TGV glass substrate cleaning agent and use method thereof

Abstract

The invention relates to a TGV glass substrate cleaning agent and a use method thereof, and the TGV glass substrate cleaning agent comprises the following components by mass: 10-15% of a surfactant, 5-15% of a high efficiency chelating agent, 2-5% of a corrosion inhibitor, 5-10% of a dispersant, 2-5% of a wetting agent, and the balance of water. The cleaning agent has a good cleaning effect on surface dust spots, oily dirt, polishing solution residues, watermark residues and the like on the glass substrate, is good in cleaning effect, free of residues, free of corrosion to the glass substrate, transistors, conducting circuits, copper and other metals, free of strong acid, strong alkali, nitrite, halogen and other control components, easy to prepare and suitable for industrial production.

Description

Technical Field

[0001] The invention relates to a novel TGV glass substrate cleaning agent and a preparation method and a use method thereof. Background Art

[0002] TGV, Through Glass Via, is a vertical electrical interconnection through a glass substrate. Corresponding to TSV (Through Silicon Via), it is considered to be a key technology for the next generation of three-dimensional integration as a material that may replace silicon substrates. TGV uses high-quality borosilicate glass and quartz glass as substrates, and realizes 3D interconnection through seed layer sputtering, electroplating filling, chemical mechanical planarization, RDL rewiring, and bump process. TGV is a micro-via with a diameter of usually 10μm to 100μm. For various applications in the field of advanced packaging, tens of thousands of TGV vias are usually applied and metalized on each wafer to obtain the required conductivity.

[0003] At present, the mainstream on the market is silicon substrate. Compared with silicon substrate, glass through-hole interconnection technology has the advantages of excellent high-frequency electrical characteristics, low cost of large-size ultra-thin glass substrate, simple process flow, strong mechanical stability, etc. It can be applied to 2.5D / 3D wafer-level packaging, chip stacking, 3D integration of MEMS sensors and semiconductor devices, RF components and modules, CMOS image sensors (CIS), automotive RF and camera modules. Based on this, glass through-hole three-dimensional interconnection technology has become a research hotspot in advanced packaging. TGV provides a lower-cost and lower-loss alternative to challenging and expensive silicon technology. It is expected that TGV substrates will be widely used in 3D integrated semiconductor packaging in the future.

[0004] In order to remove stains or cutting chips generated when cutting TGV glass plates, the mother glass, i.e., the TGV glass substrate, needs to be cleaned. Traditional methods for cleaning the surface of glass components mostly use alkaline cleaning agents to clean the surface of glass components. However, the removal effect of impurities on the glass surface using alkaline cleaning agents is poor, and strong alkalis can corrode the glass and turn it blue. Some technologies also use manual scrubbing combined with various environmentally friendly cleaning agents to clean glass components, but they require repeated cleaning, large sewage discharge, and many consumables; in addition, manual scrubbing has operational uncertainties, which will inevitably cause minor scratches on the surface of glass components, thereby affecting the performance of glass components. There are also technologies that use acidic cleaning agents to clean glass, but the acidity of traditional acidic cleaning agents is difficult to control. If the acidity is too strong, it is easy to cause scratches and black spots on the glass; if the acidity is too weak, the cleaning effect is poor. The patent with application publication number CN104534377A records an optical glass cleaning agent, the mass percentage of potassium hydroxide in the cleaning agent is 10-24%. Although the amount of strong alkali used is reduced, the alkalinity of the cleaning agent is still high, and it also corrodes the glass to a certain extent. The cleaning agents recorded in the patents with application publication numbers CN03138910.4, CN103045391A, CN102604751A, CN104673540A and CN103881843A all use a smaller amount of strong alkali, and also add other alkaline substances, but still have a certain impact on the glass substrate. The cleaning agents disclosed in the patents with application publication numbers CN101250465A and CN102796625A do not use strong alkali, and their alkalinity is relatively low, but both add phosphorus-containing substances, which do not meet environmental protection requirements. The patent with application publication number CN104357240A records a glass cleaning agent for the electronics industry. The cleaning agent does not contain phosphorus and strong alkaline substances, but the weak alkaline substances in the components also give the cleaning agent a certain alkalinity.

