A silicon carbide slurry defoaming device

Abstract

The present invention relates to the technical field of slurry defoaming, and specifically provides a defoaming device for silicon carbide slurry, including: a box body, a slurry bucket, a vacuum pumping mechanism, a sealing and locking mechanism, and a stirring-assisted defoaming mechanism. The present invention defoams the silicon carbide slurry by cooperating the vacuum pumping mechanism with the stirring-assisted defoaming mechanism, achieving the effect of breaking large bubbles into smaller bubbles by stirring during the vacuum defoaming process, and the smaller bubbles expand and float to the liquid surface to burst in a decompression environment. At the same time, it ensures the uniform distribution of the slurry components, avoids the occurrence of high-concentration bubbles or particle agglomeration in local areas, and a puncturing component for puncturing the bubbles floating on the upper surface of the slurry is also provided on the stirring-assisted defoaming mechanism, thereby more effectively removing the bubbles in the silicon carbide slurry and improving the defoaming effect and efficiency of the silicon carbide slurry.

Description

Technical Field

[0001] The present invention relates to the technical field of slurry defoaming, and specifically provides a defoaming device for silicon carbide slurry. Background Art

[0002] Silicon carbide slurry is a mixture composed of silicon carbide particles, a dispersion medium, and corresponding additives, and is widely used in fields such as semiconductor manufacturing, advanced ceramics, grinding and polishing, etc. After the silicon carbide slurry is mixed and prepared, it needs to be defoamed to avoid the existing bubbles affecting the quality and performance of the final product.

[0003] Currently, the most commonly used defoaming technology is vacuum defoaming. By placing a container filled with silicon carbide slurry in a vacuum environment, the environmental pressure is reduced to cause the gas dissolved in the slurry to expand and form bubbles, and these bubbles then rise to the surface and burst, thereby achieving the defoaming effect.

[0004] However, when silicon carbide slurry is defoamed by vacuum, problems such as rapid expansion of bubbles but failure to burst in time due to improper vacuum pumping, and difficulty for large bubbles to float to the upper surface of the silicon carbide slurry are likely to occur. At the same time, during the vacuum defoaming process, it is also difficult to quickly remove the bubbles in the silicon carbide slurry due to the appearance of high-concentration bubbles or particle agglomeration phenomena in local areas; secondly, the sealing performance during the vacuum defoaming of silicon carbide slurry needs to be improved, and insufficient sealing performance will also affect the defoaming effect of the silicon carbide slurry. Summary of the Invention

[0005] In view of the above problems, the embodiments of the present invention provide a defoaming device for silicon carbide slurry to solve the technical problems in the related art.

[0006] To achieve the above object, the embodiments of the present invention provide the following technical solution: A defoaming device for silicon carbide slurry, comprising: a box body, a slurry barrel, and a vacuum pumping mechanism. The outer wall of the box body is provided with a box cover through a lifting and locking group, and the box cover and the top of the box body are locked and sealed through a sealing and locking mechanism. The vacuum pumping mechanism is connected to the box body through a pipeline to evacuate the inside of the box body. An observation window and a barometric pressure detector are further provided on the top of the box cover. The vacuum pumping mechanism is an existing vacuum pump, and the air extraction port of the vacuum pump is connected to the box body through a pipeline. An exhaust valve is further installed on the outer wall of the box body. The slurry barrel is placed inside the box body, and a matching insertion and limiting group is installed between the inner wall of the box body and the outer wall of the slurry barrel; a stirring and auxiliary defoaming mechanism is installed in the middle of the lower end surface of the box cover.

[0007] In a possible implementation manner, two lifting handles are hinged near the upper end of the inner wall of the slurry barrel, and two supporting blocks are symmetrically arranged along the circumferential direction of the inner wall of the slurry barrel. The supporting blocks are used to support the lifting handles in a horizontal state.

[0008] In a possible implementation manner, the plugging and limiting group includes U-shaped clamping plates installed on the inner wall of the box body and evenly arranged along its circumference, and T-shaped inserts installed on the outer wall of the slurry barrel and evenly arranged along its circumference.

