Vacuum pump set and using method thereof

Abstract

The invention discloses a vacuum pump set and a using method thereof, and relates to the field of pump sets, the vacuum pump set comprises a machine shell, a turbine pump is mounted in the machine shell, a backing pump is arranged at the top of the machine shell, a pipeline for butt joint of the turbine pump and the backing pump is mounted in the machine shell, and a mounting assembly is arranged between the backing pump and the machine shell and used for mounting and fixing the backing pump. The cooling fan is installed outside the backing pump and used for conducting air cooling heat dissipation on the backing pump, the controller is installed inside the machine shell, the display screen is installed on one side of the machine shell, and the controller is electrically connected with the turbine pump, the backing pump, the cooling fan and the display screen. By means of the arrangement mode that the machine shell, the backing pump and the installation assembly are matched, under the action of the locking assembly and the hinge assembly, the installation base can drive the backing pump to be stably installed on the machine shell, limitation of the locking assembly is relieved, the backing pump can be rotated and obliquely put down, and therefore the occupied space of the backing pump is degraded.

Description

Technical Field

[0001] The present invention relates to the field of pump sets, and in particular to a vacuum pump set and a use method thereof. Background Art

[0002] The vacuum pump unit is a system composed of a variety of vacuum pumps, which is used to achieve efficient exhaust and vacuum maintenance within a specific working pressure range. The vacuum pump unit can extract gas from a sealed container or system, reduce the internal pressure, and form a vacuum state.

[0003] Existing vacuum pump groups usually consist of a casing, a turbine pump and a fore-stage pump. The turbine pump is installed inside the casing, and the fore-stage pump is installed on the top of the casing through a flange plate. The fore-stage pump is connected to the turbine pump through a pipeline. The fore-stage pump is started first to reduce the system pressure from atmospheric pressure to the threshold at which the turbine pump can be started. Then the turbine pump starts working to further increase the vacuum degree to the ultra-high vacuum range.

[0004] However, since the fore-stage pump is installed on the top of the casing, the vacuum pump unit has a certain protruding part. Therefore, when the vacuum pump unit is carried, the protruding part of the fore-stage pump not only increases the space occupied by the unit, but the protruding fore-stage pump is also easily damaged by collision. However, since the fore-stage pump is usually installed with a flange plate and bolts, it is not convenient to disassemble and store the fore-stage pump, which results in certain defects. Summary of the invention

[0005] The object of the present invention is to provide a vacuum pump assembly and a method of using the same to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a vacuum pump group, comprising:

[0007] chassis;

[0008] A turbo pump, wherein the turbo pump is installed inside the casing;

[0009] A fore-stage pump, wherein the fore-stage pump is arranged on the top of the casing, and a pipeline for connecting the turbine pump and the fore-stage pump is installed inside the casing;

[0010] An installation component, which is arranged between the fore pump and the casing to install and fix the fore pump;

[0011] A cooling fan, the cooling fan being installed outside the fore-stage pump and used for air-cooling the fore-stage pump;

[0012] A controller and a display screen, wherein the controller is installed inside the casing, and the display screen is installed on one side of the casing. The controller is electrically connected to the turbo pump, the front pump, the cooling fan and the display screen.

[0013] Preferably, the installation assembly includes:

[0014] A mounting seat, the mounting seat is fixedly mounted on the bottom of the front-stage pump, and the bottom of the mounting seat is provided with an air hole connected with the air outlet end of the front-stage pump and the pipeline;

[0015] A hinge assembly, the hinge assembly is arranged on one side of the mounting seat, and the mounting seat is rotatably connected to the housing through the hinge assembly;

[0016] A locking assembly is arranged on the top of the housing and is used to lock the mounting seat.

[0017] Preferably, the hinge assembly comprises:

[0018] A first connecting block, the first connecting block being fixedly connected to one side of the mounting seat;

[0019] A second connecting block, the second connecting block is fixedly connected to the top of the housing;

[0020] A connecting shaft, one end of which is fixedly connected to the second connecting block, and an outer wall of the connecting shaft is slidably interlaced with the first connecting block;

[0021] A locking frame is slidably engaged with the outside of the first connecting block and the second connecting block.

