Crystal bar balance control system of crystal pulling furnace and crystal pulling furnace

Abstract

The embodiment of the invention discloses a crystal bar balance control system of a crystal pulling furnace and the crystal pulling furnace, the crystal bar balance control system of the crystal pulling furnace can comprise a shake detection device and an air blowing assembly, the shake detection device is used for monitoring the shake state of a crystal bar and collecting shake data of the crystal bar; and the blowing assembly is used for blowing the crystal bar according to the shaking data when the shaking of the crystal bar is detected, so that the central axis of the crystal bar is close to the axial central axis of the cavity of the crystal pulling furnace.

Description

Technical Field

[0001] The disclosed embodiments relate to the field of semiconductor manufacturing technology, and in particular to a crystal rod balance control system of a crystal pulling furnace and a crystal pulling furnace. Background Art

[0002] The growth of single crystal silicon is a critical manufacturing process in the semiconductor and photovoltaic industries. The traditional direct-pull single crystal growth technology, also known as the Czochralski (CZ) method, involves growing single crystal silicon by slowly pulling up a seed crystal in a high-temperature furnace. During this process, the stability of the crystal rod is critical to the quality of the final product. The shaking of the crystal rod during the growth process not only increases the risk of crystal line breakage, but may also introduce defects, thus affecting the overall quality and performance of the single crystal silicon.

[0003] At present, the monitoring of crystal ingot shaking mainly relies on the operator's naked eye observation, which is not only inefficient but also unable to achieve real-time monitoring and precise control. In addition, due to the lack of effective intervention measures, once the crystal ingot shakes significantly, it may lead to production interruption and material waste, seriously affecting production efficiency and cost. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure are intended to provide a crystal rod balance control system for a crystal pulling furnace and a crystal pulling furnace, which can solve the technical problems of production interruption or material waste caused by crystal rod shaking.

[0005] The technical solution of the embodiment of the present disclosure is implemented as follows: In a first aspect, an embodiment of the present disclosure provides a crystal ingot balance control system for a crystal pulling furnace, comprising: A shaking detection device, used to monitor the shaking state of the crystal ingot and collect shaking data of the crystal ingot; The blowing component is used to blow air to the crystal rod according to the shaking data when the shaking of the crystal rod is detected, so that the central axis of the crystal rod is close to the axial central axis of the cavity of the crystal pulling furnace.

[0006] In some examples, the chamber includes a main chamber and a sub-chamber; and the blowing assembly includes: A plurality of groups of blowing mechanisms are arranged at intervals along the axial direction of the sub-chamber; The controller is used to control the blowing data of a plurality of blowing mechanisms according to the shaking data, so that the central axis of the crystal rod approaches the axial central axis of the cavity of the crystal pulling furnace.

[0007] In some examples, the distance between two adjacent groups of blowing mechanisms gradually increases in a direction away from the main chamber.

[0008] In some examples, the plurality of groups of blowing assemblies are arranged at uniform intervals along the axial direction of the sub-chamber.

[0009] In some examples, the blowing structure includes: At least one blowing portion is evenly arranged along the circumferential direction of the sub-chamber.

[0010] In some examples, the shaking detection device includes: A first detection part, used to detect a first offset of the crystal rod in the axial center axis direction of the cavity; A second detection part, used to detect a second offset in a direction perpendicular to the axial center axis of the cavity; The blowing component calculates the shaking amplitude and shaking angle of the crystal rod according to the first offset and the second offset to obtain the shaking data.

[0011] In some examples, the first detection part includes two height detection devices, which are arranged on a side of the crystal rod away from the main chamber, and the two height detection devices are symmetrically arranged relative to the axial center axis of the cavity; The height detection device is used to measure the distance between the side of the crystal rod away from the main chamber and the height detection device, and the difference in heights detected by the two height detection devices is used as the first offset.

[0012] In some examples, the second detection unit includes two distance detection devices; The two distance detection devices are arranged along the axial center axis of the cavity, and are used to detect the distance between the edge of the crystal rod and the distance detection device, and the difference between the distances detected by the two distance detection devices is used as the second offset.

[0013] In some examples, the blowing assembly is used to adjust blowing data according to a current crystal pulling stage.

