Real-time online measurement method and device for crystal growth thickness, equipment and medium

Abstract

The invention relates to a real-time online measurement method and device for crystal growth thickness, equipment and a medium. The real-time online measurement method comprises the following steps: acquiring a first image shot in each growth period in a crystal growth process; constructing a first calibration frame in a first first image of the growth cycle by taking covering of all crystals in the first visual angle direction as a target, and calibrating the central position of any crystal in the first calibration frame as the central position of a first crystal; determining a primary color value interval of each primary color according to the three-primary color information of the pixel at the central position of the first crystal; determining a parameter value of an image visual attribute according to the first calibration frame and the primary color value interval to obtain a target parameter value, and adjusting the image visual attribute according to the target parameter value to obtain a first target image; and obtaining a first online measurement thickness according to the preset thickness of the molybdenum table, a target area image in a preset fixed search area in the first target image and the number of crystal pixels between the upper edge and the lower edge of each column of crystals in the first calibration frame.

Description

Technical Field

[0001] The present disclosure relates to the field of crystal growth technology, and in particular to a real-time online measurement method, device, equipment and medium for measuring the thickness of crystal growth. Background Art

[0002] Crystal growth is a key process in the manufacture of semiconductors, optics and laser devices, and its thickness control directly affects the performance of the final product. However, existing crystal growth thickness measurements cannot be made online in real time, and are mostly measured offline, requiring the growth process to be interrupted for sampling and testing, resulting in low process efficiency and the inability to adjust growth parameters in real time, reducing the efficiency of crystal production. Summary of the invention

[0003] The purpose of the present invention is to provide a method, device, equipment and medium for real-time online measurement of crystal growth thickness, aiming to solve the problem that the crystal growth thickness cannot be measured in real time online during the crystal growth process in related scenarios, resulting in low crystal production efficiency.

[0004] In order to achieve the above-mentioned object, a first aspect of the embodiments of the present disclosure provides a real-time online measurement method for crystal growth thickness, the method comprising: Acquire a first image captured by a first camera in each growth cycle during the crystal growth process, wherein the first camera is arranged corresponding to a first observation window in a first viewing angle direction of the vacuum reaction chamber; In the first first image of each growth period, a first calibration frame is constructed with the goal of covering at least all the crystals in the first viewing angle direction, and the center position of any crystal in the first calibration frame in the first viewing angle direction is calibrated as the center position of the first crystal; Acquire three primary color information of a pixel at the center position of the first crystal corresponding to each growth cycle during the crystal growth process, and determine a primary color value interval of each primary color according to the three primary color information of the pixel at the center position of the first crystal; Determine, according to the first calibration frame and the primary color value intervals of each of the primary colors, a parameter value of an image visual attribute corresponding to the first image, obtain a target parameter value of the image visual attribute, and adjust, according to the target parameter value, the image visual attributes of all the first images corresponding to the growth period to obtain a first target image; According to the preset thickness of the molybdenum table, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystals in the first calibration frame in the first target image, the first online measurement thickness of each of the crystals measured online in the first viewing angle direction is obtained.

[0005] In a possible implementation, the method of obtaining a first online measured thickness of each of the crystals in the first viewing angle direction according to a preset thickness of the molybdenum platform, a target area image in a preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystals in the first calibration frame in the first target image includes: Determine a vertical pixel size according to a preset thickness of the molybdenum platform and a target area image in a preset fixed search area in the first target image, wherein the vertical pixel size is used to represent a size represented by one pixel in the vertical direction; Calculating the number of crystal pixels between the upper edge of the crystal and the lower edge of the crystal in each column of the crystal constructed by continuous pixels in the first calibration frame in the first target image; According to the number of crystal pixels and the vertical pixel size, a first online measured thickness of each of the crystals in the first viewing angle direction is obtained.

[0006] In a possible implementation, determining the vertical pixel size according to the preset thickness of the molybdenum platform and the target area image in the first target image that is in the preset fixed search area includes: From top to bottom, traverse and calculate the pixel value difference of adjacent pixels in the target area image in the vertical direction to obtain a first pixel value difference, and determine the first pixel whose first pixel value difference exceeds the preset difference range as an upper edge pixel belonging to the upper edge of the molybdenum platform; From bottom to top, traverse and calculate the pixel value difference of adjacent pixels in the target area image in the vertical direction to obtain a second pixel value difference, and determine the second pixel whose first second pixel value difference exceeds the preset difference range as a lower edge pixel belonging to the lower edge of the molybdenum platform; Determine the number of pixels in the vertical direction according to the number of pixels between the upper edge pixel and the lower edge pixel; The vertical pixel size is determined according to the ratio between the preset thickness of the molybdenum stage and the vertical pixel size.

[0007] In a possible implementation, determining the parameter value of the image visual attribute corresponding to the first image according to the first calibration frame and the primary color value interval of each of the primary colors, and obtaining the target parameter value of the image visual attribute includes: Taking the preset initial value of the image visual attribute as the starting point, adjusting the parameter value of the image visual attribute in sequence according to the preset step length; After each adjustment of the parameter value, counting the number of pixels whose three primary colors are within the primary color value intervals of the primary colors within the coverage range of the first calibration frame; The parameter value corresponding to the largest number is determined as the target parameter value of the image visual attribute.

[0008] In a possible implementation, the image visual attribute includes at least one of the following: brightness, contrast, saturation, clarity, sharpness, and color temperature.

