Single-pixel detection device with flexible and variable measurement view field, optical detection system and method

Abstract

The invention provides a single-pixel detection device with a flexible and variable measurement view field, and an optical detection system and method. The single-pixel detection device comprises a view field diaphragm, a focusing lens and a single-pixel detector, the view field diaphragm is arranged in a detection light path of the measured target, is a view field diaphragm with a flexible and variable measurement view field, can automatically adjust the shape of the measurement view field according to the shape of the measured target, obtains the measurement view field completely matched with the shape of the measured target, and outputs an output light beam with the same shape as the measured target; and the focusing lens is arranged in an output light path of the field diaphragm and is used for focusing an output light beam of the field diaphragm to the single-pixel detector, so that the single-pixel detector detects a signal of the detected target. According to the single-pixel detection device with the flexible and variable measurement view field and the optical detection system provided by the invention, the view field diaphragm is introduced into the detection light path, and the measurement view field of the view field diaphragm can be flexibly adjusted, so that flexible, simple and accurate single-pixel detection on measured targets with different shapes in optical detection is realized.

Description

Technical Field

[0001] The present invention belongs to the technical field of automated optical detection, and in particular relates to a single-pixel detection device with a flexible and variable measurement field of view, an optical detection system and a method. Background Art

[0002] In the process of automated optical inspection, the focusing system accurately focuses on the target to be measured, which is the basis and key link to ensure the imaging clarity of the inspection system. In the prior art, the target to be measured usually has different shapes, such as lines, circles, and multiple rectangular blocks etched on the wafer, but the object field of view of the focusing system is generally a circular or rectangular area of ​​fixed size. Therefore, there is a problem that the object field of view of the focusing system and the shape of the target to be measured do not match. The environmental signals outside the target to be measured can easily enter the object field of view of the focusing system at the same time, so that noise is introduced into the focusing system, thereby affecting the focusing effect.

[0003] In the prior art, in order to achieve precise focusing of the focusing system on the target to be measured, the following three methods are usually adopted: the first is to design a single-pixel detector with a special detection shape: this method designs the detection shape of the single-pixel detector according to the shape of the target to be measured, thereby improving the detection accuracy of the single-pixel detector on the target to be measured. However, the special design of the detection shape of the single-pixel detector has problems such as high manufacturing difficulty and high cost, and it is necessary to design corresponding single-pixel detectors for different shapes of the target to be measured, which has high usage limitations. The second is to use a pixel detector array: this method divides the target to be measured into multiple areas, each area is detected by a separate single-pixel detector, and then the coupling system of the single-pixel detectors in each area is designed. This method requires the use of multiple single-pixel detectors, corresponding readout circuits and coupling systems, and has the disadvantages of complex overall structure of the detection system and high price; the third is to use a two-dimensional detector: this method reads the signals of all areas of the two-dimensional detector, and then only selects the area corresponding to the target to be measured as the reference signal. Its disadvantage is that the refresh speed of the two-dimensional detector is slow, resulting in low production capacity.

[0004] It can be seen that how to simply, cost-effectively and accurately focus on targets of various shapes and thereby improve the imaging clarity of the detection system is a problem that urgently needs to be solved. Summary of the invention

[0005] In view of the defects in the prior art, the present invention provides a single-pixel detection device with flexible and variable measurement field of view, an optical detection system and a method, which can effectively solve the above problems.

[0006] The technical solution adopted by the present invention is as follows: The present invention provides a single-pixel detection device with a flexible and variable measurement field of view, comprising a field of view diaphragm (61), a focusing lens (62) and a single-pixel detector (63); The field of view diaphragm (61) is arranged in the detection light path of the measured object and is a field of view diaphragm with a flexible and variable measurement field of view, which can automatically adjust the shape of the measurement field of view according to the shape of the measured object to obtain a measurement field of view that completely matches the shape of the measured object, and output an output light beam with the same shape as the measured object; The focusing lens (62) is arranged in the output light path of the field aperture (61) and is used to focus the output light beam of the field aperture (61) onto the single pixel detector (63), so that the single pixel detector (63) detects the signal of the measured target.

[0007] Preferably, the field diaphragm (61) adopts a mechanical diaphragm unit (61A); the mechanical diaphragm unit (61A) comprises an diaphragm rotating disk (A1), an diaphragm (A2) and an diaphragm rotating disk driving mechanism; The aperture (A2) is pre-designed in multiple ways, and each aperture (A2) has a light-transmitting area (A21) of a different shape; The aperture rotating disk (A1) is provided with a plurality of aperture assembly holes (A11) whose shapes match those of the aperture (A2); each of the aperture assembly holes (A11) is equipped with the required aperture (A2); The aperture turntable driving mechanism is used to drive the aperture turntable (A1) to move, thereby rotating the aperture (A2) that completely matches the shape of the current target to be measured into the detection light path of the target to be measured; wherein the aperture (A2) that completely matches the shape of the current target to be measured refers to the shape of the light transmission area (A21) of the aperture (A2) that completely matches the shape of the current target to be measured.

