A coating system and a coating method

Abstract

The present invention discloses a coating system and a coating method. The coating system includes: an air float subsystem, which forms an air film in the coating area to make the substrate float on the air film; a distance detection component, which is used to detect the distance between the coating head and the substrate; a air pressure detection component, which is used to detect the air pressure values of each area of the air film; a first adjustment component, which is drivingly connected to the coating head to make the coating head reciprocate along the Z-axis direction; a second adjustment component, which is connected to the air float subsystem and is used to regulate the air pressure values of each area of the air film. A coating system and a coating method of the present invention constitute a dual adjustment component that works together through the first adjustment component and the second adjustment component to realize the synchronous regulation of the height of the coating head and the air film pressure.

Description

Technical Field

[0001] The present invention relates to the technical field of perovskite coating equipment, and particularly to a coating system and a coating method. Background Art

[0002] In the field of perovskite solar cell manufacturing, the solution coating process directly determines the conversion efficiency and stability of optoelectronic devices.

[0003] Traditional coating equipment mainly faces three major technical bottlenecks: First, mechanical contact transportation is likely to cause damage to ultra-thin substrates (<100μm), and the breakage rate is as high as 3%; second, the control accuracy of the coating head height is insufficient (±5μm), resulting in a film thickness non-uniformity exceeding ±8%; third, the stability of the air floating system is poor, causing coating stripe defects.

[0004] The current mainstream coating technologies mainly include three categories: slot die coating, blade coating, and air floating assisted coating. Among them, the air floating assisted coating technology, due to its non-contact characteristics, can solve some technical problems of traditional coating equipment, but there are still obvious defects:

[0005] First, single-point laser detection is difficult to reflect the overall deformation of the substrate. When processing large-sized substrates over 1.5m, the local height deviation can reach 200μm; second, the air film pressure uses open-loop control, and the response delay exceeds 50ms, making it impossible to compensate for substrate fluctuations in real time; third, traditional time-domain analysis methods (such as the standard deviation criterion) are insensitive to mechanical vibrations in the range of 10 - 100Hz, resulting in a stability misjudgment rate exceeding 15%.

[0006] To solve at least one of the above technical problems, the present application proposes a coating system and a coating method. Summary of the Invention

[0007] The purpose of the present invention is to provide a coating system and a coating method, which form a double adjustment component that works together through a first adjustment component and a second adjustment component to achieve synchronous regulation of the coating head height and the air film pressure.

[0008] The purpose of the present invention is achieved by the following technical solutions:

[0009] On the one hand, the present invention provides a coating system, including:

[0010] An air floating subsystem, which forms an air film in the coating area to make the substrate float on the air film;

[0011] A distance detection component, which is used to detect the distance between the coating head and the substrate;

[0012] A barometric pressure detection component, which is used to detect the barometric pressure values of each area of the air film;

[0013] A first adjustment component, which is drivingly connected to the coating head to move the coating head reciprocally along the Z-axis direction;

[0014] A second adjustment component, which is connected to the air float subsystem and is used to regulate the barometric pressure values of each area of the air film.

[0015] The beneficial effects of the above solution are as follows: By forming a uniform air film through the air float subsystem, the present invention realizes non-contact suspension of the substrate (gap 50 - 500 μm), avoiding substrate scratches and contamination caused by traditional mechanical contact; through the first adjustment component and the second adjustment component, a dual adjustment component that works in cooperation is formed to realize synchronous regulation of the height of the coating head and the air film pressure.

[0016] Furthermore, the coating system further includes:

[0017] A power subsystem, which is drivingly connected to the non-coating area of the substrate to move the substrate along the coating direction in the coating area;

[0018] Wherein, the non-coating area is located at the periphery of the substrate.

[0019] The beneficial effects of the above solution are as follows: The power subsystem of the present invention acts on the non-coating area (the edge of the substrate), avoiding affecting the film uniformity in the coating area; in addition, air floatation is used to stably suspend the substrate, and the power subsystem is used to linearly transport the substrate, which can improve the reliability of the system.

[0020] Furthermore, the power subsystem includes: multiple groups of suction cup structures, and each group of suction cup structures includes: a first suction cup and a second suction cup;

[0021] When moving the substrate, at least one of the first suction cups adsorbs on the periphery of one side of the substrate, and at least one of the second suction cups adsorbs on the periphery of the other side of the substrate.

[0022] The beneficial effects of the above solution are as follows: The suction cups of the present invention only contact the periphery of the substrate, ensuring the driving force and minimizing contact contamination to the greatest extent.

