An automatic transfer system for a semiconductor production line magazine

Abstract

The application provides an automatic conveying system suitable for a cartridge of a semiconductor production line, so that the transfer efficiency of empty cartridges is improved. The system comprises a production line feeder, a cartridge feeding mechanism arranged at a cartridge outlet position of the feeder, a cartridge feeding mechanism, a conveying line body, a cartridge discharging mechanism, and a production line discharger, a cartridge feeding mechanism arranged at a cartridge inlet position of the discharger; the conveying line body comprises a circulating conveying line, a plurality of conveying boxes are uniformly arranged on the circulating conveying line along a conveying direction, a position of the circulating conveying line close to the cartridge feeding mechanism of the feeder is an upper cartridge station, and a position of the circulating conveying line close to the cartridge feeding mechanism of the discharger is a lower cartridge station; the cartridge feeding mechanism is arranged between the cartridge feeding mechanism of the feeder and the upper cartridge station, and the cartridge feeding mechanism transfers empty cartridges at the cartridge feeding mechanism position of the feeder to the conveying boxes of the upper cartridge station.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production lines, in particular to an automatic conveying system suitable for a cartridge of a semiconductor production line. BACKGROUND

[0002] In the running process of the full-automatic blanking machine of the integrated circuit high-speed tinning line, one link is to carry the empty cartridge at the cartridge outlet of the feeding machine to the cartridge inlet position of the blanking machine. The existing technology adopts manual operation to carry the empty cartridge from the cartridge outlet of the feeding machine to the cartridge inlet of the blanking machine one by one. The traditional manual carrying process often relies on a large amount of manpower, which not only leads to high labor cost, but also has low efficiency, and is difficult to meet the high requirements of modern production on speed and precision. SUMMARY

[0003] In view of the above problems, the present application provides an automatic conveying system suitable for a cartridge of a semiconductor production line, so that the carrying of the empty cartridge relies on mechanization and automation, and the transfer efficiency of the empty cartridge is improved.

[0004] An automatic conveying system suitable for a cartridge of a semiconductor production line, characterized in that it comprises:

[0005] a production line feeding machine, which is provided with a feeding machine cartridge discharging mechanism at a cartridge outlet position;

[0006] a cartridge feeding mechanism;

[0007] a conveying line body;

[0008] a cartridge discharging mechanism;

[0009] and a production line blanking machine, which is provided with a blanking machine cartridge feeding mechanism at a cartridge inlet position;

[0010] The conveying line body comprises a circulating advancing conveying line, a plurality of conveying boxes are uniformly and spacedly arranged on the circulating conveying line along the conveying direction, a cartridge feeding station is arranged at a position of the circulating advancing conveying line close to the feeding machine cartridge discharging mechanism, and a cartridge discharging station is arranged at a position of the circulating advancing conveying line close to the blanking machine cartridge feeding mechanism.

[0011] The cartridge feeding mechanism is arranged between the feeding machine cartridge discharging mechanism and the cartridge feeding station, and the cartridge feeding mechanism transfers the empty cartridge at the position of the feeding machine cartridge discharging mechanism to the conveying box at the cartridge feeding station,

[0012] The cartridge discharging mechanism is arranged between the blanking machine cartridge feeding mechanism and the cartridge discharging station, and the cartridge discharging mechanism transfers the empty cartridge in the conveying box at the cartridge discharging station to the blanking machine cartridge feeding mechanism.

[0013] It is further characterized in that:

[0014] The conveying line body comprises a fixed frame, a cover plate, a conveying line body motor set, a chain wheel, a profile frame, and a chain. The outer periphery of the fixed frame is covered with the cover plate. The inner cavity of the fixed frame is fixedly provided with the profile frame. The profile frame is enclosed to form a closed shape. The length direction of the profile frame is respectively protruded from the surface area formed by the fixed frame and the cover plate. One of the vertical surfaces of the profile frame is provided with the chain. The chain is enclosed to form a racetrack shape. The length direction of the profile frame is respectively provided with a corresponding chain wheel. The outer periphery of the chain wheel is engaged with the chain. The input shaft of one of the chain wheels is connected with the conveying line body motor set. The circulating conveying line is conveyed by the chain. The back side of the conveying box is fixedly connected with the corresponding position of the chain through the conveying box connecting plate.

