Control parameter adjustment device and control parameter adjustment method

Abstract

The present invention is provided with: an actual process operation information acquisition unit (50) that acquires actual process operation information indicating an operation in a workflow of an actual process of a device (100); an adjustment operation command generation unit (20) that generates, on the basis of the actual process operation information, an adjustment operation command for the control parameter, the adjustment operation command specifying the operation of the servo motor (110); a control unit (30) that controls the servo motor (110) on the basis of the adjustment operation command and the control parameter; a state information acquisition unit (60) that acquires state information relating to the state of the device (100) caused by the operation of the servo motor (110) controlled by the control unit (30); and a control parameter adjustment unit (40) that adjusts the control parameter on the basis of the state information.

Description

Technical Field

[0001] The invention relates to a control parameter adjustment device for adjusting the control parameters of a servo motor. Background Art

[0002] Patent Document 1 describes a control parameter adjustment device that adjusts control parameters of a servo motor included in a device.

[0003] Prior Art Literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-35159 Summary of the invention

[0006] Problems to be solved by the invention

[0007] However, Patent Document 1 does not disclose a specific method for generating an operation command for adjusting a control parameter.

[0008] For example, although the device can also utilize the motion instructions of the servo motor used in the workflow of the actual process as motion instructions for adjusting the control parameters, in cases where the servo motor performs relatively complex movements in the workflow of the actual process, sometimes the adjustment of the control parameters takes too much time and cannot be completed within a practical time.

[0009] Therefore, in a case where the servo motor performs a relatively complicated operation in the workflow of an actual process, it is necessary to prepare an appropriate operation command for adjusting the control parameter in order to adjust the control parameter.

[0010] However, in general, when a servo motor performs relatively complicated operations in the workflow of an actual process, it is difficult for a person who has not accumulated the skills for adjusting control parameters to prepare appropriate operation instructions for adjusting control parameters.

[0011] Therefore, an object of the present disclosure is to provide a control parameter adjustment device and a control parameter adjustment method that can adjust a control parameter even if an operation instruction for adjusting the control parameter is not prepared.

[0012] Means for solving problems

[0013] A control parameter adjustment device involved in one method of the present disclosure adjusts the control parameters of a servo motor of a device respectively, and the control parameter adjustment device comprises: an actual process action information acquisition unit, which acquires actual process action information of the device representing the action in the workflow of the actual process; an adjustment action instruction generation unit, which generates an adjustment action instruction of the control parameter based on the actual process action information, and the adjustment action instruction specifies the action of the servo motor; a control unit, which controls the servo motor based on the adjustment action instruction and the control parameter; a state information acquisition unit, which acquires state information related to the state of the device caused by the action of the servo motor controlled by the control unit; and a control parameter adjustment unit, which adjusts the control parameter based on the state information.

[0014] A control parameter adjustment method involved in one aspect of the present disclosure adjusts control parameters of a servo motor possessed by a device, respectively, and the control parameter adjustment method comprises: an actual process action information acquisition step, acquiring actual process action information of the device representing an action in a workflow of an actual process; an adjustment action instruction generation step, generating an adjustment action instruction of the control parameter based on the actual process action information; a control step, controlling the servo motor based on the adjustment action instruction and the control parameter; a status information acquisition step, acquiring status information related to the status of the device caused by the action of the servo motor controlled by the control step; and a control parameter adjustment step, adjusting the control parameter based on the adjustment action instruction and the status information.

[0015] Effects of the Invention

[0016] According to the control parameter adjustment device and the control parameter adjustment method according to one aspect of the present disclosure, the control parameter can be appropriately adjusted even if an operation command for adjusting the control parameter is not prepared. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram showing an overview of a control parameter adjustment system according to an embodiment.

[0018] Figure 2 It is a perspective view of the device involved in the embodiment.

[0019] Figure 3 This is a schematic diagram showing an example of a trajectory of a driven object in a workflow of an actual process of the device according to the embodiment.

[0020] Figure 4 It is a schematic diagram showing an example of a plurality of unit operations divided by the first operation command generating unit 21 according to the embodiment.

[0021] Figure 5 This is an example of a plurality of unit motion frequency characteristics calculated by the feature quantity calculation unit according to the embodiment.

[0022] Figure 6 This is a schematic diagram showing an example of a situation in which the second operation command generating unit according to the embodiment determines one or more specific unit frequency characteristics.

[0023] Figure 7 This is a schematic diagram showing an example of a situation in which the second motion command generating unit according to the embodiment checks whether the difference between the natural vibration frequency represented by the first unit frequency characteristic and the natural vibration frequency represented by the second unit frequency characteristic is smaller than a given second threshold value.

[0024] Figure 8 is a schematic diagram for explaining the stabilization time.

[0025] Fig. 9 is a flow chart of the control parameter adjustment process. DETAILED DESCRIPTION

[0026] (Process of obtaining one method of the present disclosure)

[0027] The inventors have developed a control parameter adjustment device for adjusting control parameters of servo motors included in equipment.

