Assembly tooling and assembly tooling systems

Abstract

The present disclosure provides an assembly tool and an assembly tool system, which relate to the field of semiconductor manufacturing. The assembly tool includes: a base; a fixed arm, the first end of the fixed arm is connected to the upper surface of the base, and the second end of the fixed arm extends upward in the vertical direction; a mounting arm, the first end of the mounting arm is connected to the second end of the fixed arm, and the second end of the mounting arm extends in the horizontal direction; a plug-in assembly; the plug-in assembly includes a movable part, a connector and a plug-in assembly; the movable part is movably connected to the mounting arm; the connector is used to be assembled on the cavity; the plug-in assembly detachably connects the movable part to the connector. The assembly tool provided in this embodiment can increase the working height by configuring the fixed arm, provide an open working space, enable workers to work upright, make the installation process flexible, and improve work efficiency; by configuring the mounting arm to bear the cavity, the rigidity of the assembly tool can be improved and the installation accuracy can be improved.

Description

Technical Field

[0001] Exemplary embodiments of the present disclosure relate generally to the field of semiconductor manufacturing, and more particularly to assembly tooling and assembly tooling systems. Background Art

[0002] During the assembly process of semiconductor processing equipment, workers need to squat or bend over for a long time and must follow a bottom-up installation sequence. The installation process is inflexible and has low work efficiency. Summary of the Invention

[0003] In a first aspect of the present disclosure, an assembly tool is provided for assembling a cavity in a semiconductor process processing equipment, the assembly tool comprising: a base, having an upper surface and a lower surface relatively arranged in a vertical direction, the vertical direction being parallel to the axial direction of the cavity; a fixed arm, a first end of the fixed arm being connected to the upper surface of the base, and a second end of the fixed arm extending upward in the vertical direction; a mounting arm, a first end of the mounting arm being connected to the second end of the fixed arm, and the second end of the mounting arm extending in a horizontal direction; wherein the horizontal direction is perpendicular to the vertical direction; a plug-in component for configuring the cavity on the mounting arm; the plug-in component comprising a movable part, a connecting part and a plug-in component; the movable part is movably connected to the mounting arm; the connecting part is used to be assembled on the cavity; the plug-in component detachably connects the movable part to the connecting part.

[0004] The assembly tool provided in this embodiment can increase the working height by configuring a fixed arm, providing an open working space, allowing workers to work upright, making the installation process flexible and improving work efficiency; by configuring an installation arm bearing cavity, the rigidity of the assembly tool can be improved and the installation accuracy can be improved.

[0005] In some embodiments, the fixed arm includes a first sub-arm disposed on the base, and a second sub-arm connected to the mounting arm; the first sub-arm is liftably connected to the second sub-arm to adjust the distance of the mounting arm relative to the base; wherein, one end of the first sub-arm connected to the base forms the first end of the fixed arm, and one end of the second sub-arm connected to the mounting arm forms the second end of the fixed arm.

[0006] In some embodiments, the first sub-arm is provided with at least a screw rod; the second sub-arm is provided with at least a nut, and the screw rod is inserted into the rotating nut to adjust the vertical lifting of the rotating nut by rotating the screw rod.

[0007] In some embodiments, the mounting arm is provided with a sliding guide portion in a horizontal direction; the movable part includes a main body, and a sliding portion is provided at the top end of the main body; the sliding portion is slidably connected to the sliding guide portion so that the sliding portion can move along the extension direction of the sliding guide portion to adapt to the size of the cavity; the bottom end of the main body is provided with a mounting portion, and the mounting portion is used to cooperate with the connector when the sliding portion slides into place.

[0008] In some embodiments, the sliding guide portion includes a sliding groove; the sliding portion includes at least a pulley; or the sliding guide portion includes a sliding rail; the sliding portion includes at least a slider.

[0009] In some embodiments, the mounting portion includes a first mounting hole; a second mounting hole is provided on the side of the connecting member away from the cavity; the plug-in member is inserted into the first mounting hole and the second mounting hole, and provides a pre-tightening force to connect the movable member and the connecting member.

[0010] In some embodiments, the connector includes a head, an insertion rod, and a locking portion; the head is connected to one end of the insertion rod; the insertion rod is used to pass through the movable part and the connecting part, the locking portion cooperates with the end of the insertion rod away from the head, and the locking portion and the head clamp the movable part and the connecting part.

[0011] In some embodiments, the locking portion includes an elastic protrusion, there are at least two elastic protrusions, and the elastic protrusions are evenly distributed along the circumference of the insertion rod; or, the locking portion includes a nut; the insertion rod is provided with a threaded section that cooperates with the nut.

[0012] In some embodiments, the assembly tool further includes: a plurality of support members, wherein at least three support members are respectively arranged near the three vertices of a preset triangle; each support member includes a fixing portion and an adjustment portion; the fixing portion is connected to the lower surface of the base; the adjustment portion is liftably connected to the fixing portion to adjust the horizontal state of the assembly tool by lifting and lowering the adjustment portion.

