Tail gas treatment device for recycling etching liquid

Abstract

The invention relates to the technical field of tail gas treatment, in particular to an etching liquid recovery treatment tail gas treatment device which comprises a mounting seat, a sealed L-shaped pipeline is fixedly connected to the top of the mounting seat, and a communicating L-shaped pipeline is arranged on one side of the sealed L-shaped pipeline. The two ends of the communicating L-shaped pipeline are fixedly communicated with the horizontal section and the vertical section of the sealed L-shaped pipeline respectively; through synchronous rotation of a first slip ring and a second slip ring and sliding connection of a fan-shaped shell to the first slip ring, different types of adsorbents continuously perform adsorption treatment on recycled tail gas flowing circularly, and the automation degree of adsorbent replacement is improved; in addition, shutdown operation is not needed in the adsorbent replacement process, sealing of the recycled tail gas can be guaranteed, the treatment efficiency of the etching liquid recycled tail gas is effectively improved, and continuous treatment of the recycled tail gas is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of tail gas treatment, and in particular to a tail gas treatment device for etching liquid recovery and treatment. Background Art

[0002] Etching liquid is usually used in semiconductor or electronic manufacturing to corrode the surface of metal or materials. It may contain acidic or alkaline components, such as hydrochloric acid, nitric acid, hydrofluoric acid, etc. During the recycling process, these chemicals may volatilize or decompose to produce harmful gases. Traditional tail gas treatment methods include adsorption, absorption, combustion, catalytic oxidation, etc.

[0003] The patent document with publication number CN214437907U discloses an etching liquid recovery and exhaust gas treatment device, including a base, a treatment tank filled with treatment liquid and a water pump, the treatment tank and the water pump are installed on the top of the base, an exhaust pipe is installed at the top opening of the treatment tank, and a liquid inlet pipe and a liquid discharge pipe are installed on the side of the treatment tank away from the water pump. The liquid inlet pipe is located above the liquid discharge pipe, and the other end of the liquid inlet pipe extends to the bottom of the inner cavity of the treatment tank.

[0004] In the prior art, when treating the recovered tail gas of the etching solution, activated carbon is usually used to adsorb harmful substances in the tail gas. During the adsorption treatment, due to the diverse harmful gas components in the tail gas, it is necessary to use a variety of adsorbents such as activated carbon, molecular sieves and silica gel for corresponding purification. The traditional adsorption treatment process is usually manually replaced after the adsorbent is saturated with adsorption, and the machine needs to be shut down during the replacement process, which reduces the treatment efficiency of the recovered tail gas of the etching solution and affects the continuous treatment of the recovered tail gas. Summary of the invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an etching liquid recovery and treatment tail gas treatment device.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is: an etching liquid recovery and treatment tail gas treatment device, comprising a mounting seat, a sealed L-shaped pipe is fixedly connected to the top of the mounting seat, a connecting L-shaped pipe is arranged on one side of the sealed L-shaped pipe, and the two ends of the connecting L-shaped pipe are respectively fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe, and an intake circulation mechanism is connected between the sealed L-shaped pipe and the connecting L-shaped pipe;

[0007] The vertical section of the sealed L-shaped pipe is fixedly connected with a fan-shaped housing, the interior of the fan-shaped housing is slidably connected with a first slip ring, the fan-shaped housing is fixedly connected with a fixing plate, the fixing plate is located at the bottom of the first slip ring, a plurality of first circular grooves are circumferentially provided on the first slip ring, a second slip ring is provided on one side of the top of the first slip ring, a plurality of second circular grooves are circumferentially provided on the second slip ring, a material blocking plate is provided at the bottom of the second slip ring, the tops of the second circular grooves are fixedly connected with a hopper, and a synchronous rotation mechanism is connected between the first slip ring and the second slip ring;

[0008] A plurality of slide grooves are provided at the bottom of the first slip ring along the circumferential direction, the slide grooves are communicated with the corresponding first circular grooves, two support plates are slidably connected inside the slide grooves, a plurality of air holes are provided on the support plates, a first circular pin is fixedly connected at the bottom of the support plates, two first guide grooves are fixedly connected to the fan-shaped shell and the fixed plate, the first guide grooves include arc segments and expansion segments, and the first circular pins are located inside the corresponding first guide grooves.