[0022] Preferably, the hinge assembly further comprises:

[0023] A connecting plate, the connecting plate being arranged on one side of the locking frame;

[0024] A locking rod, one end of which is fixedly connected to the connecting plate, an outer wall of the locking rod is slidably inserted and sleeved with the locking frame, and one side of the connecting shaft is provided with a groove matching the locking rod;

[0025] A fixing rod, the end of which is fixedly connected to the connecting plate, and a mounting groove corresponding to the fixing rod is provided on one side of the locking frame;

[0026] A fixing collar, the fixing collar being fixedly sleeved inside the mounting groove;

[0027] A limit block, one end of the fixing rod passes through a fixing collar and is fixedly connected to the limit block;

[0028] The first spring is slidably sleeved on the outside of the fixing rod, and the first spring is located between the fixing collar and the limiting block.

[0029] Preferably, the locking assembly comprises:

[0030] A first locking block, wherein the first locking block is fixedly connected to a side of the mounting seat;

[0031] A fixed shell, the fixed shell is fixedly connected to the top of the casing;

[0032] A limit plate, the limit plate being slidably disposed on a side of the fixed housing;

[0033] A second locking block, the second locking block is fixedly connected to one side of the limiting plate, the second locking block is clamped on the top of the first locking block, and a corresponding inclined surface is provided on one side of the second locking block opposite to the first locking block;

[0034] A driving assembly, the driving assembly is arranged on the fixed housing, and the driving assembly is used to drive the limiting plate and the second locking block to slide;

[0035] A limit assembly is arranged on one side of the fixed shell, and is used to brake the driving assembly.

[0036] Preferably, the driving assembly comprises:

[0037] A driving screw, the outer wall of which is rotatably connected to the fixed housing;

[0038] A driving plate, the end of which is fixedly connected to the limiting plate, a sliding hole matching the driving plate is provided on the side of the fixed housing, and the outer wall of the driving screw is threadedly connected to the driving plate;

[0039] A turntable is fixedly connected to the end of the driving screw.

[0040] Preferably, the driving assembly further comprises:

[0041] A fixed sleeve, one end of which is fixedly connected to the fixed housing;

[0042] A connecting collar, the connecting collar is fixedly sleeved on the outside of the driving screw and rotatably sleeved on the inside of the fixed sleeve;

[0043] A first guide rod, the first guide rod is fixedly connected to the interior of the fixed housing, and the outer wall of the first guide rod is slidably interlaced and sleeved with the driving plate;

[0044] The second spring is slidably sleeved on the outside of the first guide rod, and the end of the second spring is pressed and fitted with the driving plate.

[0045] Preferably, the limiting component comprises:

[0046] A connecting shell, wherein the connecting shell is fixedly mounted on the outside of the fixing sleeve;

[0047] A connecting member and a pin, wherein the connecting member is rotatably connected to the interior of the connecting housing via the pin;

[0048] A positioning block, one side of which is fixedly connected to the connecting piece, an outer wall of the positioning block is slidably inserted and sleeved with a fixed sleeve, and an outer wall of the connecting collar is provided with a positioning groove matching the positioning block;

[0049] An extrusion plate, the extrusion plate being slidably disposed on the top of the inner cavity of the connecting shell;

[0050] A fixing plate, wherein the fixing plate is fixedly connected to the bottom of the extrusion plate, and an end of the connecting piece is provided with a groove matching the fixing plate;

[0051] A shaft rod is fixedly connected to the bottom of the fixing plate, and a guide hole matching the shaft rod is opened on the side of the connecting piece.

