Power regulation method and device, electronic equipment and storage medium

Abstract

The invention provides a power regulation method and device, electronic equipment and a storage medium, and relates to the technical field of control. In the application, the voltage signal and the current signal in the radio frequency device of the ion implanter are subjected to phase discrimination processing to obtain the phase discrimination result, and whether the voltage signal and the current signal in the radio frequency device are in phase or not can be determined according to the phase discrimination result, so that whether the output power of the radio frequency power supply is relatively high or not can be determined. Moreover, whether the reflection power opposite to the change condition of the output power of the radio frequency power supply meets the preset reflection power condition or not is detected in real time, and the size of the reflection power is changed by adjusting the plate spacing of the capacitors in the radio frequency device, so that the radio frequency power supply can be ensured to keep higher output power in the working process of the radio frequency device.

Description

Technical Field

[0001] The present application relates to the field of control technology, and in particular to a power regulation method, device, electronic device and storage medium. Background Art

[0002] In order to ensure that the ion implanter can quickly implant ions, the RF device (eg, RF barrel) of the ion implanter is usually required to operate at optimal power, that is, the output power of the RF power supply of the RF device is maximum.

[0003] However, as the output power of the RF power source increases, and because the RF device is usually an inductor capacitor (LC) component, the resonant frequency of the RF device will change due to temperature drift, power increase, and other issues, which will greatly affect the power output of the RF power source. In order to ensure that the RF power source can maintain a high output power, the operating frequency of the RF device needs to be adjusted to near the resonant frequency of the RF device at this time.

[0004] Therefore, how to ensure that the RF power supply maintains a relatively high output power during the operation of the RF device is a problem that urgently needs to be solved. Summary of the invention

[0005] The embodiments of the present application provide a power regulation method, device, electronic device and storage medium to ensure that a radio frequency power supply maintains a relatively high output power during the operation of a radio frequency device.

[0006] In a first aspect, an embodiment of the present application provides a power regulation method, the method comprising:

[0007] Performing phase discrimination processing on a voltage signal and a current signal in a radio frequency device of an ion implanter to obtain a phase discrimination result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase discrimination result represents the phase difference between the voltage signal and the current signal;

[0008] Based on the phase detection result, the plate spacing of the capacitor in the RF device is adjusted until the reflected power of the RF power supply corresponding to the RF device meets a preset reflected power condition; wherein the reflected power condition is used to indicate an output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

[0009] In an optional embodiment, adjusting the plate spacing of a capacitor in a radio frequency device based on a phase detection result includes:

[0010] Based on the phase detection result, the first zero point of the voltage signal and the current signal in the unit signal cycle corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal cycle;

[0011] The plate distance of the capacitor is adjusted based on the first zero point and the first resonance point set for the first zero point.

[0012] In an optional embodiment, adjusting the plate distance of the capacitor based on the first zero point and the first resonance point set for the first zero point includes:

[0013] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, a first control instruction is sent to the motor set for the capacitor; the first control instruction is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, and the first direction is a direction of reducing the plate spacing of the capacitor;

[0014] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonance point, a second control instruction is sent to the motor; the second control instruction is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, and the second direction is the direction of increasing the plate spacing of the capacitor.

[0015] In an optional embodiment, adjusting the plate spacing of a capacitor in a radio frequency device based on a phase detection result includes:

[0016] Based on the phase detection result, a second zero point of the voltage signal and the current signal in a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal period;

[0017] The plate distance of the capacitor is adjusted based on the second zero point and the second resonance point set for the second zero point.

[0018] In an optional embodiment, adjusting the plate distance of the capacitor based on the second zero point and a second resonance point set for the second zero point includes:

[0019] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, a third control instruction is sent to the motor set for the capacitor; the third control instruction is used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction, wherein the first direction is a direction of reducing the plate spacing of the capacitor, and the second direction is a direction of increasing the plate spacing of the capacitor;

[0020] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonance point, a fourth control instruction is sent to the motor; the fourth control instruction is used to instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction.

[0021] In an optional embodiment, if the following conditions are met, it is determined that the reflected power of the RF power source meets the preset reflected power condition:

[0022] In the process of adjusting the plate spacing of the capacitor, the reflected power changes by first decreasing and then increasing.

[0023] In an optional embodiment, adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition includes:

[0024] When it is determined that the reflected power meets the reflected power condition, a fifth control instruction is sent to the motor set for the capacitor; the fifth control instruction is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0025] In a second aspect, an embodiment of the present application further provides a power regulation device, the device comprising:

[0026] A signal phase detection module is used to perform phase detection processing on a voltage signal and a current signal in a radio frequency device of an ion implanter to obtain a phase detection result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase detection result represents the phase difference between the voltage signal and the current signal;

[0027] The capacitor adjustment module is used to adjust the plate spacing of the capacitor in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition; wherein the reflected power condition is used to indicate the output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

[0028] In an optional embodiment, when adjusting the plate spacing of a capacitor in the radio frequency device based on the phase detection result, the capacitance adjustment module is specifically used to:

[0029] Based on the phase detection result, the first zero point of the voltage signal and the current signal in the unit signal cycle corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal cycle;

[0030] The plate distance of the capacitor is adjusted based on the first zero point and the first resonance point set for the first zero point.

[0031] In an optional embodiment, when adjusting the plate distance of the capacitor based on the first zero point and the first resonance point set for the first zero point, the capacitance adjustment module is specifically used to:

[0032] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, a first control instruction is sent to the motor set for the capacitor; the first control instruction is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, and the first direction is a direction of reducing the plate spacing of the capacitor;

[0033] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonance point, a second control instruction is sent to the motor; the second control instruction is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, and the second direction is the direction of increasing the plate spacing of the capacitor.

[0034] In an optional embodiment, when adjusting the plate spacing of a capacitor in the radio frequency device based on the phase detection result, the capacitance adjustment module is specifically used to:

[0035] Based on the phase detection result, a second zero point of the voltage signal and the current signal in a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal period;

[0036] The plate distance of the capacitor is adjusted based on the second zero point and the second resonance point set for the second zero point.