[0014] In a second aspect, an embodiment of the present disclosure provides a crystal pulling furnace, comprising: A crystal rod balance control system for a crystal pulling furnace as described in the first aspect and any one of the examples thereof.

[0015] The disclosed embodiments provide a crystal rod balance control system and a crystal pulling furnace for a crystal pulling furnace; by real-time monitoring of the shaking state of the crystal rod through a shaking detection device, any abnormal shaking of the crystal rod can be captured in time, which is the primary step to improve the stability of the crystal rod. The blowing component accurately blows the crystal rod according to the shaking data. This targeted control can effectively reduce the shaking of the crystal rod, so that the central axis of the crystal rod is closer to the axial central axis of the crystal pulling furnace cavity, thereby improving the stability of the crystal rod during the crystal pulling process. Reducing the shaking of the crystal rod can reduce the risk of crystal line breakage, thereby reducing production interruptions and material waste, and improving the yield rate. The stability of the crystal rod is directly related to the quality of single crystal silicon. Reducing shaking can reduce stress and defects in the crystal rod and improve the overall quality of single crystal silicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The present invention is a schematic side cross-sectional view of the structure of a crystal pulling furnace applicable to a method for manufacturing single crystal silicon.

[0017] Figure 2 A schematic diagram of a crystal rod balance control system for a crystal pulling furnace provided in an embodiment of the present disclosure.

[0018] Figure 3 A schematic diagram of another crystal pulling furnace provided in an embodiment of the present disclosure.

[0019] Figure 4 A schematic diagram of another crystal rod balance control system for a crystal pulling furnace provided in an embodiment of the present disclosure.

[0020] Figure 5 A schematic diagram of a crystal rod balance control system for another crystal pulling furnace provided in an embodiment of the present disclosure.

[0021] Figure 6 A schematic diagram of the distribution of a blowing part in a blowing structure provided in an embodiment of the present disclosure.

[0022] Figure 7 A schematic structural diagram of a blowing portion provided in an embodiment of the present disclosure.

[0023] Figure 8 A schematic diagram of a crystal rod balance control system for another crystal pulling furnace provided in an embodiment of the present disclosure.

[0024] Fig. 9 A schematic diagram of a crystal rod from a normal state to a shaking state provided in an embodiment of the present disclosure.

[0025] Fig.10 A schematic diagram of adjusting a crystal rod from a shaking state back to a center position by blowing air is provided in an embodiment of the present disclosure.

[0026] The above drawings show clear embodiments of the present disclosure, which will be described in more detail below. These drawings and text descriptions are not intended to limit the scope of the present disclosure in any way, but to illustrate the concepts of the present disclosure to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0027] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that the disclosure will be more comprehensive and complete and to fully convey the concepts of the example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0028] In addition, the accompanying drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the figures represent the same or similar parts, and their repeated description will be omitted. Some of the block diagrams shown in the accompanying drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities can be implemented in software form, or implemented in one or more hardware modules or integrated circuits, or implemented in different networks and / or processor devices and / or microcontroller devices.

[0029] See also Figure 1 , which shows a side cross-sectional view of a structure example of a crystal pulling furnace that can be applied to the crystal rod manufacturing method proposed in the present disclosure. Figure 1 As shown, the crystal pulling furnace 1 includes a chamber 10, a quartz crucible 11 carrying a raw material melt 2 in the chamber 10, a graphite base 12 for holding the quartz crucible 11, a rotating shaft 13 supporting the base 12, an axis driving mechanism 14 for driving the rotating shaft 13 to rotate and rise and fall, a heater 15 arranged around the base 12, a heat insulating material 16 arranged along the inner surface of the chamber 10 on the outer side of the heater 15, a guide tube 17 arranged above the quartz crucible 11, a crystal wire 18 for single crystal pulling arranged above the quartz crucible 11 and coaxially with the rotating shaft 13, and a wire winding mechanism 19 arranged above the chamber 10.

[0030] Continue to see Figure 1 The crystal pulling furnace 1 also includes a magnetic field applying device 21 arranged outside the chamber 10, a charge coupled device (CCD) camera 22 for photographing the inside of the chamber 10, an image processing unit 23 for processing the image photographed by the CCD camera 22, and a control unit 24 for controlling the shaft driving mechanism 14, the heater 15 and the wire winding mechanism 19 according to the output of the image processing unit 23.

