Pipe dismounting tool

Abstract

The application discloses a pipeline dismounting tool, and relates to the field of semiconductor manufacturing equipment.The pipeline dismounting tool comprises two clamp arms, the clamp arms are provided with rotating parts, the two clamp arms are cross-rotatingly connected through the rotating parts, a handle area is formed on one side of the rotating part of the two clamp arms, and a working area is formed on the other side; at least one clamping assembly is arranged, the clamping assembly comprises two clamping pieces which are connected with the clamp arms on one side of the working area respectively, the clamping pieces are respectively provided with clamping parts, the clamping parts are arranged at right angles with the corresponding clamp arms, and the pipeline is parallel to the central axes of the two clamp arms in the state of clamping the pipeline; a detection part is arranged at the tail end of the clamping piece, the detection part is configured to be in contact with the inner wall of the process pipe of the furnace pipe equipment when the pipeline is parallel to the process pipe of the furnace pipe equipment; and a base is perpendicular to the central axes. Through the cooperation of the base and the detection part, the installation precision of the pipeline is improved, so that the perpendicularity and parallelism of the pipeline installation are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing equipment, in particular to a pipe dismounting tool. BACKGROUND

[0002] The furnace tube equipment is the main equipment for the processes of semiconductor diffusion, oxidation and annealing, and the precision and uniformity of the reaction gas flow control are the key performance indicators of the equipment.

[0003] In the furnace tube equipment, the reaction gas enters the reaction cavity from the gas path system through the gas inlet pipe, and the heating furnace is outside the reaction cavity to heat the reaction cavity.

[0004] The gas inlet pipe is generally made of quartz, and the bottom of the gas inlet pipe is placed in an adapter made of metal. The furnace tube equipment usually selects different numbers and sizes of gas inlet pipes according to different process procedures, but since the gas inlet pipe is relatively long, it is difficult to install it in the adapter, and when multiple gas inlet pipes are installed at the same time, it is difficult to ensure the perpendicularity of each gas inlet pipe and the parallelism between them. Once there is an error in the installation operation, any one or more gas inlet pipes will be tilted, which is extremely easy to rub against the reaction cavity and generate particulate matter, affecting the process. Or the gas inlet pipe is tilted and hits the boat or wafer, causing it to break and affecting process safety.

[0005] Currently, the installation and dismounting of the gas inlet pipe is usually a manual operation. Since it is a manual operation, the heating furnace must be turned off during the operation, so that the reaction cavity is cooled to room temperature, and then the personnel wearing professional gloves install and dismount the gas inlet pipe with their hands. This method has two major drawbacks: first, the heating furnace must be cooled in advance, which is very time-consuming, because the heating furnace needs time to cool down, and it also needs time to heat up again, and the time is very long, usually two hours; second, the installation and dismounting completely rely on manual operation, and the installation and dismounting precision is difficult to guarantee, and collision is easy to occur. SUMMARY

[0006] The present application provides a pipe dismounting tool, which is beneficial to the installation precision of the pipe.

[0007] The present application solves the above technical problems by the following technical scheme:

[0008] A pipe dismounting tool for dismounting or installing the pipe in the furnace tube equipment, comprising:

[0009] Two clamping arms, each of the clamping arms has a rotating part, the two clamping arms are cross-rotatably connected through the rotating parts, a handle area is formed on one side of the rotating parts of the two clamping arms, and a working area is formed on the other side;

[0010] At least one clamping assembly, the clamping assembly comprising two clamping pieces connected with the jaw arms on one side of the working area respectively, the clamping pieces being respectively provided with clamping parts, the clamping parts being arranged at right angles with the corresponding jaw arms, when the two clamping pieces are closed, the clamping parts form a clamping area matched with the pipeline to clamp the pipeline, and the central axes of the two jaw arms are parallel to the pipeline;

[0011] A detection part is arranged at the end of the clamping piece, the detection part being configured to contact the inner wall of the process pipe of the furnace pipe equipment when the pipeline is parallel to the process pipe of the furnace pipe equipment;

[0012] A base is configured to cooperate with the reference part of the furnace pipe equipment during installation of the pipeline, the base being perpendicular to the central axis to ensure the verticality of the pipeline installation.

