A special gas conveying cabinet that can be modularized and quickly assembled

Abstract

The present invention relates to the technical field of special gas conveying cabinets, and specifically discloses a special gas conveying cabinet that can be modularly and quickly assembled, including a lower cabinet, an upper cabinet being slidably installed on the upper end of the lower cabinet, and a storage bottle being slidably installed inside the lower cabinet; under the action of a first card slot, the lower cabinet can be fixedly connected to the storage bottle to prevent the storage bottle from moving during transportation; secondly, under the action of a cross slot and a connecting block, a reciprocating motor and a reciprocating screw can be directly installed, so that the circular ring can fix the upper part of the storage bottle, saving the fixing installation time using bolts; and under the action of a U-shaped groove and a U-shaped plug-in plate, the upper cabinet and the lower cabinet can be quickly docked and assembled, so as to change the internal capacity of the gas cabinet; and, under the action of a fan-shaped hole and a fan-shaped block, the filter tube can be quickly connected, so that it can be quickly connected to the input or output connector, saving time and cost.

Description

Technical Field

[0001] The present invention relates to the technical field of special gas delivery cabinets, and in particular to a special gas delivery cabinet capable of modular and rapid splicing. Background Art

[0002] Special gas delivery cabinets (special gas cabinets) are equipment designed specifically for storing and transporting flammable, explosive, corrosive, toxic and other dangerous special gases. They are widely used in semiconductor manufacturing, laboratory research, chemical production and other fields.

[0003] At present, the internal structure of traditional special gas conveying cabinets on the market is mostly fixed. This is because it is designed to ensure the safety of the gas during transportation. However, due to its fixed structure, the special gas conveying on the market cannot meet the increasing requirements of different specifications of transportation, resulting in the conveying cabinet being unable to be assembled quickly.

[0004] And its internal structure cannot be adjusted according to actual conditions. Therefore, traditional special gas conveying cabinets often have problems such as complex installation and difficulty in flexible adjustment according to needs.

[0005] To this end, we have proposed a special gas delivery cabinet that can be modularly and quickly assembled. Summary of the Invention

[0006] The purpose of the present invention is to provide a special gas delivery cabinet that can be modularly and quickly assembled to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: a modular and quickly assembled special gas delivery cabinet, comprising a lower cabinet, an upper cabinet being slidably mounted on the upper end of the lower cabinet, and a storage bottle being slidably mounted inside the lower cabinet;

[0008] The upper end of the storage bottle is provided with a shell, and the interior of the shell is provided with a closing block;

[0009] The upper end of the shell is provided with a connecting pipe, the upper end of the connecting pipe is provided with a flow statistics meter, the upper end of the flow statistics meter is provided with a three-way pipe, and the upper end of the three-way pipe is rotatably installed with a filter tube;

[0010] Connecting clamps are fixedly mounted on both left and right sides of the upper outer portion of the upper cabinet, and first output connectors and first input connectors are rotatably mounted on both left and right sides of the upper outer portion of the upper cabinet. The inner sides of the first output connector and the first input connector are rotatably connected to the outer sides of the adjacent connecting clamps.

[0011] A symmetrical first card slot is fixedly installed on the inner bottom surface of the lower cabinet, and the lower ends of the storage bottles are slidably installed inside the first card slots. The upper cabinet has vertically symmetrical second card slots fixedly installed on the left and right sides of the interior, and a pressure gas monitor is slidably installed between the upper and lower adjacent second card slots. An alarm light is fixedly installed on the outer side of the upper cabinet;

[0012] The upper end surface of the lower cabinet is provided with a U-shaped groove, the upper front end of the lower cabinet is provided with a second groove, the interior of the second groove to the interior of the U-shaped groove are provided with an insertion hole, the lower end of the upper cabinet is fixedly installed with a U-shaped plug-in plate, the U-shaped plug-in plate is slidably installed in the interior of the U-shaped groove, a through hole is provided from the front end to the interior of the U-shaped plug-in plate, the through hole and the insertion hole are aligned, and the U-shaped plug rod is slidably installed in the interior of the through hole and the insertion hole.