[0037] In an optional embodiment, when adjusting the plate distance of the capacitor based on the second zero point and the second resonance point set for the second zero point, the capacitance adjustment module is specifically used to:

[0038] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, a third control instruction is sent to the motor set for the capacitor; the third control instruction is used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction, wherein the first direction is a direction of reducing the plate spacing of the capacitor, and the second direction is a direction of increasing the plate spacing of the capacitor;

[0039] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonance point, a fourth control instruction is sent to the motor; the fourth control instruction is used to instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction.

[0040] In an optional embodiment, if the following conditions are met, the capacitance adjustment module determines that the reflected power of the RF power source meets the preset reflected power condition:

[0041] In the process of adjusting the plate spacing of the capacitor, the reflected power changes by first decreasing and then increasing.

[0042] In an optional embodiment, when adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets the preset reflected power condition, the capacitance adjustment module is specifically used to:

[0043] When it is determined that the reflected power meets the reflected power condition, a fifth control instruction is sent to the motor set for the capacitor; the fifth control instruction is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0044] In a third aspect, an embodiment of the present application further provides an electronic device, including:

[0045] Processor; and

[0046] Memory for storing programs,

[0047] The program includes instructions, and when the instructions are executed by the processor, the processor executes the power regulation method as described in the first aspect.

[0048] In a fourth aspect, an embodiment of the present application further provides a non-transitory computer-readable storage medium storing computer instructions, wherein the computer instructions are used to enable a computer to execute the power regulation method as described in the first aspect.

[0049] In a fifth aspect, the present application provides a computer program product, which, when called by a computer, enables the computer to execute the steps of the power regulation method as described in the first aspect.

[0050] The beneficial effects of this application are as follows:

[0051] In the power regulation method provided in the embodiment of the present application, a phase detection result is obtained by performing phase detection processing on the voltage signal and the current signal in the radio frequency device of the ion implanter. According to the phase detection result, it can be determined whether the voltage signal and the current signal in the radio frequency device are in phase, and further it can be determined whether the output power of the radio frequency power supply is a larger output power.

[0052] Furthermore, by detecting in real time whether the reflected power, which is opposite to the output power change of the RF power supply, meets the preset reflected power condition, and adjusting the plate spacing of the capacitor in the RF device to change the magnitude of the reflected power, it is possible to ensure that the RF power supply maintains a relatively large output power during the operation of the RF device.

[0053] In addition, other features and advantages of the present application will be described in the subsequent description, and partly become apparent from the description, or be understood by practicing the present application. The purpose and other advantages of the present application can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described here are used to provide a further understanding of the present application, constitute a part of the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0055] Figure 1 A schematic diagram of the system architecture of an optional power regulation system applicable to an embodiment of the present application;

[0056] Figure 2 A schematic diagram of an implementation flow of a power regulation method provided in an embodiment of the present application;

[0057] Figure 3 A waveform diagram of a voltage signal and a current signal provided in an embodiment of the present application;

[0058] Figure 4 A waveform diagram of another voltage signal and current signal provided in an embodiment of the present application;

[0059] Figure 5 A schematic diagram of an implementation flow of a method for obtaining query conditions provided in an embodiment of the present application;

[0060] Figure 6 A schematic diagram of the structure of a power regulation device provided in an embodiment of the present application;

[0061] Figure 7 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0062] The embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be construed as being limited to the embodiments described herein. Instead, these embodiments are provided to provide a more thorough and complete understanding of the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not intended to limit the scope of protection of the present application.

[0063] It should be understood that the various steps described in the method implementation of the present application can be performed in different orders and / or performed in parallel. In addition, the method implementation may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this respect.

[0064] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". Relevant definitions of other terms will be given in the description below. It should be noted that the concepts of "first", "second", etc. mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0065] It should be noted that the modifications of "one" and "plurality" mentioned in the present application are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0066] The names of the messages or information exchanged between multiple devices in the embodiments of the present application are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0067] Some of the terms used in the embodiments of the present application are explained below to facilitate understanding by those skilled in the art.

[0068] (1) The reflected power of an RF power supply refers to the energy reflected from the load back to the power supply. When an RF signal encounters an unmatched load during transmission, part of the signal will be reflected back instead of being completely absorbed by the load. The presence of reflected power will reduce the efficiency of the power supply because part of the energy is not effectively utilized but consumed in the matcher and load line, and may cause these components to overheat or even be damaged. Ideally, the reflected power should be zero, but in reality this is difficult to achieve due to the bandwidth of the signal and the complexity of matching. In engineering practice, it is generally believed that when the reflected power is reduced to a certain level (such as 1 / 1000 or 5 / 1000), the match can be considered good.

[0069] (2) LC circuit is a circuit composed of capacitors, inductors, resistors and other components and electronic devices that can generate oscillating current or have a filtering effect. LC circuit is mainly used for harmonic compensation. Through the interaction between inductors and capacitors, the filtering function is realized to remove or reduce the harmonic components in the circuit, thereby improving the performance and stability of the circuit.

[0070] (3) A phase detector is a device that can detect the phase difference of an input signal. It is a circuit that makes the output voltage have a definite relationship with the phase difference between two input signals. It is an important component of a phase-locked loop.

[0071] Based on the above-mentioned nouns and related terminology explanations, the design concept of the embodiments of the present application is briefly introduced below:

[0072] In order to ensure that the (high energy) ion implanter can quickly implant ions, it is usually necessary to operate the RF device (eg RF barrel) of the ion implanter at optimal power, that is, the output power of the RF power supply of the RF device is maximum.

[0073] However, as the output power of the RF power source increases, and because the RF device is usually an LC element, the resonant frequency of the RF device will change due to temperature drift, power increase, and other issues, which will greatly affect the power output of the RF power source. In order to ensure that the RF power source can maintain a high output power, the operating frequency of the RF device needs to be adjusted to near the resonant frequency of the RF device at this time.

