Pipe body cutting device and semiconductor processing equipment

Abstract

The invention provides a pipe body cutting device, which is applied to semiconductor processing equipment, and comprises a base body which is provided with a first end face and a second end face which are deviated from each other, the base body is internally provided with a through hole penetrating from the first end face to the second end face, and the through hole is used for a to-be-cut pipe body to penetrate through; the base body is arranged to be capable of rotating around the axis of the through hole and moving along the axis of the through hole relative to the pipe body to be cut; the cutter is arranged on the base body; the cutter body of the cutter and the radial section of the through hole form an included angle; the extension line of the cutting edge of the cutter in the extension direction penetrates through the center of the rotation circumference of the base body. The invention further provides semiconductor processing equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a tube cutting device and semiconductor processing equipment. Background Art

[0002] When the single-wafer cleaning equipment is in process, the chemical liquid is sprayed onto the surface of the wafer through the spray pipe of the spray device. Due to the requirement for precise spray position and the need to reduce the spray pipe nozzle below the fixed clamp from being splashed back by the chemical liquid, it is necessary to adjust the length of the nozzle of the spray pipe. If the nozzle is too long or uneven, it is not conducive to the precise positioning of the spray position and it is easy to cause the chemical liquid to splash back and crystallize. Therefore, the length of the nozzle is generally required to be less than 5 mm, which is difficult to achieve using traditional cutting methods.

[0003] The existing method for cutting the sprinkler pipe is to use a special pipe cutting pliers to cut it. Figure 1 As shown, the pipe cutting pliers mainly include a handle 11, a fixing seat 12, a shearing knife 13 and a rotating shaft 15. The process of cutting the pipe body 16 is as follows: the pipe body 16 is placed into the V-shaped groove 14 of the fixing seat 12, and then aligned with the position of the pipe body to be cut, and the handle 11 is pressed by hand, and the handle 11 rotates around the rotating shaft 15, and the tip of the shearing knife 13 forms a pressure perpendicular to the pipe wall and pierces the pipe wall, and the handle 11 is continuously pressed until the shearing knife 13 is inserted into the V-shaped groove 14 to cut off the pipe body 16; then, the handle 11 is released to reset the handle 11 under the action of the spring set on the rotating shaft 15.

[0004] The pipe mouth cut by the prior art has a certain degree of deformation, such as Figure 2 As shown in FIG. 1 , there is an obvious fold between the pipe opening position 21 and the pipe opening position 22. This is because the pipe wall is deformed by the pressure applied by the shearing knife 13, which ultimately leads to an uneven pipe opening after cutting. Figure 3 As shown, when the spray pipe 33 of the spray device 31 is fixed on the fixing clamp 32, there is no sufficient operating space for the existing pipe cutters, so the pipe mouth part cannot be cut to a specified length of 3 mm or less using the pipe cutters. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a tube cutting device and semiconductor processing equipment, which can solve the problems in the prior art that the tube mouth is uneven after cutting and there is not enough space to cut the assembled tube body.

[0006] In order to achieve the purpose of the present invention, a tube cutting device is provided, which is applied to semiconductor processing equipment, comprising:

[0007] A base body having a first end face and a second end face which are separated from each other, wherein a through hole is provided in the base body and passes through from the first end face to the second end face, and the through hole is used for the tube to be cut to pass through; the base body is configured to be able to rotate around the axis of the through hole and move along the axis of the through hole relative to the tube to be cut; and

[0008] A tool is arranged on the base; the tool body of the tool forms an angle with the radial section of the through hole; and the extension line of the blade of the tool in its extension direction passes through the center of the rotation circle of the base.

[0009] In some embodiments, the first end surface of the base includes a first bevel, and the first bevel forms an angle with a radial cross section of the through hole; the blade body is disposed in close contact with the first bevel.

[0010] In some embodiments, the first end surface of the substrate further includes a second inclined surface, and the second inclined surface is arranged to intersect with the first inclined surface;

[0011] The orthographic projection of the intersection line of the second bevel and the first bevel on the radial section of the through hole passes through the center of the radial section of the through hole; the orthographic projection of the blade on the radial section of the through hole coincides with the orthographic projection of the intersection line of the second bevel and the first bevel on the radial section of the through hole.

[0012] In some embodiments, the orthographic projection of a tip of the blade on the radial cross section of the through hole is located at the center of the radial cross section of the through hole;

[0013] The length of the blade in its extending direction is greater than or equal to half of the outer diameter of the tube to be cut.

[0014] In some embodiments, the angle between the second inclined surface and the first inclined surface is greater than 90°.

[0015] In some embodiments, at least two fixing members are further included, and at least one of the fixing members is disposed on both sides of the blade body. Each of the fixing members is fixedly connected to the base body for fixing the blade body to fit the first inclined surface.

[0016] In some embodiments, the angle between the tool body of the tool and the radial cross section of the through hole is greater than or equal to 10° and less than or equal to 20°.