[0013] Preferably, a first vertical groove is provided on the inner rear end surface of the lower cabinet, and positioning blocks are fixedly installed at the upper and lower ends of the first groove on the inner rear end surface of the lower cabinet, and cross grooves are provided on both sides of the positioning blocks.

[0014] Preferably, a connecting block is slidably installed inside the cross groove, a reciprocating motor is fixedly installed on the upper end surface of the upper connecting block, a reciprocating screw is fixedly installed on the output shaft of the reciprocating motor, a slider is threadedly installed on the circumferential surface of the reciprocating screw, the rear end of the slider is slidably installed inside the first groove, a circular ring is fixedly installed on the front end of the slider, an extrusion pump is fixedly installed on the outer circumferential surface of the circular ring, and the circular ring is nested on the outside of the storage bottle.

[0015] Preferably, a through opening is opened on the outer side of the shell, an adjusting motor is fixedly mounted on the outer side of the shell, a gear is fixedly mounted on the output shaft of the adjusting motor, a gear ring is rotatably mounted inside the shell, and the gear ring is engaged with the gear.

[0016] Preferably, the inner lower end annular array of the shell is evenly fixed with inclined plates, and a through slide groove is provided from the upper end surface to the lower end surface of the inclined plate, and a connecting ring is fixedly installed at one end of the inner side of the inclined plate, and the upper end of the connecting ring is fitted with the lower end surface of the closing block, and a sliding column is fixedly installed at the center position of the straight edge of the lower end surface of the closing block, and the sliding column is slidably installed inside the through slide groove, and a limiting block is fixedly installed at the corner of the straight edge of the upper end surface of the closing block, and a hexagonal groove is provided on the lower end surface of the gear ring, and the limiting block is slidably installed inside the hexagonal groove.

[0017] Preferably, a symmetrical cavity rod is rotatably mounted on the circumferential surface of the upper end of the tee pipe, a spring is fixedly mounted inside the cavity rod, an L-shaped clamping rod is fixedly mounted on the upper end of the spring, and the inner side of the upper end of the L-shaped clamping rod can fit with the outer side of the lower end of the filter tube.

[0018] Preferably, a connector is fixedly installed at the center position of the upper end surface of the tee pipe, and fan-shaped holes are evenly opened from the upper end surface of the connector to the internal annular array. Fan-shaped blocks are evenly fixedly installed in annular array on the circumferential surfaces of both ends of the filter tube, and the fan-shaped blocks can be rotatably installed inside the connector.

[0019] Preferably, telescopic rods are fixedly installed on both sides of the upper part of the upper cabinet, and the outer ends of the left and right telescopic rods are rotatably connected to the adjacent first output connector and first input connector, and the outer ends of the left and right telescopic rods are also rotatably connected to the second output connector, the second input connector, the third output connector and the third input connector.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention can be fixedly connected to the storage bottle under the action of the first card slot to prevent the storage bottle from moving during transportation. Secondly, the reciprocating motor and the reciprocating screw can be directly installed under the action of the cross groove and the connecting block, so that the circular ring can fix the upper part of the storage bottle, saving the time of fixing and installing with bolts; secondly, the upper cabinet and the lower cabinet can be quickly docked and assembled under the action of the U-shaped groove and the U-shaped plug-in plate, so as to change the internal capacity of the gas transmission cabinet; and finally, the filter tube can be quickly connected under the action of the fan-shaped hole and the fan-shaped block, so that it can be quickly connected to the input or output connector, saving time and cost.

[0022] 2. The present invention can limit the output gas under the action of the flow statistics table. By starting the regulating motor, the gear can rotate with the gear ring. During the rotation of the gear ring, the closing block can be driven to rotate, thereby changing the diameter of the output port and further changing the output flow of the gas.

