Air floatation drying device and coating equipment

Abstract

The invention discloses an air floatation drying device and coating equipment, the air floatation drying device is used for heating a substrate to dry a perovskite liquid film on the substrate, and the air floatation drying device comprises an air floatation plate and an air supply assembly; a plurality of evenly-distributed air outlets are formed in the surface, facing a base plate, of the air floating plate, the air outlets are used for generating dry airflow to support and heat the base plate, and each air outlet is used for heating the base plate in a unit drying area. The edge area of the unit drying area corresponding to each air outlet is overlapped with the edge area of the unit drying area corresponding to the adjacent air outlet; the air supply assembly is connected with the air outlet and used for supplying dry airflow to the air outlet, the air supply assembly comprises a first heating piece, and the first heating piece is used for heating the dry airflow supplied to the air outlet. The air flotation drying device and the coating equipment are used for improving the drying uniformity of the perovskite liquid film.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell preparation, and in particular to an air flotation drying device and a coating device. Background Art

[0002] In the preparation process of perovskite solar cells, it is necessary to coat a perovskite film on a substrate, and then move the substrate coated with the perovskite film to a drying device to dry the perovskite film, remove the solvent in the perovskite film, and then obtain a perovskite film. In the process of drying the perovskite film, the uniformity of drying at various locations of the perovskite film affects the drying crystallization quality of the perovskite film, and thus affects the performance of the perovskite film.

[0003] The existing method of drying perovskite liquid film mainly uses intermittent VCD (Vacuum Curing Drier) or continuous tunnel furnace and other drying equipment. During drying, the substrate coated with the perovskite liquid film contacts the hot plate in the drying equipment. The hot plate generates heat to heat the substrate, and the heat is transferred to the perovskite liquid film through the substrate to dry the perovskite liquid film. However, when the contact between the substrate and the hot plate is uneven, for example, due to thermal deformation, processing errors, etc., there may be some areas between the substrate and the hot plate that are not fully bonded. At this time, the uniformity of the heat transferred from the hot plate to the substrate is reduced, which in turn leads to a decrease in the uniformity of the drying and crystallization of the perovskite liquid film, affecting the quality of the perovskite film. Summary of the invention

[0004] The object of the present invention is to provide an air flotation drying device and a coating device for improving the drying uniformity of a perovskite liquid film.

[0005] The purpose of the present invention is achieved by the following technical solutions: An air flotation drying device, the air flotation drying device is used to heat a substrate to dry a perovskite liquid film on the substrate, the air flotation drying device comprises: An air flotation plate, wherein a surface of the air flotation plate facing the substrate is provided with a plurality of evenly distributed air outlets, the air outlets are used to generate a dry airflow to support and heat the substrate, each of the air outlets is used to heat the substrate in a unit drying area, and an edge area of ​​the unit drying area corresponding to each air outlet overlaps with an edge area of ​​the unit drying area corresponding to an adjacent air outlet; The air supply component is connected to the air outlet and is used to supply a dry air flow to the air outlet. The air supply component includes a first heating element, and the first heating element is used to heat the dry air flow supplied to the air outlet.

[0006] Preferably, the plurality of air outlets form a plurality of air outlets spaced apart along the second direction, the air outlets include first air outlets and second air outlets alternately arranged, the first air outlets include first air outlets evenly spaced apart along the first direction, the second air outlets include second air outlets evenly spaced apart along the first direction, and the first air outlets and the second air outlets are alternately spaced apart along the first direction and the second direction, respectively; The first direction is perpendicular to the second direction.

[0007] Preferably, the distance between the first air outlet and the adjacent second air outlet along the first direction is the same as the distance between the first air outlet and the adjacent second air outlet along the second direction.

[0008] Preferably, the unit drying area is a circular structure, and the ratio of the diameter of the unit drying area to the distance between adjacent first air outlets along the first direction is 1:(0.7-0.9).

[0009] Preferably, the ratio of the volume of dry air blown out from the air outlet, the air pressure, the distance between the air outlet and the substrate, and the aperture of the air outlet is (20-35): (3.2-5): (40-50): 1; The unit of the drying air volume is m³ / h, the unit of the air pressure is kPa, the unit of the distance between the air outlet and the substrate is μm, and the unit of the aperture of the air outlet is mm.

