Special gas conveying cabinet capable of being modularly and rapidly spliced

Abstract

The invention relates to the technical field of special gas conveying cabinets, and particularly discloses a special gas conveying cabinet capable of being modularly and rapidly spliced, the special gas conveying cabinet comprises a lower cabinet, an upper cabinet is slidably mounted at the upper end of the lower cabinet, and a storage bottle is slidably mounted in the lower cabinet; the storage bottle conveying device can be fixedly connected with a storage bottle under the action of a first clamping groove, the situation that the storage bottle moves in the conveying process is prevented, secondly, a reciprocating motor and a reciprocating screw can be directly installed under the action of a cross groove and a connecting block, and therefore the upper portion of the storage bottle can be fixed through a circular ring; the fixing and mounting time of using bolts is saved; under the action of the U-shaped groove and the U-shaped inserting plate, the upper cabinet and the lower cabinet can be quickly butted and assembled, so that the internal capacity of the gas transmission cabinet is changed; moreover, under the action of the fan-shaped hole and the fan-shaped block, the filter pipe can be quickly connected, so that the filter pipe can be quickly connected with the input or output connector, and the time and the cost are saved.

Description

Technical Field

[0001] The present invention relates to the technical field of special gas delivery cabinets, and in particular to a special gas delivery cabinet capable of modular and rapid splicing. Background Art

[0002] Special gas delivery cabinets (special gas cabinets) are equipment designed specifically for storing and transporting flammable, explosive, corrosive, toxic and other dangerous special gases. They are widely used in semiconductor manufacturing, laboratory research, chemical production and other fields.

[0003] At present, the internal structure of traditional special gas delivery cabinets on the market is mostly fixed. This is because it is designed to ensure the safety of gas during transportation. However, due to its fixed structure, the special gas delivery on the market cannot meet the increasing requirements of different specifications of delivery, resulting in the inability to quickly assemble the delivery cabinet.

[0004] And its internal structure cannot be adjusted according to actual conditions. Therefore, traditional special gas delivery cabinets often have problems such as complex installation and difficulty in flexible adjustment according to needs.

[0005] To this end, we have specially proposed a special gas delivery cabinet that can be modularly and quickly assembled. Summary of the invention

[0006] The purpose of the present invention is to provide a special gas delivery cabinet that can be modularly and quickly assembled to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: a modular and fast-assembled special gas delivery cabinet, comprising a lower cabinet, an upper cabinet is slidably mounted on the upper end of the lower cabinet, and a storage bottle is slidably mounted inside the lower cabinet;

[0008] A shell is installed on the upper end of the storage bottle, and a closing block is arranged inside the shell;

[0009] The upper end of the shell is provided with a connecting pipe, the upper end of the connecting pipe is provided with a flow statistics table, the upper end of the flow statistics table is provided with a three-way pipe, and the upper end of the three-way pipe is rotatably installed with a filter pipe;

[0010] Connecting clamps are fixedly installed on both sides of the upper outer side of the upper cabinet, and a first output connector and a first input connector are rotatably installed on both sides of the upper outer side of the upper cabinet. The inner sides of the first output connector and the first input connector are rotatably connected to the outer sides of adjacent connecting clamps.

[0011] Preferably, a first card slot in a symmetrical state is fixedly installed on the inner bottom surface of the lower cabinet, the lower ends of the storage bottles are slidably installed inside the first card slot, and second card slots symmetrically installed up and down are fixedly installed on the left and right sides of the interior of the upper cabinet, a pressure gas monitor is slidably installed between the second card slots adjacent to each other, and an alarm light is fixedly installed on the outer side of the upper cabinet.

[0012] Preferably, a U-shaped groove is provided on the upper end surface of the lower cabinet, a second groove is provided on the upper front end of the lower cabinet, an insertion hole is provided from the inside of the second groove to the inside of the U-shaped groove, a U-shaped plug plate is fixedly installed on the lower end of the upper cabinet, the U-shaped plug plate is slidably installed in the inside of the U-shaped groove, a through hole is provided from the front end to the inside of the U-shaped plug plate, the through hole and the insertion hole are aligned, and a U-shaped plug rod is slidably installed inside the through hole and the insertion hole.

