Temperature sensing assembly, heating device and process equipment

Abstract

The invention provides a temperature sensing assembly, a heating device and process equipment. The temperature sensing assembly comprises a temperature sensor and a sleeve, the sleeve is arranged outside the temperature sensor in a sleeving mode, a first gap is formed between the temperature sensor and the sleeve, the sleeve is provided with a first air groove set communicated with the first gap, the first air groove set and the first gap form a first air channel, and the first air groove set comprises one or more first air grooves. According to the temperature sensing assembly provided by the invention, when the cold air flows, the cold air can directly act on the surface of the temperature sensor through the first air channel, so that effective heat dissipation and protection of the temperature sensor are realized.

Description

Technical Field

[0001] The present application relates to the field of temperature measurement technology, and in particular to a temperature sensor component, a heating device and a process equipment. Background Art

[0002] In some processes, the process temperature needs to be detected in real time, and temperature sensors are often used for non-contact temperature measurement. In order for the temperature sensor to work normally in a high temperature environment, it is usually necessary to dissipate heat from the temperature sensor. Traditional temperature sensors lack an effective heat dissipation structure, which leads to the problem of low measurement accuracy due to the high temperature of the temperature sensor when working for a long time or in a high temperature environment. Summary of the invention

[0003] The present application discloses a temperature sensing component, a heating device and a process equipment to solve the technical problem that the temperature sensor has low measurement accuracy due to its own excessively high temperature.

[0004] In a first aspect, the present application provides a temperature sensing assembly, including a temperature sensor and a sleeve, wherein the sleeve is sleeved outside the temperature sensor, and a first gap is provided between the temperature sensor and the sleeve. A first wind slot group connected to the first gap is provided on the sleeve, and the first wind slot group and the first gap form a first air duct, and the first wind slot group includes one or more first wind slots.

[0005] The temperature sensing assembly provided by the present application has a first gap between the temperature sensor and the sleeve, and the first gap is connected to the first wind slot group, so that the first wind slot group and the first gap form a first air duct. When cold air flows, the cold air can directly act on the surface of the temperature sensor through the first air duct, thereby achieving effective heat dissipation of the temperature sensor and improving the measurement accuracy of the temperature sensor.

[0006] In a possible implementation, the first duct group is disposed on the side wall of the sleeve. In the embodiment of the present application, the first duct group is disposed on the side wall of the sleeve. Since the side wall area of ​​the sleeve is relatively large, more space is provided for the arrangement of the first duct group. Therefore, the number, position, size and shape of the first duct group can be more finely adjusted and optimized according to specific application needs and design requirements, thereby improving the flexibility of the layout of the first duct group.

[0007] In a possible implementation, the first wind slot group is arranged in the area where the sleeve is located outside the temperature sensor. In the embodiment of the present application, by arranging the first wind slot group in the area where the sleeve is located outside the temperature sensor, the external cold air can be more effectively guided into the temperature sensor component to fully exchange heat with the temperature sensor, which not only increases the contact area between the cold air and the temperature sensor, but also prolongs the residence time of the cold air inside the component, thereby improving the heat dissipation efficiency.

[0008] In a possible implementation, the first wind slot group includes a plurality of first wind slots, and the plurality of first wind slots are symmetrically arranged about the central axis of the sleeve. In the embodiment of the present application, the plurality of first wind slots are symmetrically arranged about the central axis of the sleeve, which helps to achieve more uniform heat dissipation. Since the wind slots are symmetrically distributed, when external cold air passes through, it can flow through the side wall of the sleeve more evenly, thereby taking away the heat generated by the temperature sensor. This design avoids heat accumulation on one side of the sleeve, causing local overheating of the temperature sensor, affecting its measurement accuracy and stability.

[0009] In a possible implementation, the temperature sensing assembly further includes a heat insulating member, which is sleeved outside the temperature sensor or sleeve. In the embodiment of the present application, the heat insulating member is sleeved outside the temperature sensor or sleeve, which can effectively isolate the influence of the external temperature on the temperature sensor, reduce the interference of the ambient temperature change on the temperature measurement result, and thus improve the accuracy of the temperature measurement. The presence of the heat insulating member can also reduce the thermal stress of the temperature sensor caused by the change of the external ambient temperature, thereby extending the service life of the temperature sensor and improving its working stability.

[0010] In a possible implementation, the thermal insulation piece is sleeved outside the temperature sensor, and there is a second gap between the thermal insulation piece and the temperature sensor, and the second gap is connected to the first gap. In the embodiment of the present application, the thermal insulation piece is sleeved outside the temperature sensor, and a certain second gap is maintained between the temperature sensor and the temperature sensor. This design helps to reduce the direct impact of the thermal insulation piece on the temperature measurement of the temperature sensor; at the same time, the connection between the second gap and the first gap forms a continuous thermal insulation space, which can effectively prevent external heat from being directly transferred to the temperature sensor through the thermal insulation piece, thereby enhancing the thermal insulation effect of the thermal insulation piece, ensuring that the temperature sensor works in a relatively stable temperature environment, extending its service life and improving the stability of the measurement.

[0011] In a possible implementation, the heat insulating member is docked with the sleeve, and a second wind slot group connected to the second gap is provided on the heat insulating member, and the first wind slot group, the first gap, the second gap and the second wind slot group form a second wind duct; the second wind slot group includes one or more second wind slots. In the embodiment of the present application, the heat insulating member is docked with the sleeve, and a second wind slot group connected to the second gap is provided on the heat insulating member, so that the heat insulating member has both heat insulation and heat dissipation functions; at the same time, the first wind slot group, the first gap, the second gap and the second wind slot group together form a second wind duct, which can effectively guide the cold air to flow through the heat insulating member, thereby taking away the heat on the heat insulating member, reducing its temperature, and enhancing the heat dissipation effect of the heat insulating member; and the design of the second wind slot group increases the heat dissipation area, so that the heat can be transferred to the external environment faster, thereby improving the overall heat dissipation efficiency of the temperature sensor assembly.

[0012] In a possible implementation, the heat insulating member is spaced apart from the sleeve, a second wind slot group connected to the second gap is provided on the heat insulating member, and the second wind slot group and the second gap form a third air duct. In the embodiment of the present application, the heat insulating member and the sleeve are spaced apart, which can reduce the possibility of heat transfer through direct contact, thereby playing a preliminary heat insulating role; and the second wind slot group connected to the second gap provided on the heat insulating member further enhances the heat insulating effect; the third air duct formed by the second wind slot group and the second gap can effectively prevent external heat from being directly transferred to the sleeve or the temperature sensor through the heat insulating member, thereby improving the heat insulating performance of the heat insulating member; at the same time, when the temperature sensing component is working, the heat generated can be quickly dissipated through the third air duct, avoiding the accumulation of heat between the heat insulating member and the sleeve, and improving the heat dissipation efficiency.

[0013] In a possible implementation, the heat insulating member is sleeved outside the sleeve, and a second wind slot group connected to the first wind slot group is provided on the heat insulating member, and the second wind slot group, the first wind slot group, and the first gap form a fourth air duct. In the application embodiment, the heat insulating member is sleeved outside the sleeve, providing an additional protective barrier for the temperature sensor, effectively isolating the direct heat radiation of the external heat source to the temperature sensor; at the same time, the second wind slot group on the heat insulating member is interconnected with the first wind slot group on the sleeve, forming a smooth heat dissipation channel, when the external cold air enters through the second wind slot group, it can smoothly flow through the first wind slot group, and finally enter the first gap, and perform efficient heat exchange with the temperature sensor, so that not only the contact area between the cold air and the temperature sensor is increased, but also the residence time of the cold air inside the component is prolonged, thereby significantly improving the heat dissipation efficiency; in addition, the formation of the fourth air duct also helps to balance the temperature distribution inside the component, reduce the temperature gradient, and ensure that the temperature sensor can more accurately reflect the true temperature of the object being measured.

[0014] In a possible implementation, the second air slot is disposed on the side wall of the heat insulating member, so that the cold air in the external environment can be more effectively utilized. When the cold air passes through the heat insulating member, the second air slot on the side wall can guide the cold air into the first gap or the second gap, thereby enhancing the heat dissipation effect on the temperature sensor.

[0015] Or / and, the size of the second air slot is larger than that of the first air slot, which means that it can accommodate more air flow, thereby accelerating the speed of heat exchange. When the temperature sensor assembly is working, the generated heat can be dissipated faster through the second air slot, effectively reducing the temperature of the heat insulation member and the sleeve, and improving the heat dissipation efficiency of the entire temperature sensor assembly;

[0016] Or / and, the position of the second wind trough corresponds to that of the first wind trough group, and the second wind trough is correspondingly arranged outside the first wind trough, which can form a smoother air cooling path, help to speed up the flow speed of air between the second wind trough and the first wind trough group, thereby more effectively taking away the heat generated by the temperature sensor component, and significantly improving the heat dissipation efficiency.