[0028] As described above, in a case where the servo motor performs relatively complex actions in the workflow of an actual process, in order to appropriately adjust the control parameters, it is necessary to prepare appropriate action instructions for adjusting the control parameters. In such a case, it is difficult for personnel who have not accumulated the skills for adjusting the control parameters to prepare appropriate action instructions for adjusting the control parameters.

[0029] Therefore, the inventors have intensively conducted experiments and studies repeatedly to develop a control parameter adjustment device capable of adjusting control parameters without preparing an operation command for adjusting the control parameters.

[0030] As a result, the inventors have come up with the control parameter adjustment device and control parameter adjustment method according to the present disclosure described below.

[0031] A control parameter adjustment device involved in one method of the present disclosure adjusts the control parameters of a servo motor of a device respectively, and the control parameter adjustment device comprises: an actual process action information acquisition unit, which acquires actual process action information of the device representing the action in the workflow of the actual process; an adjustment action instruction generation unit, which generates an adjustment action instruction of the control parameter based on the actual process action information, and the adjustment action instruction specifies the action of the servo motor; a control unit, which controls the servo motor based on the adjustment action instruction and the control parameter; a state information acquisition unit, which acquires state information related to the state of the device caused by the action of the servo motor controlled by the control unit; and a control parameter adjustment unit, which adjusts the control parameter based on the state information.

[0032] According to the control parameter adjustment device of the above structure, the adjustment action instruction generation unit generates the control parameter adjustment action instruction based on the actual process action information representing the action in the workflow of the actual process, and the control parameter adjustment unit adjusts the control parameter based on the generated adjustment action instruction.

[0033] Therefore, according to the control parameter adjustment device having the above configuration, the control parameter can be adjusted even without preparing an operation command for adjusting the control parameter.

[0034] Furthermore, when the state information acquisition unit acquires the state information, the adjustment operation command generation unit may further generate the adjustment operation command based on the state information.

[0035] This allows the adjustment operation instruction to reflect the content of the status information.

[0036] In addition, it may also be that the adjustment action instruction generating unit comprises: a first action instruction generating unit, which divides the action of the device represented by the actual process action information into multiple unit actions, and generates multiple unit action instructions that respectively cause the device to perform the multiple unit actions and specify the action of the servo motor, and generates a first adjustment action instruction including the multiple unit action instructions; a characteristic quantity calculating unit, which calculates a device characteristic quantity related to the characteristics of the device based on the first state information when the state information acquiring unit acquires the first state information related to the state of the device caused by the action of the servo motor controlled by the control unit based on the first adjustment action instruction; and a second action instruction generating unit, which selects one or more unit action instructions from the multiple unit action instructions based on the device characteristic quantity, and generates a second adjustment action instruction including the one or more unit action instructions, and the control parameter adjustment unit adjusts the control parameter based on the second adjustment action instruction serving as the adjustment action instruction.

[0037] Thereby, the control parameter can be adjusted based on the unit operation command.

[0038] Furthermore, the state information may be displacement information indicating a time series of displacements related to the device, and the feature quantity calculation unit may calculate a frequency characteristic of the device related to a shake of the device as the device feature quantity based on the displacement information.

[0039] This makes it possible to adjust control parameters based on the frequency characteristics of the device.

[0040] In addition, it may also be that the displacement information includes a plurality of unit displacement information corresponding one-to-one to the plurality of unit action instructions, the plurality of unit displacement information are respectively information representing a time series of displacements of the device caused by the action of the servo motor controlled by the control unit based on the corresponding unit action instructions, the characteristic quantity calculation unit calculates a plurality of unit frequency characteristics corresponding one-to-one to the plurality of unit action instructions as the frequency characteristics based on the plurality of unit displacement information, the plurality of unit frequency characteristics are respectively information representing frequency characteristics related to shaking of the device caused by the action of the servo motor controlled by the control unit based on the corresponding unit action instructions, the second action instruction generation unit determines one or more specific unit frequency characteristics that meet given conditions among the plurality of unit frequency characteristics, and selects one or more specific unit action instructions corresponding one-to-one to the one or more specific unit frequency characteristics as the one or more unit action instructions.

[0041] Thus, the control parameters can be adjusted based on a unit operation command that causes the device to generate a vibration having a frequency characteristic that satisfies a given condition.

[0042] Furthermore, the second motion command generating unit may determine the one or more specific unit frequency characteristics under the condition that an amplitude related to the shaking of the device represented by the unit frequency characteristics is larger than a given first threshold value as the given condition.

[0043] Thus, the control parameter can be adjusted based on the unit operation command that causes the device to vibrate with an amplitude greater than the first threshold value.

[0044] In addition, it may also be that, when there are a first unit frequency characteristic and a second unit frequency characteristic that satisfy the given condition, and when the difference between the natural vibration frequency related to the shaking of the device represented by the first unit frequency characteristic and the natural vibration frequency represented by the second unit frequency characteristic is less than a given second threshold value, the second action instruction generating unit excludes the unit frequency characteristic representing the smaller amplitude between the first unit frequency characteristic and the second unit frequency characteristic to determine the one or more specific unit frequency characteristics.