[0074] In view of this, in order to ensure that the RF power supply maintains a relatively large output power during the operation of the RF device, the embodiment of the present application proposes a power regulation method, which may specifically include: performing phase detection processing on the voltage signal and the current signal in the RF device of the ion implanter to obtain a phase detection result, thereby adjusting the plate spacing of the capacitor in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition. Among them, the phase detection result can represent the phase difference between the voltage signal and the current signal; the reflected power condition can be used to indicate the output power range set for the RF power supply, and the output power range can include the maximum output power of the RF power supply.

[0075] In this way, since the phase detection result can determine whether the voltage signal and the current signal in the radio frequency device are in phase, it can be determined whether the output power of the radio frequency power supply is a relatively large output power. In addition, by detecting in real time whether the reflected power opposite to the change in the output power of the radio frequency power supply meets the preset reflected power condition, and adjusting the plate spacing of the capacitor in the radio frequency device to change the reflected power, it can be ensured that the radio frequency power supply maintains a relatively large output power during the operation of the radio frequency device.

[0076] In particular, the preferred embodiments of the present application are described below in conjunction with the drawings in the specification. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present application, and are not used to limit the present application, and the embodiments of the present application and the features in the embodiments may be combined with each other if there is no conflict.

[0077] See also Figure 1As shown, it is a schematic diagram of the architecture of an optional power regulation system applicable to the embodiment of the present application, and the power regulation system may include: a radio frequency device 101, a radio frequency power supply 102, a motor 103 and a server 104. Among them, the radio frequency device 101 is electrically connected to the radio frequency power supply 102 and the motor 103 respectively, and the server 104 and the motor 103 can exchange information through a communication network. The communication methods adopted by the communication network include: wireless communication methods and wired communication methods.

[0078] Exemplarily, the server 104 can access the network through cellular mobile communication technology to communicate with the motor 103. The cellular mobile communication technology, for example, includes the fifth generation mobile communication (5th generation mobile networks, 5G) technology or the next generation mobile communication technology.

[0079] Optionally, the server 104 may also access the network through a short-range wireless communication method to communicate with the motor 103. The short-range wireless communication method, for example, includes wireless fidelity (Wi-Fi) technology.

[0080] The embodiment of the present application does not impose any restrictions on the number of devices or modules involved in the above system architecture. For example, the above system architecture may include more RF devices or motors, or may include more RF power supplies or servers, or may also include other network devices. Figure 1 As shown, only the RF device 101, the RF power supply 102, the motor 103 and the server 104 are described as examples, and the above-mentioned devices or modules and their respective functions are briefly introduced below.

[0081] The radio frequency device 101 generally refers to a container used in certain industrial or laboratory equipment, which uses radio frequency technology for heating or other processing to heat materials or induce chemical reactions. For example, the radio frequency device 101 can be a container such as a radio frequency barrel, which is not specifically limited in the embodiment of the present application. In addition, in the embodiment of the present application, the radio frequency device 101 is mainly used to generate (high-energy) ions emitted by an ion implanter. The radio frequency power supply 102 is used to provide energy for the radio frequency device 101 to ensure the normal operation of the radio frequency device 101. The motor 103 can be used to adjust the plate spacing of the capacitor in the radio frequency device 101, change the resonant frequency of the radio frequency device 101, and then adjust the output power of the radio frequency power supply 102.

[0082] Server 104 can be an independent physical server, or a server cluster or distributed system composed of multiple physical servers. It can also be a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, content delivery networks (CDNs), and big data and artificial intelligence platforms.

[0083] In an embodiment of the present application, the server 104 can be used to perform phase detection processing on the voltage signal and the current signal in the RF device 101 of the ion implanter to obtain a phase detection result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase detection result can characterize the phase difference between the voltage signal and the current signal; then, based on the phase detection result, the plate spacing of the capacitor in the RF device 101 is adjusted until the reflected power of the RF power supply 102 corresponding to the RF device 101 meets the preset reflected power condition; wherein the reflected power condition can be used to indicate the output power range set for the RF power supply 102 (i.e., the power output range of the larger output power), so the output power range can include the maximum output power of the RF power supply 102.

[0084] The power regulation method provided by the exemplary embodiment of the present application is described below in combination with the above-mentioned system architecture and with reference to the accompanying drawings. It should be noted that the above-mentioned system architecture is only shown to facilitate understanding of the spirit and principles of the present application, and the implementation of the present application is not limited in this regard.

[0085] See also Figure 2 As shown, it is a schematic diagram of an implementation process of a power regulation method provided in an embodiment of the present application. The execution subject takes a server as an example. The specific implementation process of the method is as follows:

[0086] S201: Perform phase discrimination processing on the voltage signal and the current signal in the radio frequency device of the ion implanter to obtain a phase discrimination result.

[0087] The frequency of the voltage signal and the frequency of the current signal may be the same, that is, the signal period of the voltage signal and the signal period of the current signal may be the same. Thus, when the phase of the voltage signal is the same as the phase of the current signal, the intersection of the voltage waveform of the voltage signal and the horizontal axis (e.g., X-axis) and the intersection of the current signal and the horizontal axis overlap or are the same.

[0088] The above phase detection result can characterize the phase difference between the voltage signal and the current signal. Therefore, the server can determine whether the phase of the current signal leads the phase of the voltage signal or the phase of the voltage signal leads the phase of the current signal according to the phase detection result. Taking U as an example to represent the phase difference between the voltage signal and the current signal, U>0 can determine that the phase of the voltage signal leads the phase of the current signal, and U<0 can determine that the phase of the current signal leads the phase of the voltage signal.

