Ultrahigh vacuum sample transfer system and use method thereof

Abstract

The invention relates to an ultrahigh vacuum sample transfer system and a use method thereof.The ultrahigh vacuum sample transfer system comprises a transfer cavity used for connecting an ultrahigh vacuum transferable cavity and a test system, the transfer cavity is further connected with a glass perspective window, a full-scale gauge, a molecular pump and a sample transfer device in a sealed mode, and the molecular pump is connected with a dry type vortex pump; the sample transfer device comprises a sample table located in the transfer cavity and a connecting plate which is parallel to and fixedly connected with the sample table, the sample table is used for placing and fixing a conversion support transferred by the test system, and the conversion support is used for placing and fixing a flag-shaped sample support which is transferred by the ultrahigh vacuum transferable cavity and carries samples. According to the technical scheme, the sample transferring device is used for transferring the sample in the ultrahigh vacuum transferable cavity into a testing system for testing, the whole transferring process of the sample is completed in the ultrahigh vacuum environment, pollution of the external environment to the sample in the transferring process can be effectively avoided, and therefore the most original state of the sample is maintained.

Description

Technical Field

[0001] The present invention relates to the field of vacuum technology, and in particular to an ultra-high vacuum sample transfer system and a use method thereof. Background Art

[0002] Vacuum environment is very important for surface science research. High vacuum environment (about 10 -6 Torr), the deposition time per monoatomic layer is 1 second, while in ultra-high vacuum (about 10 -11 Torr), the adsorption rate of gas molecules is extremely slow, and it takes about 27 hours to adsorb a single layer. The solid surface is almost unaffected by gas molecules in a short period of time. Due to the limitations of characterization methods, it is difficult for a single ultra-high vacuum system to complete the comprehensive characterization of the sample, which requires us to interconnect different systems. Through the ultra-high vacuum transferable cavity, samples in different systems can be transferred to the test system for testing by mechanical transfer, but for this transmission method, there is still a lack of a dedicated transfer system for the transition of such samples. Generally speaking, a four-way flange can be connected to the fast injection chamber cavity of the test system for sample transfer, but this type of fast injection chamber cavity is frequently exposed to the atmosphere and often stores powder samples, which makes the cavity easily contaminated and difficult to maintain in an ultra-high vacuum state, generally only reaching 10 -7 ~10 -8 For samples with sensitive surfaces, when this method is used for transfer, they are easily contaminated, resulting in deviations in the test results. Summary of the invention

[0003] The purpose of the present invention is to provide an ultra-high vacuum sample transfer system, which is used to transfer samples inside an ultra-high vacuum transferable cavity to a testing system for testing. The sample transfer process is completed entirely in an ultra-high vacuum environment, which can effectively avoid contamination of the sample by the external environment during the transfer process, thereby maintaining the sample in its most original state.

[0004] To achieve the above object, the present invention adopts the following technical scheme: comprising a transfer cavity for connecting an ultra-high vacuum transferable cavity and a test system, the transfer cavity is also sealed with a glass perspective window, a full-range gauge, a molecular pump and a sample transfer device, and the molecular pump is connected to a dry vortex pump; The sample transfer device includes a sample stage located in the transfer chamber and a connecting plate parallel to and fixedly connected to the sample stage. The sample stage is used to place and fix a conversion tray transferred from a testing system, and the conversion tray is used to place and fix a flag-shaped sample tray carrying a sample transferred from an ultra-high vacuum transferable chamber. The sample transfer device also includes a magnetically coupled rotary driver located outside the transfer chamber, a metal rod at the front end of the magnetically coupled rotary driver extends into the transfer chamber and is vertically fixed to the connecting plate to drive the connecting plate to rotate, and a linear driver is provided on the metal rod located outside the transfer chamber, and the linear driver is used to adjust the axial displacement of the metal rod.

[0005] The linear drive includes a bellows sleeved on a metal rod, an upper connecting flange and a lower connecting flange are respectively fixed to the upper and lower ends of the bellows, the upper connecting flange is sealedly connected to the transfer cavity, and the lower connecting flange is sealedly connected to the connecting flange on the magnetically coupled rotary drive, and a screw nut mechanism connecting the upper connecting flange and the lower connecting flange is also provided on the side of the bellows.

[0006] A transfer flange is sealed between the transfer cavity and the linear driver, a hollow collimation shaft is welded in the inner hole of the transfer flange, the metal rod passes through the collimation shaft in the connecting flange and is fixed to the connecting plate, and a gap is left between the metal rod and the collimation shaft.

[0007] The sample stage and the connecting plate are fixed by screws and nuts. A threaded hole is provided at the center of the connecting plate. The front end of the metal rod is provided with threads matching the threaded hole. The metal rod is threadedly connected to the threaded hole and then fixed by tightening with a nut.