[0031] In detail, the chamber 10 is composed of a main chamber 10a and a slender cylindrical sub-chamber 10b connected to the upper opening of the main chamber 10a, and a quartz crucible 11, a susceptor 12, a heater 15 and a guide tube 17 are arranged in the main chamber 10a. A gas inlet 10c for introducing an inert gas such as argon, i.e., a purge gas, into the chamber 10 is provided at the upper part of the sub-chamber 10b, and a gas outlet 10d for discharging the inert gas is provided at the bottom of the main chamber 10a. The inert gas is introduced into the chamber 10 from the gas inlet 10c, and the amount of the inert gas introduced can be controlled by a valve. In addition, the inert gas in the closed chamber 10 is discharged from the gas outlet 10d to the outside of the chamber 10, so that the SiO gas or CO gas generated in the chamber 10 can be recovered and the chamber 10 can be kept clean. In some examples, although not shown, a vacuum pump is connected to the gas outlet 10 d via a pipe, and the vacuum pump sucks the inert gas in the chamber 10 while controlling its flow rate through a valve, so that the chamber 10 is kept in a constant reduced pressure state.

[0032] An observation window 10e is provided at the upper part of the main chamber 10a, and the growth status of the crystal rod 3, that is, the solid-liquid interface, can be observed from the observation window 10e. In some examples, the CCD camera 22 is provided outside the observation window 10e. In the single crystal pulling process, the CCD camera 22 takes an image of the boundary between the crystal rod 3 and the raw material melt 2 observed from the observation window 10e through the opening of the guide tube 17. The CCD camera 22 is connected to the image processing unit 23, and the photographic image is processed by the image processing unit 23. The processing result is used in the control unit 24 to control the crystal pulling conditions.

[0033] The quartz crucible 11 is generally a container made of quartz glass having a cylindrical side wall and a curved bottom. The susceptor 12 is in close contact with the outer surface of the quartz crucible 11 to surround the quartz crucible 11 in order to maintain the shape of the quartz crucible 11 softened by heating. In some examples, the quartz crucible 11 and the susceptor 12 are configured as a double-structured crucible that supports the raw material melt 2 in the chamber 10.

[0034] The susceptor 12 is fixed to the upper end of a rotating shaft 13 extending in the vertical direction. In addition, the lower end of the rotating shaft 13 passes through the center of the bottom of the chamber 10 and is connected to a shaft driving mechanism 14 provided outside the chamber 10. The susceptor 12, the rotating shaft 13, and the shaft driving mechanism 14 constitute a rotating mechanism and a lifting mechanism of the quartz crucible 11.

[0035] The heater 15 melts the silicon raw material and the dopant filled in the quartz crucible 11 to form the raw material melt 2, and maintains the raw material melt 2 in a molten state. In some examples, the heater 15 is a carbon resistance heating heater, and is a substantially cylindrical member provided so as to surround the entire circumference of the quartz crucible 11 in the susceptor 12. In addition, the outer side of the heater 15 is surrounded by a heat insulating material 16, thereby improving the heat preservation in the chamber 10.

[0036] The guide tube 17 can suppress the temperature variation of the raw material melt 2 and form an appropriate hot zone near the solid-liquid interface. In some examples, the guide tube 17 is a cylindrical member made of graphite that covers the upper region of the raw material melt 2 except for the pulling path of the crystal ingot 3 .

[0037] A circular opening larger than the diameter of the crystal rod 3 is formed at the center of the lower end of the guide tube 17 to ensure the pulling path of the crystal rod 3. Figure 1 As shown, the crystal rod 3 is pulled upward through the opening of the guide tube 17. The diameter of the opening of the guide tube 17 is smaller than the diameter of the quartz crucible 11, and the lower end of the guide tube 17 is located inside the quartz crucible 11. Therefore, even if the upper end of the edge ring of the quartz crucible 11 is raised to a position higher than the lower end of the guide tube 17, the guide tube 17 will not interfere with the quartz crucible 11.

[0038] As the crystal ingot 3 grows, the amount of the melt in the quartz crucible 11 decreases, but by lifting the quartz crucible 11 so that the gap between the melt surface and the guide tube 17 becomes constant, the temperature fluctuation of the raw material melt 2 can be suppressed, and the flow rate of the gas flowing near the melt surface can be made constant to control the evaporation amount of SiO gas from the raw material melt 2. As a result, the stability of the crystal defect distribution, oxygen concentration distribution, resistivity distribution, etc. in the pulling axis direction of the single crystal can be improved.

