Large-breadth fine metal mask repairing equipment

Abstract

The invention relates to the technical field of fine metal mask plate processing, in particular to large-breadth fine metal mask plate repairing equipment which comprises a processing platform, a carrying disc, an upper repairing mechanism, a lower repairing mechanism, a material supporting mechanism, a linear driving mechanism and a two-dimensional driving mechanism. The base is used for bearing, positioning and transferring products; the upper repairing mechanism and the lower repairing mechanism are oppositely arranged above and below the carrying disc and used for repairing products on the carrying disc. The material supporting mechanism is installed at the rear end of the machining platform and used for supporting the products to fall onto the carrying disc. The linear driving mechanism is installed at the upper end of the machining platform and used for driving the carrying disc to perform Y-direction linear motion. The two-dimensional driving mechanism is installed on the machining platform and used for driving the upper repairing mechanism and the lower repairing mechanism to perform X-direction and Y-direction two-dimensional movement. The device is simple in structural design, low in equipment manufacturing cost and product machining cost, high in automation degree, high in yield and free of turning over.

Description

Technical Field

[0001] The invention relates to the technical field of fine metal mask processing, and in particular to a large-format fine metal mask repairing device. Background Art

[0002] In the display field, with the development of science and technology, people's demand for display devices is increasing. As the core manufacturing component of display panels, the size of fine metal masks (FMM) is also increasing. Due to the fact that fine metal masks are easily damaged, the increase in their size leads to an exponential increase in the difficulty of processing.

[0003] In the existing fine metal mask repair process, the repair equipment usually adopts the flipping method. This method is very easy to damage the product for large-format fine metal masks, resulting in a low yield rate, high processing costs due to product scrapping, and cumbersome operation process. At the same time, the flipping mechanism in the existing repair equipment is usually composed of a full-format electrostatic adsorption platform and a full-format porous ceramic. However, the current domestic electrostatic platform and porous ceramic adsorption platform manufacturing technology has not yet made a technical breakthrough for large-format fine metal masks. They can only be made into multiple pieces for splicing, and the operation process is cumbersome. For the porous ceramic adsorption platform, as the format increases, the gas leakage rate increases, and the instability of its vacuum adsorption also increases, which creates risks for product processing, and the platform manufacturing price is also extremely expensive. Therefore, it is very necessary to develop an automatic repair device for large-format fine metal masks. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide a large-format fine metal mask repair device with simple structural design, low equipment manufacturing cost and product processing cost, high degree of automation, high yield rate, and no need for turning over.

[0005] The technical solution adopted by the present invention to solve the technical problem is: a large-format fine metal mask repair device, including a processing platform, and also including

[0006] The carrier plate is slidably mounted on the upper middle part of the processing platform and is used to carry, position and transfer products;

[0007] The upper repair mechanism and the lower repair mechanism are relatively arranged above and below the carrier, and are used to repair the product on the carrier;

[0008] The supporting mechanism is installed at the rear end of the processing platform and is used to support the product to fall onto the carrier plate;

[0009] The linear drive mechanism is installed on the upper end of the processing platform and is used to drive the carrier to perform Y-axis linear motion;

[0010] And a two-dimensional driving mechanism is installed on the processing platform and is used to drive the upper repair mechanism and the lower repair mechanism to perform two-dimensional movement in XY direction.

[0011] Furthermore, it also includes an upper grinding mechanism and an upper cleaning mechanism, which are both arranged above the carrier plate, and are arranged in parallel with the upper repairing mechanism. The upper grinding mechanism and the upper cleaning mechanism are respectively driven by a two-dimensional driving mechanism to perform two-dimensional movement in XY direction.

[0012] Furthermore, the carrier includes a frame plate, a ball bearing, a reference block and a pushing assembly. The frame plate is slidably installed in the middle of the upper end of the processing platform. There are multiple ball bearings, which are respectively arranged at the front end and the rear end of the frame plate. There are multiple reference blocks, which are respectively arranged at the front end and the left end of the frame plate. The pushing assembly consists of several groups, which are respectively arranged at the rear end and the right end of the frame plate.