[0013] In some embodiments, an internal threaded hole is provided on a side of the fixing portion away from the base; the adjusting portion includes a screw adapted to the thread of the internal threaded hole; one end of the screw is inserted into the internal threaded hole, and the other end of the screw is against the ground, so that the length of the screw extending out of the internal threaded hole can be adjusted by rotating the screw.

[0014] In some embodiments, the pitch between two adjacent threads on the screw is greater than or equal to 0.5 mm and less than or equal to 2 mm.

[0015] In some embodiments, the support member further includes: a moving member rotatably disposed on the lower surface of the base; or, a moving member rotatably disposed on the fixed portion.

[0016] In a second aspect of the present disclosure, an assembly tooling system is provided for assembling a cavity in a semiconductor process processing equipment, the assembly tooling system comprising: an assembly tooling according to any one of the above-mentioned embodiments; and a transfer piece configured to carry the cavity when the assembled cavity is separated from the assembly tooling.

[0017] In some embodiments, the assembly tool system further includes a carrier configured to carry the transfer part between the semiconductor process equipment and the assembly tool.

[0018] It should be understood that the contents described in the Summary of the Invention section are not intended to limit the key or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein:

[0020] Figure 1 is a schematic structural diagram of a cavity according to an embodiment of the present disclosure;

[0021] Figure 2 is a structural schematic diagram of an assembly tool according to an embodiment of the present disclosure;

[0022] Figure 3 yes Figure 2 A top view of

[0023] Figure 4 yes Figure 2 A partial enlarged view of the top mounting wall, plug-in assembly, and cavity fit;

[0024] Figure 5 yes Figure 4 Left view of;

[0025] Figure 6a It is a structural diagram of a spring-type connector;

[0026] Figure 6b It is a structural diagram of a shrapnel type connector;

[0027] Figure 6c It is a structural diagram of a marble-type connector;

[0028] Figure 7a It is a structural diagram of the first type of support member;

[0029] Figure 7b is a schematic structural diagram of the second type of support member;

[0030] Figure 7c It is a structural diagram of the third type of support member;

[0031] Figure 8 It is a structural diagram of an assembly tooling system according to an embodiment of the present disclosure.

[0032] Description of reference numerals:

[0033] 1000: Assembly tooling;

[0034] 1100: base;

[0035] 1200: fixed arm;

[0036] 1300: Mounting arm;

[0037] 1400: plug-in assembly;

[0038] 1410: moving parts;

[0039] 1420: Connectors;

[0040] 1430: connector;

[0041] 1431: Insert the rod;

[0042] 1432: locking portion;

[0043] 1433: head;

[0044] 1500: support;

[0045] 1510: fixed part;

[0046] 1520: Regulation Department;

[0047] 1530: moving parts;

[0048] 2000: Assembly tooling system;

[0049] 2100: Transshipment;

[0050] 2200: carriers;

[0051] 3000: Cavity. DETAILED DESCRIPTION

[0052] The following description of exemplary embodiments of the present disclosure is made in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding. These details should be considered as merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0053] In the process of assembling the cavity of semiconductor process equipment, it is often necessary to assemble it on a tooling. The tooling in the related art is composed of a plurality of metal support rods connected. The tooling is installed on the ground to support and fix the lower cavity assembly or the bottom surface of the lower light panel of the cavity. The upper end of the support rod of the tooling is connected to the cavity fixing pin. The working surface is usually 300 to 500 mm from the ground. The workers need to squat or bend over for a long time during the installation work, and the cavity assembly needs to be installed from bottom to top. There are at least two technical problems with the tooling in the related art: 1. The workers must strictly abide by the installation order of the cavity from bottom to top. The installation process is not flexible. After the installation of the cavity bottom assembly is completed, the position and status of the components cannot be observed. If a component is assembled incorrectly, it needs to be disassembled as a whole and reassembled, affecting work efficiency; 2. The tooling and the cavity are only connected by fixing pins. The positioning adjustment and tightening actions during the assembly process lack support rigidity, making it difficult to ensure installation accuracy.

[0054] In order to solve at least one of the above technical problems, the assembly tool disclosed in the present invention can increase the working height by configuring a fixed arm, providing an open working space, allowing workers to work upright, making the installation process flexible and improving work efficiency; by configuring an installation arm bearing cavity, the rigidity of the assembly tool can be improved and the installation accuracy can be improved.

