Device and method for cleaning barrel-shaped part

Abstract

The invention relates to a device and method for cleaning a barrel-shaped part. The device comprises: a housing; the first spray head mechanism, the second spray head mechanism and the bearing mechanism are arranged in the shell; the bearing mechanism can lift and rotate; the first nozzle mechanism and the second nozzle mechanism are respectively arranged outside and inside the barrel-shaped component; the method comprises the steps that the barrel-shaped component is placed in the shell and placed on the bearing mechanism; the first nozzle mechanism and the second nozzle mechanism spray cleaning liquid to pre-flush the barrel-shaped part; ionized water is sprayed out through the first spray head mechanism and the second spray head mechanism to conduct secondary flushing on the barrel-shaped component. The first spray head mechanism and the second spray head mechanism spray drying gas to dry the barrel-shaped component; and when the pre-flushing, the secondary flushing and the drying treatment are executed, the bearing mechanism is lifted and / or rotated according to a preset mode. By means of the device and method, the barrel-shaped component in the semiconductor field can be cleaned more efficiently, safely and effectively, material consumption can be reduced, and online drying treatment is achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of barrel-shaped component cleaning, and in particular relates to a device and a method for cleaning barrel-shaped components. Background Art

[0002] During use, semiconductor production equipment parts are easily affected by pollutants such as dust, particles, organic residues, and deposited coatings during the process. These pollutants will significantly reduce the performance and stability of the equipment, thereby affecting the production process, causing a decrease in yield, and even causing equipment failure. Therefore, it is very important to clean the parts regularly, especially the barrel-shaped parts such as reaction tubes and process chambers, which are more difficult to clean.

[0003] The key to cleaning the above-mentioned barrel-shaped parts is to thoroughly remove the pollutants on the inner and outer surfaces of the barrel-shaped parts without causing excessive damage to the barrel-shaped parts. In the prior art, common cleaning methods include horizontal cleaning and vertical cleaning. In horizontal cleaning, the barrel-shaped parts are directly immersed in a water tank for pickling. This method has low cleaning efficiency, large solution consumption, high material cost, and requires long-term soaking, which will cause excessive etching of the barrel-shaped parts, accelerate the loss of the barrel-shaped parts, and affect their service life. In vertical cleaning, the barrel-shaped parts are directly suspended for acid washing, but the cleaning coverage of the inside of the barrel-shaped parts is poor, and the inside of the barrel-shaped parts cannot be fully and evenly cleaned, and the cleaning efficiency is low. In addition, regardless of horizontal or vertical cleaning, after cleaning, the barrel-shaped parts cannot be completely dried online, and the barrel-shaped parts need to be transferred to a special drying and baking equipment for drying, which not only prolongs the processing time, but also increases the equipment cost.

[0004] Therefore, it is hoped that various barrel-shaped parts used in semiconductor production equipment can be cleaned in a more efficient, safer and more effective manner, and that online drying of the barrel-shaped parts can be achieved. Summary of the invention

[0005] The object of the present invention is to provide a device and method for cleaning barrel-shaped parts, at least to solve the problems of low cleaning efficiency, poor cleaning effect and inability to completely dry the barrel-shaped parts online in the prior art for cleaning and drying the barrel-shaped parts in the semiconductor field.

[0006] To achieve the above-mentioned object, the present invention provides a device for cleaning a barrel-shaped component, comprising: a housing; and a first nozzle mechanism, a second nozzle mechanism and a bearing mechanism arranged in the housing; The bearing mechanism is used to install the barrel-shaped component and is configured to be able to rise and fall and rotate; The first nozzle mechanism is arranged outside the barrel-shaped component; the first nozzle mechanism comprises a first nozzle, a side of the first nozzle is provided with a plurality of first spray holes, the plurality of first spray holes are distributed in the circumferential direction and / or the vertical direction, and at least part of the first spray holes sprays in the horizontal direction; The second nozzle mechanism is arranged inside the barrel-shaped component; the second nozzle mechanism includes a second nozzle, and a plurality of second spray holes are arranged on the side of the second nozzle. The plurality of second spray holes are distributed in the circumferential direction and the vertical direction, and can spray in three directions respectively: horizontally, obliquely upward, and obliquely downward.

[0007] As an optional embodiment, the device also includes a first heating device and a second heating device disposed in the outer shell; the first heating device is used to be disposed outside the barrel-shaped component to heat the first nozzle mechanism; the second heating device is used to be disposed inside the barrel-shaped component to heat the second nozzle mechanism.

[0008] As an optional embodiment, the first nozzle mechanism also includes a first main supply pipe connected to the first nozzle; the first heating device is installed on the outer wall of the first main supply pipe, and is used to heat the first main supply pipe by electromagnetic heating; and / or, the second nozzle mechanism also includes a second main supply pipe connected to the second nozzle; the second heating device is installed on the outer wall of the second main supply pipe, and is used to heat the second main supply pipe by electromagnetic heating.

[0009] As an optional embodiment, the first nozzle has multiple adjacent side surfaces, and the first nozzle is only provided with multiple first spray holes on the side surface facing the barrel-shaped part, and the multiple first spray holes are distributed in the circumferential direction and the vertical direction; and / or, the multiple second spray holes on the side surface of the second nozzle are arranged in a circle along the circumferential direction, and at least three groups of second spray holes are arranged in sequence from top to bottom along the vertical direction, and at least one group of the second spray holes in the upper position of the at least three groups of the second spray holes sprays obliquely upward, at least one group of the second spray holes in the middle position sprays in the horizontal direction, and at least one group of the second spray holes in the lower position sprays obliquely downward.

[0010] As an optional embodiment, there are multiple first nozzle mechanisms, and the multiple first nozzle mechanisms are evenly distributed circumferentially around the rotation axis of the supporting mechanism; or, there are three first nozzle mechanisms, and the three first nozzle mechanisms are evenly distributed circumferentially around the rotation axis of the supporting mechanism.

