Cleaning process for removing particles on surface of ceramic material

Abstract

The invention relates to the technical field of ceramic materials, in particular to a cleaning process for removing particles on the surface of a ceramic material. Comprising the following steps: S1, cleaning the surface of a ceramic material by using an organic solvent, and then cleaning by using water; s2, an alkaline surfactant is used for cleaning the surface of the ceramic material, and then water is used for cleaning; s3, the surface of the ceramic material is cleaned with first acid liquor and then is cleaned with water, and then the surface of the ceramic material is cleaned with second acid liquor and then is cleaned with water; s4, cleaning the surface of the ceramic material by using a dispersing agent, and then cleaning by using water; s5, ultrasonic cleaning is carried out with the ultrasonic frequency of 20-60 KHz and the ultrasonic frequency of 100-160 KHz in sequence, and then cleaning is carried out with water; and S6, flushing the surface of the ceramic material with water, and drying. Particles on the surface of the ceramic material can be greatly reduced; meanwhile, the ceramic surface is not damaged.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic materials, and in particular to a cleaning process for removing particles on the surface of ceramic materials. Background Art

[0002] In the process of research and development and production of ceramic materials, equipment parts, especially those in the chamber, often have a variety of granular by-products attached to the surface due to direct participation in the process reaction. If these particles are not removed, the manufacturing yield and process stability of the ceramic materials will be seriously affected. Therefore, the cleaning process of ceramic materials is particularly important. In the current market, the main method of removing particles on the surface of ceramics is to soak in chemical liquids combined with pure water ultrasound. Although these two methods can remove some particles, the effect of relying solely on the cavitation energy of ultrasound is limited. Moreover, excessive increase in ultrasonic energy will leave watermarks on the surface of the ceramic, damaging its appearance. Therefore, the cleaning link in the manufacture of ceramic materials is crucial, and although the existing cleaning methods have certain effects, they still need to be further improved and optimized to achieve more efficient and non-destructive cleaning.

[0003] Chinese invention patent CN115746965B discloses an environmentally friendly cleaning agent for ceramic filter plates and a cleaning process thereof. The scheme utilizes citric acid, hydroxyethylidene diphosphonic acid, surfactants, isomeric alcohol ethers, aminosulfonic acid, corrosion inhibition composition, hydroxypolyaspartic acid and deionized water to compound components and develop an aqueous environmentally friendly ceramic filter plate cleaning agent. The cleaning agent can effectively remove deposited pollutants such as metal sulfides and mineral derivatives on the surface of the ceramic filter plate, while eliminating the safety hazards that exist in the procurement, transportation, use, storage and other links of the enterprise, meeting the environmental protection requirements, but cannot simultaneously meet the requirements of reducing the number of particles on the surface of the ceramic material and non-destructive cleaning. Summary of the invention

[0004] The present invention provides a cleaning process for removing particles on the surface of a ceramic material, comprising the following steps:

[0005] S1, cleaning the surface of the ceramic material with an organic solvent and then with water;

[0006] S2, cleaning the surface of the ceramic material with an alkaline surfactant, and then cleaning with water;

[0007] S3, cleaning the surface of the ceramic material with a first acid solution and then with water, and then cleaning the surface of the ceramic material with a second acid solution and then with water;

[0008] S4, cleaning the surface of the ceramic material with a dispersant, and then cleaning with water;

[0009] S5, performing ultrasonic cleaning using ultrasonic frequencies of 20-60 KHz and 100-160 KHz in sequence, and then performing cleaning using water;

[0010] S6, rinse the surface of the ceramic material with water and dry it.

[0011] Preferably, the first acid solution includes an inorganic acid, and the second acid solution includes an organic acid and an inorganic acid.

[0012] Preferably, the organic solvent comprises an alcohol organic solvent.

[0013] Further preferably, the organic solvent comprises isopropanol.

[0014] The concentration of the dispersant is 0.3-2 wt %.

[0015] The present application has found that by using a specific dispersant and limiting the concentration of the dispersant to 0.3-2wt%, the number of particles on the surface of the ceramic material can be effectively reduced. It may be that the specific dispersant can be adsorbed on the surface of the ceramic particles, so that the particles carry a certain amount of charge. These charges produce a large repulsive force between the particles, thereby preventing the agglomeration of the particles and achieving stable dispersion of the particles. At the same time, after the dispersant is adsorbed on the surface of the particles, an adsorption layer with a certain thickness will be formed. The adsorption layer acts as a steric layer, which can prevent the particles from approaching and agglomerating each other, and the combined effect reduces the attraction of the van der Waals force, so that the particles are easier to fall off the surface of the material. However, when the dispersant is introduced, the affinity between the dispersant and the ceramic surface will also be increased, resulting in the problem of dispersant residue. The present applicant has further found that the drying temperature is 300-600°C and the time is 1-5h, which can effectively solve the problem of dispersant residue and avoid damage to the ceramic surface.