[0005] Therefore, for the new technology TGV glass substrate with high precision and high technical content requirements, general alkaline cleaning agents are difficult to meet the cleaning requirements. Summary of the invention

[0006] The purpose of the present invention is to provide a novel TGV glass substrate cleaning agent and a preparation method thereof. The cleaning agent has a good cleaning effect on surface dust spots, oily dirt, polishing liquid residue, watermark residue, etc. on the TGV glass substrate, has a good cleaning effect, has no residue, does not corrode the glass substrate and transistors, conductive circuits, copper and other metals, and does not contain other controlled components such as strong acids and alkalis, nitrites, halogens, etc., is easy to prepare, and is suitable for industrial production.

[0007] Another object of the present invention is to provide a method for using the cleaning agent.

[0008] To achieve the above object, the present invention is implemented through the following technical solutions:

[0009] On the one hand, the present invention provides a TGV glass substrate cleaning agent, which comprises, by mass percentage, 10-15% of a surfactant, 5-15% of a high-efficiency chelating agent, 2-5% of a corrosion inhibitor, 5-10% of a dispersant, 2-5% of a wetting agent, and the balance is water.

[0010] Furthermore, the surfactant is lauryl alcohol polyoxyethylene ether, castor oil polyoxyethylene ether, C 8-10 - At least one of fatty alcohol polyoxyethylene ether, sodium dodecylbenzene sulfonate, and sulfonate of fatty acid methyl ester ethoxylate. The surfactant can effectively disperse dirt on the glass surface, provide good cleaning performance, and control the cleaning efficiency and life.

[0011] Furthermore, the high-efficiency chelating agent is at least one of potassium sodium tartrate, sodium citrate, EDTA-4Na, and sodium gluconate. The high-efficiency chelating agent has a certain chelating effect on metal ions and prevents excessive metal ions from affecting the cleaning efficiency.

[0012] Furthermore, the corrosion inhibitor is at least one of sodium silicate, sodium metasilicate, benzotriazole and zinc sulfate. The corrosion inhibitor protects metal devices such as aluminum and copper on the TGV glass substrate.

[0013] High-efficiency chelating agents and corrosion inhibitors form weak alkalinity, which is not only beneficial to the cleaning life of the system, but also can avoid the problem of blueing of glass caused by strong alkaline cleaning agents and black spots on glass caused by strong acidic cleaning agents.

[0014] Furthermore, the dispersant is at least one of sodium polyacrylate, sodium methylene bis(methyl naphthalene sulfonate) and polyaspartic acid. The dispersant accelerates the separation of dirt during cleaning. By combining the rapid wetting, dispersion and emulsification of substances attached to the surface of the glass substrate with surfactants, high-efficiency chelating agents and corrosion inhibitors, the stains are separated from the glass substrate and the cleaning rate can be achieved. The cleaning agent of the present invention can separate small particles of impurities adhered to the surface of the glass cover plate by using a dispersant, effectively remove fingerprints, dust, glass powder, grease and other organic and inorganic solid particles on the surface of the glass cover plate, and has a good cleaning effect.

[0015] Furthermore, the wetting agent is at least one of branched secondary alcohol polyoxyethylene ether, polyether, and silicone polyether nonionic surfactant. The wetting agent reduces surface tension and enhances the cleaning effect of the surfactant.

[0016] The new technology TGV glass substrate cleaning agent formed by combining the above substances is a composition with comprehensive properties. This comprehensive performance is the result of the synergistic cooperation of various substances. The various compositions form a complete whole, so that the cleaning agent has the advantages of high cleaning efficiency, clean without residue, long service life, safety for TGV glass substrates, safety for metal devices on the substrate, simple ingredients, easy preparation, and suitability for industrial production.

[0017] Furthermore, the glass substrate cleaning agent comprises, by mass percentage: 8-10 - Fatty alcohol polyoxyethylene ether 10%, sodium dodecylbenzene sulfonate 2%, potassium sodium tartrate 6%, sodium silicate 2%, zinc sulfate 1%, benzotriazole 0.5%, branched secondary alcohol polyoxyethylene ether 2%, polyether 1%, and the balance is water.