[0045] This can reduce the number of unit motion commands included in the second adjustment motion command, thereby reducing the time required for adjusting the control parameters.

[0046] A control parameter adjustment method involved in one aspect of the present disclosure adjusts control parameters of a servo motor possessed by a device, respectively, and the control parameter adjustment method comprises: an actual process action information acquisition step, acquiring actual process action information of the device representing an action in a workflow of an actual process; an adjustment action instruction generation step, generating an adjustment action instruction of the control parameter based on the actual process action information; a control step, controlling the servo motor based on the adjustment action instruction and the control parameter; a status information acquisition step, acquiring status information related to the status of the device caused by the action of the servo motor controlled by the control step; and a control parameter adjustment step, adjusting the control parameter based on the adjustment action instruction and the status information.

[0047] According to the control parameter adjustment method, the adjustment action instruction generation step generates the control parameter adjustment action instruction based on the actual process action information representing the action in the workflow of the actual process, and the control parameter is adjusted based on the generated adjustment action instruction through the control parameter adjustment step.

[0048] Therefore, according to the control parameter adjustment method described above, the control parameter can be adjusted even without preparing an operation command for adjusting the control parameter.

[0049] Furthermore, in the adjusting motion command generating step, when the state information is acquired in the state information acquiring step, the adjusting motion command may be further generated based on the state information.

[0050] This allows the adjustment operation instruction to reflect the content of the status information.

[0051] Hereinafter, a specific example of a control parameter adjustment system involved in one embodiment of the present disclosure will be described with reference to the accompanying drawings. The embodiments shown here all illustrate a specific example of the present disclosure. Therefore, the numerical values, shapes, constituent elements, configurations of constituent elements and connection methods, steps (processes) and the order of steps shown in the following embodiments are examples, and the main purpose is not to limit the present disclosure. In addition, each figure is a schematic diagram and may not be strictly illustrated. In each figure, substantially the same structure is marked with the same symbol, and repeated descriptions are omitted or simplified.

[0052] (Implementation Method)

[0053] <Structure>

[0054] Figure 1 It is a block diagram showing the structure of the control parameter adjustment system 1 according to the embodiment.

[0055] like Figure 1 As shown, the control parameter adjustment system 1 includes a control parameter adjustment device 10 and a device 100 .

[0056] The equipment 100 is, for example, a device for producing equipment, and performs processing, installation, and transportation of equipment. The equipment 100 is, for example, installed in a production line of a factory. Specifically, the equipment 100 is, for example, an LED bonding machine, a mounting machine, a processing machine, a removal robot, and the like.

[0057] The device 100 includes one or more servo motors 110 and a sensor 120 .

[0058] The servo motor 110 drives the driven object by controlling its operation by the control unit 30 described later provided in the control parameter adjustment device 10. The servo motor 110 receives, for example, a torque instruction for specifying the operation of the servo motor 110 from the control unit 30, and drives the driven object according to the received torque instruction. The driven object is, for example, a processing object to be processed in the device 100, an installation object to be installed, a transport object to be transported, and the like.

[0059] The servo motor 110 may be, for example, a rotary motor or a linear motor.

[0060] The sensor 120 detects the state of the device 100 and outputs state information related to the state of the device 100. Therefore, when the servo motor 110 is controlled by the control unit 30, the sensor 120 outputs state information related to the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30.

[0061] For example, the sensor 120 is a displacement detector that sequentially detects displacement related to the device 100 (eg, displacement of a specific portion of the device 100). In this case, the sensor 120 outputs time-series displacement information indicating the displacement related to the device 100 as state information.

[0062] Furthermore, for example, the sensor 120 may be a speed detector that sequentially detects the speed of the device 100 (eg, the speed of a specific part of the device 100). In this case, the sensor 120 outputs time-series speed information indicating the speed of the device 100 as the state information.

[0063] Furthermore, for example, the sensor 120 may be an acceleration detector that sequentially detects acceleration related to the device 100 (for example, acceleration of a specific part of the device 100). In this case, the sensor 120 outputs acceleration information representing a time series of acceleration related to the device 100 as the state information.

[0064] Furthermore, for example, the sensor 120 may be a sound detector that detects the sound generated by the device 100. In this case, the sensor 120 outputs sound information obtained by converting the detected sound into an electrical signal as the state information.

[0065] Furthermore, for example, the sensor 120 may be an encoder that detects the position of the servo motor 110. In this case, the sensor 120 outputs time-series code information of code values ​​indicating the position of the servo motor 110 as the state information.

[0066] In the following description, it is assumed that the sensor 120 is a displacement detector that sequentially detects displacement related to the device 100 , and the state information is displacement information indicating a time series of displacement related to the device 100 .

[0067] As an example, Figure 2 This is a perspective view of a device 100 having a structure in which two servo motors 110 are provided and a driving target is a nozzle provided in a head.

[0068] like Figure 2 As shown, the device 100 is, as an example, a mounting apparatus for mounting components on a substrate 220 placed on a base 210 .