[0016] Preferably, the concentration of the dispersant is 0.5-1 wt %.

[0017] The drying temperature is 300-600° C. and the drying time is 1-5 hours.

[0018] Preferably, the drying temperature is 400-600° C. and the drying time is 3-5 hours.

[0019] The first acid solution includes at least one of hydrochloric acid (HCL), HNO3, and sulfuric acid.

[0020] Preferably, the first acid solution comprises hydrochloric acid.

[0021] Further preferably, the concentration of the hydrochloric acid is 5-15wt%.

[0022] The second acid solution includes HF, HNO3 and gluconic acid, and the volume ratio of HF, HNO3 and gluconic acid is 1:(1-3):(5-9).

[0023] Preferably, the volume ratio of HF, HNO3 and gluconic acid is 1:(1-2):(5-9).

[0024] Further preferably, the volume ratio of HF, HNO3 and gluconic acid is 1:(1-2):(6-8).

[0025] Preferably, the alkaline surfactant comprises a nonionic alkaline surfactant.

[0026] The phosphate content in the alkaline surfactant is 5-15 wt %.

[0027] Preferably, the phosphate content in the alkaline surfactant is 5-10 wt%.

[0028] The time for the first acid solution cleaning and the second acid solution cleaning is 3-10 minutes.

[0029] Preferably, the time for the first acid solution cleaning and the second acid solution cleaning is 3-5 minutes.

[0030] Preferably, the step S5 comprises: using ultrasonic frequencies of 20-50 KHz and 120-160 KHz for ultrasonic cleaning in sequence, and then using water for cleaning.

[0031] Preferably, the cleaning time of the ultrasonic frequency of 20-60KHz and 100-160KHz is 5-40min.

[0032] Further preferably, the cleaning time of the ultrasonic frequency of 20-60KHz and 100-160KHz is 10-30min.

[0033] The showering time is 5-20 minutes, and the temperature is 30-60°C.

[0034] Preferably, the showering time is 10-20 minutes and the temperature is 30-50°C.

[0035] Beneficial Effects

[0036] 1. By using a specific dispersant and limiting the concentration of the dispersant to 0.3-2wt%, the number of particles on the surface of the ceramic material can be effectively reduced.

[0037] 2. The drying temperature is 300-600°C and the time is 1-5h, which can effectively solve the problem of dispersant residue and avoid damage to the ceramic surface.

[0038] 3. By using ultrasonic equipment of different frequencies to produce bubbles of inconsistent sizes, particles of different sizes can be better removed.

[0039] 4. By limiting the cleaning time of 20-60KHz and 100-160KHz ultrasonic frequencies to 5-40min, the number of 0.2μm particles on the surface of the ceramic material after cleaning can be controlled to 40000P / cm 2 Within.

[0040] 5. The cleaning method of the present application is time-saving, simple and low-cost. DETAILED DESCRIPTION

[0041] Embodiment 1:

[0042] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0043] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0044] Alkaline cleaning: Use 0.5wt% Alcojet alkaline surfactant solution (Shanghai Kunbang Chemical Co., Ltd., phosphate content is 8.7wt%) to soak the ceramic parts for 30 minutes, then take them out and rinse them with pure water;

[0045] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 3 minutes, then take them out and clean them with pure water;

[0046] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 3 minutes, then take them out and clean them with pure water;

[0047] Dispersant treatment: Add 0.5wt% SC-1015F dispersant to the cleaning solution and stir evenly. After soaking for 10 minutes, take out the parts and clean them with pure water.

[0048] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 10 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0049] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), clean for 10 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0050] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0051] Drying: Place the ceramic parts in a high-temperature nitrogen oven at a drying temperature of 500°C for 3 hours, and keep nitrogen injection during the entire drying process;

[0052] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0053] Embodiment 2:

[0054] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0055] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0056] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 45 minutes, then rinse with pure water.

[0057] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 4 minutes, then take them out and clean them with pure water;

[0058] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 4 minutes, then take them out and clean them with pure water;

[0059] Dispersant treatment: Add 0.7wt% SC-1015F dispersant to the cleaning solution and stir evenly. After soaking for 10 minutes, take out the parts and clean them with pure water.

[0060] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 15 minutes, then take them out and rinse the product surface with pure water for 3 minutes;

[0061] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), clean for 20 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0062] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0063] Drying: Place the ceramic parts in a high-temperature nitrogen oven at a drying temperature of 500°C for 4 hours, and keep nitrogen injection throughout the drying process;

[0064] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0065] Embodiment 3:

[0066] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0067] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0068] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 60 minutes, then rinse with pure water.

