Pneumatic air valve and device

Abstract

The invention discloses a pneumatic air valve and device, relates to the technical field of air pipe turn-off devices, and solves the problems that in the prior art, an automatic air valve in an exhaust pipe of LDS equipment is complex in structure, high in cost, prone to being stuck and poor in sealing performance. According to the method, a shell, a valve plate rotationally installed in the shell, a flexible sealing ring embedded in the outer wall of the valve plate, a sealing assembly used for improving the sealing performance and a driving mechanism used for driving the valve plate to rotate stably are included, the pneumatic air valve is based on a crank sliding block mechanism, and driving of opening and closing of the valve plate is achieved through a simple structure of an air cylinder and a connecting rod; the structure is simple, the production cost is low, when the valve plate is in a closed or opened state, the included angle between the second connecting rod and the third connecting rod and the included angle between the third connecting rod and the piston rod of the air cylinder cannot be 0 degree or 180 degrees, and therefore the jamming phenomenon cannot occur; the valve plate can be tightly attached to the first sealing plate and the second sealing plate on the two sides when closed, and the sealing performance of the valve plate after closing is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of air duct shutoff devices, and in particular to a pneumatic air valve and device. Background Art

[0002] In the semiconductor industry, LDS (Liquid Delivery System) equipment is a core system for accurately delivering liquid precursors or chemicals in semiconductor manufacturing. A damper is usually installed on the exhaust pipe of the LDS equipment so that when the LDS equipment catches fire, the exhaust pipe can be closed in time to prevent the carbon dioxide used for fire extinguishing from being discharged from the exhaust pipe, thereby improving the carbon dioxide fire extinguishing effect. In the prior art, a crank rocker mechanism is usually used in the exhaust pipe of the LDS equipment, and a cylinder plus a connecting rod is used to open and close the valve. However, when opening or closing, the cylinder and the connecting rod are in line, and the transmission angle of the device is zero at this time, which makes it easy for the device to get stuck and unable to move. In addition, the sealing between the valve plate and the shell of the existing damper is not good. Summary of the invention

[0003] The purpose of the present application is to overcome the problems of complex structure, high cost, easy jamming and poor sealing of the automatic air valve in the exhaust duct of the LDS equipment in the prior art, and to provide a pneumatic air valve and device.

[0004] In a first aspect, a pneumatic air valve is provided, comprising a shell, the shell being a hollow cylindrical structure with openings at both ends; a valve plate, the valve plate being rotatably mounted inside the shell, the outer wall of the valve plate being embedded with a flexible sealing ring that can fit with the inner wall of the shell; a sealing assembly, the sealing assembly comprising a first sealing plate and a second sealing plate, the first sealing plate being fixed to an inner wall on one side of the shell, and the second sealing plate being fixed to an inner wall on the other side of the shell, wherein the valve plate is located between the first sealing plate and the second sealing plate; a driving mechanism, the driving mechanism comprising a bracket, one side of the bracket being provided with a guide groove and being fixed with a mounting plate, one side of the mounting plate being provided with a guide portion that is adapted to the guide groove, A sliding rod that can slide freely along the guide groove is provided in the guide groove, one end of the sliding rod is fixedly connected to the first rotation axis of the valve plate through the first connecting rod, the other end of the sliding rod is connected to the second connecting rod, one end of the second connecting rod is axially connected to the mounting plate, the other end of the second connecting rod is axially connected to the third connecting rod, the end of the third connecting rod away from the second connecting rod is axially connected to the piston rod of the cylinder, the cylinder body of the cylinder is fixedly connected to the mounting plate, wherein the second rotation axis of the second connecting rod is coaxial with the first rotation axis of the valve plate, and when the valve plate is in a closed or open state, the angle between the second connecting rod and the third connecting rod and the angle between the third connecting rod and the piston rod of the cylinder are both greater than zero and not equal to 180°.

[0005] In some possible implementations, the first sealing plate and the second sealing plate are both configured to be arc-shaped structures. Through the design of the arc-shaped structure, the first sealing plate and the second sealing plate can form two semi-arcs along the inner wall direction of the shell. After the valve plate is closed, one of the semi-arcs is located above one side of the valve plate, and the other semi-arc is located below the other side of the valve plate. The valve plate can be sealed from both sides of the valve plate without occupying a large space in the shell, so as to ensure the ventilation volume when the air valve is opened.

