Small-diameter film nick depth batch measurement device and method

Abstract

The invention belongs to the technical field of diaphragm measuring devices, and particularly relates to a small-diameter diaphragm nick depth batch measuring device and method. According to the technical scheme, the small-diameter film nick depth batch measurement device comprises a supporting unit, a vibration reduction unit is installed on the supporting unit, a workbench is installed on the vibration reduction unit, a two-dimensional linear motion unit is installed on the workbench, and the output end of the two-dimensional linear motion unit is connected with a negative pressure unit. The negative pressure unit is internally provided with a plurality of product installation units used for placing to-be-tested diaphragms. The workbench is further provided with a contour measuring unit used for measuring the diaphragm to be measured. The invention provides a small-diameter film nick depth batch measurement device and a small-diameter film nick depth batch measurement method.

Description

Technical Field

[0001] The invention belongs to the technical field of diaphragm measuring devices, and in particular relates to a batch measuring device and method for notch depth of small-diameter diaphragms. Background Art

[0002] The diaphragm to be tested is a thin sheet structure with a diameter of 10 to 30 mm and a thickness of about 1 mm. Its upper and lower planes are close to mirror surfaces, and its special material is not easily deformed and has a high flatness. There is a "C"-shaped notch at about two-thirds of the diameter of the upper surface of the diaphragm, with a width of about 1 mm and a depth of 15 to 200 μm. Due to its small size, the main means of detecting the diaphragm is manual detection, and the detection tools are steel rulers and vernier calipers, which have low detection efficiency and high labor intensity.

[0003] Limited by the size and depth of the diaphragm to be tested, there is no corresponding batch testing equipment on the market. It can only be tested manually, which affects the batch production efficiency and the consistency evaluation of product performance. Manual testing has problems such as low efficiency and high error rate. In addition, for small width and depth of the notch, manual testing is difficult and the error of the test result is more obvious. Summary of the invention

[0004] In order to solve the above problems existing in the prior art, the object of the present invention is to provide a batch measurement device and method for the depth of notches of small-diameter diaphragms.

[0005] The technical solution adopted by the present invention is:

[0006] A batch measuring device for the notch depth of small-diameter diaphragms comprises a supporting unit, a vibration reduction unit is installed on the supporting unit, a workbench is installed on the vibration reduction unit, a two-dimensional linear motion unit is installed on the workbench, the output end of the two-dimensional linear motion unit is connected to a negative pressure unit, and a plurality of product installation units for placing diaphragms to be measured are arranged in the negative pressure unit; a contour measurement unit for measuring the diaphragm to be measured is also installed on the workbench.

[0007] During normal operation, the two-dimensional linear motion unit is driven to make the diaphragms to be tested pass through the working area of ​​the contour measurement unit in the specified order. The contour measurement unit scans, reads and stores the characteristics of each diaphragm to be tested, including the diameter and the depth of the notch. After the scanning of all diaphragms to be tested is completed, the two-dimensional linear motion unit is driven back to the initial zero position of the device; the negative pressure unit is closed, the tested diaphragm is removed, and the diaphragm to be tested is replaced to repeat the scanning measurement.

[0008] The present invention accurately moves the diaphragm to be tested in two dimensions and drives the diaphragm to be tested to rotate, so that the contour measurement unit can scan and measure each position of each diaphragm. The present invention solves the problems of low efficiency, high error rate and high detection difficulty in manual detection; it can cover the detection of diaphragms of different specifications and sizes; it can efficiently and stably perform full detection on all areas of the diaphragm.

[0009] As a preferred solution of the present invention, the support unit is a leg support frame placed on the ground, and the vibration reduction unit is installed on the leg support frame.

[0010] As a preferred solution of the present invention, the vibration reduction unit is an air-floating vibration reduction device fastened to the support unit, and the workbench is installed on the air-floating vibration reduction device. The air-floating vibration reduction device under the workbench is ventilated, and the workbench is in a vibration isolation state under the action of the air-floating vibration reduction device, thereby preventing the ground vibration from affecting the detection.