[0008] Preferably, a plurality of aperture rotating disks (A1) are coaxially stacked to form a multi-stage aperture rotating disk; and the aperture (A2) in each stage of the aperture rotating disk (A1) that is rotated to the detection light path of the measured target is adjusted so that the light transmission areas (A21) of the multiple stages of the apertures (A2) in the detection light path of the measured target work together to form a measurement field of view that completely matches the shape of the measured target.

[0009] Preferably, the aperture turntable (A1) is circular; each of the aperture assembly holes (A11) is a circular hole, which is arranged in a circular shape on the surface of the aperture turntable (A1).

[0010] Preferably, the field aperture (61) adopts a digital micromirror device (61B); The digital micromirror device (61B) comprises a micromirror unit and a micromirror unit switch; a plurality of the micromirror units are arranged in an array, and each micromirror unit is configured with an independent micromirror unit switch; The micromirror unit switch is used to control each of the micromirror units. If the reflective surface of the micromirror unit faces the detection light path of the target to be measured, the micromirror unit is in an on state; if the reflective surface of the micromirror unit faces away from the detection light path of the target to be measured, the micromirror unit is in an off state; According to the shape of the object to be measured, the micromirror unit switches of the micromirror units are controlled, and only the micromirror unit matching the shape of the object to be measured is started, and the other micromirror units are turned off; thereby obtaining a measurement field of view that completely matches the shape of the object to be measured; The working process is as follows: the sample signal light of the target to be measured is incident on each of the micromirror units in the activated state, and after being reflected by each of the micromirror units in the activated state, the sample signal light of the target to be measured is transmitted to the focusing lens (62) and focused on the single-pixel detector (63).

[0011] The present invention also provides an optical detection system, comprising the single-pixel detection device (6) with a flexible and variable measurement field of view, and also comprising a detection light source (1), a collimating lens (2), a beam splitter / combiner (3), a microscope objective lens (4), and a sample to be measured (5); The detection light source (1) is used to emit a detection light beam; the collimating lens (2) is arranged on the transmission path of the detection light beam, and the collimating lens (2) performs a collimating operation on the incident detection light beam to output nearly parallel light; the beam splitter / combiner (3) is arranged on the transmission light path of the collimating lens (2); the microscope objective lens (4) is arranged on the reflection path of the beam splitter / combiner (3); the measured sample (5) is arranged at the focusing focal plane position of the microscope objective lens (4); and the single-pixel detection device (6) with a flexible and variable measurement field of view is arranged on the transmission light path of the beam splitter / combiner (3).

[0012] The present invention also provides an optical detection method of the aforementioned optical detection system, comprising the following steps: Step S1, a detection light beam emitted by a detection light source (1) is incident on a collimating lens (2), is collimated by the collimating lens (2), becomes a nearly parallel light, and is transmitted to a beam splitter / combiner (3); Step S2, after being reflected by the beam splitter / combiner (3), the nearly parallel light is incident on the microscope objective lens (4), and then focused onto the sample to be measured (5) by the microscope objective lens (4), thereby exciting the sample to be measured (5) to generate sample signal light; Step S3, the sample signal light is incident on the microscope objective lens (4), and after being transmitted through the microscope objective lens (4), the sample signal light passes through the beam splitter / combiner (3), and then is incident on the single-pixel detection device (6) with a flexible and variable measurement field of view; Step S4, the single-pixel detection device (6) with a flexible and variable measurement field of view is pre-adjusted according to the shape of the sample (5) to have a measurement field of view that completely matches the shape of the sample (5) to achieve accurate detection of the sample (5).

[0013] The present invention also provides an optical detection system, comprising the single-pixel detection device (6) with a flexible and variable measurement field of view, and also comprising a detection light source (1), a collimating lens (2), a beam splitter / combiner (3), a microscope objective lens (4), a sample to be measured (5), an objective lens (7), a plane mirror (8), a beam splitter (9), a focusing lens element (10) and a planar array detector (11); The detection light source (1) is used to emit a detection light beam; the collimating lens (2) is arranged on the transmission path of the detection light beam, and the collimating lens (2) performs a collimating operation on the incident detection light beam to output nearly parallel light; the beam splitter / combiner (3) is arranged on the transmission light path of the collimating lens (2); the microscope objective lens (4) is arranged on the reflection path of the beam splitter / combiner (3); and the sample to be measured (5) is arranged at the focusing focal plane position of the microscope objective lens (4); The first transmitted light path of the beam splitter / combiner (3) is arranged in sequence with the objective lens (7) and the plane mirror (8); wherein the first transmitted light path refers to a transmitted light path parallel to the transmission path from the detection light source (1) to the beam splitter / combiner (3); The beam splitter (9) is arranged on the second transmitted light path of the beam splitter / combiner (3); wherein the second transmitted light path refers to a transmitted light path parallel to the signal generated by the sample (5) under test; The reflection path of the beam splitter (9) is provided with the focusing lens element (10) and the area array detector (11) in sequence; The single-pixel detection device (6) with a flexible and variable measurement field of view is arranged in the transmission light path of the beam splitter (9).