[0013] Preferably, a first vertical groove is formed on the inner rear end surface of the lower cabinet, and positioning blocks are fixedly mounted on the inner rear end surface of the lower cabinet at the upper and lower ends of the first groove, and cross grooves are formed on both sides of the positioning blocks.

[0014] Preferably, a connecting block is slidably installed inside the cross groove, a reciprocating motor is fixedly installed on the upper end surface of the upper connecting block, a reciprocating screw is fixedly installed on the output shaft of the reciprocating motor, a slider is threadably installed on the circumferential surface of the reciprocating screw, the rear end of the slider is slidably installed inside the first groove, a ring is fixedly installed on the front end of the slider, an extrusion pump is fixedly installed on the outer circumferential surface of the ring, and the ring is nested on the outside of the storage bottle.

[0015] Preferably, a through opening is opened on the outer side of the shell, an adjusting motor is fixedly mounted on the outer side of the shell, a gear is fixedly mounted on the output shaft of the adjusting motor, a gear ring is rotatably mounted inside the shell, and the gear ring is meshed with the gear.

[0016] Preferably, the inner lower end annular array of the shell is evenly fixed with inclined plates, a through slide groove is provided from the upper end surface to the lower end surface of the inclined plate, a connecting ring is fixedly installed at one inner end of the inclined plate, the upper end of the connecting ring is in contact with the lower end surface of the closing block, a sliding column is fixedly installed at the center position of the straight edge of the lower end surface of the closing block, the sliding column is slidably installed inside the through slide groove, a limiting block is fixedly installed at the corner of the straight edge of the upper end surface of the closing block, a hexagonal groove is provided on the lower end surface of the gear ring, and the limit block is slidably installed inside the hexagonal groove.

[0017] Preferably, a symmetrical cavity rod is rotatably mounted on the circumferential surface of the upper end of the tee pipe, a spring is fixedly mounted inside the cavity rod, an L-shaped clamping rod is fixedly mounted on the upper end of the spring, and the inner side of the upper end of the L-shaped clamping rod can fit with the outer side of the lower end of the filter tube.

[0018] Preferably, a connector is fixedly installed at the center position of the upper end surface of the tee pipe, fan-shaped holes are evenly opened from the upper end surface of the connector to the internal annular array, and fan-shaped blocks are evenly fixedly installed in annular array on the circumferential surfaces of both ends of the filter tube, and the fan-shaped blocks can be rotatably installed inside the connector.

[0019] Preferably, telescopic rods are fixedly installed on both sides of the upper part of the upper cabinet, and the outer ends of the left and right telescopic rods are rotatably connected to the adjacent first output connector and the first input connector, and the outer ends of the left and right telescopic rods are also rotatably connected to the second output connector, the second input connector, the third output connector and the third input connector.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention can be fixedly connected with the storage bottle under the action of the first card slot to prevent the storage bottle from moving during transportation. Secondly, the reciprocating motor and the reciprocating screw can be directly installed under the action of the cross groove and the connecting block, so that the ring can fix the upper part of the storage bottle, saving the time of fixing and installing with bolts; secondly, the upper cabinet and the lower cabinet can be quickly docked and assembled under the action of the U-shaped groove and the U-shaped plug plate, so as to change the internal capacity of the gas transmission cabinet; and furthermore, the filter tube can be quickly connected under the action of the fan-shaped hole and the fan-shaped block, so that it can be quickly connected with the input or output connector, saving time and cost.

[0022] 2. The present invention can limit the output gas under the action of the flow statistics table. By starting the regulating motor, the gear can rotate with the gear ring. During the rotation of the gear ring, the closing block can be driven to rotate, thereby changing the diameter of the output port and further changing the output flow of the gas.