[0011] As a preferred solution of the present invention, the two-dimensional linear motion unit includes a two-dimensional linear motion module fastened to the workbench.

[0012] As a preferred embodiment of the present invention, the negative pressure unit includes a sealing product tooling fastened to a two-dimensional linear motion unit, a plurality of product installation units are arranged in the sealing product tooling, and a micro vacuum pump for evacuating the plurality of product installation units is connected to the sealing product tooling. The system gap formed by the sealing product tooling and the product installation units is very small, and the micro vacuum pump starts to work, exhausts the excess air in the sealing product tooling, and generates negative pressure. The surface of the perforated platform generates negative pressure under the action of the micro vacuum pump, and the diaphragm will be stably adsorbed on the surface of the perforated platform.

[0013] As a preferred solution of the present invention, the number of the product installation units is 9.

[0014] As a preferred embodiment of the present invention, the product installation unit includes a base fastened to the sealing product tooling, a micro motor is installed in the base, the output end of the micro motor is connected to a micro turntable through a coupling, a perforated platform is connected to the micro turntable, and the diaphragm to be tested is adsorbed on the perforated platform through the negative pressure generated in the perforated platform. The micro motor can drive the micro turntable to rotate to facilitate the measurement of various positions of the diaphragm to be tested. When the micro vacuum pump is working, the perforated platform is evacuated through the small holes thereon to vacuum adsorb the diaphragm to be tested.

[0015] As a preferred solution of the present invention, the contour measuring unit comprises a gate-shaped column fastened to the workbench, and a contour scanner for measuring the diaphragm to be measured is installed on the gate-shaped column.

[0016] A batch measurement method for the notch depth of a small-diameter membrane comprises the following steps:

[0017] S1: Before the device works, place the diaphragm to be tested on the product installation unit; start the vibration reduction unit under the workbench; drive the two-dimensional linear motion unit to move the diaphragm to be tested to the initial position; start the negative pressure unit to generate negative pressure on the product installation unit, and the diaphragm to be tested will be adsorbed on the product installation unit;

[0018] S2: During normal operation, the two-dimensional linear motion unit is driven to make the diaphragms to be tested pass through the working area of ​​the profile measurement unit in a specified order. The profile measurement unit scans, reads and stores the characteristics of each diaphragm to be tested, including the diameter and the notch depth;

[0019] S3: After the scanning of all the diaphragms to be tested is completed, the two-dimensional linear motion unit is driven to return to the initial zero position of the device; the negative pressure unit is closed, the tested diaphragms are removed, and the diaphragms to be tested are replaced to repeat the scanning measurement.

[0020] As a preferred embodiment of the present invention, in step S2, when the profile measurement unit scans and stores the notch depth of the film to be measured, the following steps are specifically included:

[0021] Single section notch depth calculation method:

[0022] The contour measurement unit scans the entire cross-sectional shape and calculates the depth value at each sampling cross section using the maximum thickness of the diaphragm to be measured as a reference;

[0023] Multi-section notch depth calculation method:

[0024] The notch contour position is automatically registered; after automatic matching, the entire contour is evenly divided into N cross-sectional areas; the depth profiles of the N cross-sectional areas are sampled; and the notch depth of each cross-sectional area is calculated.

[0025] The beneficial effects of the present invention are:

[0026] The present invention accurately moves the diaphragm to be tested in two dimensions and drives the diaphragm to be tested to rotate, so that the contour measurement unit can scan and measure each position of each diaphragm. The present invention solves the problems of low efficiency, high error rate and high detection difficulty in manual detection; it can cover the detection of diaphragms of different specifications and sizes; it can efficiently and stably perform full detection on all areas of the diaphragm. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the structure of the present invention;

[0028] Figure 2 It is a structural diagram of the product installation unit;

[0029] Figure 3 It is a schematic diagram of scanning path scanning of a single diaphragm;

[0030] Figure 4 This is the principle diagram of notch depth solution;

[0031] Figure 5 is a schematic diagram of the cross section of the notch depth measurement;

[0032] Figure 6 It is the diaphragm measurement flow chart.