[0014] The present invention also provides an optical detection method of the optical detection system, comprising the following steps: Step S1, turning on the detection light source (1); adjusting the field of view diaphragm (61) in the single-pixel detection device (6) with a flexible and variable measurement field of view to obtain a measurement field of view that completely matches the shape of the sample (5) being measured; Step S2, the detection light beam emitted by the detection light source (1) is incident on the collimating lens (2), is collimated by the collimating lens (2) and becomes nearly parallel light, and is transmitted to the beam splitter / combiner (3); Step S2, after the nearly parallel light passes through the beam splitter / combiner (3), a first reflected light and a first transmitted light are simultaneously generated; The first reflected light is incident on the microscope objective lens (4), and then focused onto the sample to be measured (5) through the microscope objective lens (4), exciting the sample to be measured (5) to generate sample signal light; the sample signal light is incident on the microscope objective lens (4), and after being transmitted through the microscope objective lens (4), forms a first light beam, which is incident on the beam splitter / combiner (3); The first transmitted light is focused onto the plane mirror (8) through the objective lens (7), and after being reflected by the plane mirror (8), it passes through the objective lens (7) to form a second light beam, which is incident on the beam splitter / combiner (3); Step S3, the beam splitter / combiner (3) combines the first light beam and the second light beam to generate an interference signal; the interference signal passes through the beam splitter (9) to form a second transmitted light and a second reflected light; The second transmitted light is incident on a single-pixel detection device (6) with a flexible and variable measurement field of view; the single-pixel detection device (6) with a flexible and variable measurement field of view detects an interference signal of the sample to be measured (5), and by observing the interference signal of the sample to be measured (5), adjusts the position of the sample to be measured (5) so that the sample to be measured (5) is accurately placed on the focal plane of the microscope objective lens (4); The second reflected light passes through a focusing lens element (10) and is imaged onto an area array detector (11), wherein the area array detector (11) realizes imaging of the sample (5) to be measured.

[0015] The present invention provides a single-pixel detection device with a flexible and variable measurement field of view, an optical detection system and a method, which have the following advantages: The present invention provides a single-pixel detection device with a flexible and variable measurement field of view, an optical detection system and a method. A field of view diaphragm is introduced into the detection light path, and the measurement field of view of the field of view diaphragm can be flexibly adjusted, thereby realizing flexible, simple and accurate single-pixel detection of targets of different shapes in optical detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A structural principle diagram of a single-pixel detection device with a flexible and variable measurement field of view provided by the present invention; Figure 2 A structural diagram of a single-pixel detection device with a flexible and variable measurement field of view based on a mechanical aperture unit provided by the present invention; Figure 3 Structural diagrams of four specific apertures designed for the present invention; Figure 4A structural diagram of an aperture rotating disk provided by the present invention; Figure 5 A structural diagram of a single-pixel detection device with a flexible and variable measurement field of view based on a digital micromirror device provided by the present invention; Figure 6 A structural diagram of a digital micromirror device provided by the present invention; Figure 7 A structural diagram of an optical detection system provided for implementation example 1 of the present invention; Figure 8 A structural diagram of an optical detection system provided for implementation example 2 of the present invention; Fig. 9 This is a structural diagram of the optical detection system provided for implementation example three of the present invention. DETAILED DESCRIPTION

[0017] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0018] The present invention provides a single-pixel detection device with a flexible and variable measurement field of view, which can realize flexible, simple and accurate single-pixel detection of targets with different shapes in optical detection.

[0019] like Figure 1 As shown, the present invention provides a single-pixel detection device with a flexible and variable measurement field of view, including a field of view aperture 61, a focusing lens 62 and a single-pixel detector 63; The field diaphragm 61 is arranged in the detection optical path of the measured object, and is a field diaphragm with a flexible and variable measurement field. It can automatically adjust the shape of the measurement field according to the shape of the measured object to obtain a measurement field that fully matches the shape of the measured object, and output an output light beam with the same shape as the measured object; The focusing lens 62 is disposed in the output light path of the field aperture 61 and is used to focus the output light beam of the field aperture 61 onto the single pixel detector 63 so that the single pixel detector 63 detects the signal of the target to be measured.

[0020] In the present invention, the field aperture 61 can be implemented by two structures, namely a mechanical aperture unit 61A and a digital micromirror device 61B: 1. Mechanical aperture unit 61A The field aperture 61 is implemented by a mechanical aperture unit 61A. Figure 2 The figure shows the structure of a single-pixel detection device with a flexible and variable measurement field of view based on a mechanical aperture unit.

[0021] The mechanical aperture unit 61A includes an aperture turntable A1, an aperture A2, and an aperture turntable driving mechanism; The aperture A2 is pre-designed in multiple ways, and each aperture A2 has a light-transmitting area A21 of a different shape; Figure 3 As shown in FIG. 1 , there are four specific structures of apertures designed in the present invention; wherein the white area is the light-transmitting area A21. Figure 3 Among them, (a) can be used for the quantity detection of overlay wafers, (b) can be used for the quantity detection of detector chips, and (c) and (d) can be used for the quantity detection of chips such as filters. According to actual needs, the aperture A2 with various shapes can be flexibly designed, and the present invention does not limit the shape of the light-transmitting area A21 in each aperture A2.