[0018] In another aspect, the present invention provides a method for using a TGV glass substrate cleaning agent, comprising the following steps:

[0019] S1: Go up to the cleaning gantry line and add the TGV glass substrate cleaning agent of the present invention into the cleaning tank;

[0020] S2: Put the TGV glass substrate to be cleaned on the hanger and put it into the cleaning tank of the gantry line for cleaning;

[0021] S3: Rinse in a rinsing tank and dry in a drying tank.

[0022] Furthermore, when the TGV glass substrate cleaning agent in the cleaning tank in S2 is reduced as the workpiece is taken away, it is directly added into the tank to maintain the concentration.

[0023] Furthermore, the concentration of the TGV glass substrate cleaning agent in the cleaning tank is 10-15%.

[0024] Furthermore, the temperature in the cleaning agent tank is 50-60°C.

[0025] Furthermore, the cleaning refers to ultrasonic cleaning for 3 to 10 minutes.

[0026] On the other hand, the present invention provides a method for preparing a TGV glass substrate cleaning agent, comprising the following steps: uniformly mixing the components provided by the glass substrate cleaning agent of the present invention to obtain the cleaning agent.

[0027] Compared with the prior art, the present invention has the following advantages:

[0028] The present invention adopts a high-efficiency compound of a surfactant, a high-efficiency chelating agent, a corrosion inhibitor, a dispersant, a wetting agent and water through reasonable screening of various components, has simple ingredients, is easy to prepare, and is suitable for industrial production. The surfactant provides good cleaning performance to control the cleaning efficiency and life; the high-efficiency chelating agent has a certain chelating effect on metal ions to prevent excessive metal ions from affecting the cleaning efficiency; the corrosion inhibitor has a protective effect on metals such as aluminum and copper; the dispersant accelerates the separation of dirt during cleaning; and the wetting agent reduces surface tension and strengthens the cleaning effect of the surfactant.

[0029] The cleaning agent of the present invention is prepared by using the above raw materials and strictly controlling the weight ratio of each raw material. The cleaning agent obtained by the present invention can make the glass surface and attachments thoroughly wet without damaging the glass, so that the powder particles and organic matter adhering to the glass surface can expand and loosen, and part of them can naturally fall and disperse in the aqueous solution including the cleaning agent, ensuring that the stains remaining on the glass product to be cleaned can be thoroughly cleaned. The high-efficiency chelating agent and corrosion inhibitor can cause a local chemical reaction on the surface of the glass cover plate, and the attachments on the surface are quickly wetted, dispersed and emulsified due to the violent molecular movement in the liquid and detached, and other substances adhering to the surface of the glass cover plate are completely removed, and finally the cleaning rate of the glass cover plate surface can reach more than 99%.

[0030] The invention has a good cleaning effect on surface dust spots, oily dirt, polishing liquid residue, watermark residue, etc. on the glass substrate, has a good cleaning effect, leaves no residue, and does not corrode the glass substrate and transistors, conductive circuits, copper and other metals.

[0031] The cleaning agent of the present invention does not contain other toxic and harmful, flammable and explosive controlled components such as strong acids and alkalis, nitrites, halogens, etc., is easy to prepare, and is suitable for industrial production. DETAILED DESCRIPTION

[0032] The above-mentioned novel TGV glass substrate cleaning agent is further described below through specific implementation methods.

[0033] Example 1

[0034] A new type of TGV glass substrate cleaning agent, the components and dosage of which are: 8% lauryl alcohol polyoxyethylene ether, 4% sodium dodecylbenzene sulfonate, 6% potassium sodium tartrate, 2% sodium silicate, 3% sodium polyacrylate, 3% polyaspartic acid, 3% branched secondary alcohol polyoxyethylene ether, and the balance is water.

[0035] The TGV glass substrate to be cleaned is placed on a hanger and fed into the gantry line for cleaning. The cleaning agent tank is ultrasonically cleaned at 55°C for 5 minutes. The glass substrate, transistors, conductive circuits, copper and other metals are not damaged.