[0023] 3. The present invention can detect the gas inside the cabinet in real time under the action of the pressure gas detector to prevent leakage, and can promptly detect the situation inside the cabinet under the action of the alarm light; secondly, with the action of multiple output and input connectors, it can be applied to different external connectors, thereby increasing the diversity of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 This is a schematic diagram of the upper cabinet and lower cabinet structures of the present invention;

[0026] Figure 2 This is a schematic diagram of the internal structure of the upper cabinet and the lower cabinet of the present invention;

[0027] Figure 3 This is a diagram showing the internal structure of the lower cabinet of the present invention;

[0028] Figure 4 This is a structural diagram of the reciprocating screw and the circular ring of the present invention;

[0029] Figure 5 For the present invention Figure 4 Enlarged view of point A in the middle;

[0030] Figure 6 This is a schematic diagram of the interior of the lower cabinet of the present invention;

[0031] Figure 7 This is a schematic diagram of the interior of the upper cabinet of the present invention;

[0032] Figure 8 It is a schematic diagram showing the connecting pipe and flow statistics of the present invention;

[0033] Figure 9 Schematic diagram of the gear ring and closing block of the present invention;

[0034] Figure 10 This is a structural diagram of the tee pipe and filter tube of the present invention;

[0035] Figure 11 Schematic diagram of the L-shaped clamping rod and fan-shaped hole of the present invention;

[0036] Figure 12 It is a schematic diagram of the filter tube and connecting clamp tube structure of the present invention.

[0037] Description of reference numerals:

[0038] 1. Lower cabinet; 101. First slot; 102. First groove; 103. U-shaped groove; 104. Second groove; 105. Insertion hole; 106. Positioning block; 107. Cross slot; 108. Connecting block; 109. Reciprocating motor; 110. Reciprocating screw; 111. Slider; 112. Ring; 113. Extrusion pump;

[0039] 2. Storage bottles; 3. Upper cabinet; 301. U-shaped insert; 302. Through hole; 303. U-shaped insert rod; 304. Second slot; 305. Pressure gas monitor; 306. Warning light; 401. Housing; 402. Through hole; 403. Adjustment motor; 404. Gear; 405. Gear ring; 406. Hexagonal groove; 407. Inclined plate; 408. Through slide; 409. Connecting ring; 410. Closing block; 411. Limit block; 412. Sliding column;

[0040] 5. Connecting pipe; 6. Flow statistics table; 7. Tee; 701. Cavity rod; 702. Spring; 703. L-shaped clamping rod; 704. Connector; 705. Sector hole; 8. Filter tube; 801. Sector block; 9. Connecting clamping pipe; 10. Telescopic rod; 11. First output connector; 12. Second output connector; 13. Third output connector; 14. First input connector; 15. Second input connector; 16. Third input connector. DETAILED DESCRIPTION

[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0042] See also Figures 1 to 12 , the present invention provides a technical solution:

[0043] A special gas delivery cabinet capable of modular rapid assembly includes a lower cabinet 1, wherein four first card slots 101 are installed at the bottom of the inner bottom surface of the lower cabinet 1, and the first card slots 101 are arranged in pairs. Secondly, two vertical first grooves 102 are opened on the inner rear end surface of the lower cabinet 1, and a U-shaped groove 103 is opened on the top of the lower cabinet 1. Secondly, a second groove 104 is opened on the upper front end surface of the lower cabinet 1, and the second groove 104 is aligned with the U-shaped groove 103. A symmetrical insertion hole 105 is opened from the inside of the second groove 104 to the inside of the U-shaped groove 103. Figure 6 shown.

[0044] Then, positioning blocks 106 are fixedly installed on the upper and lower ends of the first groove 102 on the inner rear end surface of the lower cabinet 1, wherein a cross groove 107 is provided on both sides of the positioning block 106, and the cross groove 107 can slide with the connecting block 108 under the action of the cross groove 107. Figure 5 As shown, the cross slot 107 and the connecting block 108 can be used for quick assembly, saving time for fixed installation.

[0045] Secondly, a reciprocating motor 109 is fixedly mounted on the upper end surface of the upper connecting block 108, and a reciprocating screw 110 is fixedly mounted on the output shaft of the reciprocating motor 109, and the lower end of the reciprocating screw 110 is rotatably mounted on the upper end surface of the lower connecting block 108, as shown in FIG. Figure 4 shown.