[0039] A wire winding mechanism 19 for pulling the crystal wire 18 for the crystal rod 3 is provided above the quartz crucible 11. The wire winding mechanism 19 has the function of rotating the single crystal together with the crystal wire 18. The wire winding mechanism 19 is arranged above the sub-chamber 10b, and the crystal wire 18 extends downward from the wire winding mechanism 19 through the sub-chamber 10b, and the front end of the crystal wire 18 reaches the internal space of the main chamber 10a. Figure 1 3 shows a state where the crystal rod 3 is suspended by the crystal wire 18 during growth. When pulling a single crystal, the seed crystal is immersed in the raw material melt 2 and the crystal wire 18 is slowly pulled while rotating the quartz crucible 11 and the seed crystal, so that the single crystal grows.

[0040] During the growth process, the crystal rod may shake due to rotation or other reasons. The large shaking of the crystal rod may cause the crystal wire 18 (the thin wire connecting the crystal rod and the seed crystal) to break, which will interrupt the crystal pulling process, resulting in material waste and production delays. The shaking of the crystal rod may introduce stress and defects in the crystal, such as dislocations, micro-defects, etc. These defects will affect the electrical and mechanical properties of the crystal and reduce the quality and reliability of the final product. The breakage of the crystal wire 18 and crystal defects caused by the shaking of the crystal rod will increase the scrap rate in production, reduce production efficiency, and increase production costs. Due to the crystal defects caused by the shaking of the crystal rod, the crystal may need to be processed additionally or the unqualified parts may be discarded, resulting in material waste. Therefore, it is very necessary to detect and control the shaking of the crystal rod.

[0041] The relevant technology mainly relies on the operator's naked eye observation to monitor the shaking of the crystal rod, which lacks real-time and precision and cannot provide accurate data support. Due to the lack of effective monitoring means, it is impossible to respond to the shaking of the crystal rod in time, resulting in the inability to take preventive or corrective measures.

[0042] Based on this, the present disclosure first provides a crystal rod 3 balance control system for a crystal pulling furnace, referring to Figure 2 , may include a shaking detection device 5 and a blowing component 4, wherein the shaking detection device 5 is used to monitor the shaking state of the crystal rod 3 and collect the shaking data of the crystal rod 3; the blowing component 4 is used to blow air to the crystal rod 3 according to the shaking data when the shaking of the crystal rod 3 is detected, so that the central axis of the crystal rod 3 is close to the axial central axis of the cavity of the crystal pulling furnace.

[0043] The crystal rod 3 balance control system of the crystal pulling furnace of the disclosed embodiment monitors the shaking state of the crystal rod 3 in real time through the shaking detection device 5, and can capture any abnormal shaking of the crystal rod 3 in time, which is the primary step to improve the stability of the crystal rod 3. The blowing component 4 blows the crystal rod 3 accurately according to the shaking data. This targeted control can effectively reduce the shaking of the crystal rod 3, so that the central axis of the crystal rod 3 is closer to the axial central axis of the crystal pulling furnace cavity, thereby improving the stability of the crystal rod 3 during the crystal pulling process. Reducing the shaking of the crystal rod 3 can reduce the risk of the crystal wire 18 breaking, thereby reducing production interruptions and material waste, and improving the yield rate. The stability of the crystal rod 3 is directly related to the quality of the single crystal silicon. Reducing the shaking can reduce the stress and defects in the crystal rod 3 and improve the overall quality of the single crystal silicon.

[0044] In some example embodiments of the present disclosure, Figure 3 As shown, the chamber of the crystal pulling furnace may include a main chamber and a sub-chamber, referring to Figure 4 The blowing assembly 4 may include multiple blowing structures and controllers, referring to Figure 2The blowing structures are spaced apart along the axial direction of the sub-chamber. Optionally, a plurality of groups of blowing structures may be spaced apart evenly in a direction away from the main chamber. The specific spacing distance is set according to the number of groups of the blowing structures and the length of the sub-chamber. It may also be customized according to user needs, which will not be elaborated in this example implementation.

