Coating device

Abstract

The invention relates to the technical field of film coating, and discloses a film coating device which comprises a vacuum chamber, and an unwinding mechanism, a tension detection mechanism, a tension adjusting mechanism, a film coating roller and a winding mechanism are sequentially arranged in the vacuum chamber in the conveying direction of a base material; the unwinding mechanism is used for releasing a base material, the tension detection mechanism is used for collecting tension information of the base material, the tension adjusting mechanism is used for adjusting the tension of the base material, the coating roller is used for receiving the base material released by the unwinding mechanism, and the winding mechanism is used for winding the coated base material; the film coating device further comprises a controller, and the controller is electrically connected with the unwinding mechanism, the tension detection mechanism, the tension adjusting mechanism, the film coating roller and the winding mechanism and used for adjusting the tension of the film coating roller according to base material tension information collected by the tension detection mechanism. And the unwinding speed of the unwinding mechanism, the acting force applied to the substrate by the tension adjusting mechanism, the rotating speed of the coating roller and the winding speed of the winding mechanism are controlled. According to the coating device, the tension of the base material can be kept constant, and the coating quality of the base material is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of film coating, and in particular to a film coating device. Background Art

[0002] Vacuum coating technology is a technology that uses thermal evaporation or magnetron sputtering in a vacuum chamber to prepare one or more layers of thin films with certain functions on the surface of a coiled substrate. Vacuum coating equipment has the following main features: First, the substrate to be plated is a flexible substrate, that is, it is rollable; second, the coating process is continuous, that is, the coating is carried out continuously within a working cycle; third, the coating process is carried out in a high vacuum environment.

[0003] In order to ensure that the coated substrate can fully exert its effectiveness in practical applications, it is necessary to improve the uniformity and consistency of the coating layer on the substrate surface. However, the current coating device structure design lacks rationality and it is difficult to effectively control the tension of the substrate. This makes the substrate prone to wrinkling and uneven tension during operation, which in turn affects the uniformity of the coating layer and the performance of the coated product. Summary of the invention

[0004] In view of this, the present invention provides a coating device to solve the problem that the existing coating device cannot effectively ensure uniform and stable tension of the substrate during operation, resulting in poor subsequent coating uniformity and inconsistent quality of the coated products.

[0005] The present invention provides a coating device, comprising: a vacuum chamber, wherein an unwinding mechanism, a tension detection mechanism, a tension adjustment mechanism, a coating roller and a winding mechanism are sequentially arranged in the vacuum chamber along the conveying direction of the substrate; the unwinding mechanism is used to release the substrate, the tension detection mechanism is used to collect the tension information of the substrate, the tension adjustment mechanism is used to adjust the tension of the substrate, the coating roller is used to receive the substrate released from the unwinding mechanism, and the winding mechanism is used to wind up the coated substrate;

[0006] The coating device also includes a controller, which is electrically connected to the unwinding mechanism, the tension detecting mechanism, the tension adjusting mechanism, the coating roller and the winding mechanism, and is used to control the unwinding speed of the unwinding mechanism, the force applied by the tension adjusting mechanism on the substrate, the rotation speed of the coating roller and the winding speed of the winding mechanism according to the substrate tension information collected by the tension detecting machine.

[0007] Beneficial effect: The coating device collects tension information during the coating process of the substrate by setting up a tension detection mechanism, and the controller accurately controls the unwinding speed of the unwinding mechanism, the force of the tension adjustment mechanism, the rotation speed of the coating roller and the winding speed of the winding mechanism based on this information. It can effectively ensure that the tension of the substrate is constant during the entire coating process, avoid deformation of the substrate and uneven coating thickness due to tension fluctuations, greatly improve the coating quality and product yield, and at the same time, the automated control method reduces manual intervention, improves production efficiency, and reduces production costs, so that the coating operation can be carried out stably, efficiently and accurately, providing a strong guarantee for the large-scale production of high-quality coated products.

[0008] In an optional embodiment, the tension adjustment mechanism includes a swing roller and a first motor driving the swing roller, the swing roller is connected to the output shaft of the first motor through a swing arm and is suitable for rotationally abutting against the substrate, and the first motor is electrically connected to the controller.