[0023] 3. The present invention, with the help of the pressure gas detector, can detect the gas inside the cabinet in real time to prevent leakage, and with the help of the alarm light, can promptly discover the situation inside the cabinet; secondly, with the help of multiple output and input connectors, it can be suitable for different external connectors, thereby increasing the diversity of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a schematic diagram of the structure of the upper cabinet and the lower cabinet of the present invention;

[0026] Figure 2 It is a schematic diagram of the internal structure of the upper cabinet and the lower cabinet of the present invention;

[0027] Figure 3 This is a diagram showing the internal structure of the lower cabinet of the present invention;

[0028] Figure 4 It is a structural diagram of the reciprocating screw and the circular ring of the present invention;

[0029] Figure 5 For the present invention Figure 4 Enlarged view of point A in the middle;

[0030] Figure 6 This is a schematic diagram of the interior of the lower cabinet of the present invention;

[0031] Figure 7 This is a schematic diagram of the interior of the upper cabinet of the present invention;

[0032] Figure 8 It is a schematic diagram showing the connecting pipe and flow statistics of the present invention;

[0033] Fig. 9 It is a schematic diagram of the gear ring and the closing block of the present invention;

[0034] Fig.10 It is a structural diagram of the three-way pipe and the filter pipe of the present invention;

[0035] Fig.11 It is a schematic diagram of the L-shaped clamping rod and the fan-shaped hole of the present invention;

[0036] Fig.12 It is a schematic diagram of the filter tube and connecting clamp tube structure of the present invention.

[0037] Description of reference numerals:

[0038] 1. Lower cabinet; 101. First card slot; 102. First groove; 103. U-shaped groove; 104. Second groove; 105. Insertion hole; 106. Positioning block; 107. Cross groove; 108. Connecting block; 109. Reciprocating motor; 110. Reciprocating screw; 111. Sliding block; 112. Ring; 113. Extrusion pump;

[0039] 2. Storage bottle; 3. Upper cabinet; 301. U-shaped plug board; 302. Through hole; 303. U-shaped plug rod; 304. Second card slot; 305. Pressure gas monitor; 306. Warning light; 401. Housing; 402. Through hole; 403. Adjustment motor; 404. Gear; 405. Gear ring; 406. Hexagonal groove; 407. Inclined plate; 408. Through slide groove; 409. Connecting ring; 410. Closing block; 411. Limit block; 412. Sliding column;

[0040] 5. Connecting pipe; 6. Flow statistics table; 7. Tee pipe; 701. Cavity rod; 702. Spring; 703. L-shaped clamping rod; 704. Connecting head; 705. Fan-shaped hole; 8. Filter tube; 801. Fan-shaped block; 9. Connecting clamping pipe; 10. Telescopic rod; 11. First output connector; 12. Second output connector; 13. Third output connector; 14. First input connector; 15. Second input connector; 16. Third input connector. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] See also Figures 1 to 12 , the present invention provides a technical solution:

[0043] A special gas delivery cabinet capable of modular rapid assembly comprises a lower cabinet 1, wherein four first card slots 101 are installed at the bottom of the inner bottom surface of the lower cabinet 1, wherein the first card slots 101 are arranged in pairs, and then two vertical first grooves 102 are provided at the inner rear end surface of the lower cabinet 1, and a U-shaped groove 103 is provided at the top of the lower cabinet 1, and then a second groove 104 is provided at the upper front end surface of the lower cabinet 1, and the second groove 104 is aligned with the U-shaped groove 103, and when the second groove 104 is connected to the U-shaped groove 103, a symmetrical insertion hole 105 is provided, such as Figure 6 shown.

[0044] Then, positioning blocks 106 are fixedly installed at both ends of the first groove 102 on the inner rear end surface of the lower cabinet 1, wherein a cross groove 107 is provided on both sides of the positioning block 106, and the cross groove 107 can slide with the connecting block 108, such as Figure 5 As shown, the cross groove 107 and the connecting block 108 can be used for quick assembly, thus saving time for fixed installation.