[0069] As an example, the device 100 includes a suction nozzle 241 for sucking a component as a driven object, a head 240 equipped with the suction nozzle 241, a servo motor 110A that functions as a power source for moving the head 240 in the X-axis direction in a top view of the base 210, and a servo motor 110B that functions as a power source for moving the head 240 in the Y-axis direction. Here, the head 240 is connected to the servo motor 110A via the arm 230 and the servo motor 110B.

[0070] Back again Figure 1 , continue with the description of the control parameter adjustment system 1.

[0071] The control parameter adjustment device 10 is a device that adjusts control parameters of the servo motors 110 included in the equipment 100 .

[0072] like Figure 1 As shown, the control parameter adjustment device 10 includes an adjustment motion command generation unit 20 , a control unit 30 , a control parameter adjustment unit 40 , an actual process motion information acquisition unit 50 , a state information acquisition unit 60 , and an evaluation value calculation unit 70 .

[0073] For example, the control parameter adjustment device 10 is implemented by a computer device including a processor, a memory, and various interfaces, and by the processor executing a program stored in the memory.

[0074] The actual process action information acquisition unit 50 acquires actual process action information indicating actions in the workflow of an actual process of the device 100 .

[0075] For example, the actual process action information acquisition unit 50 obtains the trajectory, speed, acceleration, moving distance, etc. of the driven object in the actual process workflow of the equipment 100 from the user who uses the control parameter adjustment device 10 through a graphical interface as the actual process action information.

[0076] In addition, for example, the actual process action information acquisition unit 50 can also obtain the action instructions of the specified servo motor 110 used by the device 100 in the actual process workflow as actual process action information from the user who uses the control parameter adjustment device 10 through a graphical interface.

[0077] In this specification, the motion command may be, for example, a position command, a speed command, or an acceleration command.

[0078] The control unit 30 stores the control parameters of the servo motor 110. The control unit 30 stores the initial values ​​of the control parameters in the initial state, and updates the stored control parameters by the control parameter adjustment unit 40 described later.

[0079] The control parameters include, for example, a parameter that specifies a gain, a parameter that specifies a cutoff frequency, a parameter that specifies a filter type, and a plurality of other parameters.

[0080] When receiving an adjustment action command of a control parameter to be described later that specifies the action of the servo motor 110 from the adjustment action command generating unit 20 to be described later, the control unit 30 drives the servo motor 110 based on the received adjustment action command and the stored control parameter so that the servo motor 110 performs the action specified by the received adjustment action command. Here, the control unit 30 drives the servo motor 110 by outputting a torque command to the servo motor 110 that specifies the action of the servo motor 110.

[0081] The adjusting motion command received by the control unit 30 is a first adjusting motion command described later generated by a first motion command generating unit 21 described later or a second adjusting motion command described later generated by a second motion command generating unit 22 described later.

[0082] The state information acquisition unit 60 acquires state information output from the sensor 120 , which is state information on the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 .

[0083] The adjustment action command generation unit 20 generates an adjustment action command of a control parameter based on the actual process action information acquired by the actual process action information acquisition unit 50, and the adjustment action command specifies the action of the servo motor 110. When the state information acquisition unit 60 acquires the state information, the adjustment action command generation unit 20 further generates the adjustment action command based on the acquired state information.

[0084] like Figure 1 As shown, the adjustment motion command generation unit 20 includes a first motion command generation unit 21 , a second motion command generation unit 22 , and a feature quantity calculation unit 23 .

[0085] The first action command generating unit 21 (1) divides the action of the device 100 represented by the actual process action information into a plurality of unit actions, (2) generates a plurality of unit action commands that respectively specify the action of the servo motor 110 so that the device 100 performs the plurality of unit actions, and (3) generates a first adjustment action command that includes the generated plurality of unit action commands.

[0086] The unit motion is, for example, a relatively simple motion such as a linear motion. Here, the unit motion is described as being a linear motion.

[0087] Hereinafter, an example of division of the operation of the equipment 100 indicated by the actual process-operation information by the first operation command generating unit 21 will be described with reference to the drawings.

[0088] Figure 3 It is an example of a trajectory of a driven object in the workflow of an actual process of the device 100, and is a schematic diagram showing an example of an action in the workflow of the actual process of the device 100 represented by the actual process action information acquired by the actual process action information acquisition unit 50.

[0089] Figure 4 1 is a schematic diagram showing an example of a plurality of unit operations divided by the first operation command generating unit 21 .

[0090] like Figure 3 as well as Figure 4 As shown, the first motion command generating unit 21 divides the motion of the equipment 100 indicated by the actual process motion information into a plurality of unit motions 300 including linear motions (here, corresponding to unit motion 300A, unit motion 300B, unit motion 300C, unit motion 300N, etc.).

[0091] Back again Figure 1 , continue with the description of the control parameter adjustment system 1.

[0092] When the state information acquisition unit 60 acquires the first state information related to the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 based on the first adjustment operation instruction, the feature quantity calculation unit 23 calculates the device feature quantity related to the feature of the device 100 based on the first state information.

