Evaluation method, system and equipment based on wavefront distortion of transmission-type optical element and medium
Through finite element simulation, the thermal light effect and thermal deformation distortion difference of the transmitted optical element are calculated, which solves the problem of difficulty in efficiently calculating such phase difference in the prior art, and realizes the rapid and efficient calculation and accurate analysis of phase difference data of the transmitted optical element.
Patent Information
- Application Number
- CN202411978221.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2044-12-31
AI Technical Summary
The prior art is difficult to efficiently calculate the difference between thermal light effects and distortion of thermal deformation of transmissive optical components, and the commercial software COMSOL Multiphysics failed to implement this function.
By finite element simulation method, photon point set data, temperature field data and thermal deformation data are calculated, key photon points of the transmissive optical element are identified, and the surface thermal deformation distortion phase difference and thermal light effect phase difference are calculated, and the total phase difference of the transmissive optical element is finally calculated.
The rapid and efficient calculation of phase difference data of transmissive optical components is realized, and the beam quality reduction and far-field laser intensity distribution deterioration caused by transmissive optical components to the optical system can be accurately analyzed.
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Figure CN119901462A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of laser technology, and in particular to an evaluation method, system, device and medium based on wavefront distortion of a transmission optical element. Background Art
[0002] The thermal phase difference of a transmissive optical element is caused by the deformation of the incident and transmission surfaces and the phase difference caused by the change in refractive index. There are two main reasons for the change in refractive index: (1) the thermo-optic effect, that is, the change in refractive index caused by temperature change; (2) the elasto-optic effect, that is, the change in refractive index caused by stress, and the latter can generally be ignored. Therefore, when calculating the thermal phase difference of a transmissive optical element, it is only necessary to consider the distortion phase difference of the thermo-optic effect caused by the thermal deformation and refractive index change of the incident and transmission surfaces of the optical element. However, the commercial software COMSOL Multiphysics does not have the function of calculating this thermal phase difference; in addition, there is no report on calculating the thermal phase difference of the transmission surface of a lens based on discrete photon point data obtained by finite element simulation as described in the present invention. Summary of the invention
[0003] Aiming at the problem that the existing distortion calculation method and the existing COMSOL Multiphysics software cannot simultaneously and efficiently calculate the distortion phase difference of the thermo-optical effect and the thermal deformation based on the finite element simulation data, the present invention proposes an evaluation method, system, device and medium based on the wavefront distortion of a transmission optical element; the method first calculates the photon point set data, the temperature field data and the thermal deformation data according to the acquired incident laser parameters and the optical system element parameters; identifies the key photon points of the incident surface and the transmission surface of the transmission optical element; then calculates the thermal deformation distortion phase difference of the transmission optical element surface and the thermo-optical effect phase difference of the transmission optical element according to the identified key photon points; finally calculates the total phase difference to realize the fast and efficient calculation of the phase difference data of the transmission optical element, superimposes the phase difference on the corresponding ray tracing path, analyzes any transmission optical element, and is beneficial to accurately calculate the phase difference of the ray tracing of the whole system.
[0004] The specific implementation contents of the present invention are as follows:
[0005] A method for evaluating wavefront distortion of a transmissive optical element comprises the following steps:
[0006] Step S1: Calculate the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters, and extract them into the MATLAB software workspace;
[0007] Step S2: extracting temperature field data and thermal deformation data from the MATLAB software workspace, and identifying key photon points on the incident surface and the transmission surface of the transmissive optical element according to the light propagation timing;
[0008] Step S3: calculating the thermal deformation distortion phase difference of the surface of the transmissive optical element according to the identified key photon points;
[0009] Step S4: taking the key photon point on the incident surface of the transmissive optical element and the key photon on the transmissive surface of the transmissive optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect phase difference of the transmissive optical element;
[0010] Step S5: calculating the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element;
[0011] Step S6: Analyze / evaluate the problem of beam quality degradation and far-field laser intensity distribution degradation caused by the total phase difference of the transmissive optical element on the optical system based on the total phase difference of the element.
[0012] In order to better implement the present invention, further, the step S1 specifically includes the following steps:
[0013] Step S11: establishing a simulation model and calculating photon point set data according to the acquired incident laser parameters and optical system element parameters;
[0014] Step S12: Calculating the light intensity distribution data of light propagation according to the established simulation model; the optical system elements include transmissive optical elements, reflective optical elements, gaseous media or liquid media;
[0015] Step S13: calling the multi-physics field port of the ray heat source of the COMSOL Multiphysics software to couple heat transfer and mechanics, and calculating the temperature field data and thermal deformation data;
[0016] Step S14: extracting the photon point set data, temperature field data, and thermal deformation data into the MATLAB software workspace.