[0009] In a possible implementation, determining the primary color value interval of each primary color according to the three primary color information of the pixel at the center position of the first crystal includes: Determine the primary color limit value of each primary color according to the value of each primary color represented in the three primary color information of the pixel at the center position of the first crystal and the preset extension value, wherein the preset extension value is added to the value of each primary color to obtain the upper limit value of the primary color limit value, and the preset extension value is subtracted from the value of each primary color to obtain the lower limit value of the primary color limit value; The primary color value interval of each primary color is determined according to the upper limit value and the lower limit value of each primary color.

[0010] In a second aspect of the embodiments of the present disclosure, a crystal growth device is provided, the crystal growth device comprising: a control terminal, a vacuum reaction chamber, a microwave energy supply unit, a process gas supply unit, an electric proportional valve, a vacuum pump and a first camera; The vacuum reaction chamber is used to provide a crystal growth environment. A molybdenum platform is provided in the vacuum reaction chamber. The molybdenum platform is used to support the grown crystal. A first observation window is arranged on the vacuum reaction chamber. The first camera is arranged on the first observation window. The first camera captures a first image in the vacuum reaction chamber from a first viewing angle through the first observation window; The microwave energy providing unit and the process gas providing unit are connected to the vacuum reaction chamber through pipelines respectively, the vacuum pump is connected to the vacuum reaction chamber through pipelines, and the electric proportional valve is arranged on the pipeline connecting the vacuum pump and the vacuum reaction chamber; The control terminal is respectively connected to the vacuum reaction chamber, the microwave energy supply unit, the process gas supply unit, the electric proportional valve, the vacuum pump, and the first camera for controlling the growth of the crystal and acquiring the first image, and executing any method described in the first aspect.

[0011] In a possible implementation, a molybdenum table is provided in the vacuum reaction chamber, and the molybdenum table is used to support the grown crystal.

[0012] According to a third aspect of the present disclosure, an electronic device is provided, including: a memory having a computer program stored thereon; A processor is used to execute the computer program in the memory to implement the steps of any one of the methods in the first aspect.

[0013] According to a fourth aspect of an embodiment of the present disclosure, a computer-readable storage medium is provided, on which a computer program is stored, and when the program is executed by a processor, the steps of any one of the methods described in the first aspect are implemented.

[0014] The present invention provides a method, device, equipment and medium for real-time online measurement of crystal growth thickness. Compared with the prior art, it has the following beneficial effects: By constructing the first calibration frame and calibrating the center position of the first crystal, the accuracy and comprehensiveness of the measurement area are ensured. At the same time, by analyzing the three primary color information of the pixel at the center position of the first crystal, the image noise and the influence of light changes are eliminated to improve the image quality. The image visual properties are adjusted according to the target parameter values, the image clarity and contrast are further optimized, the accuracy of crystal edge detection is ensured, and by analyzing the three primary color information and adjusting the image visual properties, the complex lighting conditions and crystal surface reflection characteristics in the vacuum reaction chamber are adapted. By adjusting the image visual properties, the image clarity, contrast and color balance are optimized to ensure that the crystal edges and details are clearly visible, and the problem of image quality degradation under high temperature and high pressure environments is effectively overcome. Not only is the measurement accuracy of the crystal growth thickness significantly improved, the error is controlled at the sub-micron level, and the needs of high-precision crystal growth are met, but also the first image is acquired in real time in each growth cycle, and the real-time online measurement of the crystal thickness is realized through automated image processing and data calculation. There is no need to interrupt the crystal growth process, and the growth parameters are dynamically adjusted to improve the process efficiency. Therefore, the crystal growth process can be monitored in real time, and the growth parameters can be dynamically adjusted, which significantly improves the process efficiency.

[0015] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings: Figure 1 A flow chart of a method for real-time online measurement of crystal growth thickness is shown according to an embodiment of the specification.

[0017] Figure 2 It is a schematic diagram of a crystal growth device according to an embodiment of the specification.

[0018] Figure 3It is a schematic diagram of a first calibration frame and a first crystal center position shown according to an embodiment of the specification.

[0019] Figure 4 It is a schematic diagram of a preset fixed search area and a crystal in a molybdenum platform according to an embodiment of the specification.

[0020] Figure 5 It is a block diagram of a control terminal shown according to an embodiment of the specification. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0023] The present invention provides a real-time online measurement method for crystal growth thickness. Figure 1 The flowchart of a method for real-time online measurement of crystal growth thickness according to an embodiment is shown. Specifically, the method includes: In step S11, a first image captured by a first camera in each growth cycle during the crystal growth process is acquired, wherein the first camera is arranged corresponding to a first observation window in a first viewing angle direction of the vacuum reaction chamber; Among them, crystal growth refers to the process of transforming a substance from a gas, liquid or solid state into a solid crystal by physical or chemical methods. Growth cycle: an artificially divided time period during the crystal growth process, used to monitor and record the growth status of the crystal. First camera: a device used to capture images during the crystal growth process, usually with high resolution and sensitivity. Vacuum reaction chamber: an enclosed space for crystal growth experiments, which maintains a vacuum state inside to eliminate interference factors. First viewing angle direction: the observation angle of the camera relative to the crystal in the vacuum reaction chamber. First observation window: a transparent window on the wall of the vacuum reaction chamber that allows camera observation.

[0024] In one embodiment, see Figure 2 As shown, the first observation window can be arranged horizontally, and therefore the first viewing angle direction can be a horizontal direction, and further the first camera can capture the first image in each growth cycle during the crystal growth process from a horizontal direction.