[0089] Exemplarily, when executing step S201, the server may collect the phase detection results (e.g., phase difference) of the voltage signal and the current signal output by the phase detector through an analog-to-digital converter (ADC), thereby determining whether the phase of the current signal leads the phase of the voltage signal or the phase of the voltage signal leads the phase of the current signal through the phase detection result. Figure 3 As shown, it is a waveform diagram of a voltage signal and a current signal provided in an embodiment of the present application. From the voltage waveform of the voltage signal and the current waveform of the current signal, it can be seen that the phase of the voltage signal leads the phase of the current signal.

[0090] In the above manner, since the phase detection result can reflect whether the voltage signal and the current signal are in phase (i.e., the phase difference between the voltage signal and the current signal is 0), and when the voltage signal and the current signal in the RF device are in phase, the output power of the RF power supply is maximum, i.e., the LC circuit in the RF device operates at the resonant frequency. Therefore, the LC circuit in the RF device can be adjusted according to the phase detection result, so that the RF device can operate near the actual resonant frequency, thereby ensuring that the RF power supply maintains a large output power during the operation of the RF device.

[0091] S202: adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition.

[0092] Among them, the above-mentioned plate spacing is the distance between the first plate (such as the upper plate or the positive plate) and the second plate (such as the lower plate or the negative plate) of the capacitor. The above-mentioned preset reflected power condition can be used to indicate the output power range set for the RF power supply. The aforementioned output power range includes the maximum output power of the RF power supply during the operation of the RF device. In other words, in the process of adjusting the plate spacing of the capacitor in the RF device based on the phase detection result, the server stops or no longer adjusts the plate spacing of the capacitor in the RF device until the output power of the RF power supply falls within the aforementioned output power range.

[0093] In this way, the change in the output power of the RF power supply can be indirectly determined by the change in the reflected power, avoiding the direct detection of the change in the output power of the RF power supply, thereby reducing the complexity of determining the change in the output power. Specifically, if the change in the reflected power is from large to small, it can be determined that the output power of the RF power supply is from small to large. Conversely, if the change in the reflected power is from small to large, it can be determined that the output power of the RF power supply is from large to small.

[0094] Optionally, the output power of the above-mentioned RF power supply can be expressed as P out , the reflected power of the above RF power supply can be expressed as P verf In addition, the above-mentioned preset reflected power condition may also be referred to as a preset reflected power change condition. Of course, it may have other names, which are not limited in the embodiments of the present application.

[0095] In order to maximize the output power of the RF power supply, it is necessary to find the resonance point where the reflected power of the LC circuit in the RF device is the smallest during actual operation. At this time, the impedance Z of the LC circuit is the smallest and the power loss is the lowest. That is, when the RF device works at this resonance point, the output power of the RF power supply is the largest. According to the frequency calculation formula of the resonance point, the resonant frequency of the LC circuit is related to the inductive element (i.e., inductor L) and the capacitive element (i.e., capacitor C) in the RF device. Exemplarily, the calculation formula of the resonant frequency can be specifically expressed as follows:

[0096]

[0097] Among them, f represents the resonant frequency of the LC circuit, L represents the size of the inductance, and C represents the size of the capacitance.

[0098] However, since the inductor L in the RF device cannot be changed unless the inductor is replaced, the capacitance value of the capacitor can only be changed by changing the size of the capacitor. Based on the calculation formula of the capacitance value, it can be known that increasing the spacing between the capacitor plates (i.e., the plate spacing or the plate spacing) can reduce the capacitance value of the capacitor. Therefore, the resonant frequency of the RF device can be adjusted by adjusting the plate spacing of the capacitor through a motor, that is, adjusting the output power or reflected power of the RF power supply. For example, assuming that the capacitor in the RF device is a parallel capacitor, the calculation formula of the capacitance size can be specifically expressed as follows:

[0099]

[0100] Among them, C represents the size of the capacitor, that is, the capacitance value of the capacitor; ε is a constant, S represents the area facing the two plates of the capacitor, d represents the distance between the plates (that is, the plate spacing), and k is the electrostatic force constant.

[0101] When the current signal and the voltage signal are in phase (i.e., the phase difference between the voltage signal and the current signal is 0), the output power of the RF power supply is maximum, and the output value of the phase detector (e.g., voltage value) is 0. Based on this theory, the phase difference of the phase detector can be used as a basis for determining the direction of motor adjustment to achieve maximum output power of the RF power supply.

[0102] In an optional implementation, when executing step S202, the server can obtain the first zero point of the voltage signal and the current signal in the unit signal period corresponding to the voltage signal based on the phase detection result, so as to adjust the plate spacing of the capacitor based on the first zero point and the first resonance point set for the first zero point. The first zero point is an intersection of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal period, and the first resonance point is also the phase difference between the voltage signal and the current signal is 0. For example, refer to Figure 4 As shown, the unit signal period is 2π, point A is the first resonance point, its horizontal coordinate is 0, and the intersection point B of the current waveform of the current signal and the voltage waveform of the voltage signal is the first zero point.

[0103] It should be noted that the server can determine whether the phase difference between the voltage signal and the current signal is greater than 0 based on the voltage waveform, the current waveform and the first zero point. Figure 4 As shown, on the left side of the first zero point, the ordinate of the voltage waveform is greater than the ordinate of the current waveform, and on the right side of the first zero point, the ordinate of the voltage waveform is less than the ordinate of the current waveform. Therefore, the server can determine that the phase of the voltage signal leads the phase of the current signal (i.e., the phase difference is greater than 0).

[0104] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, the server can send a first control instruction to the motor set for the capacitor. Among them, the first control instruction can be used to instruct the motor to drive the first plate of the capacitor to move in a first direction, and the first direction can be a direction that reduces the plate spacing of the capacitor. Therefore, after the motor receives the first control instruction, it can drive the first plate of the capacitor to move in the first direction. Taking the capacitor as a horizontally placed parallel capacitor and the first plate as the lower plate as an example, the first direction is the direction close to the upper plate of the capacitor, that is, upward.

[0105] It should be understood that the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, that is, the phase difference between the voltage signal and the current signal is greater than 0, and the phase of the voltage signal leads the phase of the current signal.