[0011] As an optional embodiment, the supporting mechanism includes a loading platform, a rotating table and a telescopic device; the loading platform is used to install the barrel-shaped component; the loading platform is installed on the rotating table through the telescopic device; the telescopic device is used to drive the loading platform to rise or fall; the rotating table can be driven to rotate so that the loading platform rotates along with the rotation of the rotating table; the loading platform is provided with a through hole for the second nozzle mechanism to pass through.

[0012] As an optional embodiment, the telescopic device includes at least three liftable connecting rods, which are arranged between the loading platform and the rotating table, so as to raise or lower the loading platform by synchronously extending and retracting at least three connecting rods; there is a hollow area between adjacent connecting rods, and the second nozzle mechanism passes through the hollow area.

[0013] As an optional implementation, at least one second spray hole is provided on the top of the second spray head, and the at least one second spray hole on the top of the second spray head sprays vertically upward.

[0014] In addition, based on the same inventive concept, the present invention also provides a method for cleaning a barrel-shaped component, which is performed based on any one of the apparatuses for cleaning a barrel-shaped component, and the method comprises the following steps: Step S01: placing the barrel-shaped component into the housing and placing it on the supporting mechanism; Step S02: Pre-rinsing the barrel-shaped component by spraying cleaning liquid through the first nozzle mechanism and the second nozzle mechanism; Step S03: spraying deionized water through the first nozzle mechanism and the second nozzle mechanism to perform secondary washing on the barrel-shaped component; Step S04: drying the barrel-shaped component by spraying dry gas through the first nozzle mechanism and the second nozzle mechanism; Step S05: while performing the pre-rinsing, secondary rinsing and drying processes, the carrying mechanism is lifted and / or rotated in a predetermined manner.

[0015] As an optional implementation, the method further satisfies at least one of the following conditions: In the step S05, while performing the pre-rinsing, secondary rinsing and drying processes, the carrying mechanism is controlled to cyclically lift and rotate back and forth, and the lifting and rotating of the carrying mechanism are performed simultaneously or successively; In the step S02, the cleaning liquid is preheated before spraying, so that the first nozzle mechanism and the second nozzle mechanism spray the heated cleaning liquid to pre-rinse the barrel-shaped component; In the step S03, the deionized water is preheated before spraying, so that the first nozzle mechanism and the second nozzle mechanism spray the heated deionized water to perform secondary washing on the barrel-shaped component; In the step S04, the drying gas is preheated before spraying the drying gas, so that the first nozzle mechanism and the second nozzle mechanism spray the heated drying gas to dry the barrel-shaped component.

[0016] As an optional implementation, the method further satisfies at least one of the following conditions: When performing the pre-rinsing, secondary rinsing and drying processes, the first nozzle mechanism and the second nozzle mechanism are kept stationary; When performing the pre-rinsing, secondary rinsing and drying processes, the first nozzle mechanism is heated by the first heating device, and the second nozzle mechanism is heated by the second heating device, and the states of the first heating device and the second heating device are controlled according to a control instruction issued by the device end; Controlling the first nozzle mechanism and the second nozzle mechanism by one or more valves so that the first nozzle mechanism and the second nozzle mechanism switch between spraying cleaning liquid, deionized water and drying gas in sequence; The supporting mechanism is controlled to be lifted and / or rotated in a predetermined manner according to a control instruction issued by the equipment end.

[0017] Compared with the prior art, the technical solution provided by the present invention has at least the following beneficial effects: The device and method for cleaning barrel-shaped parts provided by the present invention can perform pre-rinsing and secondary flushing on the inner and outer surfaces of the barrel-shaped parts respectively through the first nozzle mechanism and the second nozzle mechanism during the cleaning process, and the coverage (including the circumferential coverage and the vertical coverage), uniformity and efficiency of the cleaning of the first nozzle mechanism and the second nozzle mechanism can be increased by means of the rotation and / or lifting of the supporting mechanism, so that the barrel-shaped parts in the semiconductor field can be fully, fully and evenly cleaned, with high cleaning efficiency and good cleaning effect. In addition, the amount of liquid and gas can be greatly saved, the cleaning cost of the barrel-shaped parts can be greatly reduced, and the barrel-shaped parts can be quickly cleaned to avoid excessive etching of the barrel-shaped parts without affecting the service life of the barrel-shaped parts. In addition, after the cleaning is completed, it can also be switched to the drying mode to spray dry gas through the first nozzle mechanism and the second nozzle mechanism to perform online complete drying treatment on the barrel-shaped parts, thereby shortening the processing time, saving additional drying and baking equipment, and greatly reducing the equipment cost.

[0018] On the other hand, by improving the second nozzle of the second nozzle mechanism, the cleaning coverage capacity of the interior of the barrel-shaped component is increased, so that the second nozzle can form an effective spray coverage range in the circumferential and vertical directions around the inner surface of the barrel-shaped component, so as to better adapt to the cleaning of the barrel-shaped component and greatly improve the cleaning capacity of the interior of the barrel-shaped component. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to better understand the present invention and shall not constitute improper limitations of the present invention.

[0020] Figure 1 It is an overall schematic diagram of a device for cleaning a barrel-shaped component provided according to an embodiment of the present invention.

[0021] Figure 2 1 is a schematic diagram of a carrying mechanism provided according to an embodiment of the present invention, wherein arrow R indicates the rotation direction of the carrying mechanism, and the carrying mechanism can rotate forward and reverse, and arrow L indicates the lifting direction of the carrying mechanism.

[0022] Figure 3 Schematic diagram of a first nozzle mechanism provided according to an embodiment of the present invention.

[0023] Figure 4 Schematic diagram of a second nozzle mechanism provided according to an embodiment of the present invention.

[0024] [Description of the accompanying drawings is as follows]: 100-housing, 1-first nozzle mechanism, 101-first nozzle, 102-first main channel, 103-first spray hole channel, 104-first spray hole, 105-first main supply pipeline, 106-first main supply channel, 107-first heating device, 108-first electromagnetic coil, 109-first supply port, 2-second nozzle mechanism, 201-second nozzle, 202-second main channel, 203-second spray hole channel, 204-second spray hole, 205-second main supply pipeline, 206-second main supply channel, second heating device 207, 208-second electromagnetic coil, 209-second supply port, 3-carrying mechanism, 301-stage, 302-rotating stage, 303-spindle, 304-telescopic device, 305-through hole, 4-barrel-shaped component. DETAILED DESCRIPTION

[0025] The following is an explanation of the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in the present embodiment only illustrate the basic concept of the present invention in a schematic manner, and only the components related to the present invention are shown in the figure instead of being drawn according to the number, shape and size of the components in the actual implementation. The type, quantity and proportion of each component in the actual implementation can be a random change, and the component layout type may also be more complicated.