[0045] Secondly, a reciprocating motor 109 is fixedly mounted on the upper end surface of the upper connecting block 108, and a reciprocating screw 110 is fixedly mounted on the output shaft of the reciprocating motor 109, and the lower end of the reciprocating screw 110 is rotatably mounted on the upper end surface of the lower connecting block 108, as shown in FIG. Figure 4 As shown,

[0046] Secondly, a slider 111 is threadably installed on the circumferential surface of the reciprocating screw 110, and the rear end of the slider 111 is slidably installed inside the first groove 102. When the reciprocating screw 110 rotates under the restriction of the first groove 102, the slider 111 will not rotate with the reciprocating screw 110, thereby ensuring that the slider 111 can move linearly along the path of the first groove 102.

[0047] A circular ring 112 is fixedly installed at the front end of the slider 111, and an extrusion pump 113 is evenly fixedly installed in a circular array on the outer surface of the circular ring 112, wherein the telescopic rod of the extrusion pump 113 passes through the circular ring 112 and is located inside the circular ring 112, and during use, the circular ring 112 can move up and down under the action of the reciprocating screw 110, and during the movement, the circular ring 112 can be nested on the outer side of the storage bottle 2. At this time, the extrusion pump 113 is started, and the telescopic rod of the extrusion pump 113 can be tightly attached to the outer side of the storage bottle 2, so that the upper part of the storage bottle 2 can be fixed, ensuring the stability of the storage bottle 2 during transportation.

[0048] Secondly, the upper cabinet 3 is slidably installed on the upper end of the lower cabinet 1, and the upper cabinet 3 is fixedly installed with a U-shaped plug plate 301. The front end surface of the U-shaped plug plate 301 is provided with symmetrical through holes 302 inside. During use, the U-shaped plug plate 301 is slidably installed inside the U-shaped groove 103. At this time, the insertion hole 105 and the through hole 302 are in an aligned state, but they are slidably installed on the U-shaped plug rod 303 inside the insertion hole 105 and the through hole 302, so that the U-shaped plug plate 301 can be in a fixed state, and then the upper cabinet 3 and the lower cabinet 1 are in a fixed connection state, and under the action of the second groove 104, the outer side surface of the U-shaped plug rod 303 and the outer side of the front end opening of the upper cabinet 3 can be flush.

[0049] The housing 401 is fixedly installed at the upper ends of the two storage bottles 2 by flanges and bolts. A through hole 402 is opened from the circumferential surface of the housing 401 to the inside, and an adjusting motor 403 is fixedly installed at the upper end of the through hole 402 on the outer side. A gear 404 is fixedly installed on the output shaft of the adjusting motor 403. A gear ring 405 is rotatably installed inside the housing 401. The gear ring 405 and the gear 404 are meshed with each other through the through hole 402. Secondly, six inclined plates 407 are evenly fixedly installed in a ring array at the edge of the inner lower end opening of the housing 401, and the upper end surface of the inclined plate 407 is fixedly installed to the upper end of the outer side. The lower end faces are fixedly installed with a through slide groove 408, and a connecting ring 409 is fixedly installed on the inner end of the inclined plate 407. A hexagonal groove 406 is opened on the lower end face of the gear ring 405, and six closing blocks 410 are arranged between the gear ring 405 and the inclined plate 407, wherein a sliding column 412 is fixedly installed at the center position of the straight edge of the lower end face of each closing block 410, and the sliding column 412 is slidably installed inside the through slide groove 408, and a limit block 411 is fixedly installed at the position of one of the corners of the straight edge of the upper end face, and the limit block 411 is slidably installed inside the hexagonal groove 406.

[0050] During use, the adjusting motor 403 is started, and the output shaft of the adjusting motor 403 rotates the gear 404, and the gear 404 rotates the gear ring 405. During the rotation of the gear ring 405, the limit block 411 slides, and the limit block 411 can rotate with the closing block 410 during the sliding process. Due to the action of the sliding column 412 and the through sliding groove 408, the closing block 410 rotates, so that the middle position of the closing block 410 can be in an open and closed state, thereby changing the gas flow rate.