[0023] Furthermore, the coating system includes:

[0024] A third adjustment component, which adjusts the adsorption height and / or adsorption duration of each suction cup according to the distances between the coating head and different areas of the substrate within a continuous preset time period.

[0025] The beneficial effects of the above solution are as follows: By using the third adjustment component to adjust the adsorption parameters according to the distance data, the present invention solves the over-constraint problem caused by the traditional fixed adsorption force. In addition, by adjusting the adsorption sequence, the vibration mode during substrate transportation can be suppressed.

[0026] Further, the air bearing system includes: multiple groups of air paths, with an air flow inlet, an air flow control valve, and an air flow outlet arranged in sequence on each air path, and each air flow outlet corresponds to a region of the air film. Among them, the air flow inlet is connected to the first outlet of the gas storage tank, and the gas storage tank is provided with a pneumatic controller for controlling the air flow pressure value of the first outlet.

[0027] Further, the distance detection component includes multiple distance sensors for detecting the distances between the coating head and different regions of the substrate.

[0028] Further, the air pressure detection component includes multiple air pressure sensors for detecting the air pressure values of each region of the air film.

[0029] Further, the first adjustment component includes two sets of adjustment structures, one set of adjustment structures is arranged on one side of the gantry, and the other set of adjustment structures is arranged on the other side of the gantry, and the gantry is connected to the coating head.

[0030] Further, the second adjustment component is used to regulate the pneumatic controller and / or the air flow control valve in the air path according to the distances between the coating head and different regions of the substrate and the air pressure values of each region of the air film within a continuous preset time period.

[0031] The beneficial effects of the above solution are as follows: Each air path of the present invention is independently controllable, realizing local precise regulation of the air film pressure. The present invention provides more comprehensive working condition monitoring data through dual detection of distance + air pressure. The present invention ensures the stable posture of the coating head through bilateral synchronous drive, avoiding deflection caused by unilateral adjustment.

[0032] Further, each set of the adjustment structures includes:

[0033] A guide rail slidably connected to the gantry.

[0034] A first motor drivingly connected to the gantry to adjust the Z-axis coordinate value of the gantry according to the distances between the coating head and different regions of the substrate within a continuous preset time period.

[0035] The beneficial effects of the above solution are as follows: The present invention realizes nanometer-level positioning accuracy of the coating head through the combination of a guide rail and a first motor. In addition, the heights on both sides of the coating head can be adjusted respectively according to the distance data of different regions of the substrate.

[0036] In a second aspect, the present invention provides a coating method, comprising:

[0037] Obtaining the distances between the coating head and different regions of the substrate within a continuous preset time period; determining whether the substrate is stable according to the distances between the coating head and different regions of the substrate within the continuous preset time period:

[0038] In response to the instability of the substrate, adjusting the air bearing subsystem and / or the power subsystem of the coating system according to the distances between the coating head and different regions of the substrate within the continuous preset time period to stabilize the substrate;

[0039] In response to the stability of the substrate, adjusting the distance between the coating head and the substrate according to the distances between the coating head and different regions of the substrate within the continuous preset time period, and entering the coating operation process.

[0040] The beneficial effect of the above solution is that the present invention realizes the control of the coating equipment by forming a closed-loop control method of detection - determination - adjustment - verification.

[0041] Further, the determining whether the substrate is stable according to the distances between the coating head and different regions of the substrate within the continuous preset time period includes: calculating the standard deviation of the distance data of each first detection point;

[0042] Performing a fast Fourier transform on the distance data of each first detection point to extract the vibration energy in a preset frequency band;

[0043] Fitting the distance - time curve by the least squares method and calculating the slope of the distance - time curve;

[0044] When the standard deviation, the vibration energy, and the slope satisfy the following formula, the substrate is stable, otherwise the substrate is unstable:

[0045] α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1

[0046] In the formula, α, β, and γ are weight coefficients, and α + β + γ = 1; σ is the standard deviation; σ0 is a preset error threshold; E is the vibration energy; E0 is a preset energy threshold; k is the slope; k0 is a preset slope threshold.

[0047] The beneficial effect of the above solution is that the present invention improves the reliability of substrate stability judgment by comprehensively analyzing the time domain (standard deviation), frequency domain (vibration energy), and trend (slope).

[0048] Further, the adjusting the air bearing subsystem of the coating system includes: obtaining the air pressure values of each region of the air film within a continuous preset time period; regulating the air pressure controller and / or the air flow control valve in the air circuit of the air bearing subsystem according to the distances between the coating head and different regions of the substrate within the continuous preset time period and the air pressure values of each region of the air film.

