External vacuum pumping structure of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment

Abstract

The invention discloses an external vacuum pumping structure of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, which comprises a vacuum pump set and a vacuum pumping pipeline, the vacuum pump set comprises a plurality of vacuum pumps, each vacuum pump is connected with a gas source cabinet through the vacuum pumping pipeline, the plurality of vacuum pumps are arranged on one side of the gas source cabinet at intervals along the axial direction of a quartz tube in the tubular PECVD equipment, and the vacuum pumps are connected with the gas source cabinet through the vacuum pumping pipeline. And a reserved space for the quartz tube to enter and exit is formed on one side of the gas source cabinet. The external vacuum pumping structure of the tubular PECVD equipment has the advantages of simple structure, reasonable layout and high quartz tube replacement efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic and semiconductor equipment, and in particular to an external vacuum pumping structure of a tubular PECVD equipment. Background Art

[0002] PECVD (plasma enhanced chemical vapor deposition) equipment is a special equipment used for thin film deposition, mainly used for preparing thin films in the fields of semiconductors, photovoltaics, flat panel displays, etc.

[0003] like Figure 1 As shown, in the external vacuum pumping structure of the existing tubular PECVD equipment (for example, the Chinese patent document with publication number CN11735552A), the vacuum pump is usually arranged horizontally and the shock absorbing device is located below the vertical elbow of the external pipeline.

[0004] The existing technical solutions have some technical deficiencies:

[0005] 1) Since the vacuum pump is arranged horizontally (in a direction perpendicular to the axis of the quartz tube), when replacing the quartz tube, if the quartz tube is replaced from the gas source cabinet side, multiple vacuum pipes need to be removed, which is time-consuming and labor-intensive, and may affect the sealing performance of the pipes. Therefore, the quartz tube is usually replaced from the clean bench side. However, replacing the quartz tube from the clean bench side requires removing the cache rack, manipulator, boat push mechanism, etc., which is labor-intensive and inefficient;

[0006] 2) The butterfly valve and other components are built into the gas source cabinet, but the space inside the gas source cabinet is relatively narrow, which is not convenient for the maintenance of the butterfly valve and other components, nor is it convenient to replace the quartz tube from the gas source cabinet side;

[0007] 3) The shock-absorbing device is located below the vertical elbow of the external pipeline, has a relatively poor load-bearing capacity, and is a certain distance away from the pump port of the vacuum pump and the butterfly valve, so the shock-absorbing effect is poor. Summary of the invention

[0008] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide an external vacuum pumping structure for a tubular PECVD device with a simple structure, a reasonable layout and high efficiency in replacing quartz tubes.

[0009] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0010] An external vacuum exhaust structure of a tubular PECVD device comprises a vacuum pump group and a vacuum exhaust pipeline. The vacuum pump group comprises a plurality of vacuum pumps. Each of the vacuum pumps is connected to a gas source cabinet via a vacuum exhaust pipeline. The plurality of vacuum pumps are arranged at intervals on one side of the gas source cabinet along the axial direction of a quartz tube in the tubular PECVD device, and a reserved space for the quartz tube to enter and exit is formed on one side of the gas source cabinet.

[0011] As a further improvement of the above technical solution:

[0012] The vacuum pipeline comprises a vacuum pipe and a shock absorbing device, wherein the vacuum pipe is connected to the gas source cabinet, and the shock absorbing device is respectively connected to the vacuum pipe and the air extraction port of the vacuum pump.

[0013] A valve is provided between the shock absorbing device and the vacuum pipe. The shock absorbing device comprises a bellows and a buffer mechanism. The bellows is sealed and connected between the valve and the air suction port of the vacuum pump. At least one buffer mechanism is provided along the outer circumference of the bellows.

[0014] The buffer mechanism includes a shock absorbing seat and screws connected to the upper and lower ends of the shock absorbing seat. Each screw is provided with a fixing component that can adjust the height up and down. The fixing component is used to fix the shock absorbing seat to the outer circumference of the bellows.

[0015] The fixing assembly includes a first hook head and a second hook head, the first hook head is sleeved on the screw, the second hook head is arranged on the first hook head, the first hook head and the second hook head are arranged opposite to each other, and are respectively pressed on the flange at one end of the bellows and the flange connected to the flange at one end of the bellows.

