A silicon carbide crystal sawing machine

Abstract

The application discloses a silicon carbide crystal sawing machine and belongs to the technical field of silicon carbide crystal cutting devices, characterized in that the machine comprises a rack, a cutting mechanism and a feeding mechanism, the cutting mechanism comprises a first band saw support, a second band saw support, a driving wheel, a driven wheel, an annular band saw blade and a tensioning assembly, the first band saw support is in sliding fit with the second band saw support, a motor is installed at the upper end of the first band saw support, the motor is connected with the rotating shaft of the driving wheel, and the second band saw support is internally provided with the tensioning assembly. Compared with the prior art, the machine has the characteristic of self-adaptive tensioning.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon carbide crystal cutting device, in particular to a silicon carbide crystal sawing machine. BACKGROUND

[0002] As one of the most critical and widely used base materials in the semiconductor manufacturing industry, silicon carbide has played a crucial role in driving the development of semiconductor technology due to its outstanding high-purity characteristics and unparalleled electronic properties. In the complex process of precisely manufacturing single-crystal silicon carbide substrates, a crucial step is to accurately and finely cut the silicon carbide rod crystal to achieve specific particle sizes or perfect wafer shapes, which is essential for the performance and reliability of subsequent semiconductor devices.

[0003] Currently, the industry generally uses a ring band saw as a tool for cutting silicon carbide rod crystals. However, the efficient operation of a ring band saw cutting machine cannot be achieved without a core component - a tensioning assembly. This mechanism is responsible for applying appropriate tension to the ring band saw blade during the cutting process, ensuring that the saw blade can cut the material stably and accurately, thereby achieving the desired cutting effect.

[0004] However, the existing ring band saw cutting machine equipped with a tensioning assembly has a problem that cannot be ignored: even when the cutting machine is in a non-working state (such as standby, maintenance, or night rest period), the tensioning assembly still continuously applies tension to the ring band saw blade. This uninterrupted tensioning state, although initially intended to maintain the tightness of the saw blade for immediate use, actually causes long-term mechanical stress accumulation on the ring band saw blade. Over time, this continuous tension gradually causes microscopic deformation of the saw blade material, and even gradually relaxes, thereby not only weakening the tightening effect of the tensioning assembly, but also greatly shortening the service life of the ring band saw blade. Deformation and relaxation of the saw blade not only increase cutting errors and affect product quality, but also increase production costs and reduce production efficiency due to frequent replacement of the saw blade. SUMMARY

[0005] The present application aims to overcome the shortcomings of the prior art and provide a silicon carbide crystal sawing machine that automatically tightens the ring band saw blade when the device is working, and does not tighten the ring band saw blade when the device is not working.

[0006] The application provides a silicon carbide crystal sawing machine, which is characterized by comprising a rack, a cutting mechanism and a feeding mechanism, the upper end of the rack is respectively provided with a support frame and the feeding mechanism, the support frame is in sliding fit with the cutting mechanism, the cutting mechanism comprises a first band saw support, a second band saw support, a driving wheel, a driven wheel, an annular band saw blade and a tensioning assembly, the driving wheel is in rotary fit with the first band saw support, the driven wheel is in rotary fit with the second band saw support, the annular band saw blade is sleeved on the driving wheel and the driven wheel, the first band saw support is in sliding fit with the second band saw support, the upper end of the first band saw support is provided with a motor, the motor is connected with the driving wheel, and the second band saw support is internally provided with the tensioning assembly.

[0007] Further, the first band saw support is provided with a sliding way plate, the sliding way plate is provided with a sliding way, the second band saw support is provided with a sliding rail, and the sliding rail is in sliding fit with the sliding way of the sliding way plate.

[0008] Further, the first band saw support and the second band saw support are respectively provided with guide plates, the guide plates are provided with guide grooves, the sliding rail is also provided with a guide groove, one side of the annular band saw blade passes through the guide grooves on the two guide plates, the other side passes through the guide groove on the sliding rail, and the part of the annular band saw blade between the two guide plates is a cutting part, which is exposed outside the first band saw support and the second band saw support.

