Feeding device and feeding method

Abstract

The embodiment of the invention discloses a feeding device and a feeding method.The feeding device comprises a feeding pipe, a material dispersing assembly, a metal sealing cover, a traction piece and a limiting assembly, and the feeding pipe comprises a first end and a second end which are oppositely arranged; the material dispersing assembly is arranged at the first end of the feeding pipe. The metal sealing cover is arranged at the second end of the feeding pipe; the traction piece penetrates through the metal sealing cover, is connected with the bulk material assembly through the interior of the feeding pipe and is used for controlling the plugging state of the first end; the limiting assembly is fixed to the traction piece, arranged between the metal sealing cover and the material dispersing assembly and used for limiting the metal sealing cover in the axial direction of the feeding pipe.

Description

Technical Field

[0001] The embodiments of the present disclosure relate to the field of semiconductor manufacturing technology, and in particular to a feeding device and a feeding method. Background Art

[0002] In the field of semiconductor manufacturing, accurate and clean feeding process is crucial to ensure product quality. Traditional feeding devices usually include a feeding tube with bulk material components and metal caps at both ends. This design has some limitations and shortcomings during operation, especially in ensuring the stability of the metal cap and preventing contamination.

[0003] In the existing feeding device, the metal cover is limited mainly by the mechanical support of the feeding tube. However, during the feeding process, due to mechanical vibration or improper operation, the feeding tube may be broken, and further the stainless steel cover on the molybdenum rod may fall off, which will not only cause metal impurities to contaminate the silicon melt, crucible, and thermal field components, but may also have a serious impact on the purity of semiconductor materials and the performance of devices. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure are intended to provide a feeding device and a feeding method, which can solve the problem of the stainless steel cover falling into the metallic silicon melt and causing the silicon melt to be contaminated due to the breakage of the feeding tube.

[0005] The technical solution of the embodiment of the present disclosure is implemented as follows: In a first aspect, an embodiment of the present disclosure provides a feeding device, comprising: A feeding tube, comprising a first end and a second end disposed opposite to each other; A bulk material assembly is disposed at the first end of the feeding pipe, a metal cover, disposed at the second end of the feeding tube; A traction member, which passes through the metal cover and has one end connected to the bulk material assembly through the inside of the feeding pipe, and is used to control the blocking state of the first end; A limiting assembly is fixed to a side of the traction member away from the bulk material assembly and is used to limit the metal cover in the axial direction of the feeding pipe.

[0006] In some examples, the limiting assembly includes: A limit block is arranged between the metal cover and the bulk material assembly, the limit block comprises a through hole, and the traction member passes through the through hole to be connected with the bulk material assembly.

[0007] In some examples, the limiting assembly further includes: A threaded hole is provided on the limiting block, and a central axis of the threaded hole is perpendicular to an extending direction of the traction member; The bolt is matched with the threaded hole and abuts against the traction member through the threaded hole to fix the limit block on the traction member.

[0008] In some examples, the limit block further includes: The locking mechanism is arranged between the limit block and the traction member, and is used to fix the limit block at the set position of the traction member based on the gravity of the metal cover and the limit block after the metal cover contacts the limit block.

[0009] In some examples, the limiting assembly includes: At least one connecting wire is connected between the traction member and the metal cover and is used to fix the metal cover to the traction member.

[0010] In some examples, a through hole is provided on the traction member, the connecting wire passes through the through hole, and both ends of the connecting wire are connected to the metal cover.

[0011] In some examples, the metal cover is a magnetic material, and the limiting assembly includes: A position sensor for detecting the position of the metal cover; The electromagnetic mechanism is arranged on a side of the metal cover away from the feeding tube, and is used to generate magnetic force to absorb and fix the metal cover when it is detected that the metal cover moves toward the first end.