[0008] The transfer chamber is in a cubic shape as a whole, the glass perspective window is sealed and connected to the CF63 flange edge on the upper side of the transfer chamber, the full-range gauge is sealed and connected to the CF35 flange edge on the left side of the transfer chamber, the molecular pump is sealed and connected to the CF63 flange edge on the right side of the transfer chamber, the upper flange opening of the adapter flange is sealed and connected to the CF35 flange edge on the lower side of the transfer chamber, the lower flange opening of the adapter flange is sealed and connected to the upper connecting flange of the linear drive, the CF35 manual gate valve on the ultra-high vacuum transferable chamber is sealed and connected to the CF35 flange edge on the front side of the transfer chamber, and the CF63 manual gate valve on the test system is sealed and connected to the CF63 flange edge on the rear side of the transfer chamber.

[0009] The conversion tray is cylindrical as a whole, and a slot for fixing a flag-shaped sample tray is provided on the support surface of the conversion tray. The outer wall of the conversion tray is evenly spaced along its circumference with a first ear plate, a first positioning groove, a second ear plate and a second positioning groove, wherein: the first ear plate and the second ear plate are both arranged perpendicular to the outer wall of the conversion tray, the first ear plate is fixed to the sample transfer rod in the test system, and a first through hole is provided at the center of the first ear plate; the second ear plate is fixed to the sample stage, and a second through hole is provided at the center of the second ear plate; the first positioning groove and the second positioning groove are symmetrically arranged, and the bottoms of the first positioning groove and the second positioning groove are both flat.

[0010] The sample table is an integral structure, including a first block in the shape of a long strip, and a second block and a third block respectively vertically connected to the two ends of the first block. The first block is provided with a slot that forms a plug-in fit with the second ear plate of the conversion tray. The second block and the third block are symmetrically arranged, and the end faces of the second block and the third block that are close to each other are respectively provided with positioning bosses that cooperate with the first positioning groove and the second positioning groove.

[0011] An elastic fixing clamping device for preventing the conversion support from falling off is also provided in the slot of the sample stage, and the elastic fixing clamping device comprises a first stainless steel wire and a second stainless steel wire arranged in the left and right directions, and the first stainless steel wire is an integrated structure, comprising a first steel wire segment, a second steel wire segment, a third steel wire segment and a fourth steel wire segment connected in sequence, wherein: the first steel wire segment is arranged in a horizontal direction, and the head end of the first steel wire segment is fixed to the first block body by a screw, the second steel wire segment is arranged perpendicular to the first steel wire segment, and the second steel wire segment and the first steel wire segment are located in the same horizontal plane, the third steel wire segment and the fourth steel wire segment form a V-shaped structure with an opening upward, and the second steel wire segment, the third steel wire segment and the fourth steel wire segment are located in the same vertical plane; The second stainless steel wire is an integrated structure, including a fifth steel wire segment, a sixth steel wire segment, a seventh steel wire segment and an eighth steel wire segment connected in sequence, wherein: the fifth steel wire segment is arranged in a horizontal direction, and the head end of the fifth steel wire segment is fixed to the first block through a screw, the sixth steel wire segment is arranged perpendicular to the fifth steel wire segment, and the sixth steel wire segment and the fifth steel wire segment are located in the same horizontal plane, the seventh steel wire segment and the eighth steel wire segment form a V-shaped structure with an opening facing downward, and the sixth steel wire segment, the seventh steel wire segment and the eighth steel wire segment are located in the same vertical plane; The second steel wire segment, the third steel wire segment, the fourth steel wire segment, the sixth steel wire segment, the seventh steel wire segment, and the eighth steel wire segment are all located in the slot, and the fourth steel wire segment and the eighth steel wire segment form an opening for facilitating the insertion of the second ear plate of the conversion tray. After the conversion tray is inserted, the connection point between the third steel wire segment and the fourth steel wire segment and the connection point between the seventh steel wire segment and the eighth steel wire segment are respectively inserted into the second through hole of the second ear plate from the upper and lower directions to clamp and fix the conversion tray.

[0012] Another object of the present invention is to provide a method for using an ultra-high vacuum sample transfer system, comprising the following steps: S1: Connect the ultra-high vacuum transferable chamber and the test system to the transfer chamber. At this time, the CF35 manual gate valve on the ultra-high vacuum transferable chamber and the CF63 manual gate valve on the test system are both in the closed state; S2: vacuumizing, baking and cooling the transfer chamber to make the vacuum degree in the transfer chamber reach an ultra-high vacuum state; S3: Open the CF63 manual gate valve on the test system, and push the conversion support to the sample table in the transfer chamber through the sample transfer rod in the test system and fix it; S4: The sample transfer rod of the test system is retracted, and the CF63 manual plug valve on the test system is closed; S5: The magnetically coupled rotary drive works, causing the sample stage and the conversion holder to rotate 90 degrees counterclockwise synchronously; S6: Open the CF35 manual plug valve on the ultra-high vacuum transfer chamber, and the sample transfer rod in the ultra-high vacuum transfer chamber pushes the flag-shaped sample holder carrying the sample into the card slot of the conversion holder in the transfer chamber through its front end gripper; S7: Release the front gripper of the sample transfer rod of the ultra-high vacuum transfer chamber and retract the sample transfer rod, and close the CF35 manual plug valve on the ultra-high vacuum transfer chamber; S8: The magnetically coupled rotary drive works, causing the sample stage, conversion holder, and flag-type sample holder to rotate 90 degrees clockwise synchronously; S9: Open the CF63 manual gate valve on the test system, grab the conversion tray in the transfer chamber through the sample transfer rod in the test system, transfer the conversion tray carrying the flag-shaped sample tray to the test system, and then close the CF63 manual gate valve on the test system to perform sample testing in the test system.