[0093] As described above, the state information here is displacement information. Therefore, the following description assumes that the feature amount calculation unit 23 calculates the frequency characteristic of the device 100 related to the shaking of the device 100 as the device feature amount based on the first displacement information as the first state information.

[0094] On the other hand, for example, when the state information is sound information indicating the sound emitted by the device 100, the feature quantity calculation unit 23 may calculate the frequency characteristic of the sound emitted by the device 100 as the device feature quantity based on the first sound information as the first state information.

[0095] Here, when the control unit 30 drives the servo motor 110 based on the first adjustment action instruction generated by the first action instruction generating unit 21, the status information includes a plurality of unit displacement information corresponding one by one to the plurality of unit action instructions, and each of the plurality of unit displacement information becomes information representing a time series of displacements of the device 100 caused by the action of the servo motor 110 controlled by the control unit 30 based on the corresponding unit action instruction.

[0096] Therefore, the characteristic amount calculation unit 23 calculates a plurality of unit frequency characteristics corresponding to the plurality of unit motion instructions as frequency characteristics based on the plurality of unit displacement information. Therefore, each of the plurality of unit frequency characteristics becomes information indicating the frequency characteristics related to the shaking of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 based on the corresponding unit motion instruction.

[0097] Figure 5 This is an example of a plurality of unit motion frequency characteristics calculated by the feature amount calculation unit 23 .

[0098] exist Figure 5 In the figure, the horizontal axis represents frequency and the vertical axis represents amplitude. Figure 5 In the embodiment, a plurality of unit operation frequency characteristics 400 (here, corresponding to the unit operation frequency characteristics 400A, the unit operation frequency characteristics 400B, the unit operation frequency characteristics 400C, the unit operation frequency characteristics 400N, etc.) and Figure 4 The multiple unit actions 300 in the table correspond one to one.

[0099] like Figure 5 As shown, the characteristic quantity calculation unit 23 calculates a plurality of unit frequency characteristics representing the shaking of the device 100 caused by the action of the servo motor 110 controlled by the control unit 30 based on a plurality of unit action instructions generated by the first action instruction generation unit 21, and the plurality of unit frequency characteristics are a plurality of unit frequency characteristics corresponding one-to-one to the plurality of unit action instructions.

[0100] Back again Figure 1 , continue with the description of the control parameter adjustment system 1.

[0101] The second motion command generating unit 22 selects one or more unit motion commands from among the plurality of unit motion commands generated by the first motion command generating unit 21 based on the device feature amount, and generates a second adjustment motion command including the one or more unit motion commands.

[0102] More specifically, the second action instruction generating unit 22 determines one or more specific unit frequency characteristics that satisfy given conditions among the multiple unit frequency characteristics calculated by the feature quantity calculating unit 23, and selects one or more specific unit action instructions that correspond one-to-one to the one or more specific unit frequency characteristics as one or more unit action instructions.

[0103] Here, for example, the given condition is a condition that the amplitude related to the shaking of the device 100 represented by the unit frequency characteristic is larger than a given first threshold value.

[0104] Hereinafter, an example of determination of one or more specific unit frequency characteristics by the second operation command generating unit 22 will be described with reference to the drawings.

[0105] Figure 6 It is a schematic diagram showing an example of a situation in which the second operation command generating unit 22 determines one or more specific unit frequency characteristics.

[0106] exist Figure 6 In the figure, the horizontal axis represents frequency and the vertical axis represents amplitude.

[0107] like Figure 6 As shown in FIG. 1 , the second motion command generating unit 22 determines the unit frequency characteristic indicating an amplitude greater than the first predetermined threshold value α stored in advance as the specific unit frequency characteristic. Figure 6 In the illustrated example, the second motion command generating unit 22 specifies the unit motion frequency characteristic 400A, the unit motion frequency characteristic 400B, and the unit motion frequency characteristic 400N as specific unit motion commands.

[0108] Here, it is preferable to set the first given threshold value α to a value of an amplitude that may cause a problem in the operation of the device 100. Thus, the second operation command generating unit 22 can select a unit operation command that can cause the device 100 to generate a shake of an amplitude that may cause a problem in the operation of the device 100 as a specific unit operation command.

[0109] At this time, when there are a first unit frequency characteristic and a second unit frequency characteristic that satisfy a given condition (here, the condition that the amplitude related to the shaking of the device 100 represented by the unit frequency characteristic is greater than a given first threshold value), the second action instruction generating unit 22 determines one or more specific unit frequency characteristics by excluding the unit frequency characteristic representing a smaller amplitude between the first unit frequency characteristic and the second unit frequency characteristic when the difference between the natural vibration frequency related to the shaking of the device 100 represented by the first unit frequency characteristic and the natural vibration frequency related to the shaking of the device 100 represented by the second unit frequency characteristic is less than a given second threshold value.

