Mass spectrum grid mesh electrode and forming method thereof

Abstract

The invention relates to a mass spectrum grid electrode forming method which comprises the following steps that S1, a target metal plate is selected as a grid electrode material and clamped and fixed through an upper clamping block and a lower clamping block, the length and the width of the clamping blocks are the same as those of the target metal plate, and the thickness of the clamping blocks is larger than 5 mm; s2, carrying out linear cutting according to a preset path by adopting high-precision linear cutting equipment to form a parallel silk screen structure; s3, metal scraps formed by cutting are removed; s4, taking away the upper clamping block, and fixedly mounting the upper electrode at the same position; and S5, the overall structure is turned over up and down, the original lower clamping block is made to face upwards, the original lower clamping block is taken away, the lower electrode is installed at the same position, and a grid electrode is formed.

Description

Technical Field

[0001] The invention belongs to the technical field of mass spectrometer manufacturing, and in particular relates to a mass spectrometer grid electrode and a forming method thereof, which are suitable for various mass spectrometers requiring high-precision electric field control. Background Art

[0002] In a time-of-flight mass spectrometer (TOF-MS), grid electrodes are used to divide the electric field to achieve precise acceleration, focusing, and transmission of ions. Currently, the following methods are used to make grid electrodes: (1) forming a mesh structure by weaving vertically crossed metal wires; (2) forming a grid structure by etching technology; (3) clamping or gluing multiple parallel metal wires to the electrode frame. However, these methods generally have problems such as complex process, poor grid flatness, and easy damage, which affect mass spectrometry performance and assembly stability. Summary of the invention

[0003] The purpose of the present invention is to provide a mass spectrometer grid electrode and a forming method thereof to solve the above problems. To this end, the technical solution adopted by the present invention is as follows:

[0004] According to one aspect of the present invention, a method for forming a mass spectrometer grid electrode is provided, which may include the following steps:

[0005] S1: Select a target metal sheet as the grid electrode material and clamp it with two upper and lower clamps, wherein the length and width of the clamp are the same as those of the target metal sheet, and the thickness of the clamp is greater than 5 mm;

[0006] S2: Use high-precision wire cutting equipment to perform wire cutting according to the preset path to form a parallel wire mesh structure;

[0007] S3: Remove the metal waste formed by cutting;

[0008] S4: Remove the upper clamp and fix the upper electrode in the same position;

[0009] S5: Turn the whole structure upside down so that the original lower clamping block faces upward, remove the original lower clamping block, and install the lower electrode at the same position to form a grid electrode.

[0010] In one embodiment, in S1, fixing holes are set at four corners of the clamp block and the target metal sheet, and then the clamp block and the target metal sheet are fixed together with bolts and nuts.

[0011] In one embodiment, in S2, a plurality of threading holes are processed in the clamping block and the target metal sheet before cutting.

[0012] In one embodiment, the number of the threading holes is two and they are arranged diagonally.

[0013] In one embodiment, in S2, the preset path for each cutting is a zigzag shape.

[0014] In one embodiment, in S2, for each slit, the cutting path is divided into a plurality of rectangular paths connected in sequence, so as to divide the waste material corresponding to each slit into a plurality of small segments.

[0015] In one embodiment, the length of each piece of waste material is 1 / 3 to 1 / 10 of the length of each slit.

[0016] In one embodiment, the method further includes: applying adhesive glue on the upper electrode and the lower electrode before installing the upper electrode and the lower electrode.

[0017] In one embodiment, the target metal plate has a thickness of 0.2-1 mm.

[0018] According to another aspect of the present invention, a mass spectrometer grid electrode is further provided, wherein the mass spectrometer grid electrode is manufactured by using the above-mentioned mass spectrometer grid electrode forming method.

[0019] The present invention adopts the above technical solution, which has the beneficial effects of:

[0020] 1. Integrated molding to reduce assembly errors: Compared with traditional weaving or clamping methods, this method uses wire cutting for direct processing, which avoids wire arrangement errors and ensures grid uniformity and high flatness.

[0021] 2. Improve the stability of the grid electrode: The metal sheet is processed as a whole to form the grid. The mechanical structure stress itself helps to reduce problems such as loosening and breaking of the metal wire and improve long-term stability.

[0022] 3. Simplify the process and improve processing accuracy: Wire cutting avoids the uneven corrosion problem of traditional etching process, and can accurately control the aperture and shape of the grid to improve the uniformity of the electric field.