[0009] Beneficial effects: The swing roller is connected to the output shaft of the first motor through the swing arm and can be rotatably abutted with the substrate. This structural design enables more precise control when adjusting the tension of the substrate. When the controller issues an instruction based on the tension information collected by the tension detection mechanism, the first motor can respond quickly, drive the swing roller to perform corresponding actions through the swing arm, accurately change the force applied to the substrate, and thus effectively and flexibly adjust the tension of the substrate. Secondly, the rotational abutment method of the swing roller and the substrate can not only fully contact the substrate to achieve force transmission during the tension adjustment process, but also minimize the damage to the surface of the substrate, thereby ensuring the integrity of the substrate, which is conducive to the smooth implementation of the subsequent coating process and the quality of the final coating product. Furthermore, this tension adjustment method driven by the motor to drive the swing roller has good repeatability and stability, and can continuously and stably maintain the tension of the substrate in an appropriate range during the long-term coating production process, further ensuring the efficient and stable operation of the entire coating production process, and improving the reliability of production and the consistency of products.

[0010] In an optional embodiment, the swing rollers are a pair, and the pair of swing rollers are symmetrically arranged about the longitudinal center axis of the first motor output shaft.

[0011] Beneficial effect: Compared with a single swing roller, a pair of swing rollers can make the tension adjustment of the substrate more uniform, effectively avoiding the situation of uneven local tension of the substrate that may be caused by unilateral adjustment, thereby greatly improving the uniformity of the tension adjustment of the entire substrate.

[0012] In an optional embodiment, a potentiometer is provided on the swing arm, and the potentiometer is electrically connected to the controller.

[0013] Beneficial effects: The potentiometer can accurately sense the position status information of the swing roller in real time. Since the position of the swing roller changes during the process of adjusting the tension of the substrate, the potentiometer can convert the position change of the end of the swing roller into an electrical signal and feed it back to the controller. This enables the controller to more accurately grasp the actual operating position of the swing roller, so as to make more precise adjustments to the entire tension adjustment process based on this accurate information, further improving the accuracy of the tension adjustment, ensuring that the tension of the substrate can always be stable within the ideal range, and helping to improve the stability of the coating quality. Secondly, a closed-loop feedback control system is realized through the electrical connection between the potentiometer and the controller. The controller can promptly detect possible adjustment deviations or abnormal conditions based on the swing roller position information fed back by the potentiometer.

[0014] In an optional embodiment, a plurality of sputtering devices are further provided in the vacuum chamber, and the plurality of sputtering devices are arranged at intervals along the circumference of the coating roller and form a coating channel for the substrate between the coating roller surface.

[0015] Beneficial effects: The circumferential spacing of multiple sputtering devices enables the coating material to cover the surface of the substrate passing through the coating channel from different angles and in all directions during the sputtering process. Compared with the setting of a single sputtering source, this multi-angle sputtering can effectively avoid the situation where the local coating of the substrate is too thick or too thin due to a single sputtering angle, making the distribution of the coating on the surface of the substrate more uniform, greatly improving the quality and appearance consistency of the coated products, and can also flexibly adjust the thickness of the coating as needed on the basis of ensuring the quality and appearance consistency of the product.

[0016] In an optional embodiment, an opening is provided on the side wall of the vacuum chamber along the axial direction of the coating roller; and the plurality of sputtering devices are driven in and out of the opening by a driving member.

[0017] Beneficial effects: By setting an opening on the side wall of the vacuum chamber, the convenience of maintenance and replacement is improved. When the sputtering device needs to be repaired, cleaned or replaced, there is no need to disassemble the entire vacuum chamber, and it can be easily removed using the drive parts, which saves maintenance time and difficulty, reduces the impact on the normal operation of the device, and enhances the overall maintainability.

[0018] In an optional embodiment, the driving member is a second motor, which drives the plurality of sputtering devices to move as a whole through a transmission assembly, and the transmission assembly includes a rack, a gear meshing with the rack, and a movable bracket, the rack is arranged on the opening side of the vacuum chamber and extends along the axial direction of the coating roller, the gear is connected to the second motor and is arranged on the movable bracket, and the movable bracket is used to install and fix the plurality of sputtering devices; when the sputtering device is located in the vacuum chamber, the movable bracket and the opening are sealed by a sealing member.

