Multi-cavity vacuum coating equipment formula system and control method
By adopting a source supply system and vacuum system in a multi-cavity vacuum coating equipment, the simultaneous operation of multi-cavity process operations is solved, and the equipment is efficiently reduced and cost reduction is achieved.
Patent Information
- Application Number
- CN202510109682.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-23
- Publication Date
- 2025-05-02
AI Technical Summary
The existing multi-cavity vacuum coating equipment requires independent vacuum systems, source systems and formulation systems for each cavity, which makes the equipment occupy a large amount of space and is expensive.
Through a set of source supply system and vacuum system, the simultaneous operation of multi-cavity process operations can be achieved. Specific solutions include two or more process chambers, a source system and a vacuum system, which connects each process chamber through two pump systems, one of which is used for high vacuum pumping and the other to support the process.
Effectively reduce the size of the equipment, reduce space usage, reduce usage costs, and achieve efficient operation of multi-cavity process operations.
Smart Images
Figure CN119913457A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a multi-cavity vacuum coating equipment formula system and a control method, belonging to the technical field of vacuum coating. Background Art
[0002] In the vacuum coating processes such as ALD\PECVD\CVD of photovoltaic cells, the process chamber, vacuum system, source supply system, recipe execution system, etc. are generally involved. The components of the coating recipe system and the editing and operation methods of the recipe system are important components.
[0003] In the existing photovoltaic cell coating process, the coating processes such as the front film, back film, and ALD generally adopt a multi-tube layout, where one tube is one cavity, and each cavity requires an independent vacuum system, an independent source system, and an independent formula system, which takes up a lot of space and is costly. Figure 1 A multi-cavity vacuum coating equipment shown has four process tubes (cavities) and needs to be configured with four source systems and four vacuum systems. Summary of the invention
[0004] The present invention proposes a multi-cavity vacuum coating equipment formulation system and control method, which aims to overcome the above-mentioned shortcomings of the prior art and realize simultaneous operation of multi-cavity process operations under the conditions of a set of source supply system and vacuum system.
[0005] The technical solution of the present invention is: a multi-chamber vacuum coating equipment formulation system, including two or more process chambers, a source system and a vacuum system, the source system is connected to each process chamber, and the vacuum system is connected to each process chamber through two pump systems, one of which is used to pump the process chamber to a high vacuum, and the other pump system is used to support the process chamber to carry out the process.
[0006] A control method for a multi-cavity vacuum coating equipment formulation system comprises the following steps: 1) Assume that the recipe system includes several periodic process groups, each of which is identical and consists of several different steps, and all process groups run continuously during operation; 2) One of the process chambers starts the process first, and the start of the entire process recipe timeline is the start time of the process chamber. After several cycles, the process of the process chamber is completed; 3) Before starting each subsequent process chamber process, wait for the metal boat to enter the furnace, and then start the process at the end of the cycle in which the recipe system is in progress. After several cycles, the corresponding process chamber process is completed; 5) After the process chamber has been completed, it starts to cut in at the end of the cycle in which the formulation system is in progress, and the coating process is carried out; 6) When all process chambers are completed and there are no more chambers that need processing, the process recipe timeline stops and enters the waiting stage, waiting for any process chamber to start processing, and restarts step 2).
[0007] Preferably, in the vacuum system, a pump system evacuates a process chamber to be processed to a high vacuum, and before starting the process, the process chamber is connected to another pump system, and the first pump system closes the connection with the process chamber.
[0008] Preferably, when there are two or more process chambers that need processing, first wait for a pump system to pump all process chambers to high vacuum in turn, and then before the process, each process chamber is connected to another pump system, the first pump system closes the connection with each process chamber, and the second pump system supports simultaneous processing of all process chambers.
[0009] The advantages of the present invention are as follows: the structure and method are reasonably designed, and a set of source supply system and vacuum system can be used to realize simultaneous operation of multi-cavity process operations, which can effectively reduce the size of the equipment, reduce space occupation, and reduce the cost of use. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 The present invention is a schematic structural diagram of a multi-cavity vacuum coating device in the prior art.
[0011] Figure 2 It is a schematic structural diagram of an embodiment of a multi-cavity vacuum coating equipment formulation system of the present invention.
[0012] Figure 3 It is a process flow chart of an embodiment of a multi-cavity vacuum coating equipment formulation system of the present invention. DETAILED DESCRIPTION
[0013] The present invention is further described in detail below with reference to examples and specific implementation modes.
[0014] A multi-chamber vacuum coating equipment formula system includes two or more process chambers, a source system and a vacuum system, the source system is connected to each process chamber, and the vacuum system is connected to each process chamber through two pump systems, one of which is used to pump the process chamber to a high vacuum, and the other pump system is used to support the process chamber to carry out the process.
[0015] A control method for a multi-cavity vacuum coating equipment formulation system comprises the following steps: 1) Assume that the recipe system includes several periodic process groups, each of which is identical and consists of several different steps, and all process groups run continuously during operation; 2) One of the process chambers starts the process first, and the start of the entire process recipe timeline is the start time of the process chamber. After several cycles, the process of the process chamber is completed; 3) Before starting each subsequent process chamber process, wait for the metal boat to enter the furnace, and then start the process at the end of the cycle in which the recipe system is in progress. After several cycles, the corresponding process chamber process is completed; 5) After the process chamber has been completed, it starts to cut in at the end of the cycle in which the formulation system is in progress, and the coating process is carried out; 6) When all process chambers are completed and there are no more chambers that need processing, the process recipe timeline stops and enters the waiting stage, waiting for any process chamber to start processing, and restarts step 2).