[0015] When the conveying box is located at the lower edge of the racetrack-shaped chain, the material receiving port of the conveying box is arranged upward. The material receiving port is used for receiving or removing the magazine.

[0016] One of the vertical surfaces of the profile frame is provided with a plurality of guide strips at intervals. The guide strips are provided with H-shaped chain guide grooves. The corresponding positions of the chains are respectively embedded in the H-shaped chain guide grooves. This makes the arrangement of the chain simple and reliable.

[0017] The outer periphery of the profile frame corresponding to the chain is also provided with a fixed guide rail. The fixed guide rail is expanded and profiled along the outer boundary of the chain. The conveying box connecting plate of the conveying box is slidably embedded in the fixed guide rail. This ensures that the travel route of the conveying box is stable and reliable.

[0018] The conveying box comprises a conveying box connecting plate, a back plate, a bottom plate, a fixed block, a sliding limiting block, a linear guide rail, an adjusting plate, a sliding fixed block, a limiting block, an optical axis, a lead screw, and a knob bead. The inner long side of the bottom plate is fixedly provided with a protruding back plate. One end of the outer long side of the bottom plate is fixedly provided with a protruding fixed block. The back plate and the fixed block are provided with an optical axis and a lead screw. The optical axis and the lead screw are arranged in parallel. The optical axis and the lead screw are provided with a sliding fixed block. The sliding fixed block is fixedly connected with a fixed limiting block. The fixed limiting block moves along the short side of the back plate to adjust the width of the magazine. The other end of the bottom plate is provided with a linear guide rail and an adjusting plate. The adjusting plate is provided with a lock hole arranged in connection. The linear guide rail is provided with a sliding limiting block. The sliding limiting block is integrated with a knob bead mechanism at the top. The bottom bead of the knob bead mechanism is positioned in the corresponding lock hole to complete the length area setting of the magazine.

[0019] The sliding fixed block is provided with a pressing bead mechanism at the position corresponding to the lead screw. The pressing bead mechanism is used to lock or unlock the threads of the lead screw, so as to quickly and reliably adjust the position of the fixed limiting block.

[0020] The structure of the magazine feeding mechanism and the magazine discharging mechanism is the same, and they are respectively arranged at the two ends of the length direction of the conveying line body and arranged in the radial direction;

[0021] The magazine feeding mechanism and the magazine discharging mechanism each include a mounting plate, a connecting plate, a lifting module, a connecting fixed plate, a transverse module, a gripper connecting plate and a gripper. The connecting plate is used for fixing the magazine feeding mechanism and the magazine discharging mechanism at corresponding positions of a production line feeding machine or a production line discharging machine. The upper end of the connecting plate is used for fixing the vertically arranged mounting plate. The lifting module is fixed on the mounting plate. The output end of the lifting module is fixed with the connecting fixed plate. The connecting fixed plate is fixed with the transverse module. The output end of the transverse module is fixed with the gripper connecting plate. The gripper connecting plate is fixed with the downward protruding gripper. The moving range of the transverse module covers the distance between two moving switching magazine stations.

[0022] A linear guide rail is further arranged on the side of the mounting plate corresponding to the lifting module. The linear guide rail is arranged in parallel with the lifting direction of the lifting module. The connecting fixed plate is connected with the linear guide rail through a guide rail pair, so as to ensure the stable and reliable lifting action of the connecting fixed plate.

[0023] The lifting module and the transverse module are each correspondingly provided with a drag chain guide plate and a drag chain, so as to ensure the stable and reliable electrical connection.