[0022] The aperture turntable A1 is provided with a plurality of aperture assembly holes A11 matching the shapes of the apertures A2; each aperture assembly hole A11 is assembled with the required apertures A2; as a preferred embodiment, Figure 4 As shown, it is a structural diagram of an aperture turntable A1; wherein, the aperture turntable A1 is circular; each aperture assembly hole A11 is a circular hole, which is arranged in a circular shape on the surface of the aperture turntable A1.

[0023] The aperture turntable driving mechanism is used to drive the aperture turntable A1 to move, and then rotate the aperture A2 that completely matches the shape of the current target to be measured into the detection light path of the target to be measured; wherein, the aperture A2 that completely matches the shape of the current target to be measured refers to the shape of the light transmission area A21 of the aperture A2 that completely matches the shape of the current target to be measured. The aperture turntable driving mechanism can be implemented by a motor. The motor drives the aperture turntable A1 to rotate to achieve the switching of the field aperture.

[0024] Furthermore, in order to achieve flexible and accurate detection of various shapes of targets to be measured, multiple aperture turntables A1 are coaxially stacked to form a multi-level aperture turntable; the aperture A2 in each level of the aperture turntable A1 that is rotated to the detection light path of the target to be measured is adjusted so that the light transmission areas A21 of the multiple levels of apertures A2 in the detection light path of the target to be measured work together to form a measurement field of view that completely matches the shape of the target to be measured.

[0025] (ii) Digital Micromirror Device 61B The field aperture 61 is implemented by a digital micromirror device 61B, such as Figure 5 As shown in FIG. 1 , it is a structural diagram of a single-pixel detection device with a flexible and variable measurement field of view based on a digital micromirror device. Figure 6 , which is a structural diagram of a digital micromirror device.

[0026] The digital micromirror device 61B includes a micromirror unit and a micromirror unit switch; a plurality of micromirror units are arranged in an array, and each micromirror unit is configured with an independent micromirror unit switch; The micromirror unit switch is used to control each micromirror unit. If the reflective surface of the micromirror unit faces the detection light path of the target to be measured, the micromirror unit is in the start state; if the reflective surface of the micromirror unit is away from the detection light path of the target to be measured, the micromirror unit is in the off state; According to the shape of the object to be measured, the micromirror unit switches of each micromirror unit are controlled, and only the micromirror unit matching the shape of the object to be measured is started, and the other micromirror units are turned off; thereby obtaining a measurement field of view that completely matches the shape of the object to be measured; The working process is as follows: the sample signal light of the measured target is incident on each micromirror unit in the activated state, and is reflected by each micromirror unit in the activated state, and is transmitted to the focusing lens 62 and focused on the single pixel detector 63 .

[0027] In summary, the present invention provides a single-pixel detection device with a flexible and variable measurement field of view. The field of view diaphragm 61 is introduced into the detection optical path to realize flexible and variable measurement field of view; the present invention relates to two implementation methods of the field of view diaphragm 61, one is to add a mechanical diaphragm, and the other is to add a digital micromirror device as the field of view diaphragm.

[0028] The hardware design of adding a mechanical aperture includes: (1) multiple apertures, whose shapes are designed according to the target shapes commonly used in optical detection; (2) an aperture turntable and a motor. Multiple assembly holes are designed on the aperture turntable, each assembly hole is used to install an aperture, and the motor drives the aperture turntable to rotate; (3) a multi-stage aperture turntable with the structures of (1) and (2) is designed.

[0029] The structure of adding digital micromirror device is as follows Figure 6 As shown, different field apertures are generated by setting the switching state of each micromirror unit.

[0030] Figure 2 The present invention is a single-pixel detection device with a flexible and variable measurement field of view based on a mechanical aperture. After the signal light passes through the mechanical aperture unit 61A, only the signal light corresponding to the target to be measured reaches the single-pixel detector 63 through the focusing lens 62. The specific implementation process is as follows: (1) inserting the aperture turntable A1 into the position of the field of view diaphragm in the detection system; (2) driving the aperture turntable A1 to rotate and select the field of view diaphragm through a motor; (3) performing single-pixel detection with a high signal-to-noise ratio. In the present invention, a single aperture turntable A1 can be installed with multiple field of view diaphragms, and the field of view diaphragms can be flexibly switched by rotating the aperture turntable A1. Therefore, the present invention can further improve the flexibility of the detection field of view selection by replacing the aperture A2 in the aperture turntable A1 and designing a multi-stage aperture turntable A1.

[0031] Figure 5The invention is a single-pixel detection device with a flexible and variable measurement field of view based on a digital micromirror device. After the signal light is reflected by the digital micromirror device 61B, only the signal light corresponding to the target to be measured reaches the single-pixel detector 63 through the focusing lens 62. The specific implementation process is as follows: (1) The switch state of the micromirror unit of the digital micromirror device 61B is set according to the shape of the target to be measured, so that only the micromirror unit to which the signal light of the target to be measured is incident is in the open state, and the other micromirror units are in the closed state. (2) The single-pixel detector 63 is used to measure the target signal reflected by the digital micromirror device 61B. (3) When the target to be measured changes, the switch state of each micromirror unit in the digital micromirror device 61B is set according to the new target to be measured, and then the measurement is performed.