[0069] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 5 minutes, then take them out and clean them with pure water;

[0070] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 5 minutes, then take them out and clean them with pure water;

[0071] Dispersant treatment: Add 1.0wt% SC-1015F dispersant to the cleaning solution and stir evenly. After soaking for 10 minutes, take out the parts and clean them with pure water.

[0072] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 20 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0073] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), wash for 30 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0074] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0075] Drying: Place the ceramic parts in a high-temperature nitrogen oven at 500°C for 5 hours, and keep nitrogen injection during the entire drying process;

[0076] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0077] Comparative Example 1:

[0078] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0079] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0080] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 30 minutes, then rinse with pure water.

[0081] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 3 minutes, then take them out and clean them with pure water;

[0082] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 3 minutes, then take them out and clean them with pure water;

[0083] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 10 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0084] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), clean for 10 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0085] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0086] Drying: Place the ceramic parts in a high-temperature nitrogen oven at a drying temperature of 500°C for 3 hours, and keep nitrogen injection during the entire drying process;

[0087] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0088] Comparative Example 2:

[0089] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0090] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0091] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 45 minutes, then rinse with pure water.

[0092] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 4 minutes, then take them out and clean them with pure water;

[0093] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 4 minutes, then take them out and clean them with pure water;

[0094] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 15 minutes, then take them out and rinse the product surface with pure water for 3 minutes;

[0095] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), clean for 20 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0096] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0097] Drying: Place the ceramic parts in a high-temperature nitrogen oven at a drying temperature of 500°C for 4 hours, and keep nitrogen injection throughout the drying process;

[0098] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0099] Comparative Example 3:

[0100] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0101] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0102] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 60 minutes, then rinse with pure water.

[0103] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 5 minutes, then take them out and clean them with pure water;

[0104] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 5 minutes, then take them out and clean them with pure water;

[0105] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 20 minutes, then take them out and rinse the product surface with pure water for 3 minutes;

[0106] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), wash for 30 minutes, then take them out and rinse the product surface with pure water for 3 minutes;

[0107] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0108] Drying: Place the ceramic parts in a high-temperature nitrogen oven at 500°C for 5 hours, and keep nitrogen injection during the entire drying process;

[0109] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0110] Comparative Example 4:

[0111] A cleaning process for removing particles from the surface of a ceramic material comprises the following steps:

[0112] Initial cleaning: Wipe the surface of the ceramic parts with IPA (isopropyl alcohol), and rinse them with pure water after taking them out;

[0113] Alkaline cleaning: Soak the ceramic parts in 0.5wt% Alcojet alkaline surfactant solution for 60 minutes, then rinse with pure water.

[0114] Acid cleaning 1: Immerse the ceramic parts in 10wt% HCL solution for 5 minutes, then take them out and clean them with pure water;

[0115] Acid cleaning 2: Immerse the ceramic parts in a mixed acid solution of HF:HNO3:gluconic acid = 1:2:7 for 5 minutes, then take them out and clean them with pure water;

[0116] Dispersant treatment: Add 1.0wt% SC-1015F dispersant to the cleaning solution and stir evenly. After soaking for 10 minutes, take out the parts and clean them with pure water.

[0117] Ultrasonic cleaning 1: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 40KHz), clean for 20 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0118] Ultrasonic cleaning 2: Place the ceramic parts in an ultrasonic cleaning tank, ensure that all surfaces of the parts are fully in contact with the pure water in the tank, turn on the ultrasonic wave (frequency 132KHz), wash for 30 minutes, then take them out and rinse the surface of the product with pure water for 3 minutes;

[0119] Overflow cleaning: Place the ceramic parts in the overflow cleaning tank, the water temperature is 40℃, and the soaking time is 15 minutes. Then take out the ceramic parts, rinse the product surface with pure water for 3 minutes, and use high-purity nitrogen to blow dry until there is no water on the surface of the material;

[0120] Drying: Place the ceramic parts in a common nitrogen oven at a drying temperature of 125°C for 5 hours, and keep nitrogen injection throughout the drying process;

[0121] When the oven temperature drops to room temperature, open the oven and take out the ceramic parts. Use an anti-static air gun to blow the ceramic parts, and then vacuum pack them to ensure the surface cleanliness.

[0122] Performance Testing Methods

[0123] The cleaned ceramic parts of the embodiment and the comparative example were subjected to a surface particle standard test, and the test data are listed in Table 1.

[0124] Standard test procedure for particles on the surface of ceramic parts:

[0125] 1. Set up the RION LPC KS-42A instrument: flow rate = 10 mL / min, sampling time = 60 s; pre-read time = 30 s, (total time = 90 s / data point). Before each measurement, the LPC instrument should be cleaned with pure water to ≤ 50 P / mL.