[0045] In some examples, reference Figure 5 , the distance between two adjacent groups of blowing mechanisms gradually increases in the direction away from the main chamber. In the area close to the main chamber, the density of the blowing mechanisms is higher, while in the area away from the main chamber, the density of the blowing mechanisms is lower. By adding blowing mechanisms in the area where the crystal rod 3 shakes more violently, the control accuracy of the shaking of the crystal rod 3 can be improved, and the crystal defects caused by shaking can be reduced. The adaptability of the blowing assembly 4 to different crystal pulling stages and different lengths of the crystal rod 3 enables the control system to respond to various situations more flexibly. By adjusting the spacing of the blowing mechanisms, the efficiency of the airflow can be optimized, energy waste can be reduced, and the energy efficiency of the system can be improved.

[0046] The specific setting of the interval can be customized based on user needs and will not be described in detail in this example implementation.

[0047] It should be noted that the number of groups of the blowing structure can be 3 groups, 6 groups, 9 groups, 10 groups, etc. The specific number can be set based on demand and is not specifically limited here.

[0048] Reference Figure 6 The plurality of blowing structures include at least one blowing part 41, specifically, 3, 4, 6, etc. The plurality of blowing parts 41 can be evenly arranged along the axial direction of the sub-chamber, which can ensure that the crystal rod 3 is evenly controlled by airflow over the entire length, and can improve the accuracy of notifying the crystal rod 3 of shaking.

[0049] Reference Figure 7 The blowing part 41 may include a flow controller 411 and an air outlet, wherein the flow controller 411 is used to control the flow rate, pressure and blowing speed of the blowing. The flow controller 411 is usually composed of a mass flow sensor, a thermal element, a mass flow controller 411 regulating valve and an amplifier circuit. It is made by using the heat transfer effect of the flowing fluid to change the thermal conduction distribution effect of measuring the capillary temperature distribution. The specific structure can refer to the relevant technology and will not be described here. The blowing hole 412 is used for exhausting air. Optionally, the direction of the air outlet is perpendicular to the inner wall of the above-mentioned sub-chamber, which helps to directly apply airflow to the crystal rod 3, reduce the deflection and scattering of the airflow in the sub-chamber, and improve the directness and efficiency of the airflow.

[0050] In some example embodiments, reference Figure 2 and Figure 7As shown, the shaking detection device 5 may include a first detection part and a second detection part, wherein the first detection part is used to detect a first offset of the crystal rod 3 in the axial center axis direction of the cavity; the second detection part is used to detect a second offset in the direction perpendicular to the axial center axis of the cavity; the blowing component 4 calculates the shaking amplitude and shaking angle of the crystal rod 3 according to the first offset and the second offset to obtain shaking data.

[0051] Reference Figure 8 The first detection part includes two height detection devices 51, which can be arranged on the side of the crystal rod 3 away from the main chamber. The height detection device 51 is used to measure the distance between the side of the crystal rod 3 away from the main chamber and the height detection device 51, and the difference in height detected by the two height detection devices 51 is used as the first offset.

[0052] Specifically, the first detection part can be set on the wire winding mechanism 19 or directly below the wire winding mechanism 19. The crystal wire 18 passes through the first detection part, and the two height detection devices 51 are stacked and integrated relative to the crystal wire 18.

[0053] It should be noted that the height detection device 51 can adopt a laser sensor, which can emit a laser beam and receive the laser reflected from the surface of the crystal rod 3, and calculate the height by measuring the round-trip time of the laser. The height detection device 51 can also adopt other structures, such as ultrasonic sensors, capacitive sensors, etc., which are not elaborated in this example implementation.

[0054] Reference Figure 7 The second detection unit includes two distance detection devices 413, which are arranged along the axial center axis of the cavity, and are used to detect the distance between the edge of the crystal rod 3 and the distance detection device 413, and the difference between the distances detected by the two distance detection devices 413 is used as the second offset. Optionally, the distance detection device 413 can also use a laser sensor, which can emit a laser beam and receive the laser reflected from the surface of the crystal rod 3, and calculate the height by measuring the round-trip time of the laser. The distance detection device 413 can also use other structures, such as an ultrasonic sensor, a capacitive sensor, etc., which will not be described in detail in this example implementation.