[0017] In order to better implement the present invention, further, the step S2 specifically includes the following steps:
[0018] Step S21: calling the mphinterp function to extract thermal deformation data from the MATLAB software workspace;
[0019] Step S22: According to the propagation sequence of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner, and the key refraction photon point and the key incident photon point are obtained according to the calculation results.
[0020] In order to better realize the present invention, further, the specific operation of step S22 is: according to the propagation timing of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner. If the division result is a non-number NaN, it means that the previous photon point is located inside the non-transmissive optical element. If the division result is a real number, it means that the previous photon point is located inside the transmissive optical element, and the key refraction photon point of the incident surface of the first transmissive optical element is obtained, and the point before the key refraction photon point of the incident surface is recorded as the key incident photon point of the incident surface; if the result of continuing to divide in sequence is a non-number NaN, the previous photon point is still located inside the transmissive optical element, and the key incident photon point of the transmission surface of the first transmissive optical element is obtained, and the point after the key incident photon point is recorded as the key refraction photon point of the transmission surface, and the key photon point identification of the first transmissive optical element is completed.
[0021] In order to better implement the present invention, further, the step S3 specifically includes the following steps:
[0022] Step S31: extracting coordinate data of key incident photon points on the incident surface, key refracted photon points on the incident surface, key incident photon points on the transmission surface, and key refracted photon points on the transmission surface to obtain incident light vectors and refracted light vectors;
[0023] Step S32: Calculate the angle α between the incident light and the refracted light on the incident surface according to the incident light vector and the refracted light vector on the incident surface. inc ; According to the incident light vector and refracted light vector of the transmission surface, calculate the angle α between the incident light and the refracted light of the transmission surface tra ;
[0024] Step S33: According to the angle α inc and angle α tra Call Snell's law to calculate the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , and the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2 ;
[0025] Step S34: According to the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2 , wave number, refractive index of the incident area, refractive index of the refracted area, calculate the thermal deformation distortion difference between the incident surface and the transmission surface of the transmissive optical element.
[0026] In order to better implement the present invention, further, the specific operation of step S4 is: taking the key photon point of the incident surface of the transmission optical element and the key photon of the transmission surface of the transmission optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect difference of the transmission optical element according to the internal temperature of the transmission optical element and the internal refractive index of the transmission optical element.
[0027] Based on the above-mentioned evaluation method based on the wavefront distortion of a transmission optical element, in order to better realize the present invention, further, a system for evaluating the wavefront distortion of a transmission optical element is proposed, which is used to execute the above-mentioned evaluation method based on the wavefront distortion of a transmission optical element; the system comprises a collection unit, a key photon point recognition unit, a surface thermal deformation distortion calculation unit, a thermal-optical effect phase difference calculation unit, a total phase difference calculation unit, and an evaluation unit;
[0028] The acquisition unit is used to calculate the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters, and extract them to the MATLAB software workspace;
[0029] The key photon point identification unit is used to extract temperature field data and thermal deformation data from the MATLAB software workspace, and identify key photon points on the incident surface and the transmission surface of the transmissive optical element according to the light propagation time sequence;
[0030] The surface thermal deformation distortion calculation unit is used to calculate the surface thermal deformation distortion phase difference of the transmission optical element according to the identified key photon points;
[0031] The thermo-optical effect phase difference calculation unit is used to calculate the thermo-optical effect phase difference of the transmissive optical element by taking the key photon point on the incident surface of the transmissive optical element and the key photon on the transmissive surface of the transmissive optical element as the starting and ending points of the thermal phase difference integral path;
[0032] The total phase difference calculation unit is used to calculate the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element;
[0033] The evaluation unit is used to analyze / evaluate the problem of beam quality degradation and far-field laser intensity distribution degradation caused by the total phase difference of the transmission optical element on the optical system based on the total phase difference of the element.
[0034] Based on the above-mentioned evaluation method based on wavefront distortion of a transmissive optical element, in order to better realize the present invention, further, an electronic device is proposed, comprising a memory and a processor; a computer program is stored on the memory; when the computer program is executed on the processor, the above-mentioned evaluation method based on wavefront distortion of a transmissive optical element is implemented.