[0013] In S2, the vacuum treatment of the transfer cavity is performed by a dry vortex pump and a molecular pump, the baking treatment of the transfer cavity is performed by winding a heating belt around the outside of the transfer cavity and connecting an external power supply, and the cooling treatment of the transfer cavity refers to turning off the external power supply after baking for natural cooling; The ultra-high vacuum state in S2 refers to the vacuum degree in the transfer chamber being less than 1×10 -9 Torr.

[0014] The beneficial effects of the present invention are: 1) The present invention realizes the transfer of samples under the whole ultra-high vacuum state by setting up a transfer system between the ultra-high vacuum transferable cavity and the test system, thereby avoiding the problem of samples being contaminated by the external environment when being transmitted between different systems to the greatest extent, and enabling the samples to maintain their most original state when being tested in the cavity of the test system.

[0015] 2) The present invention supports and fixes the conversion tray through the sample stage and the elastic fixing clamping device, and can easily grasp and release the conversion tray. It has a simple structure and is easy to operate.

[0016] 3) The present invention has a simple overall structure and sophisticated design, and adopts a mechanical seal to achieve a sealed connection with good sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure of the present invention is schematically shown in FIG. Figure 1 ; Figure 2 The structure of the present invention is schematically shown in FIG. Figure 2 ; Figure 3 It is a structural schematic diagram of the sample transfer device of the present invention; Figure 4 The structure of the sample stage of the present invention is shown in FIG. Figure 1 ; Figure 5 The structure of the sample stage of the present invention is shown in FIG. Figure 2 ; Figure 6 The structure of the sample stage of the present invention is shown in FIG. Figure 3 ; Figure 7 The structure of the conversion support of the present invention is shown in FIG. Figure 1 ; Figure 8 The structure of the conversion support of the present invention is shown in FIG. Figure 2 ; Fig. 9 This is a schematic diagram of the structure of the conversion tray inserted into the sample stage of the present invention. Figure 1 ; Fig.10 This is a schematic diagram of the structure of the conversion tray inserted into the sample stage of the present invention. Figure 2 ; Fig.11 It is a schematic diagram of the structure of the flag-shaped sample holder of the present invention; Fig.12 It is a structural schematic diagram of the adapter flange of the present invention; Fig.13 The structure of the linear actuator of the present invention is shown in FIG. Figure 1 ; Fig.14 The structure of the linear actuator of the present invention is shown in FIG. Figure 2 ; Fig.15 It is a schematic diagram of the connection between the present invention and the ultra-high vacuum transferable cavity; Fig.16 It is a schematic diagram of the sample transfer rod in the test system of the present invention transferring and fixing the conversion support on the sample stage; Fig.17 It is a schematic diagram of a sample transfer rod in an ultra-high vacuum transferable chamber of the present invention transferring a flag-shaped sample holder to a conversion holder; Fig.18 It is a schematic diagram of the sample transfer rod in the test system of the present invention grabbing the conversion tray carrying the flag-shaped sample tray.

[0018] The marks in the above drawings are: transfer chamber 1, glass perspective window 11, full-range gauge 12, molecular pump 13, dry vortex pump 14, sample transfer device 2, sample stage 21, first block 211, second block 212, third block 213, slot 214, positioning boss 215, connecting plate 22, magnetic coupling rotary driver 23, metal rod 24, connecting flange 25, screw 26, conversion bracket 3, slot 31, first ear plate 32, first through hole 321, first positioning slot 33, second ear plate 34, second through hole 341, flag-shaped sample Support 4, linear drive 5, bellows 51, upper connecting flange 52, lower connecting flange 53, screw nut mechanism 54, adapter flange 6, collimation axis 61, elastic fixing clamping device 7, first stainless steel wire 71, second stainless steel wire 72, first steel wire segment 711, second steel wire segment 712, third steel wire segment 713, fourth steel wire segment 714, fifth steel wire segment 721, sixth steel wire segment 722, seventh steel wire segment 723, eighth steel wire segment 724, CF63 manual plug valve 8, ultra-high vacuum transferable chamber 100, and testing system 200. DETAILED DESCRIPTION