[0024] The gripper includes a gripper mounting plate, a connecting plate, a compensation cylinder, a clamping jaw cylinder, a sensor, a clamping plate connecting piece A, a clamping plate connecting piece B, a clamping plate A and a clamping plate B. The clamping jaw cylinder is arranged below the gripper mounting plate. The connecting plate is fixed on the side surface of the gripper mounting plate. The connecting plate is fixed with the compensation cylinder. The output end of the compensation cylinder is fixed with the cylinder body of the clamping jaw cylinder through a connecting piece. The two sliding blocks of the clamping jaw cylinder are respectively fixed with the clamping plate connecting piece A and the clamping plate connecting piece B. The lower part of the clamping plate connecting piece A is fixed with the clamping plate A. The lower part of the clamping plate connecting piece B is fixed with the clamping plate B.

[0025] The inner sides of the clamping plate A and the clamping plate B are each pasted with a silica gel plate, so as to ensure that the magazine gripper is clamped. The sensor is fixed on the clamping plate A through a sensor fixing piece. The sensor detects whether there is a magazine in the area between the clamping plate A and the clamping plate B.

[0026] The compensation cylinder arranged on the gripper is used for compensating the positioning reference difference of the conveying box.

[0027] The system of the application can be adapted to all tin plating lines, silver plating lines, washing lines and similar production lines corresponding to the automatic magazine feeding mechanism and the magazine discharging mechanism, and is applied to long-distance conveying environments.

[0028] The transmission line body is provided with multiple groups of transmission boxes, and the transmission boxes are driven to make circular transmission counterclockwise through a chain wheel and a guide rail; long-distance transmission of the magazine or similar products can be realized,

[0029] The magazine feeding mechanism transfers the empty magazine at the magazine outlet mechanism position of the feeding machine into the transmission box at the magazine feeding station, and the magazine discharging mechanism transfers the empty magazine in the transmission box at the magazine feeding station into the magazine inlet mechanism of the discharging machine, so that long-distance transmission of the magazine is realized, and the blank of similar transmission operations is filled; meanwhile, the magazine has the advantages of simple structure, convenient installation and adjustment, stable operation, small occupied space, safe and reliable use, etc. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 is a schematic diagram of the overall layout of the present application;

[0031] Figure 2 is a three-dimensional enlarged schematic diagram of the magazine outlet mechanism of the feeding machine, the magazine feeding mechanism, and the magazine feeding station;

[0032] Figure 3 is a three-dimensional enlarged schematic diagram of the magazine discharging mechanism, the magazine feeding station, and the magazine inlet mechanism of the discharging machine;

[0033] Figure 4 is a partial enlarged schematic diagram of the transmission line body of the present application;

[0034] Figure 5 is a three-dimensional schematic diagram of the transmission box of the present application;

[0035] Figure 6 is a side view of the chain assembly of the transmission line body of the present application;

[0036] Figure 7 is a three-dimensional schematic diagram of the magazine feeding mechanism of the present application;

[0037] Figure 8 is a three-dimensional schematic diagram of the gripper of the present application. DETAILED DESCRIPTION

[0038] An automatic conveying system suitable for a magazine of a semiconductor production line, as shown in Figure 1 , comprises a production line feeding machine 1, a magazine feeding mechanism 3, a transmission line body 5, a magazine discharging mechanism 4, and a production line discharging machine 2.

[0039] The production line feeding machine 1 is provided with a feeding machine magazine outlet mechanism 1-1 at the magazine outlet position;

[0040] The production line discharging machine 2 is provided with a discharging machine magazine inlet mechanism 2-1 at the magazine inlet position;

[0041] The conveying line body 5 comprises a circulating conveying line on which a plurality of conveying boxes 6 are uniformly arranged at intervals along a conveying direction, a position of the circulating conveying line close to the feeder ejecting mechanism 1-1 is an upper ejecting station 501, and a position of the circulating conveying line 5 close to the feeder ejecting mechanism 2-1 is a lower ejecting station 502;

[0042] The feeder ejecting mechanism 1-1 and the upper ejecting station 501 are provided with an ejecting mechanism 3, which transfers the empty ejector 7 at the position of the feeder ejecting mechanism 1-1 to the conveying box 6 at the upper ejecting station 501,

[0043] The feeder ejecting mechanism 2-1 and the lower ejecting station 502 are provided with an ejecting mechanism 4, which transfers the empty ejector 7 in the conveying box at the lower ejecting station 502 to the feeder ejecting mechanism 2-1.