[0035] Based on the above-mentioned evaluation method based on wavefront distortion of a transmissive optical element, in order to better realize the present invention, further, a computer-readable storage medium is proposed, on which computer instructions are stored; when the computer instructions are executed on the above-mentioned electronic device, the above-mentioned evaluation method based on wavefront distortion of a transmissive optical element is implemented.
[0036] The present invention has the following beneficial effects:
[0037] (1) The phase difference calculated by the present invention can be superimposed on the corresponding ray tracing path, and can be used to analyze any transmissive optical element, thereby facilitating the accurate calculation of the phase difference of the ray tracing of the entire system.
[0038] (2) The surface thermal deformation distortion calculation method of the present invention can quickly and efficiently calculate the phase difference data of the transmission optical element. It is applicable to the application scenarios of various types of transmission optical elements such as plane, spherical and aspherical surfaces, and can provide a convenient way to calculate the phase difference problem of laser transmission channel for the multi-physical field coupling of light-heat-force-fluid. BRIEF DESCRIPTION OF THE DRAWINGS
[0039] Figure 1 A schematic diagram of ray tracing provided by the present invention.
[0040] Figure 2 This is a schematic diagram of the incident angle and refraction angle provided by the present invention.
[0041] Figure 3 This is a schematic diagram of the surface thermal deformation and distortion calculation provided by the present invention.
[0042] Figure 4 A schematic flowchart of the evaluation method based on wavefront distortion of a transmissive optical element provided by the present invention. DETAILED DESCRIPTION
[0043] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. It should be understood that the described embodiments are only part of the embodiments of the present invention, not all of the embodiments, and therefore should not be regarded as limiting the scope of protection. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technical personnel in this field without making creative work are within the scope of protection of the present invention.
[0044] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0045] Embodiment 1:
[0046] This embodiment proposes a method for evaluating wavefront distortion of a transmissive optical element, which specifically includes the following steps.
[0047] Step S1: Calculate the photon point set data, temperature field data, and thermal deformation data based on the acquired incident laser parameters and optical system element parameters, and extract them to the MATLAB software workspace.
[0048] The step S1 specifically includes the following steps:
[0049] Step S11: establishing a simulation model and calculating photon point set data according to the acquired incident laser parameters and optical system element parameters;
[0050] Step S12: Calculating the light intensity distribution data of light propagation according to the established simulation model; the optical system elements include transmissive optical elements, reflective optical elements, gaseous media or liquid media;
[0051] Step S13: calling the multi-physics field port of the ray heat source of the COMSOL Multiphysics software to couple heat transfer and mechanics, and calculating the temperature field data and thermal deformation data;
[0052] Step S14: extracting the photon point set data, temperature field data, and thermal deformation data into the MATLAB software workspace.
[0053] Step S2: extracting temperature field data and thermal deformation data from the MATLAB software workspace, and identifying key photon points on the incident surface and transmission surface of the transmissive optical element according to the light propagation timing.
[0054] In order to better implement the present invention, further, the step S2 specifically includes the following steps:
[0055] Step S21: calling the mphinterp function to extract thermal deformation data from the MATLAB software workspace;
[0056] Step S22: According to the propagation sequence of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner, and the key refraction photon point and the key incident photon point are obtained according to the calculation results.
[0057] The specific operation of step S22 is: according to the propagation sequence of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner. If the division result is a non-number NaN, it means that the previous photon point is located inside the non-transmissive optical element. If the division result is a real number, it means that the previous photon point is located inside the transmissive optical element, and the key refraction photon point of the incident surface of the first transmissive optical element is obtained, and the point before the key refraction photon point of the incident surface is recorded as the key incident photon point of the incident surface; if the result of continuing to divide in sequence is a non-number NaN, the previous photon point is still located inside the transmissive optical element, and the key incident photon point of the transmission surface of the first transmissive optical element is obtained, and the point after the key incident photon point is recorded as the key refraction photon point of the transmission surface, and the key photon point identification of the transmissive optical element is completed.
[0058] Step S3: Calculate the thermal deformation distortion phase difference of the surface of the transmission optical element according to the identified key photon points.
[0059] Step S31: extract the coordinate data of the key incident photon points of the incident surface, the key refracted photon points of the incident surface, the key incident photon points of the transmission surface, and the key refracted photon points of the transmission surface to obtain the incident light vector and the refracted light vector.