[0017] In a possible implementation, the reflectivity of the outer surface of the sleeve is greater than or equal to 80%. In the embodiment of the present application, the high reflectivity of the outer surface means that the outer surface of the sleeve can reflect most of the thermal radiation irradiated thereon, so that when the sleeve works in a high temperature or strong thermal radiation environment, it can effectively reduce the absorption of heat, thereby reducing its own temperature and the temperature on the temperature sensor.

[0018] In a possible implementation, the outer surface of the sleeve is a polished surface. The polished outer surface of the sleeve is smoother, which can enhance the reflectivity of the outer surface of the sleeve, reduce heat absorption, and lower the temperature of the sleeve.

[0019] Or / and, the outer surface of the sleeve is provided with an inclined surface, which can change the reflection path of the light, making the light more likely to be reflected rather than absorbed, thereby enhancing the reflection effect of the sleeve, reducing the absorption of heat, and lowering the temperature of the sleeve;

[0020] Or / and, the outer surface of the sleeve is provided with a reflective material, which can significantly improve the reflectivity of the sleeve, reduce heat absorption, and lower the temperature of the sleeve.

[0021] In a possible implementation, the absorptivity of the inner surface of the sleeve is greater than or equal to 80% to effectively absorb stray light. In the embodiment of the present application, the high absorptivity of the inner surface of the sleeve means that it can more efficiently absorb the stray light generated by the non-temperature measurement object entering the sleeve. If the stray light is not effectively absorbed, it will be reflected and scattered in the sleeve, which may interfere with the normal operation of the temperature sensor. The high absorptivity inner surface design can significantly reduce the residual stray light in the sleeve, providing a pure optical environment for temperature measurement.

[0022] In a possible implementation, the inner surface of the sleeve is provided with an inclined surface. The inclined surface design of the inner surface of the sleeve can change the reflection path of the stray light entering the sleeve, making it easier to be absorbed or scattered, rather than directly irradiating the temperature sensor. This setting effectively reduces the interference of stray light on the temperature measurement signal and improves the accuracy of temperature measurement.

[0023] Or / and, an absorbing material is provided on the inner surface of the sleeve. Since the absorbing material can further absorb the residual stray light, the optical purity of the temperature measurement environment is ensured, thereby avoiding the influence of the stray light on the temperature measurement result.

[0024] In a possible implementation, the temperature sensing assembly further includes a light guide tube, one end of which is sleeved on an end of the sleeve away from the temperature sensor. The light guide tube is used to guide the thermal radiation of the area to be measured to the temperature sensor. In the embodiment of the present application, since the thermal radiation is guided to the temperature sensor by the light guide tube for temperature measurement, the temperature sensor is at a certain distance from the high temperature area, which can reduce the influence of high temperature on the temperature sensor and is conducive to extending the service life of the temperature sensor.

[0025] In a second aspect, the present application provides a heating device, comprising a temperature sensing component as in the first aspect. As the core part of the heating device, the temperature sensing component can monitor the temperature change during the heating process in real time and accurately. By strengthening the heat dissipation of the temperature sensing component, it can be ensured that the heating device can still maintain a stable working state in a high temperature environment.

[0026] In a possible implementation, the heating device further includes a heating chamber, the temperature sensing component is disposed in the heating chamber, the heating chamber is provided with an air inlet and an air outlet, and the shortest distance between the temperature sensing component and the air inlet is smaller than the shortest distance between the temperature sensing component and the air outlet. In this embodiment, the temperature sensing component is disposed closer to the air inlet than to the air outlet, and the temperature of the cold air entering from the air inlet is lower than the temperature of the cold air from the air outlet, thereby enhancing the heat dissipation effect of the cold air on the temperature sensing component.

[0027] In a third aspect, the present application provides a process device, including a heating device as in the second aspect. In an embodiment of the present application, the heating device in the process device can quickly heat the relevant components to a preset temperature through precise temperature control, and can ensure precise temperature monitoring, thereby ensuring the accuracy of the heating process and optimizing the performance of the process device. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a structural schematic diagram of a process equipment provided by one embodiment of the present application;

[0030] Figure 2 is a three-dimensional schematic diagram of a temperature sensor assembly provided in one embodiment of the present application;

[0031] Figure 3 is along Figure 2 A schematic cross-sectional view obtained along line AA shown;

[0032] Figure 4 yes Figure 3 An enlarged schematic diagram of a local area I;

[0033] Figure 5 It is a schematic diagram of a case where a heat insulating member of a temperature sensing assembly provided in one embodiment of the present application is provided with a second wind slot;

[0034] Figure 6 It is a schematic diagram of the spacing arrangement of the heat insulating member and the sleeve of the temperature sensing assembly provided in one embodiment of the present application;

[0035] Figure 7 It is a schematic diagram showing that a heat insulating member of a temperature sensing assembly provided in one embodiment of the present application is sleeved outside a sleeve.

[0036] Description of reference numerals:

[0037] 1- Process equipment;

[0038] 10- Heating device;

[0039] 101 - heating chamber;

[0040] 1011-air inlet; 1012-air outlet; 1013-thermal radiation source; 1014-substrate;

[0041] 102- temperature sensing component;

[0042] 1021-temperature sensor; 1022-sleeve; 1023-first gap; 1024-heat insulation; 1025-second gap; 1026-light guide tube; 1027-first air duct; 1028-second air duct; 1029-third air duct; 1030-fourth air duct;

[0043] 10221-first air duct group; 10241-thermal insulation pad; 10242-shading plate;

[0044] 102211-first air duct; 102411-second air duct group;

[0045] 1024111-Second air duct. DETAILED DESCRIPTION

[0046] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0047] See also Figure 1Some embodiments of the present application provide a process equipment 1. The process equipment 1 may be a semiconductor device or other types of equipment, such as a boiler, a gas turbine, and the like. Semiconductor equipment is a type of equipment that needs to be used in the process of producing semiconductors. The process equipment 1 may be a semiconductor epitaxial device, an oxidation furnace, a rapid thermal processing device, a thin film deposition device, a single crystal furnace, a wet cleaning device, a wafer bonding device, a semiconductor epitaxial device, and the like. The following is an example of the process equipment 1 being a semiconductor epitaxial device. The working principle of the semiconductor epitaxial device mainly relies on the vapor phase epitaxy technology. By controlling parameters such as gas flow and temperature, an epitaxial layer is deposited on a substrate to meet the needs of semiconductor material growth.

[0048] The semiconductor epitaxial equipment includes a gas supply device, a substrate loading device, an exhaust treatment device, and a heating device 10. The gas supply device is responsible for providing various gases required for epitaxial growth to ensure that the flow rate and composition of the gas are accurately controlled; the substrate loading device is used to load the substrate to be epitaxially grown into the reaction chamber; the exhaust treatment device is used to treat the waste gas generated during the reaction process to ensure the cleanliness and safety of the production environment; the heating device 10 is used to provide the temperature environment required for the production or processing of semiconductor materials. Through precise temperature control, the semiconductor material can be quickly heated to a preset temperature, and accurate temperature monitoring can be guaranteed, ensuring the accuracy of the heating process and optimizing the performance of the semiconductor equipment.

[0049] The heating device 10 includes a heating chamber 101 and a temperature sensing component 102. The heating chamber 101 is used to provide a production and processing place. The temperature sensing component 102 is arranged in the heating chamber 101 and is used to measure the temperature of the heating chamber 101. As the core part of the heating device 10, the temperature sensing component 102 can monitor the temperature changes during the heating process in real time and accurately. By strengthening the heat dissipation of the temperature sensing component 102, it can be ensured that the heating device 10 can still maintain a stable working state in a high temperature environment. It can be understood that the present application does not limit the temperature sensing component 102 to the heating device 10 of the process equipment 1. The temperature sensing component 102 can also be used in other devices or equipment working in a high temperature working environment, such as boilers, gas turbines, etc.