[0036] Example 2

[0037] A new technology TGV glass substrate cleaning agent components and dosage: C 8-10 - Fatty alcohol polyoxyethylene ether 9%, fatty acid methyl ester ethoxylate sulfonate 5%, EDTA-4Na 3%, potassium sodium tartrate 3%, sodium metasilicate 2%, sodium methylene bismethylnaphthalene sulfonate 6%, polyether 3%, and the balance is water.

[0038] The TGV glass substrate to be cleaned is placed on a hanger and fed into the gantry line for cleaning. It is ultrasonically cleaned at 60°C for 6 minutes in a cleaning agent tank and is cleaned without any damage to the glass substrate, transistors, conductive circuits, copper and other metals.

[0039] Example 3

[0040] A new type of TGV glass substrate cleaning agent has the following components and dosages: 6% of castor oil polyoxyethylene ether, 6% of C8-10-fatty alcohol polyoxyethylene ether, 4% of sodium citrate, 5% of sodium gluconate, 2.5% of sodium silicate, 1% of benzotriazole, 6% of polyaspartic acid, 3% of organosilicon polyether nonionic surfactant, and the balance is water.

[0041] The TGV glass substrate to be cleaned is placed on a hanger and fed into the gantry line for cleaning. It is ultrasonically cleaned at 50°C for 8 minutes in a cleaning agent tank and is cleaned without any damage to the glass substrate, transistors, conductive circuits, copper and other metals.

[0042] Example 4

[0043] A new technology TGV glass substrate cleaning agent components and dosage: C 8-10 - Fatty alcohol polyoxyethylene ether 10%, sodium dodecylbenzene sulfonate 2%, potassium sodium tartrate 6%, sodium silicate 2%, zinc sulfate 1%, benzotriazole 0.5%, branched secondary alcohol polyoxyethylene ether 2%, polyether 1%, and the balance is water.

[0044] The TGV glass substrate to be cleaned is placed on a hanger and fed into the gantry line for cleaning. It is ultrasonically cleaned at 60°C for 4 minutes in a cleaning agent tank and is cleaned without any damage to the glass substrate, transistors, conductive circuits, copper and other metals.

[0045] Example 5

[0046] A new type of TGV glass substrate cleaning agent components and dosage: 2% sodium dodecylbenzene sulfonate, 8% sulfonate of fatty acid methyl ester ethoxylate, 2% sodium gluconate, 2% sodium citrate, 3% EDTA-4Na, 1% sodium metasilicate, 1% benzotriazole, 2% zinc sulfate, 2% sodium polyacrylate, 4% sodium methylene bismethylnaphthalene sulfonate, 2% polyether, 2% silicone polyether nonionic surfactant, and the balance is water.

[0047] The TGV glass substrate to be cleaned is placed on a hanger and fed into the gantry line for cleaning. The cleaning agent tank is ultrasonically cleaned at 55°C for 6 minutes. The glass substrate, transistors, conductive circuits, copper and other metals are not damaged.

[0048] Comparative Example 1

[0049] The difference from Example 4 is that: 8-10 - Fatty alcohol polyoxyethylene ether 6%, sodium dodecylbenzene sulfonate 2%.

[0050] When a lower amount of surfactant is used, the efficiency is reduced during the cleaning process, which is manifested in a lower surface tension of the solution, a higher foam height, and a glass cleaning yield of only 90%.

[0051] Comparative Example 2

[0052] The difference from Example 4 is that potassium sodium tartrate is not contained.

[0053] Without the chelating agent to chelate the metal ions in the water, the cleaning efficiency is significantly reduced, which is manifested as the cleaning yield rate drops to 89%. The glass cleaning yield rate refers to the percentage of clean glass substrates that meet the requirements among the clean glass substrates to the total number of glass substrates.

[0054] Comparative Example 3

[0055] The difference from Example 4 is that there is no corrosion inhibitor.

[0056] The cleaning agent was used to clean a glass substrate. After being placed for 15 days, corrosion occurred on the metal components on the glass substrate.

[0057] Comparative Example 4

[0058] The difference from Example 4 is that the dispersant is missing.