[0032] The present invention provides a single-pixel detection device with a flexible and variable measurement field of view, which can achieve the following effects: (1) The detector’s field of view can be flexibly designed The present invention realizes the regulation of the detector field of view by installing a field of view diaphragm in the detection system. Since the field of view diaphragm can be flexibly designed, the field of view of the detector can also be flexibly designed.

[0033] (2) The detector’s field of view can be flexibly changed The present invention changes the field of view of the detector by switching the field of view diaphragm of the detection system. The switching of the mechanical field of view diaphragm is achieved by rotating the diaphragm turntable. The diaphragm installed in the diaphragm turntable can be replaced at will. The switching of the field of view diaphragm based on the digital micromirror device is achieved by changing the switch state of the micromirror unit. Therefore, the field of view of the detector can be flexibly changed.

[0034] (3) Simple manufacturing and low cost The present invention only needs to introduce a field of view aperture turntable or a digital micromirror device to realize flexible design and switching of the detector field of view. The design and processing of the mechanical field of view aperture, the design and processing of the aperture turntable and the motor are easy to implement and low in cost, and the digital micromirror device has a low cost.

[0035] (4) Fast measurement speed The present invention adopts a single-pixel detector to realize a detection technology with a flexible and variable field of view, fully utilizes the refresh rate of the single-pixel detector, and the measurement speed is significantly higher than the measurement speed of an array detector.

[0036] The single-pixel detection device with flexible and variable measurement field of view provided by the present invention can be used to realize various optical detection systems. Three implementation cases are listed below: Implementation case 1: like Figure 7As shown, this embodiment provides an optical detection system, including a single-pixel detection device 6 with a flexible and variable measurement field of view, and also includes a detection light source 1, a collimating lens 2, a beam splitter / combiner 3, a microscope objective 4 and a sample 5 to be measured; in this embodiment, the single-pixel detection device 6 with a flexible and variable measurement field of view adopts a mechanical aperture unit 61A, and its specific structure is: A detection light source 1 is used to emit a detection light beam; a collimating lens 2 is arranged on the transmission path of the detection light beam, and the collimating lens 2 collimates the incident detection light beam to output nearly parallel light; a beam splitter / combiner 3 is arranged on the transmission light path of the collimating lens 2; a microscope objective 4 is arranged on the reflection path of the beam splitter / combiner 3; a sample to be measured 5 is arranged at the focusing focal plane position of the microscope objective 4; a single-pixel detection device 6 with a flexible and variable measurement field of view is arranged on the transmission light path of the beam splitter / combiner 3.

[0037] The optical detection method of the optical detection system comprises the following steps: Step S1, the detection light beam emitted by the detection light source 1 is incident on the collimating lens 2, becomes nearly parallel light after being collimated by the collimating lens 2, and is transmitted to the beam splitter / combiner 3; Step S2, after being reflected by the beam splitter / combiner 3, the nearly parallel light is incident on the microscope objective lens 4, and then focused on the sample 5 to be tested by the microscope objective lens 4, so as to excite the sample 5 to generate sample signal light; Step S3, the sample signal light is incident on the microscope objective lens 4, and after being transmitted through the microscope objective lens 4, it passes through the beam splitter / combiner 3, and the sample signal light is incident on the single pixel detection device 6 with a flexible and variable measurement field of view; Step S4, the single-pixel detection device 6 with a flexible and variable measurement field is pre-adjusted according to the shape of the sample 5 to have a measurement field that completely matches the shape of the sample 5 to achieve accurate detection of the sample 5.

[0038] The optical detection system provided in this embodiment is an implementation application in a microscope system. The single-pixel detection device 6 with a flexible and variable measurement field of view includes a mechanical aperture unit 61A, a focusing lens 62, and a single-pixel detector 63; the mechanical aperture unit 61A is set between the beam splitter / combiner 3 and the focusing lens 62. Since the signal light becomes nearly parallel light after passing through the microscope objective 4, the distance between the mechanical aperture unit 61A and the beam splitter / combiner 3 can be set arbitrarily. After being filtered by the mechanical aperture unit 61A, the signal light only includes the detection target information, and all redundant noise information is filtered out. The workflow of this embodiment can be summarized as: (1) Turn on the detection light source 1; (2) Rotate the aperture turntable A1 in the mechanical aperture unit 61A to select a suitable aperture A2; (3) Signal measurement.

[0039] Implementation case 2: like Figure 8As shown, this embodiment provides an optical detection system, including a single-pixel detection device 6 with a flexible and variable measurement field of view, and also includes a detection light source 1, a collimating lens 2, a beam splitter / combiner 3, a microscope objective 4 and a sample to be measured 5; in this embodiment, the single-pixel detection device 6 with a flexible and variable measurement field of view adopts a digital micromirror device 61B.