[0010] Preferably, the spacing between adjacent first air outlets along the first direction is 100-150 mm, and the diameter of the unit drying area is 120-210 mm; The drying air volume is 70-150 m³ / h, the air pressure is 10-25 kPa, the aperture of the air outlet is 2-8 mm, and the distance between the air outlet and the substrate is 100 μm-200 μm.

[0011] Preferably, the temperature of the dry air flow generated by the air outlet is 50°~70°, the air flotation drying device dries the perovskite liquid film for 10~30s, and the temperature of the dry air flow is inversely proportional to the drying time of the perovskite liquid film.

[0012] Preferably, the air flotation plate is provided with a second heating element and a second temperature sensor, and the second heating element is used to perform secondary heating on the dry airflow provided by the self-supply assembly; the temperature of the gas after the first heating by the first heating element is 0.85 to 0.95 times the required temperature of the dry airflow, and the temperature of the gas after the second heating by the second heating element reaches the required temperature of the dry airflow; The air supply assembly includes a first temperature sensor, which is used to detect the gas temperature in the air supply assembly, and the second temperature sensor is used to detect the gas temperature in the air floating plate. The heating power of the first heating element and the second heating element is adjusted according to the temperature data detected by the first temperature sensor and the second temperature sensor.

[0013] Preferably, the air supply assembly comprises an air supply fan and an air distribution block, the first heating element is arranged on the air distribution block, the air supply fan supplies airflow to the air distribution block, and the gas in the air distribution block flows to the air floating plate after being heated by the first heating element; Among them, the gas distribution block is also provided with a pressure sensor for detecting the gas pressure in the gas distribution block, and an air supply pressure reducing valve and an air supply ball valve are arranged between the gas distribution block and the air supply fan. The air supply pressure reducing valve is used to reduce and stabilize the pressure of the air flow flowing to the gas distribution block, and the air supply ball valve is used to control the connection between the gas distribution block and the air supply fan.

[0014] A coating device, comprising: A coating device, used for coating a perovskite liquid film on the surface of a substrate; Any of the above-mentioned air flotation drying devices, used for heating the substrate to dry the perovskite liquid film on the substrate; A transfer device, used for transferring the substrate coated by the coating device to the air flotation drying device; The moving speed of the substrate on the air-floating drying device corresponds to the speed at which the substrate is coated on the coating device, so that the substrate is continuously coated and dried on the coating device and the air-floating drying device.

[0015] Compared with the prior art, the beneficial effects of the present invention include at least: By adopting the air flotation drying method, the substrate is supported by the air flow, and the substrate does not need to be in direct contact with the heating component, thereby preventing uneven contact between the substrate and the heating component from affecting the drying effect of the perovskite liquid film, thereby improving the drying uniformity of the perovskite liquid film; by overlapping the edge area of ​​the unit drying area corresponding to the air outlet with the edge area of ​​the unit drying area corresponding to the adjacent air outlet, the drying effect of the edge position of the unit drying area can be enhanced, effectively reducing the difference in drying effect between the edge area and the center area of ​​the unit drying area, thereby improving the uniformity of substrate drying. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of an air flotation drying device according to an embodiment of the present invention; Figure 2 It is a partial structural schematic diagram of an air flotation drying device according to an embodiment of the present invention; Figure 3is a schematic structural diagram of an air floating plate according to an embodiment of the present invention; Figure 4 is a schematic diagram of an air flotation plate and a unit drying area according to an embodiment of the present invention; Figure 5 is a two-dimensional function diagram of the distance between the air outlet and the substrate and the bearing capacity according to an embodiment of the present invention; Figure 6 It is a schematic structural diagram of a coating device according to an embodiment of the present invention.

[0017] In the figure: 100, air flotation drying device; 1, air flotation plate; 11, air outlet; 11a, first air outlet; 11b, second air outlet; 12, second heating element; 13, second temperature sensor; 2, air supply assembly; 21, air supply fan; 211, air supply pipeline; 212, air supply pressure reducing valve; 213, air supply ball valve; 214, safety pressure relief valve; 22, air distribution block; 221, first heating element; 222, air distribution pipeline; 223, first temperature sensor; 224, pressure sensor; 200, coating device; 300, substrate. DETAILED DESCRIPTION

[0018] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0019] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0020] like Figures 1 to 4 As shown, the present invention provides an air flotation drying device 100 for drying a perovskite liquid film on a substrate 300. The substrate 300 may be a glass substrate 300. The air flotation drying device 100 includes an air flotation plate 1 and an air supply assembly 2 connected to the air flotation plate 1.