[0046] Secondly, a slider 111 is threadably installed on the circumferential surface of the reciprocating screw 110, and the rear end of the slider 111 is slidably installed inside the first groove 102. Under the restriction of the first groove 102, when the reciprocating screw 110 rotates, the slider 111 will not rotate with the reciprocating screw 110, ensuring that the slider 111 can move linearly along the path of the first groove 102.

[0047] A circular ring 112 is fixedly installed at the front end of the slider 111, and an extrusion pump 113 is evenly fixedly installed in a circular array on the outer surface of the circular ring 112, wherein the telescopic rod of the extrusion pump 113 passes through the circular ring 112 and is located inside the circular ring 112, and during use, the circular ring 112 can move up and down under the action of the reciprocating screw 110, and during the movement, the circular ring 112 can be nested on the outside of the storage bottle 2. At this time, the extrusion pump 113 is started, and the telescopic rod of the extrusion pump 113 can be tightly attached to the outer side of the storage bottle 2, thereby fixing the upper part of the storage bottle 2 and ensuring the stability of the storage bottle 2 during transportation.

[0048] Secondly, the upper end of the lower cabinet 1 is slidably installed with the upper cabinet 3, and the upper cabinet 3 is fixedly installed with a U-shaped plug plate 301. The front end surface of the U-shaped plug plate 301 is provided with symmetrical through holes 302 from the inside. During use, the U-shaped plug plate 301 is slidably installed inside the U-shaped groove 103. At this time, the insertion hole 105 and the through hole 302 are in an aligned state, but they are slidably installed on the U-shaped plug rod 303 inside the insertion hole 105 and the through hole 302, so that the U-shaped plug plate 301 can be in a fixed state, and then the upper cabinet 3 and the lower cabinet 1 are in a fixed connection state, and under the action of the second groove 104, the outer side surface of the U-shaped plug rod 303 can be flush with the outer side of the front end opening of the upper cabinet 3.

[0049] The upper ends of the two storage bottles 2 are fixed with a housing 401 using flanges and bolts. A through-hole 402 is opened from the circumferential surface of the housing 401 to the inside, and an adjustment motor 403 is fixedly installed at the upper end of the through-hole 402 on the outer side. A gear 404 is fixedly installed on the output shaft of the adjustment motor 403. A gear ring 405 is rotatably installed inside the housing 401. The gear ring 405 and the gear 404 are meshed with each other through the through-hole 402. Secondly, six inclined plates 407 are evenly fixed in a ring array at the edge of the inner lower end opening of the housing 401, and the upper end surface of the inclined plate 407 is fixed to the upper end of the inclined plate 407. The lower end faces are fixedly installed with a through slide groove 408, and a connecting ring 409 is fixedly installed on the inner end of the inclined plate 407. A hexagonal groove 406 is provided on the lower end face of the gear ring 405, and six closing blocks 410 are arranged between the gear ring 405 and the inclined plate 407. Among them, a sliding column 412 is fixedly installed at the center position of the straight edge of the lower end face of each closing block 410, and the sliding column 412 is slidably installed inside the through slide groove 408. A limiting block 411 is fixedly installed at one of the corners of the straight edge of the upper end face, and the limiting block 411 is slidably installed inside the hexagonal groove 406.

[0050] During use, the regulating motor 403 is started, and the output shaft of the regulating motor 403 drives the gear 404 to rotate, and the gear 404 drives the gear ring 405 to rotate. During the rotation of the gear ring 405, the limit block 411 slides, and the limit block 411 can rotate with the closing block 410 during the sliding process. Due to the action of the sliding column 412 and the through-slide groove 408, the closing block 410 rotates, so that the middle position of the closing block 410 can be in an open and closed state, thereby changing the gas flow.