[0052] Preferably, the limiting component further includes:

[0053] A connecting rod, the bottom of which is fixedly connected to the extrusion plate, and the outer wall of which is slidably inserted and sleeved with the connecting shell;

[0054] A button, wherein the button is fixedly connected to the top of the connecting rod;

[0055] A bearing block, the bearing block is fixedly connected to the inner wall of the connecting shell;

[0056] A second guide rod, the second guide rod is fixedly connected to the top of the bearing block, and the outer wall of the second guide rod is slidably interlaced and sleeved with the extrusion plate;

[0057] The third spring is slidably sleeved on the outside of the second guide rod and is located at the bottom of the extrusion plate.

[0058] The present invention also provides a method for using a vacuum pump assembly, comprising the following specific steps:

[0059] Step 1: When the turbo pump and the foreline pump are working, the foreline pump first reduces the system pressure from atmospheric pressure to the turbo pump start-up threshold, and then the turbo pump starts working to further increase the vacuum degree to the ultra-high vacuum range;

[0060] Step 2: When disassembling the fore-stage pump, squeeze the button to make the connecting piece drive the positioning block to rotate, so that the positioning block is separated from the connecting collar, rotate the driving screw, so that the driving screw drives the driving plate to move inside the fixed housing, so that the driving plate drives the limit plate and the second locking block to move, so that the second locking block slides and separates from the first locking block, and then rotate the mounting seat relative to the hinge assembly to lay the fore-stage pump down;

[0061] Step 3: Pull the connecting plate to drive the locking rod to separate from the connecting shaft, remove the locking frame, and then slide the mounting seat horizontally to drive the first connecting block to separate from the connecting shaft, and the disassembly of the mounting seat and the front pump is completed.

[0062] Technical effects and advantages of the present invention:

[0063] (1) The present invention utilizes a configuration in which a housing, a fore-stage pump and a mounting assembly cooperate with each other. The mounting assembly includes a mounting seat, a hinge assembly and a locking assembly. Under the action of the locking assembly and the hinge assembly, the mounting seat can drive the fore-stage pump to be stably mounted on the housing. When the restriction of the locking assembly is released, the fore-stage pump can be rotated, tilted and laid down, thereby reducing the space occupied by the fore-stage pump.

[0064] (2) The present invention utilizes a setting method in which a mounting seat and an articulated assembly cooperate with each other. The articulated assembly includes a first connecting block, a second connecting block, a connecting shaft, a locking frame and a locking rod. Under the action of the first connecting block, the second connecting block and the connecting shaft, the mounting seat can be stably rotated and connected to the casing. The locking rod is pulled out to separate the locking frame from the first connecting block and the second connecting block, and the mounting seat can be slidably disassembled to facilitate the disassembly or installation of the front-stage pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0066] Figure 2 It is a schematic diagram of the overall structure of the mounting base of the present invention.

[0067] Figure 3 It is a schematic diagram of the overall structure of the fixed shell of the present invention.

[0068] Figure 4 It is a schematic diagram of the internal structure of the fixed shell of the present invention.

[0069] Figure 5 It is a schematic diagram of the internal structure of the side surface of the connecting shell of the present invention.

[0070] Figure 6 It is a schematic diagram of the internal structure of the connecting piece of the present invention from the side.

[0071] Figure 7 It is a schematic diagram of the internal structure of the locking frame of the present invention.

[0072] In the figure: 1, housing; 2, turbo pump; 3, front pump; 4, mounting assembly; 41, mounting seat; 42, hinge assembly; 421, first connecting block; 422, second connecting block; 423, connecting shaft; 424, locking frame; 425, connecting plate; 426, locking rod; 427, fixing rod; 428, fixing collar; 429, limiting block; 4210, first spring; 43, locking assembly; 431, first locking block; 432, fixing housing; 433, limiting plate; 434, second locking block; 435, driving assembly; 4351, driving screw rod; 4352, driving plate; 4353, fixing sleeve; 4354, connecting ring; 4355, first guide rod; 4356, second spring; 436, limit assembly; 4361, connecting shell; 4362, connecting piece; 4363, positioning block; 4364, pin shaft; 4365, extrusion plate; 4366, fixing plate; 4367, shaft; 4368, connecting rod; 4369, button; 43610, bearing block; 43611, second guide rod; 43612, third spring; 5, cooling fan; 6, controller; 7, display screen. DETAILED DESCRIPTION

[0073] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0074] The present invention provides Figure 1-7 A vacuum pump unit is shown.