[0012] In some examples, the limiting assembly includes: At least one retractable baffle is arranged on the traction member, and is used to pop out from the traction member when detecting that the metal cover moves in a direction close to the first end, so as to limit the metal cover in the axial direction of the feeding tube.

[0013] In some examples, the limiting component further includes: The feeding tube detection unit is arranged on the traction member, and is used for controlling the baffle to pop out from the traction member when it is detected that the feeding tube is broken.

[0014] In some examples, the feeding device further comprises: The alarm system is used to send out an alarm signal when the metal cover contacts the limit assembly.

[0015] In a second aspect, the present disclosure provides a feeding method, comprising: The method is performed by using the feeding device in the first aspect and any example thereof.

[0016] The disclosed embodiments provide a feeding device and a feeding method; by setting a limit assembly, the metal cover can be effectively prevented from falling off due to vibration or other external forces during operation, thereby ensuring the safety and reliability of the feeding process. The design of the metal cover reduces the chance of the material coming into contact with the outside world during the feeding process, and reduces the risk of contamination, especially in fields such as semiconductor manufacturing that require extremely high cleanliness. The limit assembly is fixed on the traction member, and can prevent the metal cover from falling into the silicon melt even after the feeding tube is broken, further improving the safety and reliability of the feeding process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a feeding device in the related technology.

[0018] Figure 2 It is a structural schematic diagram of a crystal pulling furnace in the related technology.

[0019] Figure 3 A schematic structural diagram of a feeding device provided in an embodiment of the present disclosure.

[0020] Figure 4 A schematic structural diagram of another feeding device provided in an embodiment of the present disclosure.

[0021] Figure 5 A schematic structural diagram of another feeding device provided in an embodiment of the present disclosure.

[0022] Figure 6 A schematic structural diagram of a feeding device when a limiting assembly provided in an embodiment of the present disclosure includes a connecting line.

[0023] Figure 7 A schematic structural diagram of a feeding device when a limiting assembly provided in an embodiment of the present disclosure includes an electromagnetic mechanism.

[0024] Figure 8 A limit assembly provided in an embodiment of the present disclosure includes a schematic structural diagram of a feeding device with a retractable baffle.

[0025] Fig. 9 A schematic structural diagram of a feeding device including a feeding pipe detection unit provided in an embodiment of the present disclosure.

[0026] The above drawings show clear embodiments of the present disclosure, which will be described in more detail below. These drawings and text descriptions are not intended to limit the scope of the present disclosure in any way, but to illustrate the concepts of the present disclosure to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0027] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that the disclosure will be more comprehensive and complete and to fully convey the concepts of the example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0028] In addition, the accompanying drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the figures represent the same or similar parts, and their repeated description will be omitted. Some of the block diagrams shown in the accompanying drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities can be implemented in software form, or implemented in one or more hardware modules or integrated circuits, or implemented in different networks and / or processor devices and / or microcontroller devices.

[0029] See also Figure 1 and Figure 2 ,in, Figure 1 FIG. 1 shows a schematic diagram of a feeding device 10 used in conventional technology for performing secondary feeding. Figure 2 Shown include Figure 1 The schematic diagram of the structure of the crystal pulling furnace of the feeding device 10 is shown, the feeding device 10 comprises a through feeding pipe 101, a traction member 102, a feeding member 103 and a foldable bulk material assembly 104, wherein the traction member 102 passes through the feeding pipe 101, the feeding member 103 is arranged in the feeding pipe 101, and the feeding member 103 is arranged in a spiral manner around the traction member 102, the bulk material assembly 104 is connected to the traction member 102 and is located below the feeding member 103, wherein the bulk material assembly 104 is arranged to be able to rotate with the traction member 102.

[0030] The feeding piece 103 can be configured to be movable relative to the feeding tube 101 or can be fixedly disposed on the inner wall of the feeding tube 101. When the feeding piece 103 is configured to be movable relative to the feeding tube 101, the feeding piece 103 is spirally disposed around the traction piece 102 and fixedly disposed on the traction piece 102.