[0050] The heating chamber 101 includes an air inlet 1011, an air outlet 1012 and a thermal radiation source 1013. The air inlet 1011 is used for air intake, and the air outlet 1012 is used for air discharge, so that an air duct of the air inlet 1011, the heating chamber 101 and the air outlet 1012 is formed to form an air cooling path in the heating chamber 101, and then the device or apparatus on the heating chamber 101 is air cooled, for example, the temperature sensor component 102 is air cooled. The thermal radiation source 1013 is used to heat the temperature of the heating chamber 101 to a preset temperature. The heating chamber 101 is used to provide a place for the production and processing of the substrate 1014. The substrate 1014 is a key material for manufacturing integrated circuits, usually made of single crystal silicon, with high purity and no impurities. Oxide and silicon thin films can be grown layer by layer on the substrate 1014 to form insulating layers and devices such as transistors in the circuit. It can be understood that the heating chamber 101 is not limited to being used for processing the substrate 1014, and the heating chamber 101 can also be used for processing other workpieces.

[0051] In some embodiments of the present application, the shortest distance between the temperature sensor component 102 and the air inlet 1011 is smaller than the shortest distance between the temperature sensor component 102 and the air outlet 1012, that is, the temperature sensor component 102 is arranged close to the air inlet 1011, so the temperature of the cold air entering from the air inlet 1011 is lower than the temperature of the cold air from the air outlet 1012, that is, the temperature sensor component 102 is in the cold air zone of the heating chamber 101, thereby enhancing the heat dissipation effect of the cold air on the temperature sensor component 102.

[0052] The heat radiation source 1013 may include a plurality of heating elements, and the plurality of heating elements are distributed in the heating chamber 101. The heating element may be, but is not limited to, a halogen bulb or other heating component.

[0053] In some possible implementations, the heating chamber 101 may further include a shading layer attached to the inner wall of the heating chamber 101. The shading layer may be made of shading materials such as shading coatings. The shading layer is used to block the outgoing light of the thermal radiation source 1013 to reduce the amount of light reaching the side wall of the heating chamber 101, thereby reducing the amount of heat transferred from the side wall of the heating chamber 101 to the temperature sensing component 102.

[0054] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4Based on this, a temperature sensing assembly 102 provided in one embodiment of the present application includes a temperature sensor 1021 and a sleeve 1022. The sleeve 1022 is inserted into the heating chamber 101 and sleeved outside the temperature sensor 1021 to provide heat insulation protection for the temperature sensor 1021. At least part of the temperature sensor 1021 can be located outside the heating chamber 101. The temperature sensor 1021 is used to measure the temperature of the heating chamber 101.

[0055] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 The sleeve 1022 is sleeved on the outside of the temperature sensor 1021, and a first gap 1023 is provided between the temperature sensor 1021 and the sleeve 1022. The sleeve 1022 is provided with a first wind slot group 10221 connected to the first gap 1023. The first wind slot group 10221 and the first gap 1023 form a first wind duct 1027. The first wind slot group 10221 includes one or more first wind slots 102211. Figure 4 The first air duct 1027 is exemplarily shown by a dotted line with an arrow, and the present application does not limit the specific shape and structure of the first air duct 1027.

[0056] In some embodiments of the present application, the sleeve 1022 is sleeved outside the temperature sensor 1021, including the sleeve 1022 being sleeved on one end of the temperature sensor 1021, or / and being sleeved on the side wall of the temperature sensor 1021. That is, the sleeve 1022 can be sleeved only on one end of the temperature sensor 1021, or only on the side wall of the temperature sensor 1021, or simultaneously on one end and the side wall of the temperature sensor 1021. When the sleeve 1022 is sleeved only on one end of the temperature sensor 1021, the sleeve 1022 only covers one end of the temperature sensor 1021, and the sleeve 1022 is used to protect the end of the temperature sensor 1021 and prevent the end of the temperature sensor 1021 from being damaged or contaminated. When the sleeve 1022 is only sleeved on the side wall of the temperature sensor 1021, the sleeve 1022 extends along the side wall of the temperature sensor 1021, but does not cover any end thereof, so as to provide a certain degree of heat insulation or guiding effect without affecting the direct contact between the temperature sensor and the external environment. When the sleeve 1022 is sleeved on one end and the side wall of the temperature sensor 1021 at the same time, the sleeve 1022 completely or partially covers one end and the entire side wall of the temperature sensor 1021, and this arrangement can ensure the stability and accuracy of the temperature sensor 1021.

[0057] The temperature sensing assembly 102 provided in the present application realizes effective heat dissipation and protection of the temperature sensor 1021 by setting a first wind slot group 10221 outside the sleeve 1022. Specifically, the sleeve 1022 is sleeved outside the temperature sensor 1021, and a first gap 1023 is left between the two, and the first gap 1023 provides space for the flow of air. The sleeve 1022 is specially provided with a first wind slot 102211 connected to the first gap 1023, so that when the external air-cooling air flows, it can enter the first gap 1023 through the first wind slot 102211, forming a smooth first air duct 1027. Since there is a first gap 1023 between the temperature sensor 1021 and the sleeve 1022, the first gap 1023 is connected to the first wind slot group 10221, so that the first wind slot group 10221 and the first gap 1023 form a first air duct 1027. When cold air flows, the cold air can directly act on the surface of the temperature sensor 1021 through the first air duct 1027, thereby achieving effective heat dissipation of the temperature sensor 1021 and improving the measurement accuracy of the temperature sensor 1021.

[0058] The temperature sensor 1021 may be a non-contact temperature sensor, for example, the temperature sensor 1021 may be a pyrometer. A pyrometer is generally not in contact with a high-temperature object, but is a type of instrument that measures the radiant heat of the object and uses a radiation formula to infer the temperature of the object. In some embodiments of the present application, the temperature sensor 1021 is an infrared pyrometer. An infrared pyrometer is a commonly used non-contact temperature measurement device, which is widely used in many fields such as steel, metallurgy, glass, ceramics, and construction. It is understood that the temperature sensor 1021 may also be an optical temperature sensor, a colorimetric temperature sensor, a thermocouple thermometer, and the like.

[0059] The first gap 1023 between the temperature sensor 1021 and the sleeve 1022 means that a gap is formed between the outer wall of the temperature sensor 1021 and the inner wall of the sleeve 1022. In the axial direction of the sleeve 1022, the first gap 1023 can extend to the end face of the sleeve 1022 to communicate with the external space of the sleeve 1022, which is conducive to increasing the contact area between the airflow and the surface of the temperature sensor 1021. The two ends of the first gap 1023 are respectively connected to the external space of the sleeve 1022 in the axial direction of the sleeve 1022. In this way, after the airflow entering the first gap 1023 from the first wind slot 102211 dissipates heat and cools the temperature sensor 1021, it flows out from the two axial ends of the sleeve 1022, which is conducive to increasing the speed of heat dissipation from the inside of the sleeve 1022 to the outside of the sleeve 1022, thereby enhancing the heat dissipation effect. It is understood that the first gap 1023 may also extend along the circumference of the sleeve 1022 to increase the contact area between the airflow and the surface of the temperature sensor 1021 in the circumference of the sleeve 1022. It is understood that the present application does not limit the shape and extension direction of the first gap 1023, and the first gap 1023 can be connected to the first wind slot group 10221. For example, in some embodiments, in the axial direction of the sleeve 1022, one end of the first gap 1023 can extend to the end surface of the sleeve 1022 and communicate with the external space of the sleeve 1022.

[0060] In some embodiments of the present application, the sleeve 1022 may be substantially cylindrical, and the present application does not limit the shape of the sleeve 1022. For example, the sleeve 1022 may be a square tube or other regular or irregular shapes. The present application does not limit the connection method between the sleeve 1022 and the temperature sensor 1021. For example, the sleeve 1022 may be connected to the temperature sensor 1021 by threaded fit, clamping, bonding, interference fit, etc.

[0061] In some embodiments of the present application, the first duct group 10221 is disposed on the side wall of the sleeve 1022. The first duct group 10221 is disposed on the side wall of the sleeve 1022. Since the side wall area of ​​the sleeve 1022 is relatively large, more space is provided for the arrangement of the first duct group 10221. Therefore, the number, position, size and shape of the first duct group 10221 can be more finely adjusted and optimized according to specific application needs and design requirements, thereby improving the flexibility of the layout of the first duct group 10221.

[0062] Specifically, if the first wind slot group 10221 has a plurality of first wind slots 102211, the plurality of first wind slots 102211 are arranged on the side wall of the sleeve 1022 along the axial direction of the sleeve 1022, and the axial arrangement can ensure that the cold air flows smoothly in the length direction of the sleeve; the first wind slot group 10221 can also be arranged on the side wall of the sleeve 1022 along the circumferential direction of the sleeve 1022, and the circumferential arrangement can make the cold air evenly distributed around the sleeve 1022, thereby improving the uniformity and efficiency of ventilation. On the basis of ensuring that the strength of the sleeve 1022 meets the requirements, the first wind slot group 10221 can be arranged on the sleeve 1022 as much as possible.