[0021] Reference Figure 2 and Figure 4The air flotation plate 1 is provided with a plurality of air outlets 11 on one side facing the substrate 300, each of which can be connected to the air supply assembly 2, and each of which can blow a dry airflow toward the substrate 300 to support and heat the substrate 300, so as to dry the perovskite liquid film on the substrate 300. By adopting the air flotation drying method, the substrate 300 is supported by the airflow, and the substrate 300 does not need to be in direct contact with the heating component, so as to prevent the uneven contact between the substrate 300 and the heating component from affecting the drying effect of the perovskite liquid film.

[0022] Among them, the temperature of the gas blown toward the substrate 300 when flotation drying the perovskite liquid film can be 50°~70°. When the gas temperature is high, the time for drying the perovskite liquid film can be reduced. When the gas temperature is low, the time for drying the perovskite liquid film needs to be increased. Specifically, when the moving distance of the substrate 300 on the flotation drying device 100 remains unchanged, when the moving speed of the substrate 300 is fast, the temperature of the drying airflow can be increased. When the moving speed of the substrate 300 is slow, the temperature of the drying airflow can be reduced. In the present application, the time for drying the perovskite liquid film can be specifically 10~30s.

[0023] Reference Figure 5 When the substrate 300 is supported by air floating, as the distance h between the air outlet 11 and the substrate 300 increases, the bearing capacity of the dry airflow blown out of the air outlet 11 on the substrate 300 decreases; conversely, as the distance h between the air outlet 11 and the substrate 300 decreases, the bearing capacity of the dry airflow blown out of the air outlet 11 on the substrate 300 increases. However, when the distance h between the air outlet 11 and the substrate 300 is small, the area of ​​the substrate 300 that can be dried by each air outlet 11 decreases. At this time, more air outlets 11 need to be set to ensure the drying effect, resulting in increased costs. In order to ensure the support effect on the substrate 300 and even out the cost, the distance h between the air outlet 11 and the substrate 300 can be set to 100μm~200μm.

[0024] When the distance h between the air outlet 11 and the substrate 300 is less than 100 μm, the bearing capacity that the dry airflow blown out from the air outlet 11 can generate on the substrate 300 is low and may not meet the demand; and when the distance h between the air outlet 11 and the substrate 300 is greater than 200 μm, the increase in the bearing capacity that the dry airflow blown out from the air outlet 11 can generate on the substrate 300 is small, and the demand for the number of air outlets 11 will increase, thereby increasing costs.

[0025] Reference Figure 1The air supply assembly 2 may include an air supply fan 21 and an air distribution block 22. The air supply fan 21 is connected to the air distribution block 22 through an air supply pipeline 211 and supplies airflow into the air distribution block 22. The air distribution block 22 may be provided with a first heating element 221, and the first heating element 221 is used to heat the airflow provided by the air supply fan 21; the air distribution block 22 may be connected to the plurality of air outlets 11 through the air distribution pipeline 222 to supply the airflow heated by the first heating element 221 to the plurality of air outlets 11. The first heating element 221 may be an existing heating component with adjustable power. The air distribution block 22 may be provided with a plurality of air outlets, and the air distribution pipeline 222 may also be provided with a plurality of air outlets, and the plurality of air outlets, the plurality of air distribution pipelines 222, and the plurality of air outlets 11 are connected one-to-one, that is, each outlet gas is connected to the corresponding air outlet 11 through an air distribution pipeline 222, so that the air outlet 11 can receive the airflow provided by the air distribution block 22; or, the air distribution pipeline 222 includes a main pipeline connected to the air distribution block and a plurality of branch pipelines connected to the main pipeline, and each branch pipeline is connected to an air outlet 11, so that the air outlet 11 can receive the airflow provided by the air distribution block 22.