[0019] The present invention will be further described below in conjunction with the accompanying drawings: like Figure 1 , Figure 2 An ultra-high vacuum sample transfer system shown includes a transfer chamber 1 for connecting an ultra-high vacuum transferable chamber 100 and a test system 200, and a glass perspective window 11, a full-range gauge 12, a molecular pump 13 and a sample transfer device 2 are also sealed to the transfer chamber 1. The transfer chamber 1 in this embodiment is generally in the shape of a cube, and the glass perspective window 2 is sealed to the CF63 flange edge on the upper side of the transfer chamber 1 for observing the internal conditions of the transfer chamber 1; the full-range gauge 3 is sealed to the CF35 flange edge on the left side of the transfer chamber 1 for monitoring the vacuum conditions inside the transfer chamber 1; the molecular pump 4 is sealed to the CF63 flange edge on the right side of the transfer chamber 1, and the molecular pump 13 is connected to the dry vortex pump 14 for evacuating the transfer chamber 1. Fig.15As shown, the CF35 manual gate valve on the ultra-high vacuum transferable chamber is sealed and connected to the CF35 flange knife edge on the front side of the transfer chamber 1, and the CF63 manual gate valve 8 on the test system is sealed and connected to the CF63 flange knife edge on the rear side of the transfer chamber 1. Each flange knife edge of the present invention is sealed with an oxygen-free copper gasket of corresponding size.

[0020] Further, such as Figure 3 As shown, the sample transfer device 2 includes a sample stage 21 located in the transfer chamber 1 and a connecting plate 22 parallel to and fixed to the sample stage 21. The sample stage 21 is used to place and fix the conversion tray 3 transferred from the test system, and the conversion tray 3 is used to place and fix the flag-shaped sample tray 4 carrying the sample transferred from the ultra-high vacuum transferable chamber. Specifically, the sample stage 21 and the connecting plate 22 are fixed by a screw 26 and a nut. The sample transfer device 2 also includes a magnetic coupling rotation driver 23 located outside the transfer chamber 1. The metal rod 24 at the front end of the magnetic coupling rotation driver 23 extends into the transfer chamber 1 and is vertically fixed to the connecting plate 22 to drive the connecting plate 22 to rotate. Specifically, a threaded hole is provided at the center of the connecting plate 22, and a thread matching the threaded hole is provided at the front end of the metal rod 24. The metal rod 24 is threadedly connected to the threaded hole and is tightened and fixed by a nut. The magnetic coupling rotation driver 23 in this embodiment adopts a magnetic coupling rotation driver of model RD94 of VACGEN Company, and the magnetic coupling rotation driver 23 can drive the metal rod 24 to rotate around the axis. The specific structure and principle of the magnetic coupling rotary driver 23 may refer to the prior art.

[0021] Further, such as Fig.13 , Fig.14 As shown, a linear driver 5 is provided on the metal rod 24 outside the transfer chamber 1, and the linear driver 5 is used to adjust the axial displacement of the metal rod 24. The linear driver 5 includes a bellows 51 sleeved on the metal rod 24, and an upper connecting flange 52 and a lower connecting flange 53 are fixed to the upper and lower ends of the bellows 51, respectively. The upper connecting flange 52 is sealedly connected to the transfer chamber 1, and the lower connecting flange 53 is sealedly connected to the connecting flange 25 on the magnetic coupling rotary driver 23. A screw nut mechanism 54 connecting the upper connecting flange 52 and the lower connecting flange 53 is also provided on the side of the bellows 51. When the screw nut mechanism 54 moves, it can drive the lower connecting flange 53 to move up and down along the axial direction of the metal rod 24. Since the lower connecting flange 53 is fixed to the connecting flange 25 on the magnetic coupling rotary driver 23, the lower connecting flange 53 can synchronously drive the magnetic coupling rotary driver 23 and the metal rod 24 to move up and down along the axial direction, so as to achieve the height adjustment of the sample stage 21 in the transfer chamber 1. The linear driver in this embodiment is a linear driver model LTM16L7M produced by Feimian Instrument Technology (Shanghai) Co., Ltd., and its specific structure and principle can refer to the prior art.

[0022] Furthermore, a transfer flange 6 is sealed between the transfer cavity 1 and the linear drive 5. Figure 1 , Fig.12 As shown, a hollow collimation shaft 61 is welded in the inner hole of the adapter flange 6, and the metal rod 24 passes through the collimation shaft 61 in the connecting flange 6 and is fixed to the connecting plate 22. A gap is left between the metal rod 24 and the collimation shaft 61. The gap should not be too large so that the metal rod 24 does not interfere with the inner wall of the collimation shaft 61 when rotating. Specifically, the upper flange opening of the adapter flange 6 is sealed and connected to the CF35 flange knife edge on the lower side of the transfer cavity 1, and the lower flange opening of the adapter flange 6 is sealed and connected to the upper connecting flange 52 of the linear drive 5. The collimation shaft 61 in this embodiment is used to fix the metal rod 24 at the front end of the magnetic coupling rotary drive 23 to prevent the sample stage 21 from shaking when the magnetic coupling rotary drive 23 rotates.