[0063] In some embodiments of the present application, the first wind slot group 10221 is disposed in an area of ​​the sleeve 1022 outside the temperature sensor 1021. Specifically, the first wind slot group 10221 is located in a specific area of ​​the sleeve 1022, which is located just outside the temperature sensor 1021. In other words, from the perspective of spatial layout, the positions of the first wind slot group 10221 and the temperature sensor 1021 on the sleeve 1022 correspond to each other, but the first wind slot group 10221 does not directly contact or cover the temperature sensor 1021, but is located outside thereof, and is used to adjust or manage the airflow around the temperature sensor 1021 to achieve the purpose of cooling the temperature sensor 1021. By setting the first wind groove group 10221 in the area where the sleeve is located outside the temperature sensor 1021, the external cold air can be more effectively guided into the temperature sensor component 102 and fully heat exchange with the temperature sensor 1021, which not only increases the contact area between the cold air and the temperature sensor 1021, but also extends the residence time of the cold air inside the temperature sensor component 102, thereby improving the heat dissipation efficiency.

[0064] Exemplarily, the first wind slot group 10221 includes a plurality of first wind slots 102211, and the plurality of first wind slots 102211 are symmetrically arranged about the central axis of the sleeve 1022, that is, on the outer surface of the sleeve 1022, there are a plurality of first wind slots 102211, and these first wind slots 102211 are centered on the central axis of the sleeve 1022, and are opposite to each other to form a symmetrical layout. The plurality of first wind slots 102211 are symmetrically arranged about the central axis of the sleeve 1022, which helps to achieve more uniform heat dissipation. Since the first wind slots 102211 are symmetrically distributed, when external cold air passes through, it can flow through the side wall of the sleeve 1022 more evenly, thereby taking away the heat generated by the temperature sensor 1021. This design avoids the accumulation of heat on one side of the sleeve 1022, causing local overheating of the temperature sensor 1021, affecting its measurement accuracy and stability. By symmetrically setting the first wind slots 102211, it can be ensured that the temperature sensor 1021 can be kept in a relatively stable temperature range throughout the working process, thereby improving its measurement performance. In addition, the symmetrically set first wind slot group 10221 also helps to enhance the structural stability of the sleeve 1022. Since the multiple first wind slots 102211 are symmetrically distributed, the openings they form on the sleeve 1022 are also balanced, which helps to maintain the balance of the sleeve 1022 when subjected to force. During the use of the temperature sensing component 102, the sleeve 1022 may be affected by various external forces, such as vibration, impact, etc. By symmetrically setting the first wind slots 102211, the influence of these external forces on the structure of the sleeve 1022 can be reduced, thereby extending the service life of the temperature sensing component 102.

[0065] In some embodiments of the present application, the first wind groove 102211 penetrates the inner wall and the outer wall of the sleeve 1022 in the radial direction of the sleeve 1022, which helps to shorten the path length of the airflow outside the sleeve 1022 entering the first gap 1023 from outside the sleeve 1022.

[0066] In some embodiments of the present application, the width of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 is less than the length of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022. The width of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 refers to the axial dimension of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 in the axial direction of the sleeve 1022. The length of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 refers to the circumferential extension length of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 in the circumferential direction of the sleeve 1022. By setting the opening width of the first wind slot 102211 on the outer wall of the sleeve 1022 to be less than its length, more efficient airflow guidance and distribution can be achieved, while enhancing the structural strength of the sleeve.

[0067] The width of the opening of the first wind slot 102211 on the inner wall of the sleeve 1022 is equal to the width of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022. The opening of the first wind slot 102211 on the outer wall of the sleeve 1022 is the inlet for the airflow to enter the first wind slot 102211, and the opening of the first wind slot 102211 on the inner wall of the sleeve 1022 is the outlet for the airflow to be output from the first wind slot 102211. Since the opening widths of the first wind slot 102211 on the inner wall and the outer wall of the sleeve 1022 are equal, when the airflow enters the first wind slot 102211 from the outside, it can maintain a relatively uniform flow rate and flow, which helps to avoid turbulence or eddy currents generated by the airflow inside the first wind slot 102211, thereby improving the uniformity of airflow distribution. In some possible implementations, the width of the opening of the first wind slot 102211 on the inner wall of the sleeve 1022 can also be smaller than the width of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022, so that the first wind slot 102211 is roughly trumpet-shaped, so that the opening of the first wind slot 102211 on the outer wall of the sleeve 1022 can guide the airflow to guide more airflow to the inside of the sleeve 1022, which helps to improve the transmission efficiency of the airflow. In some possible implementations, the width of the opening of the first wind slot 102211 on the inner wall of the sleeve 1022 can be larger than the width of the opening of the first wind slot 102211 on the outer wall of the sleeve 1022, which can increase the contact area between the airflow and the temperature sensor 1021 and improve the heat dissipation efficiency.

[0068] In some embodiments of the present application, the extension length of the first wind slot 102211 between the inner wall and the outer wall of the sleeve 1022 is the same as the thickness of the side wall of the sleeve 1022 at the position of the sleeve 1022 where the first wind slot 102211 is located, which is conducive to shortening the transmission path of the airflow in the sleeve 1022. The extension length of the first wind slot 102211 between the inner wall and the outer wall of the sleeve 1022 can also be called the depth of the first wind slot 102211. The thickness of the side wall of the sleeve 1022 at the position of the sleeve 1022 where the first wind slot 102211 is located refers to the thickness between the inner wall and the outer wall of the sleeve 1022 at the position of the sleeve 1022 where the first wind slot 102211 is located. In some possible implementations, the extension length of the first wind groove 102211 between the inner wall and the outer wall of the sleeve 1022 may be greater than the side wall thickness of the sleeve 1022 at the position of the first wind groove 102211 in the sleeve 1022, and the first wind groove 102211 is roughly a curved structure in the radial direction of the sleeve 1022, and the curved structure can adjust the flow rate and direction of the airflow entering the first wind groove 102211.

[0069] In some possible implementations, the first wind slot 102211 may be a streamlined structure to reduce the resistance of the airflow in the first wind slot 102211. The inner wall of the first wind slot 102211 may also be formed with protrusions and / or grooves to form a turbulent structure, which can enhance the turbulent effect, thereby improving the heat dissipation efficiency of the sleeve 1022.

[0070] In some embodiments of the present application, the plurality of first wind slots 102211 are evenly spaced in the axial direction of the sleeve 1022, which is beneficial to improve the heat dissipation uniformity of the sleeve 1022. It is understood that the present application does not limit the spacing between every two first wind slots 102211 of the plurality of first wind slots 102211.

[0071] It can be understood that the depth and width of the first wind slots 102211 and the spacing between adjacent first wind slots 102211 can be set as needed to ensure that the heat dissipation area and airflow efficiency are maximized without affecting the structural strength of the sleeve.

[0072] In some possible implementations, in the radial direction of the sleeve 1022, the first wind groove 102211 may also penetrate the inner wall of the sleeve 1022, and a wind hole connected to the first wind groove 102211 is provided on the axial end face of the sleeve 1022. The wind groove penetrates the inner wall and the wind hole is provided on the end face, so that the airflow can flow more smoothly inside the sleeve, which helps to reduce the airflow resistance, improve the uniformity and stability of the airflow inside the sleeve, and thus optimize the airflow distribution.

[0073] In some embodiments of the present application, the first wind slot 102211 extends along the circumference of the sleeve 1022 to increase the amount of air intake. The number of the first wind slots 102211 is multiple, and the multiple first wind slots 102211 and the first gap 1023 can form an air duct to increase the air intake area and improve the air cooling efficiency. The multiple first wind slots 102211 can be divided into two groups of first wind slot groups 10221, and the two groups of first wind slot groups 10221 can be symmetrically arranged relative to the central axis of the sleeve 1022 to improve the heat dissipation uniformity of the temperature sensor 1021. Each group of first wind slot groups 10221 includes multiple first wind slots 102211, and the multiple first wind slots 102211 in each group of first wind slot groups 10221 are arranged along the axial direction of the sleeve 1022.

[0074] It can be understood that the present application does not limit the structure, shape, and number of the first wind grooves 102211. For example, the number of the first wind grooves 102211 can be one, the first wind grooves 102211 may not be symmetrical about the central axis of the sleeve 1022, the first wind grooves 102211 may extend along the axial direction of the sleeve 1022, the first wind grooves 102211 may also be irregularly shaped, and the extension lengths of multiple first wind grooves 102211 in the circumferential direction and / or axial direction of the sleeve 1022 may be the same or different.