[0126] 2. Set the ultrasonic LPC tank: standard setting ultrasonic time 10min, ultrasonic intensity 10w / in 2 .

[0127] 3. Pour pure water into the LPC tank, the amount of water injected is 13500mL.

[0128] 4. Turn on the ultrasonic device and check that the ultrasonic time is set to 10 minutes and 10w / in 2 , start timing.

[0129] 5. After 10 minutes, turn off the ultrasonic device, start measuring the number of pure water particles in the tank and record the reading A.

[0130] 6. Ceramic component LPC slot measurement:

[0131] 6.1 Put the parts into the LPC slot.

[0132] 6.2 Turn on the ultrasonic device, ultrasonic time 10min, ultrasonic intensity 10w / in 2 , start timing.

[0133] 6.3 After 10 minutes, turn off the ultrasonic device, start measuring the number of pure water particles in the tank and record the reading B.

[0134] 7. Calculation formula for the number of particles on the surface of ceramic components: Number of particles on the surface of ceramic components = (BA) × 13500 / component surface area.

[0135] Performance test data

[0136] Table 1

[0137] <![CDATA[Number of particles ≥ 0.2μm (P / cm 2 )]]> Example 1 31650 Example 2 24536 Example 3 15387 Comparative Example 1 87248 Comparative Example 2 85958 Comparative Example 3 85426 Comparative Example 4 51172

[0138] Table 1 shows the results

[0139] (1) The comparison between Examples 1, 2, and 3 shows that as the amount of dispersant increases, the number of particles on the surface of the ceramic material can be better removed.

[0140] (2) The comparison of the three groups of experiments, Example 1 and Comparative Example 1, Example 2 and Comparative Example 2, and Example 3 and Comparative Example 3, shows that the use of a dispersant can better remove the number of particles on the surface of the ceramic material.

[0141] (3) Comparison of Example 3 with Comparative Example 4 shows that a higher drying temperature can remove the effect of the dispersant itself on the number of particles on the surface of the ceramic material.

[0142] (4) Comparison between Examples 1, 2, and 3 shows that simply changing the ultrasonic time and the immersion time cannot effectively solve the problem of particle adhesion on the surface of the ceramic material.

Claims

1. A cleaning process for removing particles from the surface of a ceramic material, characterized in that: The following steps are involved: S1, cleaning the surface of the ceramic material with an organic solvent and then with water; S2, cleaning the surface of the ceramic material with an alkaline surfactant, and then cleaning with water; S3, cleaning the surface of the ceramic material with a first acid solution and then with water, and then cleaning the surface of the ceramic material with a second acid solution and then with water; S4, cleaning the surface of the ceramic material with a dispersant, and then cleaning with water; S5, ultrasonically cleaning the surface of the ceramic material using ultrasonic frequencies of 20-60 KHz and 100-160 KHz in sequence, and then cleaning with water; S6, flushing the surface of the ceramic material with water and drying it; The first acid solution includes an inorganic acid, and the second acid solution includes an organic acid and an inorganic acid.

2. The cleaning process for removing particles from the surface of ceramic materials according to claim 1, characterized in that: The concentration of the dispersant is 0.3-2 wt %.

3. The cleaning process for removing particles from the surface of ceramic materials according to claim 1, characterized in that: The concentration of the dispersant is 0.5-1 wt %.

4. The cleaning process for removing particles from the surface of ceramic materials according to claim 3, characterized in that: The drying temperature is 300-600° C. and the drying time is 1-5 hours.

5. The cleaning process for removing particles from the surface of ceramic materials according to claim 4, characterized in that: The first acid solution includes at least one of hydrochloric acid, HNO3, and sulfuric acid.

6. The cleaning process for removing particles from the surface of ceramic materials according to claim 5, characterized in that: The second acid solution includes HF, HNO3 and gluconic acid, and the volume ratio of HF, HNO3 and gluconic acid is 1:(1-3):(5-9).

7. The cleaning process for removing particles from the surface of ceramic materials according to claim 1 or 6, characterized in that: The alkaline surfactant includes a nonionic alkaline surfactant.

8. The cleaning process for removing particles from the surface of ceramic materials according to claim 7, characterized in that: The phosphate content in the alkaline surfactant is 5-15 wt %.

9. The cleaning process for removing particles from the surface of ceramic materials according to claim 8, characterized in that: The time for the first acid solution cleaning and the second acid solution cleaning is 3-10 minutes.

10. The cleaning process for removing particles from the surface of ceramic materials according to claim 9, characterized in that: The cleaning time of the ultrasonic frequency of 20-60KHz and 100-160KHz is 5-40min.