[0009] Further, the guide grooves on the two guide plates and the sliding rail are respectively in rotary fit with a plurality of first guide rollers.

[0010] Further, the outer circumferential surfaces of the driving wheel and the driven wheel are respectively provided with wheel grooves, and the annular band saw blade is placed in the wheel grooves.

[0011] Further, the support frame is in rotary fit with a first lead screw, the upper end of the first lead screw is connected with the motor shaft of the motor, the two sides of the first lead screw are respectively provided with first guide rails, the back of the sliding way plate is fixedly provided with a first lead screw nut and two first sliding blocks, the first lead screw nut is matched with the first lead screw, the first sliding blocks are provided with sliding grooves, and the first guide rails are in sliding fit with the sliding grooves of the first sliding blocks.

[0012] Further, the feeding mechanism comprises a bottom plate, a sliding frame and a three-jaw chuck, the upper end of the rack is fixedly provided with the bottom plate, the bottom plate is in sliding fit with the sliding frame, the sliding frame is fixedly connected with the motor, and the motor shaft of the motor is connected with the three-jaw chuck.

[0013] Further, the bottom plate is in rotary fit with a second lead screw, one end of the second lead screw is connected with the motor shaft of the motor, the bottom plate is provided with second guide rails on the two sides of the second lead screw, the lower end of the sliding frame is fixedly provided with a second lead screw nut and two second sliding blocks, the second lead screw nut is matched with the second lead screw, the second sliding blocks are provided with sliding grooves, and the second guide rails are in sliding fit with the sliding grooves of the second sliding blocks.

[0014] Further, the rack is provided with a guide mechanism, which is installed between the cutting mechanism and the feeding mechanism, and comprises a bidirectional screw, a clamping block, a connecting frame and a second guide roller.

[0015] Further, the tensioning assembly comprises a friction wheel, a driving gear, a driven gear and a rack.

[0016] Compared with the prior art, the present application has the following outstanding advantages:

[0017] 1. The tensioning assembly of the present application can automatically tension the annular band saw blade during the operation of the device, and does not tension the annular band saw blade when the device is not in operation, thereby preventing the annular band saw blade from being deformed or gradually loosened due to long-time tensioning, and affecting the service life of the annular band saw blade.

[0018] 2. The rack of the present application is provided with a guide mechanism, when the three-jaw chuck clamps one end of the bar, the second guide rollers on the two clamping blocks can be brought into contact with the outer wall of the bar by rotating the bidirectional screw of the guide mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1is a structural schematic diagram of the present application;

[0020] Figure 2 is a structural schematic diagram of the internal structure of the present application;

[0021] Figure 3 is a right view of the present application;

[0022] Figure 4 is a top view of the present application;

[0023] Figure 5 is a structural schematic diagram of the internal structure of the cutting mechanism in the present application Figure 1 ;

[0024] Figure 6 is a structural schematic diagram of the internal structure of the cutting mechanism in the present application Figure 2 ;

[0025] Figure 7 is a front view of the cutting mechanism in the present application;

[0026] Figure 8 is Figure 7 a sectional view of part A-A in the present application;

[0027] Figure 9 is Figure 7 a sectional view of part B-B in the present application;

[0028] Figure 10 is a structural schematic diagram of the clamping block part of the present application;

[0029] In the present application, 1 is a rack, 11 is a support frame, 12 is a material containing box, 13 is a material guide plate, 14 is a first lead screw, 2 is a cutting mechanism, 21 is a first band saw support, 22 is a tensioning assembly, 221 is a rack gear, 222 is a driven gear, 223 is a driving gear, 224 is a friction wheel, 23 is a second band saw support, 24 is a driving wheel, 25 is a driven wheel, 26 is a guide plate, 261 is a first guide roller, 27 is an annular band saw blade, 28 is a slide plate, 29 is a slide rail, 3 is a guide mechanism, 31 is a bidirectional lead screw, 32 is a connecting frame, 33 is a clamping block, 331 is a second guide roller, 4 is a feeding mechanism, 41 is a three-jaw chuck, 42 is a sliding frame, 43 is a bottom plate, and 44 is a second lead screw. DETAILED DESCRIPTION

[0030] The present application is further described below in conjunction with the drawings and specific embodiments.