[0075] In some embodiments of the present application, the orthographic projection of at least one first wind slot 102211 in the first wind slot group 10221 along the radial direction of the sleeve 1022 is located on the temperature sensor 1021, so that the cold air entering from the first wind slot group 10221 directly contacts the outer surface of the temperature sensor 1021, further enhancing the heat dissipation effect. It can be understood that in some possible embodiments, the orthographic projection of the first wind slot group 10221 along the radial direction of the sleeve 1022 may not be located at the temperature sensor 1021, and the first wind slot group 10221 can allow the cold air to enter.

[0076] In some embodiments of the present application, in the axial direction of the sleeve 1022, there is a gap between the end surface of the temperature sensor 1021 located in the sleeve 1022 and the end surface of the sleeve 1022 away from the temperature sensor 1021. The airflow enters the first gap 1023 from the first wind slot group 10221. Part of the air entering the first gap 1023 is output from the first end of the sleeve 1022 away from the temperature sensor 1021, and part of the air entering the first gap 1023 is output from the second end of the sleeve 1022 to air-cool the temperature sensor 1021. Compared with the method of using water cooling to dissipate heat from the temperature sensor 1021, the structure of the temperature sensor assembly 102 provided in the present application is simpler, and installation and maintenance are more convenient, which improves the flexibility of layout and use of the temperature sensor 1021. In addition, there is a gap between the end face of the temperature sensor 1021 located in the sleeve 1022 and the end face of the sleeve 1022 away from the temperature sensor 1021, so as to reduce the influence of the high temperature environment on the temperature sensor 1021, improve the heat insulation protection effect of the sleeve 1022 on the temperature sensor 1021, and also help to improve the temperature measurement accuracy and stability of the temperature sensor 1021. It can be understood that there may be no gap between the end face of the temperature sensor 1021 located in the sleeve 1022 and the end face of the sleeve 1022 away from the temperature sensor 1021, so that the temperature sensor 1021 is closely attached to the end face of the sleeve 1022, reducing the temperature measurement error caused by the air gap or the thermal resistance layer, thereby improving the accuracy of the temperature measurement.

[0077] The temperature sensing assembly 102 also includes a heat insulating member 1024, which is sleeved outside the temperature sensor 1021 and / or sleeved outside the sleeve 1022. The heat insulating member 1024 is used to insulate the temperature sensor 1021 and / or the sleeve 1022 to reduce the heat transfer from the sleeve 1022 to the temperature sensor 1021. The heat insulating member 1024 is sleeved on the temperature sensor 1021 or sleeved outside the sleeve 1022, which can effectively isolate the influence of the external temperature on the temperature sensor 1021, reduce the interference of the ambient temperature change on the temperature measurement result, and improve the accuracy of the temperature measurement. The presence of the heat insulating member 1024 can also reduce the thermal stress of the temperature sensor 1021 caused by the change of the external ambient temperature, thereby extending the service life of the temperature sensor 1021 and improving its working stability.

[0078] The heat insulating member 1024 is sleeved on the temperature sensor 1021 and / or sleeved on the outside of the sleeve 1022, including the following situations: ① The heat insulating member 1024 is sleeved on the temperature sensor 1021 but not sleeved on the outside of the sleeve 1022, the heat insulating member 1024 and the sleeve 1022 are arranged along the axial direction of the temperature sensor 1021, and the radial projection of the heat insulating member 1024 on the temperature sensor 1021 is located on the temperature sensor 1021; ② The heat insulating member 1024 can be partially sleeved on the outside of the temperature sensor 1021, and can also be partially sleeved on the outside of the sleeve 1022, and the heat insulating member 1024 is The radial orthographic projection of the temperature sensor 1021 is partially located in the sleeve 1022, and partially located in the temperature sensor 1021, that is, part of the thermal insulation member 1024 and the sleeve 1022 are arranged along the axial direction of the temperature sensor 1021; ③ The sleeve 1022 is sleeved outside the temperature sensor 1021, and the thermal insulation member 1024 is sleeved outside the sleeve 1022. The sleeve 1022 is located between the inner wall of the thermal insulation member 1024 and the outer wall of the temperature sensor 1021 in the radial direction of the sleeve 1022, and the radial orthographic projection of the thermal insulation member 1024 in the sleeve 1022 can be completely located in the sleeve 1022.

[0079] In ① and ②, since at least part of the heat insulating member 1024 and the sleeve 1022 are arranged in the axial direction of the temperature sensor 1021, the covering area of ​​the outer surface of the temperature sensor 1021 is increased in the axial direction of the temperature sensor 1021, which is beneficial to increase the heat insulation effect in the axial direction of the temperature sensor 1021. In ② and ③, since at least part of the heat insulating member 1024 and the sleeve 1022 are arranged in the radial direction of the temperature sensor 1021, the heat insulation effect in the radial direction of the temperature sensor 1021 is increased.

[0080] The present application does not limit the connection method between the temperature sensor 1021, the heat insulating member 1024, and the sleeve 1022. For example, when at least a portion of the heat insulating member 1024 is sleeved on the temperature sensor 1021, the temperature sensor 1021 and the heat insulating member 1024 can be connected by, but not limited to, threaded fitting, snap-fitting, bonding, interference fitting, etc. For another example, when at least a portion of the heat insulating member 1024 is sleeved on the sleeve 1022, the heat insulating member 1024 and the sleeve 1022 can be connected by, but not limited to, threaded fitting, snap-fitting, bonding, interference fitting, etc.

[0081] like Figure 1 As shown, the heat insulating member 1024 may be a heat insulating pad 10241 or / and a light shielding plate 10242. The heat insulating pad 10241 is located outside the heating chamber 101, and may also be located outside the heating chamber 101. The heat insulating pad 10241 is sleeved on the temperature sensor 1021, and the heat insulating pad 10241 and the sleeve 1022 are arranged along the axial direction of the temperature sensor 1021. The heat insulating pad 10241 is used to insulate the temperature sensor 1021 to reduce the heat transfer from the sleeve 1022 to the temperature sensor 1021. The light shielding plate 10242 is sleeved outside the sleeve 1022, and the light shielding plate 10242 is located inside the heating chamber 101 or outside the heating chamber 101. The light shielding plate 10242 is used to shield the emitted light of the thermal radiation source 1013 to reduce the amount of light emitted by the thermal radiation source 1013 reaching the outer surface of the sleeve 1022. Since the amount of light reaching the outer surface of the sleeve 1022 is reduced, the temperature of the sleeve 1022 can be effectively reduced. In some embodiments of the present application, in the axial direction of the sleeve 1022, part of the temperature sensor 1021 is accommodated in the second end of the sleeve 1022, and the maximum axial spacing between the end surface of the first wind slot group 10221 and the second end of the sleeve 1022 is less than the minimum axial spacing between the light shielding plate 10242 and the end surface of the second end of the sleeve 1022. Compared with the first wind slot group 10221, the light shielding plate 10242 is closer to the heating radiation source 1013, and the light shielding plate 10242 is conducive to reducing the light entering the sleeve 1022 through the first wind slot group 10221, which is conducive to reducing the influence of the heating radiation source 1013 on the temperature sensor 1021.

[0082] Please refer again Figure 2 , the thermal insulation pad 10241 can be cylindrical. Figure 2 , in the axial direction of the vertical sleeve 1022, the size of the thermal insulation pad 10241 is larger than the size of part of the sleeve 1022, so that the temperature sensor 1021 is partially located outside the heating chamber 101, reducing the impact of the internal high temperature of the heating chamber 101 on the temperature sensor 1021, and further improving the temperature measurement accuracy of the temperature sensor 1021. It can be understood that in the axial direction of the vertical sleeve 1022, the size of the thermal insulation pad 10241 can be greater than or equal to the size of the sleeve 1022.

[0083] There is a second gap 1025 between the thermal insulation pad 10241 and the outer surface of the temperature sensor 1021, and the second gap 1025 is connected to the first gap 1023 or is spaced from the first gap 1023. The thermal insulation pad 10241 is sleeved outside the temperature sensor 1021 and maintains a certain second gap 1025 between the temperature sensor 1021. This design helps to reduce the direct impact of the thermal insulation pad 10241 on the temperature measurement of the temperature sensor 1021. Since the main function of the thermal insulation pad 10241 is to isolate the external temperature, if it is in direct contact with the temperature sensor 1021, it may interfere with the temperature measurement result of the temperature sensor 1021. The existence of the second gap 1025 effectively avoids this interference, so that the temperature sensor 1021 can measure the target temperature more accurately. The connection between the second gap 1025 and the first gap 1023 forms a continuous insulation space, which can effectively prevent external heat from being directly transferred to the temperature sensor 1021 through the insulation pad 10241, thereby enhancing the insulation effect of the insulation pad 10241, ensuring that the temperature sensor 1021 works in a relatively stable temperature environment, extending its service life and improving the stability of the measurement.