[0044] In specific implementation, the feeder 1 is located at the leftmost end of the system, belongs to the semiconductor production line equipment, and is installed on the semiconductor production line; the feeder 2 is located at the rightmost end of the system, belongs to the semiconductor production line equipment, and is installed on the semiconductor production line; the ejector feeding mechanism 3 is located at the right side of the feeder 1 and is installed on the feeder 1; the ejector feeding mechanism 4 is located at the left side of the feeder 2 and is installed on the feeder 2.

[0045] In specific embodiments, the conveying line body 5 comprises a fixed frame 5-1, a cover plate 5-2, a conveying line body motor set 5-3, a chain wheel 5-4, a profile frame 5-5, and a chain 5-7. The profile frame in specific embodiments is an aluminum profile frame. The outer periphery of the fixed frame 5-1 is covered with the cover plate 5-2. The inner cavity of the fixed frame 5-1 is fixedly provided with the profile frame 5-5. From the front view, the profile frame 5-5 forms a closed shape. The profile frame 5-5 is fixedly connected to the fixed frame 5-1 through a protruding connecting block. The fixed frame 5-1 is provided with a footing which is supported on the ground. The length direction ends of the profile frame 5-5 respectively protrude from the surface area formed by the fixed frame 5-1 and the cover plate 5-2 to form the upper ejecting station 501 and the lower ejecting station 502 in cooperation with the conveying box. The front vertical surface of the profile frame 5-5 is provided with the chain 5-7 which forms a racetrack shape. The length direction ends of the profile frame 5-5 are respectively fixedly provided with corresponding chain wheels 5-4. The outer periphery of the chain wheel 5-4 is engagedly connected to the chain 5-7. The input shaft of the left chain wheel 5-4 is connected to the conveying line body motor set 5-3. The circulating conveying line is conveyed through the chain 5-7. The back side of the conveying box 6 is fixedly connected to the corresponding position of the chain 5-7 through the conveying box connecting plate 6-1.

[0046] When the conveying box 6 is located at the lower edge of the racetrack-shaped chain 5-7, the material receiving port of the conveying box 6 is upwardly arranged for receiving or removing the magazine 7, and the chain 5-7 transports the conveying box 6 counterclockwise, thereby ensuring that the magazine 7 is always in a planar stable state during the conveying process;

[0047] One of the vertical surfaces of the profile frame 5-5 is provided with a plurality of guide strips 5-8 at intervals, and the guide strips 5-8 are installed by the profile frame 5-5 using screws through the fixing pieces 5-9, and the guide strips 5-8 are provided with H-shaped chain guide grooves, and the chain 5-7 at the corresponding positions is respectively embedded in the H-shaped chain guide grooves, which makes the arrangement of the chain 5-7 simple and reliable;

[0048] The profile frame 5-5 is further provided with a fixed guide rail 5-6 corresponding to the outer periphery of the chain 5-7, and the fixed guide rail 5-6 is arranged along the outer boundary of the chain 5-7 and is expanded in profile, and the conveying box connecting plate 6-1 of the conveying box 6 is slidingly embedded in the fixed guide rail 5-6, which ensures that the travel route of the conveying box 6 is stable and reliable;