[0031] As shown in the drawings, the present application comprises a rack 1, a cutting mechanism 2, and a feeding mechanism 4. Figures 1-4

[0032] ​The upper end of the rack 1 is respectively provided with a supporting frame 11 and a feeding mechanism 4, the supporting frame 11 is in sliding fit with the cutting mechanism 2, and the feeding mechanism 4 is located at one side of the cutting mechanism 2.

[0033] As shown in Figures 5-8 The cutting mechanism 2 comprises a first band saw support 21, a second band saw support 23, a driving wheel 24, a driven wheel 25, an annular band saw blade 27 and a tensioning assembly 22, the center of the driving wheel 24 and the center of the driven wheel 25 are respectively provided with rotating shafts, the driving wheel 24 is installed in the interior of the first band saw support 21 and is in rotating fit with the first band saw support 21 through the rotating shaft, and the driven wheel 25 is installed in the interior of the second band saw support 23 and is in rotating fit with the second band saw support 23 through the rotating shaft.

[0034] The annular band saw blade 27 is sleeved on the driving wheel 24 and the driven wheel 25, the saw teeth of the annular band saw blade 27 are directed upwards, the annular band saw blade 27 is driven to run by the driving wheel 24 and the driven wheel 25, the first band saw support 21 is provided with a slide plate 28, the slide plate 28 is provided with a slide channel, the second band saw support 23 is provided with a slide rail 29, the slide rail 29 is placed in the slide channel of the slide plate 28, and the slide plate 28 is in sliding fit with the slide rail 29. The first band saw support 21 and the second band saw support 23 are respectively provided with guide plates 26, the two guide plates 26 on the first band saw support 21 and the second band saw support 23 are correspondingly arranged, the two guide plates 26 are respectively provided with guide grooves, the slide rail 29 is also provided with a guide groove, one side of the annular band saw blade 27 sequentially passes through the guide grooves on the two guide plates 26, and the other side passes through the guide groove on the slide rail 29, and the part of the annular band saw blade 27 between the two guide plates 26 is a cutting part, which is exposed outside the first band saw support 21 and the second band saw support 23.

[0035] The first band saw support 21 and the slide plate 28 can be an integral structure or a split structure.

[0036] In an optimization scheme, as shown in Figure 9 The guide grooves on the two sides of the guide plates 26 and the slide rail 29 are respectively in rotating fit with a plurality of first guide rollers 261, so that the friction with the inner walls of the guide grooves can be reduced during the movement of the annular band saw blade 27.

[0037] The outer circumferential surfaces of the driving wheel 24 and the driven wheel 25 are respectively provided with wheel grooves, the width of the wheel grooves is greater than the width of the annular band saw blade 27, and the annular band saw blade 27 is placed in the wheel grooves of the driving wheel 24 and the driven wheel 25.

[0038] The upper end of the first band saw support 21 is provided with a motor, the motor shaft is connected with the rotating shaft of the driving wheel 24, the inside of the second band saw support 23 is provided with a tensioning assembly 22, the tensioning assembly 22 comprises a friction wheel 224, a driving gear 223, a driven gear 222 and a rack 221, the rotating shafts on the two sides of the driven wheel 25 are respectively fixedly provided with the friction wheels 224, the outer side of the friction wheel 224 is provided with the driving gear 223, the rotating shafts on the two sides of the driven wheel 25 respectively pass through the gear holes of the corresponding driving gears 223, the driving gears 223 are in sliding fit with the rotating shafts, the outer side of the driving gear 223 is provided with a spring, the spring is sleeved on the rotating shaft, one end of the spring is connected with the second band saw support 23, and the other end of the spring abuts against the driving gear 223, so that the driving gear 223 is pressed on the friction wheel 224.