[0016] The buffer mechanism includes multiple adjusting screw assemblies and shock-absorbing seats arranged between adjacent adjusting screw assemblies. The uppermost adjusting screw assembly is provided with a fixing assembly whose height can be adjusted up and down. The lowermost adjusting screw assembly is threadedly connected with a third hook head, and the third hook head is fixed on the lower flange of the bellows.

[0017] The external vacuum exhaust structure of the tubular PECVD equipment also includes a bridge frame, which includes a first wire trough, a second wire trough and a third wire trough connected in sequence. The first wire trough is arranged longitudinally on each of the vacuum pumps, the second wire trough is connected to each vacuum pipe, and the third wire trough is connected to the gas source cabinet.

[0018] The bridge is in a Z shape, and the second wire trough is perpendicular to the first wire trough and the third wire trough respectively.

[0019] The first wire trough, the second wire trough and the third wire trough are respectively provided with cover plates.

[0020] The bottom of the shock absorbing device is connected to the exhaust port flange of the vacuum pump through a short tube, and the first wire trough is fixed on the short tube through a pipe fixing seat.

[0021] Compared with the prior art, the advantages of the present invention are:

[0022] 1. The external vacuum exhaust structure of the tubular PECVD equipment of the present invention is longitudinally arranged through the vacuum pump, so that a reserved space for the quartz tube to enter and exit is formed on one side of the gas source cabinet. The structure is simple and the layout is reasonable. When replacing the quartz tube, there is no need to remove the vacuum pipeline, which saves time and effort, and will not affect the sealing performance of the pipeline. The efficiency of replacing the quartz tube is high.

[0023] 2. The external vacuum exhaust structure of the tubular PECVD equipment of the present invention is arranged close to the vacuum pump and the valve through the shock absorbing device, and can be close to the exhaust port and the valve of the vacuum pump for shock absorption, and the shock absorption effect is good.

[0024] 3. The external vacuum exhaust structure of the tubular PECVD equipment of the present invention increases the internal installation, debugging and maintenance space of the gas source cabinet by placing the valve externally, which is convenient for the entry and exit of the quartz tube and more ergonomic. After the valve is externally placed, the operating space becomes larger, which is convenient for the maintenance of the butterfly valve and the main exhaust pipeline. After the valve is externally placed, the valve is closer to the vacuum pump and the exhaust speed becomes faster, thereby reducing dust at the valve. In combination with the shock absorption of the shock absorbing device, it is beneficial to extend the maintenance cycle of the valve. In addition, the valve is farther away from the reaction chamber and the temperature is lower, which is beneficial to extend the life of the valve.

[0025] 4. The external vacuum pumping structure of the tubular PECVD equipment of the present invention, during the shock absorption process, the bellows undergoes axial deformation when subjected to external force and absorbs most of the vibration energy. The buffer mechanism works synchronously during the deformation of the bellows to provide additional support to prevent the bellows from excessive deformation and help the bellows to quickly return to its original state after the deformation. The buffer mechanism is arranged along the outer circumference of the bellows, so that the support is more stable, the non-axial deformation of the bellows can be reduced, the stability is good, and the residual energy can be further dispersed to improve the overall shock absorption effect.

[0026] 5. The external vacuum pumping structure of the tubular PECVD equipment of the present invention increases the number of cables after the valves and the like are externally placed. A bridge is provided for routing the cables, thereby supporting and protecting the cables. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the external vacuum pumping structure of the existing tubular PECVD equipment.

[0028] Figure 2 It is a structural schematic diagram of the external vacuum pumping structure of the tubular PECVD equipment of the first embodiment of the present invention.

[0029] Figure 3 It is a structural schematic diagram of the external vacuum pumping structure of the tubular PECVD equipment of the first embodiment of the present invention from another angle.

[0030] Figure 4It is an enlarged view of the shock absorbing device and its related components in the external vacuum pumping structure of the tubular PECVD equipment in Example 1 of the present invention.

[0031] Figure 5 It is a structural schematic diagram of the buffer mechanism in the external vacuum pumping structure of the tubular PECVD equipment of the first embodiment of the present invention.