[0026] In order to ensure that the gas distribution block 22 can supply the gas distribution pipeline 222 with a gas flow whose temperature and pressure meet the requirements, the gas distribution block 22 can be provided with a first temperature sensor 223 and a pressure sensor 224. The first temperature sensor 223 is used to detect the gas temperature in the gas distribution block 22, and the pressure sensor 224 is used to detect the gas pressure in the gas distribution block 22. When the first temperature sensor 223 detects that the gas temperature in the gas distribution block 22 is lower than the required temperature, the power of the first heating element 221 can be increased to increase the heating effect of the first heating element 221, thereby increasing the gas temperature in the gas distribution block 22; conversely, when the first temperature sensor 223 detects that the gas temperature in the gas distribution block 22 is higher than the required temperature, the power of the first heating element 221 can be reduced to reduce the heating effect of the first heating element 221, thereby reducing the gas temperature in the gas distribution block 22. When the pressure sensor 224 detects that the gas pressure in the gas distribution block 22 is lower than the required pressure, the gas pressure flowing from the gas supply pipeline 211 to the gas distribution block 22 can be increased to increase the gas pressure in the gas distribution block 22; conversely, when the pressure sensor 224 detects that the gas pressure in the gas distribution block 22 is higher than the required pressure, the gas pressure flowing from the gas supply pipeline 211 to the gas distribution block 22 can be reduced to reduce the gas pressure in the gas distribution block 22.

[0027] Among them, the required temperature and required pressure of the gas in the gas distribution block 22 can be specific values ​​or a certain range. When the temperature and pressure of the gas in the gas distribution block 22 reach the specific value or are within a certain range, the airflow supplied by the gas distribution block 22 toward the air outlet 11 can meet the drying requirements.

[0028] Before air flotation drying, the gas temperature and pressure in the gas distribution block 22 can be adjusted by the data detected by the first temperature sensor 223 and the pressure sensor 224, so that the gas temperature and pressure in the gas distribution block 22 meet the requirements. During the air flotation drying process, the first temperature sensor 223 and the pressure sensor 224 can keep detecting the gas in the gas distribution block 22, and adjust the temperature and pressure of the gas in the gas distribution block 22 according to the values ​​fed back by the first temperature sensor 223 and the pressure sensor 224, so as to ensure that the gas distribution block 22 always supplies airflow with a temperature and pressure that meet the requirements during the air flotation drying process.

[0029] In order to facilitate the control of the on-off and pressure of the gas flowing into the gas distribution block 22, an air supply pressure reducing valve 212 and an air supply ball valve 213 may be provided on the air supply pipeline 211. The air supply pressure reducing valve 212 and the air supply ball valve 213 are located between the air supply fan 21 and the gas distribution block 22, and the air supply pressure reducing valve 212 and the air supply ball valve 213 may be arranged in series. The air supply pressure reducing valve 212 is used to reduce the air flow pressure generated by the air supply fan 21 and stabilize the air flow. The air supply ball valve 213 is used to control the on-off of the air supply pipeline 211. When it is necessary to increase the pressure of the gas flowing from the air supply pipeline 211 into the gas distribution block 22, the power of the air supply fan 21 can be increased and / or the pressure reducing effect of the air supply pressure reducing valve 212 can be reduced; when it is necessary to reduce the pressure of the gas flowing from the air supply pipeline 211 into the gas distribution block 22, the power of the air supply fan 21 can be reduced and / or the pressure reducing effect of the air supply pressure reducing valve 212 can be increased. In addition, the air supply fan 21 can also be connected to a safety pressure relief valve 214. When the gas pressure at the air supply fan 21 is higher than a threshold value, the safety pressure relief valve 214 can be opened to discharge the high-pressure gas, thereby achieving a pressure relief effect and preventing equipment damage caused by excessive gas pressure.

[0030] The airflow flowing out of the gas distribution block 22 can flow out from the air outlet 11 without the second heating to perform air flotation heating on the perovskite liquid film on the substrate 300. At this time, the required temperature of the gas in the gas distribution block 22 can be the temperature for drying the perovskite liquid film, or, considering the heat scattering of the airflow in the gas distribution pipeline 222, the required temperature of the gas in the gas distribution block 22 can be slightly higher than the temperature for drying the perovskite liquid film; for example, when the perovskite liquid film is dried by air flotation, the gas temperature that needs to be blown to the substrate 300 is 50°~70°, and the required temperature of the gas in the gas distribution block 22 can be 52°~72°.