[0106] In other words, on the left side of the first zero point, the ordinate of the voltage waveform is greater than the ordinate of the current waveform, and on the right side of the first zero point, the ordinate of the voltage waveform is smaller than the ordinate of the current waveform.

[0107] Based on the above method, the plate spacing of the capacitor becomes smaller, the capacitance of the capacitor becomes larger, and the resonant frequency of the LC circuit in the RF device becomes smaller. The impedance of the RF device at the current frequency is adjusted by reducing the plate spacing of the capacitor to ensure that the circuit impedance matches the output impedance of the RF power supply. At this time, the transmission line loss is minimized, thereby reducing the reflected power of the RF power supply.

[0108] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonance point, the server can send a second control instruction to the motor. Among them, the second control instruction can be used to instruct the motor to drive the first plate of the capacitor to move in the second direction, and the second direction can be the direction of increasing the plate spacing of the capacitor, that is, the second direction is opposite to the first direction. Therefore, after the motor receives the second control instruction, it can drive the first plate of the capacitor to move in the second direction. Still taking the capacitor as a horizontally placed parallel capacitor and the first plate as the lower plate as an example, the second direction is the direction away from the upper plate of the capacitor, that is, downward.

[0109] It should be understood that the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonance point, that is, the phase difference between the voltage signal and the current signal is less than 0, and the phase of the current signal leads the phase of the voltage signal.

[0110] In other words, on the left side of the first zero point, the ordinate of the voltage waveform is smaller than the ordinate of the current waveform, and on the right side of the first zero point, the ordinate of the voltage waveform is larger than the ordinate of the current waveform.

[0111] Based on the above method, the distance between the plates of the capacitor increases, the capacitance of the capacitor decreases, and the resonant frequency of the LC circuit in the RF device increases. The impedance of the RF device at the current frequency is adjusted by increasing the distance between the plates of the capacitor to ensure that the circuit impedance matches the output impedance of the RF power supply. At this time, the transmission line loss is minimized, thereby reducing the reflected power of the RF power supply.

[0112] It should be noted that the second plate of the capacitor can be fixed, and of course, the second plate of the capacitor can also be movable, which is not limited in the embodiments of the present application. If the second plate can also be movable, the first plate and the second plate can be moved in the same direction or in the opposite direction by a motor to adjust the capacitance of the capacitor.

[0113] In view of the fact that the output power (or resonant frequency) adjustment based on the phase detector has an erroneous zero point (i.e., the second zero point) that causes the motor to adjust in the opposite direction, which will increase the reflected power, the following improvements can be made: Since the ultimate goal of adjusting the output power of the RF power supply is to minimize the reflected power of the RF power supply, it can be adjusted by the change of the reflected power. Specifically, the reflected power of the RF power supply changes in real time during the movement of the motor, and the purpose of adjusting the movement direction is to reduce the reflected power, so as to find the lowest reflected power point to increase the output power of the RF power supply.

[0114] In another optional implementation, when executing step S202, the server may also obtain the second zero point of the voltage signal and the current signal within the unit signal period corresponding to the voltage signal based on the phase detection result, thereby adjusting the plate spacing of the capacitor based on the second zero point and the second resonance point set for the second zero point. The frequency value corresponding to the aforementioned second zero point is greater than the frequency value corresponding to the aforementioned first zero point, and the aforementioned first zero point and the aforementioned second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period.

[0115] Still Figure 4 For example, point C is the second resonance point, the horizontal coordinate thereof is π, and the intersection point D of the current waveform of the current signal and the voltage waveform of the voltage signal is the second zero point.

[0116] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, the server can send a third control instruction to the motor set for the capacitor. The third control instruction can be used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction. The first direction can be the direction of reducing the plate spacing of the capacitor, and the second direction can be the direction of increasing the plate spacing of the capacitor. Therefore, after the motor receives the third control instruction, it can drive the first plate of the capacitor to move along the first direction.

[0117] It should be understood that the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, that is, the phase difference between the voltage signal and the current signal is greater than 0, and the phase of the voltage signal leads the phase of the current signal.

[0118] In other words, on the left side of the second zero point, the ordinate of the voltage waveform is smaller than the ordinate of the current waveform, and on the right side of the second zero point, the ordinate of the voltage waveform is larger than the ordinate of the current waveform.

[0119] It can be seen that in this case, if the motor drives the first plate of the capacitor to move along the default second direction, the LC circuit in the RF device will deviate further from the position of the optimal resonance point (i.e., the second resonance point). By comparing the collected reflected power, it can be found that the reflected power is increasing, which means that the adjustment direction of the plate spacing is wrong. At this time, the server can drive the first plate of the capacitor to move along the first direction through the motor to find the minimum reflected power point.

[0120] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonance point, the server can send a fourth control instruction to the motor. The fourth control instruction can be used to instruct the motor to adjust from the default first direction to the second direction and drive the first plate of the capacitor to move along the second direction. Therefore, after the motor receives the fourth control instruction, it can drive the first plate of the capacitor to move along the second direction.

[0121] It should be understood that the frequency value corresponding to the second zero point is smaller than the frequency value corresponding to the second resonance point, that is, the phase difference between the voltage signal and the current signal is smaller than 0, and the phase of the current signal leads the phase of the voltage signal.

[0122] In other words, on the left side of the second zero point, the ordinate of the voltage waveform is greater than the ordinate of the current waveform, and on the right side of the second zero point, the ordinate of the voltage waveform is smaller than the ordinate of the current waveform.

[0123] Similarly, in this case, if the motor drives the first plate of the capacitor to move along the default first direction, the LC circuit in the RF device will also deviate further from the position of the optimal resonance point (i.e., the second resonance point). By comparing the collected reflected power, it can be found that the reflected power is increasing, which means that the adjustment direction of the plate spacing is wrong. At this time, the server can use the motor to drive the first plate of the capacitor to move in the second direction to find the minimum reflected power point.