[0013] Furthermore, the upper repair mechanism and the lower repair mechanism both include a first mounting plate, a laser generating assembly, an objective lens assembly, an autofocus assembly, a backlight, a first Z-direction driving assembly and a lifting and adjusting assembly. The first mounting plate is slidably mounted on the driving end of the two-dimensional driving mechanism, the laser generating assembly is mounted on the side of the first mounting plate away from the two-dimensional driving mechanism, the objective lens assembly is arranged between the laser generating assembly and the carrier, the autofocus assembly is arranged on one side of the laser generating assembly, the backlight is mounted on the end of the first mounting plate close to the carrier, the first Z-direction driving assembly is arranged at the driving end of the two-dimensional driving mechanism to drive the first mounting plate to perform Z-direction movement, and the lifting and adjusting assembly is arranged on the other side of the laser generating assembly to adjust the height of the objective lens assembly.

[0014] Furthermore, the upper repair mechanism and the lower repair mechanism also include a laser dust removal assembly, which includes a mounting rod, a dust removal plate, a protective mirror and an air joint. The mounting rod is installed at the end of the first mounting plate close to the carrier plate, one end of the dust removal plate is installed at the end of the mounting rod close to the carrier plate, the other end of the dust removal plate is arranged on the side of the objective lens assembly close to the carrier plate, the other end of the dust removal plate is provided with a through hole, the protective mirror is installed at the end of the through hole close to the carrier plate, the other end of the dust removal plate is provided with a cavity, the air joint is installed in the middle of the dust removal plate and is connected to the cavity, the other end of the dust removal plate is provided with an annular dust collecting port connected to the cavity, the annular dust collecting port is arranged at the end of the dust removal plate close to the carrier plate and is coaxially arranged with the through hole.

[0015] Furthermore, the supporting mechanism includes a supporting plate, a supporting rod, an anti-destruction head and a lifting module. The supporting plate is arranged at the rear end of the processing platform and is located below the carrier. There are multiple supporting rods arranged along the four sides of the supporting plate. The anti-destruction head is installed at the upper end of the supporting rod. The lifting module is installed at the rear end of the processing platform to drive the supporting plate to rise and fall.

[0016] Furthermore, the two-dimensional driving mechanism includes a frame beam, a slide plate, a Y-axis driving component and an X-axis driving component. The frame beam is slidably connected to the processing platform, and the processing platform passes through the frame beam. The slide plate consists of two pieces, which are slidably installed on the upper and lower ends of the frame beam respectively. The Y-axis driving component is installed on the processing platform to drive the frame beam to perform Y-axis linear motion. The X-axis driving component is installed on the frame beam to drive the slide plate to perform X-axis linear motion. The upper repair mechanism and the lower repair mechanism are installed on the side of the slide plate away from the frame beam.

[0017] Furthermore, the upper grinding mechanism includes a second mounting plate, an upper grinding assembly, a second Z-direction drive assembly, a third mounting plate, a measuring assembly and a third Z-direction drive assembly, the second mounting plate is mounted on the drive end of the two-dimensional drive mechanism, the upper grinding assembly is arranged on the side of the second mounting plate away from the two-dimensional drive mechanism, the second Z-direction drive assembly is mounted on the second mounting plate to drive the upper grinding assembly to perform Z-direction movement, the third mounting plate is arranged between the second mounting plate and the two-dimensional drive mechanism, the third mounting plate is slidably connected to the drive end of the two-dimensional drive mechanism, the measuring assembly is mounted on the lower end of the third mounting plate, and the third Z-direction drive assembly is arranged at the drive end of the two-dimensional drive mechanism to drive the third mounting plate to perform Z-direction movement.

[0018] Furthermore, the upper cleaning mechanism includes a fourth mounting plate, an ultrasonic cleaning component, a fifth mounting plate, a dust-sticking component, a detection component and a fourth Z-direction driving component, the fourth mounting plate is slidably mounted on the driving end of the two-dimensional driving mechanism, the ultrasonic cleaning component is mounted on the lower end of the fourth mounting plate, the fifth mounting plate is mounted on the side of the ultrasonic cleaning component away from the fourth mounting plate, the dust-sticking component and the detection component are both mounted on the side of the fifth mounting plate away from the ultrasonic cleaning component, and the fourth Z-direction driving component is arranged at the driving end of the two-dimensional driving mechanism to drive the fourth mounting plate to perform Z-direction movement.

[0019] Furthermore, the ultrasonic cleaning component includes an ultrasonic cleaning body and an ion air gun, an exhaust port is provided in the middle of the upper end of the ultrasonic cleaning body, a plurality of blowing ports are provided in the middle of the lower end of the ultrasonic cleaning body, air intake ports are provided on the left and right sides of the lower end of the ultrasonic cleaning body, and the ion air gun is installed on the left and right sides of the lower end of the ultrasonic cleaning body.

