A thin-film heat flow meter calibration device

Abstract

The application discloses a kind of film heat flow meter calibration device, it is related to heat flow meter calibration technical field, package heating module is located in the side of temperature equalizing module, the first end of heat protection module is installed on temperature equalizing module, the second end of heat protection module extends in the direction away from temperature equalizing module, the side of heat dissipation module is used to place calibration plate, calibration plate is used to place the heat flow meter to be measured on, heat protection module includes temperature equalizing block, temperature equalizing stick and multiple heat protection elements, temperature equalizing block is installed in temperature equalizing module, multiple heat protection elements are arranged around the outer periphery of temperature equalizing stick, and the first end of temperature equalizing stick and the first end of multiple heat protection elements are inserted into temperature equalizing block, the material of temperature equalizing stick and heat protection element is same, the second end of temperature equalizing stick is used to contact temperature equalizing stick on the side away from heat dissipation module, the second end of temperature equalizing stick can be completely attached with heat flow meter to be measured.The application can make heat flow meter to be measured place can generate one-dimensional uniform heat flow.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat flow meter calibration, in particular to a thin film heat flow meter calibration device. BACKGROUND

[0002] The thin film heat flow meter, which is extremely thin with a thickness of about ten to twenty microns, is composed of a sensitive layer and a thermal resistance layer, and uses one-dimensional Fourier's law to calculate the heat flow through the heat flow meter surface, and has the advantages of small volume, convenient installation, fast reaction rate, etc.

[0003] The heat flow meter calibration method is mainly divided into three types according to the generation mode of heat flow, namely, heat conduction type heat flow meter calibration method, convection type heat flow meter calibration method and radiation type heat flow meter calibration method. The common heat conduction type heat flow calibration device is mainly divided into relative method calibration and absolute method calibration.

[0004] Among them, the relative method calibration device is composed of a main heating plate, a standard heat flow sensor, a to-be-measured heat flow sensor, a cold plate, and a surrounding thermal protection component. When working, heat flow is generated by the main heating plate, passes through the standard heat flow meter and the to-be-measured heat flow meter in turn, and the to-be-measured heat flow meter is calibrated by the standard heat flow meter. However, this method is limited by the structure and performance parameters of the standard heat flow meter (standard plate) and is commonly used for low-temperature small heat flow calibration, such as the test of the thermal insulation performance of building thermal envelope structure; the absolute method calibration device does not contain a standard heat flow meter, but calculates the heat flow by calculating the electric power of the heating plate. This type of calibration device is limited by the experimental conditions and the level of thermal insulation protection, and it is difficult to achieve high-precision calibration at high temperatures.

[0005] At the same time, for the thin film heat flow meter, the sensitive layer material and the thermal resistance layer material are sputtered onto the alumina substrate through the plating process, wherein the thickness of the thermal resistance layer is 20 microns, and the sensitive layer sensing area is 4mm*4mm. Due to the existence of the thin film, the surface of the heat flow meter is not a complete plane, but has a small protrusion, which causes the heat plate and the substrate to be unable to completely adhere during calibration, and a certain air layer is formed. The simulation calculation results show that the uniform heat flow through the heat plate appears uneven on the air layer and the upper surface of the thin film, mainly because the thermal resistance is large at the air sandwiched layer, and the heat transfer is difficult, so the heat flow at the thin film is much larger than that at the air layer, and the heat flow distribution on the thin film shows a trend from the edge to the center. This is because the heat on the upper part of the air layer around the thin film cannot be transferred from the air side, thus causing horizontal heat conduction, so that the peripheral heat is transferred from the edge of the thin film. Therefore, for the calibration of the thin film heat flow meter, the conventional heat conduction type calibration device cannot meet the one-dimensional uniformity assumption, and the heat flow through the heat flow meter is different from that through the substrate and the cold plate, which cannot measure the size, resulting in the failure of the calibration device. SUMMARY

[0006] The application aims to provide a thin film heat flow meter calibration device to solve the problems of the prior art and make the measured heat flow meter generate one-dimensional uniform heat flow.

[0007] To achieve the above object, the application provides the following scheme.