[0032] Figure 6 It is a front view of the buffer mechanism in the external vacuum pumping structure of the tubular PECVD equipment of the first embodiment of the present invention.

[0033] Figure 7 It is an enlarged view of the shock absorbing device and its related components in the external vacuum pumping structure of the tubular PECVD equipment of the second embodiment of the present invention.

[0034] Figure 8 It is a structural schematic diagram of the buffer mechanism in the external vacuum pumping structure of the tubular PECVD equipment in Example 2 of the present invention.

[0035] Fig. 9 It is a front view of the buffer mechanism in the external vacuum pumping structure of the tubular PECVD equipment in Example 2 of the present invention.

[0036] The numbers in the figure represent: 1. Vacuum pump group; 11. Vacuum pump; 2. Reserved space; 3. Shock absorber; 31. Bellows; 32. Buffer mechanism; 321. Shock absorber seat; 322. Screw; 323. Fixing assembly; 3231. First hook head; 3232. Second hook head; 3233. Third hook head; 324. Locking nut; 325. Adjusting screw assembly; 4. Valve; 5. Vacuum pipeline; 6. Bridge; 61. First wire trough; 62. Second wire trough; 63. Third wire trough; 64. Cover plate; 65. Pipe fixing seat; 7. Short pipe; 9. Gas source cabinet. DETAILED DESCRIPTION

[0037] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "assemble", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] Embodiment 1:

[0042] Figures 2 to 6 The first embodiment of the present invention is shown. The external vacuum exhaust structure of the tubular PECVD equipment of this embodiment includes a vacuum pump group 1 and a vacuum exhaust pipeline. The vacuum pump group 1 includes a plurality of vacuum pumps 11. Each vacuum pump 11 is connected to a gas source cabinet 9 through a vacuum exhaust pipeline. The plurality of vacuum pumps 11 are arranged at intervals on one side of the gas source cabinet 9 along the axial direction of the quartz tube in the tubular PECVD equipment, and a reserved space 2 for the quartz tube to enter and exit is formed on one side of the gas source cabinet 9.

[0043] The external vacuum exhaust structure of the tubular PECVD equipment of this embodiment is arranged in a longitudinal direction (the axial direction of the quartz tube in the tubular PECVD equipment), that is, the arrangement direction of the vacuum pump 11 is parallel to the axial direction of the quartz tube. When replacing the quartz tube, the personnel can operate at the reserved space 2, move the old quartz tube from the gas source cabinet side to the reserved space 2, and then load the new quartz tube into the gas source cabinet from the reserved space 2 to achieve the replacement of the quartz tube. The external vacuum exhaust structure of the tubular PECVD equipment of this embodiment is arranged longitudinally by the vacuum pump 11, so that a reserved space 2 for the quartz tube to enter and exit is formed on one side of the gas source cabinet 9. The structure is simple and the layout is reasonable. When replacing the quartz tube, there is no need to remove the vacuum pipeline, which saves time and effort, and does not affect the sealing performance of the pipeline. The efficiency of replacing the quartz tube is high.

[0044] Furthermore, if Figure 2 and Figure 3As shown, in this embodiment, the vacuum pipeline includes a vacuum pipe 5 and a shock absorbing device 3, the vacuum pipe 5 is connected to the gas source cabinet 9 and the shock absorbing device 3 respectively, and the shock absorbing device 3 is connected to the air suction port of the vacuum pump 11. By arranging the shock absorbing device 3 close to the vacuum pump 11, it can be close to the air suction port of the vacuum pump 11 for shock absorption, and the shock absorption effect is good.