[0039] The two inner side walls of the second band saw support 23 are respectively in rotating fit with the driven gears 222 through shafts, the driven gears 222 are in mesh with the corresponding driving gears 223, the end of the slide plate 28 is provided with two symmetrical racks 221, the rack 221 extends into the inside of the second band saw support 23 and is in mesh with the corresponding driven gear 222, when the driven wheel 25 rotates, the rotating shafts of the driven wheel 25 can be driven to rotate, the rotating shafts drive the friction wheels 224 to rotate, the friction wheels 224 drive the driving gears 223 to rotate through friction, the driving gears 223 drive the driven gears 222 to rotate, the driven gears 222 move along the racks 221, so that the driven wheel 25 moves away from the driving wheel 24, thereby the annular band saw blade 27 can be tensioned, when the annular band saw blade 27 is tensioned to a certain extent, the friction between the friction wheel 224 and the driving gear 223 is smaller than the resistance of the driven wheel 25 moving away from the driving wheel 24, at this time, the friction wheel 224 no longer drives the driving gear 223 to rotate, the driven wheel 25 no longer moves away from the driving wheel 24, thereby the tensioning force can be prevented from being too large and damaging the annular band saw blade 27.

[0040] The support frame 11 is in rotating fit with the first lead screw 14, the upper end of the first lead screw 14 is connected with the motor shaft, the two sides of the first lead screw 14 are respectively provided with first guide rails, the back of the slide plate 28 is fixedly provided with a first lead screw nut and two first sliding blocks, the first lead screw nut is matched with the first lead screw 14, the first sliding blocks are provided with sliding grooves, and the first guide rails are in sliding fit with the sliding grooves of the first sliding blocks.

[0041] The feeding mechanism 4 comprises a bottom plate 43, a sliding frame 42 and a three-jaw chuck 41, the upper end of the rack 1 is fixedly provided with the bottom plate 43, the bottom plate 43 is in sliding fit with the sliding frame 42, the sliding frame 42 is fixedly connected with the motor, and the motor shaft is connected with the three-jaw chuck 41.

[0042] In the optimization scheme, the bottom plate 43 is in rotational cooperation with the second screw rod 44, one end of the second screw rod 44 is connected with the motor shaft of the motor, the bottom plate 43 is installed on the two sides of the second screw rod 44, respectively, a second guide rail is installed on each side, the lower end of the sliding frame 42 is fixedly installed with a second screw rod nut and two second sliding blocks, the second screw rod nut is in cooperation with the second screw rod 44, the second sliding block is provided with a sliding groove, and the second guide rail is in sliding cooperation with the sliding groove of the second sliding block.

[0043] The rack 1 is provided with a guiding mechanism 3, the guiding mechanism 3 is installed between the cutting mechanism 2 and the feeding mechanism 4, the guiding mechanism 3 comprises a bidirectional screw rod 31, a clamping block 33, a connecting frame 32 and a second guide roller 331, the upper end of the rack 1 is provided with an elongated guide slot, the elongated guide slot is in rotational cooperation with the bidirectional screw rod 31, one end of the bidirectional screw rod 31 is connected with the motor, the lower end of the connecting frame 32 is provided with a threaded hole, the lower end of the connecting frame 32 is in sliding cooperation with the elongated guide slot, and the two threads of the bidirectional screw rod 31 are respectively in threaded cooperation with the threaded holes at the lower ends of the corresponding connecting frames 32.

[0044] As shown in Figures 1-4 The upper end of the connecting frame 32 is fixedly connected with the clamping block 33, the clamping block 33 is provided with a V-shaped clamping groove, the V-shaped clamping grooves of the two clamping blocks 33 are correspondingly arranged, the two V-shaped clamping grooves are respectively in rotational cooperation with the second guide rollers 331, and the centers of the clamping grooves formed by the two V-shaped clamping grooves are located on the same straight line as the center of the three-jaw chuck 41. When the three-jaw chuck 41 clamps one end of the bar material, the second guide rollers 331 on the two clamping blocks 33 can be brought into contact with the outer wall of the bar material by rotating the bidirectional screw rod 31, so that the bar material is guided and limited.