[0023] 4. Applicable to a variety of metal materials: This method is applicable to a variety of metal materials such as stainless steel, molybdenum, titanium, etc., meeting the application requirements of different mass spectrometers. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a flow chart of a mass spectrometer grid electrode forming method according to an embodiment of the present invention;

[0025] Figure 2 is a schematic diagram of the cutting path of each slit of the mass spectrometer grid electrode forming method according to an embodiment of the present invention;

[0026] Figure 3 is a schematic diagram of the assembly of the target metal sheet and the clamping block;

[0027] Figure 4is a schematic diagram of the target metal sheet and the clamping block after wire cutting;

[0028] Figure 5 This is a schematic diagram after removing the upper clamp and installing the upper electrode;

[0029] Figure 6 This is a schematic diagram after the whole is turned upside down;

[0030] Figure 7 It is a schematic diagram of removing the lower clamp and installing the lower electrode.

[0031] Figure 8 This is a schematic diagram of the formed mass spectrometer grid electrode. DETAILED DESCRIPTION

[0032] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings so that the purpose, features and advantages of the present invention can be more clearly understood. It should be understood that the embodiments shown in the accompanying drawings are not intended to limit the scope of the present invention, but are only intended to illustrate the essential spirit of the technical solution of the present invention.

[0033] In the following description, certain specific details are set forth for the purpose of illustrating various disclosed embodiments to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the relevant art will recognize that the embodiments may be practiced without one or more of these specific details. In other cases, well-known devices, structures, and techniques associated with the present application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

[0034] Unless the context requires otherwise, throughout the specification and claims, the word "comprise" and variations such as "include" and "have" should be construed in an open, inclusive sense, ie, should be interpreted as "including, but not limited to."

[0035] References throughout the specification to "one embodiment" or "an embodiment" indicate that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any manner in one or more embodiments.

[0036] As used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise.

[0037] In the following description, in order to clearly show the structure and working mode of the present invention, many directional words will be used for description, but the words "front", "back", "left", "right", "outside", "inside", "outward", "inward", "up", "down", etc. should be understood as convenient terms and should not be understood as restrictive terms.

[0038] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0039] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] like Figure 1 As shown, a mass spectrometer grid electrode forming method of the present invention may include the following steps:

[0041] S1: Select the target metal plate 1 as the grid electrode material and clamp it with the upper and lower clamps 2 (such as Figure 3 As shown), the clamp block 2 has the same length and width as the target metal sheet 1, and the thickness of the clamp block 2 is greater than 5 mm, so as to provide sufficient support and keep the target metal sheet 1 flat. The thickness of the target metal sheet is 0.2 to 1 mm. The target metal sheet 1 and the clamp block 2 can be the same metal or different metals. The target metal sheet can be stainless steel, molybdenum or titanium, etc. In a specific embodiment, the target metal sheet is a stainless steel sheet with a thickness of 1 mm, and the clamp block is a stainless steel sheet with a thickness of 8 mm.

[0042] In order to facilitate the fixing and assembling of the target metal sheet and the clamp block, fixing holes 11 and 21 are provided at the four corners of the clamp block and the target metal sheet. In this way, the clamp block and the target metal sheet can be fixed together with bolts and nuts, which is very convenient. In other embodiments, they can also be fixed together by passing a wire through the fixing hole.

[0043] S2: Use high-precision wire cutting equipment to perform wire cutting according to the preset path to form a parallel wire mesh structure (such as Figure 4As shown). Before cutting, it is necessary to process several wire-threading holes (not shown) in the clamp block and the target metal sheet in advance for the metal wire of the wire cutting device to pass through. In order to reduce the number of wire-threading times, a wire-threading hole is processed on the left and right sides of the clamp block and the target metal sheet respectively. Preferably, the two wire-threading holes are arranged diagonally. That is to say, two wire-cutting operations are performed from the left and right sides respectively, and the travel path of each wire-cutting operation is roughly Z-shaped, that is, when cutting starts from the wire-threading hole in the upper left corner, the cutting route is first cut from the left end of the gap 10 to the right end, and then cut downward by the gap width, and then cut back to the left end to complete the cutting of a gap, and after cutting downward by the distance of a gap, the next gap is cut, and so on, until the bottom gap is cut; the cutting route of the wire-threading hole in the lower right corner is opposite to that of the wire-threading hole in the upper left corner.

[0044] If the length of the grid electrode is relatively large, when a slit is cut from left to right and then from right to left at one time, the waste size will also be relatively large, which is not conducive to removal. Therefore, for each slit 10, the cutting path is divided into a plurality of rectangular paths connected in sequence (such as Figure 2 As shown in the figure, the waste is divided into small sections for easy removal. The length of each section of waste is approximately equal to 1 / 3 to 1 / 10 of the length of each slit. The longer the slit, the more sections the waste needs to be divided into.