[0026] In addition, each embodiment of the following description has one or more technical features, but this does not mean that the user of the present invention must implement all the technical features in any embodiment at the same time, or can only implement part or all of the technical features in different embodiments separately. In other words, under the premise that implementation is possible, those skilled in the art can selectively implement part or all of the technical features in any embodiment according to the disclosure of the present invention and according to design specifications or actual needs, or selectively implement a combination of part or all of the technical features in multiple embodiments, thereby increasing the flexibility of the implementation of the present invention.

[0027] As used in this specification, the singular forms "one", "an", and "the" include plural objects, and the plural form "a plurality" includes more than two objects, unless the content clearly indicates otherwise. As used in this specification, the term "or" is generally used in a sense that includes "and / or", unless the content clearly indicates otherwise, and the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium, and it can be a connection between two elements or an interactive relationship between two elements. Relational terms such as the terms "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly indicate the number of technical features indicated. It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Herein, the "circumferential" refers to the direction around the axis of rotation of the supporting mechanism; the "vertical" corresponds to the direction of the axis of rotation of the supporting mechanism, that is, the vertical direction.

[0028] In order to make the purpose, advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings. It should be noted that the drawings are all in very simplified form and in non-precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. The same or similar reference numerals in the drawings represent the same or similar components.

[0029] Please refer to Figures 1 to 4, an embodiment of the present invention provides a device for cleaning a barrel-shaped component 4, which is suitable for cleaning and drying various barrel-shaped components 4 in the semiconductor field. It should be noted that the barrel-shaped component 4 is a structure known to those skilled in the art, and its shape and size are not limited. For example, the barrel-shaped component 4 can be cylindrical, or it can be other shapes commonly seen in the art. The barrel-shaped component 4 can be a structure with both ends open along the length direction, or it can be a structure with only one end open along the length direction. The barrel-shaped component 4 can be longer or shorter. In a specific embodiment, the barrel-shaped component 4 is a quartz tube or a silicon carbide tube used on semiconductor diffusion equipment.

[0030] More detailed, such as Figure 1 As shown, the device specifically includes: a housing 100; and a first nozzle mechanism 1, a second nozzle mechanism 2 and a supporting mechanism 3 arranged in the housing 100. It is worth noting that the supporting mechanism 3, the first nozzle mechanism 1 and the second nozzle mechanism 2 are independent of each other in function, which is conducive to the operation and use of each mechanism.

[0031] like Figure 1 and Figure 2 As shown, the bearing mechanism 3 is used to mount the barrel-shaped component 4 and is configured to be able to be raised and lowered (see Figure 2 Arrow L), and can also be rotated (see Figure 2 The barrel-shaped component 4 can rotate with the rotation of the supporting mechanism 3, and can be lifted and lowered with the lifting and lowering of the supporting mechanism 3. The lifting height and rotation angle of the supporting mechanism 3 can be set according to actual needs to adapt to barrel-shaped components 4 of different heights and sizes, ensuring that the barrel-shaped component 4 can be thoroughly cleaned and dried.

[0032] Since part of the structure of the second nozzle mechanism 2 needs to pass through the supporting mechanism 3 to enter the interior of the barrel-shaped part 4, at this time, in order to reduce the impact and interference on the second nozzle mechanism 2, preferably, the rotation angle of the supporting mechanism 3 is less than or equal to 180°, and more preferably, the rotation angle of the supporting mechanism 3 is less than or equal to 120°.

[0033] In addition, the first nozzle mechanism 1 and the second nozzle mechanism 2 are both used for flushing and drying the barrel-shaped component 4, and the first nozzle mechanism 1 and the second nozzle mechanism 2 can be connected to the housing 100 by various means, and the specific connection method is not limited.

[0034] Specifically, the first spray head mechanism 1 is arranged on the outside of the barrel-shaped part 4, and can rinse and dry the barrel-shaped part 4 externally. During use, the first spray head mechanism 1 can remain stationary, or the first spray head mechanism 1 can be moved and / or rotated to adjust the position and direction. In practice, considering the sealing performance, the first spray head mechanism 1 is preferably fixed, which is conducive to sealing the first spray head mechanism 1 and reducing the risk of fluid leakage. The second spray head mechanism 2 is arranged on the inside of the barrel-shaped part 4 to rinse and dry the barrel-shaped part 4 internally. Similarly, during use, the second spray head mechanism 2 can be fixed, or it can be moved and / or rotated to adjust the position and direction. Preferably, the second spray head mechanism 2 remains stationary to achieve a good seal and reduce the difficulty of setting.

[0035] The first nozzle mechanism 1 is also configured to spray cleaning liquid, deionized water and drying gas in sequence to perform pre-rinsing, secondary rinsing and drying treatments on the barrel-shaped part 4 in sequence; and the second nozzle mechanism 2 is also configured to spray cleaning liquid, deionized water and drying gas in sequence to perform pre-rinsing, secondary rinsing and drying treatments on the barrel-shaped part 4 in sequence.

[0036] Generally, the first nozzle mechanism 1 and the second nozzle mechanism 2 are used to simultaneously rinse the barrel-shaped component 4, and then the first nozzle mechanism 1 and the second nozzle mechanism 2 simultaneously dry the barrel-shaped component 4, which has high processing efficiency and good processing effect. In particular, while the first nozzle mechanism 1 and the second nozzle mechanism 2 are processing the barrel-shaped component 4, the supporting mechanism 3 is lifted and / or rotated in a predetermined manner, which is particularly suitable for the situation where the first nozzle mechanism 1 and the second nozzle mechanism 2 remain stationary during use.