[0017] In some embodiments, the tool body of the tool is disposed on the first end surface of the substrate;

[0018] The second end face of the base body includes a positioning face, the orientation of the positioning face is opposite to the orientation of the end face of the tube to be cut, and is used to limit and cooperate with a preset reference face fixed relatively to the tube to be cut when the cut length of the tube to be cut reaches a target length.

[0019] In some embodiments, it further comprises a rotation drive mechanism, which is drivingly connected to the base and is used to drive the base to rotate around the axis of the through hole; and / or,

[0020] It also includes a linear drive mechanism, which is transmission-connected to the base and is used to drive the base to move along the axis of the through hole.

[0021] In some embodiments, the tube cutting device is used to cut the tube body of a spray tube in a spray device of the semiconductor processing equipment.

[0022] As another technical solution, the present invention also provides a semiconductor processing equipment, including a spray device, the spray device includes at least one spray pipe, and also includes the above-mentioned tube cutting device provided by the present invention, at least one of the spray pipes is the tube to be cut.

[0023] In some embodiments, the spray device also includes a swing arm, a lifting mechanism and a rotating mechanism, wherein the lifting mechanism is transmission connected to the rotating mechanism for driving the rotating mechanism to lift and lower; the rotating mechanism is transmission connected to the swing arm for driving the free end of the swing arm to swing within a preset angle range; the free end of the swing arm is connected to the spray pipe.

[0024] The present invention has the following beneficial effects:

[0025] The tube cutting device provided by the present invention, when cutting, the tube to be cut passes through the through hole in the base, the blade of the tool contacts the end face to be cut of the tube to be cut, and at the same time the base rotates around the axis of the through hole and moves along the axis of the through hole relative to the tube to be cut, so that the blade of the tool rotates with the base while advancing along the axis of the through hole, so that the cutting of the tube body can be achieved in a progressive manner. This method can gradually cut the tube body to a required length, with high cutting accuracy and cutting efficiency, and can cut the pipe mouth part to any length. In particular, for the tube body cutting of the spray pipe in the spray device, the present invention can more accurately cut the pipe mouth part to the required length, avoid the spray position deviation caused by the excessive length of the pipe mouth part, and further reduce the frequency of crystallization of the medicine liquid at the pipe mouth, reduce the machine maintenance time, and improve the process accuracy and product quality. Moreover, by providing a through hole in the base body for the tube to be cut to pass through, combined with the use of the above-mentioned progressive cutting method, the space required for the tube cutting device provided by the present invention can be reduced, so that the assembled tube body (for example, the nozzle part of the spray pipe fixed on the fixing clamp) can be cut, solving the problem of insufficient space for cutting the assembled tube body in the prior art. On this basis, by making the blade of the tool form an angle with the radial cross section of the through hole, and the extension line of the blade in its extension direction passes through the center of the rotation circle of the base body, not only can the force on the tube wall be uniform, so that the cutting process can be made smoother, but also the shear force applied by the tool to the tube to be cut can be decomposed into an axial force along the axial direction of the through hole and a tangential force along the tangential direction of the rotation circle of the base body. The above-mentioned axial force and tangential force will not apply radial pressure to the tube to be cut, so that the flatness of the nozzle of the cut tube body can be improved.

[0026] The semiconductor processing equipment provided by the present invention solves the problem of insufficient space for cutting the assembled tube body in the prior art by adopting the tube body cutting device provided by the present invention, and can also improve the flatness of the tube mouth of the cut tube body. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A structural diagram of a pipe cutting pliers used in an existing method for cutting a sprinkler pipe;

[0028] Figure 2 A structural diagram showing the deformation of the pipe mouth cut by the prior art;

[0029] Figure 3 A structural diagram of a spray pipe of a spray device in the prior art when being fixed to a fixing clamp;

[0030] Figure 4 A three-dimensional view of the tube cutting device provided by an embodiment of the present invention from a side perspective of the first end surface of the base body;

[0031] Figure 5 An exploded view of the structure of a tube cutting device provided in an embodiment of the present invention;

[0032] Figure 6 A state diagram of the tube cutting device provided in an embodiment of the present invention when cutting a tube to be cut;

[0033] Figure 7 An assembly diagram of the pipe cutting device provided in an embodiment of the present invention when applied to a scene of cutting the pipe body of a spray pipe in a spray device;

[0034] Figure 8 A side view of a tube cutting device provided in an embodiment of the present invention;

[0035] Fig. 9 is a state diagram of the cutting tool and the tube to be cut during cutting in an embodiment of the present invention;

[0036] Fig.10 A side view of the cutting tool and the tube to be cut in the embodiment of the present invention during cutting;

[0037] Fig.11 is a schematic diagram of the association between the angle between the tool and the end surface to be cut and related parameters in an embodiment of the present invention;

[0038] Fig.12 A top view of the cutting tool and the tube to be cut in the embodiment of the present invention during cutting;

[0039] Fig.13 A top view of a tool in an embodiment of the present invention cutting two tubes to be cut with different wall thicknesses;

[0040] Fig.14 A plan view of the tube cutting device provided by an embodiment of the present invention from the perspective of one side of the second end surface of the base body;

[0041] Fig.15 It is an assembly diagram of a spray pipe in a spray device installed on a fixing clamp according to an embodiment of the present invention;

[0042] Fig.16 for Fig.15 Magnified view of the retaining clip. DETAILED DESCRIPTION

[0043] In order to enable those skilled in the art to better understand the technical solution of the present invention, the tube cutting device provided by the present invention is described in detail below with reference to the accompanying drawings.

