Boat foot assembly structure and boat support

Abstract

The invention provides a boat foot assembly structure and boat support, the boat foot assembly structure comprises a support seat and a boat foot which are detachably connected, the support seat is provided with an assembly gap, the surface edges of two opposite sides of the assembly gap are arc-shaped, the opening angle of the assembly gap is 30-190 degrees, the opening position is arranged at the contact part of the boat foot and the inner wall of a furnace tube, and the surface edges of the two opposite sides of the assembly gap are arc-shaped. The surface edges of the two opposite sides of the boat foot are round, the boat foot is movably arranged in the assembling notch, and the diameter of the surface edge of the assembling notch is larger than that of the surface edge of the boat foot. According to the invention, the shapes of the boat feet and the assembling gaps are designed, and the boat feet are assembled in a floating manner, so that the boat feet can move and rotate in multiple directions at the assembling gaps, and the boat feet are in contact with the inner wall of the furnace tube to adapt to wall surfaces in different shapes through self movement after being stressed, so that the contact area of the boat feet and the inner wall of the furnace tube is increased, and the single-point pressure is reduced; therefore, furnace tube damage is avoided and equipment service life is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing equipment, and in particular to a boat leg assembly structure and a boat support. Background Art

[0002] The boat support is a common device for photovoltaic semiconductor processing, used to carry silicon boats. The boat support is installed in the furnace tube when in use, and the four boat legs of the boat support are in contact with the inner wall of the furnace tube. In the prior art, the end plate and the boat legs of the boat support are generally an integrated structure. When the boat support is installed, the shapes of the boat legs contacting the furnace tube wall are different, resulting in a single point contact area that is too small and an increase in pressure, which can easily cause damage to the furnace tube.

[0003] Patent CN117712018A discloses a silicon carbide quartz composite boat support, whose boat foot is a detachable connection structure, connected to the support through a specific clamping structure and a positioning pin. However, with this assembly structure, the boat foot is fixed in position after installation and has no room for movement, and there is still a problem of strong single-point pressure and easy damage to the furnace tube. Summary of the invention

[0004] The problem to be solved by the present invention is how to ensure that the boat foot and the furnace tube have a larger contact area to avoid damage to the furnace tube.

[0005] In order to solve the above problems, the present invention provides a boat foot assembly structure, comprising a detachably connected support and a boat foot, the support is provided with an assembly notch, the edge shapes of the opposite side surfaces of the assembly notch are arc-shaped, and the opening angle thereof is 30° to 190°, and the opening position is arranged at the contact part between the boat foot and the inner wall of the furnace tube, the edge shapes of the opposite side surfaces of the boat foot are circular, the boat foot is movably arranged in the assembly notch, and the diameter of the surface edge of the assembly notch is larger than the diameter of the surface edge of the boat foot.

[0006] The present invention designs the shapes of the boat foot and the assembly notch, and enables the boat foot to be floated and assembled, so that the boat foot can move and rotate in multiple directions at the assembly notch position. After the boat foot contacts and is subjected to force on the inner wall of the furnace tube, it adapts to the wall surfaces of different shapes through its own movement, so that the contact area between the boat foot and the inner wall of the furnace tube is increased and the single-point pressure is reduced, thereby avoiding damage to the furnace tube and ensuring the service life of the equipment.

[0007] Furthermore, the difference between the diameter of the surface edge of the assembly notch and the diameter of the surface edge of the boat foot is 0.1 mm to 2 mm. The size difference between the two is limited so that the boat foot can move freely within the design range without breaking away from the limitation of the assembly notch.

[0008] Furthermore, the middle of the boat foot has a through hole, and the through hole is coaxially arranged with the surface edge of the boat foot. The through hole can be used to clamp the boat foot with mechanical equipment, which is convenient for processing and assembling the boat foot.

[0009] Furthermore, the boat foot assembly structure further comprises a cylindrical movable pin, the boat foot is provided with a limit groove, the limit groove is an annular groove arranged along the axial direction of the boat foot, a pin groove is arranged on the wall surface of the assembly notch, the movable pin is adapted to partially enter the pin groove and the other part enter the limit groove. The movable pin can be provided to limit the axial displacement of the boat foot and prevent the boat foot from being separated from the assembly notch.