[0037] Accordingly, an embodiment of the present invention further provides a method for cleaning the barrel-shaped component 4, which is performed based on the apparatus for cleaning the barrel-shaped component 4 provided in each embodiment of the present invention, and a process of the method includes the following steps: Step S01, putting the barrel-shaped component 4 to be cleaned into the housing 100 and placing it on the supporting mechanism 3; Step S02, the first nozzle mechanism 1 and the second nozzle mechanism 2 spray cleaning liquid to pre-rinse the barrel-shaped component 4; Step S03, spraying deionized water through the first nozzle mechanism 1 and the second nozzle mechanism 2 to perform secondary flushing on the barrel-shaped component 4; Step S04, drying the barrel-shaped component 4 by spraying dry gas through the first nozzle mechanism 1 and the second nozzle mechanism 2; Step S05 , while performing the pre-rinsing, secondary rinsing and drying processes, the supporting mechanism 3 is lifted and / or rotated in a predetermined manner.

[0038] The embodiment of the present invention may further provide a readable storage medium, including a program or an instruction, and when the program or the instruction is run on a computer, the method for cleaning the barrel-shaped component 4 described in any embodiment of the present invention is executed.

[0039] It can be seen that the above-mentioned device and method for cleaning the barrel-shaped part 4 can be used to clean the inner and outer surfaces of the barrel-shaped part 4 multiple times through the first nozzle mechanism 1 and the second nozzle mechanism 2 during the cleaning process of the barrel-shaped part 4, and during the cleaning process, through the rotation and / or lifting movement of the supporting mechanism 3, it can better adapt to the barrel-shaped part 4, improve the two-dimensional plane cleaning to three-dimensional cleaning, increase the coverage, uniformity and efficiency of the first nozzle mechanism 1 and the second nozzle mechanism 2 for cleaning the barrel-shaped part 4, and finally enable the barrel-shaped part 4 to be fully, fully and evenly cleaned, with high cleaning efficiency and good cleaning effect. Moreover, this cleaning method can greatly save the amount of liquid and gas, greatly reduce the cleaning cost of the barrel-shaped part 4, and will not cause excessive etching to the barrel-shaped part 4, and will not affect the service life of the barrel-shaped part 4. In addition, after the cleaning is completed, the same set of devices can also be used to achieve online complete drying treatment, shortening the processing time, saving additional drying and baking equipment, and greatly reducing the equipment cost.

[0040] It should be noted that in the above step S05, the predetermined mode can be set according to actual needs to ensure that the barrel-shaped component 4 can be fully and thoroughly cleaned. In practice, the working mode of the carrier mechanism 3 can be set according to the program, so that the carrier mechanism 3 runs according to the process set by the program, automatically performs tasks without manual intervention, and improves work efficiency and accuracy.

[0041] It should also be understood that, in actual use, the bearing mechanism 3 can drive the barrel-shaped component 4 to rise and fall cyclically, and can also drive the barrel-shaped component 4 to rotate back and forth, and the back and forth rotation is a cyclic forward and reverse rotation to improve the processing efficiency and processing effect. In addition, the bearing mechanism 3 can be raised and lowered alone or rotated alone, that is, the lifting and rotation can be performed successively, and preferably, the bearing mechanism 3 is lifted and rotated at the same time.

[0042] In the above step S02, preferably, the cleaning liquid is preheated before spraying the cleaning liquid, so that the first nozzle mechanism 1 and the second nozzle mechanism 2 can spray high-temperature and high-pressure cleaning liquid to pre-rinse the barrel-shaped part 4, so as to improve the cleaning efficiency, reduce the acid consumption, and reduce the material cost. It can be understood that the heated cleaning liquid is transported to the interior of the first nozzle mechanism 1, so that the cleaning liquid is sprayed under high temperature and high pressure, and presents a semi-mist spray, which is a fluid spray state between a liquid jet and complete atomization. Semi-mist spray cleaning can more effectively remove various pollutants on the surface of the barrel-shaped part 4, provide better cleaning effect, and can evenly clean the surface of the barrel-shaped part 4, reduce damage to the barrel-shaped part 4, and extend the service life of the barrel-shaped part 4. It can also minimize the consumption of cleaning solution, shorten the etching time of the barrel-shaped part 4 in the cleaning liquid, and reduce the impact of the cleaning process on the barrel-shaped part 4.

[0043] Of course, the type of cleaning liquid is not limited, and in actual use, the cleaning liquid can be adjusted as needed, as long as it can remove various pollutants remaining on the barrel member 4. For example, in the prior art, hydrofluoric acid is often used for semiconductor cleaning, so as an example, the cleaning liquid is composed of deionized water and hydrofluoric acid.

[0044] Similarly, in the above step S03, preferably, the deionized water is preheated before spraying, so that the first nozzle mechanism 1 and the second nozzle mechanism 2 spray high-temperature and high-pressure deionized water to perform secondary rinsing on the barrel-shaped component 4. Using heated deionized water to secondary rinse the barrel-shaped component 4 can improve the efficiency of rinsing after cleaning with the cleaning solution, speed up the processing time, and reduce consumption.

[0045] Therefore, the pre-rinsing and secondary rinsing under high temperature and high pressure conditions have significant cleaning effects, including hard-to-reach edges, gaps and corners, and provide greater cleaning power to rinse away stubborn contaminants. It also indirectly reduces the use of cleaning fluid and deionized water, greatly saving material costs.

[0046] In addition, in the above step S04, preferably, the drying gas is preheated before spraying the drying gas, so that the first nozzle mechanism 1 and the second nozzle mechanism 2 spray high-temperature and high-pressure drying gas to dry the barrel-shaped component 4, so as to achieve a rapid drying effect, reduce the consumption of drying gas, and reduce the material cost. In addition, the present invention does not limit the type of drying gas, for example, nitrogen or carbon dioxide, etc., and nitrogen is more commonly used.

[0047] In some embodiments, heated fluids may be directly delivered to the first nozzle mechanism 1 and the second nozzle mechanism 2, wherein the fluids include cleaning fluid, deionized water, and dry gas, thereby eliminating the need to provide an additional heating device on the device.