[0006] In some possible implementations, when the valve plate is in a closed state, the first sealing plate is in contact with the upper surface of one side of the valve plate, and the second sealing plate is in contact with the lower surface of the other side of the valve plate. After the valve plate is closed, the sealing between the valve plate and the first sealing plate and the second sealing plate is further improved by the first sealing plate, the second sealing plate and the valve plate being in contact with each other.

[0007] In some possible implementations, the guide groove is configured to be a quarter arc shape, and the guide portion includes a quarter arc portion and a straight portion smoothly connected to the quarter arc portion, wherein the quarter arc portion can overlap with the guide groove to jointly limit and guide the sliding rod.

[0008] In some possible implementations, the third connecting rod is configured to be an arc-shaped structure.

[0009] In some possible implementations, the third connecting rod is axially connected to the piston rod of the cylinder via a connecting member, wherein the third connecting rod is axially connected to the connecting member, and the connecting member is fixedly connected to the piston rod of the cylinder.

[0010] In some possible implementations, a sliding block is fixed to one side of the connecting member, and the sliding block is slidably connected to the straight portion of the guide portion.

[0011] In some possible implementations, a first detector air pipe connector and a second detector air pipe connector are embedded in the shell side wall, wherein the valve plate is located between the first detector air pipe connector and the second detector air pipe connector after closing.

[0012] In some possible implementations, a first flexible sealing strip that can fit the valve plate is embedded on one side of the first sealing plate close to the valve plate, and a second flexible sealing strip that can fit the valve plate is embedded on one side of the second sealing plate close to the valve plate.

[0013] In some possible implementations, the first sealing plate, the second sealing plate, the flexible sealing ring, the first flexible sealing strip, and the second flexible sealing strip are all made of high temperature resistant materials.

[0014] The present application has the following beneficial effects: the pneumatic air valve of the present application is based on a crank slider mechanism, and realizes the driving of the valve plate switch through a simple structure of a cylinder and a connecting rod. It not only has a simple structure and low production cost, but also when the pneumatic air valve of the present application is in a closed or open state (the open state here means that the valve plate is fully open), the angle between the second connecting rod and the third connecting rod and the angle between the third connecting rod and the piston rod of the cylinder will not be 0° or 180°, so that there will be no jamming phenomenon, and the continuous and smooth movement of the valve plate can be guaranteed. When the valve plate is closed, it can fit tightly with the first sealing plate and the second sealing plate on both sides, thereby ensuring the sealing of the valve plate after closing, so that the gas in the LDS device will not leak from the air valve after the air valve is closed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application.

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 is a schematic structural diagram of a pneumatic air valve in an embodiment of the present application with the valve plate opened;

[0018] Figure 2 is a schematic structural diagram of a pneumatic air valve in an embodiment of the present application with a valve plate closed;

[0019] Figure 3 is a schematic diagram of the structure of a pneumatic air valve according to an embodiment of the present application;

[0020] Figure 4 is a top view of the pneumatic air valve of an embodiment of the present application;

[0021] Figure 5 is a cross-sectional view of a pneumatic air valve according to an embodiment of the present application;

[0022] Figure 6 It is a structural schematic diagram of a valve plate and a driving mechanism in a pneumatic air valve in an embodiment of the present application;

[0023] Figure 7 is a schematic structural diagram of a driving mechanism of a pneumatic air valve according to an embodiment of the present application;

[0024] Figure 8 The structure of the driving mechanism of the pneumatic air valve of the embodiment of the present application when the valve plate is in a closed state is shown in FIG. Figure 1;

[0025] Fig. 9 The structure of the driving mechanism of the pneumatic air valve of the embodiment of the present application when the valve plate is in a closed state is shown in FIG. Figure 2 ;

[0026] Fig.10 It is a structural schematic diagram of a connecting member, a second connecting rod and a third connecting rod in a pneumatic air valve in an embodiment of the present application;

[0027] Fig.11 is a schematic structural diagram of a driving mechanism when a valve plate in a pneumatic air valve according to an embodiment of the present application is in an open state;

[0028] Fig.12 is a schematic diagram of the structure of a first sealing plate and a second sealing plate in a pneumatic air valve according to an embodiment of the present application;

[0029] Fig.13 is a cross-sectional view of a valve plate in a pneumatic air valve according to an embodiment of the present application;

[0030] Fig.14 It is a cross-sectional view of a valve plate, a first sealing plate and a second sealing plate in a pneumatic air valve according to an embodiment of the present application.

