Ultrafast laser multi-beam device

Abstract

The invention relates to an ultrafast laser multi-beam device comprising an ultrafast laser used for generating ultrafast pulse laser; the first polarization beam splitter is used for separating the ultrafast pulse laser into S-polarized light and P-polarized light; the S-polarized light modulator is used for sequentially carrying out light beam direction adjustment and light intensity modulation on the S-polarized light to finally obtain first polarized light and second polarized light; the P-polarized light modulator is used for carrying out light beam direction adjustment and light intensity modulation on the P-polarized light to finally obtain third polarized light and fourth polarized light; and the light beam output part is used for carrying out pulse width compression on the pulse width of at least one light beam in the first polarized light, the second polarized light, the third polarized light and the fourth polarized light and outputting. The device can obtain light beams of different types and different pulse widths, and has the advantages of cost reduction, simplicity in operation, convenience in use and high control precision.

Description

Technical Field

[0001] The invention belongs to the technical field of lasers, and in particular relates to an ultrafast laser multi-beam device. Background Art

[0002] At present, with the increasing requirements for processing efficiency in the field of industrial laser processing, higher requirements are put forward for the output power and output frequency of the laser. It is necessary to use higher output power and frequency to improve processing efficiency. However, when the laser power is increased to a certain extent, the processing quality will be affected by the thermal effect, and the increase in the laser repetition frequency is limited by the scanning speed of the galvanometer or the movement speed of the platform and cannot be used. Therefore, the multi-channel parallel processing method came into being, which can significantly improve the efficiency of laser processing, such as using 2-channel, 4-channel or more-channel splitting. The current mainstream method of splitting is to split the laser with a single partial output lens, and select output mirrors with different transmittances according to the required splitting ratio. However, this splitting method cannot accurately control the transmittance of the lens, and there is a phenomenon of inconsistent laser power in each channel after splitting, which affects the consistency of the processing effect. In addition, after splitting, the power of each channel cannot be controlled independently. The power of each laser channel depends entirely on the laser itself. Usually two or more lasers with different wavelengths are selected to generate a beam of a specific power. The cost of use is very high and the system is relatively complex.

[0003] In short, existing optical splitters have the problems of complex structure, high cost and difficult operation. Summary of the invention

[0004] In order to solve the above problems existing in the prior art, the present invention provides an ultrafast laser multi-beam device. The technical problem to be solved by the present invention is achieved through the following technical solutions:

[0005] The present invention provides an ultrafast laser multi-beam device, comprising: an ultrafast laser for generating ultrafast pulse laser; a first polarization beam splitter for separating the ultrafast pulse laser into S-polarized light and P-polarized light; an S-polarized light modulator for sequentially adjusting the beam direction and modulating the light intensity of the S-polarized light to obtain a first laser beam and a second laser beam with different polarization directions; performing a focusing coupling process on the first laser beam to obtain a first polarized light; performing a beam direction adjustment, light intensity modulation and focusing coupling process on the second laser beam to obtain a second polarized light; a P-polarized light modulator for performing a beam direction adjustment and light intensity modulation on the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; performing a focusing coupling process on the third laser beam to obtain a third polarized light; performing a beam direction adjustment and light intensity modulation on the fourth laser beam to obtain a fourth polarized light; and a beam output unit for compressing and outputting the pulse width of at least one of the first polarized light, the second polarized light, the third polarized light and the fourth polarized light.

[0006] In some embodiments, the S-polarized light modulator includes: a second polarization beam splitter, a first beam processor and a second beam processor; the second polarization beam splitter is used to sequentially adjust the beam direction and modulate the light intensity of the S-polarized light to obtain the first laser beam and the second laser beam; the first beam processor is used to perform focus coupling processing on the first laser beam to obtain the first polarized light; the second beam processor is used to sequentially perform beam direction adjustment, light intensity modulation and focus coupling processing on the second laser beam to obtain the second polarized light.