[0020] The beneficial effects of the present invention are:

[0021] (1) The present invention supports the product to fall onto the carrier through the supporting mechanism, and then the carrier carries, positions and transports the product to the processing area. Finally, the upper repair mechanism and the lower repair mechanism process the product. The structure design is simple, the operation is simple, the equipment manufacturing cost and the product processing cost are low, the degree of automation is high, there is no need to turn over, the product is not easy to be damaged, and the yield rate is high.

[0022] (2) The present invention uses a laser dust removal component to absorb waste residue generated during laser processing, thereby ensuring the quality of laser processing and further improving the yield rate.

[0023] (3) The present invention cooperates with an ultrasonic cleaning component and a dust-binding component. The ultrasonic cleaning component cleans the entire product with high cleaning efficiency, and the local fine particles are then processed by the dust-binding component, thereby fully ensuring the cleanliness and cleaning efficiency of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 is a schematic diagram of the air vibration isolation mechanism of the present invention;

[0027] Figure 3 It is a schematic diagram of the slide plate in the present invention;

[0028] Figure 4 is a schematic diagram of the upper cleaning mechanism of the present invention;

[0029] Figure 5 is a schematic diagram of a backlight device in the present invention;

[0030] Figure 6 is a schematic diagram of the upper repair mechanism of the present invention;

[0031] Figure 7 is a schematic diagram of a laser generating assembly in the present invention;

[0032] Figure 8 is a cross-sectional view of the laser dust removal assembly of the present invention;

[0033] Fig. 9 is a schematic diagram of the upper grinding mechanism of the present invention;

[0034] Fig.10 Schematic diagram of the dust-binding component of the present invention;

[0035] Fig.11 is a schematic diagram of the lower repair mechanism of the present invention;

[0036] Fig.12 is a schematic diagram of an ultrasonic cleaning assembly in the present invention;

[0037] Fig.13 It is a working principle diagram of the ultrasonic cleaning component in the present invention;

[0038] Fig.14 is a schematic diagram of a carrier plate in the present invention;

[0039] Fig.15 yes Fig.14 Enlarged view of part A in the middle;

[0040] Fig.16 It is a schematic diagram of the material supporting mechanism in the present invention;

[0041] Fig.17 It is a schematic diagram of the two-dimensional driving mechanism in the present invention.

[0042] In the figure: 100, processing platform; 200, carrier plate; 210, frame plate; 220, ball bearing; 230, reference block; 240, pushing assembly; 241, stepping motor; 242, pushing block; 300, upper repair mechanism; 310, first mounting plate; 320, laser generating assembly; 321, laser; 322, laser beam shaping group; 323, spectroscope; 330, objective lens assembly; 331, switch; 332, objective lens; 340, autofocus assembly; 350, backlight; 360, first Z-axis drive assembly; 370, lifting adjustment assembly; 371, slide cylinder; 372, support plate; 380, laser dust removal assembly; 381, mounting rod; 382, ​​dust removal plate; 3821, through hole; 3822, cavity; 3823, annular dust collection port; 383, protective mirror; 384, air joint; 400, lower repair mechanism; 500, support mechanism; 510, support plate; 520, support rod; 530, anti-destruction head; 540, lifting module; 600, linear Driving mechanism; 700, two-dimensional driving mechanism; 710, frame beam; 720, slide plate; 730, Y-axis driving assembly; 740, X-axis driving assembly; 800, upper grinding mechanism; 810, second mounting plate; 820, upper grinding assembly; 830, second Z-axis driving assembly; 840, third mounting plate; 850, measuring assembly; 860, third Z-axis driving assembly; 900, upper cleaning mechanism; 910, fourth mounting plate; 920, ultrasonic cleaning assembly; 921, ultrasonic cleaning Cleaning body; 9211, exhaust port; 9212, air blowing port; 9213, air inlet; 922, ion air gun; 930, fifth mounting plate; 940, dust sticking assembly; 941, first connecting plate; 942, telescopic cylinder; 943, mounting block; 944, dust sticking rod; 950, detection assembly; 951, second connecting plate; 952, camera; 953, lens; 954, light source; 960, fourth Z-direction driving assembly; 1000, air vibration isolation mechanism; 1100, steel frame base. DETAILED DESCRIPTION

