Automatic liquid temperature calibration method for Czochralski single crystal

Abstract

The invention discloses an automatic liquid temperature calibration method for a czochralski single crystal, which comprises the following steps: preliminarily judging the liquid temperature displayed before seeding through a visual detection function, further performing logic analysis according to the temperature representation corresponding to the process liquid temperature change after seeding, and finally comprehensively analyzing by combining with multiple sections of data to obtain a determined temperature result. And generating a corresponding display liquid temperature judgment result according to the corresponding determined temperature result and a determination algorithm thereof, and performing liquid temperature correction. According to the automatic liquid temperature calibration method for the czochralski single crystal, the liquid level temperature automatic recognition and correction function can be achieved through temperature logic double judgment on the basis of visual detection judgment, the accuracy of the liquid level temperature is improved, working hours are reduced, the drainage survival rate is increased, and operators are liberated; the device is an important component for realizing the functions of automatic temperature regulation, automatic seeding and the like in automatic crystal pulling, and can realize automatic calibration of the liquid temperature and improve the success rate of automatic temperature regulation and seeding.

Description

Technical Field

[0001] The invention relates to the field of Czochralski single crystal control systems, and in particular to an automatic liquid temperature calibration method for Czochralski single crystals. Background Art

[0002] The automatic calibration liquid temperature method for Czochralski single crystals is a method for controlling Czochralski single crystals. Currently, the degree of automation of various single crystal operating systems is increasing, and some have realized automatic welding and automatic crystal seeding functions. With the continuous development of science and technology, people's manufacturing process requirements for the automatic calibration liquid temperature method for Czochralski single crystals are becoming higher and higher.

[0003] The existing Czochralski single crystal control method has certain drawbacks when in use. The accuracy of the liquid surface temperature, a key indicator of the above two functions, is manually calibrated and controlled, which limits the success rate of automated fusion seeding. In the actual production process, the accuracy of the liquid surface temperature affects the efficiency of the temperature adjustment process in single crystal production and the survival rate of seeding, thereby affecting the production capacity, which has brought certain adverse effects on people's use process. For this reason, we propose a method for automatically calibrating the liquid temperature of Czochralski single crystals. Summary of the invention

[0004] Technical problems solved: In view of the deficiencies in the prior art, the present invention provides a method for automatically calibrating liquid temperature of vertically pulled single crystals, which can realize the self-identification and correction function of liquid surface temperature through dual judgment of temperature logic on the basis of visual detection and judgment, thereby improving the accuracy of liquid surface temperature, reducing working hours, improving the survival rate of crystal introduction, and liberating operators. It is an important component for realizing functions such as automatic temperature control and automatic crystal introduction in automated crystal pulling, and can realize automatic calibration of liquid temperature, improve the success rate of automated temperature control crystal introduction, and can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above purpose, the technical solution adopted by the present invention is: a method for automatically calibrating liquid temperature of a CZ single crystal, comprising the following steps: S1: The personnel independently choose to start the automatic calibration liquid temperature function to detect and judge the liquid surface temperature; S2: After the temperature is stabilized and before entering the seeding stage, the visual inspection function, liquid temperature inspection function and logic judgment function are connected; S3: By using the visual inspection function, the cell point area of ​​the visual inspection image before seeding is compared with the cell point area set by the visual model, and the cell point area comparison results are classified into three categories: seeding possible, low seeding temperature, and high seeding temperature; S4: Determine the classification result according to the area of ​​the visual cell point, match the display liquid temperature range at that time, and define the matching results into three categories: the display liquid temperature is too high, the display liquid temperature is too low, and the display liquid temperature is appropriate; S5: After seeding is completed, the temperature display logic judgment is entered, and the liquid temperature range, temperature stabilization time, average seeding pulling speed, etc. are displayed in parallel from the beginning of seeding; S6: different judgment results are defined and recorded according to the temperature performance logic judgment, which are three types: displaying that the liquid temperature is too high, displaying that the liquid temperature is too low, and displaying that the liquid temperature is appropriate; S7: When the current judgment logic is wrong, the system retrieves the judgment record that meets the conditions in the previous stage of crystal pulling, makes a comprehensive judgment on the result, and outputs the comprehensive judgment result of the liquid temperature again, which is classified into three types: the liquid temperature is too high, the liquid temperature is too low, and the liquid temperature is appropriate; S8: Perform comprehensive judgment again on the display liquid temperature judgment results according to the temperature performance logic judgment and the visual detection judgment, and output the judgment results, which are respectively that the two judgment results are consistent, the two judgment results are contradictory, or one of them does not output the judgment result; S9: When the comprehensive judgment results are contradictory or one of the judgment results is missing, an alarm is issued; when the comprehensive judgment results are consistent, the liquid temperature calibration is automatically completed; S10: Liquid temperature correction is completed by calculating the deviation between the seeding start liquid temperature value and the parameter setting seeding standard liquid temperature experience value, and correcting the liquid surface temperature coefficient according to the deviation value so that the displayed liquid surface temperature reaches the target liquid surface temperature.