[0033] In the figure: 1-leg support frame; 2-air floating shock absorber; 3-workbench; 4-two-dimensional linear motion module; 5-door-shaped column; 6-sealing product tooling; 7-micro vacuum pump; 8-product installation unit; 9-contour scanner; 10-micro motor; 11-base; 12-coupling; 13-bearing; 14-micro turntable; 15-platform with holes; 16-diaphragm to be tested. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present invention. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0036] like Figure 1 As shown, the batch measuring device for the notch depth of small-diameter diaphragms of this embodiment includes a supporting unit, a vibration-damping unit is installed on the supporting unit, a workbench 3 is installed on the vibration-damping unit, a two-dimensional linear motion unit is installed on the workbench 3, and the output end of the two-dimensional linear motion unit is connected to a negative pressure unit, and a plurality of product installation units 8 for placing the diaphragms 16 to be measured are arranged in the negative pressure unit; the workbench 3 is also equipped with a contour measurement unit for measuring the diaphragm 16 to be measured.

[0037] During normal operation, the two-dimensional linear motion unit is driven to make the diaphragm 16 to be tested pass through the working area of ​​the profile measurement unit in a specified order. The profile measurement unit scans, reads and stores the characteristics of each diaphragm 16 to be tested, including the diameter and the depth of the notch. After the scanning of all diaphragms 16 to be tested is completed, the two-dimensional linear motion unit is driven back to the initial zero position of the device; the negative pressure unit is closed, the tested diaphragm is removed, and the diaphragm 16 to be tested is replaced to repeat the scanning measurement.

[0038] The present invention accurately moves the diaphragm 16 to be tested in two dimensions and drives the diaphragm 16 to be tested to rotate, so that the contour measurement unit can scan and measure each position of each diaphragm. The present invention solves the problems of low efficiency, high error rate and high detection difficulty in manual detection; it can cover the detection of diaphragms of different specifications and sizes; it can efficiently and stably perform full detection on all areas of the diaphragm.

[0039] The support unit is a leg support frame 1 placed on the ground, and the vibration reduction unit is installed on the leg support frame 1 .

[0040] The vibration reduction unit is an air-floating vibration reducer 2 fastened to the support unit, and the workbench 3 is installed on the air-floating vibration reducer 2. The air-floating vibration reducer 2 under the workbench 3 is ventilated, and the workbench 3 is in a vibration isolation state under the action of the air-floating vibration reducer 2, so as to prevent the influence of ground vibration on the detection.

[0041] The two-dimensional linear motion unit includes a two-dimensional linear motion module 4 fastened on the workbench 3 .

[0042] Specifically, the negative pressure unit includes a sealing product tooling 6 fastened to a two-dimensional linear motion unit, a plurality of product installation units 8 are arranged in the sealing product tooling 6, and a micro vacuum pump 7 for evacuating the plurality of product installation units 8 is connected to the sealing product tooling 6. The system gap formed by the sealing product tooling 6 and the product installation units 8 is very small, and the micro vacuum pump 7 starts to work, exhausts the excess air in the sealing product tooling 6, and generates negative pressure. The surface of the perforated platform 15 generates negative pressure under the action of the micro vacuum pump 7, and the diaphragm will be stably adsorbed on the surface of the perforated platform 15.

[0043] The number of the product installation units 8 is 9.