[0060] Step S32: Calculate the angle α between the incident light and the refracted light on the incident surface according to the incident light vector and the refracted light vector on the incident surface. inc ; According to the incident light vector and refracted light vector of the transmission surface, calculate the angle α between the incident light and the refracted light of the transmission surface tra ;
[0061] Step S33: According to the angle α inc and angle α tra Call Snell's law to calculate the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , and the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2 ;
[0062] Step S34: According to the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2, wave number, refractive index of the incident area, refractive index of the refracted area, calculate the thermal deformation distortion difference between the incident surface and the transmission surface of the transmissive optical element.
[0063] Step S4: taking the key photon point on the incident surface of the transmission optical element and the key photon on the transmission surface of the transmission optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect phase difference of the transmission optical element.
[0064] The specific operation of step S4 is: taking the key photon point of the incident surface of the transmission optical element and the key photon of the transmission surface of the transmission optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect difference of the transmission optical element according to the internal temperature of the transmission optical element and the internal refractive index of the transmission optical element.
[0065] Step S5: Calculate the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element.
[0066] Step S6: Analyze / evaluate the problem of beam quality degradation and far-field laser intensity distribution degradation caused by the total phase difference of the transmissive optical element on the optical system based on the total phase difference of the element.
[0067] Working principle: This embodiment first calculates the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters; identifies the key photon points of the incident surface and the transmission surface of the transmissive optical element; then calculates the thermal deformation distortion phase difference of the surface of the transmissive optical element and the thermal-optical effect phase difference of the transmissive optical element according to the identified key photon points; finally, calculates the total phase difference to realize the fast and efficient calculation of the phase difference data of the transmissive optical element, superimposes the phase difference on the corresponding ray tracing path, and analyzes any transmissive optical element, which is beneficial to accurately calculate the phase difference of the ray tracing of the entire system.
[0068] Embodiment 2:
[0069] This embodiment is based on the above embodiment 1. Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a specific embodiment is described in detail.
[0070] This embodiment uses a discrete photon point thermal phase difference calculation method based on ray tracing to calculate the thermal deformation and thermal-optical effect distortion phase difference of the reconstructed transmissive optical element. It can be correspondingly superimposed on the light path of the entire system for thermal phase difference calculation and analysis of the entire system. The specific implementation steps are as follows.
[0071] Step S1: Calculate the photon point set data, temperature field data, and thermal deformation data based on the acquired incident laser parameters and optical system element parameters, and extract them to the MATLAB software workspace.
[0072] Step S11: Ray tracing calculation. Obtain the parameters of the incident laser and the parameters of the optical system elements, and call the geometric optics module of COMSOL Multiphysics software to calculate the photon point set data of the system. The photon point set data mainly includes the coordinates of discrete photon points, ray numbers, optical path lengths, and light intensity, etc.;
[0073] Step S12: Multi-physics field coupling calculation. Obtain the parameters of the incident laser and the parameters of the optical system elements, the optical system elements may include a transmissive optical element, a reflective optical element and a gaseous medium or a liquid medium, but at least one transmissive optical element; based on the parameters of the incident laser and the parameters of the optical system, calculate the light intensity distribution data of the light propagation through the geometric optics module of the COMSOL Multiphysics software.
[0074] Step S13: coupling the light intensity distribution data obtained in step S12 to calculate the temperature field data and thermal deformation data of the optical system with the heat transfer module and the mechanics module;
[0075] Step S14: Extract temperature field data, thermal deformation data and photon point set data to the MATLAB software workspace based on the joint simulation function of COMSOL Multiphysics software and MATLAB software. In MATLAB software, the mphinterp function can be used to extract temperature field and thermal deformation data, and the mphparticle function can be used to extract photon point set data.
[0076] Step S2: Identification of key photon points. In step S14, the deformation data set of the mechanical module corresponding to the photon coordinate data is extracted through the "mphinterp function". In the global coordinate system, only the deformation data corresponding to the photon coordinates located in the transmissive optical element is a real number, otherwise it is a non-number "NaN". For the propagation sequence of a single light ray in the system, the deformation data of the previous photon coordinate is divided by the deformation data of the next photon coordinate in a cyclic manner. If the result of the division is a non-number "NaN", it means that the previous photon point is located inside the non-transmissive optical element. If the result of the division is a real number, it means that the previous photon point is located inside the transmissive optical element, which is recorded as the "key refraction photon point" of the incident surface of the first transmissive optical element, and the point before this point is the "key incident photon point" of the incident surface; if the result of the division continues to be a non-number "NaN", the previous photon point is still located inside the transmissive optical element, which is recorded as the "key incident photon point" of the transmission surface of the first transmissive optical element, and the point after this point is the "key refraction photon point" of the transmission surface, that is, the key photon point identification of the first transmissive optical element is completed. According to the above method, the key photon points of the transmissive optical elements in the subsequent optical system can be identified.