[0025] In the embodiment of the present disclosure, in the crystal growth experiment, the raw material is gradually crystallized in the vacuum reaction chamber by precisely controlling the reaction conditions (such as temperature, pressure, gas composition, etc.) in the vacuum reaction chamber. The first camera continuously monitors this process through the first observation window and takes an image at the end of each growth cycle.

[0026] The distance between the camera and the observation window can be determined based on the focal length of the camera, the size of the observation window, and the required image resolution, usually ensuring that the camera can clearly capture the entire crystal area. The distance between the observation window and the crystal: determined by the design of the vacuum reaction chamber, ensuring that the camera's field of view can cover the entire crystal growth area.

[0027] In step S12, in the first first image of each growth period, a first calibration frame is constructed with the goal of at least covering all the crystals in the first viewing angle direction, and the center position of any crystal in the first calibration frame in the first viewing angle direction is calibrated as the center position of the first crystal; Among them, calibration frame: a rectangular or circular area set manually in the image, used to locate and analyze the target object. The first crystal center position: the geometric center of any crystal determined by the image processing algorithm within the calibration frame.

[0028] In the disclosed embodiment, in the first image of each growth cycle, image processing software or algorithm is used to automatically identify and construct a calibration frame covering all crystals. Then, the center position of any crystal in the calibration frame is determined by image processing techniques such as edge detection and centroid calculation.

[0029] The size of the calibration frame is dynamically adjusted according to the distribution and size of the crystals in the image to ensure that all crystals are covered. The distance between the center of the crystal and the edge of the calibration frame is automatically calculated by the image processing algorithm and used for subsequent analysis and monitoring.

[0030] See also Figure 3 As shown, in the first long first image, all grown crystals are framed by a gray rectangular calibration frame, and the center position of the crystal on the left side of the first calibration frame is selected and calibrated as the center position of the first crystal ( Figure 3 The black “X” in the middle indicates that the crystal area to be measured is manually located, the first calibration frame is calibrated, and a crystal center position is calibrated to make the crystal more prominent (manual operation is only required in the first picture in a growth cycle, and no subsequent calibration is required).

[0031] In step S13, three primary color information of a pixel at the center position of the first crystal corresponding to each growth period during the crystal growth process is obtained, and a primary color value interval of each primary color is determined according to the three primary color information of the pixel at the center position of the first crystal; The three primary color information refers to the intensity values ​​of the three basic colors of red (R), green (G), and blue (B) of the pixel at the center of the first crystal in the first image. The primary color value interval refers to the value range of each primary color intensity.

[0032] In the disclosed embodiment, the three primary color information is obtained for the pixel at the center of the first crystal in each growth cycle. Then, based on this information, the value range of each primary color is determined, the RGB value of the pixel is read at the determined crystal center, and the RGB values ​​of all center position pixels in the entire growth cycle are counted, thereby determining the value range of each primary color.

[0033] In step S14, according to the first calibration frame and the primary color value interval of each of the primary colors, the parameter value of the image visual attribute corresponding to the first image is determined to obtain the target parameter value of the image visual attribute, and according to the target parameter value, the image visual attribute of all the first images corresponding to the growth period is adjusted to obtain a first target image; Among them, image visual attributes: refers to the image's brightness, contrast, saturation and other attributes, which affect the image's visual effect. Target parameter value: the ideal value of the image's visual attribute determined according to specific requirements or standards.

[0034] In the disclosed embodiment, the parameter values ​​of the image visual attributes (such as brightness, contrast, etc.) are determined according to the calibration frame and the primary color value interval, and then these attributes of all images in the corresponding growth period are adjusted to obtain the target image. According to the determined primary color value interval, the brightness, contrast and other attributes of the image are adjusted to make the crystal clearer and more prominent in the image.

[0035] In step S15, the first online measurement thickness of each of the crystals measured online in the first viewing angle direction is obtained based on the preset thickness of the molybdenum table, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystals in the first calibration frame in the first target image.

[0036] Among them, molybdenum platform: a platform used to support the crystal during the crystal growth process, usually made of high-temperature resistant materials such as molybdenum. Target area image: a specific area specified in the image for analysis or measurement. Number of crystal pixels: the number of pixels in the image that represent the height of the crystal. First online measurement thickness: the crystal thickness measured in real time by image processing technology during the crystal growth process.

[0037] In the disclosed embodiment, the online measured thickness of the crystal is calculated by using the known thickness of the molybdenum table, the target area image, and the number of pixels between the upper edge and the lower edge of the crystal through the proportional relationship. For example, before the crystal growth starts, the thickness St (unit: mm) of the molybdenum table is measured using a measuring tool (caliper). For example, assuming that the thickness of the molybdenum table is 1 mm, in the target area image, 500 pixels are measured between the upper edge and the lower edge of a certain crystal. At the same time, the actual size represented by each pixel in the known image. Through proportional calculation, the online measured thickness of the crystal can be obtained.