[0048] Since direct delivery of heated fluid may result in heat loss, Figure 3 and Figure 4 In the described embodiment, the device further comprises a first heating device 107 and a second heating device 207 disposed in the housing 100. The first heating device 107 is used to be disposed outside the barrel-shaped component 4 to heat the first nozzle mechanism 1. Specifically in this embodiment, the first heating device 107 directly heats the first main supply pipeline 105 of the first nozzle mechanism 1, so that the fluid in the first main supply pipeline 105 is heated to a certain temperature and then transported to the inside of the first nozzle 101 of the first nozzle mechanism 1. The second heating device 207 is used to be disposed inside the barrel-shaped component 4 to heat the second nozzle mechanism 2. Specifically in this embodiment, the second heating device 207 directly heats the second main supply pipeline 205 of the second nozzle mechanism 2, so that the fluid in the second main supply pipeline 205 is heated to a certain temperature and then transported to the inside of the second nozzle 201 of the second nozzle mechanism 2. It can be understood that the present invention can more quickly and accurately control the temperature of the internal fluid by directly heating the first main supply pipeline 105 and the second main supply pipeline 205 of each nozzle mechanism, with higher heating efficiency and better heating effect.

[0049] Preferably, the first heating device 107 and the second heating device 207 are both electromagnetic heating devices. Compared with other heating methods, electromagnetic heating has high heating efficiency, energy saving, can accurately control the temperature of the target area, is easy to install and maintain, and has good safety.

[0050] Please refer to Figure 3 In one example, the first nozzle mechanism 1 includes a first nozzle 101 and a first main supply pipe 105 connected to the first nozzle 101; the first nozzle 101 can spray cleaning liquid, deionized water and drying gas in sequence; wherein the first heating device 107 is installed on the outer wall of the first main supply pipe 105, and can directly heat the first main supply pipe 105. Preferably, the first main supply pipe 105 is heated by the first electromagnetic coil 108 of the first heating device 107.

[0051] In addition, a suitable number of first spray holes 104 are arranged on the side of the first spray head 101, and the first spray holes 104 are distributed in the circumferential direction and / or in the vertical direction. Preferably, the first spray holes 104 are distributed in both the circumferential direction and the vertical direction. The shape and size of the first spray hole 104 are not limited. The first spray hole 104 on the first spray head 101 is connected to the first main channel 102 in the first spray head 101 through the first spray hole channel 103, and the first main channel 102 is connected to the first main supply channel 106 in the first main supply pipeline 105. Thus, the first spray head mechanism 1 can deliver the fluid to the first spray head 101 through its first main supply pipeline 105, and the first spray head 101 then sprays the cleaning liquid, deionized water or drying gas through the first spray hole 104. The first spray head 101 and the first main supply pipeline 105 can be formed in one piece or as separate components; if the first spray head 101 and the first main supply pipeline 105 are independent components, the two can be connected by welding or various other common mechanical connection methods.

[0052] Please refer to Figure 4 As an example, the second nozzle mechanism 2 includes a second nozzle 201 and a second main supply pipe 205 connected to the second nozzle 201; the second nozzle 201 can spray cleaning liquid, deionized water and drying gas in sequence; and the second heating device 207 is installed on the outer wall of the second main supply pipe 205, which can directly heat the second main supply pipe 205. Preferably, the second main supply pipe 205 is heated by the second electromagnetic coil 208 of the second heating device 207.

[0053] Similar to the first nozzle mechanism 1, a certain number of second nozzle holes 204 are provided on the second nozzle 201, and the shape and size of the second nozzle holes 204 are also not limited. The second nozzle holes 204 on the second nozzle 201 can be connected to the second main channel 202 in the second nozzle 201 through the second nozzle hole channel 203, and the second main channel 202 is connected to the second main supply channel 206 in the second main supply pipeline 205. In this way, the second nozzle mechanism 2 can deliver the corresponding fluid to the second nozzle 201 through its second main supply pipeline 205, and the second nozzle 201 then sprays the currently required fluid through the second nozzle holes 204. The second nozzle 201 and the second main supply pipeline 205 can be formed in one piece or separate components; if the second nozzle 201 and the second main supply pipeline 205 are independent components, the two can be connected by welding or other various common mechanical connection methods.

[0054] The first heating device 107 is preferably disposed adjacent to the first nozzle 101, and / or the second heating device 207 is preferably disposed adjacent to the second nozzle 201, so as to improve heating efficiency and reduce heat loss.

[0055] Preferably, a control system is provided at the device end, and the states of the first heating device 107 and the second heating device 207 are controlled by the control system, or in other words, the states of the first heating device 107 and the second heating device 207 can be controlled according to the control instructions issued by the device end. These heating devices can be in a heating state and a non-heating state under the control of the control system. In addition, the control system can also control the heating time and heating temperature of the heating device, so as to achieve the purpose of precise temperature control.

[0056] In practice, the control may be divided into modules. For example, the control system includes a heating control system, which is communicated with the first heating device 107 and the second heating device 207 respectively, so that the first heating device 107 and the second heating device 207 operate under the control of the heating control system.

[0057] Return to reference Figure 3 In one example, three first supply ports 109 are provided at one end of the first main supply pipe 105 away from the first nozzle 101, which are respectively used to introduce cleaning liquid, deionized water and drying gas. In some embodiments, the three first supply ports 109 are respectively controlled by independent valves. In other embodiments, the three first supply ports 109 only need one reversing valve to control. Regardless of the control method, it is to control one of the three first supply ports 109 to be in an enabled state and the other two to be in a disabled state. When one of the three first supply ports 109 is in an enabled state, the corresponding fluid can be delivered to the first nozzle mechanism 1 through the currently enabled first supply port 109.

[0058] Of course, in other embodiments, the first supply port 109 can be eliminated, and at the same time, a reversing valve is provided, and the first nozzle mechanism 1 switches between spraying cleaning liquid, deionized water and drying gas in sequence through the reversing valve. The reversing valve is connected to the end of the first main supply pipeline 105 away from the first nozzle 101 through a fluid pipe. The reversing valve is also fluidically connected to multiple supply sources, and the multiple supply sources supply cleaning liquid, deionized water and drying gas respectively. During use, the reversing valve can be controlled to deliver the cleaning liquid, deionized water and drying gas to the first nozzle mechanism 1 in sequence.