[0044] The tube cutting device provided in the embodiment of the present invention is applied to semiconductor processing equipment, for example, applied to cutting the tube body of a spray pipe in a spray device of semiconductor processing equipment, so as to cut the nozzle of the spray pipe to a desired length. Figure 3As shown, when the spray pipe 33 of the spray head device 31 is fixed on the fixing clamp 32, the nozzle portion of the spray pipe 33 is the portion protruding from the lower end surface of the fixing clamp 32. Figure 3 The length of the nozzles of the two spray pipes 33 near the left side is the length after cutting, and the length of the nozzles of the spray pipes 33 near the right side is the length without cutting. The nozzles of the two spray pipes 33 near the left side are generally required to be less than 5 mm in length after cutting, such as 2 mm, 3 mm or 4 mm, so as to avoid the nozzles being too long, which is not conducive to the precise positioning of the spraying position, and easily causes the liquid medicine to splash back and crystallize. The tube cutting device provided in the embodiment of the present invention can be used to cut the nozzle of the spray pipe 33 assembled on the fixing clamp 32, so that the length of the nozzle meets the above requirements. However, the tube cutting device provided in the embodiment of the present invention can also be applied to the cutting of other tubes or columns, and the embodiment of the present invention has no limitation to this.

[0045] Please also read Figures 4 to 6 The tube cutting device 4 provided in the embodiment of the present invention includes a base 41 and a cutter 42, wherein the base 41 is used as a bearing base for the cutter 42, and is, for example, cylindrical in shape to facilitate rotation. However, the base 41 may also adopt other shapes, and the embodiment of the present invention has no limitation on this. The base 41 has a first end face and a second end face, and a through hole 411 is provided in the base 41 that passes from the first end face to the second end face. The through hole 411 is used for the tube 5 to be cut to pass through, and the axis A of the tube 5 to be cut that passes through the through hole 411 coincides or substantially coincides with the axis of the through hole 411. Figure 6 As shown, the base 41 is configured to be able to rotate around the axis of the through hole 411 relative to the tube body 5 to be cut (i.e., rotate clockwise or counterclockwise along the X direction) and move along the axis of the through hole 411 (i.e., move along the Y direction). Specifically, during cutting, the tube body 5 to be cut can be fixed, and the base 41 can make the above-mentioned rotation and movement relative to the tube body 5 to be cut. Alternatively, the base 41 can be fixed, and the tube body 5 to be cut can make the above-mentioned rotation and movement relative to the tube body 5 to be cut. Alternatively, the tube body 5 to be cut can only make the above-mentioned movement without rotation, and the base 41 can only make the above-mentioned rotation without movement. Alternatively, the tube body 5 to be cut can only make the above-mentioned rotation without movement, and the base 41 can only make the above-mentioned movement without rotation. The above-mentioned methods can all achieve relative movement and simultaneous rotation between the base 41 and the tube body 5 to be cut.

[0046] Taking the scenario where the embodiment of the present application is applied to the cutting of the spray pipe in the spray device, and the pipe body 5 to be cut (i.e., the spray pipe) can only be moved as described above without rotating, and the base 41 can only be rotated as described above without moving as an example, Figure 7As shown, the spray device includes a tube body 5 to be cut (i.e., a spray tube), a swing arm 74, a lifting mechanism 71, and a rotating mechanism 73, wherein the lifting mechanism 71 is mounted on a first mounting base plate 72, and is in transmission connection with the rotating mechanism 73, and is used to drive the rotating mechanism 73 to rise and fall; the rotating mechanism 73 is in transmission connection with the swing arm 74, and is used to drive the free end of the swing arm 74 to swing within a preset angle range, for example, it can swing to a process position above a carrier 100 (e.g., a base) in a process chamber, or swing to a cutting position outside the carrier 100; Fig.15 and Fig.16 As shown, a fixing clamp 6 is provided at the free end of the swing arm 74 for fixing the tube body 5 (i.e., the spray tube) to be cut to the free end of the swing arm 74. The nozzle portion of the tube body 5 (i.e., the spray tube) to be cut is the portion protruding from the lower end surface 61 of the fixing clamp 6. The length of the nozzle portion is generally required to be less than 5 mm, such as 2 mm, 3 mm or 4 mm, so as to avoid the nozzle portion being too long, which is not conducive to the precise positioning of the spraying position and is easy to cause the liquid to splash back and crystallize. Fig.15 and Fig.16 The length of the pipe openings of the two pipe bodies 5 (i.e., spray pipes) to be cut near the left side is the length after cutting, and the length of the pipe openings of the two pipe bodies 5 (i.e., spray pipes) to be cut near the right side is the length not cut.