[0019] Beneficial effects: The second motor has good power output stability and controllability. Through the connection with the gear, the rotational power of the second motor is transmitted to the gear meshing with the rack, thereby driving the movable bracket and the multiple sputtering devices installed thereon to move smoothly along the axial direction of the coating roller. This transmission method can accurately control the speed and position of the sputtering device entering and exiting the vacuum chamber opening, ensuring that each movement operation of the sputtering device can accurately achieve the expected effect, providing reliable guarantee for the smooth development of the coating process and the subsequent flexible adjustment of the sputtering device position according to different needs.

[0020] In an optional embodiment, it further includes a first cooling component, which includes a plurality of coolant channels. The plurality of coolant channels are arranged inside the coating roller, and the coolant flows in two adjacent coolant channels in opposite directions.

[0021] Beneficial effects: During the coating process, the coating roller is in a high-temperature working environment for a long time. The internal coolant flow channel can effectively take away the heat and prevent the coating roller from being deformed or damaged due to overheating, which greatly extends the service life of the coating roller and ensures the stability and continuity of the coating process. The design of the opposite flow direction of the coolant in adjacent channels can make the temperature distribution inside the coating roller more uniform, avoid local overheating or overcooling, thereby ensuring the consistency and stability of the coating quality, reducing the problems of coating thickness difference and film structure defects caused by uneven temperature, and improving the product yield.

[0022] In an optional embodiment, along the axial direction of the coating roller, two ends of the coating roller are provided with rotating shafts, the rotating shafts are provided with rotating joints, a plurality of channels are provided in the rotating joints, the plurality of channels are arranged in a one-to-one correspondence with the plurality of coolant flow channels and the corresponding coolant flow channels are connected; one end of the channel away from the coolant flow channel is connected to the coolant delivery pipeline.

[0023] Beneficial effect: The rotary joint solves the problem of stable delivery of coolant when the coating roller is rotating at high speed, so that the coolant can circulate continuously and smoothly in the coolant flow channel, ensuring the efficient operation of the cooling system, thereby effectively maintaining the normal working temperature of the coating roller and avoiding adverse effects on the coating process and equipment due to excessive temperature.

[0024] In an optional embodiment, a second cooling component is further included, and the second cooling component includes a cooling coil, and the cooling coil is arranged on the inner wall of the vacuum chamber and corresponds to the coating roller.

[0025] Beneficial effects: The cooling coil can help reduce the overall temperature in the vacuum chamber, effectively reduce the increase in ambient temperature caused by heat accumulation during the coating process, create a more stable and suitable temperature environment for the coating operation, help improve the uniformity and quality stability of the coating, and reduce the risk of coating defects caused by high temperature environments. Furthermore, through the layout corresponding to the coating roller, the area around the coating roller can be cooled in a targeted manner, and cooperate with the first cooling component inside the coating roller to further optimize the temperature control effect of the coating roller. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A schematic structural diagram of a film coating device according to an embodiment of the present invention;

[0028] Figure 2 is a cross-sectional schematic diagram of a coating device according to an embodiment of the present invention;

[0029] Figure 3 A partial structural schematic diagram of a coating device according to an embodiment of the present invention;

[0030] Figure 4 is a schematic structural diagram of a sputtering device according to an embodiment of the present invention;

[0031] Figure 5 It is a schematic diagram of the assembly of the sputtering device and the transmission assembly according to an embodiment of the present invention;

[0032] Figure 6 is a cross-sectional schematic diagram of a coating roller according to an embodiment of the present invention;

[0033] Figure 7This is a schematic structural diagram of a second cooling assembly according to an embodiment of the present invention;

[0034] Figure 8 This is a schematic structural diagram of a third cooling assembly according to an embodiment of the present invention.

[0035] Description of reference numerals:

[0036] 1. Vacuum chamber; 101. Unwinding chamber; 1011. Unwinding tracking roller; 102. Connecting chamber; 103. Coating chamber; 1031. Flattening roller; 104. Rewinding chamber; 1041. Rewinding tracking roller; 105. Opening; 2. Unwinding mechanism; 3. Tension detection mechanism; 4. Tension adjustment mechanism; 401. Swinging roller; 402. Swinging arm; 5. Coating roller; 501. Rotating shaft; 6. Rewinding mechanism; 7. Rough vacuum pump; 8. High vacuum pump; 9. , front pump; 10, safety door; 11, hydraulic cylinder; 12, correction system; 13, sputtering device; 1301, end; 1302, support plate; 1303, magnetic circuit; 1304, target material; 1305, argon gas tube; 14, transmission assembly; 1401, rack; 1402, gear; 1403, movable bracket; 15, coolant flow channel; 16, rotary joint; 1601, channel; 17, coolant delivery pipeline; 18, cooling coil. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0038] In view of the problem that the existing coating device cannot effectively ensure uniform and stable tension of the substrate during operation, resulting in poor uniformity of subsequent coating and inconsistent quality of coating products, the present invention provides a coating device.