[0051] In addition, a connecting pipe 5 is fixed to the upper end of the housing 401 by a flange and bolts, and a flow meter 6 is fixedly installed at the upper end of the connecting pipe 5. Figure 8 As shown, during use, the outer shell 401, the connecting pipe 5, and the flow statistics meter 6 are fixedly installed on the outside in advance. Therefore, efficient assembly operations can be achieved during the overall assembly process without being limited by the space inside the cabinet, which slows down the assembly.

[0052] The flow statistics table 6 can count the input and output gases, and then send out corresponding signals according to the situation, so that the regulating motor 403 can operate.

[0053] A tee pipe 7 is fixedly installed on the upper ends of the two flow statistics meters 6, and a cavity rod 701 is fixedly and rotatably installed in a symmetrical state on the circumferential surface of the upper end of the tee pipe 7, and a spring 702 is fixedly installed inside the cavity rod 701, and an L-shaped clamping rod 703 is fixedly installed on the upper end of the spring 702. The L-shaped clamping rod 703 can slide under the action of the spring 702. Secondly, a connector 704 is fixedly installed at the top center position of the tee pipe 7. The interior of the connector 704 is a cavity structure, and a circular hole is opened from the top surface of the connector 704 to the inside, and four fan-shaped holes 705 that penetrate the inside are opened on the inner side of the hole at the top of the connector 704, such as Fig.11 shown.

[0054] The lower end of the filter tube 8 is rotatably mounted inside the connector 704 , and sector blocks 801 are evenly fixedly mounted in an annular array on the circumferential surfaces at both ends of the filter tube 8 .

[0055] During use, the lower end of the filter tube 8 is aligned with the connector 704. At this time, the fan-shaped block 801 is passed through the fan-shaped hole 705 and enters the interior of the connector 704, and then rotated forty-five degrees so that the fan-shaped block 801 can be combined with the interior of the connector 704, and the filter tube 8 will not slide out by itself under the action of the fan-shaped baffle. It should be noted that annular grooves can be opened on the circumferential surfaces at both ends of the filter tube 8, and then a sealing ring is nested inside the annular groove to prevent leakage.

[0056] Secondly, a connecting clamp tube 9 is fixedly installed from the outer side to the inner side of the upper cabinet 3, and the two ends of the connecting clamp tube 9 are provided with the same structure as the top of the three-way pipe 7. Therefore, the upper end of the filter tube 8 can be rotatably connected with the ends of the connecting clamp tubes 9 on the left and right sides located inside the upper cabinet 3 without distinction, such as Fig.12 shown.

[0057] Secondly, telescopic rods 10 are fixedly installed on both sides of the upper outer side of the upper cabinet 3, and a triangular-structured connecting plate is fixedly installed on the outer end of the telescopic rod 10. The first input connector 14, the second input connector 15 and the third input connector 16 are rotatably installed in a circular array at the end of the left triangular connecting plate away from the telescopic rod 10, and the inner ends of the first input connector 14, the second input connector 15 and the third input connector 16 are the same as the two structures of the filter tube 8, so the inner ends of the first input connector 14, the second input connector 15 and the third input connector 16 can be indiscriminately rotated and combined with the outer end of the connecting clamp tube 9.

[0058] The first output connector 11, the second output connector 12 and the third output connector 13 are installed in a counterclockwise circular array at one end of the triangular connecting plate on the right side away from the telescopic rod 10, and the inner ends of the first output connector 11, the second output connector 12 and the third output connector 13 have the same structure as the two ends of the filter tube 8, so that they can be rotated and connected with the outer end of the adjacent connecting clamp tube 9 without difference, such as Fig.12 shown.

[0059] Therefore, the first input connector 14, the second input connector 15, the third input connector 16, the first output connector 11, the second output connector 12 and the third output connector 13 can be fixedly connected to different external connectors, so that the device is no longer limited to a single connector, thereby increasing the diversity of use of the device.

[0060] Finally, second card slots 304 are symmetrically installed on both sides of the left side of the interior of the upper cabinet 3, and pressure gas monitors 305 are slidably installed inside the second card slots 304 in an upper and lower symmetrical state, and alarm lights 306 are fixedly installed on both sides of the left and right sides of the exterior of the upper cabinet 3. During use, the pressure gas monitor 305 will monitor the situation inside the cabinet in real time. If an abnormality occurs, a reminder will be issued through the alarm light 306, so that the operator can perform maintenance on the machine.