[0124] The adjustment method based on reflected power not only realizes closed-loop adjustment based on the reflected power of the RF power supply to ensure the maximum output power of the RF power supply, but also eliminates the problem of reverse adjustment of the motor according to the second zero point.

[0125] Since the change of the reflected power is exactly opposite to the change of the output power of the RF power supply, in an optional implementation, if the change of the reflected power first decreases and then increases during the process of adjusting the plate spacing of the capacitor, it can be determined that the reflected power of the RF power supply meets the preset reflected power condition. In other words, when the reflected power first decreases and then increases, the minimum value of the reflected power has appeared, then when the reflected power meets the preset reflected power condition, the output power of the RF power supply is a larger output power, and the corresponding output power range includes the maximum output power of the RF power supply.

[0126] It should be understood that the above preset reflected power condition, ie, the change of the reflected power, first decreases and then increases.

[0127] In order to be able to shut down the motor in time when it is determined that the motor has adjusted the capacitance of the capacitor to a larger output power of the RF power supply (i.e., the reflected power meets the preset reflected power adjustment), thereby ensuring that the reflected power supply outputs a larger power. The server can send a fifth control instruction to the motor when it is determined that the reflected power meets the above-mentioned preset reflected power condition. Among them, the fifth control instruction can be used to instruct the motor to stop adjusting the plate spacing of the capacitor, that is, to stop driving the first plate of the capacitor.

[0128] For example, in the process of adjusting the first plate (or capacitance) of the capacitor by the motor, when it is found that the reflected power first decreases and then increases, and when it is 0-3W greater than the minimum reflected power value, the server can send a fifth control instruction to the motor to instruct the motor to stop adjusting the plate spacing of the capacitor. In this way, after receiving the aforementioned fifth control instruction, the motor will stop moving and will no longer adjust the plate spacing (or capacitance) of the capacitor, and the RF power supply will maintain the output power at this time, so as to achieve a higher output power of the RF power supply during the operation of the RF device.

[0129] Based on the power adjustment method described in steps S201 to S202, the server can reduce the reflected power by the real-time change of the reflection of the RF power during the motor movement, thereby finding the lowest reflected power point of the RF cigarette, so as to increase the output efficiency of the RF power. Figure 5 As shown, the specific implementation process of the method executed by the server is as follows:

[0130] S501: Start.

[0131] S502: Collect the output value U of the phase detector.

[0132] The output value may represent the phase difference between the voltage signal and the current signal in the radio frequency device.

[0133] S503: U>0. If yes, go to S504a, if not, go to S504b.

[0134] Assuming that the phase difference is the phase of the voltage signal minus the phase of the current signal, then U>0 can indicate that the voltage signal leads the current signal; conversely, U<0 can indicate that the current signal leads the voltage signal.

[0135] S504a: The motor moves in the forward direction.

[0136] For example, if the capacitor in the radio frequency device is a horizontally placed parallel capacitor, and if the upper plate (i.e., the second plate) of the capacitor is fixed and the lower plate (i.e., the first plate) of the capacitor is movable, then the positive motion of the motor can be the upward motion of the motor, that is, the motor drives the lower plate of the capacitor to move along the first direction.

[0137] S505a: Whether the reflected power decreases. If yes, proceed to S506a; if no, proceed to S504b.

[0138] If the forward motion of the motor can reduce the reflected power of the RF power supply, it can be determined that the forward operation of the motor can increase the output power of the RF power supply, and then the minimum value of the reflected power can be found during the forward motion of the motor.

[0139] Anyway, it can be determined that the forward motion of the motor deviates from the resonance point corresponding to the RF device (ie, the phase difference between the voltage signal and the current signal increases). At this time, it is necessary to promptly adjust the direction of motion of the motor from forward motion to reverse motion.

[0140] It should be noted that Figure 4 or Figure 3 As shown, if the voltage waveform of the voltage signal is fixed, then in the process of decreasing the reflected power, the current waveform of the current signal gradually approaches the voltage waveform of the voltage signal; conversely, in the process of increasing the reflected power, the current waveform of the current signal gradually moves away from the voltage waveform.

[0141] S506a: Check whether the reflected power increases by 2W in the reverse direction. If yes, proceed to S507; if no, continue to control the motor movement.

[0142] If the reflected power decreases first and then increases in the reverse direction, it can be determined that the minimum reflected power has been passed during the forward motion of the motor. In addition, since the reflected power increases in the reverse direction by a certain value, the motor does not need to be repeatedly controlled to return to the minimum reflected power, but can be stopped directly, thereby reducing the power consumption required for the motor to move.

[0143] S504b: The motor moves in the reverse direction.

[0144] Still taking the case where the capacitor in the radio frequency device is a horizontally placed parallel capacitor, the upper plate (i.e., the second plate) of the capacitor is fixed, and the lower plate (i.e., the first plate) of the capacitor is movable as an example, then the reverse movement of the motor can be the downward movement of the motor, that is, the motor drives the lower plate of the capacitor to move along the second direction.

[0145] S505b: Whether the reflected power decreases. If yes, proceed to S506b; if no, proceed to S504a.

[0146] If the reverse motion of the motor can reduce the reflected power of the RF power supply, it can be determined that the reverse operation of the motor can increase the output power of the RF power supply, and then the minimum value of the reflected power can be found during the reverse motion of the motor.

[0147] Anyway, it can be determined that the forward motion of the motor deviates from the resonance point corresponding to the RF device (ie, the phase difference between the voltage signal and the current signal increases). At this time, it is necessary to adjust the movement direction of the motor from reverse motion to forward motion in time.

[0148] S506b: Whether the reflected power increases by 2W in the reverse direction. If so, proceed to S507; if not, continue to control the motor movement.

[0149] S507: End.

[0150] That is, the motor movement is stopped, and the plate spacing of the capacitor in the radio frequency device is no longer adjusted by the motor.