[0023] Generally speaking, after the sample is prepared, it is fixed on the flag-shaped sample holder 4, and the flag-shaped sample holder 4 is stored inside the ultra-high vacuum transferable chamber, so a conversion holder 3 that can match the flag-shaped sample holder 4 is set in the test system connected to the transfer chamber 1. In this embodiment, the conversion holder 3 is cylindrical as a whole, such as Figure 7 , Figure 8 , Fig.11 As shown, a slot 31 for fixing the flag-shaped sample holder 4 is provided on the holder surface of the conversion holder 3, and a first ear plate 32, a first positioning groove 33, a second ear plate 34 and a second positioning groove are evenly spaced along the circumference of the outer wall of the conversion holder 3, wherein: the first ear plate 32 and the second ear plate 34 are both arranged perpendicular to the outer wall of the conversion holder 3, the first ear plate 32 is fixed to the sample transfer rod in the test system, and a first through hole 321 is provided at the center of the first ear plate 32, the sample transfer rod in the test system clamps the first ear plate 32, and the locking tongue on the sample transfer rod is fixed to the first through hole 321; the second ear plate 34 is fixed to the sample stage 21, and a second through hole 341 is provided at the center of the second ear plate 34; the first positioning groove 33 and the second positioning groove are symmetrically arranged, and the bottoms of the first positioning groove 33 and the second positioning groove are both flat.

[0024] Further, such as Figure 4 , Figure 5 , Figure 6 As shown, the sample stage 21 is an integral structure, including a first block 211 in the shape of a long strip, and a second block 212 and a third block 213 respectively vertically connected to the two ends of the first block 211. The first block 211 is provided with a slot 214 which is plugged into the second ear plate 34 of the conversion tray 3. The second block 212 and the third block 213 are symmetrically arranged, and the end faces of the second block 212 and the third block 213 which are close to each other are respectively provided with positioning bosses 215 which cooperate with the first positioning groove 33 and the second positioning groove.

[0025] Furthermore, an elastic fixing clamping device 7 is also provided in the slot 214 of the sample stage 21 to prevent the conversion tray 3 from falling off. The elastic fixing clamping device 7 includes a first stainless steel wire 71 and a second stainless steel wire 72 arranged in the left and right directions, and the first stainless steel wire 71 is an integrated structure, including a first steel wire segment 711, a second steel wire segment 712, a third steel wire segment 713 and a fourth steel wire segment 714 connected in sequence, wherein: the first steel wire segment 711 is arranged in a horizontal direction, and the head end of the first steel wire segment 711 is fixed to the first block 211 through a screw, the second steel wire segment 712 is arranged perpendicular to the first steel wire segment 711, and the second steel wire segment 712 and the first steel wire segment 711 are located in the same horizontal plane, the third steel wire segment 713 and the fourth steel wire segment 714 form a V-shaped structure with an opening upward, and the second steel wire segment 712, the third steel wire segment 713 and the fourth steel wire segment 714 are located in the same vertical plane.

[0026] The second stainless steel wire 72 is an integral structure, including a fifth steel wire segment 721, a sixth steel wire segment 722, a seventh steel wire segment 723 and an eighth steel wire segment 724 connected in sequence, wherein: the fifth steel wire segment 721 is arranged in a horizontal direction, and the head end of the fifth steel wire segment 721 is fixed to the first block 211 by a screw, the sixth steel wire segment 722 is arranged perpendicular to the fifth steel wire segment 721, and the sixth steel wire segment 722 and the fifth steel wire segment 721 are located in the same horizontal plane, the seventh steel wire segment 723 and the eighth steel wire segment 724 form a V-shaped structure opening downward, and the sixth steel wire segment 722, the seventh steel wire segment 723 and the eighth steel wire segment 724 are located in the same vertical plane.

[0027] The second steel wire segment 712, the third steel wire segment 713, the fourth steel wire segment 714 and the sixth steel wire segment 722, the seventh steel wire segment 723, and the eighth steel wire segment 724 are all located in the slot 214, and the fourth steel wire segment 714 and the eighth steel wire segment 724 form an opening for inserting the second ear plate 34 of the conversion tray 3. After the conversion tray 3 is inserted, the connection point between the third steel wire segment 713 and the fourth steel wire segment 714 and the connection point between the seventh steel wire segment 723 and the eighth steel wire segment 724 are respectively inserted into the second through hole 341 of the second ear plate 34 from the upper and lower directions to clamp and fix the conversion tray 3.

[0028] like Fig. 9 , Fig.10As shown, when the conversion tray 3 is inserted into the sample stage 21, the first positioning groove 33 and the second positioning groove are first contacted with the positioning boss 215 for positioning, and when the insertion continues, the two sides of the second ear plate 34 are respectively stuck in the slot 214 for positioning, and when the insertion is further inserted, the second ear plate 34 enters the opening formed by the fourth steel wire segment 714 and the eighth steel wire segment 724, and the first stainless steel wire 71 and the second stainless steel wire 72 are pushed open by the thrust of the second ear plate 34, and finally the connection point of the third steel wire segment 713 and the fourth steel wire segment 714, and the connection point of the seventh steel wire segment 723 and the eighth steel wire segment 724 fall into the second through hole 341 from the upper and lower directions of the second ear plate 34, respectively, to fix the conversion tray 3; at the same time, the second steel wire segment 712 and the sixth steel wire segment 722 are respectively attached to the upper and lower plate surfaces of the second ear plate 34, forming a clamp for the second ear plate 34.