[0049] The conveying box 6 comprises a conveying box connecting plate 6-1, a back plate 6-2, a bottom plate 6-3, a fixed block 6-4, a sliding limiting block 6-5, a linear guide rail 6-6, an adjusting plate 6-7, a sliding fixing block 6-8, a fixed limiting block 6-9, an optical axis 6-10, a lead screw 6-11, and a knob bead 6-13; the inner long side of the bottom plate 6-3 is fixedly provided with the upwardly protruding back plate 6-2, one end of the outer long side of the bottom plate 6-3 is fixedly provided with the upwardly protruding fixed block 6-4, the optical axis 6-10 and the lead screw 6-11 are arranged between the back plate 6-2 and the fixed block 6-4, and the optical axis 6-10 and the lead screw 6-11 are arranged in parallel; the optical axis 6-10 and the lead screw 6-11 are provided with the sliding fixing block 6-8; the sliding fixing block 6-8 is fixedly connected with the fixed limiting block 6-9, the fixed limiting block 6-9 moves along the short side of the back plate 6-2 to adjust the width of the magazine 7, the other end of the bottom plate 6-3 is provided with the linear guide rail 6-6 and the adjusting plate 6-7, the adjusting plate 6-7 is provided with a plurality of lock holes arranged in connection, two groups of linear guide rails 6-6 are installed with the sliding limiting block 6-5, the sliding limiting block 6-5 is integrally provided with the knob bead 6-13 at the top, and the bottom bead of the knob bead 6-13 is positioned in the corresponding lock hole to complete the length area arrangement of the magazine 7;

[0050] The sliding fixing block 6-8 is provided with a pressing bead mechanism 6-12 at a position corresponding to the lead screw 6-11, and the pressing bead mechanism 6-12 is used for locking or unlocking the threads of the lead screw, thereby quickly and reliably adjusting the position of the fixed limiting block 6-9.

[0051] In specific implementation, the magazine feeding mechanism 3 and the magazine discharging mechanism 4 have the same structure and are respectively arranged at the two ends of the conveying line body 5 in the length direction and in the radial direction;

[0052] The clip feeding mechanism 3 and the clip discharging mechanism 4 each comprise a mounting plate 3-1, a connecting plate 3-3, a lifting module 3-3, a connecting fixed plate 3-5, a transverse module 3-6, a gripper connecting plate 3-7, and a gripper 8. The connecting plate 3-3 is used to fix the clip feeding mechanism 3 and the clip discharging mechanism 4 at corresponding positions of the production line feeding machine 1 or the production line discharging machine 2. The upper end of the connecting plate 3-3 is used to fix the vertically arranged mounting plate 3-1. The lifting module 3-3 is fixed on the mounting plate 3-1. The output end of the lifting module 3-3 is fixed with the connecting fixed plate 3-5. The connecting fixed plate 3-5 is fixed with the transverse module 3-6. The output end of the transverse module 3-6 is fixed with the gripper connecting plate 3-7. The gripper connecting plate 3-7 is fixed with the downward protruding gripper 8. The moving range of the transverse module 3-6 covers the distance between two moving and switching clip stations.

[0053] In specific implementation, the mounting plate 3-1 is further provided with a linear guide rail 3-4 corresponding to one side of the lifting module 3-3. The linear guide rail 3-4 is arranged parallel to the lifting direction of the lifting module 3-3. The connecting fixed plate 3-5 is connected to the linear guide rail 3-4 through a guide rail pair, so as to ensure stable and reliable lifting action of the connecting fixed plate 3-5.

[0054] The lifting module 3-3 is correspondingly provided with a drag chain guide plate A3-8 and a drag chain A3-9. The transverse module is correspondingly provided with a drag chain guide plate B3-10 and a drag chain B3-11, so as to ensure stable and reliable electrical connection.