[0077] Step S3: Calculation of thermal deformation distortion of the optical element surface.
[0078] Step S31: Based on the coordinate data of the "key incident photon point" and "key refraction photon point" of the surface extracted in the previous step, this surface can be the incident surface and the transmission surface of the transmissive optical element. For the incident surface, P inc1 (x inc1 ,y inc1 ,z inc1 ) and P inc2 (x inc2 ,y inc2 ,z inc2 ) forms the incident light vector P inc3 (x inc3 ,y inc3 ,z inc3 ) and P inc4 (x inc4 ,y inc4 ,z inc4 ) forms the refracted light vector The angle between the incident ray and the refracted ray is For a transmissive surface, P tra1 (x tra1 ,y tra1 ,z tra1 ) and P tra2 (x tra2 ,y tra2 ,z tra2) forms the incident light vector P tra3 (x tra3 ,y tra3 ,z tra3 ) and P tra4 (x tra4 ,y tra4 ,z tra4 ) forms the refracted light vector The angle between the incident ray and the refracted ray is
[0079]
[0080] Step S32: Calculate the incident angle and refraction angle of the incident surface of the optical element: by using Snell's law and the angle α between the incident light and the refracted light inc Formula (1-1) can be used to calculate the incident angle θ inc1 and the refraction angle θ inc2 .
[0081]
[0082] In the formula, θ inc1 and θ inc2 are the incident angle and refraction angle of the incident surface, n inc1 and n inc2 are the refractive index of the incident area and the refractive index of the refractive area of the incident surface respectively.
[0083] Calculation of the incident angle and refraction angle of the transmission surface of an optical element: by Snell's law and the angle α between the incident light and the refracted light tra Formula (1-2) can be used to calculate the incident angle θ tra1 and the refraction angle θ tra2 .
[0084]
[0085] In the formula, θ tra1 and θ tra2 are the incident angle and refraction angle of the incident surface, n tra1 and n tra2 are the refractive index of the incident area and the refractive index of the refractive area of the incident surface respectively.
[0086] Step S33: Calculation of thermal deformation of optical element surface: Figure 3 As shown, the thermal deformation distortion difference between the incident surface and the transmission surface of the transmissive optical element is respectively as Δφ of formula (2) inc and Δφ tra .
[0087]
[0088] Where k is the wave number, d is inc and d tra is the deformation of the incident surface and the transmission surface.
[0089] Step S4: Calculation of thermal-optical effect difference of optical element: Extract the “key refraction photon point” of the incident surface inside the transmissive optical element and the “key incident photon point” of the transmission surface, and use them as the starting and ending points of the thermal phase difference integral path.
[0090]
[0091] Wherein, T(x, y, z) is the internal temperature of the transmission optical element in step S14, and n is the internal refractive index of the transmission optical element.
[0092] Step S5: Calculation of total phase difference of the transmissive optical element.
[0093] Δφ total =Δφ inc +Δφ themo_optics +Δφ tra (4)
[0094] Working principle: This embodiment solves the problem that the existing technical solutions and the existing COMSOL Multiphysics software cannot simultaneously and efficiently calculate the distortion phase difference of the thermo-optical effect and thermal deformation based on the finite element simulation data, and the phase difference calculated by this embodiment can be superimposed on the corresponding ray tracing path, which can be used to analyze any transmissive optical element, thereby facilitating the accurate calculation of the phase difference of the ray trajectory of the entire system. The calculation method of this embodiment can be used to quickly and efficiently calculate the phase difference data of transmissive optical elements. It is suitable for various types of transmissive optical element application scenarios such as planes, spherical surfaces, and aspherical surfaces, and can provide a convenient way to calculate the phase difference problem of laser transmission channels for the multi-physics field coupling of light, heat, force, and fluid.
[0095] The other parts of this embodiment are the same as those of the above-mentioned embodiment 1, and thus will not be described in detail.