[0045] Furthermore, if Figure 4 As shown, in this embodiment, a valve 4 is provided between the damping device 3 and the vacuum pipe 5. The damping device 3 includes a bellows 31 and a buffer mechanism 32. The bellows 31 is sealed and connected between the valve 4 and the air extraction port of the vacuum pump 11. The buffer mechanism 32 is provided in multiple portions along the outer circumference of the bellows 31. By placing the valve 4 externally, the internal installation, debugging and maintenance space of the gas source cabinet is increased, which is convenient for the entry and exit of the quartz tube and more ergonomic. After the valve 4 is externally placed, the operating space becomes larger, which is convenient for the maintenance of the butterfly valve and the main extraction pipeline. After the valve 4 is externally placed, the valve 4 is closer to the vacuum pump 11, and the extraction speed becomes larger, thereby reducing the dust at the valve 4. In addition, the damping of the damping device 3 is beneficial to extending the maintenance cycle of the valve 4. In addition, the valve 4 is farther away from the reaction chamber and the temperature is lower, which is beneficial to extending the life of the valve 4. During the shock absorption process, the bellows 31 undergoes axial deformation when subjected to external force, absorbing most of the vibration energy. The buffer mechanism 32 works synchronously during the deformation of the bellows 31 to provide additional support to prevent the bellows 31 from excessive deformation and help the bellows 31 to quickly return to its original state after the deformation. The buffer mechanism 32 is arranged along the outer circumference of the bellows 31, making the support more stable, reducing the non-axial deformation of the bellows 31, having good stability, and further dispersing the residual energy to improve the overall shock absorption effect.

[0046] Preferably, in this embodiment, the valve 4 is a butterfly valve; the vacuum pipe 5 is arranged longitudinally, the valve 4, the shock absorbing device 3 and the vacuum pump 11 are arranged in sequence in the vertical direction, and the shock absorbing device 3 carries the valve 4 and other components on the shock absorbing device 3, and has a strong load-bearing capacity.

[0047] Furthermore, if Figure 5 and Figure 6 As shown, in this embodiment, the buffer mechanism 32 includes a shock absorbing seat 321 and screws 322 connected to the upper and lower ends of the shock absorbing seat 321, and each screw 322 is provided with a fixing component 323 whose height can be adjusted up and down, and the fixing component 323 is used to fix the shock absorbing seat 321 to the outer circumference of the bellows 31. By adjusting the upper and lower positions of the fixing component 323, it can match different heights of the bellows 31, and has strong adaptability.

[0048] Furthermore, if Figure 5 and Figure 6As shown, in this embodiment, the fixing assembly 323 includes a first hook portion 3231 and a second hook portion 3232. The first hook portion 3231 is mounted on the screw rod 322, and the second hook portion 3232 is arranged on the first hook portion 3231. The first hook portion 3231 and the second hook portion 3232 are arranged opposite to each other and are respectively pressed on the flange at one end of the bellows 31 and the flange connected to the flange at one end of the bellows 31. By twisting the first hook portion 3231, the position of the first hook portion 3231 on the screw rod 322 can be adjusted. The first hook portion 3231 and the second hook portion 3232 are respectively pressed on the flange at one end of the bellows 31 and the flange connected to the flange at one end of the bellows 31 to fix the screw rods 322 of the shock absorbing seat 321 in the circumference of the bellows 31; during the shock absorbing process, the bellows 31 undergoes axial deformation when subjected to external force, and the flanges at both ends of the bellows 31 undergo relative displacement, driving the shock absorbing seat 321 to deform, thereby providing auxiliary buffering and improving the shock absorbing effect; and the screw rod 322 is fixed to the outer circumference of the bellows 31 through the fixing assembly 323, and the deformation of the shock absorbing seat 321 is less than the deformation degree of the bellows 31, so that the buffer mechanism 32 can limit the bellows 31 to prevent the bellows 31 from excessive deformation and help the bellows 31 to quickly return to its original state after the deformation.

[0049] Preferably, in this embodiment, the second hook portion 3232 and the first hook portion 3231 are threadedly connected, and by tightening the screws between the second hook portion 3232 and the first hook portion 3231, the second hook portion 3232 and the first hook portion 3231 can be pressed against the flange at one end of the bellows 31 and the flange connected to the flange at one end of the bellows 31, and the structure is simple and reliable.

[0050] Preferably, in this embodiment, locking nuts 324 are provided on the screw rod 322 above and below the first hook portion 3231. After the position of the first hook portion 3231 is adjusted, the locking nuts 324 are tightened to fix the position of the first hook portion 3231. The structure is simple and reliable.