[0038] The above technical solution ensures the accuracy and comprehensiveness of the measurement area by constructing the first calibration frame and calibrating the center position of the first crystal. At the same time, by analyzing the three primary color information of the pixel at the center position of the first crystal, the influence of image noise and illumination change is eliminated, and the image quality is improved. The image visual properties are adjusted according to the target parameter values, and the image clarity and contrast are further optimized to ensure the accuracy of crystal edge detection. By analyzing the three primary color information and adjusting the image visual properties, the complex illumination conditions and crystal surface reflection characteristics in the vacuum reaction chamber are adapted. By adjusting the image visual properties, the image clarity, contrast and color balance are optimized to ensure that the crystal edges and details are clearly visible, and the problem of image quality degradation under high temperature and high pressure environments is effectively overcome. Not only is the measurement accuracy of the crystal growth thickness significantly improved, the error is controlled at the sub-micron level, and the needs of high-precision crystal growth are met, but also the first image is acquired in real time in each growth cycle, and the real-time online measurement of the crystal thickness is realized through automated image processing and data calculation. There is no need to interrupt the crystal growth process, and the growth parameters are dynamically adjusted to improve the process efficiency. Therefore, the crystal growth process can be monitored in real time, and the growth parameters can be dynamically adjusted, which significantly improves the process efficiency.

[0039] In a possible implementation, in step S15, according to the preset thickness of the molybdenum platform, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystals in the first calibration frame in the first target image, the first online measurement thickness of each of the crystals in the first viewing angle direction is obtained, including: In step S151, according to the preset thickness of the molybdenum platform and the target area image in the preset fixed search area in the first target image, a vertical pixel size is determined, where the vertical pixel size is used to represent the size represented by one pixel in the vertical direction; Among them, vertical pixel size: In the image, the actual physical size represented by each pixel in the vertical direction. This size usually needs to be determined through calibration or known physical size.

[0040] In the disclosed embodiment, the actual size represented by each pixel in the vertical direction can be calculated using the known thickness of the molybdenum stage and its pixel representation in the first target image. This calculation process usually involves a proportional relationship, that is, the ratio of the actual thickness of the molybdenum stage to the number of pixels in the image.

[0041] For example: Assume that the actual thickness of the molybdenum stage is 1 mm, and in the first target image, the height of the molybdenum stage occupies 100 pixels. Then, the vertical pixel size can be calculated as 1 mm / 100 pixels = 0.01 mm / pixel. This means that in the first target image, every 1 pixel in the vertical direction represents an actual size of 0.01 mm.

[0042] In step S152, the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystal constructed by continuous pixels in the first calibration frame in the first target image is calculated; Among them, the number of crystal pixels: In the image, the number of pixels representing the crystal height. This number can be measured through image processing techniques, usually involving steps such as edge detection and contour extraction.

[0043] In the disclosed embodiment, in the first target image, for each row of crystals in the first calibration frame, the upper edge and the lower edge of the crystal are determined by image processing technology (such as edge detection algorithm). Then, the number of pixels between the two edges, that is, the number of pixels of the crystal, is calculated.

[0044] For example, in the first target image, a row of clear crystals is selected for analysis. An edge detection algorithm is used to identify the upper and lower edges of the crystals and the number of pixels between the two edges is calculated. Assuming the result is 200 pixels, the number of pixels in this row of crystals is 200.

[0045] In step S153, a first online measured thickness of each of the crystals in the first viewing angle direction is obtained according to the number of crystal pixels and the vertical pixel size.

[0046] Among them, the first online thickness measurement: the crystal thickness is measured in real time by image processing technology during the crystal growth process. This thickness is calculated based on the number of pixels in the image and the vertical pixel size.

[0047] In the disclosed embodiment, the first online measured thickness of the crystal can be calculated by a simple multiplication operation using the determined vertical pixel size and the calculated number of crystal pixels, that is, the actual thickness of the crystal is obtained by multiplying the number of crystal pixels by the vertical pixel size.

[0048] For example, assuming that the determined vertical pixel size is 0.01 mm / pixel, and the calculated number of crystal pixels is 200. Then, the first online measured thickness of the crystal can be calculated as 200 pixels * 0.01 mm / pixel = 2 mm. This means that in the first viewing direction, the thickness of this row of crystals is about 2 mm.

[0049] The above technical solution can realize the online measurement of crystal thickness during the crystal growth process. This method has the advantages of non-contact, real-time and accurate.

[0050] In a possible implementation, in step S151, determining the vertical pixel size according to the preset thickness of the molybdenum platform and the target area image in the first target image that is in the preset fixed search area includes: In step S1511, from top to bottom, the pixel value differences of adjacent pixels in the target area image in the vertical direction are traversed and calculated to obtain a first pixel value difference, and the first pixel whose first pixel value difference exceeds a preset difference range is determined as an upper edge pixel belonging to the upper edge of the molybdenum platform; The pixel value difference is the difference in pixel values ​​between adjacent pixels in the image. This difference can be used to detect edges or mutation points in the image. The preset difference range is a threshold range set when calculating the pixel value difference. When the difference exceeds this range, it is considered that there is a significant edge or mutation between adjacent pixels. The upper edge pixel is a pixel in the image that represents the upper edge of an object. This pixel is usually located in the transition area between the object and the background, and its pixel value difference will exceed the preset difference range.

[0051] In the disclosed embodiment, the pixels in the target area image are traversed from top to bottom, and the pixel value difference between each pixel and its adjacent pixel below is calculated. When this difference exceeds the preset difference range for the first time, it is considered that the pixel belongs to the upper edge of the molybdenum platform, that is, the upper edge pixel.

[0052] For example, suppose there is a clear brightness difference between the upper edge of the molybdenum stage and the background in the target area image. When the brightness difference between a certain pixel and its lower neighbor exceeds the preset brightness difference range for the first time, the pixel can be considered to be the upper edge pixel of the molybdenum stage.