[0084] The second gap 1025 between the temperature sensor 1021 and the thermal insulation pad 10241 means that a gap is formed between the outer wall of the temperature sensor 1021 and the inner wall of the thermal insulation pad 10241. In the axial direction of the thermal insulation pad 10241, the second gap 1025 can extend to the end face of the thermal insulation pad 10241 away from the end of the sleeve 1022 to communicate with the external space of the thermal insulation pad 10241, which is conducive to increasing the contact area between the airflow and the surface of the temperature sensor 1021. After the airflow flowing out of the sleeve 1022 enters the thermal insulation member 1024, it can flow out from the second wind slot and the end of the thermal insulation pad 10241 away from the sleeve 1022, which is conducive to increasing the speed of heat dissipation from the thermal insulation pad 10241 to the outside of the thermal insulation pad 10241, thereby enhancing the heat dissipation effect. It can be understood that the present application does not limit the shape and extension direction of the second gap 1025, and the second gap 1025 can be connected to the first wind slot group 10221.

[0085] like Figure 3 and Figure 4 As shown, Figure 4 Two possible air cooling paths are exemplarily indicated by dotted arrows. One air cooling path is that the cold air enters the first gap 1023 from the first air slot 102211, and then enters the second gap 1025 from the first gap 1023; the other air cooling path is that the cold air enters the first gap 1023 from the first air slot 102211, and then enters the light guide tube 1026 from the first gap 1023.

[0086] like Figure 5As shown, the thermal insulation pad 10241 is butted with the sleeve 1022. The butting of the thermal insulation pad 10241 with the sleeve 1022 means that in the axial direction of the sleeve 1022, the end face of the thermal insulation pad 10241 contacts the end face of the sleeve 1022 without a gap. That is, the thermal insulation pad 10241 and the sleeve 1022 are connected and arranged along the axial direction of the sleeve 1022. The thermal insulation pad 10241 is provided with a second wind slot group 102411 connected with the second gap 1025, and the first wind slot group 10221, the first gap 1023, the second gap 1025 and the second wind slot group 102411 form a second wind duct 1028; the second wind slot group 102411 includes one or more second wind slots. Figure 5 The second air duct 1028 is exemplarily shown by a dotted line with an arrow, and the present application does not limit the specific shape and structure of the second air duct 1028.

[0087] The thermal insulation pad 10241 is docked with the sleeve 1022, and the thermal insulation pad 10241 is provided with a second wind slot group 102411 connected to the second gap 1025. This design makes the thermal insulation pad 10241 not just a simple thermal insulation barrier, but a component with heat dissipation function. The first wind slot group 10221, the first gap 1023, the second gap 1025 and the second wind slot group 102411 together form a second wind duct 1028. The second wind duct 1028 can effectively guide the cold air to flow through the thermal insulation pad 10241, thereby taking away the heat on the thermal insulation pad 10241, reducing its temperature, and enhancing the heat dissipation effect of the thermal insulation pad 10241. In addition, the design of the second wind slot group 102411 increases the heat dissipation area, so that the heat can be transferred to the external environment more quickly, thereby improving the overall heat dissipation efficiency of the temperature sensor component 102.

[0088] In some embodiments of the present application, the second duct group 102411 may be disposed on the side wall of the thermal insulation pad 10241. By disposing the second duct group 102411 on the side wall of the thermal insulation pad 10241, the cold air in the external environment can be more effectively utilized. When the cold air passes through the thermal insulation pad 10241, the second duct group 102411 on the side wall can guide the cold air into the first gap 1023 or the second gap 1025, thereby enhancing the heat dissipation effect on the temperature sensor 1021. The second duct group 102411 may penetrate the inner surface of the thermal insulation pad 10241 and the outer surface of the thermal insulation pad 10241. The second duct group 102411 is used to guide the air in the second gap 1025 to further increase the wind guide space of the thermal insulation pad 10241 and improve the air cooling efficiency.

[0089] In some embodiments of the present application, the second wind slot group 102411 includes a plurality of second wind slots 1024111, and the plurality of second wind slots 1024111 are symmetrically arranged about the central axis of the thermal insulation pad 10241, which helps to achieve more uniform heat dissipation and air outlet. Since the plurality of second wind slots 1024111 are symmetrically distributed, when the airflow in the thermal insulation pad 10241 passes through the second wind slot group 102411, it can flow more evenly from the thermal insulation pad 10241 into the temperature sensor 1021, thereby taking away the heat generated by the temperature sensor 1021. This design avoids the accumulation of heat on one side of the thermal insulation pad 10241, causing local overheating of the temperature sensor 1021, affecting its measurement accuracy and stability. By symmetrically arranging a plurality of second wind slots 1024111, it can be ensured that the temperature sensor 1021 can be maintained within a relatively stable temperature range throughout the entire working process, thereby improving its measurement performance.

[0090] In addition, the symmetrically arranged multiple second wind slots 1024111 also help to enhance the structural stability of the thermal insulation pad 10241. Since the multiple second wind slots 1024111 are symmetrically distributed, the openings they form on the thermal insulation pad 10241 are also balanced, which helps to maintain the balance of the thermal insulation pad 10241 when subjected to force. During the use of the temperature sensing assembly 102, the thermal insulation pad 10241 may be affected by various external forces, such as vibration, impact, etc. By symmetrically arranging multiple second wind slots 1024111, the impact of these external forces on the structure of the thermal insulation pad 10241 can be reduced, thereby extending the service life of the temperature sensing assembly 102.

[0091] In some embodiments of the present application, the second duct group 102411 penetrates the inner wall and the outer wall of the thermal insulation pad 10241 in the radial direction of the thermal insulation pad 10241, which is conducive to shortening the path length of the airflow in the thermal insulation pad 10241 flowing out of the thermal insulation pad 10241 to the outside of the thermal insulation pad 10241. In some possible implementations, in the radial direction of the thermal insulation pad 10241, the second duct group 102411 may penetrate the inner wall of the thermal insulation pad 10241, but not the outer wall of the thermal insulation pad 10241, and a wind hole connected to the second duct group 102411 may be provided on the axial end face of the thermal insulation pad 10241. The second duct group 102411 penetrates the inner wall of the thermal insulation pad 10241, but not its outer wall. This design allows the airflow to circulate inside the thermal insulation pad without damaging the thermal insulation layer outside the thermal insulation pad. By providing an air hole connected to the second air slot group 102411 on the axial end surface of the thermal insulation pad 10241, the path of the airflow in and out of the thermal insulation pad can be further controlled and managed.

[0092] In some embodiments of the present application, the second wind slot group 102411 extends along the circumference of the thermal insulation pad 10241 to increase the air output. The number of the second wind slot groups 102411 is multiple, and the second wind slot groups 102411 and the second gap 1025 can form an air duct to increase the air outlet area and improve the air cooling efficiency. Exemplarily, the multiple second wind slot groups 102411 include two groups of second wind slot groups 102411, and the two groups of second wind slot groups 102411 can be symmetrically arranged relative to the central axis of the thermal insulation pad 10241 to improve the heat dissipation uniformity of the temperature sensor 1021. Each group of second wind slot groups 102411 includes a plurality of second wind slots, and the plurality of second wind slots in each group of second wind slot groups 102411 are arranged along the axial direction of the thermal insulation pad 10241.

[0093] It can be understood that the present application does not limit the structure, shape, and number of the second wind trough groups 102411. For example, the number of second wind trough groups 102411 may be one, the second wind trough groups 102411 may not be symmetrical about the central axis of the thermal insulation pad 10241, the second wind trough groups 102411 may extend along the axial direction of the thermal insulation pad 10241, the second wind trough groups 102411 may also be irregularly shaped, and the extension lengths of multiple second wind trough groups 102411 in the circumferential direction and / or axial direction of the thermal insulation pad 10241 may be the same or different.

[0094] In some embodiments of the present application, the size of the second wind slot 1024111 is larger than the size of the first wind slot 102211. The size of the second wind slot 1024111 is larger than the size of the first wind slot 102211, including that the extension size of the second wind slot 1024111 in the circumferential direction of the sleeve 1022 is larger than the extension size of the first wind slot 102211 in the circumferential direction of the sleeve 1022, or / and the extension size of the second wind slot 1024111 in the axial direction of the sleeve 1022 is larger than the extension size of the first wind slot 102211 in the axial direction of the sleeve 1022. It can be understood that the present application does not limit the size of the second wind slot 1024111 to be larger than the size of the first wind slot 102211.