[0047] On this basis, please continue to refer to Figure 7, the tube cutting device 4 provided in the embodiment of the present invention may also include a rotary drive mechanism 44, which is connected to the base 41 in a transmission manner, and is used to drive the base 41 to rotate relative to the tube 5 to be cut around the axis of the through hole 411, and the circumference of rotation around the axis of the through hole 411 is called the rotation circumference of the base 41. Specifically, the rotary drive mechanism 44 is installed on the second mounting base plate 45, and is connected to the base 41 in a transmission manner through the connecting member 46. Moreover, the relative position of the rotary drive mechanism 44 and the second mounting base plate 45 is adjustable. Before cutting, first, the free end of the swing arm 74 is driven to swing by the above-mentioned rotating mechanism 73 to drive the tube 5 to be cut (i.e., the spray pipe) to move to the top of the base 41 and to a position coaxial with the through hole 411 on the base 41. In this process, the relative position of the rotary drive mechanism 44 and the second mounting base plate 45 can also be adjusted to make the tube 5 to be cut (i.e., the spray pipe) coaxial with the through hole 411 on the base 41. In this process, the relative position of the rotary drive mechanism 44 and the second mounting base plate 45 can also be adjusted to make the tube 5 to be cut (i.e., the spray pipe) coaxial with the through hole 411 on the base 41. Then, the lifting mechanism 71 drives the rotating mechanism 73 and the swing arm 74 to rise and fall synchronously, so as to drive the tube body 5 (i.e., the spray pipe) to be cut to a height position where the blade 421 of the cutter 42 contacts the lower end surface (i.e., the end surface 51 to be cut) of the tube body 5 (i.e., the spray pipe). When cutting begins, the base 41 is driven to rotate relative to the tube body 5 to be cut around the axis of the through hole 411 by the rotating driving mechanism 44, and at the same time, the lifting mechanism 71 drives the tube body 5 (i.e., the spray pipe) to be cut to fall relative to the base 41 through the swing arm 74. The falling height can be set according to the length of the tube body 5 (i.e., the spray pipe) to be cut, and the falling height can be obtained by pre-calibration before cutting. During this process, the cutter 42 rotates while moving upward relative to the nozzle of the tube body 5 (i.e., the spray tube) to be cut, and the nozzle of the tube body 5 (i.e., the spray tube) to be cut is cut in a progressive manner. When the tube body 5 (i.e., the spray tube) to be cut reaches the above-mentioned descending height, the length of the nozzle of the tube body 5 (i.e., the spray tube) to be cut reaches the target length. Thus, the cutting is completed, and then the tube body 5 (i.e., the spray tube) to be cut can be driven by the lifting mechanism 71 and the rotating mechanism 73 to move to the process area in the process chamber for use, for example Figure 7 The carrier device 100 is shown above.

[0048] It should be noted that, in the case where the base 41 needs to move, the tube cutting device 4 provided in the embodiment of the present invention may also include a linear drive mechanism (not shown in the figure), which is connected to the base 41 in a transmission manner and is used to drive the base 41 to move relative to the tube 5 to be cut along the axis of the through hole 411. In this case, before cutting, the base 41 can be driven by the linear drive mechanism to move to a height position where the blade 421 of the tool 42 contacts the lower end surface (i.e., the end surface 51 to be cut) of the tube 5 to be cut (i.e., the spray pipe). And, when the cutting starts, the base 41 is driven to rotate relative to the tube 5 to be cut around the axis of the through hole 411 by the rotary drive mechanism 44, and the base 41 is driven to rise by the linear drive mechanism at the same time, so as to cut the nozzle portion of the tube 5 to be cut (i.e., the spray pipe) in a progressive manner.

[0049] In practical applications, such as Fig.15 and Fig.16 As shown, depending on the process and the type of liquid medicine, the nozzle device usually includes a plurality of tube bodies 5 to be cut (i.e., spray tubes), for example Fig.14 and Fig.15 Three spray pipes are shown, and a plurality of pipe bodies 5 (i.e., spray pipes) to be cut are arranged linearly. In this case, each pipe body 5 (i.e., spray pipe) to be cut can be moved to a position above the base 41 and coaxial with the through hole 411 on the base 41 by the above-mentioned rotating mechanism 73. Each time the pipe body 5 (i.e., spray pipe) to be cut is replaced and the pipe mouth portion of the pipe body 5 (i.e., spray pipe) to be cut is maintained, the pipe body 5 (i.e., spray pipe) to be cut can be cut.

[0050] In addition, during the cutting process, Figure 6 As shown, the cooperation between the through hole 411 and the tube body 5 to be cut can play a certain degree of guiding role in the relative movement and rotation between the base 41 and the tube body 5 to be cut, thereby preventing the tube body 5 to be cut from shaking and improving the cutting accuracy. In some embodiments, the aperture of the through hole 411 can be slightly larger than the outer diameter of the tube body 5 to be cut to achieve a relatively tight clearance fit, thereby ensuring that the tube body 5 to be cut can be smoothly inserted into the through hole 411, while preventing the tube body 5 to be cut from shaking and improving the cutting accuracy.

