Real-time film thickness correction device for vacuum coating and control method thereof

Abstract

The invention discloses a real-time film thickness correction device for vacuum coating and a control method thereof.The real-time film thickness correction device for vacuum coating comprises a machine shell, a film thickness correction device, a film thickness correction device, a film thickness correction device and a film thickness correction device, the correction assembly comprises a correction frame, a correction shaft rotationally assembled on the correction frame, a correction plate used for correcting the film thickness, a correction adjustment assembly used for adjusting the deflection angle of the correction plate and a driving mechanism; wherein the correction plate extends to the central position of the vacuum coating device when corresponding to the rotating center of the vacuum coating device, and the driving mechanism can change the rotating speed of the correction shaft so as to adjust the shielding efficiency of the correction plate on the coating surface in unit time. The correction requirements of different coating materials can be met, the correction effect can be adjusted according to the requirements, and due to the fact that the correction plate can extend to the center position of the vacuum coating device, film thickness correction of the coating center point can be achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of film coating correction, and in particular to a real-time film thickness correction device for vacuum coating and a control method thereof. Background Art

[0002] The use of correction plates is one of the important methods to control the uniformity of vacuum coating. Currently, fixed correction plates are usually used to correct the film thickness of vacuum coating, which can effectively solve the technical problems of large waste of coating materials, uneven coating, and poor product quality. However, since the correction plate is fixed, its correction effect cannot be adjusted, and one coating plate can only meet the correction of one coating material, and cannot meet the correction needs of different coating materials. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a real-time film thickness correction device for vacuum coating and a control method thereof, which has the advantages of being able to adapt to the correction requirements of different coating materials and being able to adjust the correction effect according to the requirements.

[0004] The purpose of the present invention is achieved by the following technical solutions: According to a first aspect of an embodiment of the present disclosure, a real-time film thickness correction device for vacuum coating is provided, comprising: A casing, wherein a vacuum coating device is provided in the casing; A correction component carried by the housing and located on one side of the vacuum coating device, the correction component comprising: a correction frame fixed to the housing, a correction shaft rotatably mounted on the correction frame, a correction plate for correcting film thickness, a correction adjustment component connected to the correction shaft for adjusting a deflection angle of the correction plate, and a driving mechanism for driving the correction shaft to rotate; Among them, when the correction plate corresponds to the rotation center of the vacuum coating device, it extends to the center position of the vacuum coating device, and the driving mechanism can change the rotation speed of the correction axis to adjust the shielding efficiency of the correction plate on the coating surface per unit time.

[0005] To implement the above technical solution, when performing film thickness correction, the correction adjustment component adjusts the correction plate to a suitable deflection angle according to the film thickness correction requirements, and then the driving mechanism drives the correction shaft to rotate at a suitable speed, thereby being able to adjust the shielding efficiency of the correction plate on the coating surface per unit time. The deflection angles of the correction plate and the speeds of the driving mechanism are adjusted to different degrees according to different coating materials and correction requirements, thereby being able to meet the correction requirements of different coating materials and being able to adjust the correction effect according to the requirements. Moreover, since the correction plate can be extended to the center position of the vacuum coating device, the film thickness correction of the center point of the coating can be achieved.

[0006] In some exemplary embodiments, the correction adjustment component includes: a correction disk fixed to the correction shaft, wherein the correction disk is provided with a plurality of connecting grooves; and The adjusting pads are correspondingly arranged at the connecting grooves, and each of the adjusting pads has an adjusting surface with a different angle, and the adjusting plate is fitted with the adjusting surface to form different deflection angles.

[0007] To implement the above technical solution, the correction plates are installed correspondingly on different adjustment pads, so that the correction disk can be deflected at different angles to meet different correction requirements.

[0008] In some exemplary embodiments, a connecting arm is provided on the correction plate, and the connecting arm is used to assemble with the adjusting spacer.

[0009] To implement the above technical solution, the connecting arm is provided to facilitate the connection with the adjusting pad.

[0010] In some exemplary embodiments, the connecting groove is a waist-shaped groove.

[0011] By implementing the above technical solution, the installation position of the correction plate can be adjusted according to needs.

[0012] In some exemplary embodiments, the correction adjustment assembly includes: a worm gear connected to the correction shaft, and a worm connected to the correction plate and meshing with the worm gear.

[0013] To implement the above technical solution, the correction shaft is driven to rotate by the driving mechanism, and then the correction shaft is driven to rotate by the meshing of the worm wheel and the worm. The deflection angle of the correction plate can be adjusted during the rotation process, thereby meeting different correction requirements.

[0014] In some exemplary embodiments, a connecting shaft is provided on the correction plate, and the worm gear is connected and fixed to the connecting shaft.