[0055] like Figure 1 As shown in FIG7 , the present disclosure provides an assembly tool 1000 for assembling a chamber 3000 in a semiconductor process equipment. The assembly tool 1000 includes: a base 1100, which has an upper surface and a lower surface arranged opposite to each other in a vertical direction, and the vertical direction is parallel to the axial direction of the chamber 3000; a fixed arm 1200, wherein the first end of the fixed arm 1200 is connected to the upper surface of the base 1100, and the second end of the fixed arm 1200 extends upward in the vertical direction; and a mounting arm 1300, wherein the first end of the mounting arm 1300 is connected to the second end of the fixed arm 1200, and the second end of the mounting arm 1300 extends along the water line. Extending in a horizontal direction; wherein the horizontal direction is perpendicular to the vertical direction; the plug-in assembly 1400 is used to configure the cavity 3000 on the mounting arm 1300; the plug-in assembly 1400 includes a movable part 1410, a connecting part 1420 and a plug-in part 1430; the movable part 1410 is movably connected to the mounting arm 1300; the connecting part 1420 is used to be assembled on the cavity 3000; the plug-in part 1430 detachably connects the movable part 1410 and the connecting part 1420.

[0056] Semiconductor process equipment is equipment that processes workpieces (such as wafers) during semiconductor manufacturing, for example, it can be a heat treatment equipment that performs heat treatment on the workpiece. The part of the semiconductor process equipment used to accommodate the workpiece is the cavity 3000, and the workpiece can be placed in the internal space of the cavity 3000 for processing. The cavity 3000 can be columnar, such as cylindrical, prismatic, or conical, and its specific shape can be set as needed. For example Figure 1 As shown, the cavity 3000 can also be assembled from an upper cavity and a lower cavity.

[0057] The assembly tool 1000 can be understood as a carrier used when assembling the cavity 3000. For ease of description, this embodiment will take the axial direction of the cavity 3000 as the vertical direction (i.e., the up and down direction) of the assembly tool 1000, the direction of gravity as the bottom (or bottom), and the direction opposite to the direction of gravity as the top (or top). The axial direction of the assembly tool 1000 is Figure 2 The horizontal direction is Figure 2 Center left and right direction.

[0058] The base 1100 is a supporting structure at the bottom of the assembly tool 1000, which can be a plate-shaped body; or Figure 3 For example, Figure 3 The base 1100 is composed of a plurality of support rods, wherein: Figure 3 for Figure 2 Top view, Figure 3 Left and right direction Figure 2 Same direction for left and right. Figure 3 The longitudinal direction is Figure 3 The two first support rods in the plurality of support rods are parallel to the two mounting arms 1300 are Figure 3 and the two second support rods are both extended longitudinally and are respectively connected to the left and right ends of the two first support rods; and four third support rods are also included, wherein the two third support rods are located at the upper and lower ends of the left second support rod and extend toward the left, and the other two third support rods are located at the upper and lower ends of the right second support rod and extend toward the right.

[0059] A fixed arm 1200 is connected to the upper surface of the base 1100. The fixed arm 1200 extends vertically to raise the working height of the assembly tool 1000. The vertical extension distance of the fixed arm 1200 can be adjusted according to actual needs. The fixed arm 1200 can be generally prismatic or cylindrical. The lower end (i.e., the first end) of the fixed arm 1200 is fixedly connected to the upper surface of the base 1100, for example by welding or integral molding, to enhance the rigidity of the assembly tool 1000.

[0060] The upper end (i.e., the second end) of the fixed arm 1200 is connected to the mounting arm 1300. The mounting arm 1300 extends horizontally. The fixed arm 1200 and the mounting arm 1300 can be movably connected. For example, the mounting arm 1300 can be vertically movable relative to the fixed arm 1200 to adjust the working height of the assembly tool 1000 to accommodate different heights of workers and improve its usability. Alternatively, the two can be fixedly connected to increase the rigidity of the assembly tool 1000. By configuring the mounting arm 1300 and the fixed arm 1200 to increase the working height, an open working space can be provided for workers, facilitating their work.

[0061] The mounting arm 1300 can be generally prismatic or cylindrical. The number of mounting arms 1300 can be one or more. In the case of selecting multiple mounting arms 1300, each mounting arm 1300 extends horizontally. Optionally, to improve the reliability and stability of the fixed cavity 3000, each cavity 3000 can be fixed by at least two mounting arms 1300. To further improve the reliability and stability of the fixed cavity 3000, the number of fixed arms 1200 can be adapted to the number of mounting arms 1300; further, a reinforcing beam can be connected between two adjacent mounting arms 1300 or two adjacent fixed arms 1200, and the specific position of the reinforcing beam can be set according to actual needs.