[0045] The rack 1 is provided with an opening at the position of the cutting mechanism 2, the lower end of the opening is provided with an inclined material guide plate 13, a material containing box 12 is placed below the guide plate 26, and the cut wafers can enter the material containing box 12 through the material guide plate 13.

[0046] The operation process is as follows: when the bar stock is clamped by the three-jaw chuck 41, the second guide roller 331 on the two clamping blocks 33 is in contact with the outer wall of the bar stock by rotating the bidirectional screw 31, so that the bar stock is guided and limited, and the second guide roller 331 does not clamp the bar stock. The feeding mechanism 4 drives the bar stock to move to the cutting mechanism 2 by rotating the second screw 44. In the movement process of the bar stock, the second guide roller 331 is rotated, and the second guide roller 331 plays an auxiliary guiding role on the bar stock. The position of the bar stock and the ring-shaped band saw blade 27 is adjusted to adjust the cutting thickness. The cutting mechanism 2 is started, the motor drives the driving wheel 24 to rotate, the driving wheel 24 and the driven wheel 25 drive the ring-shaped band saw blade 27 to move, the driven wheel 25 drives the tensioning assembly 22 to work, and the driving wheel 24 and the driven wheel 25 are tensioned on the ring-shaped band saw blade 27. The first screw 14 is started, and the cutting mechanism 2 is driven to rise, so that the bar stock is cut, and the cut wafer enters the material container 12 through the guide plate 13.

[0047] It should be noted that the specific embodiments of the present application have been described in detail, and various obvious changes made by those skilled in the art without departing from the spirit and scope of the present application are within the protection scope of the present application.

Claims

1. A silicon carbide crystal sawing machine characterized by: The utility model relates to a cutting machine, including frame (1), cutting mechanism (2) and feeding mechanism (4), the upper end of frame (1) is installed with support frame (11) and feeding mechanism (4) respectively, and support frame (11) is slidably connected with cutting mechanism (2), cutting mechanism (2) includes first band saw support (21), second band saw support (23), driving wheel (24), driven wheel (25), annular band saw blade (27) and tensioning assembly (22), driving wheel (24) is rotatably connected with first band saw support (21), and driven wheel (25) is rotatably connected with second band saw support (23), the annular band saw blade (27) is sleeved on driving wheel (24) and driven wheel (25), and the saw tooth of annular band saw blade (27) is towards the upper side, first band saw support (21) is slidably connected with second band saw support (23), the upper end of first band saw support (21) is installed with motor, and motor is connected with driving wheel (24), and the inside of second band saw support (23) is installed with tensioning assembly (22), tensioning assembly (22) includes friction wheel (224), driving gear (223), driven gear (222) and rack (221), the center of driving wheel (24) and driven wheel (25) is equipped with rotating shaft respectively, the rotating shaft of driving wheel (24) is rotatably connected with first band saw support (21), the rotating shaft of driven wheel (25) is rotatably connected with second band saw support (23), and the rotating shaft of driven wheel (25) is installed with friction wheel (224), and the outside of friction wheel (224) is installed with driving gear (223), the rotating shaft of driven wheel (25) is slidably connected with the gear hole of driving gear (223), the outside of driving gear (223) is installed with spring, and the spring is sleeved on the rotating shaft, one end of spring is connected with second band saw support (23), and the other end is on driving gear (223), and driving gear (223) is pressed on friction wheel (224), the both inside walls of second band saw support (23) are rotatably connected with driven gear (222) through shaft respectively, and driven gear (222) is engaged with driving gear (223), and the end of slide plate (28) is installed with two symmetrical racks (221), and rack (221) extends into the inside of second band saw support (23) and is engaged with corresponding driven gear (222).