[0040] The difference between this implementation case and the first implementation case is that the single-pixel detection device 6 with flexible and variable measurement field of view adopts a digital micromirror device 61B, including a digital micromirror device 61B, a focusing lens 62 and a single-pixel detector 63.

[0041] The principle of this implementation case is briefly described as follows: The detection light beam output by the detection light source 1 is collimated by the collimating lens 2 and becomes a nearly parallel light. Then, the detection light beam is reflected by the beam splitter / combiner 3 and then focused to the sample 5 under test by the microscope objective 4. The signal light reflected by the sample 5 under test is collected by the microscope objective 4 and then passes through the beam splitter / combiner 3. Then, the signal light is transmitted to the digital micromirror device 61B. The field of view aperture is set by the digital micromirror device 61B so that only the signal light corresponding to the target under test is reflected to the detection optical path composed of the focusing lens 62 and the single pixel detector 63. When the target under test changes, it is only necessary to change the state of the micromirror unit of the digital micromirror device 61B to generate a new field of view aperture.

[0042] Implementation case three: like Fig. 9 As shown, this embodiment provides an optical detection system, including a single-pixel detection device 6 with a flexible and variable measurement field of view, and also includes a detection light source 1, a collimating lens 2, a beam splitter / combiner 3, a microscope objective 4, a sample to be measured 5, an objective lens 7, a plane mirror 8, a beam splitter 9, a focusing lens element 10 and a planar array detector 11; wherein the single-pixel detection device 6 with a flexible and variable measurement field of view includes a mechanical aperture unit 61A, a focusing lens 62 and a single-pixel detector 63; A detection light source 1 is used to emit a detection light beam; a collimating lens 2 is arranged on the transmission path of the detection light beam, and the collimating lens 2 performs a collimating operation on the incident detection light beam and outputs nearly parallel light; a beam splitter / combiner 3 is arranged on the transmission light path of the collimating lens 2; a microscope objective lens 4 is arranged on the reflection path of the beam splitter / combiner 3; and a sample to be measured 5 is arranged at the focusing focal plane position of the microscope objective lens 4; The first transmitted light path of the beam splitter / combiner 3 is arranged with an objective lens 7 and a plane mirror 8 in sequence; wherein the first transmitted light path refers to a transmitted light path parallel to the transmission path from the detection light source 1 to the beam splitter / combiner 3; The second transmitted light path of the beam splitter / combiner 3 is provided with a beam splitter 9; wherein the second transmitted light path refers to a transmitted light path parallel to the signal generated by the sample 5 under test; A focusing lens element 10 and a planar array detector 11 are arranged in sequence on the reflection path of the beam splitter 9; The transmission light path of the beam splitter 9 is arranged with a single-pixel detection device 6 with a flexible and variable measurement field of view, including a mechanical aperture unit 61A, a focusing lens 62 and a single-pixel detector 63.

[0043] The optical detection method of the optical detection system comprises the following steps: Step S1, turning on the detection light source 1; adjusting the field of view diaphragm 61 in the single-pixel detection device 6 with a flexible and variable measurement field of view to obtain a measurement field of view that completely matches the shape of the sample 5 to be measured; Step S2, the detection light beam emitted by the detection light source 1 is incident on the collimating lens 2, becomes nearly parallel light after being collimated by the collimating lens 2, and is transmitted to the beam splitter / combiner 3; Step S2, after the nearly parallel light passes through the beam splitter / combiner 3, a first reflected light and a first transmitted light are simultaneously generated; The first reflected light is incident on the microscope objective lens 4, and then focused on the sample 5 to be tested by the microscope objective lens 4, exciting the sample 5 to generate sample signal light; the sample signal light is incident on the microscope objective lens 4, and after being transmitted by the microscope objective lens 4, forms a first light beam, which is incident on the beam splitter / combiner 3; The first transmitted light is focused by the objective lens 7 onto the plane mirror 8, and after being reflected by the plane mirror 8, it passes through the objective lens 7 to form a second light beam, which is incident on the beam splitter / combiner 3; Step S3, the beam splitter / combiner 3 combines the first light beam and the second light beam to generate an interference signal; the interference signal passes through the beam splitter 9 to form a second transmitted light and a second reflected light; The second transmitted light is incident on the single-pixel detection device 6 with a flexible and variable measurement field of view; the single-pixel detection device 6 with a flexible and variable measurement field of view detects the interference signal of the sample 5 to be measured, and by observing the interference signal of the sample 5 to be measured, the position of the sample 5 to be measured is adjusted so that the sample 5 to be measured is accurately placed on the focal plane of the microscope objective 4; The second reflected light passes through the focusing lens element 10 and is imaged onto the area array detector 11 , and the area array detector 11 realizes imaging of the sample 5 to be measured.

[0044] The optical detection system provided in this embodiment is used for extracting interference signals; the position of the sample 5 to be tested is adjusted according to the extracted interference signals, thereby ensuring the imaging quality of the sample 5 to be tested by the area array detector 11 .

[0045] The workflow of this implementation case can be summarized as follows: (1) turn on the detection light source 1; (2) rotate the aperture dial A1 to select the appropriate aperture A2; (3) the single-pixel detector 63 measures the interference signal of the target area, which is used to place the sample 5 to be measured in the focal plane of the microscope objective 4; (4) the array detector 11 obtains the image of the measurement target.