[0049] Further, the power subsystem of the adjustment coating system includes: adjusting the adsorption height and / or adsorption duration of the suction cup in the power subsystem according to the distance between the coating head and different regions of the substrate within a continuous preset time period.

[0050] The beneficial effect of the above solution is that the substrate is stabilized by adjusting the air-floating subsystem and the power subsystem of the coating system in the present invention.

[0051] Further, adjusting the distance between the coating head and the substrate according to the distance between the coating head and different regions of the substrate within a continuous preset time period includes:

[0052] Calculating the average value of the distance between the coating head and the substrate and the average value of the distances between the coating head and different regions of the substrate according to the distance between the coating head and different regions of the substrate within a continuous preset time period;

[0053] Moving the coating head for the first time, using the average value of the distance between the coating head and the substrate as the first reference height, and moving the first displacement on one side of the coating head corresponding to different regions of the substrate:

[0054] First displacement = average value of the distances between the coating head and different regions of the substrate - first reference height;

[0055] Moving the coating head for the second time, using the preset spacing as the second reference height, and moving the second displacement on one side of the coating head corresponding to different regions of the substrate:

[0056] Second displacement = first reference height - second reference height.

[0057] The beneficial effect of the above solution is that the present invention first eliminates the overall tilt of the substrate based on the average value of the coating head and the substrate, and then secondly adjusts the distance between the coating head and the substrate based on the preset spacing, improving the adjustment efficiency.

[0058] Compared with the prior art, the beneficial effects of the present invention at least include:

[0059] The present invention forms a uniform air film through the air-floating subsystem to achieve non-contact suspension of the substrate (gap 50 - 500 μm), avoiding substrate scratches and contamination caused by traditional mechanical contact; through the first adjustment component and the second adjustment component constituting a cooperative double adjustment component, synchronous regulation of the coating head height and the air film pressure is achieved. Description of the Drawings

[0060] Figure 1 is a schematic structural diagram of a coating system according to an embodiment of the present invention.

[0061] Figure 2 is another schematic structural diagram of a coating system according to an embodiment of the present invention.

[0062] Figure 3 It is a schematic flow chart of a coating method according to an embodiment of the present invention.

[0063] Figure 4 It is the detection data of the first sensor according to an embodiment of the present invention in one embodiment.

[0064] Figure 5 It is the detection data of the second sensor according to an embodiment of the present invention in one embodiment.

[0065] Figure 6 It is the detection data of the third sensor according to an embodiment of the present invention in one embodiment.

[0066] Figure 7 It is the detection data of the fourth sensor according to an embodiment of the present invention in one embodiment.

[0067] In the figure: 1. Air float subsystem; 2. Distance detection component; 3. First adjustment component; 4. Air pressure detection component; 5. Second adjustment component; 6. Gantry; 7. Coating head. Detailed implementation manners

[0068] Now, example embodiments will be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this invention will be more complete and comprehensive, and the concept of the example embodiments will be fully conveyed to those skilled in the art. Like reference numerals in the figures denote the same or similar structures, and thus their repetitive description will be omitted.

[0069] In the present invention, the words expressing position and direction are described by taking the accompanying drawings as examples, but can be changed according to needs, and all changes made are included in the protection scope of the present invention.

[0070] The coating system of the present invention can be applied to perovskite coating equipment, and the coating method of the present invention can be applied to control the coating system of the present invention.

[0071] In application, the perovskite coating equipment includes a coating head 7, a gantry 6 and a substrate. Among them, referring to Figure 2 , the coating head 7 is installed on the gantry 6.

[0072] In actual application, the substrate is rectangular or square, and includes a coating effective area and a coating ineffective area. Among them, the coating effective area is located in the middle of the substrate and below the coating head 7; the coating ineffective area is located at the periphery of the substrate, that is, the edge of the substrate.

[0073] Referring to Figure 1 and Figure 2, the coating system of the present invention includes: an air float system 1, a detection module, and an adjustment module. Further, the coating system of the present invention may further include: a power subsystem.

[0074] During application, the detection module includes a distance detection component 2 and a pressure detection component 4; the adjustment module includes a first adjustment component 3 and a second adjustment component 5; further, the adjustment module may further include: a third adjustment component.

[0075] The air float system 1 of the present invention forms an air film in the coating area, causing the substrate to float on the air film.

[0076] During application, the air float system 1 includes: multiple groups of independently controllable air paths. An air flow inlet, an air flow control valve, and an air flow outlet are sequentially provided on each air path. Further, the cross-section of the air film is rectangular or square, including multiple second measurement sub-regions, and the multiple second measurement sub-regions are arranged in a dot matrix. Each air flow outlet corresponds to a second measurement sub-region of the air film, realizing zonal pressure adjustment.