[0006] As a preferred technical solution of the present application, in the steps S1-S10, a preliminary judgment is made on the displayed liquid surface temperature through the visual model detection function, and then a secondary judgment is made based on the logical judgment of the corresponding relationship between the displayed liquid temperature, the stabilization time and the average pulling speed after the crystal induction is completed. The deviation properties of the displayed liquid surface temperature relative to the actual liquid surface temperature are output based on the results of the two judgments, and then the deviation value between the displayed liquid temperature and the actual liquid temperature is automatically calculated and corrected to complete the automatic calibration of the liquid temperature.

[0007] As a preferred technical solution of the present application, in the steps S1-S10, the automatic calibration of liquid temperature function is selected to be turned on, the seeding is completed, and the seeding temperature performance logic judgment is started and the result is recorded. The liquid temperature result and the temperature logic judgment result are comprehensively judged and displayed by visual judgment, and the final judgment result is output. The judgment results are defined into four categories: the visual and logical judgment results both show that the liquid temperature is too high, the visual and logical judgment results both show that the liquid temperature is too low, the visual and logical judgment results both show that the liquid temperature is appropriate, and the visual and logical judgment results are contradictory or one of the judgment results is missing.

[0008] As a preferred technical solution of the present application, the selection of enabling the automatic calibration liquid temperature function specifically includes the following steps: A1: The temperature adjustment ends and the parameter setting temperature stabilization time is reached; A2: The visual system detects the cell area before seeding and compares it with the cell area set by the visual model; A3: When the visual judgment shows that the current cell point area is consistent with the cell point area corresponding to the standard liquid temperature range, the output is that the crystal can be seeded, and the displayed liquid temperature is within the parameter setting liquid temperature standard, it is judged that the displayed liquid temperature is appropriate; A4: When the visual judgment shows that the current cell point area is smaller than the cell point area corresponding to the standard liquid temperature range, the output is that the seeding temperature is high. At this time, the displayed liquid temperature is less than the lower limit of the liquid temperature standard set by the parameter, and the displayed liquid temperature is judged to be low; A5: When the visual judgment shows that the current cell area is larger than the cell area corresponding to the standard liquid temperature range, and the output is low seeding temperature, the displayed liquid temperature is lower than the standard lower limit of the liquid temperature set by the parameter, and the displayed liquid temperature is judged to be high.

