum adsorption.

3. The copper pillar picking and detection device according to claim 1, characterized in that: It also includes a rotary joint, which is mounted on the rotary pickup unit and is used to connect the rotary pickup unit to the vacuum generator.

4. The copper pillar picking and detection device according to claim 2, characterized in that: The pickup assembly includes a suction nozzle and a guide component provided at the extended end of the suction nozzle. The suction nozzle is provided with a plurality of suction holes for adsorbing copper pillars.

5. The copper pillar picking and detection device according to claim 4, characterized in that: The suction nozzle is provided with an elastic element, and the suction nozzle can extend and retract along its own axis.

6. A method for detecting copper pillars, characterized in that: The copper pillar picking and detection device according to any one of claims 1 to 5 further includes the following steps: Feeding: Add copper pillars to the flexible feeding unit; Material placement: The flexible feeding unit places the copper pillars so that the rotating picking unit can pick them up; First photo inspection: The first inspection unit takes a photo of the first end face of the copper column placed by the flexible feeding unit and determines the position of the copper column to be picked up. Copper pillar picking: The rotating picking unit picks up the copper pillars determined by the first detection unit in sequence by rotating and moving; Second photo inspection: The rotating pickup unit flips the picked-up copper column. When the copper column passes under the second detection unit, the second detection unit takes photos of the second end face of the copper column picked up by the rotating pickup unit in sequence.

Images