[0051] In addition, a connecting pipe 5 is fixedly installed on the upper end of the housing 401 using a flange and bolts, and a flow statistics meter 6 is fixedly installed on the upper end of the connecting pipe 5, as shown in FIG. Figure 8 As shown, during use, the housing 401, the connecting pipe 5, and the flow statistics meter 6 are fixedly installed on the outside. Therefore, efficient assembly operations can be achieved during the overall assembly process without being limited by the space inside the cabinet, which slows down the assembly.

[0052] The flow statistics table 6 can count the input and output gases, and then send corresponding signals according to the situation, so as to enable the regulating motor 403 to operate.

[0053] The upper ends of the two flow statistics meters 6 are commonly fixedly installed with a three-way pipe 7, and a cavity rod 701 is fixedly and rotatably installed on the circumferential surface of the upper end of the three-way pipe 7, and a spring 702 is fixedly installed inside the cavity rod 701, and an L-shaped clamping rod 703 is fixedly installed on the upper end of the spring 702. The L-shaped clamping rod 703 can slide under the action of the spring 702. Secondly, a connector 704 is fixedly installed at the center position of the top of the three-way pipe 7. The interior of the connector 704 is a cavity structure, and a circular hole is opened from the top surface of the connector 704 to the inside, and four fan-shaped holes 705 that pass through the interior are opened on the inner side of the hole at the top of the connector 704. Figure 11 shown.

[0054] The lower end of the filter tube 8 is rotatably mounted inside the connector 704 , and sector blocks 801 are evenly fixedly mounted in an annular array on the circumferential surfaces of both ends of the filter tube 8 .

[0055] During use, the lower end of the filter tube 8 is aligned with the connector 704. At this time, the fan-shaped block 801 is passed through the fan-shaped hole 705 and enters the interior of the connector 704. Then it is rotated forty-five degrees so that the fan-shaped block 801 can be combined with the interior of the connector 704. Under the action of the fan-shaped baffle, the filter tube 8 will not slide out by itself. It should be noted that annular grooves can be opened on the circumferential surfaces of both ends of the filter tube 8, and then a sealing ring is nested inside the annular groove to prevent leakage.

[0056] Secondly, a connecting clamp tube 9 is fixedly installed from the outer side of the upper part of the upper cabinet 3 to the inside, and the two ends of the connecting clamp tube 9 are provided with the same structure as the top of the tee pipe 7. Therefore, the upper end of the filter tube 8 can be rotated and connected to the ends of the connecting clamp tubes 9 on the left and right sides located inside the upper cabinet 3 without distinction, such as Figure 12 shown.

[0057] Secondly, telescopic rods 10 are fixedly installed on both sides of the upper outer side of the upper cabinet 3, and a triangular-structured connecting plate is fixedly installed on the outer end of the telescopic rod 10. The first input connector 14, the second input connector 15 and the third input connector 16 are rotatably installed in a circular array at the end of the left triangular connecting plate away from the telescopic rod 10. The inner ends of the first input connector 14, the second input connector 15 and the third input connector 16 are the same as the two structures of the filter tube 8. Therefore, the inner ends of the first input connector 14, the second input connector 15 and the third input connector 16 can be rotated and combined with the outer end of the connecting clamp tube 9 indiscriminately.

[0058] On the right side, the triangular connecting plate is mounted on one end of the telescopic rod 10 in a counterclockwise rotational manner with a first output connector 11, a second output connector 12 and a third output connector 13. The inner ends of the first output connector 11, the second output connector 12 and the third output connector 13 have the same structure as the two ends of the filter tube 8, so that they can be rotated and connected to the outer ends of the adjacent connecting clamp tube 9 without any difference, as shown in FIG. Figure 12 shown.

[0059] Therefore, the first input connector 14, the second input connector 15, the third input connector 16, the first output connector 11, the second output connector 12 and the third output connector 13 can be fixedly connected to different external connectors, so that the device is no longer limited to a single connector, thereby increasing the diversity of use of the device.