[0009] As a preferred technical solution of the present application, after seeding is completed, the seeding temperature performance logic judgment and the result recording are started, which specifically includes the following operation steps: B1: Check the liquid temperature at the beginning of seeding. When the liquid temperature at the beginning of seeding is within the set standard, the output is 0. When the liquid temperature at the beginning of seeding is greater than the set standard, the output is 1. When the liquid temperature at the beginning of seeding is less than the set standard, the output is -1. B2: Perform logic judgment on the temperature stabilization time. When the temperature stabilization time is within the set standard, the output is 0; when the temperature stabilization time is greater than the set standard upper limit, the output is -1; when the temperature stabilization time is less than the set standard lower limit, the output is 1; B3: Perform logical judgment on the average seeding speed. When the average seeding speed is within the set standard, the output is 0; when the average seeding speed is greater than the set upper limit of the speed standard, the output is 1; when the average seeding speed is less than the set lower limit of the speed standard, the output is -1; B4: According to the above three conditions, the display liquid temperature is comprehensively judged and divided into three categories: the display liquid temperature is too high, the display liquid temperature is too low, and the display liquid temperature is appropriate; B5: When a logical contradiction occurs and the judgment result cannot be output, the previous effective liquid temperature judgment result record is checked, and the liquid temperature judgment result is output and defined as three categories: high liquid temperature, low liquid temperature, and appropriate liquid temperature.

[0010] As a preferred technical solution of the present application, the visual judgment display liquid temperature result and the temperature logic judgment result are comprehensively combined to output the final judgment result, and the judgment results are defined as four categories: the visual and logical judgment results both show that the liquid temperature is too high, the visual and logical judgment results both show that the liquid temperature is too low, the visual and logical judgment results both show that the liquid temperature is appropriate, and the visual and logical judgment results are contradictory or one of the judgment results is missing. The specific operation steps include the following: C1: According to the above four judgment results, output action instructions to automatically calibrate the liquid temperature or alarm prompts; C2: The visual and logical judgment results show that the liquid temperature is high or low, and the deviation between the starting liquid temperature and the set crystal seeding standard liquid temperature experience value is calculated, and the liquid temperature coefficient is corrected accordingly; C3: If the visual and logical judgment result shows that the temperature is appropriate, the liquid temperature will not be calibrated; C4: Alarm is triggered when the visual and logical judgment results conflict or one of the judgment results is missing.

[0011] As a preferred technical solution of the present application, in the steps S1-S10, liquid temperature calibration can be performed without manual work by setting parameters uniformly.

[0012] As a preferred technical solution of the present application, in the steps S1-S10, a preliminary judgment is made on the displayed liquid temperature before seeding through a visual detection function, and further a logical analysis is performed based on the temperature performance corresponding to the process liquid temperature change after seeding is completed. Finally, a comprehensive analysis is performed based on multiple segments of data to determine the temperature result. According to the corresponding determined temperature result and its determination algorithm, a corresponding displayed liquid temperature judgment result is generated and liquid temperature correction is performed.

[0013] Beneficial effects: Compared with the prior art, the present invention provides a method for automatically calibrating liquid temperature of a CZ single crystal, which has the following beneficial effects: the method for automatically calibrating liquid temperature of a CZ single crystal makes a preliminary judgment on the displayed liquid temperature before seeding through a visual detection function, further performs a logical analysis on the temperature performance corresponding to the process liquid temperature change after seeding is completed, and finally obtains a determined temperature result by comprehensive analysis based on multiple segments of data, generates a corresponding displayed liquid temperature judgment result according to the corresponding determined temperature result and its determination algorithm, and performs liquid temperature correction, can realize a self-identification and correction function of liquid surface temperature through temperature logic dual judgment on the basis of visual detection judgment, improves the accuracy of liquid surface temperature, reduces working hours, improves the survival rate of seeding, and liberates operators, is an important component for realizing functions such as automatic temperature control and automatic seeding in automated crystal pulling, can perform liquid temperature calibration without manual work through unified parameter setting, achieves the effect of improving efficiency, increasing production capacity, and reducing personnel dependence, and the entire method for automatically calibrating liquid temperature of a CZ single crystal has a simple structure, is easy to operate, and has better use effect than the traditional method. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The present invention is a logic determination flow chart of a method for automatically calibrating liquid temperature of a CZ single crystal.