[0009] In a possible implementation manner, the lifting and locking group includes a guide rod rotatably connected to the outer wall of the box body. A lifting rod that slides up and down is sleeved on the guide rod. The lifting rod is Z-shaped. The horizontal section on the upper side of the lifting rod is slidably connected to the side wall of the box cover. A plugging component is installed on the lifting rod and is plugged and locked with the guide rod when the lifting rod moves to the upper end of the guide rod.

[0010] In a possible implementation manner, the plugging component includes a jack opened at the upper end of the guide rod. One end of the lifting rod sleeved on the guide rod is provided with a spring groove. A plug rod is slidably connected in the spring groove. A return spring sleeved on the plug rod is installed between the plug rod and the inner wall of the spring groove.

[0011] The sealing and locking mechanism includes an annular protrusion installed on the top of the box body. An annular groove matched with the annular protrusion is opened at the bottom of the box cover. A rubber sealing ring is installed on the annular groove. A fixing ring with a vertical cross-section in an L shape is installed near the edge of the lower end surface of the box cover. Card entrances are opened on the fixing ring and are evenly arranged along its circumference. A pressing-down group for driving the fixing ring to move downward to tightly seal the box cover and the top of the box body is installed on the outer wall of the box body.

[0012] A pressing group for pressing down and tightly pressing the slurry barrel is also installed at the bottom of the box cover. When the pressing-down group and the fixing ring cooperate to drive the box cover to move downward to seal between the box body and the box cover, the pressing group integrally presses and locks the slurry barrel.

[0013] In a possible implementation manner, the pressing-down group includes a rotating ring sleeved on the outer wall of the box body. The rotating ring is connected to the outer wall of the box body in a threaded cooperation manner. Installation grooves are opened on the outer wall of the box body and are evenly arranged along its circumference. Swing plates are hinged in the installation grooves through torsion spring rods. The swing plates correspond to the card entrances one by one. A lifting ring is rotatably connected to the upper end of the rotating ring. Clamping blocks corresponding to the installation grooves one by one are installed on the inner wall of the lifting ring. The clamping blocks are slidably connected up and down with the installation grooves. A top-pushing column for pushing the end of the swing plate located in the installation groove to move upward is installed on the top of the clamping block.

[0014] In a possible implementation manner, the pressing group includes a pressing ring. The top of the pressing ring is connected to the box cover through connecting rods evenly arranged along its circumference. The inner diameter of the pressing ring is larger than the outer diameter of the slurry barrel.

[0015] The stirring and auxiliary defoaming mechanism includes a stirring shaft and a stirring component. A puncturing component for puncturing the bubbles on the top of the silicon carbide slurry in the slurry barrel is also installed on the stirring shaft. A driving motor for driving the stirring shaft is installed at the bottom of the box cover.

[0016] In a possible implementation manner, the stirring assembly includes a plurality of V-shaped frames, both ends of the V-shaped frames are installed on the stirring shaft, and the plurality of V-shaped frames are arranged axially along the stirring shaft and staggered circumferentially along the stirring shaft.

[0017] In a possible implementation manner, the puncturing assembly includes a floating ring slidably connected up and down on the stirring shaft by spline fitting. A deflector is installed on the outer ring surface of the floating ring, puncturing needles are uniformly arranged on the deflector, and a supplementary puncturing member is installed at one end of the deflector away from the floating ring.

[0018] In a possible implementation manner, the supplementary puncturing member includes a rotating plate hinged to the end of the deflector by a torsion spring rod, and puncturing needles are also installed on the rotating plate.

[0019] One or more of the above technical solutions in the embodiments of the present invention have at least the following beneficial effects: 1. The present invention performs defoaming treatment on the silicon carbide slurry by cooperating the vacuum pumping mechanism with the stirring-assisted defoaming mechanism, realizing the effect of breaking large bubbles into smaller bubbles by stirring during the vacuum defoaming process, and the small bubbles expand and float to the liquid surface to burst under the reduced-pressure environment. At the same time, it ensures the uniform distribution of the slurry components, avoids the appearance of high-concentration bubbles or particle agglomeration in local areas, and a puncturing assembly for puncturing the bubbles floating on the upper surface of the slurry is also provided on the stirring-assisted defoaming mechanism, thereby more effectively removing the bubbles in the silicon carbide slurry and improving the defoaming effect and efficiency of the silicon carbide slurry.