[0096] Embodiment 3:
[0097] Based on any one of the above-mentioned embodiments 1-2, this embodiment proposes an evaluation system based on the wavefront distortion of a transmissive optical element, which is used to execute the above-mentioned evaluation method based on the wavefront distortion of a transmissive optical element; it includes a collection unit, a key photon point recognition unit, a surface thermal deformation distortion calculation unit, a thermal-optical effect phase difference calculation unit, a total phase difference calculation unit, and an evaluation unit;
[0098] The acquisition unit is used to calculate the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters, and extract them to the MATLAB software workspace;
[0099] The key photon point identification unit is used to extract temperature field data and thermal deformation data from the MATLAB software workspace, and identify key photon points on the incident surface and the transmission surface of the transmissive optical element according to the light propagation time sequence;
[0100] The surface thermal deformation distortion calculation unit is used to calculate the surface thermal deformation distortion phase difference of the transmission optical element according to the identified key photon points;
[0101] The thermo-optical effect phase difference calculation unit is used to calculate the thermo-optical effect phase difference of the transmissive optical element by taking the key photon point on the incident surface of the transmissive optical element and the key photon on the transmissive surface of the transmissive optical element as the starting and ending points of the thermal phase difference integral path;
[0102] The total phase difference calculation unit is used to calculate the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element;
[0103] The evaluation unit is used to analyze / evaluate the problem of beam quality degradation and far-field laser intensity distribution degradation caused by the total phase difference of the transmission optical element on the optical system based on the total phase difference of the element.
[0104] This embodiment also proposes an electronic device, including a memory and a processor; a computer program is stored in the memory; when the computer program is executed on the processor, the above-mentioned evaluation method based on the wavefront distortion of the transmission optical element is implemented.
[0105] This embodiment further proposes a computer-readable storage medium, on which computer instructions are stored; when the computer instructions are executed on the above-mentioned electronic device, the above-mentioned evaluation method based on the wavefront distortion of the transmission optical element is implemented.
[0106] The other parts of this embodiment are the same as any one of the above-mentioned embodiments 1-2, so they will not be repeated here.
[0107] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification or equivalent change made to the above embodiment based on the technical essence of the present invention shall fall within the protection scope of the present invention.
Claims
1. A method for evaluating wavefront distortion of a transmissive optical element, characterized in that: The specific steps include: Step S1: Calculate the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters, and extract them into the MATLAB software workspace; Step S2: extracting temperature field data and thermal deformation data from the MATLAB software workspace, and identifying key photon points on the incident surface and the transmission surface of the transmissive optical element according to the light propagation timing; Step S3: calculating the thermal deformation distortion phase difference of the surface of the transmissive optical element according to the identified key photon points; Step S4: taking the key photon point on the incident surface of the transmissive optical element and the key photon on the transmissive surface of the transmissive optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect phase difference of the transmissive optical element; Step S5: calculating the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element; Step S6: Evaluate the beam quality or the far-field laser distribution intensity according to the total phase difference of the transmissive optical element.
2. The method for evaluating wavefront distortion of a transmissive optical element according to claim 1, characterized in that: The step S1 specifically includes the following steps: Step S11: establishing a simulation model and calculating photon point set data according to the acquired incident laser parameters and optical system element parameters; Step S12: Calculating the light intensity distribution data of light propagation according to the established simulation model; the optical system elements include transmissive optical elements, reflective optical elements, gaseous media or liquid media; Step S13: calling the coupled heat transfer module and the mechanics module of the COMSOL Multiphysics software according to the light intensity distribution data to calculate the temperature field data and the thermal deformation data; Step S14: extracting the photon point set data, temperature field data, and thermal deformation data into the MATLAB software workspace.
3. The method for evaluating wavefront distortion of a transmissive optical element according to claim 1, characterized in that: The step S2 specifically includes the following steps: Step S21: calling the mphinterp function to extract thermal deformation data from the MATLAB software workspace; Step S22: According to the propagation sequence of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner, and the key refraction photon point and the key incident photon point are obtained according to the calculation results.