[0051] Specifically, Figure 4 As shown, in this embodiment, the bottom of the shock absorbing device 3 (specifically, the bottom of the bellows 31) is connected to the exhaust port flange of the vacuum pump 11 through a short tube 7. The flange at the upper end of the bellows 31 is connected to the lower flange of the valve 4, and the flange at the lower end of the bellows 31 is connected to the upper flange of the short tube 7. A group of first hook parts 3231 and second hook parts 3232 are respectively pressed on the flange at the upper end of the bellows 31 and the lower flange of the valve 4, and another group of first hook parts 3231 and second hook parts 3232 are respectively pressed on the flange at the lower end of the bellows 31 and the upper flange of the short tube 7. Among them, the short tube 7 can be a conversion joint, etc., which is convenient for adapting to different flange models of bellows 31.

[0052] Furthermore, if Figure 2 and Figure 3 As shown, in this embodiment, the external vacuum pumping structure of the tubular PECVD equipment also includes a bridge 6, and the bridge 6 includes a first wire groove 61, a second wire groove 62 and a third wire groove 63 connected in sequence. The first wire groove 61 is arranged on each vacuum pump 11 in the longitudinal direction, the second wire groove 62 is connected to each vacuum pipeline 5, and the third wire groove 63 is connected to the gas source cabinet 9. Since the valve 4 and the like are externally placed, the cables are increased, and the cables can be supported and protected by arranging the bridge 6 for routing. Among them, the first wire groove 61 is arranged on each vacuum pump 11 in the longitudinal direction to accommodate the cables at the vacuum pump 11 (such as the cables of the valve 4, the main pumping pipeline and the slow pumping pipeline); the second wire groove 62 is fixed on each vacuum pipeline 5 through the pipeline fixing seat 65, and the second wire groove 62 is connected to each vacuum pipeline 5 to apply the weight of the cables and the bridge 6 to the shock absorbing device 3 through each vacuum pipeline 5 to prevent the vacuum pump 11 body from being under pressure; the third wire groove 63 is connected to the gas source cabinet 9 to transfer the cables to the gas source cabinet 9, and the layout is reasonable.

[0053] Furthermore, in this embodiment, the bridge 6 is in a Z-shape, and the second wire groove 62 is respectively perpendicular to the first wire groove 61 and the third wire groove 63. The bridge 6 has a compact layout and has little interference with other components.

[0054] Furthermore, in this embodiment, a cover plate 64 is provided on each of the first wire trough 61, the second wire trough 62 and the third wire trough 63. The cover plate 64 can protect the cables in the wire trough, and the protection effect is better.

[0055] Furthermore, in the present embodiment, the first cable duct 61 is fixed to the short pipe 7 via the pipe fixing seat 65, which can prevent the bridge 6 from vibrating too much and damaging the cables.

[0056] Embodiment 2:

[0057] Figures 7 to 9 The second embodiment of the present invention is shown. The external vacuum pumping structure of the tubular PECVD equipment of this embodiment is different from that of the first embodiment in that the buffer mechanism 32 includes a plurality of adjusting screw assemblies 325 and a shock-absorbing seat 321 disposed between adjacent adjusting screw assemblies 325. The uppermost adjusting screw assembly 325 is provided with a fixing assembly 323 that can adjust the height up and down. The lowermost adjusting screw assembly 325 is threadedly connected with a third hook head 3233, and the third hook head 3233 is fixed to the lower flange of the bellows 31. The external vacuum pumping structure of the tubular PECVD equipment of this embodiment is provided with a plurality of shock-absorbing seats 321, and the shock-absorbing effect is better. Specifically, in this embodiment, three adjusting screw assemblies 325 are provided, and two shock-absorbing seats 321 are provided accordingly.

[0058] Furthermore, in the present embodiment, the flange at the lower end of the bellows 31 is connected to the exhaust port of the vacuum pump 11. Since the bellows 31 is directly connected to the exhaust port of the vacuum pump 11, the space at the exhaust port of the vacuum pump 11 is limited. The fixing component 323 in the first embodiment is not convenient to be pressed on the flange of the exhaust port of the vacuum pump 11. In the present embodiment, the third hook portion 3233 is fixed on the lower flange of the bellows 31. Specifically, the third hook portion 3233 is clamped on the outer edge of the flange at the lower end of the bellows 31 to fix the buffer mechanism 32. The structure is simple and reliable.

[0059] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as above in the preferred embodiment, it is not used to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention, still fall within the scope of protection of the technical solution of the present invention.

