Turnover mechanism

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a turnover mechanism which comprises a frame, a rotating mechanism is assembled on the frame through a bearing pressing ring and a bearing adjusting ring which are embedded, the rotating mechanism is driven to turn over through a driving mechanism installed on one side of the frame, and the rotating mechanism comprises a set of rotating discs connected through a transmission shaft; the clamping jaw mechanism comprises an inner clamping jaw assembly and an outer clamping jaw assembly which are symmetrically arranged on the rotating disc and are staggered in the radial direction; the inner clamping jaw assembly and the outer clamping jaw assembly respectively comprise at least one telescopic clamping jaw finger, and the base plate is locked and released under the overturning of the rotating mechanism through the telescopic action of the clamping jaw fingers. Through the reciprocating circulation of the two processes, the turnover device can automatically and continuously turn over the substrates, the intermediate time interval is shortened, the turnover efficiency is improved, meanwhile, the turnover mechanism can turn over the multiple layers of substrates at the same time through the multiple clamping jaw fingers arranged on the inner clamping jaw and the outer clamping jaw, and the turnover efficiency is further improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing equipment, and in particular to a flip mechanism. Background Art

[0002] In the semiconductor manufacturing industry, flipping substrates upside down is a common operation requirement in fully automatic machines.

[0003] In order to meet this demand, some designs of substrate flipping mechanisms have already existed.

[0004] The existing patent for invention of a substrate flipping and centering device with the publication number CN103811397B discloses a holding part II, a holding part I, a flipping driving part, a translation driving part, a control part I, a control part II, a transmission mechanism I and a transmission mechanism II, wherein the holding part II and the holding part I are connected to the translation driving part through the transmission mechanism II, and connected to the flipping driving part through the transmission mechanism I, and the holding part II and the holding part I are driven by the translation driving part and the flipping driving part to realize the centering and flipping of the substrate; the translation driving part and the flipping driving part are connected to the control part II and the control part I respectively. The present invention can realize the flipping and centering of the wafer without occupying the conveying time of the robot arm, and has a simple structure and flexible control.

[0005] However, the existing substrate flipping mechanism has the following defects: a single-layer flipping unit is used, but its upper and lower clamping structures occupy too much height, which limits the overlapping flipping of multi-layer substrates; the clamping integration is not high, the installation method is limited, and it is difficult to integrate and arrange it on the film conveying path of the automatic robot. Summary of the invention

[0006] The object of the present invention is to provide a flipping mechanism to solve the problem that the single-layer flipping unit mentioned in the background art restricts the overlapping flipping of multi-layer substrates.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a flipping mechanism, including a frame, on which a rotating mechanism is assembled through an embedded bearing pressure ring and a bearing adjustment ring, and the rotating mechanism is driven to flip through a driving mechanism installed on one side of the frame, and the rotating mechanism includes a group of rotating discs connected by a transmission shaft; a clamping mechanism, including an inner clamping jaw assembly and an outer clamping jaw assembly symmetrically arranged on the rotating disc and staggered in the radial direction; the inner clamping jaw assembly and the outer clamping jaw assembly each include at least one retractable clamping jaw finger, and through their retractable action, the substrate is locked and released when the rotating mechanism is flipped.

[0008] As a further description of the above technical solution:

[0009] The inner and outer jaw assemblies are both mounted with translation cylinders through cylinder mounting parts, and the outer jaw mounting plates respectively connected to the output ends of the translation cylinders are longer than the inner jaw mounting plates. One end of the outer jaw mounting plate is fixedly connected to a jaw connecting piece 1, and the vertical height of the jaw connecting piece 2 fixedly connected to one end of the inner jaw mounting plate is lower than the height of the jaw connecting piece 1.