[0008] The application provides a thin film heat flow meter calibration device, which comprises a heating module, a temperature equalizing module, a heat dissipation module and a heat protection module. The heating module is located on one side of the temperature equalizing module. The first end of the heat protection module is installed on the temperature equalizing module, and the second end of the heat protection module extends away from the temperature equalizing module. One side of the heat dissipation module is used for placing a calibration plate. The calibration plate is used for placing a measured heat flow meter. The heat protection module comprises a temperature equalizing block, a temperature equalizing rod and a plurality of heat protection elements. The temperature equalizing block is installed in the temperature equalizing module. The plurality of heat protection elements are arranged around the outer periphery of the temperature equalizing rod. The first end of the temperature equalizing rod and the first end of the plurality of heat protection elements are inserted into the temperature equalizing block. The temperature equalizing rod and the heat protection elements are made of the same material. The second end of the temperature equalizing rod is used for contacting the measured heat flow meter away from the heat dissipation module. The second end of the temperature equalizing rod can be completely attached to the measured heat flow meter.

[0009] In an embodiment, the heating module is a heating sheet.

[0010] In an embodiment, the heating sheet comprises tungsten wires and a ceramic base. The tungsten wires are embedded in the ceramic base. The ceramic base is made of silicon nitride ceramic material.

[0011] In an embodiment, the temperature equalizing module is a temperature equalizing plate. One side of the temperature equalizing plate is used for contacting the heating module. A through hole is formed in the middle of the temperature equalizing plate. The temperature equalizing block is installed in the through hole. An installation hole is also formed in the temperature equalizing plate. A thermocouple is installed in the installation hole.

[0012] In an embodiment, the temperature equalizing plate is made of nickel material.

[0013] In an embodiment, one side of the temperature equalizing block is provided with a plurality of temperature equalizing grooves. The first end of the temperature equalizing rod and the first end of each heat protection element are respectively inserted into corresponding temperature equalizing grooves. There is a spacing between the temperature equalizing rod and each heat protection element, and between adjacent heat protection elements.

[0014] In an embodiment, the heat protection element is a heat protection rod. The lengths of the heat protection rods are the same. The length of the heat protection rod is greater than the length of the temperature equalizing rod. The second end of the heat protection rod protrudes from the second end of the temperature equalizing rod. A thermoelectric couple is arranged on the heat protection rod. The thermoelectric couple is arranged along the length direction of the heat protection rod.

[0015] In an embodiment, the temperature uniformizing rod and the heat protection rod are made of chromium steel material, and the calibration plate is made of alumina material.

[0016] In an embodiment, the temperature uniformizing rod has a size of 4mm*4mm*25mm, the heat flow meter to be measured has a size of 4mm*4mm*0.6mm, and the calibration plate has a size of 8mm*8mm*1.4mm.

[0017] In an embodiment, the heat dissipation module comprises a heat dissipation base and a heat dissipation protrusion, the heat dissipation protrusion is fixed to one side of the middle part of the heat dissipation base, the side of the heat dissipation protrusion away from the heat dissipation base is used to contact the calibration plate, and the side of the heat dissipation base away from the heat dissipation protrusion is used to be arranged towards the air outlet of the air compressor.

[0018] The present application has the following technical effects relative to the prior art:

[0019] The thin-film heat flow meter calibration device provided by the present application has the following advantages: the heating module is located on one side of the temperature uniformizing module to provide a heat source through the heating module and achieve heat transfer through the temperature uniformizing module, the first end of the heat protection module is installed on the temperature uniformizing module, the second end of the heat protection module extends away from the temperature uniformizing module, one side of the heat dissipation module is used to place the calibration plate, the calibration plate is used to place the heat flow meter to be measured, the heat dissipation module plays a heat dissipation role, the heat protection module comprises a temperature uniformizing block, a temperature uniformizing rod and a plurality of heat protection elements, the temperature uniformizing rod is used to transfer a calibration heat flow to the heat flow meter to be measured, the temperature uniformizing block is installed in the temperature uniformizing module, the plurality of heat protection elements are arranged around the outer periphery of the temperature uniformizing rod, and the first end of the temperature uniformizing rod and the first end of the plurality of heat protection elements are inserted into the temperature uniformizing block, the circumferentially arranged heat protection elements can provide a temperature completely consistent with the temperature uniformizing rod, and since the heat protection elements have the same heat source as the temperature uniformizing rod, the overall temperature gradient of the heat protection elements tends to be similar, at this time, the temperature difference between the heat protection elements and the temperature uniformizing rod at the same horizontal position is extremely small, the heat flow meter to be measured on the side away from the heat dissipation module is used to contact the second end of the temperature uniformizing rod, the second end of the temperature uniformizing rod can be completely attached to the heat flow meter to be measured, thereby eliminating the influence of the air layer caused by the protrusion, and the heat protection elements around the temperature uniformizing rod are completely consistent with the temperature uniformizing rod in material, thereby making the heat protection elements generate the same temperature gradient as the temperature uniformizing rod, the heat insulation effect is best, the heat flow meter to be measured can generate a one-dimensional uniform heat flow, and through the above design, when calibration is performed, since the heat transfer coefficient of the temperature uniformizing rod is known, the heat flow density flowing through the temperature uniformizing rod and the heat flow meter to be measured is the same, and therefore the heat flow density flowing through the heat flow meter to be measured can be calculated through the temperature difference in the temperature uniformizing rod and calibration can be performed. BRIEF DESCRIPTION OF DRAWINGS