[0051] The cutter 42 is arranged on the base 41. Fig. 9 As shown, at the beginning of cutting, the blade 421 of the cutter 42 contacts the end face 51 to be cut of the tube 5 to be cut. The cutter 42 is located at one end of the tube 5 to be cut, and the end face of the end is the end face 51 to be cut. The end face 51 to be cut is, for example, perpendicular to the axis of the through hole 411. Fig.10As shown, the blade body 42a of the tool 42 forms an angle β with the radial cross section of the through hole 411 (the cross section is parallel to the end face 51 to be cut), so that the blade body 42a can obliquely cut into the end face 51 to be cut, thereby cutting the tube body. The blade body 42a, for example, adopts a flat plate structure such as a blade or a blade plate. Taking the blade plate as an example, the angle β between the blade body 42a and the radial cross section of the through hole 411 refers to the angle between the plate surface of the blade plate and the radial cross section of the through hole 411. It is easy to understand that the blade 421 is located on one of the side edges of the blade plate. In addition, in order to form the blade 421, as shown in FIG. Fig. 9 As shown, one of the plate surfaces of the blade is formed with an inclined surface 422. In this case, the angle between the blade body 42a and the radial section of the through hole 411 refers to the angle between the other plate surface of the blade facing away from the inclined surface 422 and the radial section of the through hole 411.

[0052] It should be noted that by determining the angle β between the blade 42a and the radial cross section of the through hole 411, the cutting angle of the blade 42a into the end face 51 to be cut can be determined, and the size of the cutting angle determines the unit length of the tube that can be cut per rotation of the cutter 42. The larger the cutting angle, the larger the unit length of the tube; conversely, the smaller the cutting angle, the smaller the unit length of the tube. Fig.11 As shown in (a) and (b) in FIG. 1 , the outer diameter of the tube 5 to be cut is R, the total length is L1, the required length (the remaining length after cutting) is L2, and the length to be cut is L3, that is, L3 = L1-L2. Fig.11 As shown in (c), when the base 41 and the tube 5 to be cut rotate relative to each other for one circle, the unit tube length of the tube 5 to be cut cut by the knife body 42a is t', and the angle between the knife body 42a and the radial section of the through hole 411 (the section is parallel to the end face 51 to be cut) is β. In this case, t'=2ΠR·tanβ, and the number of rotations of the base 41 required to cut the length L3 is n=L3 / t'.

[0053] Based on this, by designing a suitable angle β (i.e., the feed angle) between the blade 42a and the radial cross-section of the through hole 411, a balance can be achieved between cutting accuracy and cutting efficiency. Specifically, if the feed angle is small, the unit tube length t' that can be cut off by the tool 42 per rotation is small, so that the tube can be gradually cut to the required length, with higher cutting accuracy, but lower cutting efficiency. It is suitable for scenarios with high requirements on cutting accuracy or shorter cut tube lengths. For example, for the cutting of the tube body 5 to be cut (i.e., the spray tube) in the spray device, by adopting a smaller feed angle, the nozzle part can be more accurately cut to the required length, avoiding the spray position deviation caused by the excessive length of the nozzle part, thereby reducing the frequency of crystallization of the nozzle liquid, reducing machine maintenance time, and improving process accuracy and product quality.

[0054] In some embodiments, the included angle β between the blade body 42a and the radial cross section of the through hole 411 is greater than or equal to 10° and less than or equal to 20°. This included angle range is applicable to the above scenario.

[0055] If the feed angle is large, the unit tube length t' that can be cut off by the tool 42 per rotation is larger, so that the cutting can be completed faster and the cutting efficiency is higher, but the cutting accuracy is lower. It is suitable for scenes with low requirements on cutting accuracy and a longer tube length to be cut.

[0056] In addition, the embodiment of the present invention has no limitation on the structure of the blade body 42 a , as long as the angle β between the blade body 42 a and the radial cross section of the through hole 411 is set to obtain a desired cutting angle.

[0057] On this basis, if Fig.10 and Fig.12 As shown, the extension line of the blade 421 in its extension direction passes through the center of the rotating circumference of the base 41 (the center coincides with the axis of the through hole 411). That is, the extension line coincides with the diameter direction of the rotating circumference of the base 41. In this way, the shear force applied by the tool 42 to the tube body 5 to be cut can be decomposed into an axial force f1 along the axial direction of the through hole 411 and a tangential force f2 along the tangential direction of the rotating circumference of the base 41. The above axial force f1 and tangential force f2 will not apply radial pressure to the tube body 5 to be cut, thereby improving the flatness of the tube mouth after cutting. Moreover, by making the extension line of the blade 421 in its extension direction pass through the center of the rotating circumference of the base 41, the force on the tube wall can be uniform, thereby making the cutting process smoother. It is easy to understand that in the process of relative rotation between the base 41 and the tube body 5 to be cut, when the blade 421 rotates to any angle, its extension line always passes through the center of the rotating circumference of the base 41. In addition, by adjusting the size of the angle β between the blade body 42a and the radial cross section of the through hole 411, the size of the axial force f1 and the tangential force f2 can be adjusted, so that the blade 42 can be rotated and pushed along the axial direction. In some embodiments, the angle β between the blade body 42a and the radial cross section of the through hole 411 is greater than or equal to 10° and less than or equal to 20°. This angle range can not only achieve the above effect, but also is suitable for scenes with high cutting accuracy requirements or short length of the cut tube.