[0039] Combine the following Figures 1 to 8 , describing an embodiment of the present invention.

[0040] According to an embodiment of the present invention, the present invention provides a coating device, such as Figure 1 and Figure 2 As shown, it includes: a vacuum chamber 1 and a controller.

[0041] Specifically, along the conveying direction of the substrate, the vacuum chamber 1 is provided with an unwinding mechanism 2, a tension detection mechanism 3, a tension adjustment mechanism 4, a coating roller 5 and a winding mechanism 6 in sequence; the unwinding mechanism 2 is used to release the substrate, the tension detection mechanism 3 is used to collect the tension information of the substrate, the tension adjustment mechanism 4 is used to adjust the tension of the substrate, the coating roller 5 is used to receive the substrate released from the unwinding mechanism 2, and the winding mechanism 6 is used to wind up the coated substrate;

[0042] The controller is electrically connected to the unwinding mechanism 2, the tension detecting mechanism 3, the tension adjusting mechanism 4, the coating roller 5 and the winding mechanism 6, and is used to control the unwinding speed of the unwinding mechanism 2, the force applied to the substrate by the tension adjusting mechanism 4, the rotation speed of the coating roller 5 and the winding speed of the winding mechanism 6 according to the substrate tension information collected by the tension detecting machine.

[0043] The coating device collects tension information during the coating process of the substrate by setting up a tension detection mechanism 3, and the controller accurately controls the unwinding speed of the unwinding mechanism 2, the force of the tension adjustment mechanism 4, the rotation speed of the coating roller 5 and the winding speed of the winding mechanism 6 based on this information. It can effectively ensure that the tension of the substrate is constant during the entire coating process, avoid deformation of the substrate and uneven coating thickness due to tension fluctuations, greatly improve the coating quality and product yield, and at the same time, the automated control method reduces manual intervention, improves production efficiency, and reduces production costs, so that the coating operation can be carried out stably, efficiently and accurately, providing a strong guarantee for the large-scale production of high-quality coated products.

[0044] It can be understood that, in this embodiment, the coated substrate is a finished product of the coated product.

[0045] It should be noted that the vacuum chamber 1 in this embodiment is composed of a plurality of chambers. Figure 1 and Figure 2 As shown, specifically, along the conveying direction of the substrate, the vacuum chamber 1 includes an unwinding chamber 101, a coating chamber 103 and a winding chamber 104 which are connected in sequence. Among them, two adjacent chambers are connected through a connecting chamber 102, the unwinding chamber 101 is provided with the above-mentioned unwinding mechanism 2, the connecting chamber 102 is provided with the above-mentioned tension adjustment mechanism 4, the coating chamber 103 is provided with the above-mentioned coating roller 5, and the winding chamber 104 is provided with the above-mentioned winding mechanism 6. Generally, the unwinding mechanism 2 includes an unwinding roller and a servo motor for driving the unwinding roller to rotate, and the winding mechanism 6 includes a winding roller and a servo motor for driving the winding roller to rotate. Similarly, one end of the coating roller 5 is also connected to a servo motor. It can be understood that the controller is actually electrically connected to the servo motors corresponding to the unwinding roller, the coating roller 5 and the winding roller, and the speed of the unwinding roller, the coating roller 5 and the winding roller is controlled by controlling the speed of the servo motor.

[0046] Specifically, when the tension detection mechanism 3 detects that the tension of the substrate is less than the preset tension, the controller will control the servo motors corresponding to the unwinding roller, the coating roller 5 and the winding roller to increase the rotation speed to speed up the unwinding speed of the unwinding roller and the winding speed of the winding roller. At the same time, the controller will also control the tension adjustment mechanism 4 to reduce the force acting on the substrate. Conversely, when the tension detection mechanism 3 detects that the tension of the substrate is greater than the preset tension, the controller will control the servo motors corresponding to the unwinding roller, the coating roller 5 and the winding roller to reduce the rotation speed to slow down the unwinding speed of the unwinding roller and the winding speed of the winding roller. At the same time, the controller will also control the tension adjustment mechanism 4 to increase the force acting on the substrate.