[0044] Specifically, Figure 2As shown, the product installation unit 8 includes a base 11 fastened to the sealing product tooling 6, a micro motor 10 is installed in the base 11, the output end of the micro motor 10 is connected to a micro turntable 14 through a coupling 12, the micro turntable 14 and the base 11 are connected through a bearing 13, a perforated platform 15 is connected to the micro turntable 14, and the diaphragm 16 to be tested is adsorbed on the perforated platform 15 through the negative pressure generated in the perforated platform 15. The micro motor 10 can drive the micro turntable 14 to rotate, so as to facilitate the measurement of various positions of the diaphragm 16 to be tested. When the micro vacuum pump 7 is working, the perforated platform 15 is evacuated through the small holes thereon to vacuum adsorb the diaphragm 16 to be tested.

[0045] The profile measuring unit comprises a gate-shaped column 5 fastened to the workbench 3 , on which a profile scanner 9 for measuring the membrane 16 to be measured is mounted.

[0046] The batch measurement method of the scoring depth of small-diameter membranes of this embodiment includes the following steps:

[0047] S1: Before the device is working, multiple diaphragms to be tested are placed on a perforated platform 15. The surface of the perforated platform 15 is a series of concentric grooves of different diameters and depths, which can hold diaphragms of different specifications and types. The air-floating shock absorber 2 under the workbench 3 is ventilated. After ventilation, the surface is in a vibration-isolated state under the action of the air-floating shock absorber 2 to avoid negative impact of ground vibration on the detection. Drive the two-dimensional linear motion module 4 to move the diaphragm 16 product to be tested to the initial position. The system gap composed of the sealing product tooling 6 and the product installation unit 8 is very small, so the micro vacuum pump 7 starts working, exhausts the excess air in the sealing product tooling 6, and generates negative pressure. The surface of the perforated platform 15 generates negative pressure under the action of the micro vacuum pump 7, and the diaphragm will be stably adsorbed on the surface of the perforated platform 15. Figure 2 shown.

[0048] S2: During normal operation, the two-dimensional linear motion module 4 is driven to make the diaphragm 16 to be tested pass through the working area of ​​the profile scanner 9 in a specified order. The profile scanner 9 scans, reads and stores the characteristics of each diaphragm such as the diameter and notch depth. The scanning path of a single diaphragm is shown in the figure below: Figure 3 shown.

[0049] S3: After all the diaphragms have been scanned, the two-dimensional linear motion module 4 is driven back to the initial zero position of the device. The micro vacuum pump 7 is turned off, and the diaphragm is no longer adsorbed. The tested diaphragm is removed, and the diaphragm to be tested 16 is replaced to repeat the scanning measurement. The overall device is as follows: Figure 1 shown.

[0050] Score depth measurement method:

[0051] 1) Single section notch depth calculation method:

[0052] like Figure 4 As shown in the figure, ABCDEF is the notch section. The scanning sensor scans the entire cross-sectional shape, and uses AB and EF as reference datums to calculate the depth value H at each sampling cross section.

[0053] 2) Method for calculating the depth of multi-section notches:

[0054] Automatic matching is to realize the automatic registration of the notch contour position; notch partitioning is to divide the entire contour into N cross-sectional areas evenly after automatic matching. Figure 5 As shown; depth sampling is to realize the depth profile sampling of N cross-sectional areas; and calculation processing is to realize the calculation of the notch depth of each cross-sectional area.

[0055] The diaphragm measurement process is as follows Figure 6 Before measuring, the diaphragm 16 to be measured is installed on the corresponding specification measuring tooling. A maximum of 9 diaphragms are installed for each measurement. Two sets of measuring tooling are used for each specification of diaphragm. After the measurement of 9 diaphragms is completed, the whole set is replaced.

[0056] The measurement is a one-button automatic measurement. After the measuring fixture is installed, the measuring system controls the two-dimensional linear motion unit to align with the diaphragm to be measured, and a report is automatically issued after the measurement is completed.

[0057] The present invention is not limited to the above-mentioned optional implementation modes. Anyone can derive other various forms of products under the inspiration of the present invention. However, no matter what changes are made in the shape or structure, all technical solutions that fall within the scope defined by the claims of the present invention fall within the protection scope of the present invention.