[0045] The width of the gap 10 of the grid electrode may be 100-500 μm. In a specific embodiment, the width of the gap is 100 μm.

[0046] S3: Remove the metal waste formed by cutting. The metal waste can be removed by vacuum or wind blowing.

[0047] S4: Remove the upper clamp 2 and fix the upper electrode 3 in the same position (such as Figure 5 To ensure that the upper electrode and the processed grid are well fixed, apply adhesive on the upper electrode before installation.

[0048] S5: Turn the whole structure upside down so that the lower clamping block 2 faces upward (such as Figure 6 As shown), the upper electrode 3 faces downward, remove the original lower clamp 2, and install the lower electrode 4 in the same position (as shown Figure 7 As shown), a mass spectrometer grid electrode 100 is formed (as shown Figure 8 Similarly, to ensure that the lower electrode and the processed grid are well fixed, apply adhesive on the lower electrode before installation.

[0049] The mass spectrometer grid electrode produced by the above method has the following advantages:

[0050] 1. Integrated molding to reduce assembly errors: Compared with traditional weaving or clamping methods, this method uses wire cutting for direct processing, which avoids wire arrangement errors and ensures grid uniformity and high flatness.

[0051] 2. Improve the stability of the grid electrode: The metal sheet is processed as a whole to form the grid. The mechanical structure stress itself helps to reduce problems such as loosening and breaking of the metal wire and improve long-term stability.

[0052] 3. Simplify the process and improve processing accuracy: Wire cutting avoids the uneven corrosion problem of traditional etching process, and can accurately control the aperture and shape of the grid to improve the uniformity of the electric field.

[0053] 4. Applicable to a variety of metal materials: This method is applicable to a variety of metal materials such as stainless steel, molybdenum, titanium, etc., meeting the application requirements of different mass spectrometers.

[0054] The present invention also provides a mass spectrometer grid electrode, which is manufactured by the above method. The mass spectrometer grid electrode has uniform apertures and smooth edges.

[0055] The preferred embodiments of the present invention have been described in detail above, but it should be understood that after reading the above teachings of the present invention, those skilled in the art may make various changes or modifications to the present invention. These equivalent forms also fall within the scope defined by the appended claims of this application.

Claims

1. A method for forming a mass spectrometer grid electrode, characterized in that: The following steps are involved: S1: Select a target metal sheet as the grid electrode material and clamp it with two upper and lower clamps, wherein the length and width of the clamp are the same as those of the target metal sheet, and the thickness of the clamp is greater than 5 mm; S2: Use high-precision wire cutting equipment to perform wire cutting according to the preset path to form a parallel wire mesh structure; S3: Remove the metal waste formed by cutting; S4: Remove the upper clamp and fix the upper electrode in the same position; S5: Turn the whole structure upside down so that the original lower clamping block faces upward, remove the original lower clamping block, and install the lower electrode at the same position to form a grid electrode.

2. The mass spectrometer grid electrode forming method according to claim 1, characterized in that: In S1, fixing holes are set at four corners of the clamp block and the target metal sheet, and then the clamp block and the target metal sheet are fixed together with bolts and nuts.

3. The mass spectrometer grid electrode forming method according to claim 1, characterized in that: In S2, a plurality of threading holes are processed in advance on the clamping block and the target metal sheet before cutting.

4. The method for forming a mass spectrometer grid electrode according to claim 3, characterized in that: There are two threading holes, which are arranged diagonally.

5. The method for forming a mass spectrometer grid electrode according to claim 4, characterized in that: In S2, the preset path for each cutting is a zigzag shape.

6. The mass spectrometer grid electrode forming method according to claim 1, characterized in that: In S2, for each gap, the cutting path is divided into a plurality of rectangular paths connected in sequence, so as to divide the waste corresponding to each gap into a plurality of small segments.

7. The method for forming a mass spectrometer grid electrode according to claim 6, characterized in that: The length of each piece of waste is 1 / 3 to 1 / 10 of the length of each gap.

8. The method for forming a mass spectrometer grid electrode according to claim 1, characterized in that: Also includes: Apply glue before installing the upper and lower electrodes.

9. The mass spectrometer grid electrode forming method according to claim 1, characterized in that: The target metal sheet thickness is 0.2 to 1 mm.

10. A mass spectrometer grid electrode, characterized in that: The mass spectrometer grid electrode is manufactured by the mass spectrometer grid electrode forming method according to any one of claims 1 to 9.

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