[0015] Figure 2 The present invention is a detailed logic flow chart of a method for automatically calibrating liquid temperature of a CZ single crystal. DETAILED DESCRIPTION

[0016] The technical scheme of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but it will be understood by those skilled in the art that the following described embodiments are part of embodiments of the present invention, rather than all embodiments, and are only used to illustrate the present invention, and should not be considered as limiting the scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention. If specific conditions are not specified in the embodiments, they are carried out according to normal conditions or conditions recommended by the manufacturer. If the manufacturer is not specified in the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0017] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0018] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] like Figure 1 , 2 As shown, a method for automatically calibrating liquid temperature of a CZ single crystal includes the following steps: S1: The personnel independently choose to start the automatic calibration liquid temperature function to detect and judge the liquid surface temperature; S2: After the temperature is stabilized and before entering the seeding stage, the visual inspection function, liquid temperature inspection function and logic judgment function are connected; S3: By using the visual inspection function, the cell point area of ​​the visual inspection image before seeding is compared with the cell point area set by the visual model, and the cell point area comparison results are classified into three categories: seeding possible, low seeding temperature, and high seeding temperature; S4: Determine the classification result according to the area of ​​the visual cell point, match the display liquid temperature range at that time, and define the matching results into three categories: the display liquid temperature is too high, the display liquid temperature is too low, and the display liquid temperature is appropriate; S5: After seeding is completed, the temperature display logic judgment is entered, and the liquid temperature range, temperature stabilization time, average seeding pulling speed, etc. are displayed in parallel from the beginning of seeding; S6: different judgment results are defined and recorded according to the temperature performance logic judgment, which are three types: displaying that the liquid temperature is too high, displaying that the liquid temperature is too low, and displaying that the liquid temperature is appropriate; S7: When the current judgment logic is wrong, the system retrieves the judgment record that meets the conditions in the previous stage of crystal pulling, makes a comprehensive judgment on the result, and outputs the comprehensive judgment result of the liquid temperature again, which is classified into three types: the liquid temperature is too high, the liquid temperature is too low, and the liquid temperature is appropriate; S8: Perform comprehensive judgment again on the display liquid temperature judgment results according to the temperature performance logic judgment and the visual detection judgment, and output the judgment results, which are respectively that the two judgment results are consistent, the two judgment results are contradictory, or one of them does not output the judgment result; S9: When the comprehensive judgment results are contradictory or one of the judgment results is missing, an alarm is issued; when the comprehensive judgment results are consistent, the liquid temperature calibration is automatically completed; S10: Liquid temperature correction is completed by calculating the deviation between the seeding start liquid temperature value and the parameter setting seeding standard liquid temperature experience value, and correcting the liquid surface temperature coefficient according to the deviation value so that the displayed liquid surface temperature reaches the target liquid surface temperature.

[0020] Furthermore, in steps S1-S10, a preliminary judgment is made on the displayed liquid surface temperature through the visual model detection function, and then a secondary judgment is made based on the logical judgment of the corresponding relationship between the displayed liquid temperature, the stabilization time and the average pulling speed after the crystal induction is completed. The deviation properties of the displayed liquid surface temperature relative to the actual liquid surface temperature are output based on the two judgment results, and the deviation value between the displayed liquid temperature and the actual liquid temperature is automatically calculated and corrected to complete the automatic calibration of the liquid temperature.

[0021] Furthermore, in steps S1-S10, the automatic calibration of liquid temperature is turned on, the seeding is completed, and the seeding temperature performance logic judgment is started and the results are recorded. The liquid temperature result and the temperature logic judgment result are comprehensively judged and displayed, and the final judgment result is output. The judgment results are defined into four categories: the visual and logical judgment results both show that the liquid temperature is too high, the visual and logical judgment results both show that the liquid temperature is too low, the visual and logical judgment results both show that the liquid temperature is appropriate, and the visual and logical judgment results are contradictory or one of the judgment results is missing.

[0022] Furthermore, in steps S1-S10, liquid temperature calibration can be performed without manual work by setting parameters uniformly.

[0023] Furthermore, in steps S1-S10, a preliminary judgment is made on the displayed liquid temperature before seeding through the visual inspection function, and a logical analysis is further performed based on the temperature performance corresponding to the process liquid temperature change after the seeding is completed. Finally, a comprehensive analysis is performed based on multiple segments of data to determine the temperature result. According to the corresponding determined temperature result and its determination algorithm, the corresponding displayed liquid temperature judgment result is generated and the liquid temperature correction is performed.