[0059] Next reference Figure 4In one example, three second supply ports 209 are provided at one end of the second main supply pipe 205 away from the second nozzle 201, which are used to introduce cleaning liquid, deionized water and drying gas respectively. The three second supply ports 209 are controlled by independent valves respectively, or by a reversing valve, so that one of the three second supply ports 209 is currently in an enabled state, and the other two are in a disabled state. When one of the three second supply ports 209 is in an enabled state, the corresponding fluid can be delivered to the second nozzle mechanism 2 through the currently enabled second supply port 209.

[0060] In other embodiments, the second supply port 209 may be eliminated and a reversing valve may be provided. The second nozzle mechanism 2 switches in sequence between spraying cleaning liquid, deionized water and drying gas through the reversing valve. The structure and principle are similar to those of the first nozzle mechanism 1 and will not be described in detail.

[0061] Therefore, the present invention does not limit the manner in which the first nozzle mechanism 1 and the second nozzle mechanism 2 switch to spray the cleaning liquid, deionized water, and drying gas in sequence.

[0062] Preferably, the control system includes a flow splitting control system, which controls the valve to selectively enable or close the first supply port 109 and the second supply port 209, so that the first nozzle mechanism 1 and the second nozzle mechanism 2 can spray the cleaning liquid, deionized water and drying gas in sequence. The valve is preferably a solenoid valve.

[0063] In practice, at least one first nozzle mechanism 1 can effectively spray the outer surface of the barrel-shaped component 4, and at least one first nozzle mechanism 1 can spray in at least one of the horizontal direction, obliquely upward and obliquely downward. Preferably, the same first nozzle mechanism 1 sprays only in the horizontal direction, or, on the basis of spraying in the horizontal direction, adds obliquely upward and / or obliquely downward spraying, so as to increase the vertical spraying coverage. In addition, preferably, the number of the first nozzle mechanisms 1 is multiple, and multiple means at least two, and the multiple first nozzle mechanisms 1 are evenly distributed in the circumferential direction around the rotation axis of the supporting mechanism 3, so as to increase the circumferential spraying coverage.

[0064] In the embodiment described in the figure, there are two first nozzle mechanisms 1, and the two first nozzle mechanisms 1 are evenly distributed along the circumference around the rotation axis of the supporting mechanism 3, that is, they are distributed 180° apart. They process the barrel-shaped part 4 synchronously, and can clean and dry the barrel-shaped part 4 more quickly, so that each area of ​​the barrel-shaped part 4 can be fully and evenly processed, improving the processing effect and improving the processing efficiency. In practice, it is more appropriate to use three first nozzle mechanisms 1, and the three first nozzle mechanisms 1 are distributed 120° apart along the circumference around the rotation axis of the supporting mechanism 3. Such a design is more reasonable, which is conducive to the bearing mechanism 3 rotating back and forth within a smaller angle range, and can better meet the installation and use requirements of the second nozzle mechanism 2, while taking into account efficiency and effect.

[0065] For the first nozzle mechanism 1, preferably, the first nozzle 101 is only provided with a plurality of first spray holes 104 on the side facing the barrel-shaped part 4, and the plurality of first spray holes 104 determine the lateral spraying mode of the first nozzle mechanism 1 to clean and dry the lateral outer surface of the barrel-shaped part 4. Therefore, the first nozzle mechanism 1 is only provided with a plurality of first spray holes 104 on one side, and it is not necessary to form a 360° coverage spray around the barrel-shaped part 4, thereby simplifying the structure and reducing the processing cost. Although provided on one side, the plurality of first spray holes 104 can still form a certain spraying coverage range in the circumferential direction and the vertical direction.

[0066] The first spray holes 104 can be distributed in a variety of ways, and the specific distribution mode needs to be set according to the shape and size of the barrel-shaped component 4. For example, the first spray holes 104 are linearly distributed, matrix distributed (or grid distributed), radially distributed (such as star-shaped, fan-shaped, etc.), spirally distributed, staggered distributed (asymmetric arrangement), etc. Taking the situation described in the figure as an example, multiple first spray holes 104 are evenly arranged in a rectangular shape, and the coverage is even, which is suitable for the barrel-shaped component 4.

[0067] The multiple first spray holes 104 can all spray in the horizontal direction, or some spray in the horizontal direction and some spray obliquely upward and / or obliquely downward. More suitably, the spraying direction of at least some of the first spray holes 104 is in the horizontal direction, forming a certain impact force to improve the cleaning effect. Of course, the spraying direction of the first spray holes 104 can be adjusted as needed, including but not limited to spraying in the horizontal direction. For example, the first spray holes 104 are distributed from the middle to the periphery, the first spray holes 104 located in the middle position spray in the horizontal direction, the first spray holes 104 located in the upper position spray obliquely upward, and the first spray holes 104 located in the lower position spray obliquely downward. However, these embodiments are only used for illustration and are not intended to limit the present technical solution.

[0068] The first nozzle 101 can be used in various shapes. In particular, when the first nozzle hole 104 is set on one side, the first nozzle 101 is a prism. The prism has multiple adjacent sides, and the first nozzle hole 104 only needs to be set on one side. In this case, the first nozzle 101 includes but is not limited to a cuboid.

[0069] The number of the second nozzle mechanism 2 is usually one, and one second nozzle mechanism 2 can effectively spray the inner surface of the barrel-shaped part 4. In further improvement, the cleaning coverage ability of the second nozzle 201 on the inside of the barrel-shaped part 4 is also increased. Specifically, a plurality of second spray holes 204 are arranged on the side of the second nozzle 201, and the plurality of second spray holes 204 on the side of the second nozzle 201 are distributed in both the circumferential direction and the vertical direction. The second spray holes 204 are usually evenly distributed, ensuring that the second nozzle 201 can evenly cover the inner surface of the entire barrel-shaped part 4, fully and evenly clean, and achieve more comprehensive cleaning. The second nozzle 201 can be used in various shapes. Preferably, the ball head shape described in the figure is adopted, which is conducive to setting the second spray holes 204 at different latitudes and longitudes on the ball head.