[0075] Example 1

[0076] The utility model comprises a casing 1, a turbo pump 2, a fore pump 3, a mounting assembly 4, a cooling fan 5, a controller 6 and a display screen 7. The turbo pump 2 is mounted inside the casing 1, the fore pump 3 is arranged on the top of the casing 1, and a pipe for docking the turbo pump 2 and the fore pump 3 is installed inside the casing 1. The mounting assembly 4 is arranged between the fore pump 3 and the casing 1 to install and fix the fore pump 3 and facilitate the disassembly of the fore pump 3. The cooling fan 5 is mounted on the outside of the fore pump 3. The cooling fan 5 is used for air cooling the fore pump 3, thereby reducing the damage of the fore pump 3 due to the increase of working temperature and improving its service life. The controller 6 is mounted inside the casing 1, and the display screen 7 is mounted on one side of the casing 1. The controller 6 is electrically connected with the turbo pump 2, the fore pump 3, the cooling fan 5 and the display screen 7.

[0077] In particular, the mounting assembly 4 includes a mounting seat 41, an articulated assembly 42 and a locking assembly 43. The mounting seat 41 is fixedly mounted on the bottom of the front-stage pump 3. An air hole connected to the air outlet of the front-stage pump 3 and the pipeline is opened at the bottom of the mounting seat 41, and a sealing gasket is arranged between the mounting seat 41 and the pipeline, so that when the mounting seat 41 is installed, the sealing of the front-stage pump 3 connected to the turbine pump 2 through the pipeline can be ensured. The articulated assembly 42 is arranged on one side of the mounting seat 41, and the mounting seat 41 is rotatably connected to the casing 1 through the articulated assembly 42. The locking assembly 43 is arranged on the top of the casing 1. The locking assembly 43 is used to clamp and lock the mounting seat 41. The restriction of the locking assembly 43 on the mounting seat 41 can be released, so that the mounting seat 41 can be rotated relative to the articulated assembly 42, thereby laying the front-stage pump 3 down.

[0078] Furthermore, the hinge assembly 42 includes a first connecting block 421, a second connecting block 422, a connecting shaft 423 and a locking frame 424. The first connecting block 421 is fixedly connected to one side of the mounting base 41, the second connecting block 422 is fixedly connected to the top of the housing 1, one end of the connecting shaft 423 is fixedly connected to the second connecting block 422, the outer wall of the connecting shaft 423 is slidably inserted and sleeved with the first connecting block 421, and the locking frame 424 is slidably engaged with the outside of the first connecting block 421 and the second connecting block 422. The locking frame 424 can limit the first connecting block 421 and the second connecting block 422, thereby ensuring the stability of the mounting base 41 rotatingly connected relative to the connecting shaft 423 through the first connecting block 421.

[0079] Furthermore, the hinge assembly 42 also includes a connecting plate 425, a locking rod 426, a fixing rod 427, a fixing ring 428, a limit block 429 and a first spring 4210. The connecting plate 425 is arranged on one side of the locking frame 424, one end of the locking rod 426 is fixedly connected to the connecting plate 425, the outer wall of the locking rod 426 is slidably inserted and sleeved with the locking frame 424, and a groove matching the locking rod 426 is provided on one side of the connecting shaft 423. The locking rod 426 is rotatably engaged with the groove, which can ensure the stability of the locking frame 424 being engaged with the outside of the first connecting block 421 and the second connecting block 422. By pulling out the locking rod 426, the locking frame 424 can be removed, thereby moving the installation The seat 41 separates the first connecting block 421 from the connecting shaft 423, the end of the fixing rod 427 is fixedly connected to the connecting plate 425, and a mounting groove corresponding to the fixing rod 427 is opened on one side of the locking frame 424. The fixing ring 428 is fixedly sleeved on the inside of the mounting groove, and one end of the fixing rod 427 passes through the fixing ring 428 and is fixedly connected to the limit block 429. The first spring 4210 is slidably sleeved on the outside of the fixing rod 427, and the first spring 4210 is located between the fixing ring 428 and the limit block 429. The first spring 4210 can give an elastic force to the connecting plate 425 through the limit block 429 and the fixing rod 427, so that the locking rod 426 maintains a stable clamping state with the groove.