[0151] In summary, in the power regulation method provided in the embodiment of the present application, the voltage signal and the current signal in the RF device of the ion implanter can be subjected to phase discrimination processing to obtain a phase discrimination result, so that it can be determined whether the voltage signal and the current signal in the RF device are in phase according to the phase discrimination result, and further it can be determined whether the output power of the RF power supply is a larger output power. In addition, by detecting in real time whether the reflected power opposite to the output power change of the RF power supply satisfies the preset reflected power condition, and adjusting the plate spacing of the capacitor in the RF device to change the magnitude of the reflected power, it can be ensured that the RF power supply maintains a larger output power during the operation of the RF device.

[0152] Further, based on the same technical concept, the embodiment of the present application provides a power regulation device, which is used to implement the above method flow of the embodiment of the present application. Figure 6 As shown, the power regulation device 600 may include: a signal phase detection module 601 and a capacitance adjustment module 602, wherein:

[0153] The signal phase detection module 601 is used to perform phase detection processing on the voltage signal and the current signal in the radio frequency device of the ion implanter to obtain a phase detection result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase detection result represents the phase difference between the voltage signal and the current signal;

[0154] The capacitor adjustment module 602 is used to adjust the plate spacing of the capacitor in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets a preset reflected power condition; wherein the reflected power condition is used to indicate the output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

[0155] In an optional embodiment, when adjusting the plate spacing of a capacitor in the radio frequency device based on the phase detection result, the capacitance adjustment module 602 is specifically used to:

[0156] Based on the phase detection result, the first zero point of the voltage signal and the current signal in the unit signal cycle corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal cycle;

[0157] The plate distance of the capacitor is adjusted based on the first zero point and the first resonance point set for the first zero point.

[0158] In an optional embodiment, when adjusting the plate distance of the capacitor based on the first zero point and the first resonance point set for the first zero point, the capacitance adjustment module 602 is specifically used to:

[0159] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, a first control instruction is sent to the motor set for the capacitor; the first control instruction is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, and the first direction is a direction of reducing the plate spacing of the capacitor;

[0160] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonance point, a second control instruction is sent to the motor; the second control instruction is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, and the second direction is the direction of increasing the plate spacing of the capacitor.

[0161] In an optional embodiment, when adjusting the plate spacing of a capacitor in the radio frequency device based on the phase detection result, the capacitance adjustment module 602 is specifically used to:

[0162] Based on the phase detection result, a second zero point of the voltage signal and the current signal in a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal in the unit signal period;

[0163] The plate distance of the capacitor is adjusted based on the second zero point and the second resonance point set for the second zero point.

[0164] In an optional embodiment, when adjusting the plate distance of the capacitor based on the second zero point and the second resonance point set for the second zero point, the capacitance adjustment module 602 is specifically used to:

[0165] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, a third control instruction is sent to the motor set for the capacitor; the third control instruction is used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction, wherein the first direction is a direction of reducing the plate spacing of the capacitor, and the second direction is a direction of increasing the plate spacing of the capacitor;

[0166] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonance point, a fourth control instruction is sent to the motor; the fourth control instruction is used to instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction.

[0167] In an optional embodiment, if the following conditions are met, the capacitance adjustment module 602 determines that the reflected power of the RF power source meets the preset reflected power condition:

[0168] In the process of adjusting the plate spacing of the capacitor, the reflected power changes by first decreasing and then increasing.

[0169] In an optional embodiment, when adjusting the plate spacing of the capacitor in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition, the capacitance adjustment module 602 is specifically used to:

[0170] When it is determined that the reflected power meets the reflected power condition, a fifth control instruction is sent to the motor set for the capacitor; the fifth control instruction is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0171] Based on the description of the above method embodiment and device embodiment, the exemplary embodiment of the present invention further provides an electronic device, including: at least one processor; and a memory connected to the at least one processor in communication. The memory stores a computer program that can be executed by the at least one processor, and the computer program is used to enable the electronic device to perform the method according to the embodiment of the present invention when executed by the at least one processor.

[0172] An embodiment of the present application also provides a non-transitory computer-readable storage medium storing a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to execute a method according to an embodiment of the present application.

[0173] An embodiment of the present application also provides a computer program product, including a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to execute a method according to an embodiment of the present application.

[0174] See also Figure 7As shown, the structured block diagram of the electronic device 700 that can be used as the server or client of the present application will now be described, which is an example of the hardware device that can be applied to various aspects of the present application. The electronic device is intended to represent the computer device of various forms of digital electronics, such as, laptop computers, desktop computers, workbenches, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as, personal digital processing, cellular phones, smart phones, wearable devices and other similar computing devices. The components shown herein, their connections and relationships, and their functions are only used as examples, and are not intended to limit the implementation of the present application described herein and / or required.

[0175] like Figure 7 As shown, the electronic device 700 includes a computing unit 701, which can perform various appropriate actions and processes according to a computer program stored in a read-only memory (ROM) 702 or a computer program loaded from a storage unit 708 to a random access memory (RAM) 703. In the RAM 703, various programs and data required for the operation of the device 700 can also be stored. The computing unit 701, the ROM 702, and the RAM 703 are connected to each other via a bus 704. An input / output (I / O) interface 705 is also connected to the bus 704.

[0176] A plurality of components in the electronic device 700 are connected to the I / O interface 705, including: an input unit 706, an output unit 707, a storage unit 708, and a communication unit 709. The input unit 706 may be any type of device capable of inputting information to the electronic device 700, and the input unit 706 may receive input digital or character information, and generate key signal inputs related to user settings and / or function control of the electronic device. The output unit 707 may be any type of device capable of presenting information, and may include but is not limited to a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 708 may include but is not limited to a disk, an optical disk. The communication unit 709 allows the electronic device 700 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks, and may include but is not limited to a modem, a network card, an infrared communication device, a wireless communication transceiver, and / or a chipset, such as a Bluetooth device, a WiFi device, a worldwide interoperability for microwave access (WiMax) device, a cellular communication device, and / or the like.