[0043] The present invention will now be further described in conjunction with the accompanying drawings and preferred embodiments. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0044] like Figure 1-Figure 3As shown, a large-format fine metal mask repair device includes a processing platform 100, a carrier 200, an upper repair mechanism 300, a lower repair mechanism 400, a supporting mechanism 500, a linear drive mechanism 600 and a two-dimensional drive mechanism 700. The carrier 200 is slidably installed in the middle of the upper end of the processing platform 100, and is used to carry, position and transport products; the upper repair mechanism 300 and the lower repair mechanism 400 are relatively arranged above and below the carrier 200, and are used to repair the products on the carrier 200; the supporting mechanism 500 is installed at the rear end of the processing platform 100, and is used to support the products to fall onto the carrier 200; the linear drive mechanism 600 is installed at the upper end of the processing platform 100, and is used to drive the carrier 200 to perform Y-direction linear motion; the two-dimensional drive mechanism 700 is installed on the processing platform 100, and is used to drive the upper repair mechanism 300 and the lower repair mechanism 400 to perform XY-direction two-dimensional motion. The supporting mechanism 500 supports the product and drops it onto the carrier 200, which then carries, positions and transports the product to the processing area. Finally, the upper repair mechanism 300 and the lower repair mechanism 400 process the product. The structure is simple in design, easy to operate, with low equipment manufacturing cost and product processing cost, high degree of automation, no need to turn over, and the product is not easily damaged, thus having a high yield rate.

[0045] Specifically, the linear drive mechanism 600 adopts a linear module, but is not limited to this, as long as the carrier 200 is driven to perform linear motion; the processing platform 100 is made of marble, and the processing platform 100 is installed on the steel frame base 1100 through an air vibration isolation mechanism 1000; the entire device is set in a protective cover.

[0046] like Figure 1 and Figure 3 As shown, the large-format fine metal mask repair equipment also includes an upper grinding mechanism 800 and an upper cleaning mechanism 900. The upper grinding mechanism 800 and the upper cleaning mechanism 900 are both arranged above the carrier 200. The upper grinding mechanism 800 and the upper cleaning mechanism 900 are arranged in parallel with the upper repair mechanism 300. The upper grinding mechanism 800 and the upper cleaning mechanism 900 are respectively driven by the two-dimensional driving mechanism 700 to perform two-dimensional movement in the XY direction. The upper grinding mechanism 800 grinds the bumps on the product, and the upper cleaning mechanism 900 cleans the dust on the product. It should be noted that, according to actual processing needs, a lower grinding mechanism and a lower cleaning mechanism can also be added, and the specific structure is similar to the upper grinding mechanism 800 and the upper cleaning mechanism 900.

[0047] like Figure 1 , Fig.14 and Fig.15As shown, the carrier 200 includes a frame plate 210, a ball bearing 220, a reference block 230 and a push assembly 240. The frame plate 210 is slidably mounted on the middle part of the upper end of the processing platform 100. There are multiple ball bearings 220, which are respectively arranged at the front end and the rear end of the frame plate 210. There are multiple reference blocks 230, which are respectively arranged at the front end and the left end of the frame plate 210. There are several groups of push assemblies 240, which are respectively arranged at the rear end and the right end of the frame plate 210. After the product falls on the frame plate 210, the push assembly 240 pushes the product until the product contacts the reference block 230 to achieve positioning, thereby ensuring the stability of the product during the transfer process and the accuracy of the subsequent repair process. During the positioning process, the ball bearing 220 rolls to reduce the friction between the product and the frame plate 210. Specifically, the push assembly 240 includes a stepping motor 241 and a push block 242, and the push block 242 is installed at the output end of the stepping motor 241; a position sensor can also be set on the frame plate 210 to determine whether the product is in place.

[0048] like Figure 1-Figure 3 , Figure 5-Figure 7 , Fig.11As shown, the upper repair mechanism 300 and the lower repair mechanism 400 both include a first mounting plate 310, a laser generating assembly 320, an objective lens assembly 330, an autofocus assembly 340, a backlight 350, a first Z-direction driving assembly 360 and a lifting and adjusting assembly 370. The first mounting plate 310 is slidably mounted on the driving end of the two-dimensional driving mechanism 700, the laser generating assembly 320 is mounted on the side of the first mounting plate 310 away from the two-dimensional driving mechanism 700, the objective lens assembly 330 is arranged between the laser generating assembly 320 and the carrier 200, the autofocus assembly 340 is arranged on one side of the laser generating assembly 320, the backlight 350 is mounted on the end of the first mounting plate 310 close to the carrier 200, the first Z-direction driving assembly 360 is arranged on the driving end of the two-dimensional driving mechanism 700 to drive the first mounting plate 310 to perform Z-direction movement, and the lifting and adjusting assembly 370 is arranged on the other side of the laser generating assembly 320 to adjust the height of the objective lens assembly 330. Specifically, the laser generating assembly 320 includes a laser 321, a laser beam shaping group 322 and a beam splitter 323, and the laser 321, the laser beam shaping group 322 and the beam splitter 323 are coaxially arranged in sequence; the objective lens assembly 330 includes a switch 331 and a plurality of objective lenses 332 of different magnifications, and the objective lenses 332 are mounted on the switch 331; the autofocus assembly 340 is a prior art and will not be described in detail here; the backlight 350 in the upper repair mechanism 300 and the lower repair mechanism 40 0, the backlight 350 in the lower repair mechanism 400 corresponds to the upper repair mechanism 300, and the backlight 350 in the upper repair mechanism 300 can also be installed at the bottom end of the third mounting plate 840; the first Z-axis driving assembly 360 is a screw nut structure, which is the prior art; the lifting and adjusting assembly 370 includes a slide cylinder 371 and a support plate 372, and the slide cylinder 371 is arranged on the other side of the laser generating assembly 320, and its driving end is connected to the switch 331 through the support plate 372.