[0062] by Figure 3 As an example, two mounting arms 1300 are shown. Figure 3 The left side is defined as the left side of the mounting arm 1300, Figure 3 The up and down directions are defined as the longitudinal direction; the right ends of the two mounting arms 1300 are connected to the fixed arm 1200, and the two mounting arms 1300 extend toward the left side, and the two mounting arms 1300 extend along Figure 3 The two mounting arms 1300 are distributed at intervals in the longitudinal direction. When assembling the cavity 3000, the two mounting arms 1300 bear part of the weight of the cavity 3000, which can prevent the mounting arms 1300 from deforming and affecting the assembly accuracy of the cavity 3000. Figure 3 A fixed arm 1200 may be used, and the upper end of the fixed arm 1200 is connected to the right end of the two mounting arms 1300 respectively; or, Figure 3 Two fixing arms 1200 may be used, and the two fixing arms 1200 are connected to the right ends of the two installation arms 1300 in a one-to-one correspondence.

[0063] The plug assembly 1400 is used to connect the cavity 3000 to the mounting arm 1300. One plug assembly 1400 can be provided on each mounting arm 1300, or a plurality of plug assemblies 1400 can be provided on each mounting arm 1300 to improve the stability of the connection cavity 3000.

[0064] In order to connect cavities 3000 of different specifications and improve the applicability of the assembly tool 1000, the movable part 1410 can be movably connected to the mounting arm 1300. In order to improve the reliability of the fixation of the cavity 3000, the mounting arm 1300 can be movably connected to at least two movable parts 1410. There can be various ways to connect the movable part 1410 to the mounting arm 1300, such as rolling connection, movable connection, etc., as long as the movable part 1410 can move in the horizontal direction. When assembling cavities 3000 of different specifications, the movable part 1410 can be adjusted to adjust the distance between the two corresponding movable parts 1410 on the same mounting arm 1300 to better adapt to the specifications of the cavity 3000. The number of movable parts 1410 can be set as needed.

[0065] For example Figure 3 Four movable parts 1410 are shown, with two movable parts 1410 provided on each mounting arm 1300. When assembling a small-sized cavity 3000, the distance between the two movable parts 1410 on the same mounting arm 1300 can be reduced, and vice versa.

[0066] In some embodiments, the cavity 3000 can be assembled from an upper cavity and a lower cavity. When assembling the cavity 3000 using the assembly tool 1000 of the present disclosure, the upper cavity can be first configured on the assembly tool 1000, and then the lower cavity can be connected to the upper cavity to complete the assembly of the cavity 3000.

[0067] The connector 1420 can be pre-configured on the top of the upper cavity before assembling the cavity 3000 and removed after the entire cavity 3000 is assembled. The connector 1420 can be directly assembled on the upper cavity through its own structure. For example, the bottom of the connector 1420 has a screw with a thread, which is rotated and inserted into the threaded hole of the upper cavity. The specific structure can be set as needed.

[0068] The connector 1430 is used to connect the connector 1420 to the movable member 1410. For example, when assembling the upper cavity, the two are connected via the connector 1430. When assembling the entire cavity 3000, the connector 1430 is removed to separate the movable member 1410 from the connector 1420. The connector 1430 can be connected to the movable member 1410 and the connector 1420 in a variety of ways. For example, the connector 1430 can clamp the two to achieve the connection, or the connector 1430 can pass through the two and threadedly engage to achieve the connection. This configuration can be configured as needed.

[0069] When applying the assembly tool 1000 disclosed herein, the position of the movable part 1410 on the mounting arm 1300 is adjusted to adapt to the specifications and dimensions of the cavity 3000; the connecting part 1420 is arranged on the top of the upper cavity, and the staff lifts the upper cavity and the connecting part 1420 to move the connecting part 1420 to the position of the movable part 1410, and connects the connecting part 1420 and the movable part 1410 through the plug-in part 1430; the staff assembles the lower cavity and the upper cavity to complete the assembly of the entire cavity 3000.

[0070] The assembly tool 1000 disclosed herein can increase the working height by configuring the fixed arm 1200, and can provide an open working space, so that workers can work upright, the installation process is flexible, and work efficiency is improved; by configuring the installation arm 1300 to carry the cavity 3000, the rigidity of the assembly tool 1000 can be improved and the installation accuracy can be improved.

[0071] In some embodiments, the mounting arm 1300 can be configured to be at least 1.2 meters away from the ground in the vertical direction; or, the assembly operation surface of the cavity 3000 (i.e., the operation surface where the staff assembles the cavity 3000) can be configured to be greater than or equal to 1 meter and less than or equal to 1.2 meters away from the ground in the vertical direction.

[0072] In some embodiments, the fixed arm 1200 includes a first sub-arm provided on the base 1100, and a second sub-arm connected to the mounting arm 1300; the first sub-arm can be raised and lowered to be connected to the second sub-arm to adjust the distance of the mounting arm 1300 relative to the base 1100; wherein, one end of the first sub-arm connected to the base 1100 forms the first end of the fixed arm 1200, and one end of the second sub-arm connected to the mounting arm 1300 forms the second end of the fixed arm 1200.