[0061] Working principle: The upper cabinet 3 uses a U-shaped plug plate 301 to slide with the lower cabinet 1, and uses a U-shaped plug rod 303 to fix it.

[0062] At this time, the connecting block 108 and the cross slot 107 are slidably combined, and then the storage bottle 2 is slidably installed inside the lower cabinet 1, and the lower end of the storage bottle 2 is fixed using the first card slot 101, and the reciprocating motor 109 is started. The output shaft of the reciprocating motor 109 drives the reciprocating screw 110 to rotate, allowing the slider 111 to slide downward with the ring 112. After reaching the specified height, the telescopic rod of the extrusion pump 113 is fixedly connected to the outer side of the storage bottle 2.

[0063] Secondly, on the outside, the outer shell 401, the connecting pipe 5 and the flow statistics meter 6 are fixedly connected. When installing, the outer shell 401 and the top of the storage bottle 2 can be directly fixedly connected.

[0064] Secondly, a three-way pipe 7 is fixedly installed on the top of the flow statistics meter 6, and then it is rotated and assembled with one end of the filter tube 8. At this time, the cavity rod 701 is rotated, and the cavity rod 701 with the L-shaped clamping rod 703 is tightly fitted with the outer side of the lower end of the filter tube 8 to ensure that the filter tube 8 is in a stable state.

[0065] The next step is to rotate and match the other end of the filter tube 8 with the connecting clamp tube 9 on the left or right side according to the situation, and rotate and combine the external first input connector 14, the second input connector 15, the third input connector 16, the first output connector 11, the second output connector 12 and the third output connector 13 with the connecting clamp tube 9 accordingly, so as to realize the assembly operation.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A special gas delivery cabinet capable of modular rapid assembly, comprising a lower cabinet (1), an upper cabinet (3) being slidably mounted on the upper end of the lower cabinet (1), characterized in that: A storage bottle (2) is slidably mounted inside the lower cabinet (1); The upper end of the storage bottle (2) is provided with a shell (401), and a closing block (410) is provided inside the shell (401); The upper end of the housing (401) is provided with a connecting pipe (5), the upper end of the connecting pipe (5) is provided with a flow statistics meter (6), the upper end of the flow statistics meter (6) is provided with a three-way pipe (7), and the upper end of the three-way pipe (7) is rotatably mounted with a filter pipe (8); Connecting clamp tubes (9) are fixedly mounted on both left and right sides of the upper outer side of the upper cabinet (3); first output connectors (11) and first input connectors (14) are rotatably mounted on both left and right sides of the upper outer side of the upper cabinet (3); the inner sides of the first output connectors (11) and the first input connectors (14) are rotatably connected to the outer sides of adjacent connecting clamp tubes (9).

2. According to claim 1, a special gas delivery cabinet capable of modular rapid assembly is characterized in that: A symmetrical first card slot (101) is fixedly mounted on the inner bottom surface of the lower cabinet (1), and both sides of the lower end of the storage bottle (2) are slidably mounted inside the first card slot (101). Upward and downward symmetrical second card slots (304) are fixedly mounted on the left and right sides of the inner side of the upper cabinet (3), and a pressure gas monitor (305) is slidably mounted between the upper and lower adjacent second card slots (304). An alarm light (306) is fixedly mounted on the outer side of the upper cabinet (3).

3. The special gas delivery cabinet capable of modular rapid assembly according to claim 1, characterized in that: The upper end surface of the lower cabinet (1) is provided with a U-shaped groove (103), the upper front end of the lower cabinet (1) is provided with a second groove (104), an insertion hole (105) is provided from the inside of the second groove (104) to the inside of the U-shaped groove (103), a U-shaped plug plate (301) is fixedly installed at the lower end of the upper cabinet (3), the U-shaped plug plate (301) is slidably installed inside the U-shaped groove (103), a through hole (302) is provided from the front end to the inside of the U-shaped plug plate (301), the through hole (302) and the insertion hole (105) are aligned, and a U-shaped plug rod (303) is slidably installed inside the through hole (302) and the insertion hole (105).