[0049] like Figure 6-Figure 8As shown, the upper repair mechanism 300 and the lower repair mechanism 400 further include a laser dust removal assembly 380, which includes a mounting rod 381, a dust removal plate 382, ​​a protective mirror 383 and an air joint 384. The mounting rod 381 is mounted on the end of the first mounting plate 310 close to the carrier 200, one end of the dust removal plate 382 is mounted on the end of the mounting rod 381 close to the carrier 200, and the other end of the dust removal plate 382 is arranged on the side of the objective lens assembly 330 close to the carrier 200. 2 is provided with a through hole 3821, a protective mirror 383 is installed at the end of the through hole 3821 close to the carrier 200, a cavity 3822 is provided at the other end of the dust removal plate 382, ​​an air joint 384 is installed in the middle of the dust removal plate 382 and communicated with the cavity 3822, and an annular dust collecting port 3823 connected with the cavity 3822 is provided at the other end of the dust removal plate 382, ​​and the annular dust collecting port 3823 is arranged at the end of the dust removal plate 382 close to the carrier 200 and is coaxially arranged with the through hole 3821. Through the arrangement of the laser dust removal assembly 380, the waste residue generated during the laser processing is sucked away, the quality of the laser processing is ensured, and the yield rate is further improved. Specifically, the air joint 384 is connected to the suction device.

[0050] like Figure 1 and Fig.16 As shown, the support mechanism 500 includes a support plate 510, a support rod 520, an anti-destruction head 530 and a lifting module 540. The support plate 510 is arranged at the rear end of the processing platform 100 and is located below the carrier 200. There are multiple support rods 520, which are arranged along the four sides of the support plate 510. The anti-destruction head 530 is installed at the upper end of the support rod 520. The lifting module 540 is installed at the rear end of the processing platform 100 to drive the support plate 510 to rise and fall. Specifically, the lifting module 540 can use a cylinder. When working, the lifting module 540 drives the support plate 510 to rise, so that the upper end of the support rod 520 passes through the frame plate 210, and the manipulator (not shown in the figure) places the product on the support rod 520, and then the lifting module 540 drives the support plate 510 to descend and reset, and the product falls on the support plate 510.

[0051] like Figure 1 , Figure 2 and Fig.17As shown, the two-dimensional driving mechanism 700 includes a frame beam 710, a slide plate 720, a Y-axis driving assembly 730 and an X-axis driving assembly 740. The frame beam 710 is slidably connected to the processing platform 100, and the processing platform 100 passes through the frame beam 710. The slide plate 720 is composed of two pieces, which are slidably mounted on the upper and lower ends of the frame beam 710, respectively. The Y-axis driving assembly 730 is mounted on the processing platform 100 to drive the frame beam 710 to perform a Y-axis linear motion. The X-axis driving assembly 740 is mounted on the frame beam 710 to drive the slide plate 720 to perform an X-axis linear motion. The upper repair mechanism 300 and the lower repair mechanism 400 are mounted on the side of the slide plate 720 away from the frame beam 710. Specifically, the Y-axis driving assembly 730 and the X-axis driving assembly 740 can adopt a linear module. The two-dimensional driving mechanism 700 realizes the two-dimensional movement of the upper repair mechanism 300 and the lower repair mechanism 400 in XY directions. At the same time, the upper repair mechanism 300 and the lower repair mechanism 400 can move independently in X direction, and the movement is more flexible. Combined movement is realized by cooperating with the Y direction movement of the carrier 200.