[0007] In some embodiments, the second polarization beam splitter includes: a first 1 / 2 wave plate, a first polarization beam splitter prism and a first acousto-optic modulator; the first 1 / 2 wave plate and the first polarization beam splitter prism cooperate to adjust the beam direction of the incident S-polarized light to obtain a first modulated light; the first acousto-optic modulator is used to modulate the light intensity of the first modulated light to obtain the first laser beam and the second laser beam.

[0008] In some embodiments, the first beam processor includes: a first focusing lens and a first fiber coupling cavity; the first focusing lens is used to focus the first laser beam to obtain a first focused light; the first fiber coupling cavity is used to align the spot of the first focused light with the core diameter of the beam output part to obtain the first polarized light.

[0009] In some embodiments, the second beam processor includes: a second 1 / 2 wave plate, a second polarization beam splitter, a second acousto-optic modulator, a second focusing lens and a second fiber coupling cavity; the second 1 / 2 wave plate and the second polarization beam splitter cooperate to adjust the beam direction of the incident second laser beam to obtain a second modulated light; the second acousto-optic modulator is used to modulate the light intensity of the second modulated light to obtain a modulated second modulated light; the second focusing lens is used to focus the modulated second modulated light to obtain a second focused light; the second fiber coupling cavity is used to align the spot of the second focused light with the core diameter of the beam output portion to obtain the second polarized light.

[0010] In some embodiments, the P-polarized light modulator includes: a third acousto-optic modulator, a third beam processor and a fourth beam processor; the third acousto-optic modulator is used to adjust the beam direction and modulate the light intensity of the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; the third beam processor is used to perform focus coupling processing on the third laser beam to obtain the third polarized light; the fourth beam processor is used to adjust the beam direction and modulate the light intensity of the fourth laser beam to obtain the fourth polarized light.

[0011] In some embodiments, the third beam processor includes: a third focusing lens and a third fiber coupling cavity; the third focusing lens is used to focus the third laser beam to obtain a third focused light; the third fiber coupling cavity is used to align the spot of the third focused light with the core diameter of the beam output part to obtain the third polarized light.

[0012] In some embodiments, the fourth beam processor includes: a third 1 / 2 wave plate, a third polarization beam splitter prism, a fourth acousto-optic modulator, a fourth focusing lens and a fourth fiber coupling cavity; the third 1 / 2 wave plate and the third polarization beam splitter prism cooperate to adjust the beam direction of the fourth laser beam to obtain a fourth modulated light; the fourth acousto-optic modulator is used to modulate the light intensity of the fourth modulated light to obtain a modulated fourth modulated light; the fourth focusing lens is used to focus the modulated fourth modulated light to obtain a fourth focused light; the fourth fiber coupling cavity is used to align the spot of the fourth focused light with the core diameter of the beam output portion to obtain the fourth polarized light.

[0013] In some embodiments, the first polarization beam splitter includes: a fourth 1 / 2 wave plate and a fourth polarization beam splitter prism; the fourth 1 / 2 wave plate and the fourth polarization beam splitter prism cooperate to separate the ultrafast pulse laser into the S-polarized light and the P-polarized light.

[0014] In some embodiments, the light beam output portion is a hollow optical fiber filled with an inert gas.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] In view of the problems that the existing beam splitters have complex structures, high costs and are difficult to operate, the present invention provides an ultrafast laser multi-beam device, which performs multiple beam splitting through a first polarization beam splitter, an S-polarization light modulator and a P-polarization light modulator, and in the S-polarization light modulator and the P-polarization light modulator, the light intensity and the direction of the light beam can be adjusted, and then the pulse width of the adjusted light beam is compressed and output by using the beam output unit. The entire device has a simple structure, involving only a single laser, and when adjusting the pulse width, light intensity and direction of the light beam, it does not rely on the ultrafast laser itself, but adjusts the parameters of the first polarization beam splitter, the S-polarization light modulator, the P-polarization light modulator and the beam output unit according to actual needs, so that light beams of different types and different pulse widths can be obtained, which has the advantages of reduced cost, simple operation, convenient use and high control accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a structural block diagram of an ultrafast laser multi-beam device provided by an embodiment of the present invention;