[0031] like Figure 1 and Figure 2As shown, when the feeding device 10 is required to perform secondary feeding into the quartz crucible 50, one end of the traction member 102 can be first connected to the traction rope for pulling the seed crystal to move and rotate through the first hook 30. Since the traction rope can move up and down and rotate around itself along with the seed crystal rotation system (not shown in the figure), the traction member 102 can move along with the movement of the traction rope. In addition, when adding the material 60 to be transported (such as polysilicon raw material) to the feeding tube 101, the discharge end of the feeding tube 101, i.e., the lower end in the figure, needs to be sealed by the bottom end of the bulk assembly 104 to prevent the material 60 to be transported in the feeding tube 101 from flowing out from the discharge end of the feeding tube 101 before being added to the quartz crucible 50. There is no specific requirement for the order of adding the material 60 to be transported. It can be added after the feeding tube 101 is installed on the hook wall 80 in the crystal pulling furnace through the second hook 70, or it can be added before the feeding tube 101 is installed on the hook wall 80 in the crystal pulling furnace through the second hook 70.

[0032] When it is necessary to add the material 60 to be transported into the quartz crucible 50, the bulk material assembly 104 fixedly connected to the traction member 102 moves in a direction away from the feeding tube 101, and stops moving when it moves to a certain distance from the liquid surface of the melt S1, and the distance can be adjusted according to actual conditions. When the bulk material assembly 104 stops moving downward, a channel for the material 60 to be transported to flow out can be formed between the discharge end of the feeding tube 101 and the bulk material assembly 104.

[0033] The material 60 to be transported in the feeding tube 101 can fall into the quartz crucible 50 along with the feeding piece 103 in a spiral feeding manner. This feeding method not only relies on the gravity of the material 60 to be transported, but also relies mainly on the spiral feeding method of the feeding piece 103. Because the rotation speed of the feeding piece 103 can be controlled according to the seed crystal rotation system, the feeding speed of the feeding piece 103 can be effectively controlled. If the feeding piece 103 is fixedly connected to the inner wall of the feeding tube 101, the material 60 to be transported on the feeding piece 103 can be fed from the upper end of the feeding piece 103 arranged in a spiral manner to the lower end by its own gravity.

[0034] A foldable bulk material assembly 104 is also provided below the discharge end of the feeding tube 101. In order to prevent the bulk material assembly 104 from contacting the guide tube 90 and causing damage to the guide tube 90, when the feeding device 10 is in use, the bulk material assembly 104 will pass through the guide tube 90. Before the bulk material assembly 104 passes through the guide tube 90, the bulk material assembly 104 needs to be retracted until it no longer touches the guide tube 90. When it is necessary to fill the quartz crucible 50, the bulk material assembly 104 should be in an unfolded state, so as to facilitate the material 60 to be transported to fall from the bulk material assembly 104 to the edge of the quartz crucible 50. In order to facilitate the retraction and unfolding of the bulk material assembly 104, the connection end of the bulk material assembly 104 is rotatably connected to the traction member 102 along the axial direction of the traction member 102, so that the connection end of the bulk material assembly 104 can be rotated along the axial direction of the traction member 102. The bulk material assembly 104 and the traction member 102 can be connected by a rotating shaft, for example.

[0035] Reference Figure 1 A metal cover 105 is also provided at one end of the feeding tube 101 away from the bulk material assembly 104, which is used to prevent other impurities from entering the feeding tube 101 through the end of the feeding tube 101 away from the bulk material assembly 104. However, during the secondary feeding process, due to mechanical vibration or improper operation, the secondary feeding tube 101 may be broken, and the metal cover 105 may fall off. Due to the downward impact force of the metal cover 105, the bulk material assembly 104 may be broken together and fall into the melt S1. The metal in the metal cover 105 may cause metal impurities to contaminate the silicon melt, crucible, and thermal field components, and may also have a serious impact on the purity of semiconductor materials and the performance of devices.