[0073] It can be understood that the fixed arm 1200 includes two parts distributed vertically, the lower part is the first sub-arm, and the upper part is the second sub-arm. The first sub-arm is fixedly connected to the base 1100, and the second sub-arm is fixedly connected to the mounting arm 1300. The second sub-arm can move up and down along the first sub-arm to adjust the height of the mounting arm 1300 in the vertical direction.

[0074] There are many ways to lift the second sub-arm. For example, the first sub-arm is provided with a linear motor, and the second sub-arm is provided with a push rod. The output end of the linear motor is connected to the push rod, and the linear motor drives the push rod to move up and down, which drives the second sub-arm to move up and down. Or, the first sub-arm is provided with a cylinder, and the second sub-arm is provided with a push rod. The piston of the cylinder is connected to the push rod, and the cylinder drives the push rod to move up and down, which drives the second sub-arm to move up and down. Furthermore, in some embodiments, the first sub-arm is provided with at least a screw rod; the second sub-arm is provided with at least a nut, and the screw rod is inserted into the nut to adjust the lifting and lowering of the nut in the vertical direction by rotating the screw rod, thereby driving the lifting and lowering of the second sub-arm.

[0075] By providing a liftable second sub-arm, the height of the mounting arm 1300 in the vertical direction can be adjusted to suit the heights of different workers.

[0076] In some embodiments, as Figure 2 As shown, a reinforcing rib is provided between the fixing arm 1200 and the upper surface of the base 1100 , and a reinforcing rib is provided between the fixing arm 1200 and the installation arm 1300 to further improve the rigidity of the assembly tool 1000 .

[0077] In some embodiments, the mounting arm 1300 is provided with a sliding guide portion in the horizontal direction; the movable part 1410 includes a main body, and a sliding portion is provided at the top of the main body; the sliding portion is slidably connected to the sliding guide portion so that the sliding portion can move along the extension direction of the sliding guide portion to adapt to the size of the cavity 3000; the bottom end of the main body is provided with a mounting portion, and the mounting portion is used to cooperate with the connector 1430 when the sliding portion slides into place.

[0078] In one example, the main body can be roughly plate-shaped, with a sliding portion disposed at the top of the main body and configured to connect with the sliding guide portion, and a mounting portion disposed at the bottom of the main body and configured to connect with the plug-in connector 1430. The main body and mounting portion of the movable member 1410 can be integrally formed as a single piece, or they can be connected as two independent structures. The main body and sliding portion of the movable member 1410 can be integrally formed as a single piece, or they can be connected as two independent structures.

[0079] There can be multiple ways of connecting the sliding guide part and the sliding part. For example, in some embodiments, the sliding guide part includes a slide groove; the sliding part includes at least a pulley, which is arranged in the slide groove, and the movement of the pulley drives the movable part 1410 to move synchronously; or, the sliding guide part includes a slide rail; the sliding part includes at least a slider, which is cooperatively connected with the slide rail, and the movement of the slider drives the movable part 1410 to move synchronously.

[0080] By setting a matching connection mode between the sliding guide portion and the sliding portion, the movable member 1410 can be moved within a certain range to be compatible with the assembly of cavities 3000 of different specifications.

[0081] In some embodiments, the mounting portion includes a first mounting hole; a second mounting hole is provided on the side of the connecting member 1420 away from the cavity 3000; the plug-in member 1430 is passed through the first mounting hole and the second mounting hole, and provides a pre-tightening force to connect the movable member 1410 and the connecting member 1420.

[0082] The value of the pre-tightening force can be set as needed to connect the movable part 1410 and the connecting part 1420.

[0083] The specifications and shape of the first mounting hole can be determined based on the specifications and shape of connector 1430. For example, if the first mounting hole is rectangular, connector 1430 can be of the same shape to prevent connector 1430 from rotating within the first mounting hole after mating with the first mounting hole. Similarly, the specifications and shape of the second mounting hole at the top of connector 1420 can be determined based on the specifications and shape of connector 1430, and will not be further described.

[0084] The connector 1430 can be a bolt structure or a latch structure, and can be configured as needed, for example Figure 5 、 Figure 6a 、 Figure 6b 、 Figure 6c As shown, in some embodiments, the connector 1430 includes a head 1433, an insertion rod 1431 and a locking portion 1432; the head 1433 is connected to one end of the insertion rod 1431; the insertion rod 1431 is used to pass through the movable part 1410 and the connecting part 1420, the locking portion 1432 cooperates with the end of the insertion rod 1431 away from the head 1433, and the locking portion 1432 and the head 1433 clamp the movable part 1410 and the connecting part 1420.

[0085] Specifically, after the insertion rod 1431 passes through the first mounting hole and the second mounting hole; the head 1433 presses against the surface of the movable part 1410 away from the connecting part 1420, and the locking part 1432 presses against the surface of the connecting part 1420 away from the movable part 1410; or, the head 1433 presses against the surface of the connecting part 1420 away from the movable part 1410, and the locking part 1432 presses against the surface of the movable part 1410 away from the connecting part 1420.