[0058] The tube cutting device 4 provided in the embodiment of the present invention, when cutting, the blade 421 of the tool 42 contacts the end face 51 to be cut of the tube 5 to be cut, and at the same time, the base 41 rotates around the axis of the through hole 411 relative to the tube 5 to be cut and moves along the axis of the through hole 411. In this way, the blade 421 of the tool 42 rotates with the base 41 while advancing along the axial direction of the through hole 411 (and in the direction of cutting into the tube body), so that the cutting of the tube body can be achieved in a progressive manner. This method can gradually cut the tube body to the required length, with high cutting accuracy and cutting efficiency, and can cut the pipe mouth part to any length. In particular, for the tube cutting of the tube body 5 to be cut (i.e., the spray pipe) in the spray device, the embodiment of the present invention can more accurately cut the pipe mouth part to the required length, avoid the spray position deviation caused by the excessive length of the pipe mouth part, and thus reduce the frequency of crystallization of the medicine liquid at the pipe mouth, reduce the machine maintenance time, and improve the process accuracy and product quality.

[0059] Moreover, by means of the through hole 411 provided in the base 41 for the tube 5 to be cut to pass through, combined with the use of the above-mentioned progressive cutting method, the space required for the tube cutting device 4 provided in the embodiment of the present invention is small, so that the assembled tube (for example, the nozzle of the spray pipe fixed on the fixing clamp) can be cut, solving the problem of insufficient space for cutting the assembled tube in the prior art. On this basis, by making the blade 42a of the cutter 42 form an angle β with the axis of the through hole 411, and the extension line of the blade 421 in its extension direction passes through the center of the rotation circle of the base 41, the shear force applied by the cutter 42 to the tube 5 to be cut can be decomposed into an axial force f1 along the axial direction of the tube 5 to be cut, and a tangential force f2 along the tangential direction of the rotation circle of the base 41. The above-mentioned axial force f1 and tangential force f2 will not apply radial pressure to the tube 5 to be cut, thereby improving the flatness of the nozzle of the cut tube.

[0060] In order to achieve that the blade body 42a of the blade 42 forms an angle β with the radial cross section of the through hole 411, in some embodiments, such as Figures 4 to 6 , Figure 8 As shown, the first end surface of the base 41 includes a first bevel 412, and the first bevel 412 forms an angle with the radial section of the through hole 411; the blade 42a is arranged in close contact with the first bevel 412. The first bevel 412 is used as a support surface for the blade 42a, and by making the blade 42a and the first bevel 412 in close contact, the angle between the first bevel 412 and the radial section of the through hole 411 is the angle β between the blade 42a and the radial section of the through hole 411. In this case, the above-mentioned angle β can be obtained by simply fixing the blade 42a to the first bevel 412, which can provide convenience for installation.

[0061] Further, in some embodiments, when cutting, Figure 6 As shown, the first end surface of the substrate 41 is located on the side of the substrate 41 away from the end surface 51 to be cut (i.e. Figure 6 ), and if Fig.14 As shown, the blade 421 of the cutter 42 is at least partially exposed in the through hole 411, so that it can contact the end face 51 to be cut when the tube 5 to be cut is inserted into the through hole 411 of the base 41. By making the first end face of the base 41 located at the side of the base 41 away from the end face 51 to be cut, the tube 5 to be cut can be inserted into the through hole 411 before cutting, so that during the whole cutting process, the through hole 411 can cooperate with the tube 5 to be cut, which can play a certain degree of guiding role in the relative movement and rotation between the base 41 and the tube 5 to be cut, thereby avoiding the shaking of the tube 5 to be cut and improving the cutting accuracy.

[0062] Furthermore, in some embodiments, Figures 4 to 6 , Figure 8 As shown, the first end surface of the base 41 further includes a second inclined surface 413, which is arranged to intersect with the first inclined surface 412; the orthographic projection of the intersection line of the second inclined surface 413 and the first inclined surface 412 on the radial section of the through hole 411 passes through the center of the radial section of the through hole 411. The orthographic projection of the blade 421 on the radial section of the through hole 411 coincides with the orthographic projection of the intersection line of the second inclined surface 413 and the first inclined surface 412 on the radial section of the through hole 411. That is, when the blade body 42a is fitted and fixed on the first inclined surface 412, the blade 421 needs to be aligned with the intersection line of the second inclined surface 413 and the first inclined surface 412. Since the orthographic projection of the intersection line of the second inclined surface 413 and the first inclined surface 412 on the radial section of the through hole 411 passes through the center of the radial section of the through hole 411, when the blade 421 is aligned with the intersection line of the second inclined surface 413 and the first inclined surface 412, the extension line of the blade 421 in its extension direction passes through the center of the rotation circle of the base 41. In this case, the blade 421 only needs to be aligned with the intersection line of the second inclined surface 413 and the first inclined surface 412 to make the blade 421 reach the desired direction, thereby providing convenience for installation.