[0095] The size of the second air slot 1024111 is larger than the first air slot 102211, which means that it can accommodate more cold air flow, thereby accelerating the speed of heat exchange. When the temperature sensor assembly 102 is working, the heat generated can be dissipated more quickly through the second air slot 1024111, effectively reducing the temperature of the insulation pad 10241 and the sleeve 1022, and improving the heat dissipation efficiency of the entire temperature sensor assembly 102.

[0096] For some possible implementations, see Figure 6The heat insulating pad 10241 is spaced apart from the sleeve 1022, that is, in the axial direction of the sleeve 1022, there is a gap between the end surface of the heat insulating pad 10241 and the end surface of the sleeve 1022. The heat insulating pad 10241 is provided with a second wind slot group 102411 communicating with the second gap 1025, the second wind slot group 102411 includes at least one second wind slot 1024111, and the second wind slot group 102411 and the second gap 1025 form a third wind channel 1029. Figure 6 The third air duct 1029 is exemplarily shown by a dotted line with an arrow, and the present application does not limit the specific shape and structure of the second air duct 1028.

[0097] The thermal insulation pad 10241 and the sleeve 1022 are arranged at intervals, which can reduce the possibility of heat transfer through direct contact, thereby playing a preliminary heat insulation role. The second wind slot group 102411 connected to the second gap 1025 provided on the thermal insulation pad 10241 further enhances the heat insulation effect. The third air duct 1029 formed by the second wind slot group 102411 and the second gap 1025 can effectively prevent external heat from being directly transferred to the sleeve 1022 or the temperature sensor 1021 through the thermal insulation pad 10241, thereby improving the heat insulation performance of the thermal insulation pad 10241. At the same time, when the temperature sensing component 102 is working, the generated heat can be quickly dissipated through the third air duct 1029, avoiding the accumulation of heat between the thermal insulation pad 10241 and the sleeve 1022, and improving the heat dissipation efficiency.

[0098] In addition, the gap between the end surface of the thermal insulation pad 10241 and the end surface of the sleeve 1022 can be connected to the external space of the sleeve 1022 in the radial direction of the sleeve 1022. Part of the airflow carrying heat flowing out of the sleeve 1022 can flow out from the gap between the end surface of the thermal insulation pad 10241 and the end surface of the sleeve 1022, which is conducive to improving the heat dissipation efficiency inside the sleeve 1022.

[0099] It can be understood that in some possible implementations, in the axial direction of the thermal insulation pad 10241, there is a gap between at least a portion of the thermal insulation pad 10241 and the end face of the sleeve 1022, and the gap can be connected to the external space of the thermal insulation pad 10241 in the radial direction of the thermal insulation pad 10241, and the airflow in the thermal insulation pad 10241 can flow out from the gap to the outside of the thermal insulation pad 10241.

[0100] For some possible implementations, see Figure 7, the thermal insulation pad 10241 can be sleeved outside the sleeve 1022, and the thermal insulation pad 10241 is provided with a second wind slot group 102411 connected to the first wind slot group 10221, and the second wind slot group 102411 includes at least one second wind slot 1024111. The second wind slot group 102411, the first wind slot group 10221, and the first gap 1023 form a fourth wind duct 1030. First, the thermal insulation pad 10241 is sleeved outside the sleeve 1022, which significantly enhances the thermal insulation effect. The thermal insulation pad 10241 serves as a thermal insulation barrier between the temperature sensing component 102 and the external environment. Its design of being sleeved outside the sleeve 1022 can effectively prevent external heat from being directly transferred to the sleeve 1022 or the temperature sensor 1021, thereby improving the thermal insulation performance of the entire temperature sensing component 102. Secondly, by setting a second wind slot group 102411 on the insulation pad 10241 and connecting it with the first wind slot group 10221 on the sleeve 1022, a fourth wind duct 1030 is formed, constituting a complete heat dissipation system, which not only improves the heat dissipation efficiency but also enhances the structural stability of the temperature sensor assembly 102. Figure 7 The fourth air duct 1030 is exemplarily shown by a dotted line with an arrow, and the present application does not limit the specific shape and structure of the fourth air duct 1030.

[0101] In some embodiments of the present application, the heat insulation pad 10241 is sleeved outside the sleeve 1022, and the second wind slot group 102411 corresponds to the position of the first wind slot group 10221. The second wind slot group 102411 corresponds to the position of the first wind slot group 10221, including that the orthographic projection of the second wind slot group 102411 in the radial direction of the sleeve 1022 is located in the first wind slot group 10221, that is, the second wind slot group 102411 is arranged with the first wind slot group 10221 in the radial direction of the sleeve 1022, and the second wind slot group 102411 is correspondingly arranged outside the first wind slot group 10221. When the position of the second wind trough group 102411 corresponds to that of the first wind trough group 10221, the thermal insulation pad 10241 is sleeved outside the sleeve 1022, and the second wind trough group 102411 is correspondingly arranged outside the first wind trough group 10221, which can form a smoother air cooling path, help to speed up the flow of air between the second wind trough and the first wind trough group 10221, thereby more effectively taking away the heat generated by the temperature sensor assembly 102, and significantly improving the heat dissipation efficiency.

[0102] In some embodiments of the present application, the reflectivity of at least part of the outer surface of the sleeve 1022 is greater than or equal to 80%, that is, the outer surface of the sleeve 1022 includes a high reflectivity surface, and the reflectivity of the high reflectivity surface ranges from greater than or equal to 80%. Reflectivity refers to the ratio of the energy reflected by the light on the surface of a material to the incident energy. The reflectivity being greater than or equal to 80% means that the outer surface of the sleeve 1022 can reflect most of the thermal radiation irradiated thereon, so that when the sleeve 1022 works in a high temperature or strong thermal radiation environment, it can effectively reduce the absorption of heat, thereby reducing its own temperature. Secondly, due to the high reflectivity of the outer surface of the sleeve 1022, the sleeve 1022 can maintain a lower temperature in a high temperature environment, thereby improving its heat resistance. Again, reducing the heat absorption of the sleeve 1022 not only reduces the operating temperature, but also reduces the risk of material aging, deformation or damage caused by high temperature.

[0103] In some embodiments of the present application, the outer surface of the sleeve 1022 is provided with a reflective material. Coating or inlaying a reflective material, such as a high reflectivity coating or a lens, on the outer surface of the sleeve 1022 can significantly improve the reflectivity of the sleeve 1022, reduce the absorption of heat, and reduce the temperature of the sleeve 1022. For example, in a possible implementation, the sleeve 1022 includes a barrel and a coating layer, the barrel is sleeved outside the temperature sensor 1021, the coating layer is covered on the outer surface of the barrel away from the temperature sensor 1021, and the high reflectivity surface is provided on the side of the coating layer away from the barrel. The coating layer can be formed on the outer surface of the barrel by a coating process or the like. The coating layer including a high reflectivity surface can be formed by a coating process, which is simple and convenient to manufacture.

[0104] In a possible implementation, the outer surface of the sleeve 1022 includes a polished surface, and a high reflectivity surface can be formed on the outer surface of the sleeve 1022 by a processing technique such as polishing. The polished outer surface of the sleeve 1022 is smoother, which can enhance the reflectivity of the outer surface of the sleeve 1022, reduce heat absorption, and lower the temperature of the sleeve 1022.

[0105] In one possible implementation, the outer surface of the sleeve 1022 may be provided with an inclined surface. The inclined surface provided on the outer surface of the sleeve 1022 can change the reflection path of the light, making the light more easily reflected rather than absorbed, thereby enhancing the reflection effect of the sleeve 1022, reducing heat absorption, and lowering the temperature of the sleeve 1022.

[0106] In some possible implementations, the outer surface of the sleeve 1022 may also enhance the reflective effect by combining at least one of a polished surface, an inclined surface, and a reflective material. For example, a portion of the outer surface of the sleeve 1022 is a polished surface, a portion of the outer surface of the sleeve 1022 is an inclined surface, and a portion of the outer surface of the sleeve 1022 is provided with a reflective material. Alternatively, a portion of the outer surface of the sleeve 1022 is a polished surface, a portion of the outer surface of the sleeve 1022 is an inclined surface, and a reflective material is provided on the inclined surface, etc.