[0020] 2. The present invention efficiently seals and locks the box body and the box cover through the sealing and locking mechanism, and at the same time integrally presses and locks the slurry barrel through the pressing group, improving the overall sealing performance of the device. At the same time, it avoids the movement of the slurry barrel when the stirring-assisted defoaming mechanism stirs the slurry, and further improves the defoaming effect of the silicon carbide slurry.

[0021] 3. The present invention further compresses the rubber sealing ring on the box cover and the annular protrusion through the sealing and locking mechanism, thereby improving the sealing effect between the box body and the box cover, and avoiding leakage during vacuum pumping in the box body to defoam the slurry, which affects the defoaming effect of the slurry. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0023] Figure 1 is the overall three-dimensional structure schematic diagram of the present invention.

[0024] Figure 2 It is a schematic three-dimensional structure diagram of the slurry bucket and the insertion limit group of the present invention.

[0025] Figure 3 It is a right-side cross-sectional view of the present invention.

[0026] Figure 4 It is Figure 3 A partial enlarged schematic view of part A of

[0027] Figure 5 It is Figure 3 A partial enlarged schematic view of part B of

[0028] Figure 6 It is Figure 3 A partial enlarged schematic view of part C of

[0029] Figure 7 It is a top cross-sectional view of the slurry bucket, T-shaped insert, C-shaped clamping plate and box body of the present invention.

[0030] Reference numerals: 1, box body; 2, slurry bucket; 20, insertion limit group; 201, C-shaped clamping plate; 202, T-shaped insert; 21, lifting handle; 22, supporting block; 3, vacuum pumping mechanism; 4, lifting locking group; 4, guide rod; 41, lifting rod; 42, insertion assembly; 420, insertion hole; 421, spring groove; 422, insertion rod; 423, return spring; 5, box cover; 6, sealing and locking mechanism; 60, annular protrusion; 62, rubber sealing ring; 63, fixing ring; 64, card entry; 65, pressing group; 650, rotating ring; 651, installation groove; 652, swinging plate; 653, lifting ring; 654, clamping block; 655, pushing column; 66, pressing group; 660, pressing ring; 661, connecting rod; 7, observation window; 8, air pressure detector; 9, stirring and auxiliary defoaming mechanism; 90, stirring shaft; 91, stirring assembly; 910, V-shaped frame; 92, puncturing assembly; 920, floating ring; 921, dialing plate; 922, puncturing needle; 923, rotating plate; 93, driving motor. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] In order to enable those in the technical field to better understand the solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] Refer toFigure 1 And Figure 2 , a silicon carbide slurry defoaming device, comprising: a box body 1, a slurry bucket 2 and a vacuum pumping mechanism 3. The outer wall of the box body 1 is provided with a box cover 5 through a lifting and locking group 4. The box cover 5 and the top of the box body 1 are tightly locked and sealed through a sealing and locking mechanism 6. The vacuum pumping mechanism 3 is communicated with the box body 1 through a pipeline to pump vacuum inside the box body 1. The top of the box cover 5 is also provided with an observation window 7 and a barometric pressure detector 8.

[0034] It should be noted that the vacuum pumping mechanism 3 is an existing vacuum pump. The air extraction port of the vacuum pump is connected to the box body 1 through a pipeline, and an exhaust valve (not shown in the figure) is also installed on the outer wall of the box body 1.

[0035] Refer to Figure 1 , Figure 2 And Figure 3 , the slurry bucket 2 is placed inside the box body 1, and a matching insertion and limit group 20 is installed between the inner wall of the box body 1 and the outer wall of the slurry bucket 2; a stirring and auxiliary defoaming mechanism 9 is installed in the middle of the lower end face of the box cover 5. The insertion and limit group 20 is used to limit the circumferential movement of the placed slurry bucket 2 to prevent the slurry bucket 2 from moving when the stirring and auxiliary defoaming mechanism 9 stirs the slurry.