[0029] In the present invention, the flag-shaped sample holder carrying the sample is located in the ultra-high vacuum transferable chamber, and the conversion holder for placing the flag-shaped sample holder is located in the test system. The present invention sets a transfer system connecting the ultra-high vacuum transferable chamber and the test system. When in use, the CF63 manual gate valve of the test system is first opened, and the conversion holder is transferred to the sample table in the transfer chamber through the sample transfer rod in the test system and fixed. Fig.16 As shown, the test system is then turned off. The sample stage is then rotated by the magnetic coupling rotary drive to align the slot on the conversion tray with the transfer direction of the flag-shaped sample tray in the ultra-high vacuum transferable chamber. The CF35 manual plug-in valve on the ultra-high vacuum transferable chamber is then opened, and the flag-shaped sample tray is transferred to the conversion tray via the sample transfer rod in the ultra-high vacuum transferable chamber, as shown. Fig.17 As shown, the CF35 manual gate valve of the ultra-high vacuum transferable chamber is then closed. The sample stage is then rotated back to its initial position by the magnetically coupled rotary drive, and the CF63 manual gate valve of the test system is then opened. The flag-shaped sample holder carrying the sample is transferred back to the test system by the sample transfer rod in the test system, as shown in FIG. Fig.18 As shown, close the CF63 manual gate valve of the test system, and finally test the sample in the test system.

[0030] The present invention also provides a method for using the ultra-high vacuum sample transfer system, comprising the following steps: S1: Connect the ultra-high vacuum transferable chamber and the test system to the transfer chamber. At this time, the CF35 manual gate valve on the ultra-high vacuum transferable chamber and the CF63 manual gate valve on the test system are both in the closed state; S2: vacuumizing, baking and cooling the transfer chamber to make the vacuum degree in the transfer chamber reach an ultra-high vacuum state; S3: Open the CF63 manual gate valve on the test system, and push the conversion support to the sample table in the transfer chamber through the sample transfer rod in the test system and fix it; S4: The sample transfer rod of the test system is retracted, and the CF63 manual plug valve on the test system is closed; S5: The magnetically coupled rotary drive works, causing the sample stage and the conversion holder to rotate 90 degrees counterclockwise synchronously; S6: Open the CF35 manual plug valve on the ultra-high vacuum transfer chamber, and the sample transfer rod in the ultra-high vacuum transfer chamber pushes the flag-shaped sample holder carrying the sample into the card slot of the conversion holder in the transfer chamber through its front end gripper; S7: Release the front gripper of the sample transfer rod of the ultra-high vacuum transfer chamber and retract the sample transfer rod, and close the CF35 manual plug valve on the ultra-high vacuum transfer chamber; S8: The magnetically coupled rotary drive works, causing the sample stage, conversion holder, and flag-type sample holder to rotate 90 degrees clockwise synchronously; S9: Open the CF63 manual gate valve on the test system, grab the conversion tray in the transfer chamber through the sample transfer rod in the test system, transfer the conversion tray carrying the flag-shaped sample tray to the test system, and then close the CF63 manual gate valve on the test system to perform sample testing in the test system.

[0031] Furthermore, in S2, the vacuum treatment of the transfer chamber is carried out by a dry vortex pump and a molecular pump, the baking treatment of the transfer chamber is carried out by winding a heating belt around the outside of the transfer chamber and connecting an external power supply, and the cooling treatment of the transfer chamber refers to turning off the external power supply after baking for natural cooling; the ultra-high vacuum state in S2 refers to the vacuum degree in the transfer chamber being less than 1×10 -9 Torr.

[0032] The specific working process is as follows: First, connect the ultra-high vacuum transferable chamber and the test system to the transfer chamber. At this time, the CF35 manual plug-in valve on the ultra-high vacuum transferable chamber and the CF63 manual plug-in valve on the test system are both in the closed state; secondly, the transfer chamber is evacuated by a molecular pump and a dry vortex pump, and is baked and cooled to make the vacuum degree in the transfer chamber reach an ultra-high vacuum state; thirdly, open the CF63 manual plug-in valve on the test system, and the sample transfer rod in the test system pushes the conversion holder to the sample stage in the transfer chamber and fixes it; then, the sample transfer rod in the test system retracts, and closes the CF63 manual plug-in valve on the test system; then, the magnetically coupled rotary drive works to make the sample stage and the conversion holder rotate 90 degrees counterclockwise synchronously; open the ultra-high vacuum transfer chamber and transfer the sample to the transfer chamber. The CF35 manual gate valve on the vacuum transferable chamber, the sample transfer rod in the ultra-high vacuum transferable chamber pushes the flag-shaped sample holder carrying the sample into the slot of the conversion holder in the transfer chamber through its front-end gripper; then the front-end gripper of the sample transfer rod of the ultra-high vacuum transferable chamber is released and the sample transfer rod is retracted, the CF35 manual gate valve on the ultra-high vacuum transferable chamber is closed, and the magnetically coupled rotary drive works to make the sample stage, conversion holder and flag-shaped sample holder rotate 90 degrees clockwise synchronously; finally, the CF63 manual gate valve on the test system is opened, the conversion holder in the transfer chamber is grasped by the sample transfer rod in the test system, and the conversion holder carrying the flag-shaped sample holder is transferred to the test system, and then the CF63 manual gate valve on the test system is closed, and the sample test is performed in the test system.

