Water-cooling gate valve for single crystal furnace

Abstract

The invention discloses a water-cooling gate valve for a single crystal furnace. The water-cooling gate valve is easier to close or open and better in sealing performance, and a water pipe is not prone to loosening or water leakage. According to the technical scheme, the valve comprises a valve shell, an inserting plate arranged in the valve shell in a sliding mode and an air cylinder arranged outside the valve shell to drive the inserting plate to slide, a rear cover is arranged at the rear end of the valve shell, and a first flange and a second flange are arranged at the upper end and the lower end of the valve shell respectively. The bottom of the inserting plate is connected with a water cooling shaft through a supporting plate, a first water cooling channel and a first sealing plate covering the first water cooling channel are arranged on the surface of the inserting plate, at least two first water pipe connectors communicated with the first water cooling channel are arranged on the side face of the inserting plate, and the rear end of the water cooling shaft extends out of the rear cover to be connected with the air cylinder.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor material preparation, and in particular relates to a water-cooled plug valve for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device specially used for preparing single crystal materials. It mainly works in an inert gas environment (such as nitrogen and helium), uses a graphite heater to melt polycrystalline materials (such as polycrystalline silicon), and grows single crystals without dislocation by the Czochralski method. A gate valve is installed between the water-cooled exhaust pipe of the single crystal furnace and the single crystal furnace chamber. Since the temperature of the single crystal furnace chamber is relatively high, if the gate valve does not have a cooling system, it is easy to cause the internal sealing ring to deform or melt, thereby causing poor sealing. The traditional gate valve structure with a cooling system is shown in the Chinese invention patent with the application announcement number "CN 116677792 A" and the name "A high-temperature water-cooled gate valve". The scheme includes: a valve housing, a gate slidably arranged in the valve housing, and a cylinder arranged outside the valve housing to drive the gate sliding. The cylinder is connected to the gate through a connecting shaft. Flanges are respectively provided at the upper and lower ends of the valve housing. When the gate is inserted, it is closed with one of the flanges. In order to achieve sealing, sealing rings that cooperate with the gate and the connecting shaft are respectively provided on the flange and the valve housing. To achieve cooling: a water pipe is provided in the valve housing, and the two ends of the water pipe are respectively connected to the water pipe joints of the plug plate and the valve housing. The disadvantages are: 1. Since the plug plate needs to slide back and forth frequently during use, the water pipe will shake back and forth, which may easily lead to looseness or leakage between the water pipe joints. In addition, the excessively long water pipe will directly stick to the inner wall of the valve housing after sagging. If the cooling system is short of water or forgotten to be turned on, it may easily cause the water pipe to melt; 2. The sealing ring outside the connecting shaft cannot be cooled, which may easily lead to leakage at the connecting shaft; 3. The closing or opening between the plug plate and the flange is usually hard friction, which not only has large resistance, but also easily leads to wear of the flange sealing ring. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a water-cooled plug valve for a single crystal furnace, which is easier to close or open, has better sealing performance, and is less likely to loosen or leak water pipes.

[0004] To solve the above problems, the technical solution adopted by the present invention includes: a valve housing, a plug plate slidably arranged in the valve housing, and a cylinder arranged outside the valve housing to drive the plug plate to slide, the rear end of the valve housing is provided with a rear cover, and the upper and lower ends are respectively provided with a first flange and a second flange, the bottom of the plug plate is connected to a water-cooled shaft through a supporting plate, the surface is provided with a first water-cooling channel and a first sealing plate covering the first water-cooling channel, and the side is provided with at least two first water pipe joints connected to the first water-cooling channel, the rear end of the water-cooling shaft extends out of the rear cover and is connected to the cylinder, two axially extending water holes are provided in the water-cooling shaft, the outer end is provided with two first water nozzles respectively connected to the water holes, and the inner end is provided with two second water pipe joints respectively connected to the water holes; the upper end of the second flange is provided with a first sealing ring that seals with the first sealing plate, and the first water pipe joint and the second water pipe joint are connected by a water pipe.

[0005] The second flange has an inner wall provided with a second water cooling channel and a second sealing plate covering the second water cooling channel, and an outer wall provided with at least two second water nozzles communicating with the second water cooling channel.

[0006] The plug plate can be floatably mounted on the support plate through a screw assembly, and the screw assembly includes a screw and a gasket and a spring arranged on the screw in sequence. The four corners of the support plate are provided with long strip screw grooves that slide with the screw. The screw is fastened to the plug plate after passing through the long strip screw grooves.

[0007] A groove is provided at the center of the lower end surface of the support plate, and a slope for applying pressure is provided at one end of the groove. A conical groove is provided at the center of the upper end surface of the plug plate, and a steel ball is provided between the slope and the conical groove. When the plug plate is plugged into place, the support plate can continue to slide forward and be pressed against the plug plate through the cooperation between its slope and the steel ball.