[0018] Figure 2 is another structural example diagram of the ultrafast laser multi-beam device provided by an embodiment of the present invention;

[0019] Figure 3 It is a schematic diagram of the structural connection of an ultrafast laser multi-beam device provided by an embodiment of the present invention;

[0020] Figure 4 is another structural block diagram of the ultrafast laser multi-beam device provided by an embodiment of the present invention;

[0021] Figure 5 is another structural example diagram of the ultrafast laser multi-beam device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0022] The present invention is further described in detail below with reference to specific embodiments, but the embodiments of the present invention are not limited thereto.

[0023] In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0024] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0025] Although the present invention is described herein in conjunction with various embodiments, in the process of implementing the claimed invention, those skilled in the art may understand and implement other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other components or steps, and "one" or "an" does not exclude multiple situations. A single processor or other unit may implement several functions listed in the claims. Certain measures are recorded in different dependent claims, but this does not mean that these measures cannot be combined to produce good results.

[0026] The ultrafast laser multi-beam device provided by the present invention is now described in detail with reference to the accompanying drawings.

[0027] Embodiment 1

[0028] Figure 1 is a structural block diagram of an ultrafast laser multi-beam device provided by an embodiment of the present invention; Figure 2 is another structural example diagram of the ultrafast laser multi-beam device provided by an embodiment of the present invention; Figure 3 Schematic diagram of the structure connection of the ultrafast laser multi-beam device provided by the embodiment of the present invention. Figures 1 to 3As shown, the device includes: an ultrafast laser for generating ultrafast pulse laser; a first polarization beam splitter for separating the ultrafast pulse laser into S-polarized light and P-polarized light; an S-polarized light modulator for sequentially adjusting the beam direction and modulating the light intensity of the S-polarized light to obtain a first laser beam and a second laser beam with different polarization directions; performing a focusing coupling process on the first laser beam to obtain a first polarized light; performing a beam direction adjustment, light intensity modulation and focusing coupling process on the second laser beam to obtain a second polarized light; a P-polarized light modulator for performing a beam direction adjustment and light intensity modulation on the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; performing a focusing coupling process on the third laser beam to obtain a third polarized light; performing a beam direction adjustment and light intensity modulation on the fourth laser beam to obtain a fourth polarized light; and a beam output unit for compressing and outputting the pulse width of at least one of the first polarized light, the second polarized light, the third polarized light and the fourth polarized light.

[0029] Here, ultrafast laser refers to a solid-state laser that can generate ultrashort pulses, usually with a pulse width in the order of picoseconds (ps) or femtoseconds (fs). Also, S-polarized light refers to polarized light whose polarization direction is perpendicular to the incident plane, and P-polarized light refers to polarized light whose polarization direction is parallel to the incident plane.

[0030] It should be noted that the ultrafast laser multi-beam device provided in the embodiment of the present invention can make the S-polarized light modulator or the P-polarized light modulator work alone, or can make the S-polarized light modulator and the P-polarized light modulator work together. In addition, the energy distribution of the S-polarized light modulator and the P-polarized light modulator can be adjusted by the first polarization beam splitter, and then a secondary adjustment is performed inside the S-polarized light modulator or the P-polarized light modulator, which does not rely on the ultrafast laser.

[0031] It should be noted that the light intensities and pulse widths of the first polarized light, the second polarized light, the third polarized light, and the fourth polarized light are all different.