[0009] Preferably, the air intake circulation mechanism includes an intake pipe and an exhaust pipe, the intake pipe is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe, and the exhaust pipe is fixedly connected to the vertical section of the connecting L-shaped pipe. The intake pipe and the exhaust pipe are both fixedly installed with electric control valves, and the sealed L-shaped pipe and the connecting L-shaped pipe are both fixedly installed with one-way valves, and the two one-way valves are respectively located on one side of the intake pipe and below the exhaust pipe, and the sealed L-shaped pipe and the connecting L-shaped pipe are both fixedly connected with guide fans.

[0010] Preferably, a plurality of gas monitors are fixedly mounted on the vertical section of the communicating L-shaped pipe, and the gas monitors are all located at the top of the exhaust pipe.

[0011] Preferably, the synchronous rotation mechanism includes a sliding bracket, the sliding bracket is fixedly connected to the top of the mounting seat, the second slip ring is slidably connected to the sliding bracket, the baffle plate is fixedly connected to the sliding bracket, the sides of the first slip ring and the second slip ring are provided with arc grooves, the insides of the arc grooves are fixedly connected with external gear rings, the top of the mounting seat is rotatably connected with a first rotating shaft, the first rotating shaft is fixedly connected with two first gears, and the two first gears are respectively meshed with the corresponding external gear rings, and the bottom of the mounting seat is fixedly installed with a first motor, and the output shaft of the first motor passes through the mounting seat and is fixedly connected to the bottom of the first rotating shaft.

[0012] Preferably, the interior of the first circular groove is rotatably connected with a connecting shaft, a plurality of material stripping plates are fixedly connected to the surface of the connecting shaft, one end of the connecting shaft passes through the first slip ring and extends to the interior of the first slip ring and is fixedly connected to a circular disk, the top of the fixed plate is fixedly connected to a limit ring, an arc-shaped notch is provided on the side of the limit ring close to the fan-shaped shell, a rotating bar is provided inside the arc-shaped notch, a second motor is fixedly mounted on the fixed plate, an output shaft of the second motor is fixedly connected to the rotating bar, a strip groove is provided on the inner side of the fan-shaped shell, one of the circular disks is slidably connected to the rotating bar, and the remaining circular disks are slidably connected to the limit ring.

[0013] Preferably, a circular filter plate is fixedly connected to a fixed connection point above the sector-shaped housing and the sealed L-shaped pipe, and the circular filter plate is located on the top of the first slip ring.

[0014] Preferably, a plurality of filling plates are circumferentially arranged inside the first slip ring, one end of each filling plate passes through the first slip ring and extends to the corresponding first circular groove, one end of each filling plate is flush with the inner wall of the first circular groove, and the filling plate is located on the top of the corresponding support plate. One end of each filling plate located inside the first slip ring is fixedly connected with a second circular pin, and the top of the fixed plate is fixedly connected with a second guide groove rail, and the bottom end of each second circular pin is located inside the second guide groove rail, and the second guide groove rail includes a flush section and an extension section, and the extension section is close to the second slip ring.

[0015] Preferably, a collecting cylinder is rotatably connected to the top of the mounting seat, a plurality of fan-shaped baskets are slidably inserted inside the collecting cylinder, the collecting cylinder is located below one side of the unfolded section of the first guide groove, and a matching rotating mechanism is connected to the collecting cylinder.

[0016] Preferably, the mating rotating mechanism includes a second rotating shaft, which is rotatably connected to the top of the mounting seat, and two second gears are fixedly connected to the second rotating shaft. A mating gear ring is fixedly connected to the side of the collecting barrel, and the mating gear ring and the outer gear ring on the side of the first slip ring are respectively meshed with the two second gears.

[0017] Preferably, an observation groove is provided on the surface of the hopper, and transparent glass is fixedly connected to the interior of the observation groove.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. Through the synchronous rotation of the first slip ring and the second slip ring and the sliding connection of the fan-shaped shell to the first slip ring, different types of adsorbents can continuously adsorb the circulating recycled tail gas, thereby improving the automation of adsorbent replacement. In addition, during the adsorbent replacement process, there is no need to stop the machine and the sealing of the recycled tail gas can be ensured, which effectively improves the processing efficiency of the etching liquid recycled tail gas and is conducive to the continuous processing of the recycled tail gas.

[0020] 2. The output shaft of the second motor drives the rotating bar to rotate inside the arc-shaped notch, so that the circular disk drives the connecting shaft to rotate, and the material-pickup plate on the connecting shaft rotates and pokes the adsorbent inside the first circular groove, thereby improving the contact efficiency between the adsorbent and the recovered exhaust gas. Before the first slip ring continues to rotate, the output shaft of the second motor drives the rotating bar to return to the initial position, so that the circular disk moves from the rotating bar to the limit ring.