[0086] The connection between the locking portion 1432 and the insertion rod 1431 can be various. For example, in some embodiments, the locking portion 1432 includes an elastic protrusion, and the elastic protrusions are provided with at least two elastic protrusions, and the elastic protrusions are evenly distributed along the circumference of the insertion rod 1431. After the insertion rod 1431 passes through the first mounting hole and the second mounting hole, the elastic protrusions pop up and clamp the movable member 1410 and the connecting member 1420 together with the head 1433. Figure 6a 、 Figure 6b 、 Figure 6c Three different types of connectors with different elastic protrusion structures are shown. Figure 6a Spring-type connectors, Figure 6b Shrapnel connectors and Figure 6c Alternatively, the locking portion 1432 includes a nut; the insert rod 1431 is provided with a threaded section that cooperates with the nut, the two are connected by threaded cooperation, and the movable part 1410 and the connecting part 1420 are clamped together by rotating the nut and the head 1433.

[0087] According to an embodiment of the present disclosure, when assembling the cavity 3000 , the cavity 3000 can be quickly and rigidly connected to the assembly tool 1000 , and can be quickly detached after the assembly is completed.

[0088] In some embodiments, the assembly tool 1000 also includes: a plurality of support members 1500, wherein at least three support members 1500 are respectively arranged near the three vertices of a preset triangle; each support member 1500 includes a fixing portion 1510 and an adjusting portion 1520; the fixing portion 1510 is connected to the lower surface of the base 1100; the adjusting portion 1520 is liftably connected to the fixing portion 1510 to adjust the horizontal state of the assembly tool 1000 by lifting and lowering the adjusting portion 1520.

[0089] The preset triangle can be a right triangle, an acute triangle or an obtuse triangle. After the support members 1500 are arranged at the three vertices of the triangle, the assembly tool 1000 can be stably supported.

[0090] The fixing portion 1510 can be directly fixedly connected to the lower surface of the base 1100 to improve the rigidity of the assembly tool 1000. Alternatively, it can be detachably connected to the lower surface of the base 1100 so that the relative position of the fixing portion 1510 to the base 1100 can be adjusted by disassembly and reassembly when assembling chambers of different specifications.

[0091] The fixing portion 1510 may be in various shapes, such as cylindrical, prismatic, etc. The fixing portions 1510 may be the same or different.

[0092] The adjusting portion 1520 can be raised and lowered relative to the fixing portion 1510. During the rising process of the adjusting portion 1520, it gradually moves away from the base 1100, thereby increasing the vertical height of the area of ​​the base 1100; and vice versa.

[0093] There can be many ways to connect the adjusting part 1520 and the fixing part 1510. For example, the fixing part 1510 includes a driving motor, the adjusting part 1520 includes a push rod, and the driving motor drives the push rod to rise and fall; or, the fixing part 1510 includes a cylinder, the adjusting part 1520 includes a push rod, and the cylinder drives the push rod to rise and fall; further, in some embodiments, an internal threaded hole is provided on the side of the fixing part 1510 away from the base 1100; the adjusting part 1520 includes a screw adapted to the thread of the internal threaded hole; one end of the screw is inserted into the internal threaded hole, and the other end of the screw is against the ground, so that the length of the screw extending out of the internal threaded hole can be adjusted by rotating the screw, thereby changing the vertical height of the area on the base 1100.

[0094] By adjusting the lifting and lowering of multiple adjustment parts 1520, the assembly tool 1000 can be kept in a horizontal state as much as possible. On the one hand, it allows the staff to assemble the cavity 3000 in a horizontal state, thereby improving the assembly accuracy; on the other hand, it can avoid the cavity 3000 from tipping over or tilting due to changes in the center of gravity during assembly.

[0095] In some embodiments, as Figure 2 、 Figure 3 As shown, the assembly tool 1000 includes six support members 1500, wherein four support members 1500 are respectively arranged at the four outer edge positions of the base 1100, that is, the base 1100 is configured in the area surrounded by the four support members 1500; the remaining two support members 1500 are arranged in the horizontal direction (i.e. Figure 3 The six supporting members 1500 are respectively arranged in the middle position of two adjacent supporting members 1500, so as to evenly distribute the weight of the assembly cavity 3000 to the six supporting members 1500, thereby improving the stability of the assembly tool 1000.

[0096] In some embodiments, as Figure 7a 、 Figure 7b 、 Figure 7c As shown, the support member 1500 further includes a fixing plate, which is disposed between the fixing portion 1510 and the lower surface of the base 1100 to facilitate the stability of the connection between the support member 1500 and the base 1100 .