[0110] Figure 7 This is a schematic diagram showing an example of a situation in which the second motion command generating unit 22 checks whether the difference between the natural frequency represented by the first unit frequency characteristic and the natural frequency represented by the second unit frequency characteristic is smaller than a given second threshold value.

[0111] exist Figure 7 In the figure, the horizontal axis represents frequency and the vertical axis represents amplitude.

[0112] like Figure 7As shown, the second action command generating unit 22 calculates the natural vibration frequency f for each of the unit frequency characteristics representing an amplitude greater than the first given threshold α, and for each of the calculated natural vibration frequencies f, investigates whether other natural vibration frequencies are included in the range of vibration frequencies greater than f-β after subtracting the pre-stored given second threshold β and less than f+β after adding the given second threshold β. Furthermore, when the second action command generating unit 22 includes other natural vibration frequencies in the range of vibration frequencies greater than f-β and less than 1+β, the unit frequency characteristics representing a smaller amplitude are excluded to determine a specific unit frequency characteristic.

[0113] Here, it is preferred to set the given second threshold value β to a value that can be regarded as indicating that the vibration representing the first unit frequency characteristic and the vibration representing the second unit frequency characteristic are caused by the same or similar reasons. Thus, when there are unit action instructions that generate vibrations caused by the same or similar reasons, the second action instruction generation unit 22 can select the unit action instruction that generates a vibration with a larger amplitude as a specific unit action instruction representing these unit action instructions, and exclude the unit action instruction that generates a vibration with a smaller amplitude from the specific unit action instructions. Thus, the number of unit action instructions included in the second adjustment action instruction can be suppressed.

[0114] Back again Figure 1 , continue with the description of the control parameter adjustment system 1.

[0115] When the state information acquisition unit 60 acquires the second state information related to the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 based on the second adjustment operation command, the evaluation value calculation unit 70 calculates the evaluation value of the control parameter stored by the control unit 30 based on the second state information.

[0116] Here, as an example, it is assumed that the state information is displacement information indicating the displacement of the driven object relative to the target position, and the evaluation value calculation unit 70 calculates the stabilization time of one or more unit action instructions included in the second adjustment action instruction as the evaluation value based on the second displacement information as the second state information, for explanation.

[0117] Figure 8 is a schematic diagram for explaining the stabilization time.

[0118] exist Figure 8 In FIG. 1 , the horizontal axis represents the time elapsed from the start of the unit motion command, and the vertical axis represents the displacement of the driven object relative to the target position detected by the sensor 120 .

[0119] like Figure 8As shown, the stabilization time here refers to the time from the time when the unit motion command is started to the time when the position of the driven object converges to the required accuracy based on the target position.

[0120] Back again Figure 1 , continue with the description of the control parameter adjustment system 1.

[0121] The control parameter adjustment unit 40 adjusts the control parameter based on the state information. More specifically, the control parameter adjustment unit 40 adjusts the control parameter based on the stabilization time calculated by the evaluation value calculation unit 70.

[0122] The control parameter adjustment unit 40 may adjust the control parameter by repeatedly updating the control parameter stored in the control unit 30 until all the stabilization times calculated by the evaluation value calculation unit 70 satisfy a given condition (for example, until the stabilization time is less than a given time), and then causing the control unit 30 to drive the servo motor 110 based on the second adjustment operation instruction and the updated control parameter. In this case, the control parameter adjustment unit 40 may also be configured to include a machine learning model, which is pre-trained so that when the stabilization time is input, the control parameter stored in the control unit 30 is updated to make the stabilization time shorter.

[0123] <Action>

[0124] Next, the operation of the control parameter adjustment system 1 having the above configuration will be described.

[0125] The control parameter adjustment system 1 performs a control parameter adjustment process for adjusting the control parameters of the servo motor 110 stored in the control unit 30. For example, the control parameter adjustment process is started when a user of the control parameter adjustment system 1 operates the control parameter adjustment device 10 to start the control parameter adjustment process.

[0126] Fig. 9 is a flow chart of the control parameter adjustment process.

[0127] like Fig. 9 As shown, when the control parameter adjustment process starts, the actual process operation information acquisition unit 50 acquires actual process operation information indicating the operation in the workflow of the actual process of the equipment 100 (step S5 ).

[0128] When the actual process operation information is acquired, the first operation command generating unit 21 divides the operation of the equipment 100 indicated by the actual process operation information into a plurality of unit operations (step S10 ).

[0129] Next, the first motion command generator 21 generates a plurality of unit motion commands for defining the motion of the servo motor 110 , each of which causes the device 100 to perform a plurality of unit motions, and generates a first adjustment motion command including the generated plurality of unit motion commands (step S15 ).

[0130] When the first adjustment motion command is generated, the control unit 30 controls the servo motor 110 based on the generated first adjustment motion command and the stored control parameters (step S20). At this point in time, the control parameters stored in the control unit 30 are values ​​before adjustment by the control parameter adjustment process, for example, initial values ​​of the control parameters.