[0015] In some exemplary embodiments, a bearing seat is provided on the correction frame, and the correction shaft is rotatably connected to the bearing seat via a bearing.

[0016] In some exemplary embodiments, the driving motor includes: a stepping motor and a gearbox, the gearbox is connected to a transmission shaft, and the transmission shaft is connected to the correction shaft via a coupling.

[0017] According to a second aspect of an embodiment of the present disclosure, a control method of the real-time film thickness correction device for vacuum coating as described in the first aspect is provided, comprising: Based on the coating material and the correction requirements, the correction plate is adjusted to a predetermined deflection angle through a correction adjustment component; A first rotational speed of the vacuum coating device is obtained, and according to the correction requirement, the driving mechanism is controlled based on the first rotational speed to drive the correction shaft to rotate at a second rotational speed so that the shielding efficiency of the correction plate on the coating surface per unit time meets the film thickness correction requirement.

[0018] In summary, compared with the prior art, the present invention has the following beneficial effects: An embodiment of the present invention provides a real-time film thickness correction device for vacuum coating and a control method thereof, wherein the real-time film thickness correction device for vacuum coating comprises: a housing, wherein a vacuum coating device is arranged in the housing; a correction component carried by the housing and located on one side of the vacuum coating device, wherein the correction component comprises: a correction frame fixed to the housing, a correction shaft rotatably mounted on the correction frame, a correction plate for correcting film thickness, a correction adjustment component connected to the correction shaft for adjusting a deflection angle of the correction plate, and a driving mechanism for driving the correction shaft to rotate; wherein the correction plate extends to the center position of the vacuum coating device when corresponding to the rotation center of the vacuum coating device, and the driving mechanism can change the rotation speed of the correction shaft to adjust the shielding efficiency of the correction plate on the coating surface per unit time. When performing film thickness correction, the correction adjustment component adjusts the correction plate to a suitable deflection angle according to the film thickness correction requirements, and then the driving mechanism drives the correction shaft to rotate at a suitable speed, thereby adjusting the shielding efficiency of the correction plate on the coating surface per unit time. The deflection angle of the correction plate and the speed of the driving mechanism are adjusted to different degrees according to different coating materials and correction requirements, thereby meeting the correction requirements of different coating materials and adjusting the correction effect according to the requirements. Moreover, since the correction plate can be extended to the center position of the vacuum coating device, the film thickness correction of the coating center point can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the results of the real-time film thickness correction device for vacuum coating in Example 1 of the present invention.

[0020] Figure 2 for Figure 1 Enlarged view of part A in the middle.

[0021] Figure 3 It is a schematic diagram of the results of the real-time film thickness correction device for vacuum coating in the second embodiment of the present invention.

[0022] Figure 4 for Figure 3 Enlarged view of part B in the middle.

[0023] The numbers and letters in the figure represent the corresponding component names: 10. Casing; 20. Vacuum coating device; 30. Correction assembly; 31. Correction frame; 311. Bearing seat; 32. Correction shaft; 33. Correction plate; 331. Connecting arm; 332. Connecting shaft; 34. Correction adjustment assembly; 341. Correction disk; 342. Connecting groove; 343. Adjustment pad; 344. Worm gear; 345. Worm; 35. Driving mechanism; 351. Stepping motor; 352. Gearbox; 353. Transmission shaft; 354. Coupling. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] Embodiment 1 like Figure 1 to Figure 2 As shown, a first aspect of an embodiment of the present invention provides a real-time film thickness correction device for vacuum coating, comprising: a housing 10, in which a vacuum coating device 20 is disposed; and a correction component 30 carried by the housing 10 and located on one side of the vacuum coating device 20.

[0026] Specifically, the correction component 30 includes: a correction frame 31 fixed to the housing 10, a correction shaft 32 rotatably mounted on the correction frame 31, a correction plate 33 for correcting film thickness, a correction adjustment component 34 connected to the correction shaft 32 for adjusting the deflection angle of the correction plate 33, and a driving mechanism 35 for driving the correction shaft 32 to rotate; wherein the correction plate 33 extends to the center position of the vacuum coating device 20 when corresponding to the rotation center of the vacuum coating device 20, and the driving mechanism 35 can change the rotation speed of the correction shaft 32 to adjust the shielding efficiency of the correction plate 33 on the coating surface per unit time.

[0027] Among them, a bearing seat 311 is provided on the correction frame 31, and the correction shaft 32 is rotatably connected to the bearing seat 311 through a bearing, and the correction shaft 32 is flush with the rotation center of the vacuum coating device 20. When the correction plate 33 is rotated to a horizontal state, the end of the correction plate 33 corresponds to the center of the vacuum coating device 20, thereby realizing the film thickness correction of the coating center point. The structure of the vacuum coating device 20 is the same as the prior art and will not be repeated here.