[0031] Reference numerals:

[0032] 100, housing; 200, valve plate; 201, flexible sealing ring; 300, sealing assembly; 301, first sealing plate; 3011, first flexible sealing strip; 302, second sealing plate; 3021, second flexible sealing strip; 400, driving mechanism; 401, bracket; 402, guide groove; 403, mounting plate; 404, guide portion; 4041, quarter arc portion; 4042, straight portion; 405, sliding rod; 406, first connecting rod; 407, first rotating shaft; 408, second connecting rod; 409, third connecting rod; 410, cylinder; 411, piston rod; 412, connecting piece; 413, first detector air pipe joint; 414, second detector air pipe joint; 415, second rotating shaft; 416, sliding block. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] Example 1

[0035] like Figure 1-Figure 3As shown, a pneumatic air valve involved in an embodiment of the present application includes a housing 100, and the housing 100 is a hollow cylindrical structure with two ends open. In order to facilitate the installation and fixation of the two ends of the housing 100, connecting flanges are provided at both ends of the housing 100; a freely rotatable valve plate 200 is installed inside the housing 100, a first rotating shaft 407 is fixed in the middle of the valve plate 200, and the two ends of the first rotating shaft 407 are rotatably connected to the side wall of the housing 100 through connecting members 412 such as bearings, and the outer wall of the valve plate 200 is embedded with a flexible sealing ring 201 that can fit the inner wall of the housing 100, wherein, as shown in FIG12- Fig.14 , the flexible sealing ring 201 is tightly fitted with the inner wall of the housing 100 after the valve plate 200 is fully closed, thereby increasing the sealing performance between the valve plate 200 and the inner wall of the housing 100;

[0036] like Figure 1 and Fig.14 As shown, in order to further increase the sealing performance of the valve plate 200 after closing, a sealing assembly 300 is further provided, wherein the sealing assembly 300 comprises a first sealing plate 301 and a second sealing plate 302. Specifically, the first sealing plate 301 and the second sealing plate 302 are both configured as an arc-shaped structure. Through the design of the arc-shaped structure, the first sealing plate 301 and the second sealing plate 302 can form two semi-circular arcs along the inner wall direction of the housing 100. After the valve plate 200 is closed, one of the semi-circular arcs is located above one side of the valve plate 200, and the other semi-circular arc is located below the other side of the valve plate 200. The valve plate 200 can be sealed from both sides of the valve plate 200 without occupying a large space in the housing 100, so as to ensure the ventilation volume when the air valve is opened. The first sealing plate 301 is fixed to an inner wall on one side of the housing 100, and the second sealing plate 302 is fixed to an inner wall on the other side of the housing 100. The valve plate 200 is located between the first sealing plate 301 and the second sealing plate 302. When the valve plate 200 is in a closed state, the first sealing plate 301 is in contact with the upper surface of one side of the valve plate 200, and the second sealing plate 302 is in contact with the lower surface of the other side of the valve plate 200. Specifically, when the housing 100 is placed vertically, that is, one of the two ports of the housing 100 is vertically upward and the other is vertically downward, after the valve plate 200 is fully closed, if the first sealing plate 301 is located above the horizontal plane where the valve plate 200 is located, the second sealing plate 302 is located below the horizontal plane where the valve plate 200 is located, and the second sealing plate 302 is located below the horizontal plane where the valve plate 200 is located. A sealing plate 301 and a second sealing plate 302 seal the valve plate 200 from both sides of the valve plate 200, thereby increasing the sealing performance of the valve plate 200 when closed. The first sealing plate 301 and the second sealing plate 302 can also limit the position of the valve plate 200 during the closing process of the valve plate 200, so that after the valve plate 200 is closed, one side is tightly fitted with the first sealing plate 301, and the other side is tightly fitted with the second sealing plate 302, thereby avoiding the problem of air leakage caused by the valve plate 200 being out of position;