[0031] Alternatively, in order to make the temperature of the air flow flowing to the substrate 300 more accurate, the air flow flowing out from the air distribution block 22 can be heated twice and then flow out from the air outlet 11. Specifically, a second heating element 12 and a second temperature sensor 13 can be provided in the air floating plate 1. After the air flow flows into the air floating plate 1 from the air distribution pipeline 222, the second heating element 12 can perform secondary heating on the air flow, and the air flow heated by the second heating element 12 is blown out from the air outlet 11. The second temperature sensor 13 is used to detect the temperature of the gas in the air floating plate 1. When the second temperature sensor 13 detects that the temperature of the gas in the air floating plate 1 is lower than the drying wind temperature requirement, the power of the second heating element 12 can be increased to increase the temperature in the air floating plate 1; conversely, when the second temperature sensor 13 detects that the temperature of the gas in the air floating plate 1 is higher than the drying wind temperature requirement, the power of the second heating element 12 can be reduced to reduce the temperature in the air floating plate 1. The drying wind temperature requirement is the air flow temperature requirement required to blow toward the substrate 300 when drying the perovskite liquid film. The temperature of the gas after the first heating by the first heating element 221 is 0.85 to 0.95 times the required temperature of the dry air flow, and the temperature of the gas after the second heating by the second heating element 12 reaches the required temperature of the dry air flow.

[0032] Among them, a plurality of second heating elements 12 can be provided, and the plurality of second heating elements 12 are located below the plurality of air outlets 11, and the plurality of second heating elements 12 are evenly distributed. The plurality of second heating elements 12 can be used together to heat the temperature inside the air flotation plate 1, so that the gas temperature inside the air flotation plate 1 is uniform, and the gas temperature below the plurality of air outlets 11 is basically the same. Therefore, the air flow temperature blown out from the plurality of air outlets 11 is the same, and then the air flow temperature blown to each part of the substrate 300 can be made the same, thereby improving the drying and crystallization quality of the perovskite liquid film. A plurality of second temperature sensors 13 can be provided, and each second temperature sensor 13 can be arranged adjacent to a corresponding second heating element 12, and the second temperature sensor 13 is used to detect whether the corresponding second heating element 12 heats the gas to the drying wind temperature requirement.

[0033] Before air flotation drying, the gas temperature in the air flotation plate 1 can be adjusted by the data detected by the second temperature sensor 13, so that the gas temperature in the air flotation plate 1 meets the drying wind temperature requirement. During the air flotation drying process, the second temperature sensor 13 can keep detecting the gas in the air flotation plate 1, and adjust the gas temperature in the air flotation plate 1 according to the value fed back by the second temperature sensor 13, so as to ensure that the gas temperature in the air flotation plate 1 always meets the drying wind temperature requirement during the air flotation drying process.

[0034] For example, when the perovskite liquid film is dried by air flotation, the temperature of the gas blown to the substrate 300 needs to be 50°~70°, that is, the drying air temperature needs to be 50°~70°. At this time, the required temperature of the gas in the gas distribution block 22 can be 47°~67°, and then the gas in the gas distribution block 22 flows into the air flotation plate 1 and is heated by the second heating element 12 to a temperature of 50°~70°, and then the gas is blown out from the air outlet 11.

[0035] When the gas is blown out from the air outlet 11 after being heated only once in the gas distribution block 22, the heated gas needs to flow a certain distance in the gas distribution pipeline 222 before it can be blown out from the air outlet 11. The gas is prone to heat loss during the flow of the gas distribution pipeline 222, resulting in a decrease in the gas temperature at the air outlet 11, and the heat loss of the gas when it flows in the gas distribution pipeline 222 is difficult to control. Therefore, it is difficult to accurately control the gas temperature at the air outlet 11. When the gas is heated twice, the gas flows out from the air outlet 11 after being heated in the air floating plate 1. The flow path of the gas flowing out of the air outlet 11 after the secondary heating is short, and the air flow temperature flowing out of the air outlet 11 is basically the same as the gas temperature after the secondary heating, so that the air flow temperature at the air outlet 11 can be accurately controlled; and the second heating element 12 only needs to heat the gas to a small temperature value, which can achieve rapid temperature rise of the gas, and can achieve that the air flow is raised to meet the dry air temperature requirement after passing through the second heating element 12.