[0024] The displayed liquid surface temperature is initially judged through the visual model detection function, and then a secondary judgment is made based on the logical judgment of the corresponding relationship between the displayed liquid temperature, stabilization time and average pulling speed after the crystal induction is completed. The deviation properties of the displayed liquid surface temperature relative to the actual liquid surface temperature are output based on the two judgment results, and the deviation value between the displayed liquid temperature and the actual liquid temperature is automatically calculated and corrected to complete the automatic calibration of the liquid temperature.

[0025] The first step is to choose to turn on the automatic calibration of liquid temperature function.

[0026] Furthermore, the temperature adjustment is completed and the parameter setting temperature stabilization time is reached; Further, the visual system detects the cell point area before seeding and compares it with the cell point area set by the visual model; Further, when the visual judgment shows that the current cell point area is consistent with the cell point area corresponding to the standard liquid temperature range, and the output is that the crystal can be seeded, the displayed liquid temperature is within the parameter setting liquid temperature standard, and the displayed liquid temperature is judged to be appropriate; Furthermore, when the visual judgment shows that the current cell point area is smaller than the cell point area corresponding to the standard liquid temperature range, the output is that the seeding temperature is high, and the displayed liquid temperature is less than the lower limit of the liquid temperature standard set by the parameter, it is judged that the displayed liquid temperature is low; Furthermore, when the visual judgment shows that the current cell point area is larger than the cell point area corresponding to the standard liquid temperature range, the output is that the seeding temperature is low, and the displayed liquid temperature is less than the parameter set liquid temperature standard lower limit, it is judged that the displayed liquid temperature is high; In the second step, after the seeding is completed, the logic judgment of the seeding temperature performance begins and the results are recorded.

[0027] Further, the seeding start liquid temperature is judged. When the seeding start liquid temperature is within the set standard, the output is 0. When the seeding start liquid temperature is greater than the set standard, the output is 1. When the seeding start liquid temperature is less than the set standard, the output is -1. Furthermore, a logic judgment is performed on the temperature stabilization time. When the temperature stabilization time is within the set standard, the output is 0; when the temperature stabilization time is greater than the set standard upper limit, the output is -1; and when the temperature stabilization time is less than the set standard lower limit, the output is 1. Further, a logical judgment is made on the average seeding speed. When the average seeding speed is within the set standard, the output is 0; when the average seeding speed is greater than the set upper limit of the speed standard, the output is 1; when the average seeding speed is less than the set lower limit of the speed standard, the output is -1; Furthermore, the liquid temperature properties are determined based on the above three conditions and divided into three categories: high liquid temperature, low liquid temperature, and appropriate liquid temperature. Furthermore, when a logical contradiction occurs and the judgment result cannot be output, the effective liquid temperature judgment result record of the previous section is checked, and the liquid temperature judgment result is output and defined as three categories: the liquid temperature is too high, the liquid temperature is too low, and the liquid temperature is appropriate; The third step is to comprehensively judge the liquid temperature with the result of visual judgment and the result of temperature logic judgment, and output the final judgment result. The judgment results are defined into four categories: the visual and logic judgment results both show that the liquid temperature is too high, the visual and logic judgment results both show that the liquid temperature is too low, the visual and logic judgment results both show that the liquid temperature is appropriate, the visual and logic judgment results are contradictory, or one of the judgment results is missing.

[0028] Furthermore, according to the above four determination results, action instructions are output to automatically calibrate the liquid temperature or give an alarm prompt; Furthermore, the visual and logical judgment results show that the liquid temperature is high or low, and the deviation between the starting liquid temperature and the set crystal seeding standard liquid temperature experience value is calculated, and the liquid temperature coefficient is corrected accordingly; Furthermore, if the visual and logical judgment result is that the temperature is appropriate, the liquid temperature is not calibrated; Furthermore, an alarm is triggered if the visual and logical judgment results conflict or one of the judgment results is missing.