[0032] Here, the S-polarization light modulator includes: a second polarization splitter, a first beam processor and a second beam processor; the second polarization splitter is used to sequentially adjust the beam direction and modulate the light intensity of the S-polarized light to obtain a first laser beam and a second laser beam; the first beam processor is used to perform focus coupling processing on the first laser beam to obtain a first polarized light; the second beam processor is used to sequentially adjust the beam direction, modulate the light intensity and perform focus coupling processing on the second laser beam to obtain a second polarized light.

[0033] Specifically, the second polarization beam splitter includes: a first 1 / 2 wave plate, a first polarization beam splitter prism and a first acousto-optic modulator; the first 1 / 2 wave plate and the first polarization beam splitter prism cooperate to adjust the beam direction of the incident S-polarized light to obtain the first modulated light; the first acousto-optic modulator is used to modulate the light intensity of the first modulated light to obtain the first laser beam and the second laser beam.

[0034] Here, the acousto-optic modulator, also known as an Acousto-Optic Modulator (AOM), can modulate and control the laser beam in a laser so that the laser can output a desired optical signal. In a possible implementation, the acousto-optic modulators in this article are all Bragg acousto-optic modulators.

[0035] In addition, the first beam processor includes: a first focusing lens and a first fiber coupling cavity; the first focusing lens is used to focus the first laser beam to obtain a first focused light; the first fiber coupling cavity is used to align the spot of the first focused light with the core diameter of the beam output part to obtain the first polarized light.

[0036] Here, the function of the focusing lens is to focus the first laser beam onto a smaller spot to improve the light intensity concentration and coupling efficiency of the beam. The function of the fiber coupling cavity is to align the spot of the first focused light with the core diameter of the beam output portion and ensure that the spot of the first focused light can completely cover the core diameter of the optical fiber. It should be noted that the functions of the "focusing lens" and "fiber coupling cavity" below are the same as those described here, and for the sake of brevity, they will not be repeated below.

[0037] In addition, the second beam processor includes: a second 1 / 2 wave plate, a second polarization beam splitter prism, a second acousto-optic modulator, a second focusing lens, and a second fiber coupling cavity; the second 1 / 2 wave plate and the second polarization beam splitter prism cooperate to adjust the beam direction of the incident second laser beam to obtain a second modulated light; the second acousto-optic modulator is used to modulate the light intensity of the second modulated light to obtain a modulated second modulated light; the second focusing lens is used to focus the modulated second modulated light to obtain a second focused light; the second fiber coupling cavity is used to align the light spot of the second focused light with the core diameter of the beam output portion to obtain a second polarized light.

[0038] Based on the structural description of the S-polarization light modulator, it can be seen that the S-polarization light modulator contains two branches, branch 1 is ultrafast laser-first polarization beam splitter-second polarization beam splitter-first beam processor; branch 2 is ultrafast laser-first polarization beam splitter-second polarization beam splitter-second beam processor.

[0039] Here, the P-polarized light modulator includes: a third acousto-optic modulator, a third beam processor and a fourth beam processor; the third acousto-optic modulator is used to adjust the beam direction and light intensity modulation of the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; the third beam processor is used to perform focus coupling processing on the third laser beam to obtain a third polarized light; the fourth beam processor is used to adjust the beam direction and light intensity modulation of the fourth laser beam to obtain a fourth polarized light.

[0040] Specifically, the third beam processor includes: a third focusing lens and a third fiber coupling cavity; the third focusing lens is used to focus the third laser beam to obtain a third focused light; the third fiber coupling cavity is used to align the spot of the third focused light with the core diameter of the beam output part to obtain a third polarized light.

[0041] In addition, the fourth beam processor includes: a third 1 / 2 wave plate, a third polarization beam splitter prism, a fourth acousto-optic modulator, a fourth focusing lens and a fourth fiber coupling cavity; the third 1 / 2 wave plate and the third polarization beam splitter prism cooperate to adjust the beam direction of the fourth laser beam to obtain a fourth modulated light; the fourth acousto-optic modulator is used to modulate the light intensity of the fourth modulated light to obtain a modulated fourth modulated light; the fourth focusing lens is used to focus the modulated fourth modulated light to obtain a fourth focused light; the fourth fiber coupling cavity is used to align the light spot of the fourth focused light with the core diameter of the beam output portion to obtain a fourth polarized light.