[0080] Example 2

[0081] On the basis of Example 1, the locking assembly 43 includes a first locking block 431, a fixed shell 432, a limiting plate 433, a second locking block 434, a driving assembly 435 and a limiting assembly 436, the first locking block 431 is fixedly connected to the side of the mounting seat 41, the fixed shell 432 is fixedly connected to the top of the housing 1, the limiting plate 433 is slidably arranged on the side of the fixed shell 432, the second locking block 434 is fixedly connected to one side of the limiting plate 433, the second locking block 434 is clamped on the top of the first locking block 431, and the second locking block 435 is fixedly connected to the side of the limiting plate 433. A corresponding inclined surface is provided on the side opposite to the first locking block 431, so that when the second locking block 434 moves horizontally toward the mounting seat 41, the second locking block 434 can squeeze the first locking block 431, so that the mounting seat 41 maintains a stable installation state, and the driving component 435 is arranged on the fixed shell 432. The driving component 435 is used to drive the limiting plate 433 and the second locking block 434 to slide. The limiting component 436 is arranged on one side of the fixed shell 432, and the limiting component 436 is used to brake the driving component 435.

[0082] Furthermore, the driving assembly 435 includes a driving screw 4351, a driving plate 4352 and a rotating disk. The outer wall of the driving screw 4351 is rotatably connected to the fixed shell 432, and the end of the driving plate 4352 is fixedly connected to the limit plate 433. A sliding hole matching the driving plate 4352 is provided on the side of the fixed shell 432. The outer wall of the driving screw 4351 is threadedly connected to the driving plate 4352, and the rotating disk is fixedly connected to the end of the driving screw 4351. By rotating the driving screw 4351, the driving plate 4352 can drive the limit plate 433 and the second locking block 434 to move. The driving assembly 435 also includes a fixed sleeve 4353, a connecting ring 4354, a first guide rod 4355 and a second Spring 4356, one end of the fixed sleeve 4353 is fixedly connected to the fixed shell 432, the connecting ring 4354 is fixedly sleeved on the outside of the driving screw 4351, the connecting ring 4354 is rotatably sleeved on the inside of the fixed sleeve 4353, the first guide rod 4355 is fixedly connected to the inside of the fixed shell 432, the outer wall of the first guide rod 4355 is slidably inserted and sleeved with the driving plate 4352, the second spring 4356 is slidably sleeved on the outside of the first guide rod 4355, the end of the second spring 4356 is squeezed and fit with the driving plate 4352, and the second spring 4356 can give the driving plate 4352 an elastic squeezing force to facilitate the driving screw 4351 to drive the driving plate 4352 to move.

[0083] In particular, the limiting assembly 436 includes a connecting shell 4361, a connecting piece 4362, a pin 4364, a positioning block 4363, an extrusion plate 4365, a fixing plate 4366 and a shaft 4367. The connecting shell 4361 is fixedly installed on the outside of the fixing sleeve 4353. The connecting piece 4362 is rotatably connected to the inside of the connecting shell 4361 through the pin 4364. One side of the positioning block 4363 is fixedly connected to the connecting piece 4362. The outer wall of the positioning block 4363 is slidably inserted and sleeved with the fixing sleeve 4353. The outer wall of the connecting collar 4354 is provided with a positioning groove matching the positioning block 4363. The positioning block 4363 is engaged with the positioning groove on the outside of the connecting collar 4354, so that the driving screw 4351 can be moved. The extrusion plate 4365 is slidably set on the top of the inner cavity of the connecting shell 4361, the fixed plate 4366 is fixedly connected to the bottom of the extrusion plate 4365, the end of the connecting piece 4362 is provided with a groove matching the fixed plate 4366, the shaft 4367 is fixedly connected to the bottom of the fixed plate 4366, and the side of the connecting piece 4362 is provided with a guide hole matching the shaft 4367. Therefore, by pressing down the extrusion plate 4365, the extrusion plate 4365 can press down the connecting piece 4362 through the fixed plate 4366 and the shaft 4367, so that the connecting piece 4362 drives the positioning block 4363 to rotate, and then the positioning block 4363 is separated from the connecting ring 4354, thereby releasing the locking state of the driving screw 4351.