[0036] Refer to Figure 2 , two lifting handles 21 are hinged near the upper end of the inner wall of the slurry bucket 2. Two supporting blocks 22 are symmetrically arranged along the circumference of the inner wall of the slurry bucket 2. The supporting blocks 22 are used to support the lifting handles 21 in a horizontal state, and the built-in lifting handles 21 are for facilitating the limitation of the slurry bucket 2 from the outside of the slurry bucket 2.

[0037] Refer to Figure 2 , Figure 3 And Figure 7 , the insertion and limit group 20 includes U-shaped clamping plates 201 uniformly arranged along the circumference of the inner wall of the box body 1, and T-shaped insertion bars 202 uniformly arranged along the circumference of the outer wall of the slurry bucket 2. When the slurry bucket 2 is placed inside the box body 1, the vertical section of the T-shaped insertion bar 202 is inserted into the corresponding U-shaped clamping plate 201.

[0038] Refer to Figure 1 And Figure 3 , the lifting and locking group 4 includes a guide rod 40 rotatably connected to the outer wall of the box body 1. A lifting rod 41 that slides up and down is sleeved on the guide rod 40. The lifting rod 41 is Z-shaped. The horizontal section on the upper side of the lifting rod 41 is slidably connected to the side wall of the box cover 5. An insertion assembly 42 that is inserted and locked with the guide rod 40 when the lifting rod 41 moves to the upper end of the guide rod 40 is installed on the lifting rod 41.

[0039] Refer to Figure 1 , Figure 3 And Figure 6, the plug-in component 42 includes a jack 420 opened at the upper end of the guide rod 40. One end of the lifting rod 41 sleeved on the guide rod 40 is provided with a spring groove 421. A plug rod 422 is slidably connected in the spring groove 421. A return spring 423 sleeved on the plug rod 422 is installed between the plug rod 422 and the inner wall of the spring groove 421.

[0040] When the box body 1 is in an open state, at this time, the lifting rod 41 moves to the upper end of the guide rod 40, the plug rod 422 is inserted into the jack 420, and then the guide rod 40 is manually driven to rotate 90 degrees, so as to drive the box cover 5 and the stirring auxiliary defoaming mechanism 9 to move from above the box body 1, preventing the stirring auxiliary defoaming mechanism 9 from hindering the taking and placing of the slurry bucket 2.

[0041] When the box body 1 needs to be closed, rotate the guide rod 40 to move the box cover 5 and the stirring auxiliary defoaming mechanism 9 above the box body 1, then pull the plug rod 422 to take the plug rod 422 out of the jack 420. At this time, the return spring 423 is in a compressed state, and then move the lifting rod 41 downward to cover the box cover 5 on the box body 1.

[0042] Refer to Figure 1 、 Figure 3 and Figure 4 , the sealing and locking mechanism 6 includes an annular protrusion 60 installed on the top of the box body 1. An annular groove matching with the annular protrusion 60 is opened at the bottom of the box cover 5. A rubber sealing ring 62 is installed on the annular groove. A fixing ring 63 with a vertical cross-section in an L shape is installed near the edge of the lower end surface of the box cover 5. The fixing ring 63 is coaxial with the box cover 5 and is located outside the box body 1. Card entrances 64 are opened on the fixing ring 63 and are uniformly arranged along its circumferential direction. A downward pressing group 65 for driving the fixing ring 63 to move downward to tightly pull and seal the box cover 5 and the top of the box body 1 is installed on the outer wall of the box body 1.

[0043] When the box cover 5 moves downward, the annular protrusion 60 enters the annular groove and abuts against the rubber sealing ring 62, and then the box cover 5 is driven to move downward through the cooperation of the downward pressing group 65 and the fixing ring 63, so that the rubber sealing ring 62 on the annular groove abuts tightly against the annular protrusion 60, improving the sealing effect between the box body 1 and the box cover 5, and avoiding leakage during vacuum pumping in the box body 1 for defoaming the slurry, which affects the defoaming effect of the slurry.

[0044] Refer to Figure 1 、 Figure 3 and Figure 4 , a pressing group 66 for pressing and tightly abutting the slurry bucket 2 is also installed at the bottom of the box cover 5. When the downward pressing group 65 and the fixing ring 63 cooperate to drive the box cover 5 to move downward to seal between the box body 1 and the box cover 5, the pressing group 66 integrally presses and locks the slurry bucket 2.