[0008] An L-shaped positioning block is provided at the end of the valve housing, and the L-shaped positioning block includes a lower positioning portion and an upper positioning portion. When the plug plate is plugged into place, it is positioned at the lower positioning portion, and when the support plate is plugged into place, it is positioned at the upper positioning portion.

[0009] An upper guide bar and a lower guide bar are respectively arranged on both sides of the interior of the valve housing, and pulleys arranged between the upper guide bar and the lower guide bar are arranged on both sides of the support plate.

[0010] The inner wall of the first flange is provided with a third water cooling channel and a third sealing plate covering the first water cooling channel, and the outer wall is provided with at least two third water nozzles communicating with the third water cooling channel.

[0011] The upper end surface of the valve housing is provided with a first water barrier, and the side surface is provided with a second water barrier. The first water barrier is sealed with a first water barrier cover, and the second water barrier is sealed with a second water barrier cover plate. The first water barrier cover plate is provided with at least two fourth water spouts connected to the inner cavity of the first water barrier, and the second water barrier cover plate is provided with at least two fifth water spouts connected to the inner cavity of the second water barrier.

[0012] The cylinder is connected to the water-cooling shaft through a pull plate, U-shaped lock openings are arranged on both sides of the pull plate, and a locking rod which is hingedly connected to the U-shaped lock opening is provided on the rear cover.

[0013] Pads are provided on both sides of the support plate, and the upper end surfaces of the pads are close to the inner walls of the valve housing.

[0014] The water-cooling shaft is sleeved with a water-cooling shaft flange connected to the rear cover, and a group of second sealing rings are arranged in the water-cooling shaft flange.

[0015] The advantages of the water-cooled plug valve for a single crystal furnace of the present invention are as follows: 1. The water pipe is connected between the water-cooled shaft and the plug plate. Since the water-cooled shaft and the plug plate are in synchronous motion, the back-and-forth sliding of the plug plate will not cause the water pipe to shake back and forth, and thus will not cause loosening or water leakage between the water pipe joint, and the water pipe can be made very short and will not stick to the inner wall of the valve shell; 2. Since the water-cooled shaft is used instead of the traditional connecting shaft, the sealing ring outside the water-cooled shaft can be cooled at the same time; 3. The plug plate is installed on the support plate in a floating manner, and through the groove on the end face of the support plate, the taper of the end face of the plug plate and the cooperation of the steel ball, the plug plate can be closed or opened in a lifting manner, thereby having small resistance, good sealing performance and the sealing ring is not easy to wear.

[0016] The present invention will be further described below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the water-cooled plug valve for the single crystal furnace of the present invention; Figure 2 It is a rear view of the water-cooled plug valve of the single crystal furnace of the present invention; Figure 3 yes Figure 2 AA section view; Figure 4 yes Figure 2 BB section view; Figure 5 It is a schematic diagram of the assembly between the plug plate, the support plate and the water-cooling shaft of the present invention; Figure 6 It is an exploded schematic diagram of the plug plate, the support plate and the water-cooling shaft of the present invention; Figure 7 yes Figure 3 A partial enlarged view of . DETAILED DESCRIPTION

[0018] Reference Figure 1-Figure 7 As shown, the water-cooled plug valve for a single crystal furnace of the present invention comprises a valve housing 1, a plug plate 2 slidably arranged in the valve housing 1, and a cylinder 3 arranged outside the valve housing 1 to drive the plug plate 2 to slide. A rear cover 4 is provided at the rear end of the valve housing 1, and a first flange 5 and a second flange 6 are provided at the upper and lower ends of the valve housing 1, respectively. A water-cooling shaft 8 is connected to the bottom of the plug plate 2 through a supporting plate 7, a first water-cooling channel 9 and a first sealing plate 10 covering the first water-cooling channel 9 are provided on the surface of the plug plate 2, and two first water pipe joints 11 communicating with the first water-cooling channel 9 are provided on the side of the plug plate 2. The rear end of the water-cooling shaft 8 extends out of the rear cover 4 and is connected to the cylinder 3. Two axially extending water holes 12 are provided in the water-cooling shaft 8, two first water nozzles 13 respectively communicating with the water holes 12 are provided at the outer end of the water-cooling shaft 8, and two second water pipe joints 14 respectively communicating with the water holes 12 are provided at the inner end of the water-cooling shaft 8. The first water nozzle 13 is used to connect to the water inlet pipe and the water outlet pipe of the external water circulation system respectively. The upper end of the second flange 6 is provided with a first sealing ring 15 which is sealed with the first sealing plate 10, and the first water pipe joint 11 and the second water pipe joint 14 are connected by a water pipe 16.