[0010] Furthermore, the width of the limit groove is greater than the axial length of the movable pin, and the width of the pin groove is greater than the axial length of the movable pin, thereby facilitating the assembly of the movable pin and ensuring that the boat foot has sufficient movable space to avoid jamming.

[0011] Furthermore, a mounting groove is provided on the wall surface of the assembly notch, and the mounting groove extends from the outer surface of the assembly notch to the pin groove. A part of the movable pin can enter the pin groove along the mounting groove, so as to facilitate the assembly of the support, the boat foot and the movable pin.

[0012] Furthermore, the bottom surface of the mounting groove is an arc surface, and the surface edge shape of the mounting groove is an arc shape with an angle of 90° to 180°. The arc-shaped mounting groove can limit the angle at which the movable pin enters the pin groove, thereby preventing the movable pin from being misplaced and stuck in the pin groove.

[0013] Furthermore, the diameter of the surface edge of the installation slot is larger than the diameter of the movable pin, so as to ensure that the movable pin can smoothly pass through the installation slot and reduce interference.

[0014] Furthermore, the bottom surface of the pin groove is an arc surface, one end of the pin groove is connected to the mounting groove, and the other end extends downward. The arc length of the pin groove is designed to be relatively large, and the movable pin will move downward under the action of gravity after entering the pin groove, thereby being misaligned with the mounting groove, thereby preventing the movable pin from slipping out of the mounting groove and ensuring connection reliability.

[0015] The present invention also provides a boat support, including the above-mentioned boat foot assembly structure. The boat feet are generally arranged on the four sides of the boat support, serving as four fulcrums to support the boat support. The boat feet of the present invention adopt a floating assembly structure, which can balance the pressure of the boat feet on the four sides, so that the furnace tube wall surface at each fulcrum is evenly stressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 1 is an overall structural diagram of a boat support in an embodiment of the present invention.

[0017] Figure 2 It is an exploded view of the boat foot assembly structure in a preferred embodiment of the present invention.

[0018] Figure 3 It is a cross-sectional view of a boat leg assembly structure in a preferred embodiment of the present invention.

[0019] Figure 4 This is a diagram of the assembly position of a movable pin in an assembly notch in a preferred embodiment of the present invention.

[0020] Figure 5 It is a structural diagram of a boat foot in another embodiment of the present invention.

[0021] Description of reference numerals:

[0022] 11-end plate, 12-side plate, 13-support, 2-assembly notch, 21-pin groove, 22-installation groove, 3-boat foot, 31-limiting groove, 32-through hole, 4-movable pin. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] It should be noted that similar symbols and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

[0025] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "inside", "outside", "front", "back", etc. are based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0028] Combination Figure 1 As shown, a specific embodiment of the present invention provides a boat support, including a boat support body and four boat feet 3. The boat support body includes two end plates 11 and two side plates 12, the two end plates 11 are arranged opposite to each other, and the two side plates 12 are also arranged opposite to each other, and the two sides of each end plate 11 are respectively connected to one side of a side plate 12. The boat support body is an integrally formed or assembled structure. Two supports 13 are provided on both sides of the bottom of the end plate 11, and an assembly notch 2 is provided on the support 13. The setting position of the assembly notch 2 corresponds to the position where the boat support and the furnace tube are in contact with each other, and a boat foot 3 is installed at the position of each assembly notch 2, and the boat foot 3 is detachably connected to the support 13.