[0028] The correction adjustment assembly 34 includes: a correction disk 341 fixed to the correction shaft 32, and a plurality of connection slots 342 are provided on the correction disk 341; and an adjustment pad 343 correspondingly arranged at each connection slot 342, and each adjustment pad 343 has an adjustment surface with a different angle, and the adjustment plate fits the adjustment surface to form different deflection angles. Among them, a plurality of connection slots 342 are evenly arranged around the correction disk 341, and usually 6-10 groups of connection slots 342 are arranged, and preferably 8 groups of connection slots 342 are arranged, and the inclination angle of the adjustment surface on the adjustment pad 343 can be set according to actual needs; by installing the correction plate 33 correspondingly on different adjustment pads 343, the correction disk 341 can form different deflection angles to meet different correction needs.

[0029] Preferably, a connecting arm 331 is provided on the correction plate 33, and the connecting arm 331 is used to be assembled with the adjusting pad 343. By setting the connecting arm 331, it is convenient to cooperate with the adjusting pad 343, and the connecting groove 342 is a waist-shaped groove, so that the installation position of the correction plate 33 can be adjusted according to needs. It can be understood that corresponding connecting holes are provided on the connecting arm 331 and the adjusting pad 343. The correction plate 33 can be locked with the adjusting pad 343 by passing the bolt assembly through the connecting hole and the connecting groove 342 and then locking it.

[0030] The driving motor includes: a stepper motor 351 and a gearbox 352. The gearbox 352 is connected to a transmission shaft 353. The transmission shaft 353 is connected to the correction shaft 32 via a coupling 354. In some embodiments, the stepper motor 351 can also be a servo motor. Usually, a motor fixing frame is provided outside the housing 10 to fix the gearbox 352 and the stepper motor 351. The transmission shaft 353 is used to transmit the driving force of the stepper motor 351 to the correction shaft 32.

[0031] When performing film thickness correction, the correction adjustment component 34 adjusts the correction plate 33 to a suitable deflection angle according to the film thickness correction requirements, and then the driving mechanism 35 drives the correction shaft 32 to rotate at a suitable speed, thereby being able to adjust the shielding efficiency of the correction plate 33 on the coating surface per unit time. The different deflection angles of the correction plate 33 and the different speeds of the driving mechanism 35 are adjusted according to different coating materials and correction requirements, thereby being able to meet the correction requirements of different coating materials and being able to adjust the correction effect according to the requirements. Moreover, since the correction plate 33 can be extended to the center position of the vacuum coating device 20, the film thickness correction of the coating center point can be achieved.

[0032] A second aspect of an embodiment of the present invention provides a control method for the real-time film thickness correction device for vacuum coating as described in the first aspect, comprising: S100. Based on the coating material and the correction requirements, the correction plate 33 is adjusted to a predetermined deflection angle through the correction adjustment component 34. The deflection angle is determined by different adjustment pads 343. According to the required deflection angle, the correction plate 33 is installed on different adjustment pads 343. Then, the driving mechanism 35 drives the correction plate 33 to rotate to correspond to the center of the vacuum coating device 20, and the initial position can be determined.

[0033] S200, obtaining a first rotational speed of the vacuum coating device 20, and controlling the driving mechanism 35 based on the first rotational speed to drive the correction shaft 32 to rotate at a second rotational speed according to the correction requirement, so that the shielding efficiency of the correction plate 33 on the coating surface per unit time meets the film thickness correction requirement; the second rotational speed can be determined according to the correction requirement, the second rotational speed can be 0, or any rotational speed value, when the second rotational speed is 0, the correction plate 33 is in a stationary device, and the film thickness correction is achieved during the rotation of the vacuum coating device 20, when the second rotational speed is not 0, the correction plate 33 and the vacuum coating device 20 rotate relative to each other, the correction plate 33 and the vacuum coating device 20 are in intermittent contact, and the film thickness correction is achieved during the contact process.

[0034] Embodiment 2 In a first aspect, an embodiment of the present invention provides a real-time film thickness correction device for vacuum coating. The difference between this embodiment and the first embodiment is that: in this embodiment, Figure 3 and Figure 4 As shown, the correction component 30 includes: a worm wheel 344 connected to the correction shaft 32, and a worm 345 connected to the correction plate 33 and meshing with the worm wheel 344. It can be understood that a connecting box is usually connected to the correction shaft 32, and the correction shaft 32 is rotatably connected to the connecting box. The connecting box can be fixed to the correction frame 31, and the worm 345 is rotatably connected to the connecting box, so as to achieve stable installation, and a connecting shaft 332 is provided on the correction plate 33, and the worm 345 is connected and fixed to the connecting shaft 332 by a key connection.