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the thin-film heat flow meter calibration device in this invention;

[0022] Figure 2 This is a schematic diagram of the structure of the heat dissipation module and the thermal protection module in this invention;

[0023] Figure 3 This is a schematic diagram of the temperature equalization module in this invention;

[0024] Figure 4 This is a schematic diagram of the structure of the heat dissipation module, the heat flow meter under test, and the calibration plate in this invention;

[0025] Figure 5 This is a schematic diagram of the thermal protection module in this invention;

[0026] Figure 6 This is a schematic diagram of the temperature equalization block in this invention;

[0027] In the diagram: 1-Heating module, 2-Equalizing temperature module, 3-Thermal protection rod, 4-Heat dissipation module, 5-Equalizing temperature block, 6-Heat dissipation protrusion, 7-Heat dissipation base, 8-Through hole, 9-Heat flow meter to be tested, 10-Calibration plate, 11-Equalizing temperature rod, 12-Equalizing temperature bath. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] The purpose of this invention is to provide a calibration device for a thin-film heat flow meter to solve the problems existing in the prior art, so that a one-dimensional uniform heat flow can be generated at the heat flow meter under test.

[0030] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] like Figures 1-6As shown, the embodiment provides a thin film heat flow meter calibration device, which comprises a heating module 1, a temperature equalizing module 2, a heat dissipation module 4 and a heat protection module. The heating module 1 is located on one side of the temperature equalizing module 2 to provide a heat source through the heating module 1 and realize heat transfer through the temperature equalizing module 2. The first end of the heat protection module is installed on the temperature equalizing module 2, and the second end of the heat protection module extends away from the temperature equalizing module 2. One side of the heat dissipation module 4 is used for placing a calibration plate 10, and the calibration plate 10 is used for placing a to-be-tested heat flow meter 9. The heat dissipation module 4 plays a role of heat dissipation. The heat protection module comprises a temperature equalizing block 5, a temperature equalizing rod 11 and a plurality of heat protection elements. The temperature equalizing rod 11 is used for transferring a calibration heat flow to the to-be-tested heat flow meter 9. The temperature equalizing block 5 is installed in the temperature equalizing module 2. The plurality of heat protection elements are arranged around the outer periphery of the temperature equalizing rod 11. The first end of the temperature equalizing rod 11 and the first end of the plurality of heat protection elements are inserted into the temperature equalizing block 5. The circumferentially arranged heat protection elements can provide a temperature completely consistent with the temperature equalizing rod 11. At the same time, since the heat protection elements have the same heat source as the temperature equalizing rod 11, the overall temperature gradient of the heat protection elements tends to be similar. At this time, the temperature difference between the heat protection elements at the same horizontal position and the temperature equalizing rod 11 is extremely small. The to-be-tested heat flow meter 9 is used for contacting the second end of the temperature equalizing rod 11 away from the heat dissipation module 4. The second end of the temperature equalizing rod 11 can be completely attached to the to-be-tested heat flow meter 9, thereby eliminating the influence of the air layer caused by the protrusion. At the same time, the heat protection elements around are completely consistent with the material of the temperature equalizing rod 11, thereby making the heat protection elements produce the same temperature gradient as the temperature equalizing rod 11. The heat insulation effect is best, so that a one-dimensional uniform heat flow can be generated at the to-be-tested heat flow meter 9. Moreover, through the above design. When calibrating, since the thermal conductivity coefficient of the temperature equalizing rod 11 is known, the heat flow density flowing through the temperature equalizing rod 11 and the to-be-tested heat flow meter 9 is the same. Therefore, the heat flow density flowing through the to-be-tested heat flow meter 9 can be calculated through the temperature difference in the temperature equalizing rod 11 and calibrated. The calibration principle is clear, the structure is simple, the temperature and heat flow are controllable, and the calibration precision is high.