[0063] In some embodiments, Fig.13 As shown, the orthographic projection of a tip of the blade 421 on the radial section of the through hole 411 is located at the center O of the radial section of the through hole 411. The length of the blade 421 in its extension direction is greater than or equal to one-half of the outer diameter of the tube 5 to be cut (equal to the radius of the outer wall of the tube body). In this way, it can be ensured that the blade 421 covers tubes with different wall thicknesses. For example, Fig.13(a) and (b) in the figure respectively show the end faces 51 of two tubes to be cut, the outer wall radius of the tube body 5 to be cut is R, and the wall thickness is B1 and B2 respectively, where B1>B2, and 0<B1, B2<R. The blade 421 that meets the above conditions can be applied to these two tubes to be cut. Of course, in practical applications, according to actual needs, the orthographic projection of a tip of the blade 421 on the radial section of the through hole 411 can also deviate from the center of the radial section of the through hole 411, so that the cutting of tubes with a certain wall thickness can also be satisfied.

[0064] like Figure 8 As shown, the angle between the second bevel 413 and the radial section of the through hole 411 is α, and the angle between the second bevel 413 and the first bevel 412 is equal to 180°-(α+β). By increasing the angle between the second bevel 413 and the first bevel 412, the installation space of the tool 42 can be increased. For example, in order to achieve the fit and fixation of the tool body 42a to the first bevel 412, the tube cutting device 4 provided in the embodiment of the present invention also includes at least two fixing members 43, at least one fixing member 43 is provided on both sides of the tool body 42a, and each fixing member 43 is fixedly connected to the base 41, and is used to fit and fix the tool body 42a to the first bevel 412. The fixing member 43 is, for example, a fixing screw. In order to have enough space to install the fixing member 43, it is necessary to increase the angle between the second bevel 413 and the first bevel 412. In some embodiments, the angle between the second bevel 413 and the first bevel 412 is greater than 90°, that is, (α+β) is less than 90°.

[0065] During cutting, the base 41 and the pipe 5 to be cut move relative to each other, and the movement amount can be set according to the length of the sprinkler pipe to be cut. During this process, the cutter 42 rotates while moving relative to the pipe 5 to be cut, and cuts in a progressive manner. When the above displacement amount is reached, the cut length of the pipe reaches the target length. In order to stop the base 41 and the pipe 5 to be cut relative to each other when the above displacement amount is reached, so as to ensure that the cutting stops immediately when the cut length of the pipe reaches the target length, in the embodiment in which the cutter body 42a of the cutter 42 is arranged on the first end surface of the base 41, as shown in FIG. Figure 6 and Figure 8 As shown, the second end face of the base 41 includes a positioning face 414, and the orientation of the positioning face 414 is used to be opposite to the orientation of the end face 51 to be cut, that is, the positioning face 414 is located on the side of the base 41 close to the tube body 5 to be cut ( Figure 6The upper side of the cutting tool 41 is used to limit the position of the tube 5 to be cut when the cut length of the tube 5 to be cut reaches the target length, and cooperate with the preset reference surface fixed relatively to the tube 5 to be cut. That is, when the cut length of the tube 5 to be cut reaches the target length, the positioning surface 414 abuts against the preset reference surface, and at this time, the base 41 and the tube 5 to be cut cannot move relative to each other, but can only rotate relative to each other. When the shearing force applied by the cutter 42 to the tube disappears and no more tube material is cut, the entire cutting operation is completed, so that the cut tube mouth can be flat.

[0066] Take the scenario where the embodiment of the present application is applied to the cutting of the pipe body of the spray pipe in the spray device as an example. Fig.15 and Fig.16 As shown, the preset reference plane is, for example, the lower end surface 61 of the fixing clamp 6, and the lower end surface 61 is, for example, parallel to the positioning surface 414 to ensure that when the cut length of the tube 5 to be cut reaches the target length, the positioning surface 414 can fit with the lower end surface.

[0067] To sum up, the tube cutting device 4 provided in the embodiment of the present invention can realize the cutting of the tube body in a progressive manner. This method can gradually cut the tube body to the required length, with high cutting accuracy and cutting efficiency, and can cut the tube mouth part to any length, especially for the tube body cutting of the spray pipe in the spray device, the embodiment of the present invention can more accurately cut the tube mouth part to the required length, avoid the spray position deviation caused by the excessive length of the tube mouth part, and thus reduce the frequency of crystallization of the tube mouth liquid, reduce the machine maintenance time, and improve the process accuracy and product quality.