[0035] The correction shaft 32 is driven to rotate by the driving mechanism 35, and then the correction shaft 32 is driven to rotate by the meshing of the worm wheel 344 and the worm 345. During the rotation, the deflection angle of the correction plate 33 can be adjusted to meet different correction requirements.

[0036] A second aspect of an embodiment of the present invention provides a control method for the real-time film thickness correction device for vacuum coating as described in the first aspect, comprising: S100. Based on the coating material and the correction requirements, the correction plate 33 is adjusted to a predetermined deflection angle through the correction adjustment component 34. The deflection angle is determined by the correction shaft 32 driving the worm gear 344 to rotate to different angles. According to the required deflection angle, the driving mechanism 35 drives the worm gear 344 to rotate, and then the meshing worm 345 rotates to drive the correction plate 33 to adjust to the predetermined deflection angle, and the initial position can be determined.

[0037] S200, obtaining a first rotational speed of the vacuum coating device 20, and controlling the driving mechanism 35 based on the first rotational speed to drive the correction shaft 32 to rotate at a second rotational speed according to the correction requirement, so that the shielding efficiency of the correction plate 33 on the coating surface per unit time meets the film thickness correction requirement; the second rotational speed can be determined according to the correction requirement, the second rotational speed can be 0, or any rotational speed value, when the second rotational speed is 0, the correction plate 33 is in a stationary device, and the film thickness correction is achieved during the rotation of the vacuum coating device 20, when the second rotational speed is not 0, the correction plate 33 and the vacuum coating device 20 rotate relative to each other, the correction plate 33 and the vacuum coating device 20 are in intermittent contact, and the film thickness correction is achieved during the contact process.

[0038] The above embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which are equivalent modifications and improvements made to the above embodiments based on the essential technology of the present invention, and all of them belong to the protection scope of the present invention.

Claims

1. A real-time film thickness correction device for vacuum coating, characterized in that: include: A casing, wherein a vacuum coating device is provided in the casing; A correction component carried by the housing and located on one side of the vacuum coating device, the correction component comprising: a correction frame fixed to the housing, a correction shaft rotatably mounted on the correction frame, a correction plate for correcting film thickness, a correction adjustment component connected to the correction shaft for adjusting a deflection angle of the correction plate, and a driving mechanism for driving the correction shaft to rotate; Among them, when the correction plate corresponds to the rotation center of the vacuum coating device, it extends to the center position of the vacuum coating device, and the driving mechanism can change the rotation speed of the correction axis to adjust the shielding efficiency of the correction plate on the coating surface per unit time.

2. The real-time film thickness correction device for vacuum coating according to claim 1, characterized in that: The correction adjustment component comprises: a correction disk fixed to the correction shaft, wherein the correction disk is provided with a plurality of connecting grooves; and The adjusting pads are correspondingly arranged at the connecting grooves, and each of the adjusting pads has an adjusting surface with a different angle, and the adjusting plate is fitted with the adjusting surface to form different deflection angles.

3. The real-time film thickness correction device for vacuum coating according to claim 2, characterized in that: The correction plate is provided with a connecting arm, and the connecting arm is used for assembling with the adjusting cushion block.

4. The real-time film thickness correction device for vacuum coating according to claim 2 or 3, characterized in that: The connecting groove is a waist-shaped groove.

5. The real-time film thickness correction device for vacuum coating according to claim 1, characterized in that: The correction adjustment assembly includes a worm wheel connected to the correction shaft, and a worm connected to the correction plate and meshing with the worm wheel.

6. The real-time film thickness correction device for vacuum coating according to claim 5, characterized in that: The correction plate is provided with a connecting shaft, and the worm is connected and fixed to the connecting shaft.

7. The real-time film thickness correction device for vacuum coating according to claim 1, characterized in that: The correction frame is provided with a bearing seat, and the correction shaft is rotatably connected to the bearing seat through a bearing.

8. The real-time film thickness correction device for vacuum coating according to claim 1, characterized in that: The driving motor comprises: a stepping motor and a gearbox, the gearbox is connected with a transmission shaft, and the transmission shaft is connected to the correction shaft through a coupling.

9. The control method of the real-time film thickness correction device for vacuum coating according to any one of claims 1 to 8, characterized in that: include: Based on the coating material and the correction requirements, the correction plate is adjusted to a predetermined deflection angle through a correction adjustment component; A first rotational speed of the vacuum coating device is obtained, and according to the correction requirement, the driving mechanism is controlled based on the first rotational speed to drive the correction shaft to rotate at a second rotational speed so that the shielding efficiency of the correction plate on the coating surface per unit time meets the film thickness correction requirement.

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