[0036] Based on this, the present disclosure first provides a feeding device, referring to Figure 3 The feeding device may include a feeding tube 101, a bulk material component 104, a metal cover 105, a traction member 102 and a limiting component 106, wherein the feeding tube 101 includes a first end and a second end that are arranged opposite to each other; the bulk material component 104 is arranged at the first end of the feeding tube 101; the metal cover 105 is arranged at the second end of the feeding tube 101; the traction member 102 passes through the metal cover 105, and is connected with the bulk material component 104 through the inside of the feeding tube 101, so as to control the blocking state of the first end; the limiting component 106 is fixed to a side of the traction member 102 away from the bulk material component 104, and limits the metal cover 105 in the axial direction of the feeding tube 101.

[0037] The feeding device in the embodiment of the present disclosure can effectively prevent the metal cover 105 from falling off due to vibration or other external forces during operation through the setting of the limit assembly 106, thereby ensuring the safety and reliability of the feeding process. The design of the metal cover 105 reduces the chance of the material coming into contact with the outside world during the feeding process, and reduces the risk of contamination, especially in fields such as semiconductor manufacturing that require extremely high cleanliness. The limit assembly 106 is fixed to the traction member 102, and can still prevent the metal cover 105 from falling into the silicon melt after the feeding tube 101 is broken, further improving the safety and reliability of the feeding process.

[0038] The various components in the above-mentioned feeding device are described in detail below.

[0039] In some examples, the feeding pipe 101 may be a tubular structure, used to cooperate with the bulk material assembly 104 to carry the material to be added to the melt.

[0040] Specifically, the feeding pipe 101 is responsible for transporting materials (such as molten silicon or other chemicals in semiconductor manufacturing) from one location to another, usually from a storage container to a reactor or processing equipment.

[0041] The feeding tube 101 may include a first end and a second end that are arranged opposite to each other, wherein the first end is connected to the bulk material assembly 104 and can cooperate with the bulk material assembly 104 to release or seal the silicon melt carried. The second end is connected to the metal cover 105 and is used to seal the inlet of the feeding tube 101 during the feeding process.

[0042] The traction member 102 passes through the metal cover 105 and is connected to the bulk material assembly 104 through the inside of the feeding pipe 101, and is used to control the blocking state of the first end, thereby controlling the flow of the material. Optionally, the traction member 102 can be a molybdenum rod. Molybdenum has high strength and hardness, which can increase the service life of the traction member 102. In addition, molybdenum has a high melting point (about 2623°C), so it can still maintain its structural integrity in a high temperature environment. Molybdenum has a low thermal expansion coefficient, which means good dimensional stability under temperature changes.

[0043] Reference Figure 3 A limiting assembly 106 is fixed on the traction member 102 inside the feeding tube 101, which is used to limit the metal cover 105 in the axial direction to prevent the cover from falling off or moving during operation.

[0044] In some examples, the limit assembly 106 may include a limit block, which is fixed to the traction member 102 and disposed between the metal cover 105 and the bulk material assembly 104. The traction member 102 is not directly connected to the above-mentioned feeding tube 101, that is, when the feeding tube 101 is broken, the position of the limit block fixed to the traction member 102 will not change.

[0045] Optionally, the limiting block includes a through hole, the traction member 102 passes through the through hole, and the inner wall of the through hole on the limiting block is fixedly connected to the traction member 102 .

[0046] In some examples, the interior of the through hole may be connected to the traction member 102 by bonding, welding, etc., or may be connected by some mechanical parts.

[0047] Optional, see Figure 4 The limiting assembly 106 includes a threaded hole 1062 and a bolt 1061. The threaded hole 1062 is arranged on the above-mentioned limiting block. The central axis of the threaded hole 1062 is perpendicular to the extension direction of the traction member 102. The bolt 1061 adapted to the threaded hole 1062 abuts against the traction member 102 through the threaded hole 1062 to fix the limiting block on the traction member 102.