[0047] It is necessary to add that, if Figure 1 As shown, in order to form a vacuum environment in the vacuum chamber 1, a vacuum pump can be used to evacuate the vacuum chamber 1. Specifically, the present application also includes a rough vacuum system and a high vacuum system. The rough vacuum system includes a rough vacuum pump 7, which is connected to the coating chamber 103 through a pipeline; the high vacuum system includes a high vacuum pump 8 and a front pump 9, and the high vacuum pump 8 is connected to the unwinding chamber 101, the coating chamber 103 and the winding chamber 104 through a pipeline and the front pump 9. The working process of the rough vacuum system and the high vacuum system is as follows: the rough vacuum pump 7 works first, and when the vacuum degree reaches the working range of the high vacuum pump 8, the high vacuum pump 8 starts to work until the vacuum degree required by the process is reached in the vacuum chamber 1. It can be seen that by configuring an independent vacuum system for each chamber, the vacuum pumping time can be reduced and the time utilization rate of the device can be improved.

[0048] To increase the speed of substrate reel change, Figure 1 As shown, a safety door 10 can be provided at both ends of the unwinding chamber 101 and the winding chamber 104 that are away from each other, and the safety door 10 can be driven to rise and fall by a hydraulic cylinder 11. Further, in order to improve the safety during the roll change process, a safety latch can be provided on the safety door 10, and a sensor can be provided under the safety door 10. When the sensor detects that there is an operator operating under the safety door 10, the safety latch is not allowed to retract, so as to avoid the safety door 10 from falling quickly and causing injuries.

[0049] In order to better control the tension of the substrate during operation, such as Figure 2 As shown, an unwinding tracking roller 1011 is also provided in the unwinding chamber 101 and a winding tracking roller 1041 is also provided in front of the winding roller in the winding chamber 104. Secondly, in order to avoid wrinkles on the substrate before and after coating, a flattening roller 1031 can be provided before and after the coating roller 5 to effectively flatten the substrate, so that the entire width of the tape is uniform when it is coated on the coating roller 5, thereby ensuring the consistency of the coating quality.

[0050] In one embodiment, the tension detection mechanism 3 includes a roller and tension sensors disposed at both ends of the roller, wherein the roller is used to support the substrate, and the tension sensor is electrically connected to the controller.

[0051] Furthermore, in order to ensure that the substrate does not deviate during the tape running process, Figure 2 As shown, a correction system 12 may also be provided in the unwinding chamber 101 and the winding chamber 104. Specifically, the correction system 12 includes a correction sensor and an actuator electrically connected to the controller. When the correction sensor detects that the substrate is deviated, it transmits the deviated data to the controller, and the controller controls the actuator to move in the opposite direction to guide the substrate to the correct position, thereby ensuring that the substrate does not deviate during the process of moving.

[0052] Furthermore, in order to avoid undesirable phenomena such as edge collapse of the substrate before winding, a hand-adjustable roller can be set in front of the winding roller. By adjusting the hand-adjustable roller, the consistency of the tension on the left and right sides of the substrate running direction can be ensured.

[0053] In addition, if Figure 1 and Figure 2 As shown, since some substrates such as battery cell electrodes need to be coated on both sides, two coating chambers 103 can be set between the winding chamber 104 and the unwinding chamber 101, and a coating roller 5 and a flattening roller 1031 are set in each coating chamber 103. Specifically, in one embodiment, the vacuum chamber 1 includes two coating chambers 103 connected by a connecting chamber. Along the conveying direction of the substrate, the coating roller 5 in the coating chamber 103 located upstream is located above the two flattening rollers 1031, and the coating roller 5 in the coating chamber 103 located downstream is located below the two flattening rollers 1031, and a tension adjustment mechanism 4 is provided in the connecting chamber between the two.