[0055] Reference Figure 7 The two distance detection devices 413 of the second detection part can be arranged at both ends of the blowing hole 412 of the above-mentioned blowing part 41, which helps to improve the accuracy and reliability of the measurement, and at the same time can correct any deviation caused by installation errors or inclination of the crystal rod 3. The distance detection device 413 is integrated with the blowing part 41 and may share some hardware components or data processing units, which simplifies the system design and improves the convenience of maintenance.

[0056] In some examples, the controller can control the blowing data of the blowing assembly 4. Specifically, the blowing data can be determined according to the shaking amplitude of the crystal rod 3. The shaking amplitude can determine the first offset according to the height difference (D1-D2) of the first detection part, and the second offset can be determined according to the distance difference (D3-D4) in the second detection part. Then, the shaking amplitude and the shaking angle are determined according to the offset. Fig. 9 , the shaking angle can be calculated according to the height difference and the distance between the two height detection devices 51 and the crystal line 18, and the shaking amplitude can be determined according to the distance difference and the distance between the two distance detection devices 413, wherein the shaking amplitude is the deflection angle in the horizontal direction, that is, the angle between the edge of the crystal rod 3 and the vertical direction, and the shaking angle is the deflection angle in the vertical direction, that is, the angle between the crystal line 18 and the vertical direction. In this example, the vertical direction is consistent with the direction of the axial center axis of the cavity. Specifically, the shaking amplitude and shaking angle can be determined according to right-angle trigonometric functions, and the specific calculation process is not repeated here.

[0057] After obtaining the above-mentioned shaking amplitude and shaking angle, the blowing data can be adjusted based on the shaking amplitude and shaking angle, wherein the blowing data may include the density, velocity and gas pressure of the gas. The specific adjustment method may be adjusted according to the adjustment formula, which may be:

[0058] in, represents the gas pressure, represents the density of the gas, is the velocity of the gas, is a constant and can be determined according to at least one of the shaking amplitude and the shaking angle. The specific determination method can be customized according to user needs and will not be elaborated here.

[0059] In some examples, when adjusting the blowing data of the blowing assembly 4, the current crystal pulling stage can also be obtained. The weight of the crystal rod 3 in different crystal pulling stages is different, so the blowing data can be controlled to change. For example, the crystal pulling stage can be divided into stages such as crystal induction, shoulder release, equal diameter control, and finishing. In the process of crystal pulling in this order, the blowing intensity of the blowing assembly 4 away from the main chamber can be increased, and the blowing intensity of the blowing assembly 4 close to the main chamber can be reduced. The specific adjustment logic can also be customized based on user needs, which will not be repeated in this example implementation.

[0060] Reference Fig.10 When the crystal rod 3 is shaken in the first direction in the figure, the blowing assembly 4 that can affect the first direction can be operated to make the crystal rod 3 move in the opposite direction of the first direction. For example, Fig.10If the crystal rod 3 in the figure is offset to the first direction (i.e., the right side in the figure), the blowing intensity of the blowing part 41 on the right side of the crystal rod 3 can be made greater than the blowing intensity of the blowing part 41 on the left side of the crystal rod 3, so that the crystal rod 3 moves to the left to eliminate the shaking of the crystal rod 3.

[0061] In some examples, if the crystal rod 3 is offset to the right ( Fig.10 In the first direction in the figure), the blowing intensity of the right blowing part 41 can be increased (for example, set to 3) while reducing or turning off the blowing intensity of the left blowing part 41 (for example, set to 2 or 0) to generate a leftward force to push the crystal rod 3 to move leftward, thereby correcting the deviation.

[0062] Optionally, in order to make the process of the crystal rod 3 returning to the center position more stable and prevent the crystal rod 3 from deviating again after returning to the center point, the blowing parts 41 on both sides can blow air at the same time, but the blowing intensity can be adjusted as needed.

[0063] It should be noted that the gas disclosed in the present invention is a gas that does not chemically react with the crystal rod, such as an inert gas, which is not elaborated in this example implementation. Furthermore, when controlling the above-mentioned blowing data, the temperature of the blown gas can also be controlled. If necessary, the crystal rod can be cooled, which can enhance the forming rate of the crystal rod.