[0048] The number of the threaded holes 1062 and the number of the bolts 1061 are the same and cooperate with each other, and the number of both can be multiple, so as to improve the firmness of fixing the limit block on the traction member 102.

[0049] By using threaded holes 1062 and bolts 1061 in combination, the fixing stability of the limit block on the traction member 102 can be significantly improved. This fixing method provides a strong clamping force to ensure that the limit block will not loosen under various operating conditions. The design of threaded holes 1062 and bolts 1061 allows fine-tuning during installation to ensure the precise position of the limit block to meet specific installation requirements. The bolt 1061 connection is easy to disassemble, which means that when maintenance or replacement of the limit block is required, the operation can be carried out quickly to reduce downtime. The use of multiple threaded holes 1062 and bolts 1061 can disperse the fixing stress and reduce the load on a single connection point, thereby reducing the risk of damage due to overload.

[0050] In some examples, a locking mechanism 107 may also be provided between the limit block and the traction member 102. The locking mechanism 107 is provided between the limit block and the traction member 102 and is used to fix the limit block at a set position of the traction member 102 based on the gravity of the metal cover 105 and the limit block after the metal cover 105 contacts the limit block.

[0051] Optional, see Figure 5 The locking mechanism 107 can be arranged between the through hole and the traction member 102 to increase the friction between the limit block and the traction member 102 after the metal cover 105 contacts the limit block, so as to fix the limit block at the set position of the traction member 102.

[0052] The locking mechanism 107 can be automatically activated after the metal cover 105 contacts the stop block, and the stop block is fixed at the set position of the traction member 102 by gravity without additional operation. By automatically fixing the stop block, the risk of the metal cover 105 falling off is reduced, especially when the feeding tube 101 is accidentally broken, ensuring that the metal cover 105 will not fall into the silicon melt, thereby avoiding pollution and safety accidents. The locking mechanism 107 provides an additional layer of protection, which can keep the metal cover 105 in a stable position even when the traction member 102 or the stop block is accidentally impacted.

[0053] In some examples, the locking mechanism 107 can be a spring, one end of which abuts the inner surface of the through hole of the limit block, and the other end abuts the traction member 102, and the abutment position of the spring on the inner surface is closer to the second end of the feeding tube 101 than the abutment position of the spring on the traction member 102, so that after the metal cover 105 contacts the limit block, the spring is compressed to generate sufficient friction to fix the limit block.

[0054] Optionally, the locking mechanism 107 may include a wedge block, which may be activated when the metal cover 105 contacts the limit block, and the inclined surface of the wedge block contacts the traction member 102, thereby increasing the friction force through the wedging effect and fixing the limit block.

[0055] Optionally, the locking mechanism 107 can also be an expansion type locking mechanism. The expansion sleeve can be arranged around the traction member 102 and extend out of the limit block. When the metal cover 105 contacts the limit block, the extended part of the expansion sleeve is squeezed into the limit block, causing the expansion sleeve inside the limit block to expand, thereby increasing the contact area and friction with the traction member 102 and fixing the limit block.

[0056] In some examples, the limiting assembly 106 may include at least one connecting wire connected between the metal cover 105 and the traction member 102. After the feeding tube 101 is broken, the connecting wire can hang the metal cover 105 on the traction member 102. It should be noted that the length of the connecting wire is limited to prevent the metal cover 105 from contacting the melt when the metal cover 105 is hung on the traction member 102.

[0057] Optional, see Figure 6 A through hole may be provided on the traction member 102 , the connecting wire passes through the through hole, and both ends of the connecting wire are connected to the metal cover 105 .