[0042] Here, the first polarization beam splitter includes: a fourth 1 / 2 wave plate and a fourth polarization beam splitter prism; the fourth 1 / 2 wave plate and the fourth polarization beam splitter prism cooperate to separate the ultrafast pulse laser into S-polarized light and P-polarized light.

[0043] Based on the structural description of the P-polarization light modulator, it can be seen that the P-polarization light modulator contains two branches, branch 3 is an ultrafast laser-first polarization beam splitter-third acousto-optic modulator-third beam processor; branch 2 is an ultrafast laser-first polarization beam splitter-third acousto-optic modulator-fourth beam processor.

[0044] Here, when the Bragg-type acousto-optic modulator processes ultrafast lasers, dispersion problems are prone to occur. To overcome the dispersion problem, the beam output part is a hollow-core optical fiber filled with an inert gas, and each branch is connected to a hollow-core optical fiber filled with an inert gas at one end. Specifically, different gases have different physical and chemical properties, which will affect the nonlinear process in the optical fiber, thereby affecting the effect of pulse width compression. In order to enhance the pulse width compression effect of the incident laser beam (i.e., the first polarized light, the second polarized light, the third polarized light, or the fourth polarized light), the hollow-core optical fiber is inflated, and the inert gas includes: neon, helium, and argon. In addition, the nonlinear process in the optical fiber is also related to the pressure of the gas. By controlling the gas pressure, the size of the nonlinear refractive index can be adjusted, thereby controlling the nonlinear process. When other conditions remain unchanged, the broadening of the pulse spectrum is proportional to the pressure. This means that by increasing the pressure, the broadening of the spectrum can be increased, thereby achieving pulse width compression. It should be noted that the threshold of the peak power is inversely proportional to the pressure. When the pressure reaches a certain level, the peak power will be limited. Therefore, when increasing the pressure to increase the spectrum broadening, it is necessary to ensure that the peak power still meets the threshold condition.

[0045] Here, after obtaining a hollow-core optical fiber with a certain pressure, the supercontinuum pulse width of the incident laser beam (i.e., the first polarized light, the second polarized light, the third polarized light, or the fourth polarized light) obtained by the hollow-core optical fiber filled with an inert gas is compressed by using the spectrum splitting dual-path compression technology, and then the energy of the incident laser beam is increased by using the pre-chirp injection technology, as well as the pulse width. Here, based on the spectrum splitting dual-path compression technology and the pre-chirp injection technology, a pulse output with an energy of 2.1 mJ and a pulse width of 6.3 fs can be achieved.

[0046] It should be noted that by changing the type of gas injected into the hollow optical fiber in each branch and adjusting the pressure of the gas injected into the hollow optical fiber, the pulse width compression of the branch can be changed.

[0047] Embodiment 2

[0048] It should be noted that the embodiments of the present invention are not limited to generating four polarized lights. According to actual needs, the number of polarized light modulators can also be adjusted, for example, the number of S-polarized light modulators can be increased to at least 2, or the number of P-polarized light modulators can be increased to at least 2; and partial loops in the polarized light modulator can also be added according to actual needs. The pulse width and light intensity of the polarized light generated by each polarized light modulator can be the same or different.

[0049] Figure 4 is another structural block diagram of the ultrafast laser multi-beam device provided by an embodiment of the present invention, Figure 5is another structural example diagram of the ultrafast laser multi-beam device provided by an embodiment of the present invention. It should be noted that: Figure 5 Device name and Figure 3 The devices with the same device name in are the same device. For the sake of brevity, they will not be described here, and only the newly added parts will be described.