[0036] When the dry air is blown toward the substrate 300 through the air outlet 11, the dry air continuously diffuses obliquely outwards during the movement from the air outlet 11 toward the substrate 300, and when the dry air contacts the substrate 300, it also diffuses horizontally along the lower surface of the substrate 300. Therefore, the dry air blown out from each air outlet 11 can contact a certain area of ​​the substrate 300 and transfer heat to the area, so that the heat can be transferred from the substrate 300 to the perovskite liquid film above the substrate 300, and the area of ​​the substrate 300 heated by the dry air blown out from each air outlet 11 can be recorded as a unit drying area. Since the dry air diffuses and contacts the substrate 300 within a unit drying area after being blown out from the air outlet 11, within a unit drying area, the drying effect in the center area is better than that in the edge area. Refer to Figure 4 In order to improve the uniformity of drying the substrate 300, the dry air blown out by the multiple air outlets 11 will dry the substrate 300 in multiple unit drying areas, and the edge areas of the multiple unit drying areas can overlap with each other. Therefore, even if the drying effect of the edge area in a unit drying area is weaker than that of the central area, the overlapping effect of the edge areas of adjacent unit drying areas increases the drying effect of the edge area, effectively reducing the difference in drying effect between the edge area and the central area, and improving the uniformity of drying the substrate 300. Figure 4In the figure, the light grey area is the non-overlapping part of the unit drying area, and the dark grey area is the overlapping part of the unit drying area.

[0037] Specifically, refer to Figure 3 and Figure 4 The air outlet 11 is a circular hole, and the dry air blown out of one air outlet 11 can dry a circular unit drying area with a diameter of D on the substrate 300. The edges of multiple circular unit drying areas overlap. Multiple air outlets 11 can be staggered, for example, multiple air outlets 11 form multiple air outlets evenly spaced along the second direction, and each air outlet includes multiple air outlets 11 evenly spaced along the first direction. The multiple air outlets can be alternately arranged first air outlets and second air outlets, the first air outlet includes multiple first air outlets 11a evenly spaced along the first direction, and the second air outlet includes multiple second air outlets 11b evenly spaced along the second direction. In the first direction, the first air outlet 11a and the second air outlet 11b are alternately arranged, and the spacing between adjacent first air outlets 11a is the same as the spacing between adjacent second air outlets 11b, the second air outlet 11b may be located at the center between the first air outlets 11a adjacent to the second air outlet 11b, and the first air outlet 11a may be located at the center between the second air outlets 11b adjacent to the first air outlet 11a. In the second direction, the first air outlet 11a and the second air outlet 11b are alternately arranged, and the spacing between adjacent first air outlets 11a is the same as the spacing between adjacent second air outlets 11b, the second air outlet 11b may be located at the center between the first air outlets 11a adjacent to the second air outlet 11b, and the first air outlet 11a may be located at the center between the second air outlets 11b adjacent to the first air outlet 11a. Among them, the spacing between adjacent first air outlets 11a along the first direction is the same as the spacing between adjacent first air outlets 11a along the second direction, and both are recorded as spacing m, and the spacing between adjacent second air outlets 11b along the first direction is the same as the spacing between adjacent second air outlets 11b along the second direction, and both are recorded as spacing m. Therefore, the spacing between the first air outlet 11a and the adjacent second air outlet 11b along the first direction is the same as the spacing between the first air outlet 11a and the adjacent second air outlet 11b along the second direction. The first direction is perpendicular to the second direction, and the first direction can be specifically the length direction of the air floating plate 1, and the second direction can be specifically the width direction of the air floating plate 1.

[0038] As the spacing between the air outlets 11 decreases, the density of the air outlets 11 increases, and the uniformity of the drying wind blown from the air flotation plate 1 to various locations of the substrate 300 can be gradually increased. However, as the density of the air outlets 11 increases, the processing difficulty and processing cost of the air flotation plate 1 increase, and more air outlets 11 will also increase the use cost of the air flotation drying device 100. As the spacing between the air outlets 11 increases, the density of the air outlets 11 decreases, and the uniformity of the drying wind blown from the air flotation plate 1 to various locations of the substrate 300 can be gradually reduced. In order to ensure the uniformity of the drying wind blown to the substrate 300 and balance the cost, the ratio between the diameter D of the unit drying area and the spacing m is 1: (0.7~0.9). Among them, the spacing m can be specifically 100~150mm, and the diameter D of the unit drying area can be specifically 120~210mm.

[0039] When the spacing m is greater than 0.9 times the diameter, the uniformity of the dry wind blown toward the substrate 300 may not meet the requirements; and when the spacing m is less than 0.7 times the diameter D, the turbulence of the dry wind blown toward the substrate 300 increases. At this time, further reducing the spacing m will have little effect on improving the uniformity of the dry wind and will increase costs.