[0058] In some examples, reference Figure 7The metal cover 105 may also be a magnetic material that can be adsorbed by magnetic force. The limit assembly 106 may include a position sensor 72 and an electromagnetic mechanism 71. The position sensor 72 is used to detect the position of the metal cover 105. The electromagnetic mechanism 71 is connected to the position sensor 72 and is used to generate a magnetic force to adsorb the metal cover 105 onto the electromagnetic mechanism 71 when it detects that the metal cover 105 moves toward the direction close to the first end.

[0059] Optionally, the electromagnetic mechanism 71 and the position sensor 72 may be connected to the traction member 102, or both may be arranged on the traction member 102. Figure 1 The first hook 30 is not described in detail in this example implementation.

[0060] The magnetic material of the metal cover 105 allows it to be automatically adsorbed and fixed by the magnetic force generated by the electromagnetic mechanism 71, thereby improving the degree of automation of positioning. The position sensor 72 can accurately detect the position of the metal cover 105, ensuring that the electromagnetic mechanism 71 accurately adsorbs the metal cover 105 when needed. Since the mechanical fixing and releasing operations are reduced, the wear of the metal cover 105 and the traction member 102 is reduced, thereby extending the service life.

[0061] In some examples, reference Figure 8 The limiting assembly 106 may include at least one retractable baffle 81, which is arranged on the traction member 102 and is used to pop out from the traction member 102 when it is detected that the metal cover 105 moves in a direction close to the first end, so as to limit the metal cover 105 in the axial direction of the feeding tube 101.

[0062] Optionally, the baffle is designed to be retractable and usually stored inside or close to the traction member 102, and can be quickly popped out when needed. The popping-out process can be achieved by a driver, which can be set inside the traction member 102, or it can be popped out by gravity using the metal cover 105. The specific pop-up method can be customized based on user needs and will not be elaborated here.

[0063] Specifically, the retractable baffle 81 can be in close contact with the traction member 102 when in the retracted state, and after being ejected, it can be arranged perpendicular to the extension direction of the retractable baffle 81 and the extension direction of the traction member 102 to achieve the limitation of the metal cover 105.

[0064] Optionally, the retractable baffle 81 can be disposed in a receiving groove provided in the traction member 102 when in a retracted state, and can be extended from the receiving groove when needed to achieve position limiting of the metal cover 105 .

[0065] In some examples, reference Fig. 9The feeding device may further include a feeding pipe monitoring unit 82 , which is disposed on the traction member 102 and is used to control the baffle to pop out from the traction member 102 when it is detected that the feeding pipe 101 is broken.

[0066] The retractable baffle 81 is retracted into the traction member 102 or close to the traction member 102 when not needed, saving space and reducing interference with other parts of the feeding device. Since the baffle is designed to be retractable, it reduces long-term exposure to wear and tear, extends the service life of the baffle, and reduces maintenance requirements. The integration of the feeding pipe monitoring unit 82 improves the intelligence level of the feeding device and makes the control of the baffle more automated and precise.

[0067] The feeding device may also be provided with an alarm system, which may send out an alarm signal when the metal cover 105 contacts the limit assembly 106, informing the user that the feeding tube 101 is broken and needs to be repaired, so as to reduce the impact on production efficiency.

[0068] In the feeding device provided by the embodiment of the present disclosure, when the feeding tube 101 is broken, the limiting component 106 can fix the metal cover 105 to prevent it from falling into the silicon melt, thereby improving the reliability of the feeding process. The design of the metal cover 105 reduces the chance of the material coming into contact with the outside world during the feeding process, and reduces the risk of contamination, especially in the field of semiconductor manufacturing with extremely high requirements for cleanliness. The limiting block is fixedly connected to the traction member 102 through a through hole, and can be realized in a variety of ways (such as bonding, welding or mechanical connection), which increases the flexibility and firmness of the structure. A variety of designs of locking mechanisms 107 are provided, such as spring mechanisms, wedge blocks, and expansion necking mechanisms, to adapt to different application scenarios and requirements. The coordinated use of the position sensor 72 and the electromagnetic mechanism 71 realizes intelligent monitoring and response to the position of the metal cover 105. The design of the retractable baffle 81 allows it to pop up quickly when abnormal movement of the metal cover 105 is detected, thereby enhancing the limiting ability of the metal cover 105. The alarm system can send out an alarm signal when the metal cover 105 contacts the limit assembly 106, and promptly inform the user that the feeding tube 101 is broken, thereby reducing the impact on production efficiency.