[0046] The present invention provides a single-pixel detection device and an optical detection system with a flexible and variable measurement field of view, which have the following characteristics: (1) The measurement field of view of a single-pixel detector can be flexibly designed by introducing a field stop.

[0047] (2) The measurement field of view of the single-pixel detector can be flexibly changed by designing a mechanical field aperture dial.

[0048] (3) The measurement field of view of a single-pixel detector can be flexibly changed by designing a multi-level mechanical field aperture.

[0049] (4) Design the field of view aperture using a digital micromirror device.

[0050] (5) The single-pixel detection technology with flexible and variable measurement field of view is used in the automated optical quantity detection system.

[0051] The present invention provides a single-pixel detection device with a flexible and variable measurement field of view and an optical detection system. A field of view diaphragm is introduced into the detection light path, and the measurement field of view of the field of view diaphragm can be flexibly adjusted, thereby realizing flexible, simple and accurate single-pixel detection of targets of different shapes in optical detection. The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be considered as the scope of protection of the present invention.

Claims

1. A single-pixel detection device with a flexible and variable measurement field of view, characterized in that: It includes a field aperture (61), a focusing lens (62) and a single pixel detector (63); The field of view diaphragm (61) is arranged in the detection light path of the measured object and is a field of view diaphragm with a flexible and variable measurement field of view, which can automatically adjust the shape of the measurement field of view according to the shape of the measured object to obtain a measurement field of view that completely matches the shape of the measured object, and output an output light beam with the same shape as the measured object; The focusing lens (62) is arranged in the output light path of the field aperture (61) and is used to focus the output light beam of the field aperture (61) onto the single pixel detector (63), so that the single pixel detector (63) detects the signal of the measured target.

2. A single-pixel detection device with a flexible and variable measurement field of view according to claim 1, characterized in that: The field diaphragm (61) adopts a mechanical diaphragm unit (61A); the mechanical diaphragm unit (61A) comprises an diaphragm rotating disk (A1), an diaphragm (A2) and an diaphragm rotating disk driving mechanism; The aperture (A2) is pre-designed in multiple ways, and each aperture (A2) has a light-transmitting area (A21) of a different shape; The aperture rotating disk (A1) is provided with a plurality of aperture assembly holes (A11) whose shapes match those of the aperture (A2); each of the aperture assembly holes (A11) is equipped with the required aperture (A2); The aperture turntable driving mechanism is used to drive the aperture turntable (A1) to move, thereby rotating the aperture (A2) that completely matches the shape of the current target to be measured into the detection light path of the target to be measured; wherein the aperture (A2) that completely matches the shape of the current target to be measured refers to the shape of the light transmission area (A21) of the aperture (A2) that completely matches the shape of the current target to be measured.

3. The single-pixel detection device with a flexible and variable measurement field of view according to claim 2, characterized in that: A plurality of aperture rotating disks (A1) are coaxially stacked to form a multi-stage aperture rotating disk; an aperture (A2) in each stage of the aperture rotating disk (A1) that is rotated to a detection light path of a measured object is adjusted so that light-transmitting areas (A21) of the multiple stages of apertures (A2) in the detection light path of the measured object work together to form a measurement field of view that completely matches the shape of the measured object.

4. The single-pixel detection device with a flexible and variable measurement field of view according to claim 2, characterized in that: The aperture rotating disk (A1) is circular; each of the aperture assembly holes (A11) is a circular hole, which is arranged in a circular shape on the surface of the aperture rotating disk (A1).

5. The single-pixel detection device with flexible and variable measurement field of view according to claim 1, characterized in that: The field aperture (61) adopts a digital micromirror device (61B); The digital micromirror device (61B) comprises a micromirror unit and a micromirror unit switch; a plurality of the micromirror units are arranged in an array, and each micromirror unit is configured with an independent micromirror unit switch; The micromirror unit switch is used to control each of the micromirror units. If the reflective surface of the micromirror unit faces the detection light path of the target to be measured, the micromirror unit is in an on state; if the reflective surface of the micromirror unit faces away from the detection light path of the target to be measured, the micromirror unit is in an off state; According to the shape of the object to be measured, the micromirror unit switches of the micromirror units are controlled, and only the micromirror unit matching the shape of the object to be measured is started, and the other micromirror units are turned off; thereby obtaining a measurement field of view that completely matches the shape of the object to be measured; The working process is as follows: the sample signal light of the target to be measured is incident on each of the micromirror units in the activated state, and after being reflected by each of the micromirror units in the activated state, the sample signal light of the target to be measured is transmitted to the focusing lens (62) and focused on the single-pixel detector (63).