[0053] In step S1512, from bottom to top, the pixel value difference of adjacent pixels in the target area image in the vertical direction is traversed and calculated to obtain a second pixel value difference, and the second pixel whose first second pixel value difference exceeds the preset difference range is determined as a lower edge pixel belonging to the lower edge of the molybdenum platform; Among them, the lower-edge pixel is a pixel in the image that represents the lower edge of the object. Similar to the upper-edge pixel, this pixel is also located in the transition region between the object and the background, but its position is below the object.

[0054] In the embodiments of the present disclosure, pixels in the target region image are traversed from bottom to top, and the pixel value difference between each pixel and its adjacent pixel above it is calculated. When this difference first exceeds the preset difference range, it is considered that this pixel belongs to the lower edge of the molybdenum stage, that is, the lower-edge pixel.

[0055] For example, it is similar to step S1511, but in the opposite direction. Traverse the image from bottom to top. When the brightness difference between a certain pixel and its adjacent pixel above it first exceeds the preset brightness difference range, it can be considered that this pixel is the lower-edge pixel of the molybdenum stage.

[0056] In step S1513, the number of vertical pixels is determined according to the number of pixels between the upper-edge pixel and the lower-edge pixel; In the embodiments of the present disclosure, the number of vertical pixels is the number of pixels in the image that represents the height of the object. This number can be obtained by calculating the number of pixels between the upper-edge pixel and the lower-edge pixel. After determining the upper-edge pixel and the lower-edge pixel, by calculating the number of pixels between these two pixels, the number of vertical pixels of the molybdenum stage in the image can be obtained. For example, assume that the index of the upper-edge pixel is i and the index of the lower-edge pixel is j (and i < j). Then, the number of vertical pixels of the molybdenum stage is j - i.

[0057] In step S1514, the vertical pixel size is determined according to the ratio between the preset thickness of the molybdenum stage and the vertical pixel size;

[0058] In the embodiments of the present disclosure, using the known thickness (preset thickness) of the molybdenum stage and its number of vertical pixels in the image, the vertical pixel size can be calculated through a proportional relationship. That is, divide the thickness of the molybdenum stage by the number of vertical pixels to obtain the actual physical size represented by each pixel.

[0059] See Figure 4 As shown, the area of frame A is the fixed search area. In this area, the RGB values of all pixels are compared; comparing two by two from top to bottom, a group of pixels with a difference greater than the set value (range 50 - 200) and in the same vertical position are determined as the upper edge of the molybdenum stage; (such as Figure 4 the upper edge of area B in); comparing two by two from bottom to top, a group of pixels with a difference greater than the set value (range 50 - 200) and in the same vertical position are determined as the lower edge of the molybdenum stage; (such as Figure 4 the lower edge of area B in).

[0060] Calculate the number of pixels in the vertical direction of the molybdenum table. The accumulated number of pixels from the upper edge to the lower edge of a single column of the molybdenum table is the number of pixels Sm in the vertical direction of the molybdenum table. Input the actual thickness of the molybdenum table. Before the crystal growth begins, use a measuring tool (caliper) to measure the thickness of the molybdenum table St (unit: mm). Calculate the vertical pixel size: vertical pixel size (unit: mm) Sz = St / Sm.

[0061] In the calibration area ( Figure 3 The middle gray box) determines the pixel combination that meets the upper and lower limits of RGB and is connected as a crystal (such as Figure 4 The C and D areas in the figure are crystals): the number of vertical pixels of the crystal is calculated. The number of pixels between the upper edge and the lower edge of each column of the crystal is calculated separately for the same crystal. The maximum number of pixels is the number of pixels Sc in the vertical direction of the crystal. The crystal thickness is calculated. The horizontal crystal thickness (unit: mm) Sh = Sc x Sz.

[0062] The above technical solution can accurately determine the vertical pixel size, which is the basis for the subsequent calculation of parameters such as crystal thickness, thus improving the accuracy of measurement.

[0063] In a possible implementation, in step S14, determining the parameter value of the image visual attribute corresponding to the first image according to the first calibration frame and the primary color value interval of each of the primary colors, and obtaining the target parameter value of the image visual attribute includes: In step S141, starting from the preset initial value of the image visual attribute, the parameter value of the image visual attribute is adjusted successively according to the preset step length; The preset initial value is the initial setting value of the image visual attribute parameter before adjustment. The preset step size is the change amount of the parameter value each time the image visual attribute parameter is adjusted.

[0064] In the disclosed embodiment, the preset initial value of the image visual attribute is used as the starting point, and the parameter value of the attribute is gradually increased or decreased according to the preset step size. This process is usually implemented by an image processing algorithm or software and can be performed automatically.

[0065] For example, suppose you want to adjust the brightness property of an image, and the preset initial value is 100 (indicating a middle value of the brightness level), and the preset step size is 5. Then, you can start from 100, increase or decrease by 5 each time, and try different brightness values ​​in turn.

[0066] In step S142, after each adjustment of the parameter value, the number of pixels of the three primary colors within the coverage of the first calibration frame that are within the primary color value intervals of the primary colors is counted; In the embodiment of the present disclosure, after each adjustment of the image visual attribute parameter value, the three primary color values ​​of each pixel within the coverage of the first calibration frame are recalculated, and the number of pixels whose values ​​are within the respective primary color value intervals is counted. This process usually involves steps such as image segmentation, color space conversion, and pixel counting.