[0050] like Figure 4 and Figure 5 As shown, the ultrafast laser generates a beam of ultrafast pulse laser, the pulse width of the ultrafast pulse laser is 10s to 12s, the ultrafast pulse laser is divided into two beams of light (composed of S-polarized light and P-polarized light) by the first polarization beam splitter, the S-polarized light enters the first S-polarized light modulator and the second S-polarized light modulator, the first S-polarized light modulator includes the second polarization beam splitter, the first beam processor, the second beam processor and the third beam processor; the third beam processor is the same as the device included in the second beam processor; the second S-polarized light modulator includes the third polarization beam splitter, the fourth beam processor, the fifth beam processor and the sixth beam processor; the second S-polarized light modulator and the first S-polarized light modulator have the same structure. The S-polarized light enters the first S-polarized light modulator to generate three polarized lights, namely the first polarized light, the second polarized light and the third polarized light. The S-polarized light enters the second S-polarized light modulator, and is modulated by the second S-polarized light modulator to generate the fourth polarized light, the fifth polarized light and the sixth polarized light. Furthermore, the P-polarized light enters a P-polarized light modulator, which includes: a third acousto-optic modulator, a seventh light beam processor, and an eighth light beam processor; Figure 4 The structure and Figure 2 The structure of the P-polarization light modulator in the same. After modulation by the P-polarization light modulator, the P-polarization light is divided into the seventh polarization light and the eighth polarization light; the generated polarization lights are transmitted to the equipment or processing light path through the hollow optical fiber filled with inert gas.

[0051] In view of the problems that the existing beam splitters have complex structures, high costs and are difficult to operate, the present invention provides an ultrafast laser multi-beam device, which performs multiple beam splitting through a first polarization beam splitter, an S-polarization light modulator and a P-polarization light modulator, and in the S-polarization light modulator and the P-polarization light modulator, the light intensity and the direction of the light beam can be adjusted, and then the pulse width of the adjusted light beam is compressed and output by using the beam output unit. The entire device has a simple structure, involving only a single laser, and when adjusting the pulse width, light intensity and direction of the light beam, it does not rely on the ultrafast laser itself, but adjusts the parameters of the first polarization beam splitter, the S-polarization light modulator, the P-polarization light modulator and the beam output unit according to actual needs, so that light beams of different types and different pulse widths can be obtained, which has the advantages of reduced cost, simple operation, convenient use and high control accuracy.

[0052] The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. An ultrafast laser multi-beam device, characterized in that: include: Ultrafast lasers, used to generate ultrafast pulsed lasers; A first polarization beam splitter, used to separate the ultrafast pulse laser into S-polarized light and P-polarized light; An S-polarized light modulator is used to sequentially adjust the beam direction and modulate the light intensity of the S-polarized light to obtain a first laser beam and a second laser beam with different polarization directions; perform focus coupling processing on the first laser beam to obtain a first polarized light; and sequentially perform beam direction adjustment, light intensity modulation and focus coupling processing on the second laser beam to obtain a second polarized light; A P-polarized light modulator is used to adjust the beam direction and light intensity of the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; perform focusing coupling processing on the third laser beam to obtain a third polarized light; and adjust the beam direction and light intensity of the fourth laser beam to obtain a fourth polarized light; The light beam output unit is used to compress the pulse width of at least one light beam among the first polarized light, the second polarized light, the third polarized light and the fourth polarized light and output the compressed pulse width.

2. The ultrafast laser multi-beam device according to claim 1, characterized in that: The S-polarized light modulator comprises: a second polarization beam splitter, a first beam processor and a second beam processor; The second polarization beam splitter is used to sequentially adjust the beam direction and modulate the light intensity of the S-polarized light to obtain the first laser beam and the second laser beam; The first beam processor is used to perform focusing coupling processing on the first laser beam to obtain the first polarized light; The second beam processor is used to sequentially perform beam direction adjustment, light intensity modulation and focus coupling processing on the second laser beam to obtain the second polarized light.