[0052] like Figure 1 , Figure 3 and Fig. 9 As shown, the upper grinding mechanism 800 includes a second mounting plate 810, an upper grinding assembly 820, a second Z-axis driving assembly 830, a third mounting plate 840, a measuring assembly 850 and a third Z-axis driving assembly 860. The second mounting plate 810 is mounted on the driving end of the two-dimensional driving mechanism 700. The upper grinding assembly 820 is arranged on a side of the second mounting plate 810 away from the two-dimensional driving mechanism 700. The second Z-axis driving assembly 830 is mounted on the second mounting plate 810 to drive the upper grinding assembly 820 to perform Z-axis movement. The third mounting plate 840 is arranged between the second mounting plate 810 and the two-dimensional driving mechanism 700. The third mounting plate 840 is slidably connected to the driving end of the two-dimensional driving mechanism 700. The measuring assembly 850 is mounted on the lower end of the third mounting plate 840. The third Z-axis driving assembly 860 is arranged at the driving end of the two-dimensional driving mechanism 700 to drive the third mounting plate 840 to perform Z-axis movement. Specifically, the upper grinding assembly 820 and the measuring assembly 850 are both existing technologies; the second Z-axis driving assembly 830 adopts a linear module; and the third Z-axis driving assembly 860 is a screw-nut structure.

[0053] like Figure 1 , Figure 3 , Figure 4 and Fig.10As shown, the upper cleaning mechanism 900 includes a fourth mounting plate 910, an ultrasonic cleaning assembly 920, a fifth mounting plate 930, a dust sticking assembly 940, a detection assembly 950 and a fourth Z-direction driving assembly 960. The fourth mounting plate 910 is slidably mounted on the driving end of the two-dimensional driving mechanism 700, the ultrasonic cleaning assembly 920 is mounted on the lower end of the fourth mounting plate 910, the fifth mounting plate 930 is mounted on the side of the ultrasonic cleaning assembly 920 away from the fourth mounting plate 910, the dust sticking assembly 940 and the detection assembly 950 are both mounted on the side of the fifth mounting plate 930 away from the ultrasonic cleaning assembly 920, and the fourth Z-direction driving assembly 960 is arranged at the driving end of the two-dimensional driving mechanism 700 to drive the fourth mounting plate 910 to perform Z-direction movement. Through the cooperation of the ultrasonic cleaning assembly 920 and the dust sticking assembly 940, the ultrasonic cleaning assembly 920 cleans the entire product with high cleaning efficiency, and the local fine particles are then processed by the dust sticking assembly 940, thereby fully ensuring the cleanliness and cleaning efficiency of the product.

[0054] like Fig.10 , Fig.12 and Fig.13 As shown, the ultrasonic cleaning assembly 920 includes an ultrasonic cleaning body 921 and an ion air gun 922. An exhaust port 9211 is provided in the middle of the upper end of the ultrasonic cleaning body 921, a plurality of air blowing ports 9212 are provided in the middle of the lower end of the ultrasonic cleaning body 921, air inlets 9213 are provided on the left and right sides of the lower end of the ultrasonic cleaning body 921, and the ion air gun 922 is installed on the left and right sides of the lower end of the ultrasonic cleaning body 921. The ultrasonic cleaning body 921 performs multiple diameter-changing compressions on the high-pressure airflow from the high-pressure fan to form an ultrasonic airflow in a manner of adjusting and controlling the airflow. The ultrasonic airflow acts on the product surface using the cavity flow-induced oscillation principle, which can effectively handle submicron dust and ensure the cleaning effect.

[0055] like Figure 4 and Fig.10 As shown, the dust sticking assembly 940 includes a first connecting plate 941, a telescopic cylinder 942, a mounting block 943 and a dust sticking rod 944. The first connecting plate 941 is obliquely mounted on the left end of the fifth mounting plate 930, the cylinder body of the telescopic cylinder 942 is obliquely mounted on the first connecting plate 941, and the dust sticking rod 944 is mounted on the driving end of the telescopic cylinder 942 through the mounting block 943.

[0056] like Figure 4 and Fig.10 As shown, the detection component 950 includes a second connecting plate 951, a camera 952, a lens 953 and a light source 954. The second connecting plate 951 is mounted on the right end of the fifth mounting plate 930, the camera 952 is mounted on the upper end of the second connecting plate 951 through a fine-tuning bracket, the lens 953 is mounted on the lower end of the second connecting plate 951, and the light source 954 is arranged below the lens 953.