[0060] Finally, symmetrical second card slots 304 are fixedly installed on both sides of the left side of the interior of the upper cabinet 3, and pressure gas monitors 305 are slidingly installed inside the second card slots 304 in an upper and lower symmetrical state, and alarm lights 306 are fixedly installed on both sides of the exterior of the upper cabinet 3. During use, the pressure gas monitor 305 will monitor the situation inside the cabinet in real time, and will issue a reminder through the alarm light 306 in case of any abnormality, so as to allow the operator to perform maintenance.

[0061] Working principle: The upper cabinet 3 is slidably assembled with the lower cabinet 1 using a U-shaped insert plate 301 and fixed with a U-shaped insert rod 303.

[0062] At this time, the connecting block 108 and the cross slot 107 are slidably combined, and then the storage bottle 2 is slidably installed inside the lower cabinet 1, and the lower end of the storage bottle 2 is fixed using the first card slot 101. The reciprocating motor 109 is started, and the output shaft of the reciprocating motor 109 drives the reciprocating screw 110 to rotate, allowing the slider 111 to slide downward with the ring 112. After reaching the specified height, the telescopic rod of the extrusion pump 113 is fixedly connected to the outer side of the storage bottle 2.

[0063] Secondly, on the outside, the housing 401, the connecting pipe 5 and the flow statistics meter 6 are fixedly connected. During installation, the housing 401 and the top of the storage bottle 2 are directly fixedly connected.

[0064] Secondly, a three-way pipe 7 is fixedly installed on the top of the flow statistics meter 6, and then rotated and assembled with one end of the filter tube 8. At this time, the cavity rod 701 is rotated, and the cavity rod 701 with the L-shaped clamping rod 703 fits tightly with the outer side of the lower end of the filter tube 8 to ensure that the filter tube 8 is in a stable state.

[0065] The next step is to rotate and mate the other end of the filter tube 8 with the left or right connecting clamp tube 9 according to the situation, and to rotate and assemble the external first input connector 14, second input connector 15, third input connector 16, first output connector 11, second output connector 12 and third output connector 13 with the connecting clamp tube 9 accordingly, thereby completing the assembly operation.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A special gas delivery cabinet capable of modular rapid assembly, comprising a lower cabinet (1), an upper cabinet (3) being slidably mounted on the upper end of the lower cabinet (1), characterized in that: A storage bottle (2) is slidably mounted inside the lower cabinet (1); A housing (401) is installed at the upper end of the storage bottle (2), and a closing block (410) is provided inside the housing (401); A connecting pipe (5) is provided at the upper end of the housing (401), a flow statistics meter (6) is provided at the upper end of the connecting pipe (5), a three-way pipe (7) is provided at the upper end of the flow statistics meter (6), and a filter pipe (8) is rotatably mounted at the upper end of the three-way pipe (7); Connecting clamp tubes (9) are fixedly mounted on both left and right sides of the upper outer portion of the upper cabinet (3), and first output connectors (11) and first input connectors (14) are rotatably mounted on both left and right sides of the upper outer portion of the upper cabinet (3), and the inner sides of the first output connector (11) and the first input connector (14) are rotatably connected to the outer sides of adjacent connecting clamp tubes (9); A symmetrical first card slot (101) is fixedly mounted on the inner bottom surface of the lower cabinet (1), and both sides of the lower end of the storage bottle (2) are slidably mounted inside the first card slot (101). Upper and lower symmetrical second card slots (304) are fixedly mounted on the left and right sides of the inner side of the upper cabinet (3), and a pressure gas monitor (305) is slidably mounted between the upper and lower adjacent second card slots (304). An alarm light (306) is fixedly mounted on the outer side of the upper cabinet (3); A U-shaped groove (103) is provided on the upper end surface of the lower cabinet (1), a second groove (104) is provided on the upper front end of the lower cabinet (1), an insertion hole (105) is provided from the inside of the second groove (104) to the inside of the U-shaped groove (103), a U-shaped plug plate (301) is fixedly installed on the lower end of the upper cabinet (3), the U-shaped plug plate (301) is slidably installed in the inside of the U-shaped groove (103), a through hole (302) is provided from the front end to the inside of the U-shaped plug plate (301), the through hole (302) and the insertion hole (105) are aligned, and a U-shaped plug rod (303) is slidably installed in the inside of the through hole (302) and the insertion hole (105).