[0045] Refer to Figure 1 、 Figure 3 and​ , the pressing group 65 includes a rotating ring 650 sleeved on the outer wall of the box body 1. The rotating ring 650 is connected to the outer wall of the box body 1 in a threaded fit manner. The outer wall of the box body 1 is provided with mounting grooves 651 evenly arranged along its circumference. A swing plate 652 is hinged in the mounting groove 651 through a torsion spring rod. The swing plates 652 correspond to the card entrances 64 one by one. The upper end of the rotating ring 650 is rotatably connected with a lifting ring 653. The inner wall of the lifting ring 653 is provided with clamping blocks 654 corresponding to the mounting grooves 651 one by one. The clamping blocks 654 are slidably connected up and down with the mounting grooves 651. The top of the clamping block 654 is provided with a top push column 655 that pushes one end of the swing plate 652 located in the mounting groove 651 upward.

[0046] When the box cover 5 moves downward, the card entrance 64 is aligned with the swing plate 652 up and down, so as to facilitate the box cover 5 to cover the top of the box body 1. Then, the box cover 5 is rotated by a certain angle, so that one end of the swing plate 652 located outside the mounting groove 651 enters between the vertical section and the horizontal section of the fixed ring 63. After that, the rotating ring 650 is manually rotated. The rotating ring 650 rotates along the outer wall of the box body 1 and moves upward at the same time through the threaded fit with the outer wall of the box body 1. The rotating ring 650 drives the lifting ring 653, the clamping block 654 and the top push column 655 to move upward. The top push column 655 pushes one end of the swing plate 652 located in the mounting groove 651 upward. The swing plate 652 rotates along its hinge point. Then, one end of the swing plate 652 located outside the mounting groove 651 moves downward and presses the horizontal section of the fixed ring 63, so that the fixed ring 63 drives the box cover 5 to move downward until the rubber sealing ring 62 on the box cover 5 further abuts against the annular protrusion 60, thereby improving the sealing effect between the box body 1 and the box cover 5 and avoiding leakage during the evacuation of the box body 1 to defoam the slurry, which affects the defoaming effect of the slurry.

[0047] Refer to ​ And ​ , the pressing group 66 includes a pressing ring 660. The top of the pressing ring 660 is connected to the box cover 5 through connecting rods 661 evenly arranged along its circumference. The inner diameter of the pressing ring 660 is larger than the outer diameter of the slurry bucket 2. The pressing ring 660 moves downward with the box cover 5 and presses against the top of the T-shaped insert 202. That is, in cooperation with the plugging and limiting group 20, the slurry bucket 2 is limited in the circumferential and up-and-down directions, so as to avoid the movement of the slurry bucket 2 when the stirring and auxiliary defoaming mechanism 9 stirs the slurry in the slurry bucket 2, which affects the defoaming effect of the slurry.

[0048] Refer to ​ And ​, the stirring-assisted defoaming mechanism 9 includes a stirring shaft 90 and a stirring assembly 91. A puncturing assembly 92 for puncturing the bubbles on the top of the silicon carbide slurry in the slurry bucket 2 is also installed on the stirring shaft 90. The puncturing assembly 92 is located above the stirring assembly 91. A driving motor 93 for driving the stirring shaft 90 is installed at the bottom of the box cover 5, and the output shaft of the driving motor 93 is connected to the upper end of the stirring shaft 90.

[0049] When the stirring shaft 90 drives the stirring assembly 91 to rotate, the stirring assembly 91 stirs the slurry, which can help break large bubbles and disperse them into smaller bubbles, making these small bubbles easier to expand and float to the liquid surface to burst in a reduced-pressure environment, further improving the defoaming efficiency of the slurry.