[0070] Preferably, the plurality of second spray holes 204 on the side of the second nozzle 201 are arranged in a circle along the circumferential direction, forming a 360° coverage in the circumferential direction. Preferably, the plurality of second spray holes 204 on the side of the second nozzle 201 are also arranged in at least three groups of second spray holes 204 in sequence from top to bottom along the vertical direction, at least one group of second spray holes 204 in the upper position of the at least three groups of second spray holes 204 sprays obliquely upward, at least one group of second spray holes 204 in the middle position sprays in the horizontal direction, and at least one group of second spray holes 204 in the lower position sprays obliquely downward. In other words, the plurality of second spray holes 204 on the side of the second nozzle 201 can spray in three directions, namely, horizontally, obliquely upward and obliquely downward, which greatly improves the cleaning ability inside the barrel-shaped component 4.

[0071] Figure 4 In the embodiment, at least one second spray hole 204 may be provided on the top of the second spray head 201, and the at least one second spray hole 204 at this position sprays upward vertically. This arrangement can cover a larger area and better clean the inner surface of the barrel-shaped part 4, especially the top of the barrel-shaped part 4. Figure 4In this embodiment, the plurality of second spray holes 204 on the side of the second nozzle 201 are arranged in three groups of second spray holes 204 in sequence from top to bottom along the vertical direction, and each group includes a plurality of second spray holes 204 arranged on the same circumference, and the spraying direction of the second spray holes 204 on the same circumference is the same, and the interval angle between the two adjacent groups is 45°. However, in other cases, the second spray holes 204 can also be arranged at more latitudes, for example, at intervals of 15° to 30° from top to bottom. In addition, the interval angle of the plurality of second spray holes 204 on the same circumference can be selected to be 15° to 30° or other angles, which is not limited to this.

[0072] Next, the bearing mechanism 3 is further introduced. As described above, the bearing mechanism 3 is used to install the barrel-shaped component 4, and the bearing mechanism 3 can fix the barrel-shaped component 4 by various means, the simplest of which is to fix the barrel-shaped component 4 by buckles. Of course, the actual method is not limited to the buckle fixing method.

[0073] Please refer to Figure 2 As an example, the carrying mechanism 3 includes a stage 301, a rotating table 302 and a telescopic device 304; the stage 301 is used to install the barrel-shaped component 4; in order to facilitate the installation of the second nozzle mechanism 2, a through hole 305 for the second nozzle mechanism 2 to pass through is provided on the stage 301; in addition, the stage 301 is installed on the rotating table 302 through the telescopic device 304; the telescopic device 304 is used to drive the stage 301 to rise or fall; and the rotating table 302 can be driven to rotate so that the stage 301 rotates along with the rotation of the rotating table 302. In this embodiment, the rotating table 302 is connected to the main shaft 303, that is, the rotating table 302 can be driven to rotate by the motor, and the rotating table 302 does not need to be raised or lowered.

[0074] In addition, the telescopic device 304 is a device that can achieve length or position change by mechanical, hydraulic, pneumatic or electric means. The specific structure of the telescopic device 304 is not limited, and can include any type of length / height adjustable device, such as a gear rack mechanism, a worm gear mechanism, a connecting rod mechanism, a ball screw / trapezoidal screw, a hydraulic cylinder, a pneumatic cylinder, a linear motor, an electric push rod, a synchronous belt or a screw-driven slide telescopic device, and other common telescopic devices.

[0075] In comparison, the telescopic device 304 is more suitable for realizing the lifting function by an electric hydraulic method. For example, the telescopic device 304 includes a power unit, a control valve and a hydraulic cylinder; the power unit controls the hydraulic cylinder to lift or lower the loading platform 301 through the control valve. The power unit may include an electric motor and a hydraulic pump. When the electric motor is started, it drives the hydraulic pump to suck oil from the oil tank and output it under pressure; the control valve at least includes a direction control valve to control the flow direction of the oil; when the direction control valve is switched to the rising position, the high-pressure oil enters the rodless chamber of the hydraulic cylinder, and the oil pressure pushes the piston rod to extend, lifting the loading platform 301. Conversely, when the direction control valve is switched to the descending position, the high-pressure oil enters the rod chamber of the hydraulic cylinder, and the oil pressure pushes the piston rod to retract, and the loading platform 301 descends. Furthermore, the control valve may also include a flow control valve to adjust the oil flow rate and control the lifting speed.

[0076] Preferably, the telescopic device 304 also includes at least three elevating connecting rods (not marked), which are arranged between the stage 301 and the rotating table 302, so as to use the synchronous telescopic movement of at least three connecting rods to lift or lower the stage 301. This structure is simpler and more convenient to use. It should be understood that at least three connecting rods are distributed along the circumference. In other embodiments, there can also be four connecting rods. In any case, there is a hollow area between adjacent connecting rods, which facilitates the second nozzle mechanism 2 to pass through the hollow area for installation and use.

[0077] Preferably, the carrying mechanism 3 is controlled to be lifted and / or rotated in a predetermined manner according to the control instruction issued by the device end. Optionally, the control system includes a motion control system, which is communicated with the carrying mechanism 3 to control the carrying mechanism 3 to rotate and / or lift in a preset manner.

[0078] It should be noted that the division of the various modules of the above control system (diversion control system, heating control system, motion control system) is only a division of logical functions. In actual implementation, they can be fully or partially integrated into one physical entity, or physically separated. And these modules can all be implemented in the form of software called by processing elements; they can also be all implemented in the form of hardware; some modules can also be implemented in the form of software called by processing elements, and some modules can be implemented in the form of hardware. In addition, they can also be stored in the memory in the form of program code, and called by a processing element of the above device to execute the corresponding function.

[0079] Although the present invention is disclosed as above, it is not limited thereto. Those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the present invention specification and its equivalent technology, the present invention is also intended to include these modifications and variations.