[0040] The diameter D of the unit drying area is mainly determined by the dry air volume q blown out from the air outlet 11, the air pressure p, the spacing h between the air outlet 11 and the substrate 300, and the aperture d of the air outlet 11. In the present application, the ratio of the dry air volume q, the air pressure p, the spacing h, and the aperture d can be (20~35): (3.2~5): (40~50): 1. The unit of the dry air volume q is m³ / h, the unit of the air pressure p is kPa, the unit of the spacing h is μm, and the unit of the aperture d is mm. Specifically, the dry air volume q can be 70~150m³ / h, the air pressure p can be 10~25kPa, and the aperture d can be 2~8mm.

[0041] The multiple unit drying areas formed by the multiple air outlets 11 constitute the drying area of ​​the air flotation drying device 100. The area of ​​the drying area of ​​the air flotation drying device 100 is larger than the area of ​​the substrate 300, and the air flotation drying device 100 can be used to dry one or more substrates 300 at the same time. When the air flotation drying device 100 can dry multiple substrates 300 at the same time, the area of ​​the drying area of ​​the air flotation drying device 100 is larger than the sum of the areas of the multiple substrates 300. Among them, the area of ​​the substrate 300 can be 600 mm×1200 mm~1200 mm×2400 mm. In the present application, the air flotation drying device 100 can also transport the substrate 300 in an air flotation manner. When the substrate 300 is placed on the air flotation drying device 100, the substrate 300 is supported and driven by the dry gas provided by the air flotation drying device 100. During the movement of the substrate 300, heat is exchanged with the dry gas to heat the perovskite liquid film on the surface of the substrate 300, thereby drying the perovskite liquid film.

[0042] Reference Figure 6 The present invention also provides a coating device, including a coating device 200 and the above-mentioned air flotation drying device 100, and may also include a transfer device.

[0043] The coating device 200 is used to coat the surface of the substrate 300 to form a perovskite liquid film. The substrate 300 coated by the coating device 200 is moved to the air flotation drying device 100 for drying through the transfer device. The transfer device can be a transmission device such as a suction cup, a roller, a conveyor belt, etc.

[0044] The first end of the air-floating drying device 100 is adjacent to the coating device 200, and the first end of the air-floating drying device 100 is used to finish the coated substrate 300. The substrate 300 moves from the first end of the air-floating drying device 100 to the second end in an air-floating driven manner. The second end of the air-floating drying device 100 is an end away from the coating device 200. During the movement of the substrate 300 from the first end of the air-floating drying device 100 to the second end, the substrate 300 is always supported by the dry airflow and generates heat exchange with the dry airflow, so that the dry airflow can heat the substrate 300 and dry the perovskite liquid film. Among them, the substrate 300 can move along the first direction, and the first end and the second end of the air-floating drying device 100 are opposite ends along the first direction.

[0045] The moving speed of the substrate 300 on the air flotation drying device 100 can correspond to the coating speed of the substrate 300 on the coating device 200, so that the substrate 300 can be continuously coated and dried on the coating device 200 and the air flotation drying device 100. Specifically, after one substrate 300 is coated on the coating device 200, the previous substrate 300 can be moved a certain distance on the air flotation drying device 100 and a space for receiving the substrate 300 is left at the first end of the air flotation drying device 100. Therefore, after the coating of the substrate 300 is completed, it can be directly moved to the air flotation drying device 100 for drying without waiting for the previous substrate 300 to be dried, so as to achieve uninterrupted processing, improve process beat, and improve efficiency.

[0046] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. An air flotation drying device, characterized in that: The air flotation drying device is used to heat the substrate to dry the perovskite liquid film on the substrate, and the air flotation drying device includes: An air flotation plate (1), wherein a surface of the air flotation plate (1) facing a substrate is provided with a plurality of evenly distributed air outlets (11), the air outlets (11) being used to generate a dry airflow to support and heat the substrate, each of the air outlets (11) being used to heat the substrate in a unit drying area, and an edge area of ​​the unit drying area corresponding to each of the air outlets (11) overlaps with an edge area of ​​the unit drying area corresponding to an adjacent air outlet (11); An air supply component (2) is connected to the air outlet (11) and is used to supply a dry air flow to the air outlet (11), wherein the air supply component (2) comprises a first heating element (221), and the first heating element (221) is used to heat the dry air flow supplied to the air outlet (11).