[0077] During actual application, the air flow inlet is connected to the first outlet of the gas storage tank. The gas storage tank is provided with a pressure controller, and the pressure controller is used to control the air flow pressure value of the first outlet. Specifically, when keeping the air flow pressure value of the first outlet unchanged, adjust the opening degree of the air flow control valve to adjust the air resistance in the air path, and further adjust the air pressure value of the air flow outlet. When keeping the opening degree of the air flow control valve unchanged, use the pressure controller to adjust the air flow pressure value of the first outlet to adjust the air pressure value of the air flow inlet, and further adjust the air pressure value of the air flow outlet. The distance detection component 2 of the present invention is used to detect the distance between the coating head 7 and the substrate.

[0078] During application, the distance detection component 2 adopts an array laser displacement sensor layout to realize multi-point synchronous detection of the distance between the coating head 7 and the substrate surface through distributed measurement. Specifically, the distance detection component 2 includes multiple distance sensors, and the multiple distance sensors detect the distances between the coating head 7 and different regions of the substrate.

[0079] During actual application, according to the process requirements of the substrate coating area, the effective coating area is divided into multiple first measurement sub-regions, and each sub-region is configured with an independent distance sensor. Among them, the effective coating area is square or rectangular, and the multiple first measurement sub-regions are arranged in a dot matrix.

[0080] During specific implementation, the substrate is divided into 4 first measurement sub-regions arranged in a dot matrix, and at least 4 distance sensors are set, namely the first sensor, the second sensor, the third sensor, and the fourth sensor. Each sensor detects the distance from the coating head to a first measurement sub-region. Refer to Figures 4 - 7 .

[0081] The air pressure detection component 4 of the present invention is used to detect the air pressure values of each area of the air film.

[0082] In application, the air pressure detection component 4 includes a plurality of air pressure sensors, and the plurality of air pressure sensors detect the air pressure values of each area of the air film. Specifically, the air film is divided into a plurality of second measurement sub-areas arranged in a dot matrix, and each air pressure sensor corresponds to a second measurement sub-area of the air film.

[0083] In actual application, the air pressure detection component 4 adopts a distributed air pressure sensing array, which is composed of a plurality of high-precision differential pressure sensors, and each sensor corresponds to a second measurement sub-area of the air film. The first adjustment component 3 of the present invention is drivingly connected to the coating head 7 to move the coating head 7 reciprocally along the Z-axis direction.

[0084] In application, the first adjustment component 3 includes two sets of adjustment structures. One set of adjustment structures is arranged on one side of the gantry 6, and the other set of adjustment structures is arranged on the other side of the gantry 6. The gantry 6 is connected to the coating head 7.

[0085] In actual application, each set of adjustment structures includes: a guide rail and a first motor. Preferably, the guide rail is a linear guide rail, and the first motor is a servo motor. Specifically, the guide rail is slidably connected to the gantry 6, and the first motor is drivingly connected to the gantry 6 to adjust the Z-axis coordinate value of the gantry 6 according to the distance between the coating head 7 and different areas of the substrate.

[0086] In specific implementation, a bilaterally symmetric first adjustment component 3 is adopted, which includes two sets of independent and synchronously controlled adjustment mechanisms. The two sets of adjustment mechanisms are respectively arranged on the left and right sides of the gantry 6 to eliminate the off-load problem caused by unilateral force on the gantry 6 and the coating head 7 thereon.

[0087] The second adjustment component 5 of the present invention is connected to the air floatation system 1 and is used to regulate the air pressure values of each area of the air film.

[0088] In application, the second adjustment component 5 is used to regulate the air pressure controller and / or the air flow control valve in the air circuit according to the distance between the coating head 7 and different areas of the substrate and the air pressure values of each area of the air film within a continuous preset time period.

[0089] In actual application, the second adjustment component 5 and the air flow control valves and the air pressure controller of a plurality of air circuits of the air floatation system 1 form a cascade control system, integrating a two-stage actuator of an integrated air pressure controller (main regulator) and an air flow control valve (fine adjustment unit).

[0090] In specific implementation, first, coarse adjustment is performed by adjusting the total air source pressure through the air pressure controller (for example: the adjustment range is 0.1 - 0.5 MPa); then, fine adjustment is performed by performing regional fine adjustment through the air flow control valve driven by PWM (for example: the resolution is ±10 Pa).

[0091] The power subsystem of the present invention drives and connects to the coating invalid area of the substrate.