Claims

1. A device for cleaning barrel-shaped parts, characterized in that: include: shell; and a first nozzle mechanism, a second nozzle mechanism and a bearing mechanism arranged in the housing; The bearing mechanism is used to install the barrel-shaped component and is configured to be able to rise and fall and rotate; The first nozzle mechanism is arranged outside the barrel-shaped component; the first nozzle mechanism comprises a first nozzle, a side of the first nozzle is provided with a plurality of first spray holes, the plurality of first spray holes are distributed in the circumferential direction and / or the vertical direction, and at least part of the first spray holes sprays in the horizontal direction; The second nozzle mechanism is arranged inside the barrel-shaped component; the second nozzle mechanism includes a second nozzle, and a plurality of second spray holes are arranged on the side of the second nozzle. The plurality of second spray holes are distributed in the circumferential direction and the vertical direction, and can spray in three directions respectively: horizontally, obliquely upward, and obliquely downward.

2. The device for cleaning barrel-shaped parts according to claim 1, characterized in that: It also includes a first heating device and a second heating device disposed in the shell; the first heating device is used to be disposed outside the barrel-shaped component to heat the first nozzle mechanism; the second heating device is used to be disposed inside the barrel-shaped component to heat the second nozzle mechanism.

3. The device for cleaning barrel-shaped parts according to claim 2, characterized in that: The first nozzle mechanism also includes a first main supply pipe connected to the first nozzle; the first heating device is installed on the outer wall of the first main supply pipe, and is used to heat the first main supply pipe by electromagnetic heating; and / or, the second nozzle mechanism also includes a second main supply pipe connected to the second nozzle; the second heating device is installed on the outer wall of the second main supply pipe, and is used to heat the second main supply pipe by electromagnetic heating.

4. The device for cleaning barrel-shaped parts according to claim 1 or 2, characterized in that: The first nozzle has multiple adjacent side surfaces, and the first nozzle is only provided with multiple first spray holes on the side surface facing the barrel-shaped component, and the multiple first spray holes are distributed in the circumferential direction and the vertical direction; and / or, the multiple second spray holes on the side surface of the second nozzle are arranged in a circle along the circumferential direction, and at least three groups of the second spray holes are arranged in sequence from top to bottom along the vertical direction, and at least one group of the second spray holes in the upper position of the at least three groups of the second spray holes sprays obliquely upward, at least one group of the second spray holes in the middle position sprays in the horizontal direction, and at least one group of the second spray holes in the lower position sprays obliquely downward.

5. The device for cleaning tub-shaped parts according to claim 1 or 2, characterized in that: There are multiple first nozzle mechanisms, and the multiple first nozzle mechanisms are evenly distributed circumferentially around the rotation axis of the supporting mechanism. Alternatively, there are three first nozzle mechanisms, and the three first nozzle mechanisms are evenly distributed circumferentially around the rotation axis of the supporting mechanism.

6. The device for cleaning barrel-shaped parts according to claim 1 or 2, characterized in that: The supporting mechanism includes a loading platform, a rotating table and a telescopic device; the loading platform is used to install the barrel-shaped component; the loading platform is installed on the rotating table through the telescopic device; the telescopic device is used to drive the loading platform to rise or fall; the rotating table can be driven to rotate so that the loading platform rotates along with the rotation of the rotating table; a through hole is provided on the loading platform for the second nozzle mechanism to pass through.

7. The device for cleaning tub-shaped parts according to claim 6, characterized in that: The telescopic device includes at least three elevating connecting rods, which are arranged between the loading platform and the rotating platform so as to raise or lower the loading platform by synchronously extending and retracting the at least three connecting rods; there is a hollow area between adjacent connecting rods, and the second nozzle mechanism passes through the hollow area.

8. The device for cleaning tub-shaped parts according to claim 1 or 2, characterized in that: At least one second spray hole is disposed on the top of the second spray head, and the at least one second spray hole on the top of the second spray head sprays vertically upward.

9. A method for cleaning a barrel-shaped component, characterized in that: The method is performed based on the device for cleaning tub-shaped parts according to claim 1, and the method comprises the following steps: Step S01: placing the barrel-shaped component into the housing and placing it on the supporting mechanism; Step S02: Pre-rinsing the barrel-shaped component by spraying cleaning liquid through the first nozzle mechanism and the second nozzle mechanism; Step S03: spraying deionized water through the first nozzle mechanism and the second nozzle mechanism to perform secondary washing on the barrel-shaped component; Step S04: drying the barrel-shaped component by spraying dry gas through the first nozzle mechanism and the second nozzle mechanism; Step S05: while performing the pre-rinsing, secondary rinsing and drying processes, the carrying mechanism is lifted and / or rotated in a predetermined manner.

10. The method for cleaning a tub-shaped component according to claim 9, characterized in that: The method also satisfies at least one of the following conditions: In the step S05, while performing the pre-rinsing, secondary rinsing and drying processes, the carrying mechanism is controlled to cyclically lift and rotate back and forth, and the lifting and rotating of the carrying mechanism are performed simultaneously or successively; In the step S02, the cleaning liquid is preheated before spraying, so that the first nozzle mechanism and the second nozzle mechanism spray the heated cleaning liquid to pre-rinse the barrel-shaped component; In the step S03, the deionized water is preheated before spraying, so that the first nozzle mechanism and the second nozzle mechanism spray the heated deionized water to perform secondary washing on the barrel-shaped component; In the step S04, the drying gas is preheated before spraying the drying gas, so that the first nozzle mechanism and the second nozzle mechanism spray the heated drying gas to dry the barrel-shaped component.

11. The method for cleaning a tub-shaped component according to claim 9, characterized in that: The method also satisfies at least one of the following conditions: When performing the pre-rinsing, secondary rinsing and drying processes, the first nozzle mechanism and the second nozzle mechanism are kept stationary; When performing the pre-rinsing, secondary rinsing and drying processes, the first nozzle mechanism is heated by the first heating device, and the second nozzle mechanism is heated by the second heating device, and the states of the first heating device and the second heating device are controlled according to a control instruction issued by the device end; Controlling the first nozzle mechanism and the second nozzle mechanism by one or more valves so that the first nozzle mechanism and the second nozzle mechanism switch between spraying cleaning liquid, deionized water and drying gas in sequence; The supporting mechanism is controlled to be lifted and / or rotated in a predetermined manner according to a control instruction issued by the equipment end.

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