[0131] When the servo motor 110 is controlled by the control unit 30 based on the first adjustment operation command, the sensor 120 detects the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30. The sensor 120 outputs the detected state information related to the state of the device 100. Then, the state information acquisition unit 60 acquires the first state information related to the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 based on the first adjustment operation command (step S25).

[0132] When the first state information is acquired, the feature amount calculation unit 23 calculates the device feature amount related to the feature of the device 100 based on the first state information (step S30 ).

[0133] If the device feature is calculated, the second action command generation unit 22 selects one or more unit action commands from the plurality of unit action commands generated by the first action command generation unit 21 based on the device feature, and generates a second adjustment action command including the one or more unit action commands (step S35). In addition, the second adjustment action command may directly adopt the first adjustment action command.

[0134] When the second adjusting motion command is generated, the control unit 30 controls the servo motor 110 based on the generated second adjusting motion command and the stored control parameter (step S40 ).

[0135] When the servo motor 110 is controlled by the control unit 30 based on the second adjustment operation command, the sensor 120 detects the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30. The sensor 120 outputs the detected state information related to the state of the device 100. Then, the state information acquisition unit 60 acquires the second state information related to the state of the device 100 caused by the operation of the servo motor 110 controlled by the control unit 30 based on the second adjustment operation command (step S45).

[0136] When the second state information is acquired, the evaluation value calculation unit 70 calculates the evaluation value of the control parameter stored in the control unit 30 based on the second state information (step S50 ).

[0137] When the evaluation value is calculated, the control parameter adjustment unit 40 determines whether the calculated evaluation value satisfies a given condition (step S55 ).

[0138] When it is determined in the process of step S55 that the evaluation value does not satisfy the given condition (step S55 : No), the control parameter adjustment unit 40 updates the control parameter stored in the control unit 30 based on the evaluation value (step S60 ).

[0139] When the process of step S60 is completed, the process proceeds to step S40.

[0140] In the process of step S55 , when it is determined that the evaluation value satisfies the given condition (step S55 : Yes), the control parameter adjustment device 10 ends the control parameter adjustment process.

[0141] <Investigation>

[0142] As described above, according to the control parameter adjustment device 10 of the above structure, the adjustment action instruction generation unit 20 generates the adjustment action instruction of the control parameter based on the actual process action information representing the action in the workflow of the actual process. Then, the control parameter adjustment unit 40 adjusts the control parameter based on the generated adjustment action instruction.

[0143] Therefore, according to the control parameter adjustment device 10 having the above configuration, the control parameter can be adjusted even without preparing an operation command for adjusting the control parameter.

[0144] Furthermore, as described above, according to the control parameter adjustment device 10 having the above configuration, the operation command for adjusting the control parameter is a command based on the operation in the workflow of the actual process.

[0145] Therefore, according to the control parameter adjustment device 10 having the above configuration, the risk of failing to exhibit desired performance can be reduced in the operation of the workflow of the actual process of the equipment 100 performed using the adjusted control parameters.

[0146] (Replenish)

[0147] As described above, as an illustration of the technology disclosed in this application, the description is based on the embodiment. However, the present disclosure is not limited to the embodiment. As long as it does not depart from the main purpose of the present disclosure, the various modified methods that a person skilled in the art thinks of for implementing the present embodiment, and the methods constructed by combining the constituent elements in different embodiments or modified examples may also be included in the scope of one or more methods of the present disclosure.

[0148] (1) In the embodiment, the adjustment motion instruction generation unit 20 is described as including a first motion instruction generation unit 21 that generates a first adjustment motion instruction, a second motion instruction generation unit 22 that generates a second adjustment motion instruction, and a feature quantity calculation unit 23 that calculates a feature quantity. However, the adjustment motion instruction generation unit 20 is not necessarily limited to the above configuration as long as it can generate an adjustment motion instruction based on actual process motion information and, when the state information is acquired by the state information acquisition unit, further generates an adjustment motion instruction based on the state information.

[0149] As another structural example, for example, it can be considered that the adjustment action instruction generating unit 20 has a structure of a machine learning model, and the machine learning model is pre-trained so that the first adjustment action instruction is generated based on the actual process action information, and when the status information based on the status information acquiring unit is obtained, the second adjustment action instruction is further generated based on the status information.

[0150] (2) The general or specific aspects of the present disclosure may also be implemented by a system, device, method, integrated circuit, program, or non-volatile recording medium such as a computer-readable CD-ROM. In addition, the present disclosure may also be implemented by any combination of a system, device, method, integrated circuit, program, and non-volatile recording medium. For example, the present disclosure may also be implemented as a program for causing a computer device to execute the processing performed by the control parameter adjustment device.

[0151] Industrial Applicability

[0152] The present disclosure can be widely utilized in devices for adjusting control parameters, and the like.