[0013] The positive progress effect of the present application is that the clamping parts of the clamping pieces are arranged at right angles with the jaw arms, which facilitates clamping of the pipeline extending in the vertical direction. The base cooperates with the reference part of the furnace pipe equipment to provide an installation reference for installation of the pipeline, thereby ensuring the verticality of the pipeline installation. After the pipeline is inserted into the adapter of the furnace pipe equipment, if the pipeline is parallel to the inner wall of the furnace pipe equipment, the detection part will contact the inner wall of the process pipe of the furnace pipe equipment. By clamping at multiple positions of the pipeline, it is checked whether the detection part contacts the inner wall of the process pipe, which can detect the parallelism of the pipeline, thereby facilitating adjustment of the parallelism of the pipeline. The parallelism of the pipeline can be adjusted by adjusting the bolts of the adapter. Under the cooperation of the base and the detection part, the installation accuracy of the pipeline is improved to ensure the verticality and parallelism of the pipeline installation, and the pipeline is not prone to collision during installation. In addition, the pipeline can be disassembled at high temperature (100-200℃) by the pipeline disassembly tool, the hand does not directly contact the pipeline, and there is no need to wait for the pipeline to cool to room temperature, which is beneficial to improve the work efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 FIG. 1 is a structure schematic diagram of a closed state of a pipeline disassembly tool of Embodiment 1 of the present application;

[0015] Figure 2 FIG. 2 is a structure schematic diagram of an open state of the pipeline disassembly tool of Embodiment 1 of the present application;

[0016] Figure 3 FIG. 3 is a schematic diagram of a use state of the pipeline disassembly tool of Embodiment 1 of the present application in a furnace pipe equipment;

[0017] Figure 4 FIG. 4 is a schematic diagram of cooperation of a base of the pipeline disassembly tool of Embodiment 1 of the present application with a reference part of the furnace pipe equipment;

[0018] Figure 5 This is a schematic diagram of the clamping component of the pipeline disassembly fixture in Embodiment 1 of this application;

[0019] Figure 6 This is a schematic diagram of the clamp arm of the pipe disassembly tool according to Embodiment 1 of this application;

[0020] Figure 7 This is a schematic diagram of the base of the pipeline disassembly fixture in Embodiment 1 of this application;

[0021] Figure 8 This is a schematic diagram of the clamp arm and clamping assembly of the pipe disassembly and assembly tool according to Embodiment 2 of this application. Detailed Implementation

[0022] The present application is further illustrated below by way of embodiments, but this does not limit the present application to the scope of the embodiments.

[0023] Example 1

[0024] like Figures 1-4 As shown, this embodiment provides a pipe disassembly and assembly fixture for disassembling or installing pipes 410 in a furnace tube device 400. The fixture includes two clamping arms 200, a clamping assembly, a detection part 130, and a base 300. Each clamping arm 200 has a rotating part 220, and the two clamping arms 200 are rotatably connected via the rotating parts 220. A handle area 240 is formed on one side of the rotating part 220 of each clamping arm 200, and a working area 230 is formed on the other side. The clamping assembly includes two clamping members 100, each connected to one of the clamping arms 200 on one side of the working area 230. Each clamping member 100 is provided with a clamping part 110, which is perpendicular to the corresponding clamping arm 200. When the clamping member 100 is closed, the clamping part 110 forms a clamping area 120 that matches the pipe 410, thereby clamping the pipe 410. With the pipe 410 clamped, the pipe 410 is parallel to the central axis 250 of the two clamping arms 200. A detection unit 130 is located at the end of the clamping member 100. The detection unit 130 is configured to contact the inner wall of the process tube 420 of the furnace tube equipment 400 when the pipe 410 is installed to the furnace tube equipment 400 and parallel to the process tube 420 of the furnace tube equipment 400. The base 300 is configured to cooperate with the reference part 430 of the furnace tube equipment 400 during the installation of the pipe 410. The base 300 is perpendicular to the central axis 250 to ensure the verticality of the pipe 410 installation. The central axis 250 is the center line of the rotating part 220 in the vertical direction.