[0084] Specifically, the limiting assembly 436 also includes a connecting rod 4368, a button 4369, a bearing block 43610, a second guide rod 43611 and a third spring 43612. The bottom of the connecting rod 4368 is fixedly connected to the extrusion plate 4365. The outer wall of the connecting rod 4368 is slidably inserted and sleeved with the connecting shell 4361. The button 4369 is fixedly connected to the top of the connecting rod 4368. By squeezing the button 4369, the connecting rod 4368 can drive the extrusion plate 4365 to descend. The bearing block 43610 is fixedly connected to the inner wall of the connecting shell 4361. The second guide rod 43611 is fixedly connected to the top of the bearing block 43610. The second guide rod 436 The outer wall of 11 is slidably interlaced with the extrusion plate 4365, and the third spring 43612 is slidably sleeved on the outside of the second guide rod 43611. The third spring 43612 is located at the bottom of the extrusion plate 4365. The third spring 43612 can give the extrusion plate 4365 an upward elastic force, so that when the extrusion plate 4365 is not squeezed by an external force, the third spring 43612 can push the extrusion plate 4365 to rise and reset, so that the extrusion plate 4365 drives the connecting piece 4362 to rotate and reset through the fixing plate 4366 and the shaft 4367, so that the connecting piece 4362 drives the positioning block 4363 to engage with the connecting ring 4354, thereby locking the driving screw 4351.

[0085] The present invention also provides a method for using a vacuum pump assembly, comprising the following specific steps:

[0086] Step 1: When the turbo pump 2 and the fore pump 3 are working, the fore pump 3 first reduces the system pressure from atmospheric pressure to the threshold for the turbo pump 2 to start, and then the turbo pump 2 starts to work, further increasing the vacuum degree to the ultra-high vacuum range;

[0087] Step 2: When disassembling the fore-stage pump 3, squeeze the button 4369 to make the connecting piece 4362 drive the positioning block 4363 to rotate, so that the positioning block 4363 is separated from the connecting collar 4354, and rotate the driving screw 4351 to make the driving screw 4351 drive the driving plate 4352 to move inside the fixed housing 432, so that the driving plate 4352 drives the limiting plate 433 and the second locking block 434 to move, so that the second locking block 434 is slidably separated from the first locking block 431, and then the mounting seat 41 is rotated relative to the hinge assembly 42, and the fore-stage pump 3 is laid down for installation;

[0088] Step three: Pull the connecting plate 425 so that the connecting plate 425 drives the locking rod 426 to separate from the connecting shaft 423, remove the locking frame 424, and then slide the mounting seat 41 horizontally so that the mounting seat 41 drives the first connecting block 421 to separate from the connecting shaft 423, and the disassembly of the mounting seat 41 and the front-stage pump 3 is completed.

[0089] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum pump set, characterized in that: include: Housing (1); A turbine pump (2), wherein the turbine pump (2) is installed inside the casing (1); A fore-stage pump (3), the fore-stage pump (3) being arranged on the top of the casing (1), and a pipeline for connecting the turbine pump (2) and the fore-stage pump (3) is installed inside the casing (1); A mounting assembly (4), the mounting assembly (4) being arranged between the fore-stage pump (3) and the casing (1) and being used for mounting and fixing the fore-stage pump (3); A cooling fan (5), the cooling fan (5) being installed outside the fore-stage pump (3), and the cooling fan (5) being used for air-cooling the fore-stage pump (3); A controller (6) and a display screen (7), wherein the controller (6) is installed inside the casing (1), and the display screen (7) is installed on one side of the casing (1), and the controller (6) is electrically connected to the turbo pump (2), the front pump (3), the cooling fan (5) and the display screen (7).