[0029] In this embodiment, the edge shape of the front and rear surfaces of the assembly notch 2 is an arc shape, and its opening angle is 90°, and the opening position is set at the contact position between the boat foot 3 and the inner wall of the furnace tube. The boat foot 3 is cylindrical as a whole, and the edge shape of the front and rear surfaces is circular, and the diameter of the surface edge of the assembly notch 2 is larger than the diameter of the surface edge of the boat foot 3, and the boat foot 3 is movably set in the assembly notch 2. The boat foot 3 is in a floating assembly state, and it can move and rotate in multiple directions, such as axial translation, translation in the assembly notch 2, rotation around the axis, and overall rotation of the axis. When the boat foot 3 contacts the inner wall of the furnace tube and is subjected to force, it will automatically move to adapt to the wall of different shapes, ensuring that each boat foot 3 has sufficient contact area with the inner wall of the furnace tube, avoiding excessive single-point pressure, thereby preventing damage to the furnace tube and ensuring the service life of the equipment.

[0030] In each embodiment, the opening angle of the assembly notch 2 is typically in the range of 30° to 190°, ensuring that the boat foot 3 is in contact with the inner wall of the furnace tube when the boat support is installed, and at the same time ensuring that the boat foot 3 can be stably installed in the assembly notch 2 and is not easy to fall off.

[0031] In each embodiment, the difference between the diameter of the surface edge of the assembly notch 2 and the diameter of the surface edge of the boat foot 3 is typically in the range of 0.1 mm to 2 mm, so that the boat foot 3 can move freely within the design range without deviating from the limitation of the assembly notch 2.

[0032] Combination Figures 2 to 4 As shown, in some preferred embodiments, the boat foot assembly structure includes a movable pin 4, which is used to limit the range of movement of the boat foot 3 to prevent the boat foot 3 from being separated from the assembly notch 2. Specifically, the movable pin 4 is cylindrical; a limiting groove 31 is provided on the boat foot 3, and the limiting groove 31 is an annular groove arranged along the axial direction of the boat foot 3; and a pin groove 21 is provided on the wall surface of the assembly notch 2. After the boat foot 3 is assembled, part of the movable pin 4 enters the pin groove 21, and the other part enters the limiting groove 31. The movable pin 4 can limit the axial displacement of the boat foot 3, and the boat foot 3 can still rotate freely around the axis.

[0033] In each embodiment, the width of the pin slot 21 is greater than the axial length of the movable pin 4, and the difference between the two is typically in the range of 0.01 to 0.5 mm, which facilitates the assembly of the movable pin 4 in the pin slot 21 to avoid interference. After assembly, the relative position of the movable pin 4 and the assembly notch 2 is basically fixed. The width of the limiting groove 31 is greater than the axial length of the movable pin 4, and the difference between the two is typically in the range of 0.05 to 5 mm, which ensures that the movable pin 4 can play an axial displacement limiting role to prevent the boat foot 3 from falling off, and also allows the boat foot 3 to have sufficient space for movement to avoid getting stuck.

[0034] In this embodiment, a mounting groove 22 is provided on the wall surface of the assembly notch 2 to facilitate the installation of the boat foot 3 and the movable pin 4. The mounting groove 22 extends from the outer surface of the assembly notch 2 to the pin groove 21. The bottom surface of the mounting groove 22 is an arc surface. The surface edge shape of the mounting groove 22 is an arc shape, and the angle is 180°. In other embodiments, the angle of the mounting groove 22 typically ranges from 90° to 180°. A part of the movable pin 4 can enter the pin groove 21 along the mounting groove 22 to facilitate the combined assembly of the support 13, the boat foot 3 and the movable pin 4. The bottom surface of the pin groove 21 is an arc surface. One end of the pin groove 21 is connected to the mounting groove 22, and the other end extends downward. When assembling the boat foot 3, first embed a part of the movable pin 4 into the limiting groove 31, align the movable pin 4 with the mounting groove 22, and the movable pin 4 and the boat foot 3 enter the assembly notch 2 axially together. When the movable pin 4 enters the pin groove 21, it will be moved downward by gravity to Figure 4 Position, at this time, the pin groove 21 limits the movement of the movable pin 4 to prevent the movable pin 4 from slipping out. Preferably, the arc length of the cross section of the pin groove 21 is greater than 1.5 times the diameter of the movable pin 4.