[0092] During application, the power subsystem moves the substrate in the coating area along the coating direction. Preferably, the coating direction is the Y-axis direction, and the X-axis, Y-axis, and Z-axis are perpendicular to each other.

[0093] During actual application, the power subsystem is used for the interactive movement between adjacent substrates, that is, to load the next substrate to be coated onto the machine and unload the previously coated substrate from the machine.

[0094] The power subsystem of the present invention includes: multiple groups of suction cup structures arranged along the coating direction. Each group of suction cup structures includes: a first suction cup and a second suction cup.

[0095] When moving the substrate, at least one first suction cup adsorbs on the peripheral part of one side of the substrate, and at least one second suction cup adsorbs on the peripheral part of the other side of the substrate.

[0096] During actual application, both the first suction cup and the second suction cup are vacuum suction cups. Specifically, the vacuum suction cup includes: a vacuum cavity, a sealing ring, and a vacuum channel. The sealing ring fills the connection part of the vacuum cavity. The first end of the vacuum channel is connected to the inlet of the vacuum cavity, the second end of the vacuum channel is connected to an external vacuum pumping device, and the adsorption holes of the vacuum cavity are connected to the peripheral part of the substrate. In addition, a vacuum valve is provided on the vacuum channel.

[0097] During specific implementation, the power subsystem includes a first annular track and a second annular track. Among them, the first annular track is arranged on the first side of the substrate, and the second annular track is arranged on the second side of the substrate. In addition, one side of the first annular track is close to the first side of the substrate and is parallel to the coating direction; one side of the second annular track is close to the second side of the substrate and is parallel to the coating direction. Further, multiple first suction cups are sequentially arranged on the first annular track, and multiple second suction cups are sequentially arranged on the second annular track. Preferably, a corresponding driving device is provided to drive the first suction cup to move clockwise or counterclockwise on the first annular track, and drive the second suction cup to move clockwise or counterclockwise on the second annular track.

[0098] The third adjustment component of the present invention adjusts the adsorption height and / or adsorption duration of each suction cup according to the distance between the coating head 7 and different areas of the substrate within a continuous preset time period.

[0099] During application, the third adjustment component includes a second motor and a vacuum valve controller. Among them, the second motor is a servo motor; the vacuum valve controller controls the opening degree of the vacuum valve.

[0100] During actual application, the second motor is drivingly connected to the suction cup and drives the suction cup to reciprocate in the Z-axis direction.

[0101] Reference Figure 3, the coating method of the present invention includes: step SS1 - step SS4.

[0102] Step SS1: Obtain the distances between the coating head 7 and different regions of the substrate within a continuous preset time period.

[0103] In application, according to the process requirements of the coating area of the substrate, the effective coating area of the substrate is divided into multiple first measurement sub-regions, that is, first detection points. In addition, the continuous preset time period includes multiple detection moments.

[0104] In specific implementation, the heights on both sides of the coating head can be adjusted to be the same before collecting data.

[0105] In actual application, within the continuous preset time period, at each detection moment, the distance detection component 2 is used to detect the distances between the coating head 7 and each first measurement sub-region.

[0106] Step SS2: Determine whether the substrate is stable according to the distances between the coating head 7 and different regions of the substrate within a continuous preset time period.

[0107] In application, determine whether the substrate is stable according to the relationship between the distances between the coating head 7 and the corresponding first measurement sub-regions at each first detection point and the threshold parameters.

[0108] In actual application, step SS2 includes step SS21 - step SS24.

[0109] Step SS21: Calculate the standard deviation of the distance data at each first detection point.

[0110] In application, according to the distances between the coating head 7 and each first measurement sub-region at each detection moment within the continuous preset time period, calculate the standard deviation of the distance data at each first detection point.

[0111] Step SS22: Perform a fast Fourier transform on the distance data at each first detection point and extract the vibration energy in a preset frequency band.

[0112] In application, perform a fast Fourier transform on the distances between the coating head 7 and each first measurement sub-region at each detection moment within the continuous preset time period and extract the vibration energy in the frequency band of 0.1 - 10 Hz.

[0113] In actual application, the preset frequency band is the frequency band of 0.1 - 10 Hz.

[0114] Step SS23: Fit the distance-time curve by the least squares method and calculate the slope of the distance-time curve.

[0115] In application, based on the least squares method, according to the distances between the coating head 7 and each first measurement sub-region at each detection moment within the continuous preset time period, fit the distance-time curve.

[0116] Step SS24: When the standard deviation, vibration energy, and slope satisfy the following formula, the substrate is stable; otherwise, the substrate is unstable:

[0117] α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1;

[0118] In the formula, α, β, and γ are weighting coefficients, and α + β + γ = 1; σ is the standard deviation; σ0 is the preset error threshold; E is the vibration energy; E0 is the preset energy threshold; k is the slope; k0 is the preset slope threshold.