[0037] like Figure 4-Figure 11 As shown, in order to drive the valve plate 200 to rotate to realize the closing and opening of the valve plate 200, a driving mechanism 400 is also included, and the driving mechanism 400 includes a bracket 401, wherein the bracket 401 is set in a "concave" shape, and a guide groove 402 is reserved on one side of the bracket 401 and a mounting plate 403 is fixed, wherein the guide groove 402 is set in a quarter arc structure, and the inner wall of the guide groove 402 is polished to improve the smoothness of the guide groove 402 and reduce the resistance and frustration of the slide rod 405 sliding in the guide groove 402. The mounting plate 403 includes a parallel portion and a vertical portion, and the parallel portion is parallel to and fits with a side of the bracket 401 away from the housing 100. Together, the vertical portion is perpendicular to the parallel portion and is arranged at one end of the parallel portion, and a guide portion 404 adapted to the guide groove 402 is arranged on one side of the mounting plate 403, wherein the guide portion 404 includes a quarter arc portion 4041 and a straight portion 4042 smoothly connected with the quarter arc portion 4041, wherein the quarter arc portion 4041 can overlap with the guide groove 402 to jointly limit and guide the slide bar 405, and a slide bar 405 that can slide freely along the guide groove 402 is arranged in the guide groove 402, and one end of the slide bar 405 is fixedly connected to the first rotating shaft 407 of the valve plate 200 through the first connecting rod 406, and the The other end of the slide bar 405 is connected to a second connecting rod 408, one end of which is axially connected to the mounting plate 403 via a second rotating shaft 415, so that the second connecting rod 408 can rotate along the axis of the second rotating shaft 415, and the other end of the second connecting rod 408 is axially connected to a third connecting rod 409, wherein the third connecting rod 409 is configured to be an arc-shaped structure, and the arc design can disperse concentrated stress and reduce the stress peak at the connection, thereby reducing the risk of cracks in the third connecting rod 409 and extending the service life of the third connecting rod 409, and the arc-shaped third connecting rod 409 can change the moment of inertia, so that the hinges at both ends of the third connecting rod 409 will not have dead points at the same time, thereby This makes it less likely that the third connecting rod 409 will get stuck during the opening and closing process of the valve plate 200, thereby improving the stability of the valve plate 200 during the opening and closing process. The end of the third connecting rod 409 away from the second connecting rod 408 is axially connected to the piston rod 411 of the cylinder 410, and the cylinder body of the cylinder 410 is fixedly connected to the mounting plate 403, wherein the second rotating axis 415 of the second connecting rod 408 is coaxial with the first rotating axis 407 of the valve plate 200, and when the valve plate 200 is in a closed or open state, the angle between the second connecting rod 408 and the third connecting rod 409 and the angle between the third connecting rod 409 and the piston rod 411 of the cylinder 410 are both greater than zero and not equal to 180°.

[0038] like Figure 8-Figure 10As shown, in a further embodiment, a connecting member 412 is further included, and the connecting member 412 is installed on the end of the piston rod 411 of the cylinder 410 through a nut, and the cylinder 410 is also detachably fixed to the vertical portion of the mounting plate 403 through a nut structure, so that the cylinder 410 can be removed from the mounting plate 403 to facilitate the inspection and replacement of the cylinder 410. Exemplarily, the connecting member 412 is arranged in an "L" shape structure, and the third connecting rod 409 is axially connected to the piston rod 411 of the cylinder 410 through the connecting member 412, wherein the third connecting rod is axially connected to one side of the connecting member 412, and the end of the piston rod 411 of the cylinder 410 is processed with an external thread, and the other side of the connecting member 412 is fixedly connected to the piston rod 411 of the cylinder 410 through a nut structure.

[0039] like Figure 9-10 As shown, in order to make the movement of the connecting member 412 during the opening and closing process of the valve plate 200 more stable, a slider 416 is fixed on one side of the connecting member 412, and the slider 416 is slidably arranged in the straight portion 4042 of the guide portion 404. The slider 416 can slide smoothly along the straight portion 4042, so that the straight portion 4042 can be used to limit the slider 416 to maintain the stability of the connecting member 412 during the movement.

[0040] In addition, when the pneumatic air valve in the present embodiment is installed on the housing 100 of the LDS device, since the LDS device stores chemical agents inside and the pneumatic air valve is always open under normal circumstances, when harmful gas leaks from the LDS device, the harmful gas can be discharged from the pneumatic air valve into the air duct after being processed. In order to facilitate the detection of whether there is a leakage of harmful gas in the LDS device, a first detector air pipe joint 413 and a second detector air pipe joint 414 are embedded in the side wall of the housing 100, wherein the valve plate 200 is located between the first detector air pipe joint 413 and the second detector air pipe joint 414 after closing. Between the two detector air pipe joints 414, if the first detector air pipe joint 413 is close to the LDS device after the pneumatic air valve is installed, the detector will take samples from the first detector air pipe joint 413 and detect whether it contains harmful gases, and the detected gas will be discharged into the shell 100 from the second detector air pipe joint 414; if the second detector air pipe joint 414 is close to the LDS device after the pneumatic air valve is installed, the detector will take samples from the second detector air pipe joint 414 and detect whether it contains harmful gases, and the detected gas will be discharged into the shell 100 from the first detector air pipe joint 413.