[0057] During operation, the support mechanism 500 carries the product on the robot to the carrier 200, the carrier 200 positions the product and then moves it to the processing area, the upper repair mechanism 300 and the lower repair mechanism 400 perform laser repair on the product, the upper grinding mechanism 800 grinds the bumps on the product, and the upper cleaning mechanism 900 cleans the dust generated during the repair and grinding process. This application is not only suitable for the repair of large-format products, but also for the combined processing of multiple small products, which improves the overall production efficiency.

[0058] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A large-format fine metal mask repair device, comprising a processing platform (100), characterized in that: Also includes The carrier plate (200) is slidably mounted on the middle of the upper end of the processing platform (100) and is used for carrying, positioning and transferring products; An upper repair mechanism (300) and a lower repair mechanism (400) are relatively arranged above and below the carrier (200) and are used to repair products on the carrier (200); A material supporting mechanism (500) is installed at the rear end of the processing platform (100) and is used to support the product and place it on the carrier plate (200); A linear drive mechanism (600) is installed on the upper end of the processing platform (100) and is used to drive the carrier plate (200) to perform linear motion in the Y direction; And a two-dimensional driving mechanism (700) is installed on the processing platform (100) and is used to drive the upper repair mechanism (300) and the lower repair mechanism (400) to perform two-dimensional movement in the XY direction.

2. The large-format fine metal mask repairing equipment according to claim 1 is characterized in that: The invention also comprises an upper grinding mechanism (800) and an upper cleaning mechanism (900), wherein the upper grinding mechanism (800) and the upper cleaning mechanism (900) are both arranged above the carrier plate (200), and the upper grinding mechanism (800) and the upper cleaning mechanism (900) are arranged in parallel with the upper repairing mechanism (300), and the upper grinding mechanism (800) and the upper cleaning mechanism (900) are respectively driven by the two-dimensional driving mechanism (700) to perform two-dimensional movement in the XY direction.

3. The large-format fine metal mask repairing equipment according to claim 1 is characterized in that: The carrier plate (200) comprises a frame plate (210), a ball bearing (220), a reference block (230) and a pushing assembly (240); the frame plate (210) is slidably mounted on the middle portion of the upper end of the processing platform (100); the ball bearings (220) are in plurality and are respectively arranged at the front end and the rear end of the frame plate (210); the reference blocks (230) are in plurality and are respectively arranged at the front end and the left end of the frame plate (210); and the pushing assembly (240) is in a plurality of groups and are respectively arranged at the rear end and the right end of the frame plate (210).

4. The large-format fine metal mask repairing equipment according to claim 1 is characterized in that: The upper repair mechanism (300) and the lower repair mechanism (400) both comprise a first mounting plate (310), a laser generating assembly (320), an objective lens assembly (330), an autofocus assembly (340), a backlight (350), a first Z-direction driving assembly (360) and a lifting and lowering adjustment assembly (370); the first mounting plate (310) is slidably mounted on a driving end of a two-dimensional driving mechanism (700); the laser generating assembly (320) is mounted on a side of the first mounting plate (310) away from the two-dimensional driving mechanism (700); and the objective lens assembly (330) is mounted on a side of the first mounting plate (310) away from the two-dimensional driving mechanism (700). It is arranged between the laser generating assembly (320) and the carrier (200), the autofocus assembly (340) is arranged on one side of the laser generating assembly (320), the backlight (350) is installed on the end of the first mounting plate (310) close to the carrier (200), the first Z-direction driving assembly (360) is arranged at the driving end of the two-dimensional driving mechanism (700) to drive the first mounting plate (310) to perform Z-direction movement, and the lifting and lowering adjustment assembly (370) is arranged on the other side of the laser generating assembly (320) to adjust the height of the objective lens assembly (330).

5. The large-format fine metal mask repairing equipment according to claim 4 is characterized in that: The upper repair mechanism (300) and the lower repair mechanism (400) further include a laser dust removal assembly (380), and the laser dust removal assembly (380) includes a mounting rod (381), a dust removal plate (382), a protective mirror (383) and an air joint (384). The mounting rod (381) is mounted on the end of the first mounting plate (310) close to the carrier (200), one end of the dust removal plate (382) is mounted on the end of the mounting rod (381) close to the carrier (200), and the other end of the dust removal plate (382) is arranged on the side of the objective lens assembly (330) close to the carrier (200). 2) is provided with a through hole (3821), the protective mirror (383) is installed at the end of the through hole (3821) close to the carrier (200), the other end of the dust removal plate (382) is provided with a cavity (3822), the air joint (384) is installed in the middle of the dust removal plate (382) and is connected to the cavity (3822), the other end of the dust removal plate (382) is provided with an annular dust collecting port (3823) connected to the cavity (3822), the annular dust collecting port (3823) is arranged at the end of the dust removal plate (382) close to the carrier (200) and is coaxially arranged with the through hole (3821).