[0054] According to one embodiment of the present invention, Figure 2As shown, the tension adjustment mechanism 4 includes a swing roller 401 and a first motor driving the swing roller 401. The swing roller 401 is connected to the output shaft of the first motor through the swing arm 402 and is suitable for rotating and abutting with the substrate. The first motor is electrically connected to the controller. The swing roller 401 is connected to the output shaft of the first motor through the swing arm 402 and can rotate and abut with the substrate. This structural design enables more accurate control when adjusting the tension of the substrate. When the controller issues an instruction based on the tension information collected by the tension detection mechanism 3, the first motor can respond quickly, drive the swing roller 401 to perform corresponding actions through the swing arm 402, accurately change the force applied to the substrate, and thus effectively and flexibly adjust the tension of the substrate. Secondly, the rotational abutment method of the swing roller 401 and the substrate can not only fully contact the substrate to achieve force transmission during the tension adjustment process, but also minimize the damage to the surface of the substrate, thereby ensuring the integrity of the substrate, which is conducive to the smooth development of the subsequent coating process and the quality of the final coating product. Furthermore, this tension adjustment method of the motor-driven swing roller 401 has good repeatability and stability, and can continuously and stably maintain the substrate tension within an appropriate range during a long coating production process, further ensuring the efficient and stable operation of the entire coating production process, and improving production reliability and product consistency.

[0055] According to one embodiment of the present invention, Figure 2 As shown, the swing rollers 401 are a pair, and the pair of swing rollers 401 are symmetrically arranged about the longitudinal center axis of the first motor output shaft. Compared with a single swing roller 401, the pair of swing rollers 401 can make the tension adjustment of the substrate more uniform, effectively avoiding the situation of uneven tension of the substrate locally due to unilateral adjustment, thereby greatly improving the uniformity of the tension adjustment of the entire substrate.

[0056] Furthermore, in order to prevent the swing arm 402 from excessively rotating, a limiting structure may be provided on both sides of a pair of swing arms 402 away from each other, so that the swing arm 402 always rotates within a preset angle range.

[0057] According to one embodiment of the present invention, a potentiometer is provided on the swing arm 402, and the potentiometer is electrically connected to the controller. The potentiometer can accurately sense the position status information of the swing roller 401 in real time. Since the position of the swing roller 401 changes during the process of adjusting the tension of the substrate, the potentiometer can convert the position change of the end of the swing roller 401 into an electrical signal and feed it back to the controller. This enables the controller to more accurately grasp the actual operating position of the swing roller 401, so as to perform more precise regulation of the entire tension adjustment process based on this accurate information, further improve the accuracy of the tension adjustment, ensure that the tension of the substrate can always be stable within the ideal range, and help improve the stability of the coating quality. Secondly, through the electrical connection between the potentiometer and the controller, a closed-loop feedback control system is realized. The controller can promptly detect possible adjustment deviations or abnormal conditions based on the position information of the swing roller 401 fed back by the potentiometer.

[0058] To ensure the accuracy of the detection information, preferably, the potentiometer is arranged at the rotation center of the swing arm 402 .

[0059] According to one embodiment of the present invention, Figure 3 and Figure 5 As shown, a plurality of sputtering devices 13 are also provided in the vacuum chamber 1, and the plurality of sputtering devices 13 are arranged at intervals along the circumference of the coating roller 5 and form a coating channel for the substrate with the surface of the coating roller 5. The circumferential spacing of the plurality of sputtering devices 13 enables the coating material to cover the surface of the substrate passing through the coating channel from different angles and in all directions during the sputtering process. Compared with the setting mode of a single sputtering source, this multi-angle sputtering can effectively avoid the situation where the local coating of the substrate is too thick or too thin due to a single sputtering angle, so that the distribution of the coating on the surface of the substrate is more uniform, which greatly improves the quality and appearance consistency of the coated product, and can also flexibly adjust the thickness of the coating layer as needed on the basis of ensuring the quality and appearance consistency of the product.

[0060] It should be noted that the present application can adopt magnetron sputtering for coating. Figure 4 As shown, in this embodiment, the sputtering device 13 may include an end 1301, a support plate 1302, a magnetic circuit 1303, a target 1304, and an argon gas pipe 1305. Among them, one end of the target 1304 is mounted on the movable bracket 1403 below through the end 1301 and the support plate 1302, and the other end is located at the peripheral side of the coating roller 5; the magnetic circuit 1303 and the argon gas pipe 1305 are located at the peripheral side of the target 1304 and extend along the length direction of the target 1304.