[0041] In order to further improve the sealing between the valve plate 200 and the first sealing plate 301 and the valve plate 200 and the second sealing plate 302, a first flexible sealing strip 3011 which can be fitted with the valve plate 200 is embedded on one side of the first sealing plate 301 close to the valve plate 200, and a second flexible sealing strip 3021 which can be fitted with the valve plate 200 is embedded on one side of the second sealing plate 302 close to the valve plate 200. After the valve plate 200 is closed, the valve plate 200 and the first sealing plate 301 can squeeze the first flexible sealing strip 3011. 3011, and at the same time, the valve plate 200 and the second sealing plate 302 can squeeze the second flexible sealing strip 3021, so as to increase the sealing between the valve plate 200 and the first sealing plate 301 and between the valve plate 200 and the second sealing plate 302, so that gas leakage is not easy to occur after the valve plate 200 is closed. When a fire occurs inside the LDS equipment, the valve plate 200 can be closed to prevent the carbon dioxide used for fire extinguishing from being discharged from the shell 100 and the exhaust pipe, so as to improve the effect and efficiency of carbon dioxide fire extinguishing.

[0042] Since the LDS device contains liquid, carbon dioxide is needed to extinguish the fire. The pneumatic air valve of this embodiment is used for the LDS device. Once a fire occurs in the liquid inside the LDS device, high-temperature smoke will be generated. In order to prevent the high-temperature smoke from causing serious damage to the first sealing plate 301, the second sealing plate 302, the flexible sealing ring 201, the first flexible sealing strip 3011 and the second flexible sealing strip 3021, the first sealing plate 301, the second sealing plate 302, the flexible sealing ring 201, the first flexible sealing strip 3011 and the second flexible sealing strip 3021 are all made of high-temperature resistant materials, so that the first sealing plate 301, the second sealing plate 302, the flexible sealing ring 201, the first flexible sealing strip 3011 and the second flexible sealing strip 3021 can maintain a certain sealing property and service life even in a high-temperature environment.

[0043] When the valve plate 200 switches from the open state to the closed state, Figure 1 and Fig.11 As shown, when the valve plate 200 is in the open state, the piston rod 411 of the cylinder 410 is retracted into the cylinder body of the cylinder 410, and the piston rod 411 is extended out of the cylinder body by controlling the cylinder 410, and the slider 416 slides along the straight portion 4042 toward the quarter arc portion 4041, and at the same time, the second connecting rod 408 is pushed by the third connecting rod 409 to rotate counterclockwise along the axial connection between the second connecting rod 408 and the mounting plate 403, so that the slide rod 405 slides along the guide portion 404 and the quarter arc portion 4041, and then the valve plate 200 is driven to rotate counterclockwise by 90° through the first connecting rod 406, so that the valve plate 200 is turned from a vertical state to a horizontal state, thereby realizing the closure of the valve plate 200.

[0044] When the valve plate 200 switches from the closed state to the horizontal state, as shown in FIG. Figure 2 and Figure 8 As shown, when the valve plate 200 is in a closed state, the piston rod 411 of the cylinder 410 extends out of the cylinder body of the cylinder 410. By controlling the cylinder 410 to retract the piston rod 411 into the cylinder body, the slider 416 slides along the straight portion 4042 in a direction away from the quarter arc portion 4041, and at the same time, the third connecting rod 409 pushes the second connecting rod 408 to rotate clockwise along the axial connection between the second connecting rod 408 and the mounting plate 403, so that the slide rod 405 slides along the guide portion 404 and the quarter arc portion 4041, and then the valve plate 200 is driven to rotate 90° clockwise through the first connecting rod 406, so that the valve plate 200 is turned from a horizontal state to a vertical state, thereby realizing the closure of the valve plate 200.