[0119] During application, σ0, E0, and k0 can be adjusted according to the substrate material, size, and coating process parameters. Preferably, k0 has a positive correlation with the coating speed.

[0120] During actual application, when α(σ / σ0)+β(E / E0)+γ(|k| / k0) > 1, the substrate is unstable, and an alarm signal is sent simultaneously; when α(σ / σ0)+β(E / E0)+γ(|k| / k0) ≤ 0.8, the substrate is stable; when 0.8 < α(σ / σ0)+β(E / E0)+γ(|k| / k0) ≤ 1, the substrate is stable, and a warning signal is sent simultaneously to indicate that the parameters are at the critical value edge and need to be repaired or the control parameters optimized.

[0121] Step SS3: In response to the substrate being unstable, adjust the air floatation subsystem 1 and / or the power subsystem of the coating system according to the distances between the coating head 7 and different regions of the substrate within a continuous preset time period to make the substrate stable.

[0122] During application, the continuous preset time period at least includes a first time period and a second time period. Among them, the first time period includes the time period for the suction cup structure of the power subsystem to interactively replace the substrate, and the second time period does not include the time period for the suction cup structure of the power subsystem to interactively replace the substrate. In other words, the first time period includes the suction cup interaction period and the air floatation period; the second time period only includes the air floatation period. Both the first time period and the second time period include multiple detection moments. In addition, the interactive replacement of the substrate by the suction cup structure is the interactive movement between adjacent substrates. For example, making the next substrate to be coated go onto the machine and making the previously coated substrate come off the machine.

[0123] During actual application, in response to X > Y and Y < Z, only adjust the power subsystem of the coating system; in response to X > Y and Y ≥ Z, adjust the air floatation subsystem 1 and the power subsystem of the coating system; otherwise, only adjust the air floatation subsystem 1 of the coating system.

[0124] Wherein, X is the maximum value of the distance between the coating head 7 and the substrate within the first time period; Y is the standard deviation of the distance between the coating head 7 and the substrate within the second time period; Z is a preset standard deviation threshold.

[0125] In some embodiments, adjusting the air floatation subsystem 1 of the coating system includes: step SS311 - step SS312.

[0126] Step SS311: Obtain the air pressure values of each region of the air film within a continuous preset time period.

[0127] In application, the air film includes a plurality of second measurement sub-regions arranged in a dot matrix, that is, second detection points. In addition, the second measurement sub-regions correspond one-to-one with the first detection sub-regions.

[0128] In actual application, the air pressure detection component 4 is used to detect the air pressure values of each second measurement sub-region within a continuous preset time period.

[0129] Step SS312: According to the distances between the coating head 7 and different regions of the substrate and the air pressure values of each region of the air film within a continuous preset time period, adjust the air pressure controller and / or the air flow control valve in the air circuit of the air floatation subsystem 1.

[0130] In application, step SS312 includes: step SS3121 - step SS3123.

[0131] Step SS3121: Establish an air film pressure distribution matrix P(x, y, t) according to the air pressure values of each second detection point, establish a distance distribution matrix H(x, y, t) according to the distances between the coating head 7 and the substrate at each first detection point, and establish a reference distribution matrix H0(x, y, t) according to the average value of the distances between the coating head 7 and the substrate at each first detection point. Wherein, x and y are the planar coordinates of the substrate, and t is the detection time.

[0132] Step SS3122: Calculate a pressure-distance coupling coefficient matrix C(x, y, t) using the air film pressure distribution matrix P(x, y, t) and the distance distribution matrix H(x, y, t).

[0133] In application, C(x, y, t) = cov(P(x, y, t), H(x, y, t)) / var(P(x, y, t)), where cov() is the covariance and var() is the variance term.

[0134] Step SS3123: Use the PID control algorithm to adjust the air pressure controller and the air flow control valve of each air circuit in real time, so that the pressure adjustment amount ΔP(x, y, t) = -Kp·C(x, y, t)·ΔH(x, y, t), for example: adjust ΔP corresponding to the air flow control valve. Wherein, Kp is the proportional coefficient and ΔH(x, y, t) is the deviation.

[0135] During application, ΔH(x,y,t) = H (x,y,t) – H0 (x,y,t).

[0136] In some embodiments, adjusting the power subsystem of the coating system includes: step SS321.

[0137] Step SS321: Adjust the adsorption height and / or adsorption duration of the suction cup in the power subsystem according to the distance between the coating head 7 and different regions of the substrate within a continuous preset time period.