[0032] The heating module 1 is a heating sheet. The heating sheet comprises tungsten wires and a ceramic base. The tungsten wires serve as a heating source. The tungsten wires are embedded in the ceramic base and are formed into an integral body by a hot-press sintering method, and then are ground and processed, welded with lead wires, and made into a heating sheet. The ceramic base is made of silicon nitride ceramic material, so that the surface heat load of the heating sheet can reach 250Kw / m 2 , and the temperature resistance is 1200℃.

[0033] The heating sheet is long and narrow, and is used in cooperation with the uniform temperature module 2. The uniform temperature module 2 is a uniform temperature plate, one side of the uniform temperature plate is used to contact the heating module 1, the size of the uniform temperature plate is 6cm*6cm*1cm, a through hole 8 is arranged in the middle of the uniform temperature plate, the size of the through hole 8 is 2cm*2cm*0.5cm, the uniform temperature block 5 is installed in the through hole 8, and mounting holes are further arranged on the uniform temperature plate to realize connection and positioning of the uniform temperature plate, and the mounting holes are used to install thermocouples.

[0034] The uniform temperature plate is made of nickel material with large thermal conductivity and high temperature resistance.

[0035] One side of the uniform temperature block 5 is provided with a plurality of uniform temperature grooves 12, the size of the uniform temperature block 5 is 2cm*2cm*0.5cm, the uniform temperature block 5 can be connected with the heating sheet, the first end of the uniform temperature rod 11 and the first end of each heat protection element are respectively inserted into the corresponding uniform temperature groove 12, the heat flow passes through the uniform temperature block 5, the uniform temperature rod 11 and the to-be-measured heat flow meter 9 in sequence, and there is a spacing between the uniform temperature rod 11 and each heat protection element and between adjacent heat protection elements.

[0036] The heat protection element is a heat protection rod 3, the lengths of the heat protection rods 3 are the same, and the length of the heat protection rod 3 is greater than the length of the uniform temperature rod 11, the second end of the heat protection rod 3 protrudes from the second end of the uniform temperature rod 11, and a thermocouple is arranged on the heat protection rod 3, the thermocouple is arranged along the length direction of the heat protection rod 3, as an optional solution, an opening is arranged at 8mm and 23mm of the length direction of the uniform temperature rod 11, the diameter of the opening is 1mm, the depth of the opening is 1mm, and the thermocouple is arranged in the opening.

[0037] The uniform temperature rod 11 and the heat protection rod 3 are made of chromium steel (WCr=5%), and the calibration plate 10 is made of aluminum oxide material.

[0038] The size of the uniform temperature rod 11 is 4mm*4mm*25mm, the size of the heat protection rod 3 is 4mm*4mm*27mm, the size of the to-be-measured heat flow meter 9 is 4mm*4mm*0.6mm, and the size of the calibration plate 10 is 8mm*8mm*1.4mm.

[0039] The heat dissipation module 4 includes a heat dissipation seat 7 and a heat dissipation protrusion 6, the heat dissipation protrusion 6 is fixed to one side of the middle of the heat dissipation seat 7, one side of the heat dissipation protrusion 6 away from the heat dissipation seat 7 is used to contact the calibration plate 10, and one side of the heat dissipation seat 7 away from the heat dissipation protrusion 6 is used to be arranged towards the air outlet of the air compressor, so that the heat dissipation seat 7 is impacted and cooled by the high-speed airflow generated by the air compressor and the air nozzle, and heat dissipation is realized. The heat dissipation module 4 is made of nickel material, the size of the heat dissipation protrusion 6 is 2cm*2cm*1cm, and the size of the heat dissipation seat 7 is 6cm*6cm*1cm.

[0040] The embodiment can provide 0 DEG C.-1000 DEG C., maximum 300KW / m 2 Uniform heat flow, the calibration relative error is less than 3%, solves the problem that the air interlayer caused by the film bulge during the calibration of the film heat flow meter makes the one-dimensional uniformity of the heat flow not meet the premise, and the calibration device is invalid.