[0059] The cleaning agent is used to clean the glass substrate. A small amount of stains on the glass substrate cannot be removed, and some of them need to be cleaned manually. The glass cleaning yield is only 79%.

[0060] Comparative Example 5

[0061] The difference from Example 4 is that the wetting agent is missing.

[0062] The cleaning agent was used to clean the glass substrate, but the glass substrate could not be wetted quickly, and some stains remained after cleaning. The glass cleaning yield was only 86%.

[0063] Effect Example 1

[0064] The cleaning effect of the cleaning agent prepared in this application was tested, and the results are shown in Table 1 below:

[0065]

[0066] Note: Oil return will seriously affect the function of subsequent processes.

[0067] It can be seen from Table 1 that the cleaning agent prepared in Example 4 of the present application has the best effect.

[0068] Effect embodiment 2:

[0069] The cleaning effect of the cleaning agent prepared in this application was tested, and the results are shown in Table 2 below:

[0070]

[0071] As can be seen from Table 2, the glass cleaning agent prepared in Example 4 of the present application has a good cleaning effect on stains on the surface of the glass substrate. Compared with the metal cleaning agent, the glass cleaning agent prepared in Example 4 of the present application does not affect the specific properties of the TGV glass substrate and has a good cleaning effect; at the same time, it effectively solves the problems of existing acidic and alkaline cleaning agents during use.

[0072] Although some exemplary embodiments of the present invention have been shown above, it will be appreciated by those skilled in the art that changes may be made to the exemplary embodiments without departing from the principles or spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A TGV glass substrate cleaning agent, characterized in that: Calculated by mass percentage, it includes: 10-15% of a surfactant, 5-15% of a high-efficiency chelating agent, 2-5% of a corrosion inhibitor, 5-10% of a dispersant, 2-5% of a wetting agent, and the balance is water.

2. The TGV glass substrate cleaning agent according to claim 1, characterized in that: The surfactant is lauryl alcohol polyoxyethylene ether, castor oil polyoxyethylene ether, C 8-10 - At least one of the sulfonates of fatty alcohol polyoxyethylene ether, sodium dodecylbenzene sulfonate, and fatty acid methyl ester ethoxylate.

3. The TGV glass substrate cleaning agent according to claim 1, characterized in that: The high-efficiency chelating agent is at least one of potassium sodium tartrate, sodium citrate, EDTA-4Na and sodium gluconate.

4. The TGV glass substrate cleaning agent according to claim 1, characterized in that: The corrosion inhibitor is at least one of sodium silicate, sodium metasilicate, benzotriazole and zinc sulfate.

5. The TGV glass substrate cleaning agent according to claim 1, characterized in that: The dispersant is at least one of sodium polyacrylate, sodium methylene bis(methyl naphthalene sulfonate) and polyaspartic acid.

6. The TGV glass substrate cleaning agent according to claim 1, characterized in that: The wetting agent is at least one of branched secondary alcohol polyoxyethylene ether, polyether, and silicone polyether nonionic surfactant.

7. A method for using a TGV glass substrate cleaning agent, characterized in that: The following steps are involved: S1: Go up to the cleaning gantry line and add the TGV glass substrate cleaning agent of the present invention into the cleaning tank; S2: Put the TGV glass substrate to be cleaned on the hanger and put it into the cleaning tank of the gantry line for cleaning; S3: Rinse in a rinsing tank and dry in a drying tank.

8. The method of use according to claim 7, characterized in that: When the TGV glass substrate cleaning agent in the cleaning tank in S2 decreases as the workpiece is taken away, it is directly added into the tank to maintain the concentration; the concentration of the TGV glass substrate cleaning agent in the cleaning tank is 10-15%.

9. The method of use according to claim 7, characterized in that: The temperature in the cleaning agent tank is 50-60° C.; the cleaning refers to ultrasonic cleaning for 3-10 minutes.

10. A method for preparing a TGV glass substrate cleaning agent, characterized in that: The method comprises the following steps: providing each component of the glass cleaning agent according to any one of claims 1 to 6, and mixing each component evenly to obtain the cleaning agent.

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