[0010] As a further description of the above technical solution:

[0011] The driving mechanism comprises a bracket installed on the frame and a rotating motor thereon, and a power output shaft of the rotating motor is connected with a rotating shaft on the rotating disc via a coupling.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The present invention can respectively play the function of holding a sheet through the inner and outer clamping jaw components, the inner clamping jaw extends out of the holding sheet, and the outer clamping jaw is opened and closed to realize the locking and releasing functions of the substrate; after the substrate is rotated 180 degrees by the rotating mechanism, the outer clamping jaw extends out of the holding sheet, and the inner clamping jaw is opened and closed to realize the locking and releasing functions of the substrate, and through the reciprocating cycle of these two processes, the flipping device can automatically and continuously flip the substrate, reduce the intermediate time interval, and improve the flipping efficiency. At the same time, by using a plurality of clamping jaw fingers arranged on the inner and outer clamping jaws, the flipping mechanism can flip multiple layers of substrates at the same time, and further improve the flipping efficiency; in addition, by using the retractable clamping jaw, the flipping mechanism can be applicable to flipping substrates of various sizes, thereby expanding the application scope of the flipping mechanism; compared with manual flipping, the present mechanism greatly improves the automation level of the flipping operation and reduces the labor cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0016] Figure 2 It is a schematic diagram of the framework structure of the present invention;

[0017] Figure 3 It is a side view of the overall structure of the present invention;

[0018] Figure 4 It is a schematic diagram of the rotating mechanism of the present invention;

[0019] Figure 5 It is a schematic diagram of the inner clamping jaw assembly of the present invention;

[0020] Figure 6 It is a schematic diagram of the outer clamping jaw assembly of the present invention;

[0021] Figure 7 For the present invention Figure 1 Enlarged view of point A in the middle.

[0022] Description of reference numerals:

[0023] 10. Frame; 11. Bearing pressure ring; 12. Bearing adjustment ring;

[0024] 20. Rotating mechanism; 21. Rotating disc; 22. Rotating shaft; 23. Transmission shaft;

[0025] 30. driving mechanism; 31. rotating motor; 32. coupling; 33. bracket;

[0026] 40. Gripper mechanism; 41. Inner gripper assembly; 413. Inner gripper mounting plate; 414. Gripper connector 2; 42. Outer gripper assembly; 423. Outer gripper mounting plate; 424. Gripper connector 1; 43. Gripper finger; 44. Cylinder mounting piece; 45. Translation cylinder. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] See also Figures 1 to 7 The present invention provides a flipping mechanism, including a frame 10, on which a rotating mechanism 20 is assembled through an embedded bearing pressure ring 11 and a bearing adjustment ring 12, and the rotating mechanism 20 is driven to flip through a driving mechanism 30 installed on one side of the frame 10, and the rotating mechanism 20 includes a group of rotating disks 21 connected via a transmission shaft 23; the driving mechanism 30 includes a bracket 33 installed on the frame 10 and a rotating motor 31 thereon, and a power output shaft of the rotating motor 31 is connected to a rotating shaft 22 on the rotating disk 21 via a coupling 32.

[0029] Among them, the rotating motor 31 is used to drive the flipping of the entire rotating mechanism 20 to achieve a 180° rotation of the substrate; the rotating motor 31 is installed on the bracket 33 by bolts, and the power of the rotating motor 31 is transmitted to the rotating mechanism 20 through the coupling 32, thereby driving the clamping mechanism 40 in the rotating mechanism 20 to rotate.

[0030] In addition, it is worth noting that the bearing pressure ring 11 is one of the core components of the rotating mechanism 20. It bears the weight of the entire rotating structure and realizes the transmission of power through the connection with the motor. During the substrate flipping process, the bearing pressure ring 11 ensures the smooth and precise rotation of the rotating structure; the bearing adjustment ring 12 is used to adjust the coaxiality between the bearing pressure ring 11 and the motor shaft to ensure the precise alignment between the two. This helps to reduce friction, wear and vibration, and improve the operating efficiency and life of the flipping mechanism.

[0031] like Figure 1 , Figure 4-Figure 7 As shown, the clamping mechanism 40 includes an inner clamping assembly 41 and an outer clamping assembly 42 which are symmetrically arranged on the rotating disk 21 and staggered in the radial direction; the inner clamping assembly 41 and the outer clamping assembly 42 each include at least one retractable clamping finger 43, and through the retracting action thereof, the substrate is locked and released when the rotating mechanism 20 is flipped.