[0041] The basic principle of the embodiment for measuring the to-be-measured heat flow meter 9 is one-dimensional Fourier law, when the heat flow passes through the surface of the to-be-measured heat flow meter 9, a temperature difference is generated on the upper and lower surfaces of the thermal resistance layer due to heat transfer, at this time, the temperature difference is measured by a certain way, and the size of the heat flow can be calculated according to one-dimensional Fourier law, wherein the calculation formula of the heat flow is as follows:

[0042]

[0043] In the formula, q is the heat flow passing through the surface of the to-be-measured heat flow meter 9, lambda is the thermal conductivity of the thermal resistance layer, delta is the thickness of the thermal resistance layer, T1 and T2 are the temperatures of the upper and lower surfaces of the thermal resistance layer respectively.

[0044] The principle and implementation mode of the embodiment are described by applying specific examples in the application, and the above embodiment is only used for helping to understand the method and core idea of the application; meanwhile, for the general technical personnel in the field, according to the idea of the application, the specific implementation mode and application range will be changed. In conclusion, the content of the specification should not be understood as the limitation of the application.

Claims

1. A thin-film heat flow meter calibration device, characterized by: The application relates to a heat flow meter calibration device, which comprises a heating module, a temperature equalizing module, a heat dissipating module and a heat protection module, the heating module is located on one side of the temperature equalizing module, the first end of the heat protection module is installed on the temperature equalizing module, the second end of the heat protection module extends away from the temperature equalizing module, one side of the heat dissipating module is used for placing a calibration plate, the calibration plate is used for placing a to-be-tested heat flow meter, the heat protection module comprises a temperature equalizing block, a temperature equalizing rod and a plurality of heat protection elements, the temperature equalizing block is installed in the temperature equalizing module, the plurality of heat protection elements are arranged around the outer periphery of the temperature equalizing rod, the first end of the temperature equalizing rod and the first end of the plurality of heat protection elements are inserted into the temperature equalizing block, the temperature equalizing rod and the heat protection elements are made of the same material, the second end of the temperature equalizing rod is used for contacting the to-be-tested heat flow meter on the side away from the heat dissipating module, and the second end of the temperature equalizing rod can be completely attached to the to-be-tested heat flow meter.

2. The thin-film heat flow meter calibration device of claim 1, wherein: The heating module is a heating sheet.

3. The thin-film heat flow meter calibration device of claim 2, wherein: The heating sheet comprises tungsten wires and a ceramic base body, the tungsten wires are embedded in the ceramic base body, and the ceramic base body is made of silicon nitride ceramic material.

4. The thin-film heat flow meter calibration device of claim 1, wherein: The temperature equalizing module is a temperature equalizing plate, one side of the temperature equalizing plate is used for contacting the heating module, a through hole is formed in the middle of the temperature equalizing plate, the temperature equalizing block is installed in the through hole, and a mounting hole is further formed in the temperature equalizing plate and used for mounting a thermocouple.

5. The thin-film heat flow meter calibration device of claim 4, wherein: The temperature equalizing plate is made of nickel material.

6. The thin-film heat flow meter calibration device of claim 1, wherein: One side of the temperature equalizing block is provided with a plurality of temperature equalizing grooves, the first end of the temperature equalizing rod and the first end of each heat protection element are respectively inserted into corresponding temperature equalizing grooves, and a spacing exists between the temperature equalizing rod and each heat protection element and between adjacent heat protection elements.

7. The thin-film heat flow meter calibration device of claim 6, wherein: The heat protection elements are heat protection rods, the lengths of the heat protection rods are the same, the length of each heat protection rod is greater than the length of the temperature equalizing rod, the second end of each heat protection rod protrudes from the second end of the temperature equalizing rod, and a thermoelectric couple is arranged on the heat protection rod and arranged along the length direction of the heat protection rod.

8. The thin-film heat flow meter calibration device of claim 7, wherein: The temperature equalizing rod and the heat protection rod are both made of chromium steel material, and the calibration plate is made of alumina material.

9. The thin-film heat flow meter calibration device of claim 7, wherein: The size of the temperature equalizing rod is 4mm*4mm*25mm, the size of the to-be-tested heat flow meter is 4mm*4mm*0.6mm, and the size of the calibration plate is 8mm*8mm*1.4mm.

10. The thin-film heat flow meter calibration device of claim 1, wherein: The heat dissipating module comprises a heat dissipating seat and a heat dissipating protrusion, the heat dissipating protrusion is fixed on one side of the middle part of the heat dissipating seat, the side of the heat dissipating protrusion away from the heat dissipating seat is used for contacting the calibration plate, and the side of the heat dissipating seat away from the heat dissipating protrusion is used for being arranged towards the air outlet of an air compressor.

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