[0067] For example, assume that the primary color value interval of red is set to [100, 150], green is set to [50, 100], and blue is set to [75, 125]. After each brightness adjustment, the RGB value of each pixel in the first calibration frame is calculated, and the number of pixels that meet the above red, green, and blue value intervals is counted.

[0068] In step S143, the parameter value corresponding to the largest number is determined as the target parameter value of the image visual attribute.

[0069] The target parameter value is the parameter value that satisfies a specific condition (such as the number of pixels of the three primary colors within the primary color value interval is the largest) among a series of parameter value attempts.

[0070] In the embodiment of the present disclosure, after counting the number of pixels of the three primary colors within their respective primary color value intervals under all attempted parameter values, the parameter value with the largest number is selected as the target parameter value of the image visual attribute. This process usually involves comparison and selection operations.

[0071] For example, adjust the brightness from 0% to 100% (increase 1% each time) in a loop, calculate the number of pixels in the calibration area that meet the RGB upper and lower limits each time, and the brightness value with the largest number is the optimal brightness. After the calculation is completed, adjust the brightness to the optimal brightness. According to the brightness adjustment method, adjust the contrast, saturation, clarity, sharpness, and color temperature to the best, and obtain the first target image.

[0072] The image visual attribute parameter value that maximizes the number of pixels whose three primary colors are within their respective primary color value intervals within the coverage area of ​​the first calibration frame, i.e., the target parameter value of the image visual attribute, can be determined, thereby facilitating identification of the grown crystal from the image, thereby improving the accuracy of online thickness measurement.

[0073] In a possible implementation, the image visual attribute includes at least one of the following: brightness, contrast, saturation, clarity, sharpness, and color temperature.

[0074] In a possible implementation, in step S13, determining the primary color value interval of each primary color according to the three primary color information of the pixel at the center position of the first crystal includes: In step S131, according to the value of each primary color represented in the three primary color information of the pixel at the center position of the first crystal and the preset extension value, the primary color limit value of each primary color is determined, wherein the preset extension value is added to the value of each primary color to obtain the upper limit value of the primary color limit value, and the preset extension value is subtracted from the value of each primary color to obtain the lower limit value of the primary color limit value; Among them, the three primary color information is in the image, red, green and blue (RGB) are the three basic colors that constitute the image color, and each color has a value range (usually 0-255). The preset extension value is to ensure the accuracy and robustness of color recognition. When calculating the primary color value interval, an extension range is usually set for its three primary color values ​​based on the color characteristics of the target object. The size of this range is the preset extension value. The primary color limit value is the color value obtained by adding or subtracting the preset extension value based on the three primary color information, which is called the upper limit value and the lower limit value respectively.

[0075] In the disclosed embodiment, for each pixel at the center of the first crystal, its RGB value is extracted. Then, based on these RGB values, the preset extension value is added and subtracted respectively to obtain the upper limit value and the lower limit value of each primary color. This process helps to take into account the error range of color recognition and improve the accuracy of recognition.

[0076] For example, assuming that the RGB value of the pixel at the center of the first crystal is (100, 150, 200), and the preset extension value is 20. Then, the upper limit value of red is 120 (100+20), and the lower limit value is 80 (100-20); the upper limit value of green is 170 (150+20), and the lower limit value is 130 (150-20); the upper limit value of blue is 220 (200+20), and the lower limit value is 180 (200-20).

[0077] In step S132, the primary color value interval of each primary color is determined according to the upper limit value and the lower limit value of each primary color.

[0078] In the disclosed embodiment, the value interval of each primary color can be determined based on the calculated upper limit value and lower limit value of each primary color. This interval will be used for subsequent color matching to identify pixels or areas similar to the color of the first crystal. For example, continuing the above example, the value interval of red is [80, 120], the value interval of green is [130, 170], and the value interval of blue is [180, 220]. These intervals will be used to find areas in the image that are similar to the color of the first crystal.

[0079] In summary, the value range of each primary color can be determined based on the three primary color information of the pixel at the center of the first crystal, combined with the preset extension value. This process has a wide range of application value in image processing, machine vision, color recognition and other fields, especially when it is necessary to accurately identify specific color objects.

[0080] For example, in the first image, the upper and lower limits of RGB are calculated based on the values ​​of the primary colors of the three primary color information represented by the image at the calibrated center position of the first crystal, that is, the RGB values ​​of the pixels: R+=Ra+A; R-=Ra-A; G+=Ga+A; G-=Ga-A; B+=Ba+A; B-=Ba-A; A is the preset extension value. R+: upper limit of red primary color, R-: lower limit of red primary color, the primary color value interval of red primary color is: [Ra - A, Ra + A]. Similarly, G+: upper limit of green primary color, G-: lower limit of green primary color, the primary color value interval of green primary color is: [Ga - A, Ga + A]; B+: upper limit of blue primary color, B-: lower limit of blue primary color, the primary color value interval of blue-red primary color is: [Ba - A, Ba + A].