[0025] The clamping part 110 of the clamping member 100 is arranged at a right angle with the arm 200, facilitating clamping of the pipe 410 extending in the vertical direction. The base 300 cooperates with the reference part 430 of the furnace pipe device 400, and can provide an installation reference for the pipe 410. The pipe 410 is parallel to the central axis 250, and the base 300 is perpendicular to the central axis 250, that is, the pipe 410 is perpendicular to the base 300, thereby ensuring the verticality of the pipe 410 installation. After the pipe 410 is inserted into the adapter 440 of the furnace pipe device 400, if the pipe 410 is parallel to the inner wall of the process pipe 420 of the furnace pipe device 400, the detection part 130 will be in contact with the inner wall of the process pipe 420 of the furnace pipe device 400. By clamping at multiple positions of the pipe 410, it can be checked whether the detection part 130 is in contact with the inner wall of the process pipe 420, so as to detect the parallelism of the pipe 410, thereby facilitating adjustment of the parallelism of the pipe 410. The parallelism of the pipe 410 can be adjusted by adjusting the bolts of the adapter 440. With the cooperation of the base 300 and the detection part 130, the installation accuracy of the pipe 410 can be improved, so as to ensure the verticality and parallelism of the pipe 410 installation, and the pipe 410 is not easy to collide during installation. In addition, the pipe 410 can be disassembled by the pipe disassembly tool at high temperature (for example, 100-200°C), and the hand does not directly contact the pipe 410, so it is not necessary to wait for the pipe 410 to completely cool to room temperature, which is beneficial to improve the work efficiency.

[0026] In the embodiment, the clamping member 100 further comprises an adapter part 140. The adapter part 140 is perpendicular to the clamping part 110, and the clamping part 110 is connected to the arm 200 through the adapter part 140.

[0027] In some embodiments, the adapter part 140 can not be provided, and the clamping part 110 is directly connected to the arm 200.

[0028] As shown in Figs. 1-3, the clamping member 100 comprises a clamping part 110 and a base 300. The clamping part 110 is arranged at a right angle with the arm 200, and the base 300 is arranged at a right angle with the arm 200. Figure 1 and Figure 5 In the embodiment, the clamping member 100 is detachably connected to the arm 200. Specifically, the clamping member 100 and the arm 200 can be connected by screws or other detachable ways, and the clamping member 100 is convenient to replace, so as to adapt to different types of pipes.

[0029] In other embodiments, the clamping member 100 and the arm 200 can also be designed in an integrated manner.

[0030] In the embodiment, the shape of the clamping area 120 formed when the two clamping members 100 are closed is any one of a circle, an ellipse or a square, so as to adapt to a circular pipe, an elliptical pipe or a square pipe.

[0031] In the embodiment, the hardness of the clamping portion 110 is lower than that of the pipe 410. During clamping, the clamping portion 110 is less likely to cause damage to the pipe 410. Specifically, the clamping portion 110 can be made of PTFE material.

[0032] In the embodiment, the hardness of the detecting portion 130 is lower than that of the process pipe 420. During dismounting of the pipe 410, the detecting portion 130 is less likely to damage the inner wall of the process pipe 420.

[0033] Further, the end of the detecting portion 130 that is in contact with the inner wall of the process pipe 420 is arc-shaped. When the arc-shaped structure is in contact with the inner wall of the process pipe 420, it is less likely to cause scratches on the inner wall of the process pipe 420.

[0034] The structure of the clamp arm 200 is shown in Figure 1 and Figure 6 In the embodiment, the handle area 240 of the clamp arm 200 is provided with an anti-skid portion 210. Specifically, the anti-skid portion 210 is designed as an anti-skid groove, which is less likely to slip when gripped by hand.

[0035] In the embodiment, the structure of the rotating portion 220 of the clamp arm 200 is circular, and the rotating portion 220 is further provided with an opening 222 for connecting a pin shaft 221. The structure of the rotating connection is not limited to this, and other structures capable of achieving rotating connection, such as a hinge structure, can also be used in some embodiments.

[0036] The structure of the base 300 is shown in Figure 1 , Figure 2 , Figure 3 and Figure 7As shown, in the embodiment, the base 300 and the arm 200 are designed separately. The base 300 comprises two slots 310 for accommodating the arms 200, and the arms 200 are perpendicular to the base 300. During the pipe installation process, the base 300 is matched with the reference part 430 of the furnace pipe equipment 400 to ensure that the base 300 is in a horizontal state. The base 300 remains stationary, the two arms 200 are closed to clamp the pipe 410, the handle area of the arm 200 is placed in the slot 310, and the pipe 410 is inserted into the adapter 440. Under the limiting action of the slot 310, the central axis 250 of the two arms 200 and the base 300 always remain perpendicular. Since the pipe 410 is parallel to the central axis 250, at this time, the pipe 410 is perpendicular to the base 300, thereby ensuring the perpendicularity of the pipe installation. During the parallelism detection process of the pipe 410 and the inner wall of the process pipe 420 of the furnace pipe equipment 400, the base 300 remains stationary, the arm 200 moves in the vertical direction to clamp the pipe 410 at different positions by the clamp 100, and when the pipe 410 is clamped, the arm 200 is located in the slot 310 of the base 300, which ensures that the arm 200 does not rotate and the central axis 250 of the arm 200 remains perpendicular to the base 300, thereby ensuring the accuracy of the parallelism detection.