6. An optical detection system, characterized in that: A single-pixel detection device (6) with a flexible and variable measurement field of view as claimed in any one of claims 1 to 5, further comprising a detection light source (1), a collimating lens (2), a beam splitter / combiner (3), a microscope objective lens (4) and a sample to be measured (5); The detection light source (1) is used to emit a detection light beam; the collimating lens (2) is arranged on the transmission path of the detection light beam, and the collimating lens (2) performs a collimating operation on the incident detection light beam to output nearly parallel light; the beam splitter / combiner (3) is arranged on the transmission light path of the collimating lens (2); the microscope objective lens (4) is arranged on the reflection path of the beam splitter / combiner (3); the measured sample (5) is arranged at the focusing focal plane position of the microscope objective lens (4); and the single-pixel detection device (6) with a flexible and variable measurement field of view is arranged on the transmission light path of the beam splitter / combiner (3).

7. An optical detection method of the optical detection system according to claim 6, characterized in that: The following steps are involved: Step S1, a detection light beam emitted by a detection light source (1) is incident on a collimating lens (2), is collimated by the collimating lens (2), becomes a nearly parallel light, and is transmitted to a beam splitter / combiner (3); Step S2, after being reflected by the beam splitter / combiner (3), the nearly parallel light is incident on the microscope objective lens (4), and then focused onto the sample to be measured (5) by the microscope objective lens (4), thereby exciting the sample to be measured (5) to generate sample signal light; Step S3, the sample signal light is incident on the microscope objective lens (4), and after being transmitted through the microscope objective lens (4), the sample signal light passes through the beam splitter / combiner (3), and then is incident on the single-pixel detection device (6) with a flexible and variable measurement field of view; Step S4, the single-pixel detection device (6) with a flexible and variable measurement field of view is pre-adjusted according to the shape of the sample (5) to have a measurement field of view that completely matches the shape of the sample (5) to achieve accurate detection of the sample (5).

8. An optical detection system, characterized in that: A single-pixel detection device (6) with a flexible and variable measurement field of view as claimed in any one of claims 1 to 5, further comprising a detection light source (1), a collimating lens (2), a beam splitter / combiner (3), a microscope objective lens (4), a sample to be measured (5), an objective lens (7), a plane mirror (8), a beam splitter (9), a focusing lens element (10) and a planar array detector (11); The detection light source (1) is used to emit a detection light beam; the collimating lens (2) is arranged on the transmission path of the detection light beam, and the collimating lens (2) performs a collimating operation on the incident detection light beam to output nearly parallel light; the beam splitter / combiner (3) is arranged on the transmission light path of the collimating lens (2); the microscope objective lens (4) is arranged on the reflection path of the beam splitter / combiner (3); and the sample to be measured (5) is arranged at the focusing focal plane position of the microscope objective lens (4); The first transmitted light path of the beam splitter / combiner (3) is arranged in sequence with the objective lens (7) and the plane mirror (8); wherein the first transmitted light path refers to a transmitted light path parallel to the transmission path from the detection light source (1) to the beam splitter / combiner (3); The beam splitter (9) is arranged on the second transmitted light path of the beam splitter / combiner (3); wherein the second transmitted light path refers to a transmitted light path parallel to the signal generated by the sample (5) under test; The reflection path of the beam splitter (9) is provided with the focusing lens element (10) and the area array detector (11) in sequence; The single-pixel detection device (6) with a flexible and variable measurement field of view is arranged in the transmission light path of the beam splitter (9).

9. An optical detection method of the optical detection system according to claim 8, characterized in that: The following steps are involved: Step S1, turning on the detection light source (1); adjusting the field of view diaphragm (61) in the single-pixel detection device (6) with a flexible and variable measurement field of view to obtain a measurement field of view that completely matches the shape of the sample (5) being measured; Step S2, the detection light beam emitted by the detection light source (1) is incident on the collimating lens (2), is collimated by the collimating lens (2) and becomes nearly parallel light, and is transmitted to the beam splitter / combiner (3); Step S2, after the nearly parallel light passes through the beam splitter / combiner (3), a first reflected light and a first transmitted light are simultaneously generated; The first reflected light is incident on the microscope objective lens (4), and then focused onto the sample to be measured (5) through the microscope objective lens (4), exciting the sample to be measured (5) to generate sample signal light; the sample signal light is incident on the microscope objective lens (4), and after being transmitted through the microscope objective lens (4), forms a first light beam, which is incident on the beam splitter / combiner (3); The first transmitted light is focused onto the plane mirror (8) through the objective lens (7), and after being reflected by the plane mirror (8), it passes through the objective lens (7) to form a second light beam, which is incident on the beam splitter / combiner (3); Step S3, the beam splitter / combiner (3) combines the first light beam and the second light beam to generate an interference signal; the interference signal passes through the beam splitter (9) to form a second transmitted light and a second reflected light; The second transmitted light is incident on a single-pixel detection device (6) with a flexible and variable measurement field of view; the single-pixel detection device (6) with a flexible and variable measurement field of view detects an interference signal of the sample to be measured (5), and by observing the interference signal of the sample to be measured (5), adjusts the position of the sample to be measured (5) so that the sample to be measured (5) is accurately placed on the focal plane of the microscope objective lens (4); The second reflected light passes through a focusing lens element (10) and is imaged onto an area array detector (11), wherein the area array detector (11) realizes imaging of the sample (5) to be measured.

Images