[0033] The embodiments described above are merely descriptions of preferred implementation modes of the present invention and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. An ultra-high vacuum sample transfer system, characterized in that: It comprises a transfer chamber (1) for connecting an ultra-high vacuum transferable chamber and a test system, the transfer chamber (1) is also sealed with a glass perspective window (11), a full-range gauge (12), a molecular pump (13) and a sample transfer device (2), and the molecular pump (13) is connected to a dry vortex pump (14); The sample transfer device (2) comprises a sample stage (21) located in the transfer chamber (1) and a connecting plate (22) parallel to and fixedly connected to the sample stage (21), wherein the sample stage (21) is used to place and fix a conversion tray (3) transferred from a test system, and the conversion tray (3) is used to place and fix a flag-shaped sample tray (4) carrying a sample transferred from an ultra-high vacuum transferable chamber; the sample transfer device (2) further comprises a magnetically coupled rotary driver (23) located outside the transfer chamber (1), wherein a metal rod (24) at the front end of the magnetically coupled rotary driver (23) extends into the transfer chamber (1) and is vertically fixed to the connecting plate (22) to drive the connecting plate (22) to rotate, and a linear driver (5) is provided on the metal rod (24) located outside the transfer chamber (1), and the linear driver (5) is used to adjust the axial displacement of the metal rod (24).

2. The ultra-high vacuum sample transfer system according to claim 1, characterized in that: The linear drive (5) comprises a bellows (51) sleeved on a metal rod (24), an upper connecting flange (52) and a lower connecting flange (53) being fixed to the upper and lower ends of the bellows (51), respectively, the upper connecting flange (52) being sealingly connected to the transfer chamber (1), the lower connecting flange (53) being sealingly connected to the connecting flange (25) on the magnetic coupling rotary drive (23), and a screw nut mechanism (54) connecting the upper connecting flange (52) and the lower connecting flange (53) being further provided on the side of the bellows (51).

3. The ultra-high vacuum sample transfer system according to claim 1, characterized in that: A transfer flange (6) is also sealed between the transfer cavity (1) and the linear drive (5), a hollow collimation shaft (61) is welded in the inner hole of the transfer flange (6), the metal rod (24) passes through the collimation shaft (61) in the connecting flange (6) and is fixed to the connecting plate (22), and a gap is left between the metal rod (24) and the collimation shaft (61).

4. The ultra-high vacuum sample transfer system according to claim 1, characterized in that: The sample stage (21) and the connecting plate (22) are fixed by means of a screw rod (26) and a nut. A threaded hole is provided at the center of the connecting plate (22). A thread matching the threaded hole is provided at the front end of the metal rod (24). The metal rod (24) is threadedly connected to the threaded hole and then fixed by means of a nut.

5. The ultra-high vacuum sample transfer system according to claim 3, characterized in that: The transfer chamber (1) is in a cubic shape as a whole. The glass perspective window (2) is sealed and connected to the CF63 flange edge on the upper side of the transfer chamber (1). The full-range gauge (3) is sealed and connected to the CF35 flange edge on the left side of the transfer chamber (1). The molecular pump (4) is sealed and connected to the CF63 flange edge on the right side of the transfer chamber (1). The upper flange opening of the adapter flange (6) is sealed and connected to the CF35 flange edge on the lower side of the transfer chamber (1). The lower flange opening of the adapter flange (6) is sealed and connected to the upper connecting flange (52) of the linear drive (5). The CF35 manual plug valve on the ultra-high vacuum transferable chamber is sealed and connected to the CF35 flange edge on the front side of the transfer chamber (1). The CF63 manual plug valve (7) on the test system is sealed and connected to the CF63 flange edge on the rear side of the transfer chamber (1).

6. The ultra-high vacuum sample transfer system according to claim 1, characterized in that: The conversion tray (3) is cylindrical in shape as a whole. A clamping groove (31) for fixing a flag-shaped sample tray (4) is provided on a support surface of the conversion tray (3). A first ear plate (32), a first positioning groove (33), a second ear plate (34) and a second positioning groove are evenly spaced along the circumference of the outer wall of the conversion tray (3), wherein: the first ear plate (32) and the second ear plate (34) are both arranged perpendicular to the outer wall of the conversion tray (3); the first ear plate (32) is fixed to a sample transfer rod in a test system, and a first through hole (321) is provided at the center of the first ear plate (32); the second ear plate (34) is fixed to a sample stage (21), and a second through hole (341) is provided at the center of the second ear plate (34); the first positioning groove (33) and the second positioning groove are symmetrically arranged, and the bottoms of the first positioning groove (33) and the second positioning groove are both flat.

7. The ultra-high vacuum sample transfer system according to claim 1, characterized in that: The sample table (21) is an integral structure, comprising a first block (211) in the shape of an elongated strip, and a second block (212) and a third block (213) respectively vertically connected to the two ends of the first block (211). The first block (211) is provided with a slot (214) which is plugged into and fits with the second ear plate (34) of the conversion tray (3). The second block (212) and the third block (213) are symmetrically arranged, and the end faces of the second block (212) and the third block (213) which are close to each other are respectively provided with positioning bosses (215) which match the first positioning groove (33) and the second positioning groove.