[0138] During application, step SS321 includes steps SS3211 - SS3213.

[0139] Step SS3211: Calculate the adsorption height adjustment amount Δh according to the difference Δd between the average value of the distances between the coating head 7 and different regions of the substrate and the average value of the distance between the coating head 7 and the substrate, and the material stiffness coefficient K.

[0140] During application, Δh = K·Δd.

[0141] Step SS3212: Adjust the adsorption duration Δt of the suction cup according to the speed v at which the substrate moves along the coating direction.

[0142] During application, Δt = + k·v ( is the reference duration, and k is the process coefficient).

[0143] Step SS3213: Apply a compensating tension ΔF to the flexible substrate according to the elastic modulus e and thickness a of the substrate.

[0144] During application, ΔF=e·a·Δε. Where Δε is the strain change amount.

[0145] In some embodiments, when simultaneously adjusting the power subsystem and the air-floating subsystem 1 of the coating system, it further includes: step SS331.

[0146] Step SS331: Establish an air-floating - power coupling control model to obtain the optimal values of the adsorption height adjustment amount Δh, the pressure adjustment amount ΔP, the adsorption duration Δt of the suction cup, and the compensating tension ΔF applied to the flexible substrate.

[0147] During application, the air-floating - power coupling control model includes the following formula:

[0148] min∫(w1|Δh|²+w2|ΔP|²+w3|Δt|²+w4|ΔF |²)dt;

[0149] Where w1, w2, w3, and w4 are weight coefficients, and multi-parameter collaborative optimization is achieved through model predictive control (MPC).

[0150] Step SS4: In response to the substrate being stabilized, adjust the distance between the coating head 7 and the substrate according to the distances between the coating head 7 and different regions of the substrate within a continuous preset time period, and enter the coating operation process.

[0151] During application, step SS4 includes: step SS41 - step SS43.

[0152] Step SS41: Calculate the average value of the distance between the coating head 7 and the substrate and the average values of the distances between the coating head 7 and different regions of the substrate according to the distances between the coating head 7 and different regions of the substrate within a continuous preset time period.

[0153] Step SS42: Move the coating head 7 for the first time, using the average value of the distance between the coating head 7 and the substrate as the first reference height, and move the first displacement on one side of the coating head 7 corresponding to different regions of the substrate.

[0154] During application, the first displacement = the average value of the distances between the coating head 7 and different regions of the substrate - the first reference height.

[0155] During actual application, initially eliminate the inclination between the coating head and the substrate.

[0156] Step SS43: Move the coating head 7 for the second time, using the preset spacing as the second reference height, and move the second displacement on one side of the coating head 7 corresponding to different regions of the substrate.

[0157] During application, the second displacement = the first reference height - the second reference height.

[0158] During actual application, match the process spacing and further adjust the coating gap.

[0159] In summary of the above embodiments, the coating system and coating method of the present invention achieve the determination of substrate stability, dynamic adjustment, and precise control of the coating gap during the coating process through a multi-modal collaborative control system. A three-level stability determination model is achieved by integrating time domain (standard deviation), frequency domain (vibration energy), and trend (slope) analysis, reducing the misjudgment rate (e.g., <0.1%). First, globally adjust the stability of the substrate to eliminate the substrate inclination, and then adjust the distance between the coating head and the substrate in two steps, significantly improving the leveling efficiency (e.g., increasing by 50%). By jointly controlling the stability of the substrate through air floating and power, the vibration amplitude of the substrate can be significantly reduced (e.g., reduced by 70%).

[0160] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limitations on the present invention. Without departing from the principles and spirit of the present invention, those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A coating method, characterized in that, Including: Obtain the distances between the coating head (7) and different regions of the substrate within a continuous preset time period; Determine whether the substrate is stable according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period: In response to the instability of the substrate, adjust the air-floating subsystem (1) and the power subsystem of the coating system according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period to make the substrate stable; The power subsystem drives and connects the non-coating area of the substrate to move the substrate in the coating direction in the coating area; Adjusting the power subsystem of the coating system includes: Calculate the adsorption height adjustment amount of the suction cup in the power subsystem according to the difference between the average value of the distances between the coating head and different regions of the substrate and the average value of the distances between the coating head and the substrate, and the material stiffness coefficient; Adjust the adsorption duration of the suction cup according to the moving speed of the substrate in the coating direction; In response to the stability of the substrate, adjust the distance between the coating head (7) and the substrate according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period, and enter the coating operation process; The adjusting the distance between the coating head (7) and the substrate according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period includes: Calculate the average value of the distances between the coating head (7) and the substrate and the average value of the distances between the coating head (7) and different regions of the substrate according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period; Move the coating head (7) for the first time, take the average value of the distances between the coating head (7) and the substrate as the first reference height, and move one side of the coating head (7) corresponding to different regions of the substrate by a first displacement: First displacement = average value of the distances between the coating head (7) and different regions of the substrate - first reference height; Move the coating head (7) for the second time, take the preset spacing as the second reference height, and move one side of the coating head (7) corresponding to different regions of the substrate by a second displacement: Second displacement = first reference height - second reference height.