[0107] In some embodiments of the present application, the absorptivity of at least part of the inner surface of the sleeve 1022 is greater than or equal to 80% to effectively absorb stray light. The absorptivity refers to the ratio of the energy absorbed by light in a substance to the incident energy. The high absorptivity of the inner surface of the sleeve 1022 means that it can more efficiently absorb the stray light generated by non-temperature measuring objects entering the sleeve 1022. If these stray lights are not effectively absorbed, they will be reflected and scattered in the sleeve 1022, and may interfere with the normal operation of the temperature sensor 1021. Through the design of the inner surface with high absorptivity, the residual stray light in the sleeve 1022 can be significantly reduced, providing a pure optical environment for temperature measurement.

[0108] The inner surface of the sleeve 1022 is provided with an inclined surface, or / and the inner surface of the sleeve 1022 is provided with an absorbing material. The inclined surface design of the inner surface of the sleeve 1022 can change the reflection path of the stray light entering the sleeve 1022, making it easier to be absorbed or scattered, rather than directly irradiating the temperature sensor 1021. This design effectively reduces the interference of stray light on the temperature measurement signal and improves the accuracy of temperature measurement.

[0109] At the same time, an absorbing material can be provided on the inner surface of the sleeve 1022, which can further absorb the residual stray light and ensure the optical purity of the temperature measurement environment, thereby avoiding the influence of stray light on the temperature measurement results. The absorbing material can be provided on the inner surface of the sleeve 1022, which can be achieved by blackening treatment, coating and embedding. For example, in one possible implementation, the inner surface of the sleeve 1022 can be formed into a blackened surface by blackening treatment. Blackening is a process of treating the metal surface to black, also known as "black oxide". The inner surface of the sleeve 1022 after the blackening treatment forms a high absorption rate surface, which is simple and convenient to manufacture. For another example, in one possible implementation, the coating is to apply a layer of high absorption rate coating on the inner surface of the sleeve 1022. For another example, the sleeve 1022 includes a cylinder and an insert. The cylinder is sleeved on the outside of the temperature sensor 1021. The inner surface of the cylinder facing the temperature sensor 1021 is provided with a mounting groove. The insert is embedded in the mounting groove. The absorption rate of the cylinder is lower than the absorption rate of the insert. The high absorption rate surface is provided on the side of the insert facing the temperature sensor 1021.

[0110] In a possible implementation, the inner surface of the sleeve 1022 is provided with an inclined surface, which is inclined relative to the axial direction of the sleeve 1022 to reflect the light obliquely incident into the sleeve 1022 as much as possible, thereby reducing the heat absorbed by the temperature sensor 1021. For example, a thread is formed on the sleeve 1022, and the thread includes an inclined surface. The inclined surface may also include a total reflection surface.

[0111] Please refer again Figure 1 The temperature sensing assembly 102 further includes a light guide tube 1026. One end of the light guide tube 1026 is sleeved on an end of the sleeve 1022 away from the temperature sensor 1021. The light guide tube 1026 is used to guide heat radiation to the temperature sensor 1021 for temperature measurement.

[0112] Since the heat radiation of the temperature measurement area is guided to the temperature sensor 1021 by the light guide tube 1026, the temperature sensor 1021 is kept at a certain distance from the high temperature temperature measurement area, thereby reducing the influence of the high temperature of the temperature measurement area on the temperature sensor 1021, which is beneficial to prolonging the service life of the temperature sensor 1021. In some embodiments of the present application, the light guide tube 1026 can be located in the heating chamber 101.

[0113] The present application does not limit the connection method between the sleeve 1022 and the light guide tube 1026. For example, the sleeve 1022 and the light guide tube 1026 can be connected by, but are not limited to, threaded fitting, snap-fitting, bonding, interference fitting, etc.

[0114] The shading plate 10242 can also be mounted outside the light guide tube 1026 .

[0115] It is understood that the light guide tube 1026 can be omitted in the present application, and the sleeve 1022 is directly installed on the side wall of the heating chamber 101, and the radiant heat is directly guided to the temperature sensor 1021 through the sleeve 1022. It is understood that the temperature sensing assembly 102 can also include a mounting plate, which is fixedly mounted on at least one of the sleeve 1022, the heat insulation pad 10241, and the temperature sensor 1021, and the mounting plate is used to install the temperature sensor 1021 in the heating chamber 101.

[0116] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship of terms such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inside" and "outside" are based on the orientation or positional relationship of the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0117] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there can be a central component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there can be a central component at the same time.

[0118] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in this application and in the specification are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this application includes any and all combinations of one or more related listed items.

[0119] What is disclosed above is only a preferred embodiment of the present application, and it certainly cannot be used to limit the scope of rights of the present application. Ordinary technicians in this field can understand that all or part of the processes of implementing the above embodiment and equivalent changes made according to the claims of the present application are still within the scope covered by the present application.

[0120] The above preferred embodiments further illustrate the purpose, technical solutions and advantages of the present application in detail. It should be understood that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A temperature sensing component, characterized in that: include: Temperature sensor; A sleeve is provided outside the temperature sensor, a first gap is defined between the temperature sensor and the sleeve, a first wind slot group connected to the first gap is provided on the sleeve, the first wind slot group and the first gap form a first wind duct, and the first wind slot group includes one or more first wind slots.

2. The temperature sensing assembly according to claim 1, characterized in that: The first wind slot group is arranged on the side wall of the sleeve.

3. The temperature sensing assembly according to claim 2, characterized in that: The first wind slot group is arranged in a region of the sleeve located outside the temperature sensor.

4. The temperature sensing assembly according to any one of claims 1 to 3, characterized in that: The first wind slot group includes a plurality of first wind slots, and the plurality of first wind slots are symmetrically arranged about the central axis of the sleeve.

5. The temperature sensing assembly according to any one of claims 1 to 4, characterized in that: The temperature sensing assembly further comprises a heat insulating member, and the heat insulating member is sleeved outside the temperature sensor or outside the sleeve.

6. The temperature sensing assembly according to claim 5, characterized in that: The heat insulating member is sleeved outside the temperature sensor, a second gap is defined between the heat insulating member and the temperature sensor, and the second gap is communicated with the first gap.

7. The temperature sensing assembly according to claim 6, characterized in that: The heat insulating member is connected to the sleeve, and a second wind slot group connected to the second gap is provided on the heat insulating member. The first wind slot group, the first gap, the second gap and the second wind slot group form a second air duct; the second wind slot group includes one or more second wind slots.

8. The temperature sensing assembly according to claim 6, characterized in that: The heat insulating member is spaced apart from the sleeve, and a second wind slot group communicating with the second gap is provided on the heat insulating member, and the second wind slot group and the second gap form a third wind duct.

9. The temperature sensing assembly according to claim 5, characterized in that: The heat insulating member is sleeved outside the sleeve, and a second wind slot group connected to the first wind slot group is provided on the heat insulating member. The second wind slot group, the first wind slot group, and the first gap form a fourth wind duct.

10. The temperature sensing assembly according to any one of claims 7 to 9, characterized in that: The second wind slot is arranged on the side wall of the heat insulating member; or / and the size of the second wind slot is larger than the size of the first wind slot; or / and the position of the second wind slot corresponds to that of the first wind slot group.

11. The temperature sensing assembly according to any one of claims 1 to 10, characterized in that: The reflectivity of the outer surface of the sleeve is greater than or equal to 80%.

12. The temperature sensing assembly according to claim 11, characterized in that: The outer surface of the sleeve is a polished surface, or / and the outer surface of the sleeve is provided with an inclined surface, or / and the outer surface of the sleeve is provided with a reflective material.

13. The temperature sensing assembly according to any one of claims 1 to 12, characterized in that: The absorption rate of the inner surface of the sleeve is greater than or equal to 80%.

14. The temperature sensing assembly according to claim 13, characterized in that: The inner surface of the sleeve is provided with an inclined surface, or / and the inner surface of the sleeve is provided with an absorbent.

15. The temperature sensing assembly according to any one of claims 1 to 14, characterized in that: The temperature sensing assembly further comprises a light guide tube, one end of which is sleeved on an end of the sleeve away from the temperature sensor, and the light guide tube is used to guide heat radiation to the temperature sensor.

16. A heating device, characterized in that: Comprising a temperature sensing assembly as described in any one of claims 1 to 15.

17. The heating device according to claim 16, characterized in that The heating device also includes a heating chamber, the temperature sensing component is arranged in the heating chamber, the heating chamber is provided with an air inlet and an air outlet, and the shortest distance between the temperature sensing component and the air inlet is smaller than the shortest distance between the temperature sensing component and the air outlet.

18. A process equipment, characterized in that: Comprising a heating device as claimed in claim 16 or 17.

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