[0029] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0030] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A method for automatically calibrating liquid temperature of a CZ single crystal, characterized in that: The steps include: S1: The personnel independently choose to start the automatic calibration liquid temperature function to detect and judge the liquid surface temperature; S2: After the temperature is stabilized and before entering the seeding stage, the visual inspection function, liquid temperature inspection function and logic judgment function are connected; S3: By using the visual inspection function, the cell point area of ​​the visual inspection image before seeding is compared with the cell point area set by the visual model, and the cell point area comparison results are classified into three categories: seeding possible, low seeding temperature, and high seeding temperature; S4: Determine the classification result according to the area of ​​the visual cell point, match the display liquid temperature range at that time, and define the matching results into three categories: the display liquid temperature is too high, the display liquid temperature is too low, and the display liquid temperature is appropriate; S5: After seeding is completed, the temperature display logic judgment is entered, and the liquid temperature range, temperature stabilization time, average seeding pulling speed, etc. are displayed in parallel from the beginning of seeding; S6: different judgment results are defined and recorded according to the temperature performance logic judgment, which are three types: displaying that the liquid temperature is too high, displaying that the liquid temperature is too low, and displaying that the liquid temperature is appropriate; S7: When the current judgment logic is wrong, the system retrieves the judgment record that meets the conditions in the previous stage of crystal pulling, makes a comprehensive judgment on the result, and outputs the comprehensive judgment result of the liquid temperature again, which is classified into three types: the liquid temperature is too high, the liquid temperature is too low, and the liquid temperature is appropriate; S8: Perform comprehensive judgment again on the display liquid temperature judgment results according to the temperature performance logic judgment and the visual detection judgment, and output the judgment results, which are respectively that the two judgment results are consistent, the two judgment results are contradictory, or one of them does not output the judgment result; S9: When the comprehensive judgment results are contradictory or one of the judgment results is missing, an alarm is issued; when the comprehensive judgment results are consistent, the liquid temperature calibration is automatically completed; S10: Liquid temperature correction is completed by calculating the deviation between the seeding start liquid temperature value and the parameter setting seeding standard liquid temperature experience value, and correcting the liquid surface temperature coefficient according to the deviation value so that the displayed liquid surface temperature reaches the target liquid surface temperature.

2. The method for automatically calibrating liquid temperature of a Czochralski single crystal according to claim 1, characterized in that: In the steps S1-S10, a preliminary judgment is made on the displayed liquid surface temperature through the visual model detection function, and then a secondary judgment is made based on the logical judgment of the corresponding relationship between the displayed liquid temperature, the stabilization time and the average pulling speed after the crystal induction is completed. The deviation properties of the displayed liquid surface temperature relative to the actual liquid surface temperature are outputted based on the results of the two judgments, and then the deviation value between the displayed liquid temperature and the actual liquid temperature is automatically calculated and corrected to complete the automatic calibration of the liquid temperature.

3. The method for automatically calibrating liquid temperature of a Czochralski single crystal according to claim 1, characterized in that: In the steps S1-S10, the automatic calibration of liquid temperature is turned on, seeding is completed, and the seeding temperature performance logic judgment is started and the results are recorded. The liquid temperature result and the temperature logic judgment result are comprehensively judged by visual judgment, and the final judgment result is output. The judgment results are defined into four categories: the visual and logical judgment results both show that the liquid temperature is too high, the visual and logical judgment results both show that the liquid temperature is too low, the visual and logical judgment results both show that the liquid temperature is appropriate, and the visual and logical judgment results are contradictory or one of the judgment results is missing.