2. A vacuum pump assembly according to claim 1, characterized in that: The installation component (4) comprises: A mounting seat (41), the mounting seat (41) being fixedly mounted on the bottom of the front-stage pump (3), and the bottom of the mounting seat (41) is provided with an air hole connected to the air outlet of the front-stage pump (3) and the pipeline; A hinge assembly (42), wherein the hinge assembly (42) is arranged on one side of the mounting seat (41), and the mounting seat (41) is rotatably connected to the housing (1) via the hinge assembly (42); A locking component (43), wherein the locking component (43) is arranged on the top of the housing (1), and the locking component (43) is used to lock the mounting seat (41) by clamping.

3. A vacuum pump assembly according to claim 2, characterized in that: The hinge assembly (42) comprises: A first connecting block (421), the first connecting block (421) being fixedly connected to one side of the mounting seat (41); A second connecting block (422), the second connecting block (422) being fixedly connected to the top of the housing (1); A connecting shaft (423), one end of which is fixedly connected to the second connecting block (422), and an outer wall of the connecting shaft (423) is slidably inserted and sleeved with the first connecting block (421); A locking frame (424) is slidably engaged with the outside of the first connecting block (421) and the second connecting block (422).

4. A vacuum pump assembly according to claim 3, characterized in that: The hinge assembly (42) further comprises: A connecting plate (425), wherein the connecting plate (425) is arranged on one side of the locking frame (424); A locking rod (426), one end of which is fixedly connected to the connecting plate (425), an outer wall of the locking rod (426) is slidably inserted and sleeved with the locking frame (424), and a groove matching the locking rod (426) is provided on one side of the connecting shaft (423); A fixing rod (427), the end of which is fixedly connected to the connecting plate (425), and a mounting groove corresponding to the fixing rod (427) is provided on one side of the locking frame (424); A fixing collar (428), wherein the fixing collar (428) is fixedly sleeved inside the installation groove; A limit block (429), one end of the fixing rod (427) passes through a fixing collar (428) and is fixedly connected to the limit block (429); A first spring (4210), wherein the first spring (4210) is slidably sleeved on the outside of the fixing rod (427), and the first spring (4210) is located between the fixing ring (428) and the limiting block (429).

5. A vacuum pump assembly according to claim 2, characterized in that: The locking assembly (43) comprises: A first locking block (431), the first locking block (431) being fixedly connected to a side of the mounting seat (41); A fixed shell (432), wherein the fixed shell (432) is fixedly connected to the top of the casing (1); A limiting plate (433), wherein the limiting plate (433) is slidably disposed on a side of the fixed housing (432); A second locking block (434), the second locking block (434) is fixedly connected to one side of the limiting plate (433), the second locking block (434) is clamped on the top of the first locking block (431), and a corresponding inclined surface is provided on a side of the second locking block (434) opposite to the first locking block (431); A driving assembly (435), wherein the driving assembly (435) is disposed on the fixed housing (432), and the driving assembly (435) is used to drive the limiting plate (433) and the second locking block (434) to slide; A limit assembly (436), wherein the limit assembly (436) is arranged on one side of the fixed housing (432), and the limit assembly (436) is used to brake the driving assembly (435).

6. A vacuum pump assembly according to claim 5, characterized in that: The drive assembly (435) comprises: A driving screw (4351), wherein the outer wall of the driving screw (4351) is rotatably connected to the fixed housing (432); A driving plate (4352), the end of which is fixedly connected to the limiting plate (433), a sliding hole matching the driving plate (4352) is provided on the side of the fixed housing (432), and the outer wall of the driving screw (4351) is threadedly connected to the driving plate (4352); A turntable is fixedly connected to the end of the driving screw (4351).