[0055] In specific embodiments, the gripper 8 comprises a gripper mounting plate 8-1, a connecting plate 8-2, a compensation cylinder 8-4, a clamping jaw cylinder 8-3, a clamping plate connecting piece A8-8, a clamping plate connecting piece B8-9, a clamping plate A8-10, and a clamping plate B8-11. The clamping jaw cylinder 8-3 is arranged below the gripper mounting plate 8-1. The connecting plate 8-2 is fixed to the side surface of the gripper mounting plate 8-1. The connecting plate 8-2 is fixed with the compensation cylinder 8-4. The output end of the compensation cylinder 8-4 is fixed to the cylinder body of the clamping jaw cylinder 8-3 through a connecting piece 8-5. The two sliding blocks of the clamping jaw cylinder 8-3 are respectively fixed to the clamping plate connecting piece A8-8 and the clamping plate connecting piece B8-9. The lower part of the clamping plate connecting piece A8-8 is fixed to the clamping plate A8-10. The lower part of the clamping plate connecting piece B8-9 is fixed to the clamping plate B8-11.

[0056] The inner sides of the clamping plate A8-10 and the clamping plate B8-11 are respectively pasted with silica gel plates, so as to ensure that the clip gripper clamps the clip. A sensor 8-7 is fixed to the clamping plate A8-10 through a sensor fixing piece 8-6. The sensor 8-7 detects whether there is a clip in the area between the clamping plate A and the clamping plate B.

[0057] The compensation cylinder 8-4 arranged on the gripper 8 is used to compensate the positioning reference difference of the conveying box.

[0058] Its working principle is as follows: the feeding magazine of the production line is arranged on the feeding magazine ejection station, and the magazine is ejected to the positioning surface;

[0059] The lifting module of the magazine feeding mechanism is lifted to the highest point, the transverse module is moved to the left end reference position, the gripper is moved to the upper side of the magazine;

[0060] The compensation cylinder is extended, the clamping jaw cylinder is in the open state, the lifting module of the feeding mechanism is lowered to the height of the magazine, the clamping jaw cylinder drives the clamping plate A and the clamping plate B to clamp the magazine, and the compensation cylinder is retracted;

[0061] The motor of the conveying line body drives the chain wheel to rotate, the chain wheel drives the chain to rotate, the chain and the conveying box fixed on the guide rail also move with the chain, the conveying box is guided by the guide rail and moves in the counterclockwise direction;

[0062] The conveying box moves to the upper magazine station at the left end of the conveying line body and stops horizontally with the opening upward;

[0063] The pressing ball on the conveying box is pressed down to adjust the sliding fixed block, the limiting block on the sliding fixed block is driven to move, and the width is adjusted to adapt to the current magazine width; the adjusting knob ball drives the sliding limiting block to move, and the length is adjusted to adapt to the current magazine length;

[0064] The transverse module drives the magazine to move to the upper side of the conveying box, and the lifting module moves downward; the magazine is placed into the conveying box;

[0065] The conveying line body drives the conveying box to convey the magazine to the lower magazine station and stop through the chain;

[0066] The magazine unloading mechanism drives the magazine gripper to move to the upper side of the magazine through the transverse module; the lifting module drives the transverse module and the magazine gripper to move downward to the height of the magazine, and the clamping jaw cylinder drives the clamping plate A and the clamping plate B to clamp the magazine;

[0067] The lifting module moves upward, drives the transverse module and the magazine gripper to move to the height of the feeding machine; the transverse module drives the magazine to move to the magazine feeding mechanism of the unloading machine;

[0068] The clamping jaw cylinder drives the clamping plate A and the clamping plate B to release the magazine; the magazine is placed in the magazine feeding mechanism of the unloading machine;

[0069] The magazine feeding mechanism of the unloading machine conveys the magazine to the production line unloading machine to complete the transmission magazine task.

[0070] Compared with the prior art, the beneficial effects of the present application are:

[0071] Firstly, the application provides an automatic conveying system suitable for a cartridge of a semiconductor production line, which is provided with an automatic feeding mechanism and an automatic discharging mechanism; can be adapted to all tin lines, silver plating lines, washing lines and similar production lines, and is applied to long-distance conveying environment;

[0072] The conveying line body is provided with multiple groups of conveying boxes, which are driven by chain wheels and guide rails to make circulating transmission counterclockwise; long-distance transmission of cartridges or similar products can be realized, and the application is applied to actual transmission distance greater than or equal to 33 meters;