[0050] Refer to ​ , the stirring assembly 91 includes a plurality of V-shaped frames 910. Both ends of the V-shaped frames 910 are installed on the stirring shaft 90. The plurality of V-shaped frames 910 are arranged axially along the stirring shaft 90 and are staggered circumferentially along the stirring shaft 90. When the stirring shaft 90 drives the stirring assembly 91 to rotate, the V-shaped frames 910 stir the slurry, which can help break large bubbles and disperse them into smaller bubbles, making these small bubbles easier to expand and float to the liquid surface to burst in a reduced-pressure environment of 660, further improving the defoaming efficiency of the slurry, and stirring helps to ensure the uniform distribution of the slurry components and avoid the phenomenon of high-concentration bubbles or particle agglomeration in local areas.

[0051] Refer to ​ 、 ​ And ​ , the puncturing assembly 92 includes a floating ring 920 that is slidably connected up and down to the stirring shaft 90 in a spline fit manner. A dial plate 921 is installed on the outer ring surface of the floating ring 920. Uniformly arranged puncturing needles 922 are installed on the dial plate 921. A supplementary puncturing member is installed at one end of the dial plate 921 away from the floating ring 920. The supplementary puncturing member includes a rotating plate 923 that is hinged to the end of the dial plate 921 through a torsion spring rod, and puncturing needles 922 are also installed on the rotating plate 923.

[0052] When the stirring shaft 90 is inserted into the slurry and the rotating plate 923 contacts the lifting handle 21, the rotating plate 923 rotates along its hinge point so that the rotating plate 923 can enter the slurry bucket 2. When the floating ring 920 contacts the top of the slurry, due to the light overall mass of the floating ring 920, the dial plate 92, the puncturing needles 922 and the rotating plate 923, the whole will move upward relative to the stirring shaft 90 due to the upward resistance given by the slurry, so that when the dial plate 921 and the rotating plate 923 rotate with the stirring shaft 90 later, the puncturing needles 922 will puncture the bubbles floating on the top of the slurry, further improving the defoaming efficiency of the slurry.

[0053] Refer to ​, during specific operation, first place the slurry bucket 2 inside the box body 1. A matching plug-in limiting group 20 is installed between the inner wall of the box body 1 and the outer wall of the slurry bucket 2. The plug-in limiting group 20 is used to limit the circumferential movement of the placed slurry bucket 2.

[0054] Next, drive the box cover 5 to move downward through the lifting and locking group 4. The box cover 5 drives the stirring and auxiliary defoaming mechanism 9 to insert into the slurry bucket 2. When the puncturing component 92 contacts the top of the slurry, it is located at the top of the slurry under the upward resistance given by the slurry until the annular protrusion 60 enters the annular groove and abuts against the rubber sealing ring 62.

[0055] Then, cooperate with the pressing group 65 and the fixing ring 63 to drive the box cover 5 to move downward to seal between the box body 1 and the box cover 5, so that the rubber sealing ring 62 on the annular groove further abuts tightly against the annular protrusion 60, improving the sealing effect between the box body 1 and the box cover 5. At the same time, the pressing group 66 at the bottom of the box cover 5 integrally presses and locks the slurry bucket 2.

[0056] Finally, the vacuum pumping mechanism 3 evacuates the slurry in the box body 1 to remove bubbles, and at the same time the stirring and auxiliary defoaming mechanism 9 stirs the slurry to help break large bubbles and disperse them into smaller bubbles, making these small bubbles easier to expand and float to the liquid surface to burst in a decompression environment, further improving the defoaming efficiency and effect of the slurry. And the puncturing component 92 also punctures the small bubbles floating on the top of the slurry, further improving the defoaming efficiency of the slurry.

[0057] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0058] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "connected", "installed", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0059] The embodiments of this specific implementation manner are all preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present invention shall be covered within the protection scope of the present invention.