[0153] Explanation of symbols

[0154] 1: Control parameter adjustment system

[0155] 10: Control parameter adjustment device

[0156] 20: Adjustment motion command generation unit

[0157] 21: First action command generation unit

[0158] 22: Second action command generation unit

[0159] 23: Feature calculation unit

[0160] 30: Control Department

[0161] 40: Control parameter adjustment unit

[0162] 50: Actual process action information acquisition unit

[0163] 60: Status information acquisition unit

[0164] 70: Evaluation value calculation unit

[0165] 100: Equipment

[0166] 110, 110A, 110B: Servo motor

[0167] 120: Sensor

[0168] 210: Abutment

[0169] 220: Substrate

[0170] 230: Arm

[0171] 240: Head

[0172] 241: Nozzle

[0173] 300, 300A, 300B, 300C, 300N: Unit action

[0174] 400, 400A, 400B, 400C, 400N: Unit action frequency characteristics.

Claims

1. A control parameter adjustment device for adjusting control parameters of a servo motor provided by a device, the control parameter adjustment device comprising: An actual process action information acquisition unit, which acquires actual process action information representing an action in a workflow of an actual process of the device; an adjustment motion instruction generating unit, which generates an adjustment motion instruction of the control parameter based on the actual process motion information, wherein the adjustment motion instruction specifies the motion of the servo motor; a control unit that controls the servo motor based on the adjustment motion instruction and the control parameter; a state information acquisition unit that acquires state information related to a state of the device caused by the action of the servo motor controlled by the control unit; and A control parameter adjustment unit adjusts the control parameter based on the state information.

2. The control parameter adjustment device according to claim 1, wherein: When the state information acquisition unit acquires the state information, the adjustment operation command generation unit further generates the adjustment operation command based on the state information.

3. The control parameter adjustment device according to claim 2, wherein: The adjustment operation instruction generating unit comprises: a first action instruction generating unit that divides the action of the device represented by the actual process action information into a plurality of unit actions, generates a plurality of unit action instructions that respectively cause the device to perform the plurality of unit actions and that specify the action of the servo motor, and generates a first adjustment action instruction that includes the plurality of unit action instructions; a feature quantity calculation unit that calculates a device feature quantity related to a feature of the device based on the first state information when the state information acquisition unit acquires first state information related to a state of the device caused by the operation of the servo motor controlled by the control unit based on the first adjustment operation instruction; and The second motion instruction generating unit selects one or more unit motion instructions from the plurality of unit motion instructions based on the device feature amount, and generates a second adjustment motion instruction including the one or more unit motion instructions. The control parameter adjustment unit adjusts the control parameter based on the second adjustment operation command as the adjustment operation command.

4. The control parameter adjustment device according to claim 3, wherein: The state information is displacement information representing a time series of displacements related to the device, The feature quantity calculation unit calculates, based on the displacement information, a frequency characteristic of the device related to the shaking of the device as the device feature quantity.

5. The control parameter adjustment device according to claim 4, wherein: The displacement information includes a plurality of unit displacement information corresponding to the plurality of unit action instructions one by one, The plurality of unit displacement information are information indicating a time series of displacements of the device caused by the operation of the servo motor controlled by the control unit based on the corresponding unit operation command. The feature quantity calculation unit calculates a plurality of unit frequency characteristics corresponding to the plurality of unit motion instructions one by one as the frequency characteristics based on the plurality of unit displacement information, The plurality of unit frequency characteristics are information indicating frequency characteristics related to vibration of the device caused by the operation of the servo motor controlled by the control unit based on the corresponding unit operation command, respectively. The second action command generating unit determines one or more specific unit frequency characteristics satisfying a given condition among the plurality of unit frequency characteristics, and selects one or more specific unit action commands corresponding one-to-one to the one or more specific unit frequency characteristics as the one or more unit action commands.

6. The control parameter adjustment device according to claim 5, wherein: The second operation command generating unit determines the one or more specific unit frequency characteristics under the condition that an amplitude related to the shaking of the device represented by the unit frequency characteristics is larger than a given first threshold value as the given condition.

7. The control parameter adjustment device according to claim 6, wherein: When there are a first unit frequency characteristic and a second unit frequency characteristic satisfying the given condition, and when the difference between the natural vibration frequency related to the shaking of the device represented by the first unit frequency characteristic and the natural vibration frequency represented by the second unit frequency characteristic is smaller than a given second threshold value, the second action instruction generating unit excludes the unit frequency characteristic representing the smaller amplitude between the first unit frequency characteristic and the second unit frequency characteristic to determine the one or more specific unit frequency characteristics.

8. A control parameter adjustment method, which adjusts the control parameters of a servo motor of a device respectively, the control parameter adjustment method comprising: an actual process action information acquisition step, acquiring actual process action information of the device representing an action in a workflow of an actual process; an adjustment action instruction generating step, generating an adjustment action instruction of the control parameter based on the actual process action information; A control step of controlling the servo motor based on the adjustment motion instruction and the control parameter; a state information acquisition step of acquiring state information related to the state of the device caused by the action of the servo motor controlled by the control step; and A control parameter adjustment step is to adjust the control parameter based on the adjustment motion instruction and the state information.

9. The control parameter adjustment method according to claim 8, wherein: In the adjusting motion command generating step, when the state information is acquired in the state information acquiring step, the adjusting motion command is further generated based on the state information.

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