6. The large-format fine metal mask repairing equipment according to claim 1 is characterized in that: The material supporting mechanism (500) comprises a material supporting plate (510), a material supporting rod (520), an anti-destruction head (530) and a lifting module (540); the material supporting plate (510) is arranged at the rear end of the processing platform (100) and is located below the carrier (200); there are a plurality of material supporting rods (520) arranged along the four sides of the material supporting plate (510); the anti-destruction head (530) is installed at the upper end of the material supporting rod (520); and the lifting module (540) is installed at the rear end of the processing platform (100) to drive the material supporting plate (510) to rise and fall.

7. The large-format fine metal mask repairing equipment according to claim 1 is characterized in that: The two-dimensional driving mechanism (700) comprises a frame beam (710), a slide plate (720), a Y-axis driving component (730) and an X-axis driving component (740); the frame beam (710) is slidably connected to a processing platform (100); the processing platform (100) passes through the frame beam (710); the slide plate (720) is composed of two pieces, which are slidably mounted on the upper and lower ends of the frame beam (710), respectively; the Y-axis driving component (730) is mounted on the processing platform (100) to drive the frame beam (710) to perform a Y-axis linear motion; the X-axis driving component (740) is mounted on the frame beam (710) to drive the slide plate (720) to perform an X-axis linear motion; and the upper repair mechanism (300) and the lower repair mechanism (400) are mounted on a side of the slide plate (720) away from the frame beam (710).

8. The large-format fine metal mask repairing equipment according to claim 2 is characterized in that: The upper grinding mechanism (800) comprises a second mounting plate (810), an upper grinding assembly (820), a second Z-direction drive assembly (830), a third mounting plate (840), a measuring assembly (850) and a third Z-direction drive assembly (860), wherein the second mounting plate (810) is mounted on the driving end of the two-dimensional drive mechanism (700), the upper grinding assembly (820) is arranged on a side of the second mounting plate (810) away from the two-dimensional drive mechanism (700), and the second Z-direction drive assembly (830) is mounted on the second mounting plate (810) to drive the upper grinding assembly (820) to perform Z-direction movement, the third mounting plate (840) is arranged between the second mounting plate (810) and the two-dimensional driving mechanism (700), the third mounting plate (840) is slidably connected to the driving end of the two-dimensional driving mechanism (700), the measuring assembly (850) is installed at the lower end of the third mounting plate (840), and the third Z-direction driving assembly (860) is arranged at the driving end of the two-dimensional driving mechanism (700) to drive the third mounting plate (840) to perform Z-direction movement.

9. The large-format fine metal mask repairing equipment according to claim 2 is characterized in that: The upper cleaning mechanism (900) comprises a fourth mounting plate (910), an ultrasonic cleaning assembly (920), a fifth mounting plate (930), a dust sticking assembly (940), a detection assembly (950) and a fourth Z-direction driving assembly (960); the fourth mounting plate (910) is slidably mounted on the driving end of the two-dimensional driving mechanism (700); the ultrasonic cleaning assembly (920) is mounted on the lower end of the fourth mounting plate (910); the fifth mounting plate (930) is mounted on a side of the ultrasonic cleaning assembly (920) away from the fourth mounting plate (910); the dust sticking assembly (940) and the detection assembly (950) are both mounted on a side of the fifth mounting plate (930) away from the ultrasonic cleaning assembly (920); and the fourth Z-direction driving assembly (960) is arranged at the driving end of the two-dimensional driving mechanism (700) to drive the fourth mounting plate (910) to perform Z-direction movement.

10. The large-format fine metal mask repairing equipment according to claim 9, characterized in that: The ultrasonic cleaning component (920) comprises an ultrasonic cleaning body (921) and an ion air gun (922); an exhaust port (9211) is provided in the middle of the upper end of the ultrasonic cleaning body (921); a plurality of air blowing ports (9212) are provided in the middle of the lower end of the ultrasonic cleaning body (921); air suction ports (9213) are provided on the left and right sides of the lower end of the ultrasonic cleaning body (921); and the ion air gun (922) is installed on the left and right sides of the lower end of the ultrasonic cleaning body (921).

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