3. The ultrafast laser multi-beam device according to claim 2, characterized in that: The second polarization beam splitter comprises: a first 1 / 2 wave plate, a first polarization beam splitting prism and a first acousto-optic modulator; The first 1 / 2 wave plate cooperates with the first polarization beam splitter prism to adjust the beam direction of the incident S-polarized light to obtain a first modulated light; The first acousto-optic modulator is used to modulate the light intensity of the first modulated light to obtain the first laser beam and the second laser beam.

4. The ultrafast laser multi-beam device according to claim 2, characterized in that: The first beam processor includes: a first focusing lens and a first fiber coupling cavity; The first focusing lens is used to focus the first laser beam to obtain a first focused light; The first optical fiber coupling cavity is used to align the light spot of the first focused light and the core diameter of the light beam output portion to obtain the first polarized light.

5. The ultrafast laser multi-beam device according to claim 2, characterized in that: The second beam processor comprises: a second 1 / 2 wave plate, a second polarization beam splitter prism, a second acousto-optic modulator, a second focusing lens and a second fiber coupling cavity; The second 1 / 2 wave plate cooperates with the second polarization beam splitter prism to adjust the beam direction of the incident second laser beam to obtain a second modulated light; The second acousto-optic modulator is used to modulate the light intensity of the second modulated light to obtain a modulated second modulated light; The second focusing lens is used to focus the modulated second modulated light to obtain second focused light; The second optical fiber coupling cavity is used to align the light spot of the second focused light with the core diameter of the light beam output portion to obtain the second polarized light.

6. The ultrafast laser multi-beam device according to claim 1, characterized in that: The P-polarized light modulator comprises: a third acousto-optic modulator, a third light beam processor and a fourth light beam processor; The third acousto-optic modulator is used to adjust the beam direction and light intensity of the P-polarized light to obtain a third laser beam and a fourth laser beam with different polarization directions; The third beam processor is used to perform focusing coupling processing on the third laser beam to obtain the third polarized light; The fourth beam processor is used to adjust the beam direction and light intensity of the fourth laser beam to obtain the fourth polarized light.

7. The ultrafast laser multi-beam device according to claim 6, characterized in that: The third beam processor comprises: a third focusing lens and a third fiber coupling cavity; The third focusing lens is used to focus the third laser beam to obtain a third focused light; The third optical fiber coupling cavity is used to align the light spot of the third focused light with the core diameter of the light beam output portion to obtain the third polarized light.

8. The ultrafast laser multi-beam device according to claim 6, characterized in that: The fourth beam processor comprises: a third 1 / 2 wave plate, a third polarization beam splitter prism, a fourth acousto-optic modulator, a fourth focusing lens and a fourth fiber coupling cavity; The third 1 / 2 wave plate cooperates with the third polarization beam splitter prism to adjust the beam direction of the fourth laser beam to obtain a fourth modulated light; The fourth acousto-optic modulator is used to modulate the light intensity of the fourth modulated light to obtain a modulated fourth modulated light; The fourth focusing lens is used to focus the modulated fourth modulated light to obtain fourth focused light; The fourth optical fiber coupling cavity is used to align the light spot of the fourth focused light with the core diameter of the light beam output portion to obtain the fourth polarized light.

9. The ultrafast laser multi-beam device according to claim 1, characterized in that: The first polarization beam splitter comprises: a fourth 1 / 2 wave plate and a fourth polarization beam splitting prism; The fourth 1 / 2 wave plate cooperates with the fourth polarization beam splitter prism to separate the ultrafast pulse laser into the S-polarized light and the P-polarized light.

10. The ultrafast laser multi-beam device according to claim 1, characterized in that: The light beam output part is a hollow optical fiber filled with an inert gas.

Images