[0073] The cartridge gripper on the cartridge feeding mechanism clamps the cartridge from the cartridge feeding mechanism on the feeding machine of the production line, the inner sides of the clamping plate A and the clamping plate B on the cartridge gripper are pasted with silica gel plates, so that the cartridge gripper can clamp the cartridge; the sensor fixed on the clamping plate A by the sensor fixing piece detects the cartridge signal; the compensation cylinder arranged on the cartridge gripper is retracted to compensate the positioning reference difference of the conveying box;

[0074] The conveying box is provided with length and width adjustment structures, which can adapt to the conveying of cartridges of all sizes;

[0075] The application realizes long-distance conveying of cartridges, fills the blank of similar conveying operations; at the same time, the application has simple structure, is convenient to install and adjust, stable in operation, small in occupied space, safe and reliable in use.

[0076] For those skilled in the art, it is obvious that the application is not limited to the details of the above exemplary embodiments, and the application can be realized in other specific forms without departing from the spirit or essential characteristics of the application. Therefore, the embodiments should be regarded as exemplary and non-limiting, the scope of the application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the application. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0077] In addition, it should be understood that although the present specification is described in terms of embodiments, each embodiment does not contain only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can be combined to form other embodiments which can be understood by those skilled in the art.

Claims

1. An automatic transfer system for a magazine of a semiconductor production line, characterized in that, It includes: The production line feeding machine is provided with a feeding machine cartridge discharging mechanism at the cartridge outlet position; The cartridge feeding mechanism; The conveying line body; The cartridge discharging mechanism; And the production line discharging machine is provided with a discharging machine cartridge feeding mechanism at the cartridge inlet position; The conveying line body includes a circulating conveying line, a plurality of conveying boxes are uniformly arranged on the circulating conveying line along the conveying direction, the position of the circulating conveying line close to the feeding machine cartridge discharging mechanism is the upper cartridge station, and the position of the circulating conveying line close to the discharging machine cartridge feeding mechanism is the lower cartridge station; The cartridge feeding mechanism is arranged between the feeding machine cartridge discharging mechanism and the upper cartridge station, and the cartridge feeding mechanism transfers the empty cartridge at the feeding machine cartridge discharging mechanism position to the conveying box in the upper cartridge station, The cartridge discharging mechanism is arranged between the discharging machine cartridge feeding mechanism and the lower cartridge station, and the cartridge discharging mechanism transfers the empty cartridge in the conveying box at the lower cartridge station to the discharging machine cartridge feeding mechanism; The conveying box includes a conveying box connecting plate, a back plate, a bottom plate, a fixed block, a sliding limiting block, a linear guide rail, an adjusting plate, a sliding fixed block, a limiting block, a light shaft, a screw rod, and a knob bead; The inner long side of the bottom plate is fixedly provided with an upper convex back plate, one end of the outer long side of the bottom plate is fixedly provided with an upper convex fixed block, the light shaft and the screw rod are arranged between the back plate and the fixed block, and the light shaft and the screw rod are arranged in parallel; The sliding fixed block is arranged on the light shaft and the screw rod; The sliding fixed block is fixedly connected with a fixed limiting block, the fixed limiting block moves along the short side of the back plate to adjust the width of the placed cartridge, and the other end of the bottom plate is provided with a linear guide rail and an adjusting plate; The adjusting plate is provided with a plurality of lock holes arranged in connection; The linear guide rail is provided with a sliding limiting block; The sliding limiting block is integrally provided with a knob bead mechanism; The bottom bead of the knob bead mechanism is positioned in the corresponding lock hole, and the length of the cartridge is set.