2. A silicon carbide crystal sawing machine as defined in claim 1, wherein: The upper end of first band saw support (21) is installed with slide plate (28), and the upper end of second band saw support (23) is installed with slide rail (29), and slide rail (29) is slidably connected with the slide of slide plate (28).

3. A silicon carbide crystal sawing machine as defined in claim 2, wherein: The first band saw support (21) and the second band saw support (23) are respectively provided with guide plates (26), the guide plates (26) are provided with guide grooves, the slide rails (29) are also provided with guide grooves, one side of the annular band saw blade (27) passes through the guide grooves on the two guide plates (26), the other side passes through the guide groove on the slide rail (29), and the part of the annular band saw blade (27) between the two guide plates (26) is a cutting part which is exposed outside the first band saw support (21) and the second band saw support (23).

4. A silicon carbide crystal sawing machine as defined in claim 3, wherein: The guide grooves on the two sides of the guide plates (26) and the slide rails (29) are respectively in rotating fit with a plurality of first guide rollers (261).

5. A silicon carbide crystal sawing machine as defined in claim 1, wherein: The outer circumferential surfaces of the driving wheels (24) and the driven wheels (25) are respectively provided with wheel grooves, and the annular band saw blade (27) is placed in the wheel grooves.

6. A silicon carbide crystal sawing machine as defined in claim 1, wherein: The support frame (11) is in rotating fit with the first lead screw (14), the upper end of the first lead screw (14) is connected with the motor shaft of the motor, the two sides of the first lead screw (14) are respectively provided with first guide rails, the back of the slide plate (28) is provided with a first lead screw nut and two first sliding blocks, the first lead screw nut is in fit with the first lead screw, the first sliding blocks are provided with sliding grooves, and the first guide rails are in sliding fit with the sliding grooves of the first sliding blocks.

7. A silicon carbide crystal sawing machine as defined in claim 1, wherein: The feeding mechanism (4) comprises a bottom plate (43), a sliding frame (42) and a three-jaw chuck (41), the upper end of the rack (1) is fixedly provided with the bottom plate (43), the bottom plate (43) is in sliding fit with the sliding frame (42), the sliding frame (42) is fixedly connected with the motor, and the motor shaft of the motor is connected with the three-jaw chuck (41).

8. A silicon carbide crystal sawing machine as defined in claim 7, wherein: The bottom plate (43) is in rotating fit with the second lead screw (44), one end of the second lead screw (44) is connected with the motor shaft of the motor, the bottom plate (43) is provided with second guide rails on the two sides of the second lead screw (44), the lower end of the sliding frame (42) is provided with a second lead screw nut and two second sliding blocks, the second lead screw nut is in fit with the second lead screw (44), the second sliding blocks are provided with sliding grooves, and the second guide rails are in sliding fit with the sliding grooves of the second sliding blocks.

9. A silicon carbide crystal sawing machine as defined in claim 1, wherein: The rack (1) is provided with a guide mechanism (3) and the guide mechanism (3) is installed between the cutting mechanism (2) and the feeding mechanism (4), the guide mechanism (3) comprises a bidirectional lead screw (31), clamping blocks (33), connecting frames (32) and second guide rollers (331), the upper end of the rack (1) is provided with an elongated guide groove, the elongated guide groove is in rotating fit with the bidirectional lead screw (31), one end of the bidirectional lead screw (31) is connected with the motor, the lower end of the connecting frame (32) is provided with a threaded hole, the lower end of the connecting frame (32) is in sliding fit with the elongated guide groove, the two threads of the bidirectional lead screw (31) are respectively in threaded fit with the threaded holes on the lower ends of the corresponding connecting frames (32); the upper end of the connecting frame (32) is connected with the clamping blocks (33), the clamping blocks (33) are provided with V-shaped clamping grooves, the V-shaped clamping grooves of the two clamping blocks (33) are correspondingly arranged, the two V-shaped clamping grooves are respectively in rotating fit with the second guide rollers (331), and the centers of the clamping grooves formed by the two V-shaped clamping grooves are located on the same straight line as the center of the three-jaw chuck (41).

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