[0021] 3. When the adsorbent is filled into the first circular groove along the second circular groove, one end of the filling plate occupies a certain space inside the first circular groove. When the first circular groove and the corresponding second circular groove rotate and disengage, the second circular pin moves from the extension section to the flush section, so that one end of the filling plate withdraws from the first circular groove and releases the space occupied. The movement of the filling plate prevents the adsorbent inside the first circular groove from being over-saturated, ensuring that the rotation of the material-selecting plate can enable the adsorbent to move relatively. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a first structural schematic diagram of the present invention;

[0023] Figure 2 For the present invention Figure 1 A schematic diagram of the structure enlargement at point A;

[0024] Figure 3 For the present invention Figure 1 A schematic diagram of the structure at B in FIG.

[0025] Figure 4 It is a second structural schematic diagram of the present invention;

[0026] Figure 5 For the present invention Figure 4 A schematic diagram of the structure at position C in FIG.

[0027] Figure 6 For the present invention Figure 4 A schematic diagram of the structure at D in FIG.

[0028] Figure 7 It is a schematic diagram of the matching structure of the second slip ring, the baffle plate and the sliding bracket of the present invention;

[0029] Figure 8It is a schematic diagram of a first matching structure of a fan-shaped housing, a first slip ring and a fixing plate of the present invention;

[0030] Fig. 9 For the present invention Figure 8 A schematic diagram of the structure at position E in FIG.

[0031] Fig.10 For the present invention Figure 8 A magnified schematic diagram of the structure at F in FIG.

[0032] Fig.11 It is a schematic diagram of the second matching structure of the fan-shaped housing, the first slip ring and the fixing plate of the present invention;

[0033] Fig.12 For the present invention Fig.11 Schematic diagram of the enlarged structure at G in FIG.

[0034] In the figure: 1, mounting seat; 2, sealing L-shaped pipe; 3, connecting L-shaped pipe; 4, fan-shaped shell; 5, first slip ring; 6, fixing plate; 7, first circular groove; 8, second slip ring; 801, material blocking plate; 9, second circular groove; 10, hopper; 11, slide groove; 12, support plate; 13, air hole; 14, first circular pin; 15, first guide groove rail; 1501, arc segment; 1502, expansion segment; 16, intake pipe; 17, exhaust pipe; 18, electric control valve; 19, one-way valve; 20, guide fan; 21, gas monitor; 22, sliding bracket; 23, arc Groove; 24, outer gear ring; 25, first rotating shaft; 26, first gear; 27, first motor; 28, connecting shaft; 29, material removal plate; 30, circular disk; 31, limit ring; 32, arc-shaped notch; 33, rotating bar; 34, second motor; 35, strip groove; 36, circular filter plate; 37, filling plate; 38, second circular pin; 39, second guide groove; 3901, flush section; 3902, extension section; 40, collecting barrel; 41, fan-shaped basket; 42, second rotating shaft; 43, second gear; 44, matching gear ring; 45, observation slot; 46, transparent glass. DETAILED DESCRIPTION

[0035] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0036] like Figures 1 to 12 The exhaust gas treatment device for recycling etching liquid shown in the figure comprises a mounting seat 1, a sealed L-shaped pipe 2 is fixedly connected to the top of the mounting seat 1, a connecting L-shaped pipe 3 is arranged on one side of the sealed L-shaped pipe 2, two ends of the connecting L-shaped pipe 3 are respectively fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe 2, and an intake circulation mechanism is connected between the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3;

[0037] The vertical section of the sealed L-shaped pipe 2 is fixedly connected with a fan-shaped housing 4, the interior of the fan-shaped housing 4 is slidably connected with a first slip ring 5, the fan-shaped housing 4 is fixedly connected with a fixing plate 6, the fixing plate 6 is located at the bottom of the first slip ring 5, a plurality of first circular grooves 7 are opened in the circumferential direction on the first slip ring 5, a second slip ring 8 is arranged on one side of the top of the first slip ring 5, a plurality of second circular grooves 9 are opened in the circumferential direction on the second slip ring 8, and a baffle plate 801 (such as Figure 3 and Figure 7 As shown), the top of the second circular groove 9 is fixedly connected to a hopper 10, and a synchronous rotation mechanism is connected between the first slip ring 5 and the second slip ring 8;