Claims

1. An external vacuum pumping structure of a tubular PECVD device, comprising a vacuum pump group (1) and a vacuum pumping pipeline, wherein the vacuum pump group (1) comprises a plurality of vacuum pumps (11), each of the vacuum pumps (11) being connected to a gas source cabinet (9) via a vacuum pumping pipeline, characterized in that: The plurality of vacuum pumps (11) are arranged at intervals on one side of a gas source cabinet (9) along the axial direction of the quartz tube in the tubular PECVD equipment, and a reserved space (2) for the quartz tube to enter and exit is formed on one side of the gas source cabinet (9).

2. The external vacuum pumping structure of the tubular PECVD equipment according to claim 1, characterized in that: The vacuum pipeline comprises a vacuum pipeline (5) and a shock absorbing device (3), wherein the vacuum pipeline (5) is connected to an air source cabinet (9), and the shock absorbing device (3) is respectively connected to the vacuum pipeline (5) and the air extraction port of a vacuum pump (11).

3. The external vacuum pumping structure of the tubular PECVD equipment according to claim 2, characterized in that: A valve (4) is provided between the shock absorbing device (3) and the vacuum pipe (5), and the shock absorbing device (3) comprises a bellows (31) and a buffer mechanism (32). The bellows (31) is sealedly connected between the valve (4) and the air suction port of the vacuum pump (11), and at least one buffer mechanism (32) is provided along the outer circumference of the bellows (31).

4. The external vacuum pumping structure of the tubular PECVD equipment according to claim 3 is characterized in that: The buffer mechanism (32) comprises a shock absorbing seat (321) and screw rods (322) connected to the upper and lower ends of the shock absorbing seat (321), each of the screw rods (322) being provided with a fixing assembly (323) capable of adjusting the height up and down, and the fixing assembly (323) being used to fix the shock absorbing seat (321) to the outer circumference of the bellows (31).

5. The external vacuum pumping structure of the tubular PECVD equipment according to claim 4, characterized in that: The fixing assembly (323) comprises a first hook portion (3231) and a second hook portion (3232), wherein the first hook portion (3231) is mounted on the screw rod (322), and the second hook portion (3232) is arranged on the first hook portion (3231), and the first hook portion (3231) and the second hook portion (3232) are arranged opposite to each other and are respectively pressed onto a flange at one end of the bellows (31) and a flange connected to a flange at one end of the bellows (31).

6. The external vacuum pumping structure of the tubular PECVD equipment according to claim 3, characterized in that: The buffer mechanism (32) comprises a plurality of adjusting screw assemblies (325) and a shock absorbing seat (321) arranged between adjacent adjusting screw assemblies (325); the adjusting screw assembly (325) at the top layer is provided with a fixing assembly (323) whose height can be adjusted up and down; the adjusting screw assembly (325) at the bottom layer is threadedly connected with a third hook portion (3233); the third hook portion (3233) is fixed to the lower flange of the bellows (31).

7. The external vacuum pumping structure of the tubular PECVD equipment according to any one of claims 2 to 6, characterized in that: The external vacuum exhaust structure of the tubular PECVD equipment also includes a bridge frame (6), the bridge frame (6) includes a first wire groove (61), a second wire groove (62) and a third wire groove (63) connected in sequence, the first wire groove (61) is arranged on each vacuum pump (11) in the longitudinal direction, the second wire groove (62) is connected to each vacuum pipeline (5), and the third wire groove (63) is connected to the gas source cabinet (9).

8. The external vacuum pumping structure of the tubular PECVD equipment according to claim 7, characterized in that: The bridge (6) is in a Z shape, and the second wire trough (62) is perpendicular to the first wire trough (61) and the third wire trough (63).

9. The external vacuum pumping structure of the tubular PECVD equipment according to claim 7, characterized in that: The first wire trough (61), the second wire trough (62) and the third wire trough (63) are respectively provided with a cover plate (64).

10. The external vacuum pumping structure of the tubular PECVD equipment according to claim 7, characterized in that: The bottom of the shock absorbing device (3) is connected to the exhaust port flange of the vacuum pump (11) via a short tube (7), and the first wire groove (61) is fixed to the short tube (7) via a pipe fixing seat (65).

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