[0064] The crystal rod 3 balance control system of the crystal pulling furnace in the embodiment of the present disclosure monitors the shaking state of the crystal rod 3 in real time through the shaking detection device 5, and can capture any abnormal shaking of the crystal rod 3 in time, which is the primary step to improve the stability of the crystal rod 3. The blowing component 4 blows the crystal rod 3 accurately according to the shaking data. This targeted control can effectively reduce the shaking of the crystal rod 3, so that the central axis of the crystal rod 3 is closer to the axial central axis of the crystal pulling furnace cavity, thereby improving the stability of the crystal rod 3 during the crystal pulling process. Reducing the shaking of the crystal rod 3 can reduce the risk of the crystal line 18 breaking, thereby reducing production interruptions and material waste, and improving the yield rate. The stability of the crystal rod 3 is directly related to the quality of the single crystal silicon. Reducing the shaking can reduce the stress and defects in the crystal rod 3 and improve the overall quality of the single crystal silicon. By adjusting the spacing of the blowing mechanism, the efficiency of the airflow can be optimized, the energy waste can be reduced, and the energy efficiency of the system can be improved. The flow controller 411 accurately controls the flow, pressure and speed of the blowing, which helps to directly apply the airflow to the crystal rod 3 and reduce the deflection and scattering of the airflow in the sub-chamber.

[0065] In the above embodiments, the description of each embodiment has its own emphasis. For the part not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. The technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0066] Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the inventions claimed herein. The present disclosure is intended to cover any variations, uses or adaptations of the present disclosure that follow the general principles of the present disclosure and include common knowledge or customary technical means in the art that are not claimed in the present disclosure.

[0067] It should be understood that the present disclosure is not limited to the exact construction that has been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof.

Claims

1. A crystal ingot balance control system for a crystal pulling furnace, characterized in that: include: A shaking detection device, used to monitor the shaking state of the crystal ingot and collect shaking data of the crystal ingot; The blowing component is used to blow air to the crystal rod according to the shaking data when the shaking of the crystal rod is detected, so that the central axis of the crystal rod is close to the axial central axis of the cavity of the crystal pulling furnace.

2. The crystal ingot balance control system according to claim 1, characterized in that: The cavity comprises a main cavity and a sub-cavity; the blowing assembly comprises: A plurality of groups of blowing mechanisms are arranged at intervals along the axial direction of the sub-chamber; The controller is used to control the blowing data of a plurality of blowing mechanisms according to the shaking data, so that the central axis of the crystal rod approaches the axial central axis of the cavity of the crystal pulling furnace.

3. The crystal rod balance control system according to claim 2, characterized in that: The distance between two adjacent groups of blowing mechanisms gradually increases in a direction away from the main chamber.

4. The crystal ingot balance control system according to claim 2, characterized in that: The plurality of groups of blowing assemblies are arranged at uniform intervals along the axial direction of the sub-chamber.

5. The crystal ingot balance control system according to claim 2, characterized in that: The blowing structure comprises: At least one blowing portion is evenly arranged along the circumferential direction of the sub-chamber.

6. The crystal ingot balance control system according to claim 1, characterized in that: The shaking detection device comprises: A first detection part, used to detect a first offset of the crystal rod in the axial center axis direction of the cavity; A second detection part, used to detect a second offset in a direction perpendicular to the axial center axis of the cavity; The blowing component calculates the shaking amplitude and shaking angle of the crystal rod according to the first offset and the second offset to obtain the shaking data.

7. The crystal ingot balance control system according to claim 6, characterized in that: The first detection part includes two height detection devices, which are arranged on a side of the crystal rod away from the main chamber, and the two height detection devices are symmetrically arranged relative to the axial center axis of the cavity; The height detection device is used to measure the distance between the side of the crystal rod away from the main chamber and the height detection device, and the difference in heights detected by the two height detection devices is used as the first offset.

8. The crystal ingot balance control system according to claim 6, characterized in that: The second detection unit includes two distance detection devices; The two distance detection devices are arranged along the axial center axis of the cavity, and are used to detect the distance between the edge of the crystal rod and the distance detection device, and the difference between the distances detected by the two distance detection devices is used as the second offset.

9. The crystal ingot balance control system according to claim 1, characterized in that: The blowing component is used to adjust the blowing data according to the current crystal pulling stage.

10. A crystal pulling furnace, characterized in that: include: A crystal rod balance control system for a crystal pulling furnace as claimed in any one of claims 1 to 9.

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