[0038] The bottom of the first slip ring 5 is provided with a plurality of slide grooves 11 along the circumferential direction, and the slide grooves 11 are connected with the corresponding first circular grooves 7. Two support plates 12 are slidably connected inside the slide grooves 11, and a plurality of air holes 13 are provided on the support plates 12. The bottom of the support plates 12 is fixedly connected with a first circular pin 14. The fan-shaped housing 4 and the fixed plate 6 are jointly fixedly connected with two first guide grooves 15 (such as Fig.11 and Fig.12As shown), the first guide groove 15 includes an arc segment 1501 and an expansion segment 1502, and the first circular pin 14 is located inside the corresponding first guide groove 15; when working, the prior art usually uses activated carbon to adsorb harmful substances in the tail gas when processing the recovered tail gas of the etching solution. During the adsorption treatment, due to the diverse harmful gas components in the tail gas, it is necessary to use a variety of adsorbents such as activated carbon, molecular sieves and silica gel for corresponding purification. The traditional adsorption treatment process is usually manually replaced after the adsorbent is saturated with adsorption, and the machine needs to be shut down during the replacement process, thereby reducing the processing efficiency of the recovered tail gas of the etching solution and affecting the continuous processing of the recovered tail gas; the technical solution can solve the above problems and has The working mode of the body is as follows: the recovered tail gas of the etching liquid is introduced into the interior of the sealed L-shaped pipe 2 through the action of the air intake circulation mechanism, and continuously circulates along the interior of the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3, the bottom of the first circular groove 7 is supported by two adjacent support plates 12, and the corresponding adsorbent is filled in the interior of the first circular groove 7, and the recovered tail gas moves along the sliding connection between the fan-shaped shell 4 and the first slip ring 5 to the corresponding first circular groove 7 during the flow process, thereby entering the interior of the first circular groove 7 along the air holes 13 on the support plate 12, and through contact with the filled adsorbent, the corresponding harmful substances in the recovered tail gas are adsorbed, and then the first slip ring 5 and The second slip ring 8 rotates synchronously, so that the next first circular groove 7 rotates into the interior of the fan-shaped shell 4, and continues to adsorb the recovered tail gas through another adsorbent in the next first circular groove 7. At the same time, the discarded adsorbent rotates to the outside along the fan-shaped shell 4, and the corresponding support plate 12 moves to the expansion section 1502 along the arc section 1501 of the first guide groove rail 15 during the rotation, so that the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, so that the discarded adsorbent falls from the bottom of the first circular groove 7, completing the automatic loading of the discarded adsorbent, and through the synchronous rotation of the first slip ring 5 and the second slip ring 8, the first circular groove 7 and the second circular groove 9 are connected in sequence. The flow of the adsorbent in the hopper 10 is intermittently stopped, so that the adsorbent in the hopper 10 is automatically filled into the first circular groove 7 along the second circular groove 9 under the action of gravity, completing the automatic loading of the adsorbent, and the bottom of the second circular groove 9 is blocked by the baffle plate 801, and the baffle plate 801 and the side of the first slip ring 5 are slidably fitted, and the first slip ring 5 and the second slip ring 8 are synchronously rotated and the fan-shaped shell 4 is slidably connected to the first slip ring 5, so that different types of adsorbents can continuously adsorb the circulating recycled exhaust gas, thereby improving the degree of automation of adsorbent replacement, and during the adsorbent replacement process, there is no need to stop the machine and the sealing of the recycled exhaust gas can be guaranteed, which effectively improves the processing efficiency of the etching liquid recycled exhaust gas and is conducive to the continuous processing of the recycled exhaust gas.

[0039] As a further embodiment of the present invention, the intake circulation mechanism includes an intake pipe 16 and an exhaust pipe 17, the intake pipe 16 is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe 2, the exhaust pipe 17 is fixedly connected to the vertical section of the connected L-shaped pipe 3, the intake pipe 16 and the exhaust pipe 17 are fixedly installed with an electric control valve 18, the sealed L-shaped pipe 2 and the connected L-shaped pipe 3 are fixedly installed with a one-way valve 19, the two one-way valves 19 are respectively located on one side of the intake pipe 16 and below the exhaust pipe 17, and the sealed L-shaped pipe 2 and the connected L-shaped pipe 3 are fixedly connected with a guide fan 20; when working, the recovered exhaust gas is pumped into the interior of the sealed L-shaped pipe 2 along the intake pipe 16, and through the guiding effect of the two guide fans 20, the recovered exhaust gas moves along the horizontal section of the sealed L-shaped pipe 2 to the vertical section of the sealed L-shaped pipe 2, and along the vertical section of the sealed L-shaped pipe 2 to the connected L The one-way valve 19 on the sealed L-shaped pipe 2 is used to prevent the recovered exhaust gas from flowing toward the intake pipe 16, and after the recovered exhaust gas is treated, the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 are opened synchronously to continue pumping the recovered exhaust gas into the intake pipe 16, and the treated recovered exhaust gas is discharged along the exhaust pipe 17 through the recovered exhaust gas entering the intake pipe 16, and the one-way valve 19 on the connected L-shaped pipe 3 is used to prevent the newly entered recovered exhaust gas from moving directly toward the upper vertical section of the sealed L-shaped pipe 2, and when the treated recovered exhaust gas is completely discharged from the exhaust pipe 17, the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 are closed synchronously, and a new round of one-way circulation is carried out through the diversion effect of the guide fan 20.