Claims

1. A batch measuring device for the depth of notch of small-diameter membranes, characterized in that: The invention comprises a support unit, a vibration reduction unit is installed on the support unit, a workbench (3) is installed on the vibration reduction unit, a two-dimensional linear motion unit is installed on the workbench (3), the output end of the two-dimensional linear motion unit is connected to a negative pressure unit, and a plurality of product installation units (8) for placing a diaphragm (16) to be tested are arranged in the negative pressure unit; and a contour measurement unit for measuring the diaphragm (16) to be tested is also installed on the workbench (3).

2. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The support unit is a leg support frame (1) placed on the ground, and the vibration reduction unit is installed on the leg support frame (1).

3. The device for batch measuring the depth of notches of small-diameter membranes according to claim 1, characterized in that: The vibration reduction unit is an air-floating vibration reduction device (2) fastened to the support unit, and the workbench (3) is mounted on the air-floating vibration reduction device (2).

4. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The two-dimensional linear motion unit comprises a two-dimensional linear motion module (4) fastened on a workbench (3).

5. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The negative pressure unit comprises a sealing product tooling (6) fastened to a two-dimensional linear motion unit, a plurality of product installation units (8) being arranged in the sealing product tooling (6), and a micro vacuum pump (7) for evacuating the plurality of product installation units (8) being connected to the sealing product tooling (6).

6. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The number of the product installation units (8) is 9.

7. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The product installation unit (8) comprises a base (11) fastened to a sealing product tooling (6), a micro motor (10) being installed in the base (11), an output end of the micro motor (10) being connected to a micro turntable (14) via a coupling (12), a perforated platform (15) being connected to the micro turntable (14), and a diaphragm (16) to be tested being adsorbed on the perforated platform (15) by negative pressure generated in the perforated platform (15).

8. The device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The profile measurement unit comprises a gate-shaped column (5) fastened to a workbench (3), and a profile scanner (9) for measuring a membrane (16) to be measured is installed on the gate-shaped column (5).

9. A method for batch measuring the depth of notches on small-diameter membranes, using the device for batch measuring the depth of notches on small-diameter membranes according to claim 1, characterized in that: The following steps are involved: S1: Before the device is operated, the diaphragm (16) to be tested is placed on the product installation unit (8); the vibration reduction unit under the workbench (3) is started; the two-dimensional linear motion unit is driven to move the diaphragm (16) to be tested to the initial position; the negative pressure unit is started to generate negative pressure on the product installation unit (8), and the diaphragm (16) to be tested is adsorbed on the product installation unit (8); S2: During normal operation, the two-dimensional linear motion unit is driven to make the diaphragms (16) to be tested pass through the working area of ​​the profile measurement unit in a specified order, and the profile measurement unit scans, reads and stores the characteristics of each diaphragm (16) to be tested, including the diameter and the notch depth; S3: After the scanning of all the diaphragms (16) to be tested is completed, the two-dimensional linear motion unit is driven to return to the initial zero position of the device; the negative pressure unit is closed, the tested diaphragms are removed, and the diaphragms (16) to be tested are replaced to repeat the scanning measurement.

10. The method for batch measuring the depth of notches of small-diameter membranes according to claim 9, characterized in that: In step S2, when the profile measurement unit scans and stores the notch depth of the film (16) to be measured, the following steps are specifically included: Single section notch depth calculation method: The contour measurement unit scans the entire cross-sectional shape, and uses the maximum thickness of the membrane (16) to be measured as a reference to calculate the depth value at each sampling cross section; Multi-section notch depth calculation method: Automatic registration of notch contour position; after automatic matching, the entire contour is evenly divided into N cross-sectional areas; Sample the depth profiles of N cross-sectional areas; and calculate the notch depth of each cross-sectional area.

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