[0061] According to one embodiment of the present invention, Figure 3As shown, an opening 105 is provided on the side wall of the vacuum chamber 1 along the axial direction of the coating roller 5; a plurality of sputtering devices 13 are driven to enter and exit the opening 105 by a driving member. By providing the opening 105 on the side wall of the vacuum chamber 1, the convenience of maintenance and replacement is improved. When the sputtering device 13 needs to be repaired, cleaned or replaced, it can be easily removed by using a driving member without tediously disassembling the entire vacuum chamber 1, which saves maintenance time and difficulty, reduces the impact on the normal operation of the device, and enhances the overall maintainability.

[0062] According to one embodiment of the present invention, the driving member is a second motor, and the second motor drives the plurality of sputtering devices 13 to move as a whole through the transmission assembly 14. Figure 5 As shown, the transmission assembly 14 includes a rack 1401, a gear 1402 meshing with the rack 1401, and a movable bracket 1403. The rack 1401 is arranged on the side of the opening 105 of the vacuum chamber 1 and extends along the axial direction of the coating roller 5. The gear 1402 is connected to the second motor and arranged on the movable bracket 1403. The movable bracket 1403 is used to install and fix multiple sputtering devices 13. When the sputtering device 13 is located in the vacuum chamber 1, the movable bracket 1403 and the opening 105 are sealed by a seal. The second motor has good power output stability and controllability. Through the connection with the gear 1402, the rotational power of the second motor is transmitted to the gear 1402 meshing with the rack 1401, thereby driving the movable bracket 1403 and the multiple sputtering devices 13 installed thereon to move smoothly along the axial direction of the coating roller 5. This transmission method can accurately control the speed and position of the sputtering device 13 entering and exiting the opening 105 of the vacuum chamber 1, ensuring that each movement operation of the sputtering device 13 can accurately achieve the expected effect, providing reliable guarantee for the smooth implementation of the coating process and the subsequent flexible adjustment of the position of the sputtering device 13 according to different needs.

[0063] According to one embodiment of the present invention, Figure 6 As shown, it also includes a first cooling component, which includes a plurality of coolant channels 15, and the plurality of coolant channels 15 are arranged inside the coating roller 5, and the coolant in two adjacent coolant channels 15 flows in opposite directions. It can be understood that during the coating process, the coating roller 5 is in a high-temperature working environment for a long time, and the internal coolant channels 15 can effectively take away the heat, prevent the coating roller 5 from being deformed or damaged due to overheating, greatly extend the service life of the coating roller 5, and ensure the stability and continuity of the coating process. The design of opposite coolant flows in adjacent channels can make the temperature distribution inside the coating roller 5 more uniform, avoid local overheating or overcooling, thereby ensuring the consistency and stability of the coating quality, reducing the problems of coating thickness difference and film structure defects caused by uneven temperature, and improving the product yield.

[0064] According to one embodiment of the present invention, Figure 6 As shown, along the axial direction of the coating roller 5, a rotating shaft 501 is provided at both ends of the coating roller 5, a rotating joint 16 is provided on the rotating shaft 501, a plurality of channels 1601 are provided in the rotating joint 16, and the plurality of channels 1601 are arranged one by one with the plurality of coolant flow channels 15 and are connected to the corresponding coolant flow channels 15; one end of the channel 1601 away from the coolant flow channel 15 is connected to the coolant delivery pipeline 17. The rotating joint 16 solves the problem of stable delivery of the coolant of the coating roller 5 under the high-speed rotating working state, so that the coolant can circulate continuously and smoothly in the coolant flow channel 15, ensuring the efficient operation of the cooling system, thereby effectively maintaining the normal working temperature of the coating roller 5, and avoiding the adverse effects on the coating process and equipment due to excessively high temperature.

[0065] According to one embodiment of the present invention, Figure 7 As shown, it also includes a second cooling component, which includes a cooling coil 18, which is arranged on the inner wall of the vacuum chamber 1 and corresponds to the coating roller 5. The cooling coil 18 can help reduce the overall temperature in the vacuum chamber 1, effectively reduce the increase in ambient temperature caused by heat accumulation during the coating process, create a more stable and suitable temperature environment for the coating operation, help improve the uniformity and quality stability of the coating, and reduce the risk of coating defects caused by high temperature environment. Furthermore, through the layout corresponding to the coating roller 5, the area around the coating roller 5 can be targetedly cooled, and the first cooling component inside the coating roller 5 can be coordinated to further optimize the temperature control effect of the coating roller 5.