[0097] In some embodiments, the assembly tool 1000 may also be provided with a level ruler to facilitate the staff to adjust the lifting and lowering of the adjustment part 1520 according to the detection result of the level ruler. The number and distribution position of the level ruler can be set as needed, for example, along the Figure 3 The first level is set horizontally. Figure 3 A second level is provided in the longitudinal direction, and the staff adjusts the lifting and lowering of the six adjustment parts 1520 according to the detection results of the two levels; wherein, the two levels can be both provided on the base 1100, or both provided on the mounting arm 1300, which is not specifically limited here.

[0098] In some embodiments, the pitch between two adjacent threads on the screw is greater than or equal to 0.5 mm and less than or equal to 2 mm, so as to improve the accuracy of the support member 1500 in adjusting the horizontal state of the assembly tool 1000.

[0099] In some embodiments, the support member 1500 further includes: a moving member 1530 rotatably disposed on the lower surface of the base 1100 ; or, rotatably disposed on the fixing portion 1510 .

[0100] The moving member 1530 can be directly disposed on the fixed portion 1510 or disposed in the vicinity of the base 1100 close to the fixed portion 1510. There are many ways to connect the moving member 1530 to the fixed portion 1510 or the base 1100, such as Figure 7a 、 Figure 7b 、 Figure 7c Three different forms of connection are shown; the moving member 1530 may include casters, such as fixed casters, universal casters or brakeable casters.

[0101] It should be noted that when fixing the assembly tool 1000, the length of the adjustment part 1520 extending out of the internal threaded hole can be increased. When the length reaches a certain length, the caster will leave the ground; conversely, when the assembly tool 1000 needs to be moved, the length of the adjustment part 1520 extending out can be shortened so that the caster contacts the ground, and the assembly tool 1000 can be moved by the caster.

[0102] According to the embodiments of the present disclosure, the support, fixation and movement of the assembly tool 1000 can be facilitated, thereby improving the convenience of the assembly tool 1000.

[0103] In some embodiments, the maximum load of the assembly tool 1000 is set to be approximately 3000N, and the elastic variable under the maximum load is less than or equal to 4mm.

[0104] In some embodiments, along the horizontal direction, the ratio of the distance L between the two ends of the base 1100 and the distance H from the center of gravity to the bottom surface when the assembly tool 1000 assembles the cavity 3000 is greater than or equal to 1 and less than or equal to 2. Figure 3 For example, along Figure 3 In the left-right direction, the distance between the leftmost support member 1500 and the rightmost support member 1500 is defined as L; Figure 2 In the vertical direction, the distance between the center of gravity of the assembly tool 1000 and the ground when assembling the cavity 3000 is defined as H; the ratio L to H is configured to be greater than or equal to 1 and less than or equal to 2.

[0105] like Figure 8 As shown, the present disclosure provides an assembly tooling system 2000 for assembling a cavity 3000 in a semiconductor process processing device. The assembly tooling system 2000 includes: the assembly tooling 1000 in any of the above-mentioned embodiments; and a transfer piece 2100. The transfer piece 2100 is configured to carry the cavity 3000 when the assembled cavity 3000 is separated from the assembly tooling 1000.

[0106] The configuration and introduction of the assembly tool 1000 can refer to any of the above embodiments and will not be repeated here.

[0107] The transporting member 2100 can be understood as a structure that temporarily carries the assembled cavity 3000 when the assembled cavity 3000 is separated from the assembly tool 1000; or it can be understood as a structure that carries the assembled cavity 3000 when the assembled cavity 3000 is transported. The transporting member 2100 can be an independent member and can have various shapes, for example, Figure 8 The frame shown is composed of multiple support rods. When the assembled cavity 3000 is connected to it, a part of the assembled cavity 3000 will be located inside the frame to lower the center of gravity and improve the stability of the connection; and the outer edge of the frame abuts against the edge of the cavity 3000.

[0108] By configuring the transfer member 2100 to carry the assembled cavity 3000, it is possible to avoid collision or damage to the cavity 3000 during transportation.

[0109] In some embodiments, the assembly tool system 2000 further includes a carrier 2200 configured to carry the transport member 2100 between the semiconductor process equipment and the assembly tool 1000 .

[0110] The carrier 2200 can be configured to carry an empty transport member 2100 , or can be configured to carry a transport member 2100 carrying an assembled cavity 3000 .

[0111] According to the embodiments of the present disclosure, the mobility of the cavity 3000 in transportation can be improved.

[0112] In one example, the carrier 2200 may be at least a forklift or an AGV (Automated Guided Vehicle).

[0113] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0114] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout the present disclosure, "plurality" means two or more, unless otherwise specifically defined.

[0115] In this disclosure, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections, or communication; direct connections or indirect connections through an intermediate medium; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this disclosure based on specific circumstances.