2. The modular and rapidly assembled specialty gas delivery cabinet according to claim 1, characterized in that: A first vertical groove (102) is provided on the inner rear end surface of the lower cabinet (1), and positioning blocks (106) are fixedly installed at the upper and lower ends of the inner rear end surface of the lower cabinet (1) at the first groove (102), and cross grooves (107) are provided on both sides of the positioning block (106).

3. The modular and rapidly assembled specialty gas delivery cabinet according to claim 2, characterized in that: A connecting block (108) is slidably mounted inside the cross groove (107), a reciprocating motor (109) is fixedly mounted on the upper end surface of the connecting block (108), a reciprocating screw (110) is fixedly mounted on the output shaft of the reciprocating motor (109), a slider (111) is threadedly mounted on the circumferential surface of the reciprocating screw (110), a rear end of the slider (111) is slidably mounted inside the first groove (102), a circular ring (112) is fixedly mounted on the front end of the slider (111), an extrusion pump (113) is fixedly mounted on the outer circumferential surface of the circular ring (112), and the circular ring (112) is nested on the outer side of the storage bottle (2).

4. The modular and rapidly assembled specialty gas delivery cabinet according to claim 1, characterized in that: A through opening (402) is provided on the outer side of the housing (401), an adjusting motor (403) is fixedly mounted on the outer side of the housing (401), a gear (404) is fixedly mounted on the output shaft of the adjusting motor (403), a gear ring (405) is rotatably mounted inside the housing (401), and the gear ring (405) is meshed with the gear (404).

5. The modular and rapidly assembled specialty gas delivery cabinet according to claim 4, characterized in that: The lower end of the housing (401) is evenly fixedly mounted with an annular array on the inner side thereof. A through slide groove (408) is provided from the upper end face to the lower end face of the inclined plate (407). A connecting ring (409) is fixedly mounted on one inner end of the inclined plate (407). The upper end of the connecting ring (409) is fitted with the lower end face of the closing block (410). A sliding column (412) is fixedly mounted at the center position of the straight edge of the lower end face of the closing block (410). The sliding column (412) is slidably mounted inside the through slide groove (408). A limiting block (411) is fixedly mounted at the corner of the straight edge of the upper end face of the closing block (410). The lower end face of the gear ring (405) is provided with a hexagonal groove (406). The limiting block (411) is slidably mounted inside the hexagonal groove (406).

6. The modular and rapidly assembled specialty gas delivery cabinet according to claim 1, characterized in that: A symmetrical cavity rod (701) is rotatably mounted on the circumferential surface of the upper end of the three-way pipe (7), a spring (702) is fixedly mounted inside the cavity rod (701), an L-shaped clamping rod (703) is fixedly mounted on the upper end of the spring (702), and the inner side of the upper end of the L-shaped clamping rod (703) is capable of fitting with the outer side of the lower end of the filter tube (8).

7. The modular and rapidly assembled specialty gas delivery cabinet according to claim 1, characterized in that: A connector (704) is fixedly mounted at the center of the upper end surface of the tee pipe (7), and fan-shaped holes (705) are evenly opened from the upper end surface of the connector (704) to the inner annular array. Fan-shaped blocks (801) are evenly fixedly mounted in an annular array on the circumferential surfaces of both ends of the filter tube (8), and the fan-shaped blocks (801) can be rotatably mounted inside the connector (704).

8. The modular and rapidly assembled specialty gas delivery cabinet according to claim 1, characterized in that: Telescopic rods (10) are fixedly installed on both sides of the upper part of the upper cabinet (3), and the outer ends of the left and right telescopic rods (10) are rotatably connected to the adjacent first output connector (11) or the first input connector (14), and the outer ends of the left and right telescopic rods (10) are also rotatably connected to the second output connector (12), the second input connector (15), the third output connector (13) and the third input connector (16).

Images