[0019] Preferably, the inner wall of the second flange 6 is provided with a second water cooling channel 17 and a second sealing plate 18 covering the second water cooling channel 17, and the outer wall of the second flange 6 is provided with two second water nozzles 19 communicating with the second water cooling channel 17. The second water nozzles 19 are also connected to the water inlet pipe and the water outlet pipe of the external water circulation system, respectively, so that the second flange 6 also has a cooling function to further improve the cooling effect.

[0020] Preferably, the inner wall of the first flange 5 is provided with a third water cooling channel 33 and a third sealing plate 34 covering the first water cooling channel 9, and the outer wall of the first flange 5 is provided with two third water nozzles 35 connected with the third water cooling channel 33. The third water nozzles 35 are also connected to the water inlet pipe and the water outlet pipe of the external water circulation system respectively. The third water nozzles 35 also have a cooling function to further improve the cooling effect.

[0021] Preferably, the upper end surface of the valve housing 1 is provided with a first water barrier 36, and the side surface of the valve housing 1 is provided with a second water barrier 37. The first water barrier 36 is covered with a first water barrier cover plate 38, and the second water barrier 37 is covered with a second water barrier cover plate 39, so that the inner cavities of the first water barrier 36 and the second water barrier 37 are both formed with water cooling channels. The first water barrier cover plate 38 is provided with two fourth water nozzles 40 connected to the inner cavity of the first water barrier 36, and the second water barrier cover plate 39 is provided with two fifth water nozzles 41 connected to the inner cavity of the second water barrier 37. The fourth water nozzle 40 and the fifth water nozzle 41 are also respectively connected to the water inlet pipe and the water outlet pipe of the external water circulation system. This enables the upper end surface and the side surface of the valve housing 1 to have cooling functions to further improve the cooling effect.

[0022] Preferably, the plug board 2 is floatably mounted on the support plate 7 through a screw assembly 46. The screw assembly 46 includes a screw 20, a gasket 21 and a spring 22 sequentially arranged on the screw 20. The four corners of the support plate 7 are provided with long strip screw grooves 23 that are slidably matched with the screw 20. The screw 20 is fastened to the plug board 2 after passing through the long strip screw grooves 23. A groove 23 is provided at the center of the lower end surface of the support plate 7, and a slope 24 for applying pressure is provided at the rear end of the groove 23. A conical groove 25 is provided at the center of the upper end surface of the plug board 2, and a steel ball 26 is provided between the slope 24 and the conical groove 25. The gap between the groove 23 and the conical groove 25 is larger than the outer diameter of the steel ball 26, and the gap between the slope 24 and the conical groove 25 is smaller than the outer diameter of the steel ball 26. When the plug board 2 is plugged in place, the support plate 7 can continue to slide forward. During the forward sliding process, the support plate 7 will press the steel ball 26 downward on the plug board 2 through its inclined surface 24, so that the plug board 2 and the second flange 6 can be closed. When the support plate 7 is pulled out, the steel ball 26 will roll into the other side of the groove 23. Since the gap between the groove 23 and the tapered groove 25 is larger than the outer diameter of the steel ball 26, the plug board 2 is reset downward under the action of the spring 22, so as to be opened.

[0023] Preferably, an L-shaped positioning block 27 is provided at the end of the valve housing 1, and the L-shaped positioning block 27 includes a lower positioning portion 28 and an upper positioning portion 29. When the plug plate 2 is plugged into place, it is positioned at the lower positioning portion 28, and when the support plate 7 is plugged into place, it is positioned at the upper positioning portion 29. When the plug plate 2 is closed, the plug plate 2 reaches the L-shaped positioning block 27 before the support plate 7. Thereby, when the plug plate 2 is plugged into place, the support plate 7 can continue to slide forward.

[0024] Preferably, an upper guide bar 30 and a lower guide bar 31 are respectively provided on both sides of the valve housing 1, and pulleys 32 are provided on both sides of the support plate 7 and are placed between the upper guide bar 30 and the lower guide bar 31. Through the sliding cooperation between the pulley 32 and the upper guide bar 30 and the lower guide bar 31, the sliding of the support plate 7 is more stable and smooth.

[0025] Preferably, the cylinder 3 is connected to the water-cooling shaft 8 via a pull plate 42, and U-shaped locks 43 are provided on both sides of the pull plate 42. A locking rod 44 is hinged on the rear cover 4 and is locked with the U-shaped lock 43. By locking the locking rod 44 with the U-shaped lock 43, the plug plate 2 can be prevented from being accidentally opened, thereby improving safety.

[0026] Preferably, pads 45 are provided on both sides of the support plate 7. The upper end surface of the pad 45 is close to the inner wall of the valve housing 1. When the support plate 7 applies pressure to the plug plate 2 through the steel ball 26, the upper end surface of the pad 45 is supported on the inner wall of the valve housing 1 to prevent the applied pressure from directly acting on the pulley 32, causing deformation of the pulley 32.