8. The ultra-high vacuum sample transfer system according to claim 7, characterized in that: The slot (214) of the sample stage (21) is also provided with an elastic fixing clamping device (7) for preventing the conversion support (3) from falling off. The elastic fixing clamping device (7) comprises a first stainless steel wire (71) and a second stainless steel wire (72) arranged in the left and right directions. The first stainless steel wire (71) is an integrated structure, comprising a first steel wire segment (711), a second steel wire segment (712), a third steel wire segment (713) and a fourth steel wire segment (714) connected in sequence, wherein: the first steel wire segment (711) is The first steel wire segment (711) is arranged in a horizontal direction, and the head end of the first steel wire segment (711) is fixed to the first block (211) via a screw rod; the second steel wire segment (712) is arranged perpendicular to the first steel wire segment (711), and the second steel wire segment (712) and the first steel wire segment (711) are located in the same horizontal plane; the third steel wire segment (713) and the fourth steel wire segment (714) form a V-shaped structure with an opening facing upward, and the second steel wire segment (712), the third steel wire segment (713) and the fourth steel wire segment (714) are located in the same vertical plane; The second stainless steel wire (72) is an integrated structure, comprising a fifth steel wire segment (721), a sixth steel wire segment (722), a seventh steel wire segment (723) and an eighth steel wire segment (724) connected in sequence, wherein: the fifth steel wire segment (721) is arranged in a horizontal direction, and the head end of the fifth steel wire segment (721) is fixed to the first block (211) by a screw rod, the sixth steel wire segment (722) is arranged perpendicular to the fifth steel wire segment (721), and the sixth steel wire segment (722) and the fifth steel wire segment (721) are located in the same horizontal plane, the seventh steel wire segment (723) and the eighth steel wire segment (724) form a V-shaped structure with an opening facing downward, and the sixth steel wire segment (722), the seventh steel wire segment (723) and the eighth steel wire segment (724) are located in the same vertical plane; The second steel wire segment (712), the third steel wire segment (713), the fourth steel wire segment (714), the sixth steel wire segment (722), the seventh steel wire segment (723), and the eighth steel wire segment (724) are all located in the slot (214), and the fourth steel wire segment (714) and the eighth steel wire segment (724) form an opening for facilitating the insertion of the second ear plate (34) of the conversion tray (3). After the conversion tray (3) is inserted, the connection point between the third steel wire segment (713) and the fourth steel wire segment (714) and the connection point between the seventh steel wire segment (723) and the eighth steel wire segment (724) are respectively inserted into the second through hole (341) of the second ear plate (34) from the upper and lower directions to clamp and fix the conversion tray (3).

9. A method for using the ultra-high vacuum sample transfer system according to any one of claims 1 to 8, comprising the following steps: S1: Connect the ultra-high vacuum transferable chamber and the test system to the transfer chamber. At this time, the CF35 manual gate valve on the ultra-high vacuum transferable chamber and the CF63 manual gate valve on the test system are both in the closed state; S2: vacuumizing, baking and cooling the transfer chamber to make the vacuum degree in the transfer chamber reach an ultra-high vacuum state; S3: Open the CF63 manual gate valve on the test system, and push the conversion support to the sample table in the transfer chamber through the sample transfer rod in the test system and fix it; S4: The sample transfer rod of the test system is retracted, and the CF63 manual plug valve on the test system is closed; S5: The magnetically coupled rotary drive works, causing the sample stage and the conversion holder to rotate 90 degrees counterclockwise synchronously; S6: Open the CF35 manual plug valve on the ultra-high vacuum transfer chamber, and the sample transfer rod in the ultra-high vacuum transfer chamber pushes the flag-shaped sample holder carrying the sample into the card slot of the conversion holder in the transfer chamber through its front end gripper; S7: Release the front gripper of the sample transfer rod of the ultra-high vacuum transfer chamber and retract the sample transfer rod, and close the CF35 manual plug valve on the ultra-high vacuum transfer chamber; S8: The magnetically coupled rotary drive works, causing the sample stage, conversion holder, and flag-type sample holder to rotate 90 degrees clockwise synchronously; S9: Open the CF63 manual gate valve on the test system, grab the conversion tray in the transfer chamber through the sample transfer rod in the test system, transfer the conversion tray carrying the flag-shaped sample tray to the test system, and then close the CF63 manual gate valve on the test system to perform sample testing in the test system.

10. The method for using the ultra-high vacuum sample transfer system according to claim 9, characterized in that: In S2, the vacuum treatment of the transfer chamber is carried out by a dry vortex pump and a molecular pump, the baking treatment of the transfer chamber is carried out by winding a heating belt around the outside of the transfer chamber and connecting an external power supply, and the cooling treatment of the transfer chamber refers to turning off the external power supply after baking for natural cooling; the ultra-high vacuum state in S2 refers to the vacuum degree in the transfer chamber being less than 1×10 -9 Torr.

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