[0040] As a further implementation scheme of the present invention, a plurality of gas monitors 21 are fixedly installed on the vertical section connected to the L-shaped pipe 3, and the gas monitors 21 are all located at the top of the exhaust pipe 17; during operation, the corresponding harmful substance content in the recovered exhaust gas is monitored by the plurality of gas monitors 21, and when the gas monitor 21 monitors that the corresponding harmful substance content is lower than the standard value, the first slip ring 5 rotates to replace the adsorbent, and when the values ​​of some gas monitors 21 are lower than the standard value, the controller connected to the gas monitor 21 controls the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 to open synchronously to replace the recovered gas, and when the newly entered recovered exhaust gas passes through the gas monitor 21, all gas monitors 21 monitor an increase in the value, and the controller connected to the gas monitor 21 controls the electric control valves 18 on the intake pipe 16 and the exhaust pipe 17 to close synchronously, thereby completing the gas replacement and carrying out the next round of adsorption treatment of the recovered exhaust gas.

[0041] As a further embodiment of the present invention, the synchronous rotation mechanism includes a sliding bracket 22, the sliding bracket 22 is fixedly connected to the top of the mounting seat 1, the second slip ring 8 is slidably connected to the sliding bracket 22, the baffle plate 801 is fixedly connected to the sliding bracket 22, the first slip ring 5 and the second slip ring 8 are both provided with arc grooves 23 on the sides, the inner parts of the arc grooves 23 are both fixedly connected with outer gear rings 24, the top of the mounting seat 1 is rotatably connected with a first rotating shaft 25, and the first rotating shaft 25 is fixedly connected with two first gears 26, and the two first gears 26 are respectively meshed with the corresponding outer gear rings 24, and the mounting seat 1 is provided with a first rotating shaft 25. A first motor 27 is fixedly installed at the bottom of the seat 1, and the output shaft of the first motor 27 passes through the mounting seat 1 and is fixedly connected to the bottom of the first rotating shaft 25; when working, the two first gears 26 have the same specifications and the two outer gear rings 24 have the same specifications. The output shaft of the first motor 27 rotates to drive the first rotating shaft 25 to rotate, so that the two first gears 26 on the first rotating shaft 25 rotate synchronously, and the first gear 26 and the corresponding outer gear ring 24 are meshed, so that the first slip ring 5 and the second slip ring 8 rotate in the same direction along the sliding connection between the fan-shaped shell 4 and the sliding bracket 22 respectively.

[0042] As a further embodiment of the present invention, the interior of the first circular groove 7 is rotatably connected with a connecting shaft 28, and a plurality of stripping plates 29 are fixedly connected to the surface of the connecting shaft 28. One end of the connecting shaft 28 passes through the first slip ring 5 and extends to the interior of the first slip ring 5 and is fixedly connected with a circular disk 30. The top of the fixed plate 6 is fixedly connected with a limiting ring 31, and an arc-shaped notch 32 is provided on the side of the limiting ring 31 close to the fan-shaped shell 4, and a rotating bar 33 is provided inside the arc-shaped notch 32. A second motor 34 is fixedly installed on the fixed plate 6, and the output shaft of the second motor 34 is fixedly connected to the rotating bar 33. A strip groove 35 is provided on the inner side of the fan-shaped shell 4, one of the circular disks 30 is slidably connected to the rotating bar 33, and the remaining circular disks 30 are slidably connected to the limiting ring 31. When working, the circular disk 30 is slidably limited by the limiting ring 31. When the second motor 34 is fixedly mounted on the fixed plate 6, the output shaft of the second motor 34 is fixedly connected to the rotating bar 33. When a slip ring 5 rotates, multiple connecting shafts 28 rotate synchronously, and the circular disk 30 moves along the sliding connection of the limit ring 31, and moves the connecting shaft 28 to make way through the strip groove 35. When the corresponding first circular groove 7 and the connecting shaft 28 enter the fan-shaped shell 4, the corresponding circular disk 30 moves from the limit ring 31 to the rotating bar 33, and the rotating bar 33 is driven to rotate inside the arc-shaped notch 32 by the output shaft rotation of the second motor 34, so that the circular disk 30 drives the connecting shaft 28 to rotate, and the material shifting plate 29 on the connecting shaft 28 rotates and shifts the adsorbent inside the first circular groove 7, thereby improving the contact efficiency between the adsorbent and the recovered exhaust gas, and before the first slip ring 5 continues to rotate, the output shaft of the second motor 34 drives the rotating bar 33 to return to the initial position, so that the circular disk 30 moves from the rotating bar 33 to the limit ring 31.