[0066] It is understandable that if Figure 8 As shown, since the sputtering device 13 also generates heat during operation, a third cooling component for cooling the target 1304 may also be provided inside the target 1304 .

[0067] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A coating device, characterized in that: include: A vacuum chamber (1), wherein an unwinding mechanism (2), a tension detection mechanism (3), a tension adjustment mechanism (4), a coating roller (5) and a winding mechanism (6) are sequentially arranged in the vacuum chamber (1) along the conveying direction of the substrate; the unwinding mechanism (2) is used to release the substrate, the tension detection mechanism (3) is used to collect tension information of the substrate, the tension adjustment mechanism (4) is used to adjust the tension of the substrate, the coating roller (5) is used to receive the substrate released from the unwinding mechanism (2), and the winding mechanism (6) is used to wind up the substrate after coating; The coating device also includes a controller, which is electrically connected to the unwinding mechanism (2), the tension detection mechanism (3), the tension adjustment mechanism (4), the coating roller (5) and the winding mechanism (6), and is used to control the unwinding speed of the unwinding mechanism (2), the force applied to the substrate by the tension adjustment mechanism (4), the rotation speed of the coating roller (5) and the winding speed of the winding mechanism (6) according to the substrate tension information collected by the tension detection machine.

2. The coating device according to claim 1, characterized in that: The tension adjustment mechanism (4) comprises a swing roller (401) and a first motor for driving the swing roller (401); the swing roller (401) is connected to an output shaft of the first motor via a swing arm (402) and is suitable for rotationally abutting against the substrate; the first motor is electrically connected to the controller.

3. The coating device according to claim 2, characterized in that: The swing rollers (401) form a pair, and the pair of swing rollers (401) are symmetrically arranged about the longitudinal center axis of the output shaft of the first motor.

4. The coating device according to claim 3, characterized in that: The swing arm (402) is provided with a potentiometer, and the potentiometer is electrically connected to the controller.

5. The coating device according to any one of claims 1 to 4, characterized in that: A plurality of sputtering devices (13) are also provided in the vacuum chamber (1), and the plurality of sputtering devices (13) are arranged at intervals along the circumference of the coating roller (5) and form a coating channel for the substrate between the surface of the coating roller (5).

6. The coating device according to claim 5, characterized in that: An opening (105) is provided on the side wall of the vacuum chamber (1) along the axial direction of the coating roller (5); the plurality of sputtering devices (13) are driven in and out of the opening (105) by a driving member.

7. The coating device according to claim 6, characterized in that: The driving member is a second motor, which drives the plurality of sputtering devices (13) to move as a whole through a transmission assembly (14). The transmission assembly (14) includes a rack (1401), a gear (1402) meshing with the rack (1401), and a movable bracket (1403). The rack (1401) is arranged on the side of the opening (105) of the vacuum chamber (1) and extends along the axial direction of the coating roller (5). The gear (1402) is connected to the second motor and is arranged on the movable bracket (1403). The movable bracket (1403) is used to install and fix the plurality of sputtering devices (13). When the sputtering device (13) is located in the vacuum chamber (1), the movable bracket (1403) and the opening (105) are sealed by a sealing member.

8. The coating device according to any one of claims 1 to 4, characterized in that: It also includes a first cooling component, which includes a plurality of cooling liquid flow channels (15). The plurality of cooling liquid flow channels (15) are arranged inside the coating roller (5), and the cooling liquids in two adjacent cooling liquid flow channels (15) flow in opposite directions.

9. The coating device according to claim 8, characterized in that: Along the axial direction of the coating roller (5), two ends of the coating roller (5) are provided with a rotating shaft (501), a rotating joint (16) is provided on the rotating shaft (501), a plurality of channels (1601) are provided in the rotating joint (16), and the plurality of channels (1601) are arranged in a one-to-one correspondence with the plurality of coolant flow channels (15) and are connected to the corresponding coolant flow channels (15); one end of the channel (1601) away from the coolant flow channel (15) is connected to the coolant delivery pipeline (17).

10. The coating device according to claim 8, characterized in that: It also includes a second cooling component, which includes a cooling coil (18). The cooling coil (18) is arranged on the inner wall of the vacuum chamber (1) and corresponds to the coating roller (5).

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