4. The method for evaluating wavefront distortion of a transmissive optical element according to claim 3, characterized in that: The specific operation of step S22 is: according to the propagation sequence of the light, the deformation data of the previous photon coordinates is divided by the deformation data of the next photon coordinates in a cyclic manner. If the division result is a non-number NaN, it means that the previous photon point is located inside the non-transmissive optical element. If the division result is a real number, it means that the previous photon point is located inside the transmissive optical element, and the key refraction photon point of the incident surface of the transmissive optical element is obtained, and the point before the key refraction photon point of the incident surface is recorded as the key incident photon point of the incident surface; if the result of continuing to divide in sequence is a non-number NaN, the previous photon point is still located inside the transmissive optical element, and the key incident photon point of the transmission surface of the transmissive optical element is obtained, and the point after the key incident photon point is recorded as the key refraction photon point of the transmission surface, and the key photon point identification of the transmissive optical element is completed.
5. The method for evaluating wavefront distortion of a transmissive optical element according to claim 4, characterized in that: The step S3 specifically comprises the following steps: Step S31: extracting coordinate data of key incident photon points on the incident surface, key refracted photon points on the incident surface, key incident photon points on the transmission surface, and key refracted photon points on the transmission surface to obtain incident light vectors and refracted light vectors; Step S32: Calculate the angle α between the incident light and the refracted light on the incident surface according to the incident light vector and the refracted light vector on the incident surface. inc ; According to the incident light vector and refracted light vector of the transmission surface, calculate the angle α between the incident light and the refracted light of the transmission surface tra ; Step S33: According to the angle α inc and angle α tra Call Snell's law to calculate the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , and the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2 ; Step S34: According to the incident angle θ of the incident surface inc1 and the refraction angle θ inc2 , the incident angle θ on the transmission surface tra1 and the refraction angle θ tra2 , wave number, refractive index of the incident area, refractive index of the refracted area, calculate the thermal deformation distortion difference between the incident surface and the transmission surface of the transmissive optical element.
6. The method for evaluating wavefront distortion of a transmissive optical element according to claim 1, characterized in that: The specific operation of step S4 is: taking the key photon point of the incident surface of the transmission optical element and the key photon of the transmission surface of the transmission optical element as the starting and ending points of the thermal phase difference integral path, and calculating the thermal-optical effect difference of the transmission optical element according to the extracted temperature field data and the internal refractive index of the transmission optical element.
7. An evaluation system based on wavefront distortion of a transmissive optical element, used to execute the evaluation method based on wavefront distortion of a transmissive optical element as claimed in claim 1; characterized in that: It includes a collection unit, a key photon point recognition unit, a surface thermal deformation distortion calculation unit, a thermal-optical effect phase difference calculation unit, a total phase difference calculation unit, and an evaluation unit; The acquisition unit is used to calculate the photon point set data, temperature field data, and thermal deformation data according to the acquired incident laser parameters and optical system element parameters, and extract them to the MATLAB software workspace; The key photon point identification unit is used to extract temperature field data and thermal deformation data from the MATLAB software workspace, and identify key photon points on the incident surface and the transmission surface of the transmissive optical element according to the light propagation time sequence; The surface thermal deformation distortion calculation unit is used to calculate the surface thermal deformation distortion phase difference of the transmission optical element according to the identified key photon points; The thermo-optical effect phase difference calculation unit is used to calculate the thermo-optical effect phase difference of the transmissive optical element by taking the key photon point on the incident surface of the transmissive optical element and the key photon on the transmissive surface of the transmissive optical element as the starting and ending points of the thermal phase difference integral path; The total phase difference calculation unit is used to calculate the total phase difference of the transmissive optical element according to the phase difference of thermal deformation distortion of the surface of the transmissive optical element and the phase difference of thermal-optical effect of the transmissive optical element; The evaluation unit is used to evaluate the beam quality or the far-field laser distribution intensity according to the total phase difference of the transmission optical element.
8. An electronic device, characterized in that: It comprises a memory and a processor; the memory stores a computer program; when the computer program is executed on the processor, the evaluation method based on the wavefront distortion of a transmission optical element as described in any one of claims 1 to 6 is implemented.
9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions; when the computer instructions are executed on the electronic device as described in claim 8, the evaluation method based on the wavefront distortion of a transmissive optical element as described in any one of claims 1-6 is implemented.
Citation Information
Patent Citations
Mirror wave aberration calculation method and laser system
CN116907806A
Optical system wavefront distortion measurement device - performs phase comparison of Bragg cell excitation and diffracted-beam photocurrent
FR2516236A1
Wave front aberration measurement method, wave front aberration measurement device, refractive index distribution measurement method, and refractive index distribution measurement device
JP2016217848A
Method for correcting wavefront distribution of optical system using laser
WO2019019425A1