[0016] In the vacuum system, a pump system evacuates the process chamber to be processed to a high vacuum. Before starting the process, the process chamber is connected to another pump system, and the first pump system closes the connection with the process chamber.
[0017] When there are two or more process chambers that need processing, first wait for a pump system to pump all process chambers to high vacuum in turn, and then before the process, each process chamber is connected to another pump system, the first pump system closes the connection with each process chamber, and the second pump system supports simultaneous processing of all process chambers. Example
[0018] like Figure 2 As shown, a multi-chamber vacuum coating equipment formulation system includes five process chambers: the first process chamber to the fifth process chamber (process chamber 1 to process chamber 5 in the figure), a source system: the first source to the third source (source 1 to source 3 in the figure) and a vacuum system: with two pump system pipelines (vacuum system 1 and vacuum system 2 in the figure).
[0019] Normal operation mechanism: In the case of unshielded process chamber, free access to the boat, For example, the first process chamber enters the boat, closes the door, starts to evacuate, and after the vacuum is completed, the source enters the chamber to start the process; For example, the second process chamber enters the boat, closes the door, starts to evacuate, and after the vacuum is completed, the source enters the chamber to start the process; …….
[0020] However, the above situation is not true, and the vacuum and process of each process chamber will interfere with each other, resulting in the inability to proceed.
[0021] In order to achieve a normal process with one source system and no interference between the process chambers, the principles are as follows: like Figure 3 As shown, the recipe system consists of several process groups of cycles z. The process groups of each cycle are the same and consist of several different steps: P1, P2, P3, and P4.
[0022] The process recipe shown in the figure consists of z=2+x+2 process groups, and the actual operation is continuous.
[0023] When each process chamber is working at the same time, the source system follows the following principles, according to the mechanism number, such as Figure 3 As shown, The first process chamber is the first chamber to start the process. The beginning of the process recipe timeline is the start time of the first process chamber. After m+2 cycles, the process is completed.
[0024] The second process chamber is the second chamber to start the process. The first process is waiting for the metal boat to enter the furnace, and the second cycle begins. After j+2 cycles, the process is completed.
[0025] The third process chamber is the third chamber for starting the process. The process starts after the nth process and is completed after k+2 cycles.
[0026] … After the processes of the first process chamber to the third process chamber are completed, after the boat is unloaded and loaded, wait for the process recipe timeline to complete the latest process group before starting the coating process.
[0027] After waiting for the process recipe timeline to complete the latest process group, the fourth process chamber and the fifth process chamber start to cut in and perform the coating process.
[0028] When all processes are completed and there is no cavity that needs the process anymore (pre-signal), the process recipe timeline stops and enters the waiting state, waiting for any cavity to start the process, and repeats the cycle.
[0029] When multiple process chambers are working at the same time, the pump system will follow the following principles: The two pump systems of the vacuum system are divided into: The first pump system pumps the chamber to a high vacuum. Before starting the process, the chamber is connected to the second pump system and the first pump system closes the connection with the chamber.
[0030] If two or more chambers need to be evacuated to high vacuum at the same time, they need to queue up and wait for the first pump system y to complete in sequence. After that, the second pump system can support the simultaneous process of multiple chambers.
[0031] In actual use, the power of the first pump system used to evacuate the chamber to a high vacuum should be greater than that of the second pump system.
[0032] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.
Claims
1. A multi-cavity vacuum coating equipment formulation system, characterized in that: It consists of two or more process chambers, a source system and a vacuum system. The source system is connected to each process chamber. A vacuum system is connected to each process chamber through two pump systems. One pump system is used to pump the process chamber to a high vacuum, and the other pump system is used to support the process chamber to carry out the process.
2. The control method of a multi-cavity vacuum coating equipment formulation system according to claim 1, characterized in that: The following steps are involved: 1) Assume that the recipe system includes several periodic process groups, each of which is identical and consists of several different steps, and all process groups run continuously during operation; 2) One of the process chambers starts the process first, and the start of the entire process recipe timeline is the start time of the process chamber. After several cycles, the process of the process chamber is completed; 3) Before starting each subsequent process chamber process, wait for the metal boat to enter the furnace, and then start the process at the end of the cycle in which the recipe system is in progress. After several cycles, the corresponding process chamber process is completed; 5) After the process chamber has been completed, it starts to cut in at the end of the cycle in which the formulation system is in progress, and the coating process is carried out; 6) When all process chambers are completed and there are no more chambers that need processing, the process recipe timeline stops and enters the waiting stage, waiting for any process chamber to start processing, and restarts step 2).
3. The control method of a multi-cavity vacuum coating equipment formulation system according to claim 2, characterized in that: In the vacuum system, a pump system pumps a process chamber to be processed to a high vacuum. Before starting the process, the process chamber is connected to another pump system, and the first pump system closes the connection with the process chamber.
4. The control method of a multi-cavity vacuum coating equipment formulation system according to claim 3, characterized in that: When there are two or more process chambers that need processing, first wait for a pump system to pump all process chambers to high vacuum in turn, and then before the process, each process chamber is connected to another pump system, the first pump system closes the connection with each process chamber, and the second pump system supports simultaneous processing of all process chambers.