[0027] Preferably, the water-cooling shaft 8 is sleeved with a water-cooling shaft flange 47 connected to the rear cover 4, and a group of second sealing rings 48 are arranged in the water-cooling shaft flange 47. The number of the second sealing rings 48 is preferably 4 to improve the sealing effect.

[0028] The above does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of the structure and technical content disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiment according to the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A water-cooled gate valve for a single crystal furnace, comprising a valve housing (1), a gate (2) slidably arranged in the valve housing (1), and a cylinder (3) arranged outside the valve housing (1) for driving the gate (2) to slide, wherein a rear cover (4) is provided at the rear end of the valve housing (1), and a first flange (5) and a second flange (6) are provided at the upper and lower ends respectively, and the valve housing (1) is characterized in that: The bottom of the plug plate (2) is connected to a water-cooling shaft (8) through a supporting plate (7), the surface is provided with a first water-cooling channel (9) and a first sealing plate (10) covering the first water-cooling channel (9), and the side is provided with at least two first water pipe joints (11) connected to the first water-cooling channel (9); the rear end of the water-cooling shaft (8) extends out of the rear cover (4) and is connected to the cylinder (3); the water-cooling shaft (8) is provided with two axially extending water holes (12), the outer end is provided with two first water nozzles (13) respectively connected to the water holes (12), and the inner end is provided with two second water pipe joints (14) respectively connected to the water holes (12); the upper end of the second flange (6) is provided with a first sealing ring (15) which is sealed with the first sealing plate (10), and the first water pipe joint (11) and the second water pipe joint (14) are connected via a water pipe (16).

2. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: The second flange (6) has an inner wall provided with a second water cooling channel (17) and a second sealing plate (18) covering the second water cooling channel (17), and an outer wall provided with at least two second water nozzles (19) in communication with the second water cooling channel (17).

3. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: The plug plate (2) is floatably mounted on the support plate (7) via a screw assembly (46), the screw assembly (46) comprising a screw (20) and a washer (21) and a spring (22) sequentially arranged on the screw (20), and four corners of the support plate (7) are provided with long strip screw grooves (23) that are slidably matched with the screw (20), and the screw (20) is fastened to the plug plate (2) after passing through the long strip screw grooves (23); A groove (23) is provided at the center of the lower end surface of the support plate (7), and a slope (24) for applying pressure is provided at one end of the groove (23). A conical groove (25) is provided at the center of the upper end surface of the plug plate (2), and a steel ball (26) is provided between the slope (24) and the conical groove (25). When the plug plate (2) is plugged into place, the support plate (7) can continue to slide forward and be pressed against the plug plate (2) through the cooperation between its slope (24) and the steel ball (26).

4. The water-cooled gate valve for a single crystal furnace according to claim 3 is characterized in that: An L-shaped positioning block (27) is provided at the end of the valve housing (1), and the L-shaped positioning block (27) comprises a lower positioning portion (28) and an upper positioning portion (29). When the plug plate (2) is plugged into place, it is positioned at the lower positioning portion (28), and when the support plate (7) is plugged into place, it is positioned at the upper positioning portion (29).

5. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: An upper guide bar (30) and a lower guide bar (31) are respectively provided on both sides of the interior of the valve housing (1), and pulleys (32) are provided on both sides of the support plate (7) and are arranged between the upper guide bar (30) and the lower guide bar (31).

6. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The first flange (5) has an inner wall provided with a third water cooling channel (33) and a third sealing plate (34) covering the first water cooling channel (9), and an outer wall provided with at least two third water nozzles (35) in communication with the third water cooling channel (33).

7. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The valve housing (1) is provided with a first water barrier (36) on the upper end surface and a second water barrier (37) on the side surface; the first water barrier (36) is covered with a first water barrier cover plate (38); the second water barrier (37) is covered with a second water barrier cover plate (39); the first water barrier cover plate (38) is provided with at least two fourth water spouts (40) connected to the inner cavity of the first water barrier (36); the second water barrier cover plate (39) is provided with at least two fifth water spouts (41) connected to the inner cavity of the second water barrier (37).

8. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The cylinder (3) is connected to the water-cooling shaft (8) via a pull plate (42), U-shaped lock openings (43) are provided on both sides of the pull plate (42), and a locking rod (44) is hingedly connected to the rear cover (4) and is locked to the U-shaped lock opening (43).

9. The water-cooled gate valve for a single crystal furnace according to claim 3, characterized in that: Pads (45) are provided on both sides of the support plate (7), and the upper end surfaces of the pads (45) are close to the inner wall of the valve housing (1).

10. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The water-cooling shaft (8) is sleeved with a water-cooling shaft flange (47) connected to the rear cover (4), and a group of second sealing rings (48) are arranged inside the water-cooling shaft flange (47).

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