2. An automatic transfer system for a magazine of a semiconductor production line according to claim 1, characterized in that: The conveying line body includes a fixed frame, a cover plate, a conveying line body motor set, a chain wheel, a profile frame, and a chain; The outer periphery of the fixed frame is covered with a cover plate, the inner cavity of the fixed frame is fixedly provided with a profile frame, the profile frame is enclosed to form a closed shape, the length direction of the profile frame is respectively protruded from the surface area formed by the fixed frame and the cover plate at both ends, one of the vertical surfaces of the profile frame is provided with a chain, the chain is enclosed to form a racetrack shape, and the length direction of the profile frame is respectively provided with a corresponding chain wheel at both ends, the outer periphery of the chain wheel is engaged with the chain, and the input shaft of one of the chain wheels is connected with the conveying line body motor set; The circulating conveying line is conveyed by the chain, and the back side of the conveying box is fixedly connected with the chain at the corresponding position through the conveying box connecting plate.

3. An automatic transfer system for a magazine of a semiconductor production line according to claim 2, characterized in that: When the conveying box is located at the lower edge position of the racetrack-shaped chain, the material receiving port of the conveying box is arranged upward, and the material receiving port is used for receiving or removing the cartridge.

4. An automatic transfer system for a magazine of a semiconductor production line according to claim 2, characterized in that: One of the vertical surfaces of the profile frame is provided with a plurality of guide strips arranged at intervals, the guide strips are provided with H-shaped chain guide grooves, and the chains at the corresponding positions are respectively embedded in the H-shaped chain guide grooves.

5. An automatic transfer system for a magazine of a semiconductor production line according to claim 2, characterized in that: The profile frame is provided with a fixed guide rail corresponding to the outer periphery of the chain, which is arranged along the outer boundary of the chain and is profiled outwardly, and the conveying box connecting plate of the conveying box is correspondingly slidably embedded in the fixed guide rail.

6. An automatic transfer system for a magazine of a semiconductor production line according to claim 1, characterized in that: The sliding fixing block is provided with a pressing ball mechanism at a position corresponding to the screw rod, which is used to lock or unlock the thread of the screw rod.

7. An automatic transfer system for a magazine of a semiconductor production line according to claim 1, characterized in that: The structure of the ejector clip feeding mechanism and the ejector clip discharging mechanism is the same, and they are respectively arranged at the two ends of the length direction of the conveying line body and are arranged in the radial direction.

8. An automatic transfer system for a magazine of a semiconductor production line according to claim 7, characterized in that: The ejector clip feeding mechanism and the ejector clip discharging mechanism each include a mounting plate, a connecting plate, a lifting module, a connecting fixed plate, a transverse module, a gripper connecting plate, and a gripper. The connecting plate is used to fix the ejector clip feeding mechanism and the ejector clip discharging mechanism at corresponding positions of the production line feeding machine or the production line discharging machine. The upper end of the connecting plate is used to fix a vertically arranged mounting plate. The mounting plate is fixedly provided with a lifting module. The output end of the lifting module is fixedly provided with the connecting fixed plate. The connecting fixed plate is fixedly provided with the transverse module. The output end of the transverse module is fixedly connected to the gripper connecting plate. The gripper connecting plate is fixedly provided with a downwardly protruding gripper. The moving range of the transverse module covers the distance between two moving switching ejector clip stations.

9. An automatic transfer system for a cassette used in a semiconductor production line according to claim 8, wherein: The gripper includes a gripper mounting plate, a connecting plate, a compensation cylinder, a clamping jaw cylinder, a sensor, a clamping plate connecting piece A, a clamping plate connecting piece B, a clamping plate A, and a clamping plate B. The clamping jaw cylinder is arranged below the gripper mounting plate. The connecting plate is fixedly connected to the side surface of the gripper mounting plate. The connecting plate is fixedly provided with the compensation cylinder. The output end of the compensation cylinder is fixedly connected to the cylinder body of the clamping jaw cylinder through a connecting piece. The two sliders of the clamping jaw cylinder are respectively fixedly connected to the clamping plate connecting piece A and the clamping plate connecting piece B. The lower part of the clamping plate connecting piece A is fixedly connected to the clamping plate A. The lower part of the clamping plate connecting piece B is fixedly connected to the clamping plate B.

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