4. The method for automatically calibrating liquid temperature of a CZ single crystal according to claim 3, characterized in that: Selecting to enable the automatic calibration of liquid temperature function includes the following steps: A1: The temperature adjustment ends and the parameter setting temperature stabilization time is reached; A2: The visual system detects the cell area before seeding and compares it with the cell area set by the visual model; A3: When the visual judgment shows that the current cell point area is consistent with the cell point area corresponding to the standard liquid temperature range, the output is that the crystal can be seeded, and the displayed liquid temperature is within the parameter setting liquid temperature standard, it is judged that the displayed liquid temperature is appropriate; A4: When the visual judgment shows that the current cell point area is smaller than the cell point area corresponding to the standard liquid temperature range, the output is that the seeding temperature is high. At this time, the displayed liquid temperature is less than the lower limit of the liquid temperature standard set by the parameter, and the displayed liquid temperature is judged to be low; A5: When the visual judgment shows that the current cell area is larger than the cell area corresponding to the standard liquid temperature range, and the output is low seeding temperature, the displayed liquid temperature is lower than the standard lower limit of the liquid temperature set by the parameter, and the displayed liquid temperature is judged to be high.

5. The method for automatically calibrating liquid temperature of a CZ single crystal according to claim 3, characterized in that: After seeding is completed, the seeding temperature performance logic judgment and result recording begin, which includes the following steps: B1: Check the liquid temperature at the beginning of seeding. When the liquid temperature at the beginning of seeding is within the set standard, the output is 0. When the liquid temperature at the beginning of seeding is greater than the set standard, the output is 1. When the liquid temperature at the beginning of seeding is less than the set standard, the output is -1. B2: Perform logic judgment on the temperature stabilization time. When the temperature stabilization time is within the set standard, the output is 0; when the temperature stabilization time is greater than the set standard upper limit, the output is -1; when the temperature stabilization time is less than the set standard lower limit, the output is 1; B3: Perform logical judgment on the average seeding speed. When the average seeding speed is within the set standard, the output is 0; when the average seeding speed is greater than the set upper limit of the speed standard, the output is 1; when the average seeding speed is less than the set lower limit of the speed standard, the output is -1; B4: According to the above three conditions, the display liquid temperature is comprehensively judged and divided into three categories: the display liquid temperature is too high, the display liquid temperature is too low, and the display liquid temperature is appropriate; B5: When a logical contradiction occurs and the judgment result cannot be output, the previous effective liquid temperature judgment result record is checked, and the liquid temperature judgment result is output and defined as three categories: high liquid temperature, low liquid temperature, and appropriate liquid temperature.

6. The method for automatically calibrating liquid temperature of a Czochralski single crystal according to claim 3, characterized in that: The visual judgment display liquid temperature result and the temperature logic judgment result are combined to output the final judgment result. The judgment results are defined as four categories: the visual and logical judgment results both display the liquid temperature is too high, the visual and logical judgment results both display the liquid temperature is too low, the visual and logical judgment results both display the liquid temperature is appropriate, the visual and logical judgment results are contradictory or one of the judgment results is missing. The specific operation steps include the following: C1: According to the above four judgment results, output action instructions to automatically calibrate the liquid temperature or alarm prompts; C2: The visual and logical judgment results show that the liquid temperature is high or low, and the deviation between the starting liquid temperature and the set crystal seeding standard liquid temperature experience value is calculated, and the liquid temperature coefficient is corrected accordingly; C3: If the visual and logical judgment result shows that the temperature is appropriate, the liquid temperature will not be calibrated; C4: Alarm is triggered when the visual and logical judgment results conflict or one of the judgment results is missing.

7. The method for automatically calibrating liquid temperature of a Czochralski single crystal according to claim 1, characterized in that: In the steps S1 to S10, the liquid temperature calibration can be performed without manual work by setting parameters uniformly.

8. The method for automatically calibrating liquid temperature of a Czochralski single crystal according to claim 1, characterized in that: In the steps S1-S10, a preliminary judgment is made on the displayed liquid temperature before seeding by using a visual inspection function, and a logical analysis is further performed based on the temperature performance corresponding to the process liquid temperature change after seeding is completed. Finally, a temperature determination result is obtained by combining a comprehensive analysis of multiple segments of data, and a corresponding displayed liquid temperature determination result is generated according to the corresponding determined temperature result and its determination algorithm, and liquid temperature correction is performed.

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