2. The coating method according to claim 1, characterized in that, The determining whether the substrate is stable according to the distances between the coating head (7) and different regions of the substrate within a continuous preset time period includes: Divide the effective coating area of the substrate into multiple first measurement sub-regions, that is, first detection points, and calculate the standard deviation of the distance data of each first detection point; Perform a fast Fourier transform on the distance data of each first detection point to extract the vibration energy in a preset frequency band; Use the least squares method to fit the distance-time curve and calculate the slope of the distance-time curve; When the standard deviation, vibration energy, and slope satisfy the following formula, the substrate is stable, otherwise the substrate is unstable: α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1 In the formula, α, β, and γ are weight coefficients, and α + β + γ = 1; σ is the standard deviation; σ0 is the preset error threshold; E is the vibration energy; E0 is the preset energy threshold; k is the slope; k0 is the preset slope threshold.

3. The coating method according to claim 1, wherein The air-floating subsystem (1) of the adjustment coating system includes: obtaining the air pressure values of each region of the air film within a continuous preset time period; and regulating the air pressure controller and / or the air flow control valve in the air path of the air-floating subsystem (1) according to the distance between the coating head (7) and different regions of the substrate and the air pressure values of each region of the air film within a continuous preset time period.

4. A coating system, characterized in that, The coating method according to any one of claims 1-3 is implemented based on the coating system, and the coating system includes: An air-floating subsystem (1), which forms an air film in the coating area to make the substrate float on the air film; A distance detection component (2) for detecting the distance between the coating head (7) and the substrate; An air pressure detection component (4) for detecting the air pressure values of each region of the air film; A first adjustment component (3) drivingly connected to the coating head (7) to move the coating head (7) reciprocally along the Z-axis direction; A second adjustment component (5) connected to the air-floating subsystem (1) for regulating the air pressure values of each region of the air film.

5. The coating system according to claim 4, wherein The coating system further includes: A power subsystem drivingly connected to the non-coating area of the substrate to move the substrate in the coating area along the coating direction; wherein the non-coating area is located at the periphery of the substrate.

6. The coating system according to claim 5, characterized in that, The power subsystem includes: multiple groups of suction cup structures, and each group of suction cup structures includes: a first suction cup and a second suction cup; When moving the substrate, at least one of the first suction cups adsorbs on the periphery of one side of the substrate, and at least one of the second suction cups adsorbs on the periphery of the other side of the substrate.

7. The coating system according to claim 6, characterized in that The coating system includes: A third adjustment component that adjusts the adsorption height and / or the adsorption duration of each suction cup according to the distance between the coating head (7) and different regions of the substrate within a continuous preset time period.

8. The coating system according to claim 4, characterized in that, The air-floating subsystem (1) includes: multiple groups of air paths, and each air path is sequentially provided with an air flow inlet, an air flow control valve, and an air flow outlet, and each air flow outlet corresponds to a region of the air film; wherein the air flow inlet is connected to the first outlet of the gas storage tank, and the gas storage tank is provided with an air pressure controller for controlling the air flow pressure value of the first outlet; The distance detection component (2) includes multiple distance sensors for detecting the distances between the coating head (7) and different regions of the substrate; The air pressure detection component (4) includes multiple air pressure sensors for detecting the air pressure values of each region of the air film; The first adjustment component (3) includes two groups of adjustment structures, one group of adjustment structures is arranged on one side of the gantry (6), and the other group of adjustment structures is arranged on the other side of the gantry (6), and the gantry (6) is connected to the coating head (7); The second adjustment component (5) is used to regulate the air pressure controller and / or the air flow control valve in the air path according to the distance between the coating head (7) and different regions of the substrate and the air pressure values of each region of the air film within a continuous preset time period.

9. The coating system according to claim 8, wherein, Each group of the adjustment structures includes: A guide rail slidably connected to the gantry (6); A first motor, the first motor is drivingly connected to the gantry (6), and adjusts the Z-axis coordinate value of the gantry (6) according to the distance between the coating head (7) and different regions of the substrate within a continuous preset time period.

Images