[0177] The computing unit 701 may be a variety of general and / or special processing components with processing and computing capabilities. Some examples of the computing unit 701 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, digital signal processors (DSP), and any appropriate processors, controllers, microcontrollers, etc. The computing unit 701 performs the various methods and processes described above. For example, in some embodiments, the power regulation method described above may be implemented as a computer software program, which is tangibly included in a machine-readable medium, such as a storage unit 708. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 700 via the ROM 702 and / or the communication unit 709. In some embodiments, the computing unit 701 may be configured to perform the power regulation method described above in any other appropriate manner (e.g., by means of firmware).

[0178] The program code for implementing the method of the present application can be written in any combination of one or more programming languages. These program codes can be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that the program code, when executed by the processor or controller, implements the functions / operations specified in the flow chart and / or block diagram. The program code can be executed entirely on the machine, partially on the machine, partially on the machine and partially on a remote machine as a stand-alone software package, or entirely on a remote machine or server.

[0179] In the context of the present application, a machine-readable medium may be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, device, or equipment. A machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, device, or equipment, or any suitable combination of the foregoing. A more specific example of a machine-readable storage medium may include an electrical connection based on one or more lines, a portable computer disk, a hard disk, a RAM, a ROM, an erasable programmable read-only memory (EPROM) or a flash memory, an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0180] As used herein, the terms "machine-readable medium" and "computer-readable medium" refer to any computer program product, apparatus, and / or device (e.g., disk, optical disk, memory, programmable logic device (PLD)) for providing machine instructions and / or data to a programmable processor, including a machine-readable medium that receives machine instructions as a machine-readable signal. The term "machine-readable signal" refers to any signal for providing machine instructions and / or data to a programmable processor.

[0181] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device (e.g., a cathode ray tub (CRT) or a liquid crystal display (LCD) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user can provide input to the computer. Other types of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0182] The systems and techniques described herein can be implemented in a computing system that includes back-end components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes front-end components (e.g., a user computer with a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such back-end components, middleware components, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), and the Internet.

[0183] A computer system may include clients and servers. Clients and servers are generally remote from each other and usually interact through a communication network. The relationship of client and server is generated by computer programs running on respective computers and having a client-server relationship to each other.

[0184] Furthermore, it should be understood that what is disclosed above is only a preferred embodiment of the present application, and certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the claims of the present invention are still within the scope covered by the present application.

Claims

1. A power regulation method, characterized in that: include: Performing phase discrimination processing on a voltage signal and a current signal in a radio frequency device of an ion implanter to obtain a phase discrimination result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase discrimination result represents a phase difference between the voltage signal and the current signal; Based on the phase detection result, the plate spacing of the capacitor in the RF device is adjusted until the reflected power of the RF power supply corresponding to the RF device meets a preset reflected power condition; wherein the reflected power condition is used to indicate an output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

2. The method according to claim 1, characterized in that The step of adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result includes: Based on the phase discrimination result, a first zero point of the voltage signal and the current signal in a unit signal period corresponding to the voltage signal is obtained; the first zero point is an intersection point of a current waveform of the current signal and a voltage waveform of the voltage signal in the unit signal period; The plate distance of the capacitor is adjusted based on the first zero point and a first resonance point set for the first zero point.

3. The method according to claim 2, characterized in that The adjusting the plate distance of the capacitor based on the first zero point and a first resonance point set for the first zero point comprises: If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonance point, a first control instruction is sent to the motor set for the capacitor; the first control instruction is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, and the first direction is a direction of reducing the plate spacing of the capacitor; If the frequency value corresponding to the first zero point is smaller than the frequency value corresponding to the first resonance point, a second control instruction is sent to the motor; the second control instruction is used to instruct the motor to drive the first plate of the capacitor to move along a second direction, and the second direction is the direction of increasing the plate spacing of the capacitor.

4. The method according to claim 1, characterized in that The step of adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result includes: Based on the phase discrimination result, a second zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period; The plate distance of the capacitor is adjusted based on the second zero point and a second resonance point set for the second zero point.

5. The method according to claim 1, characterized in that The adjusting the plate distance of the capacitor based on the second zero point and a second resonance point set for the second zero point comprises: If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonance point, a third control instruction is sent to the motor set for the capacitor; the third control instruction is used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction, wherein the first direction is a direction of reducing the plate spacing of the capacitor, and the second direction is a direction of increasing the plate spacing of the capacitor; If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonance point, a fourth control instruction is sent to the motor; the fourth control instruction is used to instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction.

6. The method according to any one of claims 1 to 5, characterized in that If the following conditions are met, it is determined that the reflected power of the RF power source meets the preset reflected power condition: In the process of adjusting the plate spacing of the capacitor, the reflected power changes by first decreasing and then increasing.

7. The method according to any one of claims 1 to 5, characterized in that The step of adjusting the plate spacing of the capacitor in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power source corresponding to the radio frequency device meets a preset reflected power condition includes: When it is determined that the reflected power satisfies the reflected power condition, a fifth control instruction is sent to the motor set for the capacitor; the fifth control instruction is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

8. A power regulating device, characterized in that: include: A signal phase detection module, used for performing phase detection processing on a voltage signal and a current signal in a radio frequency device of an ion implanter to obtain a phase detection result; wherein the frequency of the voltage signal is the same as the frequency of the current signal, and the phase detection result represents a phase difference between the voltage signal and the current signal; A capacitance adjustment module is used to adjust the plate spacing of the capacitor in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition; wherein the reflected power condition is used to indicate an output power range set for the radio frequency power supply, and the output power range includes the maximum output power of the radio frequency power supply.

9. An electronic device, comprising: processor; as well as Memory for storing programs, The program includes instructions, which, when executed by the processor, cause the processor to perform the method according to any one of claims 1 to 7.

10. A non-transitory computer-readable storage medium storing computer instructions, wherein: The computer instructions are used to cause the computer to execute the method according to any one of claims 1 to 7.

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