[0116] In the present disclosure, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0117] The disclosure above provides many different embodiments or examples for implementing different structures of the present disclosure. In order to simplify the disclosure of the present disclosure, the components and settings of specific examples are described above. Of course, these are merely examples and are not intended to limit the present disclosure. In addition, the present disclosure may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0118] The above specific embodiments do not constitute a limitation on the scope of protection of this disclosure. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this disclosure shall be included within the scope of protection of this disclosure.

Claims

1. An assembly tool for assembling a chamber in a semiconductor processing equipment, the assembly tool comprising: a base, having an upper surface and a lower surface opposite to each other in a vertical direction, wherein the vertical direction is parallel to the axial direction of the cavity; a fixed arm, wherein a first end of the fixed arm is connected to the upper surface of the base, and a second end of the fixed arm extends upward along the vertical direction; a mounting arm, wherein a first end of the mounting arm is connected to the second end of the fixed arm, and the second end of the mounting arm extends in a horizontal direction; wherein the horizontal direction is perpendicular to the vertical direction; A plug-in assembly is used to configure the cavity on the mounting arm; the plug-in assembly includes a movable part, a connecting part, and a plug-in part; the movable part is movably connected to the mounting arm; the connecting part is used to be assembled on the cavity; the plug-in part detachably connects the movable part to the connecting part; The connector includes a head, an insertion rod and a locking portion; the head is connected to one end of the insertion rod; the insertion rod is used to pass through the movable part and the connecting part, the locking portion cooperates with the end of the insertion rod away from the head, and the locking portion and the head clamp the movable part and the connecting part; the locking portion includes an elastic protrusion, the elastic protrusion has at least two, and the elastic protrusions are evenly distributed along the circumference of the insertion rod; or, the locking portion includes a nut; the insertion rod is provided with a threaded section that cooperates with the nut.

2. The assembly tool according to claim 1, wherein: The fixed arm includes a first sub-arm arranged on the base, and a second sub-arm connected to the mounting arm; the first sub-arm can be raised and lowered to connect to the second sub-arm to adjust the distance of the mounting arm relative to the base; wherein, one end of the first sub-arm connected to the base forms the first end of the fixed arm, and one end of the second sub-arm connected to the mounting arm forms the second end of the fixed arm.

3. The assembly tool according to claim 2, wherein: The first sub-arm is provided with at least a screw rod; the second sub-arm is provided with at least a rotating nut, the screw rod is inserted into the rotating nut, so that the lifting and lowering of the rotating nut in the vertical direction can be adjusted by rotating the screw rod.

4. The assembly tool according to claim 1, wherein: The mounting arm is provided with a sliding guide portion along the horizontal direction; The movable member includes a body, and a sliding portion is provided at the top end of the body; the sliding portion is slidably connected to the sliding guide portion so that the sliding portion can move along the extension direction of the sliding guide portion to adapt to the size of the cavity; A mounting portion is provided at the bottom end of the body, and the mounting portion is used to cooperate with the connector when the sliding portion slides into place.

5. The assembly tool according to claim 4, wherein: The sliding guide portion includes a sliding groove; the sliding portion includes at least a pulley; Alternatively, the sliding guide portion includes a slide rail; and the sliding portion includes at least a slider.

6. The assembly tool according to claim 4, wherein: The mounting portion includes a first mounting hole; A second mounting hole is provided on a side of the connecting member away from the cavity; The plug-in connector is inserted into the first mounting hole and the second mounting hole, and provides a pre-tightening force for connecting the movable part and the connecting part.

7. The assembly tool according to claim 1, wherein: The assembly tool also includes: A plurality of support members, wherein at least three support members are respectively disposed near three vertices of a preset triangle; Each of the support members includes a fixing portion and an adjusting portion; the fixing portion is connected to the lower surface of the base; the adjusting portion is connected to the fixing portion in a liftable manner to adjust the horizontal state of the assembly tool by lifting and lowering the adjusting portion.

8. The assembly tool according to claim 7, wherein: An internal threaded hole is provided on the side of the fixing portion away from the base; the adjusting portion includes a screw adapted to the thread of the internal threaded hole; one end of the screw is inserted into the internal threaded hole, and the other end of the screw rests against the ground, so that the length of the screw extending out of the internal threaded hole can be adjusted by rotating the screw.

9. The assembly tool according to claim 8, wherein: The pitch between two adjacent threads on the screw is greater than or equal to 0.5 mm and less than or equal to 2 mm.

10. The assembly tool according to claim 7, wherein: The support member further comprises: a moving member rotatably disposed on the lower surface of the base; Alternatively, it can be rotatably arranged on the fixing portion.

11. An assembly tool system for assembling a chamber in a semiconductor process equipment, the assembly tool system comprising: The assembly tool according to any one of claims 1 to 10; A transport piece is configured to carry the cavity when the assembled cavity is separated from the assembly tool.

12. The assembly tooling system according to claim 11, wherein: The assembly tooling system further comprises: A carrier is configured to carry the transfer member in the semiconductor process equipment and between the assembly tool.

Images