[0037] As shown in FIG. 1, the base 300 comprises a stepped part 320 matched with the reference part 430. The stepped part 320 is matched with the reference part 430 to ensure the levelness of the base 300. Figure 4 Figure 7 As shown in FIG. 1, the base 300 comprises a stepped part 320 matched with the reference part 430. The stepped part 320 is matched with the reference part 430 to ensure the levelness of the base 300.

[0038] In the embodiment, the reference part 430 is a ferromagnetic material, and the base 300 is a magnet. The base 300 can be adsorbed on the reference part 430, and the installation process is more convenient, which can be completed by one person.

[0039] Embodiment 2

[0040] As shown in FIG. 2, the embodiment is basically the same as the scheme in Embodiment 1, and the difference lies in that the pipe dismounting tool comprises a plurality of clamping assemblies, each clamping assembly comprises two clamps 100, the plurality of clamping assemblies are distributed in the vertical direction, the clamping assembly at the bottom is connected with the arm 200 at one side of the working area, and the adapter of the clamping assembly at the upper part is connected with the clamping assembly at the lower part. Figure 8 In some embodiments, the adapter can not be provided, and the plurality of clamping assemblies are directly arranged on the arm in the vertical direction.

[0041]

[0042] ​​By setting multiple clamping assemblies, on the one hand, the pipe is clamped more stably; on the other hand, in the parallelism detection process, the pincer arm 200 does not need to be moved, and as long as the detection parts of the two clamping assemblies are in contact with the inner wall of the process pipe, the parallelism of the pipe can be ensured, and the parallelism detection is more convenient.

[0043] Although the specific embodiments of the present application are described above, those skilled in the art should understand that this is only an example, and the protection scope of the present application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present application, and these changes and modifications all fall within the protection scope of the present application.

Claims

1. A pipe disassembly and assembly tool for disassembling or installing pipes in furnace tube equipment, characterized in that, The pipe dismounting tool comprises: two clamping arms, each of which has a rotating part, the two clamping arms being cross-rotatably connected through the rotating parts, a handle area being formed on one side of the rotating parts of the two clamping arms, and a working area being formed on the other side; at least one clamping assembly, the clamping assembly comprising two clamping pieces respectively connected with the clamping arms on one side of the working area, each of the clamping pieces being provided with a clamping part, the clamping part being arranged at a right angle with the corresponding clamping arm, when the two clamping pieces are closed, the clamping parts forming a clamping area matched with the pipe to clamp the pipe, and the central axis of the two clamping arms being parallel to the pipe; a detection part arranged at the end of the clamping piece, the detection part being configured to contact the inner wall of the process pipe of the furnace pipe equipment when the pipe is parallel to the process pipe of the furnace pipe equipment; a base configured to cooperate with a reference part of the furnace pipe equipment during installation of the pipe, the base being perpendicular to the central axis to ensure the verticality of the pipe installation.

2. The pipe dismounting tool according to claim 1, wherein The clamping piece and the clamping arm are detachably connected.

3. The pipe dismounting tool according to claim 1, wherein The shape of the clamping area is any one of a circle, an ellipse or a square.

4. The pipe dismounting tool according to claim 1, wherein The hardness of the clamping part is lower than that of the pipe.

5. The pipe dismounting tool according to claim 1, wherein The base comprises two grooves for accommodating the clamping arms, the two clamping arms being respectively located in the corresponding grooves when closed and clamping the base.

6. The pipe dismounting tool according to claim 1 or 5, wherein The base comprises a stepped part matched with the reference part, the base being matched with the reference part through the stepped part.

7. The pipe dismounting tool according to claim 1, wherein The handle area of the clamping arm is provided with an anti-slip part.

8. The pipe dismounting tool according to claim 1, wherein The reference part is a ferromagnetic material, and the base is a magnet.

9. The pipe dismounting tool according to claim 1, wherein The hardness of the detection part is lower than that of the process pipe.

10. The pipe dismounting tool according to claim 1, wherein The end of the detection part contacting the inner wall of the process pipe is arc-shaped.

11. The pipe dismounting tool according to claim 1, wherein The pipe dismounting tool comprises a plurality of clamping assemblies distributed along the vertical direction.

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