[0081] The present disclosure also provides a crystal growth device. Figure 2 As shown, the crystal growth device includes: a control terminal, a vacuum reaction chamber, a microwave energy supply unit, a process gas supply unit, an electric proportional valve, a vacuum pump and a first camera; The vacuum reaction chamber is used to provide a crystal growth environment. A molybdenum platform is provided in the vacuum reaction chamber. The molybdenum platform is used to support the grown crystal. A first observation window is arranged on the vacuum reaction chamber. The first camera is arranged on the first observation window. The first camera captures a first image in the vacuum reaction chamber from a first viewing angle through the first observation window; The microwave power providing unit and the process gas providing unit are connected to the vacuum reaction chamber through pipelines respectively, the vacuum pump is connected to the vacuum reaction chamber through pipelines, and the electric proportional valve is arranged on the pipeline connecting the vacuum pump and the vacuum reaction chamber; The control terminal is respectively connected to the vacuum reaction chamber, the microwave energy supply unit, the process gas supply unit, the electric proportional valve, the vacuum pump, and the first camera for controlling the growth of the crystal and acquiring the first image, and executing any method described in the first aspect.

[0082] In the disclosed embodiments, the vacuum reaction chamber provides a specific environment for crystal growth, and the growth conditions of the crystal can be precisely adjusted by controlling the gas pressure, temperature and air temperature inside the chamber. This usually involves using a vacuum pump to reduce the gas pressure in the chamber, and accurately controlling the introduction of process gas through an electric proportional valve to maintain the desired growth environment.

[0083] Microwave energy heating: The microwave energy supply unit heats the material in the vacuum reaction chamber through microwave radiation. Microwave heating is efficient and uniform, and can quickly and accurately control the temperature in the reaction chamber, which is crucial for crystal growth.

[0084] Growth process monitoring: The first camera captures images of the vacuum reaction chamber from a specific viewing angle through the first observation window, allowing the control terminal to monitor the growth status of the crystal in real time. This monitoring is crucial for timely adjustment of growth parameters and ensuring crystal quality and growth efficiency.

[0085] Automatic control: The control terminal, as the "brain" of the entire system, communicates with various components (such as the vacuum reaction chamber, microwave energy supply unit, process gas supply unit, electric proportional valve, vacuum pump and first camera). It is responsible for receiving image data from the camera, analyzing the growth status of the crystal, and adjusting the working parameters of each component according to the preset algorithm or user instructions to achieve automatic control of crystal growth.

[0086] In summary, the crystal growth device ensures high-quality crystal growth and improves process efficiency by precisely controlling the environmental parameters (such as air pressure, temperature and air temperature) in the vacuum reaction chamber, using microwave energy for efficient heating, real-time online monitoring of the crystal growth status, and realizing automatic control of the system.

[0087] In a possible implementation, a molybdenum table is provided in the vacuum reaction chamber, and the molybdenum table is used to support the grown crystal.

[0088] The present disclosure also provides a computer-readable storage medium on which a computer program is stored. When the program is executed by a processor, the steps of the method described in any one of the aforementioned embodiments are implemented.

[0089] The present disclosure also provides an electronic device, including: a memory having a computer program stored thereon; A processor is used to execute the computer program in the memory to implement the steps of the method in any one of the aforementioned embodiments.

[0090] Figure 5The control terminal 100 shown includes: a processor 1001 and a memory 1003. The processor 1001 and the memory 1003 are connected, such as through a bus 1002. Optionally, the control terminal 100 may also include a communication component 1004, which may be used for data interaction between the device 100 and other devices, such as data transmission and / or data reception. It should be noted that in actual scheduling, the communication component 1004 is not limited to one, and the structure of the control terminal 100 does not constitute a limitation on the embodiments of the present application.

[0091] Processor 1001 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. It may implement or execute various exemplary logic blocks, modules and circuits described in conjunction with the disclosure of this application. Processor 1001 may also be a combination that implements computing functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0092] The bus 1002 may include a path to transmit information between the above components. The bus 1002 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus. The bus 1002 may be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 5 Only one thick line is used in the diagram, but this does not mean that there is only one bus or only one type of bus.

[0093] The memory 1003 may be a ROM (Read Only Memory) or other types of static storage devices that can store static information and instructions, a RAM (Random Access Memory) or other types of dynamic storage devices that can store information and instructions, or an EEPROM (Electrically Erasable Programmable Read Only Memory), a CD-ROM (Compact Disc Read Only Memory) or other optical disk storage, optical disk storage (including compressed optical disk, laser disk, optical disk, digital versatile disk, Blu-ray disk, etc.), magnetic disk storage medium, other magnetic storage devices, or any other medium that can be used to carry or store program code and can be read by a computer, without limitation herein.

[0094] The memory 1003 is used to store program codes for executing the embodiments of the present disclosure, and the execution is controlled by the processor 1001. The processor 1001 is used to execute the program codes stored in the memory 1003 to implement the steps shown in the embodiment of the real-time online measurement method of crystal growth thickness.

[0095] The embodiment of the present disclosure also provides a computer-readable storage medium having program codes stored thereon. When the program codes are executed by a processor, the steps and corresponding contents of the aforementioned embodiment of the real-time online measurement method for crystal growth thickness can be implemented.

[0096] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments; within the technical concept of the present disclosure, various changes, modifications, substitutions and variations may be made to these embodiments, and these changes, modifications, substitutions and variations all fall within the protection scope of the present disclosure.