[0043] As a further implementation scheme of the present invention, a circular filter plate 36 is fixedly connected to the fixed connection between the fan-shaped shell 4 and the sealed L-shaped pipe 2, and the circular filter plate 36 is located on the top of the first slip ring 5; when working, the circular filter plate 36 is arranged at the fixed connection between the fan-shaped shell 4 and the sealed L-shaped pipe 2 to block the adsorbent and prevent the adsorbent from entering the sealed L-shaped pipe 2 under the action of the diversion and the movement of the material plate 29.

[0044] As a further embodiment of the present invention, a plurality of filling plates 37 are arranged circumferentially inside the first slip ring 5, one end of the filling plate 37 passes through the first slip ring 5 and extends to the corresponding first circular groove 7, one end of the filling plate 37 is flush with the inner wall of the first circular groove 7, the filling plate 37 is located at the top of the corresponding support plate 12, and one end of the filling plate 37 located inside the first slip ring 5 is fixedly connected to the second circular pin 38, and the top of the fixing plate 6 is fixedly connected to the second guide groove rail 39 (such as Fig.10 As shown in the figure, the bottom ends of the second circular pins 38 are all located inside the second guide groove 39, and the second guide groove 39 includes a flush section 3901 and an extension section 3902, and the extension section 3902 is close to the second slip ring 8; when working, when the second circular pin 38 moves along the flush section 3901 of the second guide groove 39, one end of the filling plate 37 is flush with the inner wall of the corresponding first circular groove 7, and when the first circular groove 7 and the corresponding second circular groove 9 are rotated and connected, the second circular pin 38 moves from the flush section 3901 to the extension section 3902, and makes one end of the filling plate 37 move toward the first circular groove 7, so that when the adsorbent is filled into the first circular groove 7 along the second circular groove 9, one end of the filling plate 37 occupies a certain space inside the first circular groove 7. When the first circular groove 7 and the corresponding second circular groove 9 are rotated and disengaged, the second circular pin 38 moves from the extension section 3902 to the flush section 3901, so that one end of the filling plate 37 withdraws from the first circular groove 7 and releases the occupation of the space. The movement of the filling plate 37 prevents the adsorbent inside the first circular groove 7 from being too saturated, ensuring that the rotation of the material stripping plate 29 can enable the adsorbent to move relatively.

[0045] As a further implementation scheme of the present invention, the top of the mounting base 1 is rotatably connected to a collecting barrel 40, and a plurality of fan-shaped baskets 41 are slidably inserted inside the collecting barrel 40. The collecting barrel 40 is located below one side of the unfolded section 1502 of the first guide groove 15, and a matching rotating mechanism is connected to the collecting barrel 40. During operation, the used adsorbent is collected by the plurality of fan-shaped baskets 41 inside the collecting barrel 40. When the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, the adsorbent inside the first circular groove 7 falls into the corresponding fan-shaped basket 41. Through the matching rotation of the collecting barrel 40, the plurality of fan-shaped baskets 41 are respectively classified and collected for different types of adsorbents, thereby improving the convenience of adsorbent processing.

[0046] As a further implementation scheme of the present invention, the mating rotation mechanism includes a second rotating shaft 42, which is rotatably connected to the top of the mounting base 1, and two second gears 43 are fixedly connected to the second rotating shaft 42. A mating gear ring 44 is fixedly connected to the side of the collecting barrel 40, and the mating gear ring 44 and the outer gear ring 24 on the side of the first slip ring 5 are respectively meshed with the two second gears 43; when working, the two second gears 43 have the same specifications, and the mating gear ring 44 and the outer gear ring 24 have the same specifications. The rotation of the outer gear ring 24 drives the corresponding second gear 43 to rotate, thereby rotating the second rotating shaft 42, and the other second gear 43 on the second rotating shaft 42 drives the mating gear ring 44 to rotate through meshing, thereby causing the collecting barrel 40 and the first slip ring 5 to rotate synchronously.