[0032] In further detail, the inner jaw assembly 41 and the outer jaw assembly 42 are both mounted with a translation cylinder 45 through a cylinder mounting member 44, and the outer jaw mounting plates 423 respectively connected to the output ends of the translation cylinder 45 are longer than the inner jaw mounting plates 413. One end of the outer jaw mounting plates 423 is fixedly connected with a jaw connecting member 1 424, and the vertical height of the jaw connecting member 2 414 fixedly connected to one end of the inner jaw mounting plates 413 is lower than the height of the jaw connecting member 1 424. This ensures that the inner jaw assembly 41 and the outer jaw assembly 42 will not interfere with each other when they are extended and retracted.

[0033] When the substrate needs to be flipped, the inner clamping jaw assembly 41 is in an extended state and the outer clamping jaw assembly 42 is in a retracted state. At this time, the substrate is placed on the clamping jaw fingers 43 in the inner clamping jaw assembly 41, and then the translation cylinder 45 is used to push the outer clamping jaw assembly 42 to extend, and the clamping jaw fingers 43 in the outer clamping jaw assembly 42 and the clamping jaw fingers 43 in the inner clamping jaw assembly 41 form a closed space to lock the substrate; after the rotary motor 31 drives the rotary structure to rotate 180°, the translation cylinder 45 controls the inner clamping jaw assembly 41 to retract, and at this time the clamping jaw fingers 43 in the outer clamping jaw assembly 42 carry the substrate, so that the substrate is released and can be taken out;

[0034] For the flipped substrate, the outer clamping jaw assembly 42 is in an extended state and the inner clamping jaw assembly 41 is in a retracted state. At this time, the substrate is placed on the clamping jaw fingers 43 in the outer clamping jaw assembly 42, and then the inner clamping jaw assembly 41 is extended by the translation cylinder 45, and the clamping jaw fingers 43 in the inner clamping jaw assembly 41 and the clamping jaw fingers 43 in the outer clamping jaw assembly 42 form a closed space to lock the substrate; the substrate is flipped again; after the motor drives the rotating mechanism 20 to rotate 180°, the outer clamping jaw assembly 42 retracts, and at this time the inner clamping jaw assembly 41 holds the substrate, the substrate is released, and it can be taken out; through the reciprocating cycle of these two processes, the flipping device can automatically and continuously flip the substrate, reduce the intermediate time interval, and improve the flipping efficiency.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A turning mechanism, comprising a frame (10), wherein a rotating mechanism (20) is mounted on the frame (10) via an embedded bearing pressure ring (11) and a bearing adjustment ring (12), wherein the rotating mechanism (20) is driven to turn via a driving mechanism (30) mounted on one side of the frame (10), and wherein: The rotating mechanism (20) comprises a group of rotating discs (21) connected via a transmission shaft (23); A clamping jaw mechanism (40) comprises an inner clamping jaw assembly (41) and an outer clamping jaw assembly (42) which are symmetrically arranged on a rotating disc (21) and staggered in a radial direction; The inner clamping jaw assembly (41) and the outer clamping jaw assembly (42) each include at least one retractable clamping jaw finger (43), and through the retracting action of the clamping jaw finger, the base plate is locked and released when the rotating mechanism (20) is turned over.

2. A turning mechanism according to claim 1, characterized in that: The inner clamping jaw assembly (41) and the outer clamping jaw assembly (42) are both mounted with a translation cylinder (45) via a cylinder mounting member (44), and the outer clamping jaw mounting plates (423) respectively connected to the output ends of the translation cylinder (45) are longer than the inner clamping jaw mounting plates (413).

3. A turning mechanism according to claim 2, characterized in that: One end of the outer clamping jaw mounting plate (423) is fixedly connected to a clamping jaw connecting piece 1 (424), and the vertical height of the clamping jaw connecting piece 2 (414) to which one end of the inner clamping jaw mounting plate (413) is fixedly connected is lower than the height of the clamping jaw connecting piece 1 (424).

4. A turning mechanism according to claim 1, characterized in that: The driving mechanism (30) comprises a bracket (33) mounted on the frame (10) and a rotating motor (31) mounted thereon, wherein a power output shaft of the rotating motor (31) is connected to a rotating shaft (22) on the rotating disc (21) via a coupling (32).

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