[0068] Moreover, by means of the through hole 411 provided in the base 41 for the tube 5 to be cut to pass through, combined with the use of the above-mentioned progressive cutting method, the space required for the tube cutting device 4 provided in the embodiment of the present invention can be smaller, so that the assembled tube (for example, the nozzle part of the spray pipe fixed on the fixing clamp) can be cut, which solves the problem of insufficient space for cutting the assembled tube in the prior art. On this basis, by making the blade 42a of the tool 42 form an angle with the radial cross-section of the through hole 411, and the extension line of the blade 421 in its extension direction passes through the center of the rotating circle of the base 41, not only can the force on the tube wall be uniform, thereby making the cutting process smoother, but also the shear force applied by the tool 42 to the tube body 5 to be cut can be decomposed into an axial force f1 along the axial direction of the through hole 411, and a tangential force f2 along the tangential direction of the rotating circle of the base 41. The above-mentioned axial force f1 and tangential force f2 will not apply radial pressure to the tube body 5 to be cut, thereby improving the flatness of the tube mouth of the cut tube body.

[0069] As another technical solution, an embodiment of the present invention further provides a semiconductor processing device, which includes a spray device, and the spray device includes at least one spray pipe. The spray device, for example, uses Figure 7 The structure of the spray device shown has been described in detail in the above embodiment and will not be repeated here.

[0070] The semiconductor processing equipment further comprises a tube cutting device 4, and at least one spray pipe is the tube 5 to be cut in the above embodiment.

[0071] The semiconductor processing equipment provided by the embodiment of the present invention solves the problem of insufficient space for cutting the assembled tube body in the prior art by adopting the tube cutting device provided by the embodiment of the present invention, and can improve the flatness of the tube mouth of the cut tube body.

[0072] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A tube cutting device, used in semiconductor processing equipment, characterized in that: include: A base body having a first end face and a second end face which are separated from each other, wherein a through hole is provided in the base body and passes through from the first end face to the second end face, and the through hole is used for the tube body to be cut to pass through; the base body is configured to be able to rotate around the axis of the through hole and move along the axis of the through hole relative to the tube body to be cut; as well as A tool is arranged on the base; the tool body of the tool forms an angle with the radial section of the through hole; and the extension line of the blade of the tool in its extension direction passes through the center of the rotation circle of the base.

2. The tube cutting device according to claim 1, characterized in that: The first end surface of the base body includes a first inclined surface, and the first inclined surface forms an angle with a radial cross section of the through hole; the knife body is arranged in close contact with the first inclined surface.

3. The tube cutting device according to claim 2, characterized in that: The first end surface of the base body further includes a second inclined surface, and the second inclined surface is arranged to intersect with the first inclined surface; The orthographic projection of the intersection line of the second bevel and the first bevel on the radial section of the through hole passes through the center of the radial section of the through hole; the orthographic projection of the blade on the radial section of the through hole coincides with the orthographic projection of the intersection line of the second bevel and the first bevel on the radial section of the through hole.

4. The tube cutting device according to claim 3, characterized in that: The orthographic projection of a tip of the blade on the radial cross section of the through hole is located at the center of the radial cross section of the through hole; The length of the blade in its extending direction is greater than or equal to half of the outer diameter of the tube to be cut.

5. The tube cutting device according to claim 3, characterized in that: An included angle between the second inclined surface and the first inclined surface is greater than 90°.

6. The tube cutting device according to claim 2, characterized in that: It also includes at least two fixing members, at least one of which is disposed on both sides of the knife body, and each of the fixing members is fixedly connected to the base body for fixing the knife body to fit the first inclined surface.

7. The tube cutting device according to any one of claims 1 to 6, characterized in that: The included angle between the tool body of the tool and the radial cross section of the through hole is greater than or equal to 10° and less than or equal to 20°.

8. The tube cutting device according to any one of claims 1 to 6, characterized in that: The tool body of the tool is arranged on the first end surface of the base body; The second end face of the base body includes a positioning face, the orientation of the positioning face is opposite to the orientation of the end face of the tube body to be cut, and is used for limiting cooperation with a preset reference face relatively fixed to the tube body to be cut when the cut length of the tube body to be cut reaches a target length.

9. The tube cutting device according to any one of claims 1 to 6, characterized in that: It also includes a rotation drive mechanism, which is drivingly connected to the base and is used to drive the base to rotate around the axis of the through hole; and / or, It also includes a linear drive mechanism, which is transmission-connected to the base and is used to drive the base to move along the axis of the through hole.

10. The tube cutting device according to any one of claims 1 to 6, characterized in that: The tube body cutting device is used for cutting the tube body of the spray pipe in the spray device of the semiconductor processing equipment.

11. A semiconductor processing device, comprising a spray device, wherein the spray device comprises at least one spray pipe, characterized in that: It also includes the tube cutting device as described in any one of claims 1 to 10, and at least one of the spray pipes is the tube to be cut.

12. The semiconductor processing equipment according to claim 11, characterized in that The spray device also includes a swing arm, a lifting mechanism and a rotating mechanism, wherein the lifting mechanism is transmission-connected to the rotating mechanism for driving the rotating mechanism to lift and lower; the rotating mechanism is transmission-connected to the swing arm for driving the free end of the swing arm to swing within a preset angle range; the free end of the swing arm is connected to the spray pipe.

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