[0097] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction, and they should also be regarded as the contents disclosed in this disclosure. In order to avoid unnecessary repetition, this disclosure will not further describe various possible combinations. The technical scope of this application is not limited to the contents in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A real-time online measurement method for crystal growth thickness, characterized in that: The method comprises: Acquire a first image captured by a first camera in each growth cycle during the crystal growth process, wherein the first camera is arranged corresponding to a first observation window in a first viewing angle direction of the vacuum reaction chamber; In the first first image of each growth period, a first calibration frame is constructed with the goal of covering at least all the crystals in the first viewing angle direction, and the center position of any crystal in the first calibration frame in the first viewing angle direction is calibrated as the center position of the first crystal; Acquire three primary color information of a pixel at the center position of the first crystal corresponding to each growth cycle during the crystal growth process, and determine a primary color value interval of each primary color according to the three primary color information of the pixel at the center position of the first crystal; Determine, according to the first calibration frame and the primary color value intervals of each of the primary colors, a parameter value of an image visual attribute corresponding to the first image, obtain a target parameter value of the image visual attribute, and adjust, according to the target parameter value, the image visual attributes of all the first images corresponding to the growth period to obtain a first target image; According to the preset thickness of the molybdenum table, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of the crystal in each column of the crystals in the first calibration frame in the first target image, the first online measurement thickness of each of the crystals measured online in the first viewing angle direction is obtained.

2. The method according to claim 1, characterized in that The method obtains a first online measured thickness of each of the crystals in the first viewing angle direction according to a preset thickness of the molybdenum platform, a target area image in a preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of the crystals in the first calibration frame in the first target image, including: Determine a vertical pixel size according to a preset thickness of the molybdenum platform and a target area image in a preset fixed search area in the first target image, wherein the vertical pixel size is used to represent a size represented by one pixel in the vertical direction; Calculating the number of crystal pixels between the upper edge of the crystal and the lower edge of the crystal in each column of the crystal constructed by continuous pixels in the first calibration frame in the first target image; According to the number of crystal pixels and the vertical pixel size, a first online measured thickness of each of the crystals in the first viewing angle direction is obtained.

3. The method according to claim 2, characterized in that The method of determining the vertical pixel size according to the preset thickness of the molybdenum platform and the target area image in the first target image that is in the preset fixed search area includes: From top to bottom, traverse and calculate the pixel value difference of adjacent pixels in the target area image in the vertical direction to obtain a first pixel value difference, and determine the first pixel whose first pixel value difference exceeds the preset difference range as an upper edge pixel belonging to the upper edge of the molybdenum platform; From bottom to top, traverse and calculate the pixel value difference of adjacent pixels in the target area image in the vertical direction to obtain a second pixel value difference, and determine the second pixel whose first second pixel value difference exceeds the preset difference range as a lower edge pixel belonging to the lower edge of the molybdenum platform; Determine the number of pixels in the vertical direction according to the number of pixels between the upper edge pixel and the lower edge pixel; The vertical pixel size is determined according to the ratio between the preset thickness of the molybdenum stage and the vertical pixel size.

4. The method according to claim 1, characterized in that: The step of determining the parameter value of the image visual attribute corresponding to the first image according to the first calibration frame and the primary color value interval of each of the primary colors, and obtaining the target parameter value of the image visual attribute includes: Taking the preset initial value of the image visual attribute as the starting point, adjusting the parameter value of the image visual attribute in sequence according to the preset step length; After each adjustment of the parameter value, counting the number of pixels whose three primary colors are within the primary color value intervals of the primary colors within the coverage range of the first calibration frame; The parameter value corresponding to the largest number is determined as the target parameter value of the image visual attribute.

5. The method according to claim 4, characterized in that The image visual attributes include at least one of the following: brightness, contrast, saturation, clarity, sharpness, and color temperature.

6. The method according to any one of claims 1 to 5, characterized in that The determining, according to the three primary color information of the pixel at the center position of the first crystal, the primary color value interval of each primary color comprises: Determine the primary color limit value of each primary color according to the value of each primary color represented in the three primary color information of the pixel at the center position of the first crystal and the preset extension value, wherein the preset extension value is added to the value of each primary color to obtain the upper limit value of the primary color limit value, and the preset extension value is subtracted from the value of each primary color to obtain the lower limit value of the primary color limit value; The primary color value interval of each primary color is determined according to the upper limit value and the lower limit value of each primary color.

7. A crystal growth device, characterized in that: The crystal growth device comprises: a control terminal, a vacuum reaction chamber, a microwave energy supply unit, a process gas supply unit, an electric proportional valve, a vacuum pump and a first camera; The vacuum reaction chamber is used to provide a crystal growth environment. A molybdenum platform is arranged in the vacuum reaction chamber. The molybdenum platform is used to support the grown crystal. A first observation window is arranged on the vacuum reaction chamber. The first camera is arranged on the first observation window. The first camera captures a first image in the vacuum reaction chamber from a first viewing angle through the first observation window; The microwave energy providing unit and the process gas providing unit are connected to the vacuum reaction chamber through pipelines respectively, the vacuum pump is connected to the vacuum reaction chamber through pipelines, and the electric proportional valve is arranged on the pipeline connecting the vacuum pump and the vacuum reaction chamber; The control terminal is respectively connected to the vacuum reaction chamber, the microwave energy supply unit, the process gas supply unit, the electric proportional valve, the vacuum pump, and the first camera for controlling the growth of the crystal and acquiring the first image, and executing the method described in any one of claims 1 to 6.

8. The device according to claim 7, characterized in that A molybdenum platform is arranged in the vacuum reaction chamber, and the molybdenum platform is used to support the grown crystal.

9. An electronic device, characterized in that: include: a memory having a computer program stored thereon; A processor, configured to execute the computer program in the memory to implement the steps of the method according to any one of claims 1 to 6.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the steps of the method described in any one of claims 1 to 6 are implemented.

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