[0035] In each embodiment, the diameter of the surface edge of the installation groove 22 is slightly larger than the diameter of the movable pin 4, and the difference between the two is typically in the range of 0.1 mm to 2 mm, thereby ensuring that the movable pin 4 can smoothly pass through the installation groove 22, and the movable pin 4 will not tilt, thereby preventing it from being stuck in the pin groove 21.

[0036] In some preferred embodiments, the surface edges of the assembly notch 2, the surface edges of the boat foot 3, the surface edges of the movable pin 4, the edges of the limiting groove 31, the edges of the pin groove 21, and the surface edges of the installation groove 22 may all have a chamfered structure, which can reduce interference during assembly of the boat foot 3 and avoid jamming or damage of parts.

[0037] Combination Figure 5 As shown, in some embodiments, the middle of the boat foot 3 has a through hole 32, and the through hole 32 is coaxially arranged with the surface edge of the boat foot 3. The through hole 32 can be used to clamp the boat foot 3 with mechanical equipment, which is convenient for processing and assembling the boat foot 3.

[0038] The boat support provided in the above embodiment has a new boat foot assembly structure. The boat foot 3 can move freely in the assembly notch 2 and automatically adapt to contact wall surfaces of different shapes, so that the contact area between the boat foot 3 and the inner wall of the furnace tube is increased, and each boat foot 3 adopts a floating assembly structure, which can balance the pressure of the boat feet 3 on the four sides and ensure that the furnace tube wall surface at each fulcrum is evenly stressed, thereby avoiding the situation of excessive pressure at a single point and extending the service life of the furnace tube.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A boat leg assembly structure, characterized in that: The invention comprises a detachably connected support (13) and a boat foot (3), wherein the support (13) is provided with an assembly notch (2), the edges of the surfaces on the two opposite sides of the assembly notch (2) are in an arc shape, the opening angle thereof is 30° to 190°, the opening position is arranged at the contact position between the boat foot (3) and the inner wall of the furnace tube, the edges of the surfaces on the two opposite sides of the boat foot (3) are in a circular shape, the boat foot (3) is movably arranged in the assembly notch (2), and the diameter of the surface edge of the assembly notch (2) is greater than the diameter of the surface edge of the boat foot (3).

2. The boat leg assembly structure according to claim 1, characterized in that: The difference between the diameter of the surface edge of the assembly notch (2) and the diameter of the surface edge of the boat foot (3) is 0.1 mm to 2 mm.

3. The boat leg assembly structure according to claim 2, characterized in that: The middle part of the boat foot (3) is provided with a through hole (32), and the through hole (32) is coaxially arranged with the surface edge of the boat foot (3).

4. The boat leg assembly structure according to any one of claims 1 to 3, characterized in that: It also includes a cylindrical movable pin (4), a limiting groove (31) is provided on the boat foot (3), and the limiting groove (31) is an annular groove arranged along the axial direction of the boat foot (3). A pin groove (21) is provided on the wall surface of the assembly notch (2), and the movable pin (4) is suitable for partially entering the pin groove (21) and the other part entering the limiting groove (31).

5. The boat leg assembly structure according to claim 4, characterized in that: The width of the limiting groove (31) is greater than the axial length of the movable pin (4), and the width of the pin groove (21) is greater than the axial length of the movable pin (4).

6. The boat leg assembly structure according to claim 4, characterized in that: A mounting groove (22) is provided on the wall surface of the assembly notch (2), and the mounting groove (22) extends from the outer surface of the assembly notch (2) to the pin groove (21).

7. The boat leg assembly structure according to claim 6, characterized in that: The bottom surface of the installation groove (22) is an arc surface, and the surface edge shape of the installation groove (22) is an arc shape, with an angle of 90° to 180°.

8. The boat leg assembly structure according to claim 7, characterized in that: The diameter of the surface edge of the mounting groove (22) is greater than the diameter of the movable pin (4).

9. The boat leg assembly structure according to claim 7, characterized in that: The bottom surface of the pin groove (21) is an arc surface; one end of the pin groove (21) is connected to the mounting groove (22), and the other end extends downward.

10. A boat support, characterized in that: It comprises the boat foot assembly structure as described in any one of claims 1-9.

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