[0045] In this embodiment, the pneumatic air valve is based on a crank slider mechanism, and the valve plate 200 is driven to open and close through a simple structure of a cylinder 410 and a connecting rod. Not only is the structure simple, but the production cost is low. When the pneumatic air valve is in a closed or open state, the open state here means that the valve plate 200 is fully opened, and the angle between the second connecting rod 408 and the third connecting rod 409 and the angle between the third connecting rod 409 and the piston rod 411 of the cylinder 410 will not be 0° or 180°, so that there will be no stuck phenomenon, which can ensure that the valve The valve plate 200 can move continuously and smoothly, and when the valve plate 200 is closed, the valve plate 200 can fit tightly with the inner wall of the shell 100 by using the flexible sealing ring 201, and the valve plate 200 can fit tightly with the first sealing plate 301 and the second sealing plate 302 on both sides, thereby ensuring the sealing of the valve plate 200 after closing, so that the gas in the LDS equipment will not leak from the air valve after the air valve is closed, and effectively prevent the carbon dioxide used for fire extinguishing from being discharged from the pneumatic air valve, thereby improving the effect and efficiency of carbon dioxide fire extinguishing.

[0046] The above are only preferred specific implementations of the present application; however, the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and its improved ideas of the present application within the technical scope disclosed in the present application, which should be included in the protection scope of the present application.

Claims

1. A pneumatic air valve, characterized in that: include: A shell, wherein the shell is a hollow cylindrical structure with openings at both ends; A valve plate, the valve plate is rotatably mounted inside the housing, and a flexible sealing ring that can fit the inner wall of the housing is embedded in the outer wall of the valve plate; A sealing assembly, the sealing assembly comprising a first sealing plate and a second sealing plate, the first sealing plate being fixed to an inner wall on one side of the shell, the second sealing plate being fixed to an inner wall on the other side of the shell, wherein the valve plate is located between the first sealing plate and the second sealing plate; A driving mechanism, the driving mechanism includes a bracket, one side of the bracket is provided with a guide groove and a mounting plate is fixed thereto, one side of the mounting plate is provided with a guide portion adapted to the guide groove, a sliding rod that can slide freely along the guide groove is provided in the guide groove, one end of the sliding rod is fixedly connected to the first rotating axis of the valve plate through a first connecting rod, the other end of the sliding rod is connected to a second connecting rod, one end of the second connecting rod is axially connected to the mounting plate, the other end of the second connecting rod is axially connected to a third connecting rod, an end of the third connecting rod away from the second connecting rod is axially connected to the piston rod of the cylinder, the cylinder body of the cylinder is fixedly connected to the mounting plate, wherein the second rotating axis of the second connecting rod is coaxial with the first rotating axis of the valve plate, and when the valve plate is in a closed or open state, the angle between the second connecting rod and the third connecting rod and the angle between the third connecting rod and the piston rod of the cylinder are both greater than zero and not equal to 180°.

2. The pneumatic damper according to claim 1, characterized in that: The first sealing plate and the second sealing plate are both configured to be arc-shaped structures.

3. The pneumatic damper according to claim 1 or 2, characterized in that: When the valve plate is in a closed state, the first sealing plate is in contact with the upper surface of one side of the valve plate, and the second sealing plate is in contact with the lower surface of the other side of the valve plate.

4. The pneumatic damper according to claim 1, characterized in that: The guide groove is configured in a quarter arc shape, and the guide portion includes a quarter arc portion and a straight portion smoothly connected to the quarter arc portion.

5. The pneumatic damper according to claim 4, characterized in that: The third connecting rod is configured to be an arc-shaped structure.

6. The pneumatic damper according to claim 5, characterized in that: The third connecting rod is axially connected to the piston rod of the cylinder through a connecting piece, wherein the third connecting rod is axially connected to the connecting piece, and the connecting piece is fixedly connected to the piston rod of the cylinder.

7. The pneumatic damper according to claim 6, characterized in that: A sliding block is fixed on one side of the connecting member, and the sliding block is slidably connected with the straight portion of the guide portion.

8. The pneumatic damper according to claim 1, characterized in that: The side wall of the housing is embedded with a first detector air pipe joint and a second detector air pipe joint, wherein the valve plate is located between the first detector air pipe joint and the second detector air pipe joint after closing.

9. The pneumatic damper according to claim 1, characterized in that: A first flexible sealing strip that can fit the valve plate is embedded on one side of the first sealing plate close to the valve plate, and a second flexible sealing strip that can fit the valve plate is embedded on one side of the second sealing plate close to the valve plate.

10. The pneumatic damper according to claim 9, characterized in that: The first sealing plate, the second sealing plate, the flexible sealing ring, the first flexible sealing strip and the second flexible sealing strip are all made of high temperature resistant materials.

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