Claims

1. A silicon carbide slurry defoaming device, characterized in that, Including: A box body, a slurry bucket and a vacuum pumping mechanism. The outer wall of the box body is provided with a box cover through a lifting and locking group. The box cover and the top of the box body are locked and sealed through a sealing and locking mechanism. The vacuum pumping mechanism is communicated with the box body through a pipeline to pump the air inside the box body; The slurry bucket is placed inside the box body. A matching insertion and limit group is installed between the inner wall of the box body and the outer wall of the slurry bucket. The insertion and limit group circumferentially limits the slurry bucket; In the middle of the lower end face of the box cover, a stirring and auxiliary defoaming mechanism is installed; The sealing and locking mechanism includes an annular protrusion installed on the top of the box body. An annular groove matching with the annular protrusion is opened at the bottom of the box cover. A rubber sealing ring is installed on the annular groove. A fixing ring with an L-shaped vertical section is installed near the edge of the lower end face of the box cover. Card slots are opened on the fixing ring and arranged uniformly along its circumference. A pressing group is installed on the outer wall of the box body; The pressing group includes a rotating ring sleeved on the outer wall of the box body. The rotating ring is threadedly connected with the outer wall of the box body. Installation grooves are opened on the outer wall of the box body and arranged uniformly along its circumference. A swing plate is hinged in the installation groove through a torsion spring rod. The swing plates correspond to the card slots one by one. The upper end of the rotating ring is rotatably connected with a lifting ring. A clamping block corresponding to the installation groove one by one is installed on the inner wall of the lifting ring. The clamping block is slidably connected with the installation groove up and down. A top push column for pushing the end of the swing plate located in the installation groove upward is installed on the top of the clamping block; A pressing group is also installed at the bottom of the box cover. The pressing group includes a pressing ring. The top of the pressing ring is connected with the box cover through connecting rods arranged uniformly along its circumference. The inner diameter of the pressing ring is larger than the outer diameter of the slurry bucket; When the pressing group and the fixing ring cooperate to drive the box cover to move downward to seal between the box body and the box cover, the pressing ring moves downward with the box cover and presses against the top of the insertion and limit group, so that the slurry bucket is limited in the up and down direction; The stirring and auxiliary defoaming mechanism includes a stirring shaft and a stirring component. A puncturing component for puncturing the bubbles on the top of the silicon carbide slurry in the slurry bucket is also installed on the stirring shaft. A driving motor for driving the stirring shaft is installed at the bottom of the box cover.

2. The silicon carbide slurry defoaming device according to claim 1, wherein: The lifting and locking group includes a guide rod rotatably connected to the outer wall of the box body. A lifting rod that slides up and down is sleeved on the guide rod. The lifting rod is Z-shaped. The horizontal section on the upper side of the lifting rod is slidably connected with the side wall of the box cover. An insertion component for inserting and locking with the guide rod when the lifting rod moves to the upper end of the guide rod is installed on the lifting rod.

3. The defoaming device for silicon carbide slurry according to claim 1, characterized in that: The insertion and limit group includes U-shaped clamping plates installed on the inner wall of the box body and arranged uniformly along its circumference. T-shaped insertion strips are installed on the outer wall of the slurry bucket and arranged uniformly along its circumference.

4. The silicon carbide slurry defoaming device according to claim 1, wherein: The stirring component includes a plurality of V-shaped frames. The two ends of the V-shaped frames are installed on the stirring shaft. The plurality of V-shaped frames are arranged axially along the stirring shaft and staggered circumferentially along the stirring shaft.

5. The defoaming device for silicon carbide slurry according to claim 1, wherein: Two lifting handles are hinged near the upper end of the inner wall of the slurry bucket. Two supporting blocks arranged symmetrically along the circumference are installed on the inner wall of the slurry bucket. The supporting blocks are used to support the lifting handles in a horizontal state.

6. The defoaming device for silicon carbide slurry according to claim 1, characterized in that: The puncturing component includes a floating ring slidably connected up and down with the stirring shaft in a spline fitting manner. A dial plate is installed on the outer ring surface of the floating ring. Puncturing needles are installed on the dial plate and arranged uniformly. A supplementary puncturing part is installed at the end of the dial plate far from the floating ring.

7. The defoaming device for silicon carbide slurry according to claim 2, wherein: The plug-in component includes a jack formed at the upper end of the guide rod. One end of the lifting rod sleeved on the guide rod is provided with a spring groove. A plug rod is slidably connected in the spring groove, and a return spring sleeved on the plug rod is installed between the plug rod and the inner wall of the spring groove.

8. The defoaming device for silicon carbide slurry according to claim 6, wherein: The supplementary puncturing member includes a rotating plate hinged to the end of the dial plate through a torsion spring rod, and a puncturing needle is also installed on the rotating plate.

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