2. The air flotation drying device according to claim 1, characterized in that: A plurality of air outlets (11) form a plurality of air outlets spaced apart along a second direction, the air outlets comprising first air outlets and second air outlets alternately arranged, the first air outlets comprising first air outlets (11a) evenly spaced apart along the first direction, the second air outlets comprising second air outlets (11b) evenly spaced apart along the first direction, the first air outlets (11a) and the second air outlets (11b) being alternately spaced apart along the first direction and the second direction respectively; The first direction is perpendicular to the second direction.

3. The air flotation drying device according to claim 2, characterized in that: The spacing between the first air outlet (11a) and the adjacent second air outlet (11b) along the first direction is the same as the spacing between the first air outlet (11a) and the adjacent second air outlet (11b) along the second direction.

4. The air flotation drying device according to claim 3, characterized in that: The unit drying area is a circular structure, and the ratio of the diameter of the unit drying area to the distance between adjacent first air outlets (11a) along the first direction is 1:(0.7-0.9).

5. The air flotation drying device according to claim 4, characterized in that: The ratio of the volume and pressure of the drying air blown out from the air outlet (11), the distance between the air outlet (11) and the substrate, and the aperture of the air outlet (11) is (20-35): (3.2-5): (40-50): 1; The unit of the drying air volume is m³ / h, the unit of the air pressure is kPa, the unit of the distance between the air outlet (11) and the substrate is μm, and the unit of the aperture of the air outlet (11) is mm.

6. The air flotation drying device according to claim 5, characterized in that: The spacing between adjacent first air outlets (11a) along the first direction is 100-150 mm, and the diameter of the unit drying area is 120-210 mm; The drying air volume is 70-150 m³ / h, the air pressure is 10-25 kPa, the aperture of the air outlet (11) is 2-8 mm, and the distance between the air outlet (11) and the substrate is 100 μm-200 μm.

7. The air flotation drying device according to claim 1, characterized in that: The temperature of the drying airflow generated by the air outlet (11) is 50° to 70°, the drying time of the perovskite liquid film by the air flotation drying device is 10 to 30 seconds, and the temperature of the drying airflow is inversely proportional to the drying time of the perovskite liquid film.

8. The air flotation drying device according to claim 1, characterized in that: The air flotation plate (1) is provided with a second heating element (12) and a second temperature sensor (13); the second heating element (12) is used to perform secondary heating on the dry airflow provided by the air supply component (2); the temperature of the gas after primary heating by the first heating element (221) is 0.85 to 0.95 times the required temperature of the dry airflow, and the temperature of the gas after secondary heating by the second heating element (12) reaches the required temperature of the dry airflow; The air supply component (2) comprises a first temperature sensor (223), the first temperature sensor (223) being used to detect the temperature of the gas in the air supply component (2), and the second temperature sensor (13) being used to detect the temperature of the gas in the air floating plate (1), and the heating power of the first heating element (221) and the second heating element (12) being adjusted by temperature data detected by the first temperature sensor (223) and the second temperature sensor (13).

9. The air flotation drying device according to claim 1, characterized in that: The air supply assembly (2) comprises an air supply fan (21) and an air distribution block (22); the first heating element (221) is arranged on the air distribution block (22); the air supply fan (21) supplies airflow to the air distribution block (22); the air in the air distribution block (22) is heated by the first heating element (221) and then flows toward the air floating plate (1); The gas distribution block (22) is further provided with a pressure sensor (224) for detecting the gas pressure in the gas distribution block (22); a gas supply pressure reducing valve (212) and a gas supply ball valve (213) are provided between the gas distribution block (22) and the gas supply fan (21); the gas supply pressure reducing valve (212) is used to reduce and stabilize the pressure of the gas flow to the gas distribution block (22); and the gas supply ball valve (213) is used to control the on-off between the gas distribution block (22) and the gas supply fan (21).

10. A coating device, characterized in that: include: A coating device (200), used for coating a substrate surface to form a perovskite liquid film; The air flotation drying device (100) according to any one of claims 1 to 9, used for heating a substrate to dry a perovskite liquid film on the substrate; A transfer device, used for transferring the substrate coated by the coating device (200) to the air flotation drying device; The moving speed of the substrate on the air flotation drying device (100) corresponds to the speed at which the substrate is coated on the coating device (200), so that the substrate is continuously coated and dried on the coating device (200) and the air flotation drying device (100).

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