[0047] As a further implementation scheme of the present invention, an observation groove 45 is provided on the surface of the hopper 10, and a transparent glass 46 is fixedly connected to the inside of the observation groove 45; by installing the transparent glass 46 on the hopper 10, it is convenient for the staff to observe the remaining adsorbent inside the hopper 10, so as to add the adsorbent in time.

[0048] Working principle of the present invention:

[0049] The recovered tail gas of the etching liquid is introduced into the sealed L-shaped pipe 2 through the action of the air intake circulation mechanism, and continuously circulates along the sealed L-shaped pipe 2 and the connecting L-shaped pipe 3. The bottom of the first circular groove 7 is supported by two adjacent support plates 12, and the corresponding adsorbent is filled in the first circular groove 7. During the flow, the recovered tail gas moves along the sliding connection between the fan-shaped shell 4 and the first slip ring 5 to the corresponding first circular groove 7, thereby entering the first circular groove 7 along the air holes 13 on the support plate 12, and through contact with the filled adsorbent, the corresponding harmful substances in the recovered tail gas are adsorbed. Then, the first slip ring 5 and the second slip ring 8 are rotated synchronously through the action of the synchronous rotation mechanism, so that the next first circular groove 7 is rotated to enter the fan-shaped shell 4, and the recovered tail gas is continuously adsorbed by another adsorbent in the next first circular groove 7. At the same time, the discarded adsorbent is rotated to the outside along the fan-shaped shell 4. During the rotation of the corresponding support plate 12, the circular arc segment 1501 of the first guide groove rail 15 Move to the expansion section 1502, so that the two support plates 12 slide along the slide groove 11 and release the support for the bottom of the first circular groove 7, so that the waste adsorbent falls from the bottom of the first circular groove 7, and the automatic loading of the waste adsorbent is completed. Through the synchronous rotation of the first slip ring 5 and the second slip ring 8, the first circular groove 7 and the second circular groove 9 are connected in turn and stopped intermittently, so that the adsorbent in the hopper 10 is automatically filled into the first circular groove 7 along the second circular groove 9 under the action of gravity, and the automatic loading of the adsorbent is completed. The bottom of the second circular groove 9 is blocked by the baffle plate 801, and the baffle plate 801 and the side of the first slip ring 5 are slidably fitted. Through the synchronous rotation of the first slip ring 5 and the second slip ring 8 and the sliding connection of the fan-shaped shell 4 to the first slip ring 5, different types of adsorbents continuously adsorb the circulating recycled exhaust gas, thereby improving the automation of adsorbent replacement, and during the adsorbent replacement process, there is no need to stop the machine and the sealing of the recycled exhaust gas can be guaranteed, effectively improving the processing efficiency of the etching liquid recycled exhaust gas, and facilitating the continuous processing of the recycled exhaust gas.

[0050] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions only describe the principles of the present invention. The present invention may have various changes and improvements without departing from the spirit and scope of the present invention, and these changes and improvements fall within the scope of the present invention to be protected, and the scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. An etching liquid recovery and treatment tail gas treatment device, comprising a mounting seat, characterized in that: A sealed L-shaped pipe is fixedly connected to the top of the mounting seat, a connecting L-shaped pipe is arranged on one side of the sealed L-shaped pipe, two ends of the connecting L-shaped pipe are respectively fixedly connected to the horizontal section and the vertical section of the sealed L-shaped pipe, and an air intake circulation mechanism is connected between the sealed L-shaped pipe and the connecting L-shaped pipe; The vertical section of the sealed L-shaped pipe is fixedly connected with a fan-shaped housing, the interior of the fan-shaped housing is slidably connected with a first slip ring, a fixed plate is fixedly connected to the fan-shaped housing, the fixed plate is located at the bottom of the first slip ring, a plurality of first circular grooves are circumferentially provided on the first slip ring, a second slip ring is provided on one side of the top of the first slip ring, a plurality of second circular grooves are circumferentially provided on the second slip ring, a material blocking plate is provided at the bottom of the second slip ring, the top of the second circular groove is fixedly connected with a hopper, and a synchronous rotation mechanism is connected between the first slip ring and the second slip ring; A plurality of slide grooves are provided at the bottom of the first slip ring along the circumferential direction, the slide grooves are communicated with the corresponding first circular grooves, two support plates are slidably connected inside the slide grooves, a plurality of air holes are provided on the support plates, a first circular pin is fixedly connected at the bottom of the support plates, two first guide grooves are fixedly connected to the fan-shaped shell and the fixed plate, the first guide grooves include arc segments and expansion segments, and the first circular pins are located inside the corresponding first guide grooves.

2. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: The air intake circulation mechanism includes an intake pipe and an exhaust pipe. The intake pipe is fixedly connected to one end of the horizontal section of the sealed L-shaped pipe, and the exhaust pipe is fixedly connected to the vertical section of the connecting L-shaped pipe. Electric control valves are fixedly installed on both the intake pipe and the exhaust pipe. Check valves are fixedly installed on the sealed L-shaped pipe and the connecting L-shaped pipe. The two check valves are respectively located on one side of the intake pipe and below the exhaust pipe. Guide fans are fixedly connected to the sealed L-shaped pipe and the connecting L-shaped pipe.

3. The etching liquid recovery and treatment tail gas treatment device according to claim 2, characterized in that: A plurality of gas monitors are fixedly installed on the vertical section connected to the L-shaped pipeline, and the gas monitors are all located at the top of the exhaust pipe.

4. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: The synchronous rotation mechanism includes a sliding bracket, which is fixedly connected to the top of the mounting seat, the second slip ring is slidably connected to the sliding bracket, the baffle plate is fixedly connected to the sliding bracket, the sides of the first slip ring and the second slip ring are both provided with arc grooves, the insides of the arc grooves are both fixedly connected with external gear rings, the top of the mounting seat is rotatably connected with a first rotating shaft, two first gears are fixedly connected to the first rotating shaft, and the two first gears are respectively meshed with corresponding external gear rings, and the bottom of the mounting seat is fixedly installed with a first motor, and the output shaft of the first motor passes through the mounting seat and is fixedly connected to the bottom of the first rotating shaft.

5. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: The inside of the first circular groove is rotatably connected with a connecting shaft, and a plurality of material stripping plates are fixedly connected to the surface of the connecting shaft. One end of the connecting shaft passes through the first slip ring and extends to the inside of the first slip ring, and is fixedly connected to a circular disk. The top of the fixed plate is fixedly connected to a limit ring, and an arc-shaped notch is provided on the side of the limit ring close to the fan-shaped shell, and a rotating bar is provided inside the arc-shaped notch. A second motor is fixedly installed on the fixed plate, and the output shaft of the second motor is fixedly connected to the rotating bar. A strip groove is provided on the inner side of the fan-shaped shell, and one of the circular disks is slidably connected to the rotating bar, and the remaining circular disks are slidably connected to the limit ring.

6. The etching liquid recovery and treatment tail gas treatment device according to claim 5, characterized in that: A circular filter plate is fixedly connected to a fixed connection point above the sector-shaped housing and the sealed L-shaped pipeline, and the circular filter plate is located on the top of the first slip ring.

7. The etching liquid recovery and treatment tail gas treatment device according to claim 6, characterized in that: A plurality of filling plates are circumferentially arranged inside the first slip ring, one end of the filling plates penetrates the first slip ring and extends to the corresponding first circular groove, one end of the filling plates is flush with the inner wall of the first circular groove, the filling plates are located on the top of the corresponding support plates, one end of the filling plates located inside the first slip ring is fixedly connected with a second circular pin, the top of the fixed plate is fixedly connected with a second guide groove rail, the bottom ends of the second circular pins are located inside the second guide groove rail, the second guide groove rail includes a flush section and an extension section, and the extension section is close to the second slip ring.

8. The etching liquid recovery and treatment tail gas treatment device according to claim 4, characterized in that: The top of the mounting seat is rotatably connected with a collecting cylinder, a plurality of fan-shaped baskets are slidably inserted inside the collecting cylinder, the collecting cylinder is located below one side of the unfolded section of the first guide groove rail, and a matching rotating mechanism is connected to the collecting cylinder.

9. The etching liquid recovery and treatment tail gas treatment device according to claim 8, characterized in that: The mating rotating mechanism includes a second rotating shaft, which is rotatably connected to the top of the mounting seat, and two second gears are fixedly connected to the second rotating shaft. A mating gear ring is fixedly connected to the side of the collecting barrel, and the mating gear ring and the outer gear ring on the side of the first sliding ring are respectively meshed with the two second gears.

10. The etching liquid recovery and treatment tail gas treatment device according to claim 1, characterized in that: An observation slot is provided on the surface of the hopper, and transparent glass is fixedly connected inside the observation slot.

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