7. A vacuum pump assembly according to claim 6, characterized in that: The drive assembly (435) further comprises: A fixed sleeve (4353), one end of which is fixedly connected to the fixed housing (432); A connecting collar (4354), wherein the connecting collar (4354) is fixedly sleeved on the outside of the driving screw (4351), and the connecting collar (4354) is rotatably sleeved on the inside of the fixed sleeve (4353); A first guide rod (4355), wherein the first guide rod (4355) is fixedly connected to the interior of the fixed housing (432), and an outer wall of the first guide rod (4355) is slidably inserted and sleeved with the driving plate (4352); The second spring (4356) is slidably sleeved on the outside of the first guide rod (4355), and the end of the second spring (4356) is pressed and fitted with the driving plate (4352).

8. A vacuum pump assembly according to claim 7, characterized in that: The limiting assembly (436) comprises: A connecting shell (4361), wherein the connecting shell (4361) is fixedly mounted on the outside of the fixing sleeve (4353); A connecting member (4362) and a pin (4364), wherein the connecting member (4362) is rotatably connected to the interior of the connecting housing (4361) via the pin (4364); A positioning block (4363), one side of which is fixedly connected to the connecting member (4362), an outer wall of the positioning block (4363) is slidably inserted and sleeved with the fixing sleeve (4353), and an outer wall of the connecting ring (4354) is provided with a positioning groove matching the positioning block (4363); An extrusion plate (4365), wherein the extrusion plate (4365) is slidably disposed on the top of the inner cavity of the connecting shell (4361); A fixing plate (4366), wherein the fixing plate (4366) is fixedly connected to the bottom of the extrusion plate (4365), and an end of the connecting member (4362) is provided with a groove matching the fixing plate (4366); The shaft rod (4367) is fixedly connected to the bottom of the fixing plate (4366), and a guide hole matching the shaft rod (4367) is provided on the side of the connecting member (4362).

9. A vacuum pump assembly according to claim 8, characterized in that: The limiting assembly (436) further includes: A connecting rod (4368), the bottom of which is fixedly connected to the extrusion plate (4365), and the outer wall of the connecting rod (4368) is slidably inserted and sleeved with the connecting shell (4361); A button (4369), wherein the button (4369) is fixedly connected to the top of the connecting rod (4368); A bearing block (43610), wherein the bearing block (43610) is fixedly connected to the inner wall of the connecting shell (4361); A second guide rod (43611), the second guide rod (43611) is fixedly connected to the top of the bearing block (43610), and the outer wall of the second guide rod (43611) is slidably interlaced and sleeved with the extrusion plate (4365); A third spring (43612), wherein the third spring (43612) is slidably sleeved on the outside of the second guide rod (43611), and the third spring (43612) is located at the bottom of the extrusion plate (4365).

10. A method for using a vacuum pump assembly according to any one of claims 1 to 9, characterized in that: The specific usage steps are as follows: Step 1: When the turbo pump (2) and the foreline pump (3) are working, the foreline pump (3) first reduces the system pressure from atmospheric pressure to a threshold value for starting the turbo pump (2), and then the turbo pump (2) starts working to further increase the vacuum degree to an ultra-high vacuum range; Step 2: When disassembling the front-stage pump (3), squeeze the button (4369) to make the connecting piece (4362) drive the positioning block (4363) to rotate, so that the positioning block (4363) is separated from the connecting ring (4354), and the driving screw (4351) is rotated to make the driving screw (4351) drive the driving plate (4352) to move inside the fixed shell (432), so that the driving plate (4352) drives the limiting plate (433) and the second locking block (434) to move, so that the second locking block (434) and the first locking block (431) are slid and separated, and then the mounting seat (41) is rotated relative to the hinge assembly (42), and the front-stage pump (3) is laid down for installation; Step 3: Pull the connecting plate (425) so that the connecting plate (425) drives the locking rod (426) to separate from the connecting shaft (423), remove the locking frame (424), and then slide the mounting seat (41) horizontally so that the mounting seat (41) drives the first connecting block (421) to separate from the connecting shaft (423), thereby completing the disassembly of the mounting seat (41) and the front-stage pump (3).

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