[0069] Furthermore, the present disclosure also discloses a new feeding method, which is executed by the above-mentioned feeding device, and can avoid the problem that the metal cover falls into the melt due to the breakage of the feeding tube, thereby increasing the metal content of the melt and causing the product to fail to meet the processing requirements.

[0070] In the above embodiments, the description of each embodiment has its own emphasis. For the part not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. The technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0071] Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the inventions claimed herein. The present disclosure is intended to cover any variations, uses or adaptations of the present disclosure that follow the general principles of the present disclosure and include common knowledge or customary technical means in the art that are not claimed in the present disclosure.

[0072] It should be understood that the present disclosure is not limited to the exact structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A feeding device, characterized in that: include: A feeding tube, comprising a first end and a second end disposed opposite to each other; A bulk material assembly, disposed at the first end of the feeding pipe; a metal cover, disposed at the second end of the feeding tube; A traction member, which passes through the metal cover and has one end connected to the bulk material assembly through the inside of the feeding pipe, and is used to control the blocking state of the first end; A limiting assembly is fixed to a side of the traction member away from the bulk material assembly and is used to limit the metal cover in the axial direction of the feeding pipe.

2. The feeding device according to claim 1, characterized in that: The limiting component comprises: A limit block is arranged between the metal cover and the bulk material assembly, the limit block comprises a through hole, and the traction member passes through the through hole to be connected with the bulk material assembly.

3. The feeding device according to claim 2, characterized in that: The limiter assembly also includes: A threaded hole is provided on the limiting block, and a central axis of the threaded hole is perpendicular to an extending direction of the traction member; The bolt is matched with the threaded hole and abuts against the traction member through the threaded hole to fix the limit block on the traction member.

4. The feeding device according to claim 2, characterized in that: The limit block also includes: The locking mechanism is arranged between the limit block and the traction member, and is used for fixing the limit block at a set position of the traction member based on the gravity of the metal cover and the limit block after the metal cover contacts the limit block.

5. The feeding device according to claim 1, characterized in that: The limiting component comprises: At least one connecting wire is connected between the traction member and the metal cover and is used to fix the metal cover to the traction member.

6. The feeding device according to claim 5, characterized in that: The traction member is provided with a through hole, the connection line passes through the through hole, and both ends are connected to the metal cover.

7. The feeding device according to claim 1, characterized in that: The metal cover is made of magnetic material, and the limit assembly includes: A position sensor for detecting the position of the metal cover; The electromagnetic mechanism is arranged on a side of the metal cover away from the feeding tube, and is used to generate magnetic force to absorb and fix the metal cover when it is detected that the metal cover moves toward the first end.

8. The feeding device according to claim 1, characterized in that: The limiting component comprises: At least one retractable baffle is arranged on the traction member, and is used to pop out from the traction member when it is detected that the metal cover moves in a direction close to the first end, so as to limit the metal cover in the axial direction of the feeding tube.

9. The feeding device according to claim 8, characterized in that: The limiting component also includes: The feeding tube detection unit is arranged on the traction member, and is used for controlling the baffle to pop out from the traction member when it is detected that the feeding tube is broken.

10. The feeding device according to claim 1, characterized in that: The feeding device also includes: The alarm system is used to send out an alarm signal when the metal cover contacts the limit assembly.

11. A feeding method, characterized in that: include: The feeding method is performed by using the feeding device according to any one of claims 1 to 10.

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