4. The special gas delivery cabinet capable of modular rapid assembly according to claim 1, characterized in that: The inner rear end surface of the lower cabinet (1) is provided with a first vertical groove (102), and positioning blocks (106) are fixedly installed at the upper and lower ends of the inner rear end surface of the lower cabinet (1) at the first groove (102), and cross grooves (107) are provided on both sides of the positioning block (106).

5. The special gas delivery cabinet capable of modular rapid assembly according to claim 4, characterized in that: A connecting block (108) is slidably mounted inside the cross groove (107); a reciprocating motor (109) is fixedly mounted on the upper end surface of the connecting block (108); a reciprocating screw (110) is fixedly mounted on the output shaft of the reciprocating motor (109); a slider (111) is threadedly mounted on the circumferential surface of the reciprocating screw (110); a rear end of the slider (111) is slidably mounted inside the first groove (102); a circular ring (112) is fixedly mounted on the front end of the slider (111); an extrusion pump (113) is fixedly mounted on the outer circumferential surface of the circular ring (112); and the circular ring (112) is nested on the outer side of the storage bottle (2).

6. The special gas delivery cabinet capable of modular rapid assembly according to claim 1, characterized in that: A through opening (402) is provided on the outer side of the housing (401); an adjusting motor (403) is fixedly mounted on the outer side of the housing (401); a gear (404) is fixedly mounted on the output shaft of the adjusting motor (403); a gear ring (405) is rotatably mounted inside the housing (401); the gear ring (405) is meshed with the gear (404).

7. The special gas delivery cabinet capable of modular rapid assembly according to claim 6, characterized in that: The inner lower end of the housing (401) is evenly fixed with inclined plates (407) in an annular array, and a through slide groove (408) is provided from the upper end surface to the lower end surface of the inclined plate (407). A connecting ring (409) is fixedly installed at one end of the inner side of the inclined plate (407). The upper end of the connecting ring (409) fits with the lower end surface of the closing block (410). A sliding column (412) is fixedly installed at the center position of the straight edge of the lower end surface of the closing block (410). The sliding column (412) is slidably installed inside the through slide groove (408). A limiting block (411) is fixedly installed at the corner of the straight edge of the upper end surface of the closing block (410). The lower end surface of the gear ring (405) is provided with a hexagonal groove (406), and the limiting block (411) is slidably installed inside the hexagonal groove (406).

8. The special gas delivery cabinet capable of modular rapid assembly according to claim 1, characterized in that: A cavity rod (701) is rotatably mounted on the circumferential surface of the upper end of the three-way pipe (7), a spring (702) is fixedly mounted inside the cavity rod (701), an L-shaped clamping rod (703) is fixedly mounted on the upper end of the spring (702), and the inner side of the upper end of the L-shaped clamping rod (703) can fit with the outer side of the lower end of the filter tube (8).

9. The special gas delivery cabinet capable of modular rapid assembly according to claim 8, characterized in that: A connector (704) is fixedly mounted at the center of the upper end surface of the three-way pipe (7), and fan-shaped holes (705) are evenly opened from the upper end surface of the connector (704) to the inner annular array. Fan-shaped blocks (801) are evenly fixedly mounted in an annular array on the circumferential surfaces at both ends of the filter tube (8), and the fan-shaped blocks (801) can be rotatably mounted inside the connector (704).

10. The special gas delivery cabinet capable of modular rapid assembly according to claim 1, characterized in that: Telescopic rods (10) are fixedly mounted on both sides of the upper part of the upper cabinet (3); the outer ends of the left and right telescopic rods (10) are rotatably connected to the adjacent first output connector (11) or first input connector (14); and the outer ends of the left and right telescopic rods (10) are also rotatably connected to the second output connector (12), the second input connector (15), the third output connector (13) and the third input connector (16).

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